CN110327780A - A kind of gas-liquid separation device based on micropore film wire - Google Patents
A kind of gas-liquid separation device based on micropore film wire Download PDFInfo
- Publication number
- CN110327780A CN110327780A CN201910516192.4A CN201910516192A CN110327780A CN 110327780 A CN110327780 A CN 110327780A CN 201910516192 A CN201910516192 A CN 201910516192A CN 110327780 A CN110327780 A CN 110327780A
- Authority
- CN
- China
- Prior art keywords
- film wire
- gas
- liquid
- micropore film
- micropore
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D19/00—Degasification of liquids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
- B01D61/14—Ultrafiltration; Microfiltration
- B01D61/147—Microfiltration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D63/00—Apparatus in general for separation processes using semi-permeable membranes
- B01D63/02—Hollow fibre modules
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
Abstract
The present invention relates to a kind of gas-liquid separation devices based on micropore film wire.The gas-liquid separation device includes upper end cover, micropore film wire, film wire upper end snap ring, film wire lower end snap ring, lower cover, shell.Biphase gas and liquid flow enters gas-liquid cushion chamber by the fluid inlet of lower cover, it is further separated into the micropore film wire of separator by gas-liquid cushion chamber, pressure difference is established between gas cushion chamber inside micropore film wire using vacuum pump, due to the effect of micropore film wire selective resistance gear liquid, liquid passes through gas buffer chamber inside micropore film wire, by upper end cover liquid outlet pump drainage；And gas permeable micropore film wire enters gas buffer chamber, by upper and lower end caps bleeding point (negative pressure mouth) by pump drainage.The present invention has the advantages that gas-liquid separation is high-efficient, cavity pressure fluctuation is low, compact-sized, small in size.The separation of gas and liquid is able to achieve using this gas-liquid separation device and is separately recovered, caused pipeline vibration problem when biphase gas and liquid flow recycling is avoided.
Description
Technical field
The invention belongs to the gas and liquid separation technology field for lithographic equipment, more particularly, to a kind of based on micropore film wire
Gas-liquid separation device.
Background technique
Modern lithographic equipment accurately projects the figure on mask plate simultaneously based on optical lithography, using optical system
It is exposed on the substrate (such as: silicon wafer) of coated photoresist.It is including a laser light source, an optical system, one piece by chip
The projection mask of figure composition, a substrate to Barebone and a covering photosensitive photoresist.
Immersion lithographic system fills certain liquid in the gap between projecting lens and substrate, by improving the gap
The numerical aperture (NA) of refractive index (n) the Lai Tigao projecting lens of middle medium, to improve the resolution ratio and depth of focus of photoetching.At present
Frequently with scheme be local immersion method, i.e., liquid is limited in above silicon wafer between the lower surface of last a piece of projection objective
Regional area in, and the liquid of steady and continuous is kept to flow.In stepping-scan-type lithographic equipment, silicon wafer is in exposure process
The middle scanning motion for carrying out high speed, the liquid in exposure area can take away flow field by this movement, so as to cause leakage, leakage
Liquid can form water mark on a photoresist, influence exposure quality.All there is gas-liquid in removal process in existing gas sealing mechanism
The two is put together and recycles the vibration that will cause pipeline, to seriously affect exposure quality by the problem of two phase flow.Therefore,
Necessary emphasis solves the vibration problem as caused by biphase gas and liquid flow in removal process in immersion lithography.
The generally existing low separation efficiency of existing gas-liquid separator, the problems such as pressure oscillation (vibration) is big, volume is big, this hair
The bright gas-liquid separation device based on micropore film wire in lithographic equipment realizes gas using the hydrophobic performance of micropore film wire
It the separation of body and liquid and is separately recovered, avoids caused pipeline vibration problem when biphase gas and liquid flow recycling.Gas-liquid separation effect
Rate is high, and pressure oscillation is low, compact-sized, small in size.
Summary of the invention
The object of the invention is just to provide a kind of gas-liquid separation device based on micropore film wire.
The present invention includes upper end cover, micropore film wire component, film wire upper end snap ring, film wire lower end snap ring, lower cover, shell；
The upper end cover and lower cover is arranged in shell two sides, constitutes gas buffer chamber with shell.Micropore film wire component, micropore film wire
Upper end snap ring, the setting of micropore film wire lower end snap ring are intracavitary in gas buffer, and micropore film wire component both ends pass through film wire lower end respectively
Snap ring, film wire upper end snap ring are fixed at lower cover, on upper end cover.
Gas-liquid cushion chamber is formed between the film wire lower end snap ring and lower cover；It is provided on lower cover into fluid through-hole, is entered
The side of fluid through-hole connects with gas-liquid cushion chamber, and the external pipe that runner is recycled in the other side and submergence control unit connects.
Fluid cushion chamber is formed between the film wire upper end snap ring and upper end cover；Fluid through-hole is provided with out on upper end cover, out
The side of fluid through-hole connects with fluid cushion chamber, and the other side is connected by external pipe with water pump.Gas buffer chamber passes through setting
Bleeding point and aspirator vacuum pump connect on upper end cover or lower cover；Micropore film wire component includes Justified more microporous barriers
Silk, micropore film wire are hollow fiber film thread.
Further, it is described enter fluid through-hole be provided with according to recycling runner number it is multiple.
Further, the micropore film wire side wall has through-hole of the dimension less than 1 micron.
Preferably, the micropore film wire is made of polypropylene or polytetrafluoroethylene material.
Further, circle mounting plate outstanding is installed on the outer side of shell face.
Preferably, being disposed with 4~6 mounting holes on the mounting plate, the installation for gas-liquid separation device is fixed.
Preferably, the micropore film wire is fixed on film wire upper end snap ring and film wire lower end snap ring by way of gluing
On.
Further, the contact angle of the surface of the micropore film wire and liquid is greater than 90 °.
Biphase gas and liquid flow of the present invention enters gas-liquid cushion chamber from the gas-liquid two-phase inflow entrance of lower cover cover board, slow by gas-liquid
Chamber is rushed to flow into micropore film wire；It is mentioned in the gas bleeding point (negative pressure mouth) of upper end cover and the gas bleeding point (negative pressure mouth) of lower cover
For negative pressure, make to generate certain pressure difference inside gas buffer chamber and micropore film wire, under the action of pressure difference, gas is from micropore film wire
Inside enters gas buffer chamber through membranous wall, is drained by gas bleeding point (negative pressure mouth) pumping of upper and lower end cap, simultaneously because micro-
The hydrophobic performance of hole film wire, liquid can not enter gas buffer chamber through membranous wall, the outlet of top entered under the action of pressure difference
Cushion chamber from the liquid outlet of upper end cover by pump drainage, to realize the separation of biphase gas and liquid flow.
The present invention selectively stops the principle of gas and liquid using microporous barrier, realizes the separation and difference of gas and liquid
Recycling avoids caused pipeline vibration problem when biphase gas and liquid flow recycling.The present invention has the advantages that gas-liquid separation efficiency
Height, cavity pressure fluctuation is low, compact-sized, small in size.
Detailed description of the invention
Fig. 1 is the lithographic equipment using the specific embodiment of the invention one；
Fig. 2 is the structural schematic diagram of the specific embodiment of the invention；
Fig. 3 is the cross-sectional view that Fig. 2 installs Board position；
Fig. 4 is the schematic illustration of the specific embodiment of the invention；
Specific embodiment
In the following, being described in detail with reference to accompanying drawings, the present invention relates to a kind of gas-liquid separation devices based on micropore film wire.
As shown in Figure 1, submergence 3 center of control unit is provided with through-hole in immersed photoetching machine, liquid-supplying system is controlled to submergence
Unit 3 processed provides liquid 4, and there are gap between projection objective 1 and substrate 2, hydraulically full 4 in the gap, laser is by projection
Object lens 1 pass through the central through hole of submergence control unit 3 after assembling, subsequently into the liquid 4 in gap, since liquid 4 is to laser
Refractive index it is bigger than air, thus optical path medium refractive index increase, photoetching resolution improve.Due to generating heat in exposure process
Amount and pollutant can deteriorate the optical characteristics of liquid 4, therefore submerge control unit 3 by way of uninterruptedly injecting and recycling
So that liquid 4 is in continuous updating state.Submerging in control unit 3 has fluid injection runner 31 and recycling runner 32, carrys out liquid self-feeding
For the liquid 4 of system through fluid injection runner 31 constantly by injection gap, recycling runner 32 constantly takes the liquid 4 for leaving exposure area away
To avoid pollution.In order to guarantee that the liquid 4 for flowing out exposure area can be recovered completely, recycle inevitably same in runner 32
When sucking liquid 4 and air, form biphase gas and liquid flow.Biphase gas and liquid flow has vibration acutely and the danger of liquid evaporation refrigeration
Evil, a kind of gas-liquid separation device 5 based on micropore film wire of the present invention are proposed for this drawback.Gas-liquid separation device
5 are applied in the gas-liquid two-phase removal process of immersed photoetching machine, and the biphase gas and liquid flow from recycling runner 32 passes through exterior tube
Road enters after gas-liquid separation device 5 by film wire component 500, and most of or even whole air passes through film wire component 500 and taken out
Gas vacuum pump 7 is taken away, remaining small part air and whole liquid are taken away by the inner passage of film wire component 500 by water pump 6；
After the separation and recovery of gas-liquid separation device 5, gas ratio is substantially reduced in the fluid that water pump 6 is taken away, therefore fluid flowing is drawn
The vibration and temperature fluctuation risen is also improved.
Specific embodiment: as shown in Fig. 2, a kind of gas-liquid separation device based on micropore film wire in present embodiment, packet
Include upper end cover 501, micropore film wire component 506, film wire upper end snap ring 505, film wire lower end snap ring 512, lower cover 508, shell
507.Upper end cover 501 and lower cover 508 are arranged in 507 two sides of shell, constitute gas buffer chamber 513 with shell 507.Micropore film wire
Component 506, micropore film wire upper end snap ring 505, micropore film wire lower end snap ring 512 are arranged in gas buffer chamber 513, micropore film wire
506 both ends of component pass through film wire lower end snap ring 512 respectively, film wire upper end snap ring 505 is fixed at lower cover 508, upper end cover
On 501.
Gas-liquid cushion chamber 511 is formed between film wire lower end snap ring 512 and lower cover 508；It is provided on lower cover 508 logical into liquid
Hole 510, the side for entering fluid through-hole 510 connect with gas-liquid cushion chamber 511, recycle runner 32 in the other side and submergence control unit 3
External pipe connect.According to 32 quantity of recycling runner of submergence control unit 3, multiple fluids can be correspondingly arranged and enter fluid through-hole
510。
Fluid cushion chamber 503 is formed between film wire upper end snap ring 505 and upper end cover 501；It is logical that liquid is provided with out on upper end cover 501
Hole 502, the side of fluid through-hole 502 connects with fluid cushion chamber 503 out, and the other side is connected by external pipe with water pump 6.
Gas buffer chamber 513 is connect by bleeding point 504 with aspirator vacuum pump 7；In the present embodiment, 501 He of upper end cover
A bleeding point 504 is respectively provided on lower cover 508.
As shown in figure 3, micropore film wire component 506 includes Justified more micropore film wires, 506 liang of micropore film wire component
End connects and is fixed with film wire upper end snap ring 505, film wire lower end snap ring 512 respectively, and every micropore film wire side wall has dimension
Through-hole less than 1 micron, due to the surface tension effects of gas-liquid interface, hole is smaller, it is necessary to which bigger pressure difference could drive
Hydrodynamic body passes through hole；It is worn when the pressure difference in micropore film wire component 506 in the axial direction of more micropore film wires is less than driving liquid
When pressure difference needed for excessive root micropore film wire, liquid can be along the shaft orientation flowing channel flowing of more micropore film wires, influent buffering
Chamber 503；And gas can pass through more micropore film wire lateral through aperture in micropore film wire component 506 and enter gas buffer chamber 513
In, to achieve the purpose that gas-liquid separation.
More micropore film wires select hollow fiber film thread made of polypropylene or polytetrafluoroethylene material, polypropylene or poly-
The contact of gas-liquid separation efficiency, polypropylene or polytetrafluoroethylene material to liquid can be improved in the hydrophobic performance of tetrafluoroethene material
Angle is bigger, and the critical pressure difference that liquid passes through more micropore film wires is also bigger, and the microporous barrier wire material constituted is not limited to
Polypropylene or polytetrafluoroethylene material.In addition, due to being installed in parallel using more micropore film wires, the minim gap between micropore film wire
Gas buffer chamber 513 can be entered to penetration by liquid micropore film wire and form certain resistance, being further reduced liquid, to enter gas slow
A possibility that rushing chamber 513.Circle mounting plate 514 outstanding is installed on 507 lateral surface of shell, is disposed with peace on mounting plate 514
Hole is filled, the installation for gas-liquid separation device is fixed.
The working principle of the invention: as shown in figure 4, the biphase gas and liquid flow from submergence control unit 3, by fluid inlet
After 510 enter gas-liquid cushion chamber 511, into lower end by the inside stream of the fixed micropore film wire component 506 of film wire lower end snap ring 512
In road；Micropore film wire component 506 has the function of that selectivity stops gas and liquid；Gas passes through microporous barrier under differential pressure action
The hole of silk 506 enters gas buffer chamber 513, then through bleeding point 504 and by 7 recycling of aspirator vacuum pump；Liquid is not due to having
It obtains enough pressure differentials and is stopped by the resistance of micropore film wire, micropore film wire 506 can not be passed through, it can only be along micropore film wire
506 inner flow passage flowing is pooled in fluid cushion chamber 503, is then recycled by fluid outlet 502 by water pump 6；By micro-
After hole film wire 506, the gas ratio in biphase gas and liquid flow is greatly reduced, or even is changed into pure liquid phase stream, vibration and temperature wave
Therefore fatigue resistance also reduces.Above-mentioned specific embodiment is used to illustrate the present invention, rather than limits the invention,
In scope of protection of the claims of the invention, to any modifications and changes that the present invention makes, protection of the invention is both fallen within
Range.
Claims (8)
1. a kind of gas-liquid separation device based on micropore film wire, including upper end cover, micropore film wire component, film wire upper end snap ring, film
Silk lower end snap ring, lower cover, shell；It is characterized by: the upper end cover and lower cover are arranged in shell two sides, with shell structure
At gas buffer chamber；Micropore film wire component, micropore film wire upper end snap ring, micropore film wire lower end snap ring are arranged in gas buffer chamber
Interior, micropore film wire component both ends pass through film wire lower end snap ring respectively, film wire upper end snap ring is fixed at lower cover, upper end cover
On；
Gas-liquid cushion chamber is formed between the film wire lower end snap ring and lower cover；It is provided on lower cover into fluid through-hole, it is logical to enter liquid
The side in hole connects with gas-liquid cushion chamber, and the external pipe that runner is recycled in the other side and submergence control unit connects；
Fluid cushion chamber is formed between the film wire upper end snap ring and upper end cover；Fluid through-hole is provided with out on upper end cover, liquid is logical out
The side in hole connects with fluid cushion chamber, and the other side is connected by external pipe with water pump；Gas buffer chamber is by being arranged upper
Bleeding point and aspirator vacuum pump connect on end cap or lower cover；Micropore film wire component includes Justified more micropore film wires,
Micropore film wire is hollow fiber film thread.
2. a kind of gas-liquid separation device based on micropore film wire according to claim 1, it is characterised in that: described enters liquid
Through-hole is provided with multiple according to recycling runner number.
3. a kind of gas-liquid separation device based on micropore film wire according to claim 1, it is characterised in that: the micropore
Film wire side wall has through-hole of the dimension less than 1 micron.
4. a kind of gas-liquid separation device based on micropore film wire according to claim 1, it is characterised in that: the micropore
Film wire is made of polypropylene or polytetrafluoroethylene material.
5. a kind of gas-liquid separation device based on micropore film wire according to claim 1, it is characterised in that: the shell
Circle mounting plate outstanding is installed on lateral surface.
6. a kind of gas-liquid separation device based on micropore film wire according to claim 5, it is characterised in that: the installation
4~6 mounting holes are disposed on plate, the installation for gas-liquid separation device is fixed.
7. a kind of gas-liquid separation device based on micropore film wire according to claim 1, it is characterised in that: the micropore
Film wire is fixed on film wire upper end snap ring and film wire lower end snap ring by way of gluing.
8. a kind of gas-liquid separation device based on micropore film wire according to claim 1, it is characterised in that: the microporous barrier
The surface of silk and the contact angle of liquid are greater than 90 °.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910516192.4A CN110327780A (en) | 2019-06-14 | 2019-06-14 | A kind of gas-liquid separation device based on micropore film wire |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910516192.4A CN110327780A (en) | 2019-06-14 | 2019-06-14 | A kind of gas-liquid separation device based on micropore film wire |
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| CN110327780A true CN110327780A (en) | 2019-10-15 |
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| CN201910516192.4A Pending CN110327780A (en) | 2019-06-14 | 2019-06-14 | A kind of gas-liquid separation device based on micropore film wire |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111830796A (en) * | 2020-07-15 | 2020-10-27 | 浙江启尔机电技术有限公司 | Immersion liquid supply and recovery device with novel pumping and drainage assembly and immersion liquid pumping and drainage method |
| CN112305867A (en) * | 2019-07-31 | 2021-02-02 | 上海微电子装备（集团）股份有限公司 | Immersion liquid is retrieved and is prevented disturbance device, immersion head gas-liquid circulation system and lithography apparatus |
| CN112684674A (en) * | 2020-12-29 | 2021-04-20 | 浙江启尔机电技术有限公司 | Immersion liquid supply and recovery system and immersion flow field initial establishment method |
| CN113189849A (en) * | 2021-04-22 | 2021-07-30 | 中国科学院光电技术研究所 | Near-field photoetching immersion system and immersion unit and interface module thereof |
| WO2022088218A1 (en) * | 2020-10-29 | 2022-05-05 | 浙江启尔机电技术有限公司 | Immersion fluid recovery system and immersion fluid recovery method using said system |
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| CN109126323A (en) * | 2018-10-17 | 2019-01-04 | 苏州名列膜材料有限公司 | A kind of gas liquid separation element, gas-liquid separation component and gas-liquid separator |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112305867A (en) * | 2019-07-31 | 2021-02-02 | 上海微电子装备（集团）股份有限公司 | Immersion liquid is retrieved and is prevented disturbance device, immersion head gas-liquid circulation system and lithography apparatus |
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| CN111830796B (en) * | 2020-07-15 | 2024-01-02 | 浙江启尔机电技术有限公司 | Immersion liquid supply and recovery device with novel pumping assembly and immersion liquid pumping method |
| WO2022088218A1 (en) * | 2020-10-29 | 2022-05-05 | 浙江启尔机电技术有限公司 | Immersion fluid recovery system and immersion fluid recovery method using said system |
| CN112684674A (en) * | 2020-12-29 | 2021-04-20 | 浙江启尔机电技术有限公司 | Immersion liquid supply and recovery system and immersion flow field initial establishment method |
| CN113189849A (en) * | 2021-04-22 | 2021-07-30 | 中国科学院光电技术研究所 | Near-field photoetching immersion system and immersion unit and interface module thereof |
| CN113189849B (en) * | 2021-04-22 | 2023-08-11 | 中国科学院光电技术研究所 | Near-field photoetching immersion system, immersion unit and interface module thereof |
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Application publication date: 20191015 |