CN110320636A - A kind of metallic mirror support construction and metallic mirror system - Google Patents

A kind of metallic mirror support construction and metallic mirror system Download PDF

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Publication number
CN110320636A
CN110320636A CN201910754021.5A CN201910754021A CN110320636A CN 110320636 A CN110320636 A CN 110320636A CN 201910754021 A CN201910754021 A CN 201910754021A CN 110320636 A CN110320636 A CN 110320636A
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CN
China
Prior art keywords
mirror
reflecting mirror
backboard
support construction
metallic
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CN201910754021.5A
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Chinese (zh)
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CN110320636B (en
Inventor
谭淞年
许永森
周平伟
石磊
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Priority to CN201910754021.5A priority Critical patent/CN110320636B/en
Publication of CN110320636A publication Critical patent/CN110320636A/en
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors

Abstract

Metallic mirror support construction provided by the invention, it include: pedestal and reflecting mirror backboard, the reflecting mirror backboard is fixedly connected with the pedestal, optical mirror is fixedly connected with the reflecting mirror backboard, the reflecting mirror backboard includes flexible strutting piece, the optical mirror is mounted in the plane where the flexible strutting piece, when there are when rigging error for the reflecting mirror, the flexible strutting piece can be compensated by the flexible deformation of itself, metallic mirror support construction provided by the invention, when optical mirror is by gravity, when temperature change acts on and there are when rigging error, flexible strutting piece is compensated by the flexible deformation of itself, it avoids influencing reflecting mirror surface shape precision.In addition, the present invention also provides a kind of metallic mirror systems including the metallic mirror support construction.

Description

A kind of metallic mirror support construction and metallic mirror system
Technical field
The present invention relates to optical processing technology field, in particular to a kind of metallic mirror support construction.
Background technique
Refractive and reflective optical system is widely used in the fields such as optical measurement and remote sensing.With the rapid development of science and technology, light The refractive and reflective optical system of electric remote sensing equipment develops towards dexterous type, lightweight and high-resolution direction, to refraction-reflection type optical system More stringent requirements are proposed for volume, weight of system etc..For metallic mirror since it is short with the process-cycle, processing technology is good, The advantages such as material price is low, are gradually applied in refractive and reflective optical system.
Metallic mirror is the core element of refractive and reflective optical system, to reach the high-resolution requirement of detector, it is necessary to Guarantee that it has the optical surface profile precision of high quality.For this purpose, structure needs to disappear using reflecting mirror flexible structure bracket etc. when designing Stress technique has reasonable constraint to meet reflecting mirror under rotating torque, gravitational field, vibration and thermal environment, guarantees detection The high imaging quality requirement of device.When the variation of metallic mirror operative orientation, the flexible structure of reflecting mirror easily leads to surface figure accuracy Be deteriorated, therefore it is required that reflecting mirror flexible support structure respectively to etc. rigidity.
Field is supported in spacing reflection mirror, existing patent name is " adjustable reflecting mirror Bipod flexible support structure and branch Support arrangement ", application No. is 201720931601.3 patents, using reflecting mirror Bipod flexible structure perimeter support mode, the hair Typical reflectance mirror material in bright is carbofrax material, can satisfy the support requirement of spacing reflection mirror, but can not directly answer Support for metallic mirror.Meanwhile when there is space restrictive condition, reflecting mirror can not be needed by the way of perimeter support Back-supported is used, and for using back Bipod flexible support structure scheme, reflecting mirror can generate astigmatism, be unable to satisfy Optical index.
Summary of the invention
Have in view of that, it is necessary in view of the defects existing in the prior art, provide a kind of compact-sized, high metal of stability Reflecting mirror support structure.
To achieve the above object, the present invention adopts the following technical solutions:
A kind of support construction of metallic mirror, comprising: pedestal and reflecting mirror backboard, the reflecting mirror backboard and the base Seat is fixedly connected, and optical mirror is fixedly connected with the reflecting mirror backboard, and the reflecting mirror backboard includes flexible strutting piece, institute It states in the plane where optical mirror is mounted on the flexible strutting piece, it is described when the reflecting mirror is there are when rigging error Flexible strutting piece can be compensated by the flexible deformation of itself.
In some preferred embodiments, the pedestal is annular in shape, the center of the reflecting mirror backboard and the pedestal Center be overlapped, the reflecting mirror backboard is fixed by screws on the pedestal.
In some preferred embodiments, reflecting mirror backboard center is overlapped with the center of the optical mirror, institute Reflecting mirror is stated to be fixed by screws on the reflecting mirror backboard.
In some preferred embodiments, further include an at least positioning pin, the mounting surface of the optical mirror be equipped with The positioning pin is connect by transition fit with the optical mirror with the pin hole made, the positioning pin, the reflecting mirror back Plate is equipped with the positioning pin with the pin hole made, between the positioning pin passes through in the identical bits of the mounting surface of the optical mirror Gap cooperation is connect with reflecting mirror backboard.
In some preferred embodiments, the both ends of the positioning pin are realized and the light by laser welding mode respectively Learn being fixedly connected for reflecting mirror and the reflecting mirror backboard.
In some preferred embodiments, the positioning pin is three, centered on the central axis of the optical mirror Fixed diameter circumference be equipped with the positioning pin with make three pin holes, in the same diameter circumference of the reflecting mirror backboard The corresponding positioning pin in place matches the pin hole made there are three setting.
In some preferred embodiments, the quantity of the flexible strutting piece is at least three, and with reflecting mirror back Plate center is that the center of circle is evenly distributed on a circumference.
In some preferred embodiments, any one flexible strutting piece is also connected with end portion connection block, the end Link block is equipped with front boss, and the front boss is equipped with the pin hole that positioning is connect with the optical mirror, the optics Reflecting mirror is mounted in plane composed by three front boss.
In some preferred embodiments, the reflecting mirror backboard further includes connection ring, and the connection ring is equipped with rear convex Platform, the rear boss quantity are at least three, the plane that the flexible strutting piece is formed by three rear boss with it is described Pedestal is connected.
In some preferred embodiments, the radius optimal size of circumference where the flexible strutting piece is that the optics is anti- Penetrate the 0.645 of mirror diameter dimension.
In some preferred embodiments, the flexible strutting piece is made of three flexible links, and three flexible links In cone on spatial arrangement, the same angle of any one two twenty percent of flexible strutting piece is uniformly distributed along circular cone center line.
In some preferred embodiments, any one flexible link is including the soft section of a radial direction and along the soft section of the radial direction The tangential soft section in symmetrically arranged two of both ends, the soft section of radial direction and tangential soft section are mutually orthogonal, and the soft section of the radial direction and There is fillet in the tangential soft section junction.
In some preferred embodiments, the flexible link is symmetrically distributed along center line, and three flexible links are certainly The extended line of body center line is met at a bit, and the intersection point of the flexible link center line extended line of flexible strutting piece described in multiple groups forms one Virtual plane, optical axis of the virtual plane perpendicular to the optical mirror.
In addition, the present invention also provides a kind of metallic mirror system, the support construction including the metallic mirror.
The present invention by adopting the above technical scheme the advantages of be:
Metallic mirror support construction provided by the invention, comprising: pedestal and reflecting mirror backboard, the reflecting mirror backboard with The pedestal is fixedly connected, and optical mirror is fixedly connected with the reflecting mirror backboard, and the reflecting mirror backboard includes flexible branch Support member, the optical mirror is mounted in the plane where the flexible strutting piece, when there are rigging errors for the reflecting mirror When, the flexible strutting piece can be compensated by the flexible deformation of itself, metallic mirror support construction provided by the invention, When optical mirror is acted on by gravity, temperature change and there are the bullets that when rigging error, flexible strutting piece passes through itself Property deformation compensate, avoid influence mirror deformation precision.
In addition, metallic mirror system provided by the invention, can be used to implement metallic mirror in visible light wave range Using surface precision is better than 1/50 λ (λ=632.8nm), and will not generate astigmatism.
Metallic mirror support construction provided by the invention can for coaxial optical systems such as Cassegrain optical systems To save the arrangement space of lens group in optical mirror center, entire coaxial optical system is had compressed in mirror light The size of axis direction, compact layout.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with Other attached drawings are obtained according to these attached drawings.
Fig. 1 is the structural schematic diagram of metallic mirror support construction provided in an embodiment of the present invention;
Fig. 2 is the main view of metallic mirror support construction provided in an embodiment of the present invention.
Fig. 3 is the A-A cross-sectional view of metallic mirror support construction provided in an embodiment of the present invention.
Fig. 4 is the reflecting mirror backboard schematic diagram of metallic mirror support construction provided in an embodiment of the present invention.
Fig. 5 is the reflecting mirror backboard cross-sectional view of metallic mirror support construction provided in an embodiment of the present invention.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts all other Embodiment shall fall within the protection scope of the present invention.
It please refers to Fig.1 to Fig.3, for a kind of structural representation for metallic mirror support construction that the embodiment of the present invention 1 provides Figure, comprising: pedestal 4 and reflecting mirror backboard 2, the reflecting mirror backboard 2 are fixedly connected with the pedestal 4, optical mirror 1 and institute It states reflecting mirror backboard 2 to be fixedly connected, the reflecting mirror backboard 2 includes flexible strutting piece, and the optical mirror 1 is mounted on described In plane where flexible strutting piece, when the reflecting mirror is there are when rigging error, the flexible strutting piece can by itself Flexible deformation compensates.
It is appreciated that the flexible strutting piece using metallic mirror backboard is simple for structure, flexible strutting piece is added by five axis The processing methods such as work center, wire cutting and 3D printing (increases material manufacturing technology) shape, stable and reliable in work.
In some preferred embodiments, the pedestal 4 is annular in shape, the center of the reflecting mirror backboard 2 and the base The center of seat 4 is overlapped, and the reflecting mirror backboard 2 is fixed by screws on the pedestal 4.
In some preferred embodiments, 2 center of reflecting mirror backboard is overlapped with the center of the optical mirror 1, The optical mirror 1 is fixed by screws on the reflecting mirror backboard 2.
In some preferred embodiments, metallic mirror support construction further includes that an at least positioning pin 3, the optics is anti- The mounting surface for penetrating mirror 1 is equipped with the positioning pin 3 with the pin hole (not shown) made, and the positioning pin 3 passes through transition fit and institute State optical mirror 1 connection, the reflecting mirror backboard 2 the identical bits of the mounting surface of the optical mirror 1 be equipped with it is described Positioning pin 3 is connect by clearance fit with reflecting mirror backboard 2 with the pin hole (not shown) made, the positioning pin 3.
Specifically, in use, positioning pin 3 is placed in the corresponding pin hole location of optical mirror 1, positioning pin 3 first It is located through clearance fit with optical mirror 1 and controls, fit tolerance is that unilateral gap is not more than 0.05mm;Positioning pin 3 After installation, positioning pin 3 and optical mirror 1 are attached by laser welding mode in the back direction of optical mirror 1, It is sequentially connected positioning pin 3 at another two.
It is appreciated that there is corresponding pin hole at the same diameter circumference of reflecting mirror backboard 1, pin hole and positioning pin 3 match work, Fit tolerance is that unilateral gap is not more than 0.05mm;Reflecting mirror backboard 2 and optical mirror 1 are assembled, it is fixed by three Position pin 3 is positioned, and after installation, optical mirror 1 is fixed on reflecting mirror backboard 2 with mounting screw, in optical mirror 1 Back direction positioning pin 3 and reflecting mirror backboard 2 are attached by laser welding mode, complete the peace of all support constructions Dress.
Metallic mirror support construction provided by the invention, optical mirror 1 by pin hole and reflecting mirror backboard 2 with make with Positioning pin 3 realizes positioning, and positioning pin 3 is connect with reflecting mirror backboard 2 by welding manner, realizes and is accurately positioned, optical mirror 1 The local thermal stress generated by welding is eliminated by subsequent heat treatment.
It is appreciated that the thermal stress generated during laser welding can be by the realization of subsequent heat treatment process Stress removal.In actual application, since 3 material of positioning pin is consistent with the material of metallic mirror 1, reflecting mirror backboard 2, Stress will not be generated, in variation of ambient temperature so as to avoid traditional taper bolt (stainless steel material) and metallic mirror (6061) difference of material can have an impact reflecting mirror surface shape because of linear expansion coefficient difference in variation of ambient temperature.
It is appreciated that positioning pin 3 or taper bolt, positioning pin 3 can realize optical mirror 1 by interference fit With the accurate positioning of reflecting mirror backboard 2.
Fig. 4 and Fig. 5 is please referred to, the quantity of flexible strutting piece 21 is at least three, and is with 2 center of reflecting mirror backboard The center of circle is evenly distributed on a circumference, and 120 degree of uniform intervals are distributed on installation diameter circumference.
Further, any one flexible strutting piece 21 is also connected with end portion connection block 23.The end portion connection block 23 It is equipped with front boss 27, the front boss 27 is equipped with the pin hole that positioning is connect with the optical mirror 1, and the optics is anti- Mirror 1 is penetrated to be mounted in plane composed by three front boss 27.
It is appreciated that in actual use, 27 surface grinding of front boss is to guarantee that three front boss 27 have good plane Degree.
In some preferred embodiments, the reflecting mirror backboard 2 further includes connection ring 22, and the connection ring 22 is equipped with Rear boss 28,28 quantity of rear boss are at least three, and the flexible strutting piece 21 passes through three formation of rear boss 28 Plane be connected with the pedestal 4.
It is appreciated that in actual use, 28 surface grinding of rear boss is to guarantee that three rear boss 27 have good plane Degree.
It is appreciated that being deformed for reflecting mirror backboard 2 using the elasticity of flexure of flexible strutting piece 21, three end connections Small displacement may be implemented relative to connection ring 22 for block 23, for compensating erection stress and because answering in caused by gravity, temperature Power.Tripod flexible support structure 21, which is integrated, to be shaped, it is ensured that the stability and reliability of support effect.
In some preferred embodiments, the radius optimal size of the 21 place circumference of flexible strutting piece is the optics The 0.645 of 1 diameter dimension of reflecting mirror.
In some preferred embodiments, the flexible strutting piece 21 is made of three flexible links, and three flexibilities In cone on spatial arrangement, the same angle of any one two twenty percent of flexible strutting piece is uniformly distributed bar along circular cone center line.
In some preferred embodiments, any one flexible link includes the soft section 24 of a radial direction and soft along the radial direction The tangential soft section 25 in symmetrically arranged two of both ends of section 24, the soft section 24 of radial direction and tangential soft section 25 are mutually orthogonal and described There are fillet in radial soft section 24 and tangential soft 25 junction of section.
It is appreciated that the flexible structure of flexible link can be cylindrical, planar sheet or both ends in flexible strutting piece 21 It is relatively large in diameter, the lesser flexible link of mid diameter.
Specifically, one end of radial soft section 24 is connected by soft section link block 26 with one end of tangential soft section 25, this is tangential The other end of soft section 25 is connect with end portion connection block 23;The other end of radial soft section 24 passes through soft section link block 26 and tangential soft section 25 one end are connected, and the other end of the tangential soft section 24 is connected with connection ring 22.
In some preferred embodiments, the flexible link is symmetrically distributed along center line, and three flexible links are certainly The extended line of body center line meets at a point b, and the intersection point of the flexible link center line extended line of flexible strutting piece 21 described in multiple groups is formed One virtual plane a, virtual plane a are perpendicular to the optical axis of the optical mirror 1, and the center of gravity of reflecting mirror is in virtual plane a It is interior, allow reflecting mirror to obtain optimal surface figure accuracy, and astigmatism will not be generated.
It is appreciated that in practical applications, can thickness, width and height equidimension to section soft in flexible link as excellent The variable for changing design can obtain the suitable rigidity of flexible support structure, meet whole system and want to the mode of mirror assembly It asks.
Metallic mirror support construction provided by the invention, when optical mirror by gravity, temperature change act on when with And there are when rigging error, flexible strutting piece is compensated by the flexible deformation of itself, avoids influencing mirror deformation precision, Wherein, mirror shape precision is better than 1/50 λ (λ=632.8nm) under gravity, will not generate astigmatism.
Metallic mirror support construction provided by the invention can for coaxial optical systems such as Cassegrain optical systems To save the arrangement space of lens group in optical mirror center, entire coaxial optical system is had compressed in mirror light The size of axis direction, compact layout.
Certainly metallic mirror support construction of the invention can also have a variety of transformation and remodeling, it is not limited to above-mentioned reality Apply the specific structure of mode.In short, protection scope of the present invention should include that those show to those skilled in the art And the transformation or substitution that are clear to and remodeling.

Claims (14)

1. a kind of support construction of metallic mirror characterized by comprising pedestal and reflecting mirror backboard, the reflecting mirror back Plate is fixedly connected with the pedestal, and optical mirror is fixedly connected with the reflecting mirror backboard, and the reflecting mirror backboard includes soft Property supporting element, the optical mirror is mounted in the plane where the flexible strutting piece, assembles when the reflecting mirror exists When error, the flexible strutting piece can be compensated by the flexible deformation of itself.
2. metallic mirror support construction as described in claim 1, which is characterized in that the pedestal is annular in shape, described anti- The center for penetrating mirror backboard is overlapped with the center of the pedestal, and the reflecting mirror backboard is fixed by screws on the pedestal.
3. metallic mirror support construction as described in claim 1, which is characterized in that reflecting mirror backboard center with it is described The center of optical mirror is overlapped, and the optical mirror is fixed by screws on the reflecting mirror backboard.
4. metallic mirror support construction as claimed in claim 3, which is characterized in that it further include an at least positioning pin, it is described The mounting surface of optical mirror is equipped with the positioning pin with the pin hole made, and the positioning pin passes through transition fit and the optics Reflecting mirror connection, the identical bits of mounting surface of the reflecting mirror backboard in the optical mirror are equipped with the positioning pin with work Pin hole, the positioning pin connect by clearance fit with reflecting mirror backboard.
5. metallic mirror support construction as claimed in claim 4, which is characterized in that the both ends of the positioning pin pass through respectively Laser welding mode is realized to be fixedly connected with the optical mirror and the reflecting mirror backboard.
6. metallic mirror support construction as claimed in claim 4, which is characterized in that the positioning pin is three, with described Fixed diameter circumference centered on the central axis of optical mirror is equipped with the positioning pin with three pin holes made, described Corresponded at the same diameter circumference of reflecting mirror backboard the positioning pin set there are three with make pin hole.
7. metallic mirror support construction as described in claim 1, which is characterized in that the quantity of the flexible strutting piece is at least It is three, and is evenly distributed on a circumference by the center of circle of reflecting mirror backboard center.
8. metallic mirror support construction as claimed in claim 7, which is characterized in that any one flexible strutting piece also connects It is connected to end portion connection block, the end portion connection block is equipped with front boss, and the front boss is equipped with to be connected with the optical mirror The pin hole of positioning is connect, the optical mirror is mounted in plane composed by three front boss.
9. metallic mirror support construction as described in claim 1, which is characterized in that the reflecting mirror backboard further includes connection Ring, the connection ring are equipped with rear boss, and the rear boss quantity is at least three, and the flexible strutting piece passes through described in three The plane that rear boss is formed is connected with the pedestal.
10. metallic mirror support construction as claimed in claim 7, which is characterized in that circumference where the flexible strutting piece Radius be the optical mirror diameter dimension 0.645.
11. metallic mirror support construction as claimed in claim 10, which is characterized in that the flexible strutting piece is soft by three Property bar composition, and three flexible links on spatial arrangement in cone, the same angle of any one two twenty percent of flexible strutting piece, It is uniformly distributed along circular cone center line.
12. metallic mirror support construction as claimed in claim 11, which is characterized in that any one flexible link includes one The soft section of a radial direction and along the tangential soft section in symmetrically arranged two of the both ends of the soft section of the radial direction, the soft section of radial direction and tangential soft section It is mutually orthogonal, and there are fillet in the soft section of the radial direction and the tangential soft section junction.
13. metallic mirror support construction as claimed in claim 12, which is characterized in that the flexible link is along center line It is symmetrically distributed, and the extended line of three flexible link center lines is met at a bit, the flexible link of flexible strutting piece described in multiple groups The intersection point of center line extended line forms a virtual plane, virtual plane perpendicular to the optical mirror optical axis, and it is described The center of gravity of reflecting mirror is in the virtual plane.
14. a kind of metallic mirror system, which is characterized in that including the described in any item metallic mirrors of claim 1 to 13 Support construction.
CN201910754021.5A 2019-08-15 2019-08-15 Metal reflector supporting structure and metal reflector system Active CN110320636B (en)

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Cited By (4)

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Publication number Priority date Publication date Assignee Title
CN111650717A (en) * 2020-05-09 2020-09-11 中国科学院西安光学精密机械研究所 Surface-shaped high-stability reflector assembly and assembling method thereof
CN112162380A (en) * 2020-10-22 2021-01-01 中国科学院长春光学精密机械与物理研究所 Flexible supporting structure of medium and small-diameter reflector
CN114355553A (en) * 2021-11-30 2022-04-15 中国科学院西安光学精密机械研究所 Large-caliber light-weight reflector assembly, assembly and adjustment detection assembly and adjustment detection method
CN114578505A (en) * 2022-03-11 2022-06-03 中国科学院长春光学精密机械与物理研究所 Back three-point supporting structure of space large-diameter reflector

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CN108717223A (en) * 2018-05-29 2018-10-30 上海交通大学 It is tensioned platform and is tensioned platform combination device with Film Optics shape face
CN109239887A (en) * 2018-11-28 2019-01-18 中国科学院长春光学精密机械与物理研究所 Space optical remote sensor large-scale circular reflecting mirror flexible support structure
CN109633859A (en) * 2018-12-13 2019-04-16 中国科学院西安光学精密机械研究所 A kind of large-aperture optical reflecting mirror with back flexible support structure

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CN204129308U (en) * 2014-10-23 2015-01-28 中国工程物理研究院总体工程研究所 A kind of large caliber reflecting mirror back flexible supporting device
CN107329231A (en) * 2017-07-28 2017-11-07 中国科学院西安光学精密机械研究所 Adjustable speculum Bipod flexible support structures, support meanss and its Method of Adjustment
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CN111650717A (en) * 2020-05-09 2020-09-11 中国科学院西安光学精密机械研究所 Surface-shaped high-stability reflector assembly and assembling method thereof
CN112162380A (en) * 2020-10-22 2021-01-01 中国科学院长春光学精密机械与物理研究所 Flexible supporting structure of medium and small-diameter reflector
CN114355553A (en) * 2021-11-30 2022-04-15 中国科学院西安光学精密机械研究所 Large-caliber light-weight reflector assembly, assembly and adjustment detection assembly and adjustment detection method
CN114578505A (en) * 2022-03-11 2022-06-03 中国科学院长春光学精密机械与物理研究所 Back three-point supporting structure of space large-diameter reflector

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