CN110312368B - Personnel isolation observation box and substrate processing equipment - Google Patents

Personnel isolation observation box and substrate processing equipment Download PDF

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Publication number
CN110312368B
CN110312368B CN201910580602.1A CN201910580602A CN110312368B CN 110312368 B CN110312368 B CN 110312368B CN 201910580602 A CN201910580602 A CN 201910580602A CN 110312368 B CN110312368 B CN 110312368B
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China
Prior art keywords
personnel
observation box
isolation observation
suction
transparent gate
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CN201910580602.1A
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CN110312368A (en
Inventor
李腾腾
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Suzhou Hirose Opto Co Ltd
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Suzhou Hirose Opto Co Ltd
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/30Details of processes not otherwise provided for in H05K2203/01 - H05K2203/17
    • H05K2203/304Protecting a component during manufacturing

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Prevention Of Fouling (AREA)
  • Ventilation (AREA)
  • Devices For Use In Laboratory Experiments (AREA)

Abstract

The invention relates to the technical field of printed circuit board processing equipment, in particular to a personnel isolation observation box and substrate processing equipment. The personnel isolation observation box provided by the invention comprises a personnel platform and a closed cover, wherein the personnel platform is used for accommodating workers; the closed cover covers the personnel platform so that the personnel platform is positioned in the closed space. The enclosure includes transparent gate, and the staff can observe the outside that personnel kept apart the observation box through transparent gate to the realization can keep apart staff and processing equipment under the condition that does not influence the staff and observes base plate processing state, eliminates the risk that the pollution sources got into processing equipment. According to the substrate processing equipment provided by the invention, the requirement on the cleanliness class of the substrate processing equipment can be ensured by applying the personnel isolation observation box.

Description

Personnel isolation observation box and substrate processing equipment
Technical Field
The invention relates to the technical field of printed circuit board processing equipment, in particular to a personnel isolation observation box and substrate processing equipment.
Background
The substrate is a basic material for manufacturing the printed circuit board, and in the manufacturing process of the substrate, in order to meet the processing requirement of high cleanliness of the substrate, the cleanliness grade of substrate processing equipment needs to be ensured. At present, when the staff gets into the base plate processing workshop, generally need disinfect to the staff in order to avoid the dust that the staff carried to cause the pollution to the base plate processing equipment. However, it is difficult to clean up dust carried by a worker in a general sterilization process performed on the worker, and therefore, when the worker needs to observe a processing state of a substrate, there is a risk of bringing the dust into a substrate processing apparatus.
Therefore, a person isolation observation box is needed to solve the above problems.
Disclosure of Invention
One object of the present invention is to provide a personnel isolation observation box capable of isolating a worker from a processing apparatus without affecting the observation of a processing state of a substrate by the worker, and eliminating a risk of a contamination source entering the processing apparatus.
Another object of the present invention is to provide a substrate processing apparatus, which can ensure the cleanliness class requirement of the substrate processing apparatus by using the above personnel isolation observation box.
In order to realize the purpose, the following technical scheme is provided:
a people isolation observation box comprising:
the personnel platform is used for accommodating workers;
the closing cap is established so that on the personnel platform is located the enclosure space, the closing cap includes transparent gate, the staff can pass through transparent gate observes personnel keep apart the outside of observing the case.
Further, the system also comprises a lifting driving mechanism, wherein the lifting driving mechanism can drive the transparent gate to move up and down relative to the personnel platform so as to enable the personnel platform to be positioned in the closed space or the semi-closed space.
Furthermore, the lifting driving mechanism comprises a driver and a transmission rod, the driver is arranged on the closed cover, one end of the transmission rod is connected with the driver, the other end of the transmission rod is connected with the transparent gate, and the driver can drive the transmission rod to move up and down so as to drive the transparent gate to move up and down.
Further, still including being located the inside first dust absorption mechanism of enclosure, first dust absorption mechanism sets up on the enclosure for absorb the inside particulate matter of personnel isolation observation case.
Further, the first dust suction mechanism comprises a first air suction pipe and an absorption cavity which are communicated, the first air suction pipe is configured to be communicated with external air suction equipment, an absorption hole is formed in the absorption cavity, and particulate matters in the personnel isolation observation box are absorbed through the absorption hole.
Furthermore, the two first air suction pipes are symmetrically arranged at two ends of the absorption cavity.
Further, still including being located the outside second dust absorption mechanism of closing cap, second dust absorption mechanism set up in the below of transparent gate, second dust absorption mechanism sets up on the closing cap, be used for absorbing the outside particulate matter of personnel isolation observation box.
Further, the second dust suction mechanism comprises a second suction pipe and a collecting tank which are communicated, the second suction pipe is configured to be communicated with external air suction equipment, and the opening of the collecting tank faces to the transparent gate.
Further, a plurality of the second suction pipes are arranged in a row along the extending direction of the collecting tank.
A substrate processing apparatus comprising:
a personnel isolation observation box as described above; and
and the processing device is arranged on one side of the transparent gate of the personnel isolation observation box.
Compared with the prior art, the invention has the beneficial effects that:
the personnel isolation observation box provided by the invention comprises a personnel platform and a closed cover, wherein the personnel platform is used for accommodating workers; the closed cover covers the personnel platform so that the personnel platform is positioned in the closed space. The enclosure includes transparent gate, and the staff can observe the outside that personnel kept apart the observation box through transparent gate to the realization can keep apart staff and processing equipment under the condition that does not influence the staff and observes base plate processing state, eliminates the risk that the pollution sources got into processing equipment.
According to the substrate processing equipment provided by the invention, the requirement on the cleanliness class of the substrate processing equipment can be ensured by applying the personnel isolation observation box.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments of the present invention will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the contents of the embodiments of the present invention and the drawings without creative efforts.
FIG. 1 is a schematic view of a one-way structure of a personnel isolation observation box provided by the invention;
FIG. 2 is an enlarged view taken at A in FIG. 1;
FIG. 3 is a schematic view of another direction of the isolation observation box for people according to the present invention;
FIG. 4 is a front view of the personnel isolation observation box provided by the present invention with the transparent gate open;
FIG. 5 is a schematic structural view of a first dust suction mechanism according to the present invention;
FIG. 6 is an enlarged view at B in FIG. 4;
FIG. 7 is a schematic structural view of a second dust suction mechanism provided by the present invention;
fig. 8 is a schematic structural diagram of a substrate processing apparatus according to the present invention.
Reference numerals:
100-personnel isolation observation box; 200-a processing device;
1-a closed cover; 11-a transparent gate;
2-a lifting driving mechanism; 21-a driver; 22-a transmission rod;
3-a first dust suction mechanism; 31-a first inspiratory tube; 32-an absorption cavity; 321-adsorption holes;
4-a second dust suction mechanism; 41-a second suction pipe; 42-a collection tank;
5-opening and closing the door.
Detailed Description
In order to make the technical solutions of the present invention better understood by those skilled in the art, the technical solutions of the present invention are further described below by way of specific embodiments with reference to the accompanying drawings.
In the description of the present invention, it should be noted that the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings or orientations or positional relationships conventionally laid out when the product is used, and are only for convenience of description of the present invention, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.
Furthermore, the terms "first," "second," and the like are used for descriptive purposes only or to distinguish between different structures or components and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that unless otherwise explicitly stated or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection or a removable connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
The embodiment provides an observation case is kept apart to personnel, is applicable to the higher processing equipment of cleanliness factor requirement, keeps apart observation case 100 through personnel in order to observe the processing conditions of processing equipment, prevents that the pollutant that the staff carried from polluting the processing equipment. The personnel isolation observation box 100 is also suitable for substrate processing equipment, and can avoid polluting substrates.
As shown in fig. 1, the personnel isolation observation box 100 provided in this embodiment includes a personnel platform for accommodating workers and a sealing cover 1; the enclosure 1 covers the personnel platform so that the personnel platform is located in the enclosed space. In addition, the enclosure 1 includes the transparent gate 11, and the staff can observe the outside that personnel kept apart the observation box 100 through transparent gate 11 to the realization can keep apart staff and substrate processing equipment under the condition that does not influence the staff and observe the base plate processing state, eliminates and takes the risk of pollution source into substrate processing equipment.
Preferably, as shown in fig. 2, in order to improve the applicability of the personnel isolation observation box 100, the personnel isolation observation box 100 further comprises a lifting driving mechanism 2, and the lifting driving mechanism 2 can drive the transparent gate 11 to move up and down relative to the personnel platform so as to enable the personnel platform to be located in the closed space or the semi-closed space.
Preferably, the transparent gate 11 is made of a transparent acrylic material.
Preferably, the lifting driving mechanism 2 comprises a driver 21 and a transmission rod 22, the driver 21 is arranged on the closed cover 1, one end of the transmission rod 22 is connected with the driver 21, the other end of the transmission rod 22 is connected with the transparent gate 11, and the driver 21 can drive the transmission rod 22 to move up and down to drive the transparent gate 11 to move up and down.
Illustratively, the actuator 21 is a linear air cylinder capable of driving the transmission rod 22 to move up and down to move the transparent shutter 11 up and down.
Furthermore, guide rails are arranged on two sides of the transparent gate 11, the extending direction of the guide rails is perpendicular to the personnel platform, and the transparent gate 11 can slide along the extending direction of the guide rails under the driving of the lifting driving mechanism 2, so that the movement of the transparent gate 11 is more stable.
In the embodiment, when the requirement on the cleanliness of the processing equipment is high, the transparent gate 11 is moved upwards by the lifting driving mechanism 2, so that the personnel platform is positioned in the closed space, the working personnel is isolated from the processing equipment, and the processing equipment is prevented from being polluted; when the requirement on the cleanliness of the processing equipment is not high, the transparent gate 11 is moved downwards through the lifting driving mechanism 2, so that the personnel platform is positioned in a semi-closed space, and the working personnel can directly observe the processing condition of the processing equipment conveniently. In other embodiments, the transparent gate 11 may move downwards to position the personnel platform in the semi-closed space, and the transparent gate 11 may move upwards to position the personnel platform in the closed space.
Illustratively, in this embodiment, the personnel isolation observation box 100 is a hexahedron, and the transparent gate 11 is disposed on one surface of the personnel isolation box, wherein, in the same surface, the enclosure covers 1 on both sides of the transparent gate 11 are transparent enclosure covers, so that the observable range of the personnel isolation observation box 100 is expanded, and the working condition of the processing equipment can be observed by the working personnel conveniently. Illustratively, the transparent enclosure 1 is made of transparent acrylic material.
Further, in the same surface of the personnel isolation observation box 100, the sealing cover 1 below the transparent gate 11 is an opaque sealing cover 1, and the opaque sealing cover 1 is made of black aluminum-plastic plate.
Alternatively, in order to facilitate the manufacture of the personnel isolation observation box 100, the personnel isolation observation box 100 is divided into an upper part and a lower part, the personnel platform is arranged inside the lower part, the transparent gate 11 is arranged on one surface of the lower part, and the transparent gate 11 can move upwards to abut against the upper part, so that the personnel platform is positioned in the sealed space.
Optionally, an illumination device is disposed in the upper portion of the personnel isolation observation box 100 to improve the brightness inside the personnel isolation observation box 100, so that the personnel can move in the personnel isolation observation box 100 conveniently, and the personnel can observe the processing condition of the processing equipment conveniently.
Illustratively, as shown in fig. 3, an opening and closing door 5 is provided on a side of the personnel isolation observation box 100 opposite to the transparent gate 11, and a worker enters a personnel platform inside the personnel isolation observation box 100 by opening the opening and closing door 5.
Preferably, as shown in fig. 4 to 5, in order to ensure the cleanliness requirement of the processing equipment, the personnel isolation observation box 100 further comprises a first dust suction mechanism 3 located inside the personnel isolation observation box 100, and the first dust suction mechanism 3 is arranged on the closed cover 1 and is used for absorbing the particles inside the personnel isolation observation box 100.
Further, the first dust suction mechanism 3 includes a first suction pipe 31 and an absorption cavity 32 which are communicated, the first suction pipe 31 is configured to be communicated with an external suction device, and an absorption hole 321 is arranged on the absorption cavity 32, and the particles in the observation box 100 are absorbed through the absorption hole 321.
Preferably, the two first air suction pipes 31 are symmetrically arranged at two ends of the absorption cavity 32 to improve the effect of the absorption cavity 32 on absorbing particles such as dust.
Preferably, the plurality of suction holes 321 are uniformly arranged along the length direction of the absorption chamber 32 to improve the dust suction effect of the absorption chamber 32.
When the transparent gate 11 moves up and down, particles such as dust are easily suspended, and in order to prevent the particles such as dust from entering the processing equipment, the absorption cavity 32 is exemplarily located below the transparent gate 11, and the length of the absorption cavity 32 is the same as that of the transparent gate 11, so as to absorb the particles such as dust brought up by the movement of the transparent gate 11. In particular, as shown in fig. 6, when the personnel platform is in a semi-enclosed space, the absorption cavity 32 is located above the transparent shutter 11; when the personnel platform is in an enclosed space, the absorption chamber 32 is located below the transparent gate 11.
Optionally, as shown in fig. 7 in combination with fig. 4, the personnel isolation observation box 100 further includes a second dust suction mechanism 4 located outside the personnel isolation observation box 100, the second dust suction mechanism 4 is disposed below the transparent shutter 11, and the second dust suction mechanism 4 is disposed on the enclosure 1 and is used for absorbing particulate matters outside the personnel isolation observation box 100. Specifically, the second dust suction mechanism 4 is located below the first dust suction mechanism 3 to better absorb particles such as dust outside the person isolation observation box 100.
Preferably, the second suction duct 4 comprises a second suction duct 41 and a collecting gutter 42 communicating with each other, the second suction duct 41 being configured to communicate with an external suction device, a negative pressure being created in the collecting gutter 42 by the second suction duct 41, the collecting gutter 42 opening towards the transparent shutter 11, so as to facilitate the passage of particles of dust and the like from the opening of the collecting gutter 42 into the collecting gutter 42.
Further, a plurality of second suction ducts 41 are arranged in line along the extension direction of the collecting trough 42. In the present embodiment, the first suction pipe 31 and the second suction pipe 41 are commonly connected to the same external suction device so as to control the opening and closing of the first suction mechanism 3 and the second suction mechanism 4 at the same time.
Preferably, the second dust suction mechanism 4 further comprises an air blowing pipe, an air outlet of the air blowing pipe is arranged downwards towards the opening direction of the collecting tank 42, so that particulate matters such as dust are conveniently gathered towards the collecting tank 42 under the action of air blown out by the air blowing pipe, and the absorption effect of the collecting tank 42 on the particulate matters such as dust is improved.
As shown in fig. 8, the present embodiment further provides a substrate processing apparatus including the above-mentioned personnel isolation observation box 100 and the processing device 200, wherein the processing device 200 is disposed at one side of the transparent gate 11 of the personnel isolation observation box 100, so that a worker can observe the processing condition of the main equipment of the mechanic on a personnel platform in the personnel isolation observation box 100.
Preferably, the transparent gate 11 of the personnel isolation observation box 100 is attached to the opening of the processing device 200, so that a worker can better observe the processing condition of the substrate in the processing device 200.
Preferably, the gas blowing pipe is disposed above the processing device 200, and the gas outlet of the gas blowing pipe faces the opening direction of the collecting groove 42, so as to improve the collecting effect of the collecting groove 42 on the particles such as dust.
It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present invention and the technical principles employed. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail by the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present invention, and the scope of the present invention is determined by the scope of the appended claims.

Claims (8)

1. A people isolation observation box, comprising:
the personnel platform is used for accommodating workers;
the closed cover (1) is covered on the personnel platform so that the personnel platform is located in a closed space, the closed cover (1) comprises a transparent gate (11), and the personnel can observe the outside of the personnel isolation observation box (100) through the transparent gate (11);
the first dust collection mechanism (3) is positioned inside the closed cover (1), and the first dust collection mechanism (3) is arranged on the closed cover (1) and is used for absorbing particles inside the personnel isolation observation box (100);
second dust absorption mechanism (4), be located the closing cap (1) is outside, second dust absorption mechanism (4) set up in the below of transparent gate (11), just second dust absorption mechanism (4) set up on the closing cap (1), be used for absorbing the outside particulate matter of observation case (100) is kept apart to personnel.
2. People isolation observation box according to claim 1, further comprising a lift driving mechanism (2), wherein the lift driving mechanism (2) can drive the transparent gate (11) to move up and down relative to the people platform so that the people platform is located in a closed space or a semi-closed space.
3. The people isolation observation box according to claim 2, wherein the lifting driving mechanism (2) comprises a driver (21) and a transmission rod (22), the driver (21) is arranged on the closed cover (1), one end of the transmission rod (22) is connected with the driver (21), the other end of the transmission rod is connected with the transparent gate (11), and the driver (21) can drive the transmission rod (22) to move up and down to drive the transparent gate (11) to move up and down.
4. The people isolation observation box according to claim 1, wherein the first dust suction mechanism (3) comprises a first suction pipe (31) and an absorption cavity (32) which are communicated, the first suction pipe (31) is configured to be communicated with external suction equipment, and the absorption cavity (32) is provided with an absorption hole (321), and particulate matters in the people isolation observation box (100) are absorbed through the absorption hole (321).
5. People isolation observation box according to claim 4, characterized in that two first suction pipes (31) are symmetrically arranged at both ends of the suction chamber (32).
6. People isolation observation box according to claim 1, characterized in that the second suction mechanism (4) comprises a second suction duct (41) and a collecting gutter (42) in communication, the second suction duct (41) being configured to communicate with external suction equipment, the collecting gutter (42) opening towards the transparent shutter (11).
7. People isolation observation box according to claim 6, characterized in that a plurality of second suction ducts (41) are arranged in line along the extension of the collecting gutter (42).
8. A substrate processing apparatus, comprising:
-a people isolation observation box (100) according to any of claims 1-7; and
and the processing device (200) is arranged on one side of the transparent gate (11) of the personnel isolation observation box (100).
CN201910580602.1A 2019-06-28 2019-06-28 Personnel isolation observation box and substrate processing equipment Active CN110312368B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910580602.1A CN110312368B (en) 2019-06-28 2019-06-28 Personnel isolation observation box and substrate processing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910580602.1A CN110312368B (en) 2019-06-28 2019-06-28 Personnel isolation observation box and substrate processing equipment

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CN110312368A CN110312368A (en) 2019-10-08
CN110312368B true CN110312368B (en) 2020-09-29

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201420413Y (en) * 2009-05-13 2010-03-10 张小京 Movable isolating room
CN201908376U (en) * 2010-12-02 2011-07-27 北京建工集团有限责任公司 Organic glass interior wall partition
CN103395074A (en) * 2013-07-31 2013-11-20 上海千山远东制药机械有限公司 Charging type manned cleaning movable small car used in special environments
CN208236021U (en) * 2018-05-10 2018-12-14 广东电网有限责任公司 Construction operation cabin

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201420413Y (en) * 2009-05-13 2010-03-10 张小京 Movable isolating room
CN201908376U (en) * 2010-12-02 2011-07-27 北京建工集团有限责任公司 Organic glass interior wall partition
CN103395074A (en) * 2013-07-31 2013-11-20 上海千山远东制药机械有限公司 Charging type manned cleaning movable small car used in special environments
CN208236021U (en) * 2018-05-10 2018-12-14 广东电网有限责任公司 Construction operation cabin

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