CN110312368A - A kind of personnel quarantine case and substrate processing equipment - Google Patents

A kind of personnel quarantine case and substrate processing equipment Download PDF

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Publication number
CN110312368A
CN110312368A CN201910580602.1A CN201910580602A CN110312368A CN 110312368 A CN110312368 A CN 110312368A CN 201910580602 A CN201910580602 A CN 201910580602A CN 110312368 A CN110312368 A CN 110312368A
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CN
China
Prior art keywords
personnel
case
quarantine
platform
transparent gate
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Granted
Application number
CN201910580602.1A
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Chinese (zh)
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CN110312368B (en
Inventor
李腾腾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Suzhou Hirose Opto Co Ltd
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Suzhou Hirose Opto Co Ltd
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Priority to CN201910580602.1A priority Critical patent/CN110312368B/en
Publication of CN110312368A publication Critical patent/CN110312368A/en
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/30Details of processes not otherwise provided for in H05K2203/01 - H05K2203/17
    • H05K2203/304Protecting a component during manufacturing

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Devices For Use In Laboratory Experiments (AREA)
  • Ventilation (AREA)
  • Prevention Of Fouling (AREA)

Abstract

It quarantines case and substrate processing equipment the present invention relates to printed circuit board processing device technical field more particularly to a kind of personnel.The personnel provided by the invention case that quarantines includes personnel's platform and seal bootr, and personnel's platform is for accommodating staff;Seal bootr is located on personnel's platform so that personnel's platform is located in enclosure space.Seal bootr includes transparent gate, staff can observe that personnel quarantine the outside of case by transparent gate, to realize in the case where not influencing staff's observation substrate machining state, staff can be isolated with process equipment, eliminate the risk that pollution sources enter process equipment.Substrate processing equipment provided by the invention can guarantee the cleaniliness classs requirement of substrate processing equipment by quarantining case using above-noted persons.

Description

A kind of personnel quarantine case and substrate processing equipment
Technical field
It quarantines case and substrate the present invention relates to printed circuit board processing device technical field more particularly to a kind of personnel Process equipment.
Background technique
Substrate is the basic material for manufacturing printed circuit board, in substrate manufacturing process, to meet substrate high-cleanness, high Processing request needs to guarantee the cleaniliness classs of substrate processing equipment.Currently, when staff enters substrate processing workshop, Substrate processing equipment is polluted to avoid the dust of staff's carrying it is generally necessary to carry out disinfection to staff.So And the disinfection treatment generally carried out to staff is difficult to clean out the dust that staff carries, therefore, as work people When member needs to observe the machining state of substrate, there is the risk that dust is brought into substrate processing equipment.
It would therefore be highly desirable to which a kind of personnel is needed to quarantine case to solve the above problems.
Summary of the invention
It quarantines case it is an object of the present invention to provide a kind of personnel, adds not influencing staff and observe substrate In the case where work state, staff can be isolated with process equipment, eliminate the risk that pollution sources enter process equipment.
It is another object of the present invention to provide a kind of substrate processing equipments, by quarantining using above-noted persons Case can guarantee the cleaniliness classs requirement of substrate processing equipment.
To achieve the above object, the following technical schemes are provided:
A kind of personnel quarantine case, comprising:
Personnel's platform, for accommodating staff;
Seal bootr is located on personnel's platform so that personnel's platform is located in enclosure space, the seal bootr Including transparent gate, the staff can observe that the personnel quarantine the outside of case by the transparent gate.
It further, further include lift drive mechanism, the lift drive mechanism can drive the transparent gate opposite It moves up and down in personnel's platform, so that personnel's platform is located in enclosure space or hemi-closure space.
Further, the lift drive mechanism includes driver and drive rod, and the driver is arranged in the closing On cover, one end of the drive rod is connected with the driver, and the other end is connected with the transparent gate, the driving Device can drive the drive rod to move up and down to drive the transparent gate to move up and down.
It further, further include the first dust collection mechanism being located inside the seal bootr, the first dust collection mechanism setting On the seal bootr, the particulate matter that quarantines inside case for absorbing the personnel.
Further, first dust collection mechanism includes the first air intake duct being connected and absorbs cavity, and described first inhales Tracheae is configured as being connected with extraneous air-extractor, is provided with adsorption hole on the absorption cavity, passes through the adsorption hole Absorb the particulate matter that the personnel quarantine in case.
Further, two first air intake ducts are symmetricly set on the both ends for absorbing cavity.
It further, further include the second dust collection mechanism being located at outside the seal bootr, the second dust collection mechanism setting In the lower section of the transparent gate, second dust collection mechanism is arranged on the seal bootr, for absorbing personnel's isolation Observe the particulate matter outside case.
Further, second dust collection mechanism includes the second air intake duct and collecting tank being connected, second air-breathing Pipe is configured as being connected with extraneous air-extractor, and the opening of the collecting tank is towards the transparent gate.
Further, multiple second air intake ducts are arranged along the extending direction of the collecting tank.
A kind of substrate processing equipment, comprising:
Personnel as described above quarantine case;And
Processing unit (plant), be arranged in the personnel quarantine case the transparent gate side.
Compared with prior art, the invention has the benefit that
The personnel provided by the invention case that quarantines includes personnel's platform and seal bootr, and personnel's platform is for accommodating work people Member;Seal bootr is located on personnel's platform so that personnel's platform is located in enclosure space.Seal bootr includes transparent gate, and work people Member can observe that personnel quarantine the outside of case by transparent gate, observe substrate not influencing staff to realize In the case where machining state, staff can be isolated with process equipment, eliminate the wind that pollution sources enter process equipment Danger.
Substrate processing equipment provided by the invention can guarantee that substrate is processed by quarantining case using above-noted persons The cleaniliness classs requirement of equipment.
Detailed description of the invention
To describe the technical solutions in the embodiments of the present invention more clearly, institute in being described below to the embodiment of the present invention Attached drawing to be used is needed to be briefly described, it should be apparent that, the accompanying drawings in the following description is only some implementations of the invention Example, for those of ordinary skill in the art, without creative efforts, can also implement according to the present invention The content of example and these attached drawings obtain other attached drawings.
Fig. 1 is that personnel provided by the invention quarantine the structural schematic diagram in one direction of case;
Fig. 2 is the enlarged drawing in Fig. 1 at A;
Fig. 3 is that personnel provided by the invention quarantine the structural schematic diagram in another direction of case;
Fig. 4 be personnel provided by the invention quarantine case transparent gate opening state under front view;
Fig. 5 is the structural schematic diagram of the first dust collection mechanism provided by the invention;
Fig. 6 is the enlarged drawing in Fig. 4 at B;
Fig. 7 is the structural schematic diagram of the second dust collection mechanism provided by the invention;
Fig. 8 is the structural schematic diagram of substrate processing equipment provided by the invention.
Appended drawing reference:
100- personnel quarantine case;200- processing unit (plant);
1- seal bootr;The transparent gate of 11-;
2- lift drive mechanism;21- driver;22- drive rod;
The first dust collection mechanism of 3-;The first air intake duct of 31-;32- absorbs cavity;321- adsorption hole;
The second dust collection mechanism of 4-;The second air intake duct of 41-;42- collecting tank;
5- switching door.
Specific embodiment
In order to make those skilled in the art more fully understand technical solution of the present invention, with reference to the accompanying drawing and by specific Embodiment to further illustrate the technical scheme of the present invention.
In the description of the present invention, it should be noted that term " on ", "lower", "left", "right", "vertical", "horizontal", The orientation or positional relationship of the instructions such as "inner", "outside" be based on the orientation or positional relationship shown in the drawings or this product use When the orientation or positional relationship usually put, be merely for convenience of the description present invention, rather than the device of indication or suggestion meaning Or element must have a particular orientation, be constructed and operated in a specific orientation, therefore be not considered as limiting the invention.
In addition, term " first ", " second ", be used for description purposes only, or for distinguishing different structure or component, without It can be interpreted as indication or suggestion relative importance.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection;It can be mechanical connection, It is also possible to be electrically connected;It can be directly connected, can also can be inside two elements indirectly connected through an intermediary Connection.For the ordinary skill in the art, can be understood with concrete condition above-mentioned term in the present invention specifically contain Justice.
It present embodiments provides a kind of personnel to quarantine case, is suitable for the higher process equipment of purity requirements, passes through Personnel quarantine case 100 to observe the machining status of process equipment, and the contaminants processing for preventing staff from carrying is set It is standby.The personnel case 100 that quarantines applies also for substrate processing equipment, can be avoided pollution substrate.
As shown in Figure 1, personnel provided in this embodiment quarantine, case 100 includes personnel's platform and seal bootr 1, Ren Yuanzhan Platform is for accommodating staff;Seal bootr 1 is located on personnel's platform so that personnel's platform is located in enclosure space.In addition, envelope Closing cover 1 includes transparent gate 11, and staff can observe that personnel quarantine the outside of case 100 by transparent gate 11, It, can be by staff and substrate processing equipment to realize in the case where not influencing staff's observation substrate machining state It is isolated, eliminates the risk that pollution sources are brought into substrate processing equipment.
Preferably, as shown in Fig. 2, quarantining the scope of application of case 100 to improve the personnel, personnel quarantine case 100 further include lift drive mechanism 2, and lift drive mechanism 2 can drive transparent gate 11 to move up and down relative to personnel's platform, So that personnel's platform is located in enclosure space or hemi-closure space.
Preferably, the material of transparent gate 11 is transparent acrylic material.
Preferably, lift drive mechanism 2 includes driver 21 and drive rod 22, and driver 21 is arranged on seal bootr 1, is passed One end of lever 22 is connected with driver 21, and the other end is connected with transparent gate 11, and driver 21 can drive transmission Bar 22 moves up and down to drive transparent gate 11 to move up and down.
Illustratively, driver 21 is straight line cylinder, and straight line cylinder can drive drive rod 22 to move up and down, so that transparent Gate 11 moves up and down.
Further, the two sides of transparent gate 11 being provided with guide rail, the extending direction and personnel's platform of guide rail are perpendicular, Transparent gate 11 can slide under the driving of lift drive mechanism 2 along the extending direction of guide rail, to make transparent gate 11 It moves more steady.
In the present embodiment, when process equipment purity requirements are higher, transparent gate 11 is made by lift drive mechanism 2 It moves upwards, so that personnel's platform be made to be located in enclosure space, staff and process equipment is kept apart, prevent pollution from processing Equipment;When process equipment purity requirements are not high, move downward transparent gate 11 by lift drive mechanism 2, to make Personnel's platform is located in hemi-closure space, to facilitate staff directly to observe the processing situation of process equipment.In other implementations In example, can also be that transparent gate 11 moves downward makes personnel's platform be located at hemi-closure space, and transparent gate 11, which moves upwards, to be made Personnel's platform is located at enclosure space, can also reach said effect.
Illustratively, in the present embodiment, personnel quarantine case 100 as hexahedron, and transparent gate 11 is arranged in personnel On one face of shielded box, wherein in the same face, the seal bootr 1 of the two sides of transparent gate 11 is transparent confinement cover, is expanded Big personnel quarantine the range of 100 observable of case, and the machining status of process equipment is observed convenient for staff.It is exemplary Ground, the material of the transparent confinement cover 1 are transparent acrylic material.
Further, in the same face that personnel quarantine case 100, the seal bootr 1 of the lower section of transparent gate 11 is Opaque seal bootr 1, and the material of the opaque seal bootr 1 is black aluminium-plastic panel material.
Optionally, it quarantines the production of case 100 in order to facilitate personnel, it is upper and lower two that personnel, which are quarantined that case 100 is divided to, The inside of lower part is arranged in part, personnel's platform, and transparent gate 11 is arranged on a face of lower part, transparent 11 energy of gate It enough moves upwards to be abutted with top split-phase, so that personnel's platform be made to be located in sealing space.
Optionally, personnel quarantine case 100 upper part in be provided with lighting device, quarantined case with raising personnel Brightness in 100 quarantines activity in case 100 in personnel convenient for staff, while observing processing convenient for staff and setting Standby machining status.
Illustratively, as shown in figure 3, being arranged in opposite with transparent gate 11 one side on case 100 that quarantines in personnel There is a switching door 5, personnel's platform that staff quarantines inside case 100 by opening switching door 5 into personnel.
Preferably, as shown in fig. 4-5, in order to guarantee the purity requirements of process equipment, personnel quarantine case 100 also The first dust collection mechanism 3 to quarantine inside case 100 including being located at personnel, the first dust collection mechanism 3 are arranged on seal bootr 1, use It quarantines the particulate matter inside case 100 in absorption personnel.
Further, the first dust collection mechanism 3 includes the first air intake duct 31 being connected and absorbs cavity 32, the first air intake duct 31 are configured as being connected with extraneous air-extractor, absorb and are provided with adsorption hole 321 on cavity 32, are inhaled by adsorption hole 321 The particulate matter that receipts personnel quarantine in case 100.
Preferably, two the first air intake ducts 31 are symmetricly set on the both ends for absorbing cavity 32, absorb the suction of cavity 32 to improve The effect of the particulate matters such as attached dust.
Preferably, multiple adsorption holes 321 are uniformly arranged along the length direction for absorbing cavity 32, absorb cavity 32 to improve Pick-up performance.
When transparent gate 11 moves up and down, it is easy that the particulate matters such as dust is made to suspend, in order to prevent the particles such as dust Object enters in process equipment, illustratively, absorbs cavity 32 and is located at the lower section of transparent gate 11, and absorb cavity 32 length and The length of transparent gate 11 is identical, to absorb the particulate matters such as the dust taken up by the movement of transparent gate 11.Specifically, such as Fig. 6 institute Show, when personnel's platform is in hemi-closure space, absorbs the top that cavity 32 is located at transparent gate 11;When personnel's platform is in envelope When closing space, the lower section that cavity 32 is located at transparent gate 11 is absorbed.
Optionally, as shown in connection with fig. 4 such as Fig. 7, personnel's case 100 that quarantines further includes being located at personnel to quarantine case 100 The second external dust collection mechanism 4, the second dust collection mechanism 4 are set to the lower section of transparent gate 11, and the setting of the second dust collection mechanism 4 is being sealed It closes on cover 1, the particulate matter to quarantine outside case 100 for absorbing personnel.Specifically, the second dust collection mechanism 4 is located at first and inhales The lower section of dirt mechanism 3 is quarantined the particulate matters such as the dust outside case 100 with preferably absorbing personnel.
Preferably, the second dust collection mechanism 4 includes the second air intake duct 41 and collecting tank 42 being connected, 41 quilt of the second air intake duct It is configured to be connected with extraneous air-extractor, negative pressure is formed in collecting tank 42 by the second air intake duct 41, collecting tank 42 Opening is towards transparent gate 11, consequently facilitating the particulate matters such as dust enter collecting tank 42 from the opening of collecting tank 42.
Further, multiple second air intake ducts 41 are arranged along the extending direction of collecting tank 42.In the present embodiment, One air intake duct 31 and the second air intake duct 41 are connected with the same extraneous air-extractor jointly, in order to control the first dust suction simultaneously The switch of mechanism 3 and the second dust collection mechanism 4.
Preferably, the second dust collection mechanism 4 further includes gas blow pipe, the opening of the gas outlet of gas blow pipe downwardly collecting tank 42 Direction setting, consequently facilitating the particulate matters such as dust converge under the action of the gas of the blowout of gas blow pipe to 42 direction of collecting tank, Collecting tank 42 is improved to the assimilation effect of the particulate matters such as dust.
As shown in figure 8, the present embodiment additionally provides a kind of substrate processing equipment, quarantine case including above-mentioned personnel 100 and processing unit (plant) 200, processing unit (plant) 200 be arranged in personnel quarantine case 100 transparent gate 11 side, in order to Staff quarantines in personnel observes the machining status of skilled worker's main equipment on personnel's platform in case 100.
Preferably, personnel quarantine the transparent gate 11 of case 100 and the opening of processing unit (plant) 200 is fitted, In order to which staff preferably observes the machining status of substrate in processing unit (plant) 200.
Preferably, the top of processing unit (plant) 200, and the gas outlet of gas blow pipe opening towards collecting tank 42 is arranged in gas blow pipe Mouth direction, to improve collecting tank 42 to the collecting effect of the particulate matters such as dust.
Note that the above is only a better embodiment of the present invention and the applied technical principle.It will be appreciated by those skilled in the art that The present invention is not limited to specific embodiments mentioned here, be able to carry out for a person skilled in the art it is various it is apparent variation, It readjusts and substitutes without departing from protection scope of the present invention.Therefore, although being carried out by above embodiments to the present invention It is described in further detail, but the present invention is not limited to the above embodiments only, without departing from the inventive concept, also It may include more other equivalent embodiments, and the scope of the invention is determined by the scope of the appended claims.

Claims (10)

  1. The case 1. a kind of personnel quarantine characterized by comprising
    Personnel's platform, for accommodating staff;
    Seal bootr (1) is located on personnel's platform so that personnel's platform is located in enclosure space, the seal bootr It (1) include transparent gate (11), the staff can be observed that the personnel are isolated by the transparent gate (11) and be seen Examine the outside of case (100).
  2. The case 2. personnel according to claim 1 quarantine, which is characterized in that it further include lift drive mechanism (2), it is described Lift drive mechanism (2) can drive the transparent gate (11) to move up and down relative to personnel's platform, so that the people Member's platform is located in enclosure space or hemi-closure space.
  3. The case 3. personnel according to claim 2 quarantine, which is characterized in that the lift drive mechanism (2) includes driving Dynamic device (21) and drive rod (22), the driver (21) are arranged on the seal bootr (1), one end of the drive rod (22) It is connected with the driver (21), the other end is connected with the transparent gate (11), and the driver (21) can drive The drive rod (22) are moved to move up and down to drive the transparent gate (11) to move up and down.
  4. The case 4. personnel according to claim 1 quarantine, which is characterized in that further include being located in the seal bootr (1) First dust collection mechanism (3) in portion, and first dust collection mechanism (3) is arranged on the seal bootr (1), for absorbing the people Member quarantines the internal particulate matter of case (100).
  5. The case 5. personnel according to claim 4 quarantine, which is characterized in that first dust collection mechanism (3) includes phase The first air intake duct (31) of connection and absorption cavity (32), first air intake duct (31) are configured as and extraneous air-extractor Be connected, be provided with adsorption hole (321) on the absorption cavity (32), by the adsorption hole (321) absorb the personnel every From the particulate matter in observation case (100).
  6. The case 6. personnel according to claim 5 quarantine, which is characterized in that two first air intake ducts (31) are symmetrical It is arranged at the both ends for absorbing cavity (32).
  7. The case 7. personnel according to claim 1-6 quarantine, which is characterized in that further include being located at the closing (1) external second dust collection mechanism (4) is covered, second dust collection mechanism (4) is set to the lower section of the transparent gate (11), and Second dust collection mechanism (4) is arranged on the seal bootr (1), external for absorbing the personnel case (100) that quarantines Particulate matter.
  8. The case 8. personnel according to claim 7 quarantine, which is characterized in that second dust collection mechanism (4) includes phase The second air intake duct (41) and collecting tank (42) of connection, second air intake duct (41) are configured as and extraneous air-extractor phase Connection, the opening of the collecting tank (42) is towards the transparent gate (11).
  9. The case 9. personnel according to claim 8 quarantine, which is characterized in that multiple second air intake ducts (41) are along institute The extending direction for stating collecting tank (42) is arranged.
  10. 10. a kind of substrate processing equipment characterized by comprising
    As the described in any item personnel of claim 1-9 quarantine case (100);And
    Processing unit (plant) (200), be arranged the personnel quarantine case (100) the transparent gate (11) side.
CN201910580602.1A 2019-06-28 2019-06-28 Personnel isolation observation box and substrate processing equipment Active CN110312368B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910580602.1A CN110312368B (en) 2019-06-28 2019-06-28 Personnel isolation observation box and substrate processing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910580602.1A CN110312368B (en) 2019-06-28 2019-06-28 Personnel isolation observation box and substrate processing equipment

Publications (2)

Publication Number Publication Date
CN110312368A true CN110312368A (en) 2019-10-08
CN110312368B CN110312368B (en) 2020-09-29

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201910580602.1A Active CN110312368B (en) 2019-06-28 2019-06-28 Personnel isolation observation box and substrate processing equipment

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CN (1) CN110312368B (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201420413Y (en) * 2009-05-13 2010-03-10 张小京 Movable isolating room
CN201908376U (en) * 2010-12-02 2011-07-27 北京建工集团有限责任公司 Organic glass interior wall partition
CN103395074A (en) * 2013-07-31 2013-11-20 上海千山远东制药机械有限公司 Charging type manned cleaning movable small car used in special environments
CN208236021U (en) * 2018-05-10 2018-12-14 广东电网有限责任公司 Construction operation cabin

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201420413Y (en) * 2009-05-13 2010-03-10 张小京 Movable isolating room
CN201908376U (en) * 2010-12-02 2011-07-27 北京建工集团有限责任公司 Organic glass interior wall partition
CN103395074A (en) * 2013-07-31 2013-11-20 上海千山远东制药机械有限公司 Charging type manned cleaning movable small car used in special environments
CN208236021U (en) * 2018-05-10 2018-12-14 广东电网有限责任公司 Construction operation cabin

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Publication number Publication date
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