CN110311010A - 一种基于石墨烯纳米带的红外宽光谱探测器 - Google Patents

一种基于石墨烯纳米带的红外宽光谱探测器 Download PDF

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CN110311010A
CN110311010A CN201910572514.7A CN201910572514A CN110311010A CN 110311010 A CN110311010 A CN 110311010A CN 201910572514 A CN201910572514 A CN 201910572514A CN 110311010 A CN110311010 A CN 110311010A
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graphene nanobelt
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杨树明
吉培瑞
杨晓凯
王一鸣
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Xian Jiaotong University
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Abstract

本发明公开了一种基于石墨烯纳米带的红外宽光谱探测器，包括石墨烯纳米带、栅极、源极、漏极和栅极介质。该探测器中石墨烯纳米带的带隙大小一方面可根据其宽度调节，另一方面可通过栅压调节，整体实现两个维度上的带隙可调。不同带隙大小对应探测器不同的光响应频率。因此，该探测器具有宽光谱探测能力，实现探测波段覆盖760nm‑100μm的全红外波探测。且探测灵敏度高、响应速度快，可有效解决红外宽光谱探测的迫切需求。

Description

一种基于石墨烯纳米带的红外宽光谱探测器
技术领域
本发明属于材料科学、光电子技术及半导体器件领域，具体涉及一种基于石墨烯纳米带的红外宽光谱探测器。
背景技术
红外探测器是一种能够将不可见的红外辐射转化为可测量信号的光电子器件，在军事、气象、工业、环境科学以及医疗诊断等领域都具有广泛的应用。尤其是能在现代战争中及时捕获并识别来袭目标的相关信息，在红外侦察、红外制导以及红外隐身领域有着迫切需求，是信息化作战中取得胜利的关键。
然而，传统基于铟镓砷(InGaAs)、碲镉汞(HgCdTe)、硒化铅(PbSe)等材料的红外探测器大多只能探测单波段。随着目标伪装技术的进一步发展，单波段探测已不能对隐身飞机、临近空间飞行器、弹道导弹等目标物体进行准确全面的预警与侦察，满足不了信息化战争的需求。而对于伪装目标来说，往往只能伪装一部分波段，不可能伪装所有波段。例如，隐形飞机只能对雷达探测隐身部分波段，在远红外波段范围却可以探测。如果探测设备具有红外宽光谱探测能力，就能有效实现反红外隐身。
因此，为了能更好识别目标物体，对潜在威胁进行预警，研究一种室温下灵敏度和探测率高、响应速度快的红外宽光谱探测器就显得必要而迫切。
发明内容
本发明的目的在于针对当前红外宽光谱探测的迫切需求，提供了一种基于石墨烯纳米带的红外宽光谱探测器，通过两个维度上的带隙可调实现红外宽光谱吸收。
为达到上述目的，本发明采用如下技术方案予以实现：
一种基于石墨烯纳米带的红外宽光谱探测器，包括石墨烯纳米带、栅极、源极、漏极和栅极介质；其中，
栅极材料采用重掺杂硅，栅极介质材料采用300nm厚的二氧化硅，且二氧化硅-硅界面具有良好的稳定性；石墨烯纳米带位于栅极介质表面，作为导电沟道；源极和漏极材料采用20nm厚的Ti过渡层及100nm厚的Au电极，分别从石墨烯纳米带的上表面左右两侧接出，与石墨烯形成欧姆接触并连接外部电源；栅极和源极通过栅电源相连，提供栅压Vg；工作时，入射光照射到探测器上，光生载流子产生，并被电极与石墨烯之间的内建电场分离，形成光电流，通过电流表进行检测。
本发明进一步的改进在于，石墨烯纳米带的宽度在5-100nm范围内，具体根据制备方法可控调节，边缘为具有原子级平滑的扶手椅型。
本发明进一步的改进在于，石墨烯纳米带的带隙大小根据其宽度大小改变。
本发明进一步的改进在于，石墨烯纳米带的带隙大小通过栅压Vg调节。
本发明进一步的改进在于，石墨烯纳米带的带隙大小在两个维度上可调，整体可达100-1000meV范围。
本发明进一步的改进在于，该探测器具有宽光谱吸收特性，探测波段覆盖全红外波段，即760nm-100μm。
本发明具有如下有益的技术效果：
本发明所述的一种基于石墨烯纳米带的红外宽光谱探测器，可在室温下实现760nm-100μm范围内的宽光谱探测，覆盖了红外全波段，且探测灵敏度高、响应速度快，有效了解决红外宽光谱探测的迫切需求。
附图说明
图1是本发明一种基于石墨烯纳米带的红外宽光谱探测器的结构示意图。
附图标记说明：
1、石墨烯纳米带，2、栅极，3、源极，4、漏极，5、栅极介质，6、电流表，7、入射光。
具体实施方式
为使本发明的目的、技术方案及优势更加清楚明了，下面结合附图对本发明原理及实验过程作进一步说明。
如图1所示，本发明提供的一种基于石墨烯纳米带的红外宽光谱探测器，包括石墨烯纳米带1、栅极2、源极3、漏极4和栅极介质5。其中，栅极2材料采用重掺杂硅，栅极介质5材料采用300nm厚的二氧化硅，且二氧化硅-硅界面具有良好的稳定性；石墨烯纳米带1位于栅极介质5表面，作为导电沟道；源极3和漏极4材料采用20nm厚的Ti过渡层及100nm厚的Au电极，分别从石墨烯纳米带1的上表面左右两侧接出，与石墨烯形成欧姆接触并连接外部电源；栅极2和源极3通过栅电源相连，提供栅压Vg。
探测器源极、漏极的制备方法采用已有技术，此处不再赘述；石墨烯纳米带的制备方法同样采用已有技术，此处不再赘述；石墨烯纳米带的宽度在5-100nm范围内，具体可根据制备方法可控调节，其边缘为具有原子级平滑的扶手椅型；石墨烯纳米带的带隙大小一方面可根据其宽度调节，另一方面可通过栅压Vg调节，实现两个维度上的带隙可调，整体可达100-1000meV范围。不同的带隙大小对应探测器不同的光响应频率。因此，石墨烯纳米带带隙可调的特性使探测器具有宽光谱探测的能力，实现探测波段覆盖760nm-100μm的全红外波探测。工作时，入射光7照射到探测器上，光生载流子产生，并被金属电极与石墨烯之间的内建电场分离，形成光电流，通过电流表6进行检测。
以上结合附图对本发明的具体实施方法作了说明，但这些说明不能被理解为限制了本发明的范围，本发明的保护范围由随附的权利要求书限定，任何在本发明权利要求基础上的改动都是本发明的保护范围。

Claims (6)

1.一种基于石墨烯纳米带的红外宽光谱探测器，其特征在于，包括石墨烯纳米带(1)、栅极(2)、源极(3)、漏极(4)和栅极介质(5)；其中，
栅极(2)材料采用重掺杂硅，栅极介质(5)材料采用300nm厚的二氧化硅，且二氧化硅-硅界面具有良好的稳定性；石墨烯纳米带(1)位于栅极介质(5)表面，作为导电沟道；源极(3)和漏极(4)材料采用20nm厚的Ti过渡层及100nm厚的Au电极，分别从石墨烯纳米带(1)的上表面左右两侧接出，与石墨烯形成欧姆接触并连接外部电源；栅极(2)和源极(3)通过栅电源相连，提供栅压Vg；工作时，入射光(7)照射到探测器上，光生载流子产生，并被电极与石墨烯之间的内建电场分离，形成光电流，通过电流表(6)进行检测。
2.根据权利要求1所述的一种基于石墨烯纳米带的红外宽光谱探测器，其特征在于，石墨烯纳米带(2)的宽度在5-100nm范围内，具体根据制备方法可控调节，边缘为具有原子级平滑的扶手椅型。
3.根据权利要求1所述的一种基于石墨烯纳米带的红外宽光谱探测器，其特征在于，石墨烯纳米带(2)的带隙大小根据其宽度大小改变。
4.根据权利要求1所述的一种基于石墨烯纳米带的红外宽光谱探测器，其特征在于，石墨烯纳米带(2)的带隙大小通过栅压Vg调节。
5.根据权利要求1所述的一种基于石墨烯纳米带的红外宽光谱探测器，其特征在于，石墨烯纳米带(2)的带隙大小在两个维度上可调，整体可达100-1000meV范围。
6.根据权利要求1所述的一种基于石墨烯纳米带的红外宽光谱探测器，其特征在于，该探测器具有宽光谱吸收特性，探测波段覆盖全红外波段，即760nm-100μm。
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