CN110307963A - The method for detecting any wavelength focal length of transmission type optical system - Google Patents
The method for detecting any wavelength focal length of transmission type optical system Download PDFInfo
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Abstract
The present invention provides a kind of methods for detecting any wavelength focal length of transmission type optical system, which comprises the following steps: step 1 measures the focal length of optical system, obtains optical system λ0Focal length f (λ0)；Step 2 measures the rear cut-off distance of optical system, obtains optical system λ1~λmRear cut-off distance l (λ1)、l(λ2)……l(λm)；Step 3, by l (λ1)、l(λ2)……l(λm) substitute into rear cut-off distance and wavelength equation, calculate Al、Bl、ClAnd DlValue；Step 4, the A that will be calculatedl、Bl、Cl、DlValue substitute into intercept and wavelength equation, calculatings wavelength is λ0And λnOptical system rear cut-off distance l (λ0) and l (λn)；Step 5 passes through l (λ0) and l (λn) calculate rear cut-off distance intervalStep 6 passes through f (λ0) andCalculate focal length f (λn), optical system is Single wavelength system, achromatic system, any one in apochromatic system.
Description
Technical field
The present invention relates to a kind of methods for detecting focal length, and in particular to a kind of any wavelength of detection transmission type optical system is burnt
Away from method.
Background technique
Focal length is an important parameter of optical system, common focal-length measurement method have magnifying power method, precision angle method,
Abbe focometer method etc..Optical system designs usually under some specific wavelength and in certain wavelength band, transmitted light system
The focal length of system changes with the variation of wavelength, and needs accurately to know the focal length of system in many applications.
A certain wavelength or the very broadband focal length in narrowband are mainly measured in existing focal length measurement method.As commonly
Using the narrow bandwidth LED light source centered on 550nm in focometer, the focal length when focal length of measurement is optical system 550nm, in addition
As patent CN201410439298.6 " the focal length of lens measurement device and method based on fizeau interferometer " uses laser interferometer
The focal length of lens is measured, the monochromatic focal length that can be transmitted with accurate detection.Therefore due to present measuring instrument and method limitation,
Limited wavelength focal length can only be measured.
Summary of the invention
The present invention is to carry out to solve the above-mentioned problems, and it is an object of the present invention to provide a kind of any wavelength of detection optical system
The method of focal length.
The present invention provides a kind of methods for detecting any wavelength focal length of transmission type optical system, have the feature that,
The following steps are included: step 1, measures the focal length of optical system using the instrument of focal length measurement, obtains optical system λ0
Focal length f (λ0)；Step 2 measures the rear cut-off distance of optical system using the device of measurement rear cut-off distance, obtains optical system
Unite λ1~λmRear cut-off distance l (λ1)、l(λ2)……l(λm)；Step 2 is obtained the rear cut-off distance l (λ of m kind wavelength by step 31)、l
(λ2)……l(λm) substitute into rear cut-off distance and wavelength equation,
M=1,2,3,4, calculate Al、Bl、ClAnd DlValue；Step 4, the A that will be calculatedl、Bl、ClAnd DlValue substitute into
In formula (1), calculating separately wavelength is λ0And λnOptical system rear cut-off distance l (λ0) and l (λn)；Step 5, by what is be calculated
l(λ0) and l (λn) substitute into formula (2),
Calculate λ0And λnOptical system rear cut-off distance intervalStep 6, the f (λ that measurement is obtained0) and meter
It obtainsIt substitutes into formula (3),
Calculating wavelength is λnOptical system focal length f (λn), wherein optical system be Single wavelength system, achromatic system with
And any one in apochromatic system.
In the method for the detection any wavelength focal length of transmission type optical system provided by the invention, can also have such
Feature, wherein 400nm≤λ0≠λ1≠…≠λm≠λn≤ 1000nm or 400nm≤λ0=λ1≠…≠λm=λn≤ 1000nm,
Or 400nm≤λ0=λ1=λn≠…≠λm≤ 1000nm, optical system are achromatic system or apochromatic system, work as optics
When system is achromatic system, in step 3,1.1≤X1≤ 4.9,5≤X2≤ 6.2,1.8≤X3≤ 2.3, when optical system is
When apochromatic system, in step 3,0.1≤X1≤ 3.1,3.9≤X2≤ 6.9,1.8≤X3≤ 2.4,6.5≤X1+X2≤7.2。
In the method for the detection any wavelength focal length of transmission type optical system provided by the invention, can also have such
Feature, wherein 300nm≤λ0≠λ1≠…≠λm≠λn≤ 2500nm or 300nm≤λ0=λ1≠…≠λm=λn≤ 2500nm,
Or 300nm≤λ0=λ1=λn≠…≠λm≤ 2500nm, when optical system is Single wavelength system, in step 3,1.8≤X1≤
2,3.9≤X2≤ 6.8,2.2≤X3≤ 2.3, when optical system is achromatic system, in step 3,2.1≤X1≤ 4.5,5≤
X2≤ 6.2,2≤X3≤ 2.1, when optical system is apochromatic system, in step 3,0.1≤X1≤ 3.1,3.9≤X2≤
6.7,1.9≤X3≤ 2.4,6.6≤X1+X2≤7.2。
The present invention provides a kind of methods for detecting any wavelength focal length of transmission type optical system, have the feature that,
The following steps are included: step 1, measures the focal length of optical system using the instrument of focal length measurement, obtains optical system λ0
Focal length f (λ0)；Step 2 measures the rear cut-off distance of optical system using the device of measurement rear cut-off distance, obtains optical system
Unite λ1~λmRear cut-off distance l (λ1)、l(λ2)……l(λm)；Step 2 is obtained the rear cut-off distance l (λ of m kind wavelength by step 31)、l
(λ2)……l(λm) substitute into rear cut-off distance and wavelength equation,
M=1,2,3, calculate Al、BlAnd ClValue；Step 4, the A that will be calculatedl、Bl、ClValue substitute into formula (4)
In, calculating separately wavelength is λ0And λnOptical system rear cut-off distance l (λ0) and l (λn)；Step 5, the l (λ that will be calculated0) and l
(λn) substitute into formula (5),
Calculate λ0And λnOptical system rear cut-off distance intervalStep 6, the f (λ that measurement is obtained0) and meter
It obtainsIt substitutes into formula (6),
Calculating wavelength is λnOptical system focal length f (λn), wherein optical system is Single wavelength system.It is provided in the present invention
Detection any wavelength focal length of transmission type optical system method in, can also have the feature that, wherein when 400nm≤
λ0≠λ1≠…≠λm≠λn≤ 1000nm or 400nm≤λ0=λ1≠…≠λm=λn≤ 1000nm or 400nm≤λ0=λ1=
λn≠…≠λmWhen≤1000nm, in step 3,0.1≤X1≤ 1.8,2.3≤X2≤ 4.9,1.8≤X1-X2≤4.4。
The present invention provides a kind of methods for detecting any wavelength focal length of transmission type optical system, have the feature that,
The following steps are included: step 1, measures the focal length of optical system using the instrument of focal length measurement, obtains optical system λ1
~λmFocal length f (λ1)...f(λm)；Step 2, the focal length f (λ for the optical system that step 1 is obtained1)...f(λm) substitute into public affairs
Formula:
M=1,2,3,4, calculate Af、Bf、CfAnd DfValue；Step 3, the A that will be calculatedf、Bf、CfAnd DfValue substitute into
In above-mentioned formula (7), calculating wavelength is λnOptical system focal length f (λn), wherein optical system is Single wavelength system, colour killing
Any one in poor system and apochromatic system.Af=Al+ C, C are constant, Bf=Bl, Cf=Cl, Df=Dl。
In the method for the detection any wavelength focal length of transmission type optical system provided by the invention, can also have such
Feature, wherein 400nm≤λ0≠λ1≠…≠λm≠λn≤ 1000nm or 400nm≤λ0=λ1≠…≠λm=λn≤ 1000nm,
Or 400nm≤λ0=λ1=λn≠…≠λm≤ 1000nm, optical system are achromatic system or apochromatic system, work as optics
When system is achromatic system, in step 2,1.1≤X1≤ 4.9,5≤X2≤ 6.2,1.8≤X3≤ 2.3, when optical system is
When apochromatic system, in step 2,0.1≤X1≤ 3.1,3.9≤X2≤ 6.9,1.8≤X3≤ 2.4,6.5≤X1+X2≤7.2。
In the method for the detection any wavelength focal length of transmission type optical system provided by the invention, can also have such
Feature, wherein 300nm≤λ0≠λ1≠…≠λm≠λn≤ 2500nm or 300nm≤λ0=λ1≠…≠λm=λn≤ 2500nm,
Or 300nm≤λ0=λ1=λn≠…≠λm≤ 2500nm, when optical system is Single wavelength system, in step 2,1.8≤X1≤
2,3.9≤X2≤ 6.8,2.2≤X3≤ 2.3, when optical system is achromatic system, in step 2,2.1≤X1≤ 4.5,5≤
X2≤ 6.2,2≤X3≤ 2.1, when optical system is apochromatic system, in step 2,0.1≤X1≤ 3.1,3.9≤X2≤
6.7,1.9≤X3≤ 2.4,6.6≤X1+X2≤7.2。
The present invention provides a kind of methods for detecting any wavelength focal length of transmission type optical system, have the feature that,
The following steps are included: step 1, measures the focal length of optical system using the instrument of focal length measurement, obtains optical system λ1
~λmFocal length f (λ1)...f(λm)；Step 2, the focal length f (λ for the optical system that step 1 is obtained1)...f(λm) substitute into public affairs
Formula:
M=1,2,3, calculate Af、Bf、CfValue；Step 3, the A that will be calculatedf、Bf、CfValue substitute into above-mentioned formula
(8) in, calculating wavelength is λnOptical system focal length f (λn), wherein optical system is Single wavelength system.Af=Al+ C, C are
Constant, Bf=Bl, Cf=Cl。
In the method for the detection any wavelength focal length of transmission type optical system provided by the invention, can also have such
Feature, wherein as 400nm≤λ0≠λ1≠…≠λm≠λn≤ 1000nm or 400nm≤λ0=λ1≠…≠λm=λn≤
1000nm or 400nm≤λ0=λ1=λn≠…≠λmWhen≤1000nm, in step 3,0.1≤X1≤ 1.8,2.3≤X2≤
4.9,1.8≤X1-X2≤4.4。
The action and effect of invention
The method of the detection any wavelength focal length of transmission type optical system involved according to the present invention, because using one kind
The measurement of wavelength focometry instrument measures to obtain wavelength to be λ to optical system0System focal length, then using after m kind wavelength
Intercept measuring device obtains λ to optical system measuring1~λmRear cut-off distance l (λ1)、l(λ2)……l(λm), use l (λ1)、l
(λ2)……l(λm) the rear cut-off distance formula l (λ) of not homologous ray can be corresponded to；λ is calculated separately according to rear cut-off distance formula l (λ)0And λn
Rear cut-off distance l (λ0)、l(λn)；λ is calculated again0And λnOptical system rear cut-off distance intervalOptics
System wavelength is λnOptical system focal length f (λn) basisIt is calculated.
In addition, the method for the detection any wavelength focal length of transmission type optical system involved according to the present invention, it can be with one
The measurement of kind wavelength focometry instrument measures to obtain wavelength to be~λ to optical systemmFocal length f (λ1)...f(λm), it uses
Focal length f (λ1)...f(λm) focal length formula f (λ) that not homologous ray can be corresponded to, it is λ that wavelength, which is calculated,nOptical system coke
Away from f (λn)。
So the above method through the invention, can access the focal length of any wavelength of transmission type optical system, it is above-mentioned
Limited wavelength focometry in original method is expanded to the measurement of any wavelength focal length in a wavelength range by method, so that light
The available more accurate detection of system focal length is learned, there is broad applicability.
In addition, the rear cut-off distance in the former is that the position of the plane of reference is different from the difference of focal length in the above method, therefore it
Be substantially with the functional relation of wavelength it is the same, be only to differ a constant constant term.That is, realizing light
After any wavelength detecting of system needs several specific wavelength focal lengths or needs 1 specific wavelength focal length and several specific wavelengths
Then intercept is calculated according to correlation formula.And the measurement of optical system rear cut-off distance is easier to realize than focometry.
Detailed description of the invention
Fig. 1 is the relation schematic diagram of optical system different wave length focal length and rear cut-off distance in the present invention；
Fig. 2 is the schematic diagram of the focal length in the present invention using focometer measurement optical system；
Fig. 3 is the schematic diagram of the detection device of the rear cut-off distance of detection optical system in the present invention；
Fig. 4 is that interferometer measurement optical system focal length schematic diagram is used in the present invention；
Fig. 5 is in the present invention using the schematic diagram of the rear cut-off distance of interferometer detection optical system；
Fig. 6 is to obtain the solution coke of Single wavelength system using the detection method in embodiment in the embodiment of the present invention one
Comparison diagram away from-wavelength curve and theoretic acquisition data and curves；
Fig. 7 is to obtain the solution coke of Single wavelength system using the detection method in embodiment in the embodiment of the present invention two
Comparison diagram away from-wavelength curve and theoretic acquisition data and curves；
Fig. 8 is to obtain the solution coke of achromatic system using the detection method in embodiment in the embodiment of the present invention three
Comparison diagram away from-wavelength curve and theoretic acquisition data and curves；
Fig. 9 is to obtain asking for apochromatic system system using the detection method in embodiment in the embodiment of the present invention four
Solve the comparison diagram of focal length-wavelength curve and theoretic acquisition data and curves；
Specific embodiment
In order to be easy to understand the technical means, the creative features, the aims and the efficiencies achieved by the present invention, tie below
Embodiment is closed to be specifically addressed the method for any wavelength focal length of detection transmission type optical system of the invention.
<embodiment one>
Fig. 1 is the focal length of lens and rear cut-off distance schematic diagram, and focal length is only that the plane of reference is different from the difference of rear cut-off distance, therefore
Focal length and rear cut-off distance are the same with the knots modification of wavelength.
The present embodiment is the focal length for detecting any wavelength in Single wavelength optical system.
Fig. 2 is the schematic diagram of the focal length in the present invention using focometer measurement optical system；Fig. 3 is detection light in the present invention
The schematic diagram of the detection device of the rear cut-off distance of system.
As shown in Figure 2,3, detection optical system focal length device 100 includes focometer 10, Single wavelength optical system 11 to be measured.
Detection optical system rear cut-off distance device 200 includes laser 20, negative lens 21, microcobjective 22, collimating mirror 23, shearing interferometer
24, Single wavelength optical system to be measured 25 (being same structure with Single wavelength optical system 11 to be measured) and light intensity detector 26.Detection
Optical system rear cut-off distance device 200 can replace laser 20 to detect different wave length rear cut-off distance.
11 focal length of optical system (conventional detection means) is measured with focometer 10, reuses rear cut-off distance detection device 200
Measure 3 wavelength rear cut-off distances of optical system.Laser 20 issues light beam by negative lens 21, micro- object in rear cut-off distance detection device
Mirror 22, then directional light is formed by adjusting collimation lens 23, the collimation of directional light, directional light are detected by shearing interferometer 24
Lens 25 (being same structure with Single wavelength optical system 11 to be measured) to be measured are incident on, focus is pooled, passes through light intensity detector
The maximum position of light intensity of detection convergence luminous point determines the position of focus, and records the rear cut-off distance of optical system corresponding wavelength.
The method that the focal length of any wavelength in Single wavelength optical system is detected in the present embodiment, passes through the optical system measured
The focal length of 3 wavelength rear cut-off distances and 1 wavelength calculates any wavelength focal length of optical system, comprising the following steps:
Step 1 is λ using optical source wavelength0Focometer Single wavelength (monochrome) system is detected to obtain optical system
Focal length f (λ0)。
Step 2 is respectively λ using wavelength1、λ2、λ3Rear cut-off distance detection device monochromatic system is detected to obtain three
A rear cut-off distance l (λ1)、l(λ2)、l(λ3)；
Step 3, the monochromatic system that step 2 is obtained are λ in wavelength1、λ2And λ3Rear cut-off distance l (λ1)、l(λ2)、l
(λ3) substitute into formula:
M=1 in formula, 2,3,
400nm≤λ0≠λ1≠λ2≠λ3≠λn≤ 1000nm, at this point, 0.1≤X1≤ 1.8,2.3≤X2≤ 4.9,1.8≤
X1-X2≤4.4.That is X1、X2Take any real number within the scope of this.In the present embodiment, X1=0.7, X2=3.
Calculate Al、BlAnd ClValue.
Step 4, the A that will be calculatedl、BlAnd ClValue substitute into formula (4) in, calculatings wavelength be λ0And λnMonochromatic light
Rear cut-off distance l (the λ of system0) and l (λn)。
Step 5 is λ according to the wavelength that step 4 obtains0And λnOptical system rear cut-off distance l (λ0) and l (λn) calculate λ0With
λnOptical system rear cut-off distance interval
Step 6 is λ according to the wavelength that step 1 obtains0The defocused intercept f (λ of optical system0) and step 5 obtain λ0With
λnOptical system rear cut-off distance intervalCalculating wavelength is λnOptical system focal length f (λn),
Fig. 6 is to obtain the solution coke of Single wavelength system using the detection method in embodiment in the embodiment of the present invention one
Comparison diagram away from-wavelength curve and theoretic acquisition data and curves.In figure, Simulation is acquisition data and curves, and F7 is bent
Line is to use the curve of 500nm, 600nm and 700nm by equations using the monochromatic optical system of F7 material, can from Fig. 6
To find out, this two curves are essentially coincided.
<embodiment two>
The present embodiment is the focal length for detecting any wavelength in Single wavelength optical system.
Fig. 5 is in the present invention using the schematic diagram of the rear cut-off distance of interferometer detection optical system.
As shown in Fig. 2,5, detection optical system focal length device 100 includes focometer 10, Single wavelength optical system 11 to be measured.
Detection optical system rear cut-off distance device 400 includes 4 wavelength laser interferometers 40, standard flat mirror 41, Single wavelength optics to be measured
System 42 (being same structure with Single wavelength optical system 11 to be measured) and reflecting spherical mirror 43.The interference of detection optical system rear cut-off distance
Instrument 400 replaces different laser interferometer detection different wave length rear cut-off distances.
11 focal length of optical system (conventional detection means) is measured with focometer 10, reuses 400 measurement of interferometer detection
4 wavelength rear cut-off distances of optical system.Interferometer 400 issues directional light, by Plane reference mirror 41 and tested Single wavelength optical system
It is converged after system 42, mobile reflecting spherical mirror 43, until 43 centre of sphere of reflecting spherical mirror is overlapped with the focus of optical system 42, passes through survey
Measure Zernike-Z3(Z3=0, defocusing amount zero), record the position of spherical reflector 43.Replace different wave length laser interferometer
40, the position of available different wave length reflecting mirror 43, the as rear cut-off distance of different wave length.
The method that the focal length of any wavelength in Single wavelength optical system is detected in the present embodiment, passes through the optical system measured
The focal length of 4 wavelength rear cut-off distances and 1 wavelength calculates any wavelength focal length of optical system, comprising the following steps:
Step 1 is λ using optical source wavelength0Focometer Single wavelength (monochrome) system is detected to obtain optical system
Focal length f (λ0)。
Step 2 is respectively λ using wavelength1、λ2、λ3、λ4Rear cut-off distance detection device monochromatic system is detected to obtain
Three rear cut-off distance l (λ1)、l(λ2)、l(λ3)、l(λ4)；
Step 3, the monochromatic system that step 2 is obtained are λ in wavelength1、λ2、λ3、λ4Rear cut-off distance l (λ1)、l(λ2)、l
(λ3)、l(λ4) substitute into formula:
M=1 in formula, 2,3,4,
As 300nm≤λ0≠λ1≠…≠λm≠λn≤ 2500nm or 300nm≤λ0=λ1≠…≠λm=λn≤ 2500nm,
Or 300nm≤λ0=λ1=λn≠…≠λmWhen≤2500nm, 1.8≤X1≤ 2,3.9≤X2≤ 6.8,2.2≤X3≤2.3.This reality
It applies in example, X1=2, X2=6, X3=2.2.
Calculate Al、Bl、Cl、DlValue.
Step 4, the A that will be calculatedl、Bl、Cl、DlValue substitute into formula (1) in, calculatings wavelength be λ0And λnMonochrome
Rear cut-off distance l (the λ of optical system0) and l (λn)。
Step 5 is λ according to the wavelength that step 4 obtains0And λnOptical system rear cut-off distance l (λ0) and l (λn) calculate λ0With
λnOptical system rear cut-off distance interval
Step 6 is λ according to the wavelength that step 1 obtains0The defocused intercept f (λ of optical system0) and step 5 obtain λ0With
λnOptical system rear cut-off distance intervalCalculating wavelength is λnOptical system focal length f (λn),
Fig. 7 is to obtain the solution coke of Single wavelength system using the detection method in embodiment in the embodiment of the present invention two
Comparison diagram away from-wavelength curve and theoretic acquisition data and curves.In figure, Simulation is acquisition data and curves, and BK7 is bent
Line is to use the curve of 500nm, 600nm, 700nm and 800nm by equations using the monochromatic optical system of BK7 material,
From figure 7 it can be seen that this two curves essentially coincide.
<embodiment three>
The present embodiment is the focal length for detecting any wavelength in achromatic optical system.
Fig. 4 is that interferometer measurement optical system focal length schematic diagram is used in the present invention.
As shown in Figure 3,4, the transmission wavefront detection device 300 for detecting any wavelength optical system includes 1 laser interference
Instrument 30, standard spherical mirror 31, achromatic optical system 32, plate glass 33 and plane of reflection mirror 24.Detection process is detailed in specially
Sharp CN201410439298.6), obtain focal length of the achromatic optical system 32 under 1 wavelength.Reuse rear cut-off distance detection dress
Set 200 measurement optical system, 4 wavelength rear cut-off distances.In rear cut-off distance detection device laser 20 issue light beam by negative lens 21,
Microcobjective 22, then directional light is formed by adjusting collimation lens 23, the collimation of directional light is detected by shearing interferometer 24,
Directional light is incident on lens 25 (being same structure with achromatic optical system 32 to be measured) to be measured, pools focus, passes through light intensity
The maximum position of light intensity of the detection convergence luminous point of detector 26 determines the position of focus, and after recording optical system corresponding wavelength
Intercept.
The method that the focal length of any wavelength in achromatic optical system is detected in the present embodiment, passes through the optical system measured
The focal length of 4 wavelength rear cut-off distances and 1 wavelength calculates any wavelength focal length of optical system, comprising the following steps:
Step 1 is λ using optical source wavelength0Focometer detected to obtain optical system coke to achromatic optical system
Away from f (λ0)。
Step 2 is respectively λ using wavelength1、λ2、λ3、λ4Rear cut-off distance detection device achromatic optical system is examined
It measures to three rear cut-off distance l (λ1)、l(λ2)、l(λ3)、l(λ4)；
Step 3, the achromatic optical system that step 2 is obtained are λ in wavelength1、λ2、λ3、λ4Rear cut-off distance l (λ1)、l
(λ2)、l(λ3)、l(λ4) substitute into formula:
M=1 in formula, 2,3,4,
As 400nm≤λ0≠λ1≠…≠λm≠λn≤ 1000nm or 400nm≤λ0=λ1≠…≠λm=λn≤ 1000nm,
Or 400nm≤λ0=λ1=λn≠…≠λmWhen≤1000nm, 1.1≤X1≤ 4.9,5≤X2≤ 6.2,1.8≤X3≤2.3。
As 300nm≤λ0≠λ1≠…≠λm≠λn≤ 2500nm or 300nm≤λ0=λ1≠…≠λm=λn≤ 2500nm,
Or 300nm≤λ0=λ1=λn≠…≠λmWhen≤2500nm, 2.1≤X1≤ 4.5,5≤X2≤ 6.2,2≤X3≤2.1。
In the present embodiment, 400nm≤λ0≠λ1≠λ2≠λ3≠λn≤ 1000nm, at this point, 1.1≤X1≤ 4.9,5≤X2
≤ 6.2,1.8≤X3≤2.3.That is X1、X2、X3Take any real number within the scope of this.In the present embodiment, X1=2, X2=6, X3
=2.
Calculate Al、Bl、Cl、DlValue.
Step 4, the A that will be calculatedl、Bl、Cl、DlValue substitute into formula (1) in, calculatings wavelength be λ0And λnMonochrome
Rear cut-off distance l (the λ of optical system0) and l (λn)。
Step 5 is λ according to the wavelength that step 4 obtains0And λnOptical system rear cut-off distance l (λ0) and l (λn) calculate λ0With
λnOptical system rear cut-off distance interval
Step 6 is λ according to the wavelength that step 1 obtains0The defocused intercept f (λ of optical system0) and step 5 obtain λ0With
λnOptical system rear cut-off distance intervalCalculating wavelength is λnOptical system focal length f (λn),
Fig. 8 is to obtain the solution coke of achromatic system using the detection method in embodiment in the embodiment of the present invention three
Comparison diagram away from-wavelength curve and theoretic acquisition data and curves.In figure, Simulation is acquisition data and curves, colour killing
Poor curve is that double glued achromatic optical systems use the curve of 500nm, 600nm, 700nm and 800nm by equations, from
Fig. 8 can be seen that this two curves and essentially coincide.
<example IV>
The present embodiment is the focal length for detecting any wavelength in complex achromatic optical system.
As shown in figure 4, the transmission wavefront detection device 300 for detecting any wavelength optical system includes 4 laser interferometer
30, standard spherical mirror 31, complex achromatic optical system 32, plate glass 33 and plane of reflection mirror 24.Use 4 different wave lengths
Laser interferometer 30 is identical to the light path and method of apochromatism system 32, and detection process is detailed in patent
CN201410439298.6), focal length of the complex achromatic optical system 32 under 4 wavelength is obtained.
The method that the focal length of any wavelength in complex achromatic optical system is detected in the present embodiment, passes through the optical system measured
The focal length of 4 wavelength of uniting carrys out any wavelength focal length of calculating optical system, comprising the following steps:
Step 1 is respectively respectively λ using wavelength1、λ2、λ3、λ4Laser interferometer system is detected to obtain focal length
f(λ1)、f(λ2)、f(λ3)、f(λ4)。
Step 2, the focal length f (λ for the optical system that step 1 is obtained1)、f(λ2)、f(λ3)、f(λ4) substitute into focal length public affairs
Formula:
M=1,2,3,4,
As 400nm≤λ0≠λ1≠…≠λm≠λn≤ 1000nm or 400nm≤λ0=λ1≠…≠λm=λn≤ 1000nm,
Or 400nm≤λ0=λ1=λn≠…≠λmWhen≤1000nm, 0.1≤X1≤ 3.1,3.9≤X2≤ 6.9,1.8≤X3≤ 2.4,
6.5≤X1+X2≤7.2。
As 300nm≤λ0≠λ1≠…≠λm≠λn≤ 2500nm or 300nm≤λ0=λ1≠…≠λm=λn≤ 2500nm,
Or 300nm≤λ0=λ1=λn≠…≠λmWhen≤2500nm, 0.1≤X1≤ 3.1,3.9≤X2≤ 6.7,1.9≤X3≤ 2.4,
6.6≤X1+X2≤7.2。
In the present embodiment, 310nm≤λ0≠λ1≠λ2≠λ3≠λn≤ 2400nm, at this point, 0.1≤X1≤ 3.1,3.9≤
X2≤ 6.9,1.8≤X3≤ 2.4,6.5≤X1+X2≤7.2.That is X1、X2、X3Take any real number within the scope of this.This implementation
In example, X1=1.1, X2=5.8, X3=2.2.
Calculate Af、Bf、CfAnd DfValue.Wherein, Af=Al+ C, C are constant, Bf=Bl, Cf=Cl, Df=Dl。
Step 3, the A that will be calculatedf、Bf、CfAnd DfValue substitute into above-mentioned formula (7) in, calculatings wavelength be λnOptics
Focal length f (the λ of systemn)。
Fig. 9 is to obtain the solution coke of apochromatic system using the detection method in embodiment in the embodiment of the present invention four
Comparison diagram away from-wavelength curve and theoretic acquisition data and curves.In figure, Simulation is acquisition data and curves, is disappeared again
Chromatic curve is to use the curve of 500nm, 600nm, 700nm and 800nm by equations using apochromatic system, from figure
9 as can be seen that this two curves essentially coincide.
The action and effect of embodiment
The method of the detection any wavelength focal length of transmission type optical system involved according to the present invention, because using one kind
The measurement of wavelength focometry instrument measures to obtain wavelength to be λ to optical system0System focal length, then using after m kind wavelength
Intercept measuring device obtains λ to optical system measuring1~λmRear cut-off distance l (λ1)、l(λ2)……l(λm), use l (λ1)、l
(λ2)……l(λm) the rear cut-off distance formula l (λ) of not homologous ray can be corresponded to；λ is calculated separately according to rear cut-off distance formula l (λ)0And λn
Rear cut-off distance l (λ0)、l(λn)；λ is calculated again0And λnOptical system rear cut-off distance intervalOptics
System wavelength is λnOptical system focal length f (λn) basisIt is calculated.
In addition, the method for the detection any wavelength focal length of transmission type optical system involved according to the present invention, it can be with one
The measurement of kind wavelength focometry instrument measures to obtain wavelength to be~λ to optical systemmFocal length f (λ1)...f(λm), it uses
Focal length f (λ1)...f(λm) focal length formula f (λ) that not homologous ray can be corresponded to, it is λ that wavelength, which is calculated,nOptical system coke
Away from f (λn)。
So the above method through the invention, can access the focal length of any wavelength of transmission type optical system, it is above-mentioned
Limited wavelength focometry in original method is expanded to the measurement of any wavelength focal length in a wavelength range by method, so that light
The available more accurate detection of system focal length is learned, there is broad applicability.
In addition, the rear cut-off distance in the former is that the position of the plane of reference is different from the difference of focal length in the above method, therefore it
Be substantially with the functional relation of wavelength it is the same, be only to differ a constant constant term.That is, realizing light
After any wavelength detecting of system needs several specific wavelength focal lengths or needs 1 specific wavelength focal length and several specific wavelengths
Then intercept is calculated according to correlation formula.And the measurement of optical system rear cut-off distance is easier to realize than focometry.
Above embodiment is preferred case of the invention, the protection scope being not intended to limit the invention.
Claims (10)
1. a kind of method for detecting any wavelength focal length of transmission type optical system, which comprises the following steps:
Step 1 measures the focal length of optical system using the instrument of focal length measurement, obtains optical system λ0Focal length f
(λ0)；
Step 2 measures the rear cut-off distance of optical system using the device of measurement rear cut-off distance, obtains optical system λ1~λm's
Rear cut-off distance l (λ1)、l(λ2)……l(λm)；
Step 2 is obtained the rear cut-off distance l (λ of m kind wavelength by step 31)、l(λ2)……l(λm) substitute into rear cut-off distance and wavelength side
Journey,
M=1,2,3,4,
Calculate Al、Bl、ClAnd DlValue；
Step 4, the A that will be calculatedl、Bl、ClAnd DlValue substitute into formula (1) in, calculate separately wavelength be λ0And λnOptics
System rear cut-off distance l (λ0) and l (λn)；
Step 5, the l (λ that will be calculated0) and l (λn) substitute into formula (2),
Calculate λ0And λnOptical system rear cut-off distance interval
Step 6, the f (λ that measurement is obtained0) and be calculatedIt substitutes into formula (3),
Calculating wavelength is λnOptical system focal length f (λn),
Wherein, the optical system is any one in Single wavelength system, achromatic system and apochromatic system.
2. the method for the detection any wavelength focal length of transmission type optical system according to claim 1, it is characterised in that:
Wherein, 400nm≤λ0≠λ1≠…≠λm≠λn≤ 1000nm or 400nm≤λ0=λ1≠…≠λm=λn≤ 1000nm,
Or 400nm≤λ0=λ1=λn≠…≠λm≤ 1000nm, the optical system be achromatic system or apochromatic system,
When the optical system is achromatic system, in step 3,1.1≤X1≤ 4.9,5≤X2≤ 6.2,1.8≤X3≤
2.3
When the optical system is apochromatic system, in step 3,0.1≤X1≤ 3.1,3.9≤X2≤ 6.9,1.8≤X3
≤ 2.4,6.5≤X1+X2≤7.2。
3. the method for the detection any wavelength focal length of transmission type optical system according to claim 1, it is characterised in that:
Wherein, 300nm≤λ0≠λ1≠…≠λm≠λn≤ 2500nm or 300nm≤λ0=λ1≠…≠λm=λn≤ 2500nm,
Or 300nm≤λ0=λ1=λn≠…≠λm≤ 2500nm,
When the optical system is Single wavelength system, in step 3,1.8≤X1≤ 2,3.9≤X2≤ 6.8,2.2≤X3≤
2.3
When the optical system is achromatic system, in step 3,2.1≤X1≤ 4.5,5≤X2≤ 6.2,2≤X3≤ 2.1,
When the optical system is apochromatic system, in step 3,0.1≤X1≤ 3.1,3.9≤X2≤ 6.7,1.9≤X3
≤ 2.4,6.6≤X1+X2≤7.2。
4. a kind of method for detecting any wavelength focal length of transmission type optical system, which comprises the following steps:
Step 1 measures the focal length of optical system using the instrument of focal length measurement, obtains optical system λ0Focal length f
(λ0)；
Step 2 measures the rear cut-off distance of optical system using the device of measurement rear cut-off distance, obtains optical system λ1~λm's
Rear cut-off distance l (λ1)、l(λ2)……l(λm)；
Step 2 is obtained the rear cut-off distance l (λ of m kind wavelength by step 31)、l(λ2)……l(λm) substitute into rear cut-off distance and wavelength side
Journey,
M=1,2,3,
Calculate Al、BlAnd ClValue；
Step 4, the A that will be calculatedl、Bl、ClValue substitute into formula (4) in, calculate separately wavelength be λ0And λnOptical system
Rear cut-off distance l (λ0) and l (λn)；
Step 5, the l (λ that will be calculated0) and l (λn) substitute into formula (5),
Calculate λ0And λnOptical system rear cut-off distance interval
Step 6, the f (λ that measurement is obtained0) and be calculatedIt substitutes into formula (6),
Calculating wavelength is λnOptical system focal length f (λn),
Wherein, the optical system is Single wavelength system.
5. the method for the detection any wavelength focal length of transmission type optical system according to claim 4, it is characterised in that:
Wherein, as 400nm≤λ0≠λ1≠…≠λm≠λn≤ 1000nm or 400nm≤λ0=λ1≠…≠λm=λn≤
1000nm or 400nm≤λ0=λ1=λn≠…≠λmWhen≤1000nm, in step 3,0.1≤X1≤ 1.8,2.3≤X2≤
4.9,1.8≤X1-X2≤4.4。
6. a kind of method for detecting any wavelength focal length of transmission type optical system, which comprises the following steps:
Step 1 measures the focal length of optical system using the instrument of focal length measurement, obtains optical system λ1~λmFocal length
f(λ1)...f(λm)；
Step 2, the focal length f (λ for the optical system that step 1 is obtained1)...f(λm) substitute into focal length formula:
M=1,2,3,4,
Calculate Af、Bf、CfAnd DfValue；
Step 3, the A that will be calculatedf、Bf、CfAnd DfValue substitute into above-mentioned formula (7) in, calculatings wavelength be λnOptical system
Focal length f (λn),
Wherein, the optical system is any one in Single wavelength system, achromatic system and apochromatic system.
7. the method for the detection any wavelength focal length of transmission type optical system according to claim 6, it is characterised in that:
Wherein, 400nm≤λ0≠λ1≠…≠λm≠λn≤ 1000nm or 400nm≤λ0=λ1≠…≠λm=λn≤ 1000nm,
Or 400nm≤λ0=λ1=λn≠…≠λm≤ 1000nm, the optical system be achromatic system or apochromatic system,
When the optical system is achromatic system, in step 2,1.1≤X1≤ 4.9,5≤X2≤ 6.2,1.8≤X3≤
2.3
When the optical system is apochromatic system, in step 2,0.1≤X1≤ 3.1,3.9≤X2≤ 6.9,1.8≤X3
≤ 2.4,6.5≤X1+X2≤7.2。
8. the method for the detection any wavelength focal length of transmission type optical system according to claim 6, it is characterised in that:
Wherein, 300nm≤λ0≠λ1≠…≠λm≠λn≤ 2500nm or 300nm≤λ0=λ1≠…≠λm=λn≤ 2500nm,
Or 300nm≤λ0=λ1=λn≠…≠λm≤ 2500nm,
When the optical system is Single wavelength system, in step 2,1.8≤X1≤ 2,3.9≤X2≤ 6.8,2.2≤X3≤
2.3
When the optical system is achromatic system, in step 2,2.1≤X1≤ 4.5,5≤X2≤ 6.2,2≤X3≤ 2.1,
When the optical system is apochromatic system, in step 2,0.1≤X1≤ 3.1,3.9≤X2≤ 6.7,1.9≤X3
≤ 2.4,6.6≤X1+X2≤7.2。
9. a kind of method for detecting any wavelength focal length of transmission type optical system, which comprises the following steps:
Step 1 measures the focal length of optical system using the instrument of focal length measurement, obtains optical system λ1~λmFocal length
f(λ1)...f(λm)；
Step 2, the focal length f (λ for the optical system that step 1 is obtained1)...f(λm) substitute into focal length formula:
M=1,2,3,
Calculate Af、Bf、CfValue；
Step 3, the A that will be calculatedf、Bf、CfValue substitute into above-mentioned formula (8) in, calculatings wavelength be λnOptical system coke
Away from f (λn),
Wherein, the optical system is Single wavelength system.
10. the method for the detection any wavelength focal length of transmission type optical system according to claim 9, it is characterised in that:
Wherein, as 400nm≤λ0≠λ1≠…≠λm≠λn≤ 1000nm or 400nm≤λ0=λ1≠…≠λm=λn≤
1000nm or 400nm≤λ0=λ1=λn≠…≠λmWhen≤1000nm, in step 3,0.1≤X1≤ 1.8,2.3≤X2≤
4.9,1.8≤X1-X2≤4.4。
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