CN109253867A - A kind of Focal Length of Optical system and method - Google Patents
A kind of Focal Length of Optical system and method Download PDFInfo
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Abstract
The invention discloses a kind of Focal Length of Optical system and methods, locating module is illuminated including laser point, spectroscope, point Detection location module, standard flat mirror, angle-measuring equipment, laser point illuminates locating module, emit laser light source in the focus of tested optical system, laser light spectroscope enters tested optical system, then parallel light emergence is formed, directional light reflects back into tested optical system through standard flat mirror and converges to form collimated light, collimated light reflects to form reflection auto-collimation focus through spectroscope, the angle of angle-measuring equipment measurement standard plane mirror and tested system optical axis, Detection location module positions reflection auto-collimation focus；The focal length of tested optical system is calculated according to image height and focal length relationship in the change in location Δ y of measurement standard plane mirror reflection auto-collimation focus corresponding with the variable angle Δ θ of photometry systematic optical axis.This method focus accurate positioning, adjustment, the detection of the large-aperture long-focus optical lens suitable for space optical remote sensor.
Description
Technical field
The present invention relates to a kind of Focal Length of Optical system and methods, especially in conjunction with confocal laser technology, autocollimatic
The method that straight technology and precision angle principle are realized.In optics such as optical systems especially large-aperture long-focus lens, camera lens
There is important application in the manufacture and detection of system.
Background technique
Focal length is the particularly important optical parameter of optical system.In optical system especially long-focus heavy-caliber optical system
In, the accurately measurement of focusing is particularly critical.Typical long-focus heavy-caliber optical system has Space Optical System, laser fusion
Optical system.In Space Optical System, the accurate measurement of lens focus is related to the accuracy of image ground resolution, relationship
To the accurate assembly of optical lens and focal plane device.In laser fusion optical system, the accurate measurement of the focal length of lens is then closed
It is the key characteristics such as the collimation to light laser, focusing and beam quality.
The precision angle method based on pentaprism fixed-focus is mostly used in Space Optical System at present, i.e., with pentaprism method to glass
Sieve plate fixed-focus, Focus accuracy is low, using theodolite human eye aim at logarithm, angle measurement accuracy is low, thus relative accuracy only ±
1%.In terms of the lens in laser fusion optical system survey focometry, American National igniter uses laser interference group
Focus distance measurement method realizes the phase measurement accuracy to 7m focal length ± 0.01%, and this method is limited to interferometer and with reference to lens
Bore；Domestic God Light III uses a variety of methods: confocal laser combined focal length measurement method is realized to 5m focal length ± 0.013%
Phase measurement accuracy, but this method is limited to confocal sensor aperture and with reference to aperture of lens；It improves precision angle method and uses wave
Front sensor carries out precision positioning to laser light source, realizes the phase measurement accuracy to 7m focal length ± 0.2%, this method is limited to
Wavefront sensor bore；Taibo Moire technique realizes the relative accuracy to 7m focal length ± 0.02%, and this method is limited to swash
Light collimates bore and Ronchi grating bore.
In the above method, the precision angle method precision based on pentaprism fixed-focus is low, other methods measurement bore is difficult to break through,
It is unable to satisfy the focal length precise measurement measurement of 10m or more more long-focus meter level bore optical system.
Summary of the invention
Technology of the invention solves the problems, such as: overcome the deficiencies in the prior art proposes a kind of Focal Length of Optical side
Method solves the problems, such as that focus positioning accuracy is low when Focal Length of Optical.
The technical solution of the invention is as follows: a kind of Focal Length of Optical system, it is characterised in that including laser point
Illuminate locating module, spectroscope, point Detection location module, standard flat mirror, angle-measuring equipment, in which:
Laser point illuminates locating module, and laser light source, laser light point are emitted in the focus of tested optical system
Light microscopic enters tested optical system, then forms parallel light emergence, directional light reflects back into tested optical system through standard flat mirror
System convergence forms collimated light, and collimated light reflects to form reflection auto-collimation focus, angle-measuring equipment measurement standard plane mirror through spectroscope
With the angle of tested system optical axis, Detection location module positions reflection auto-collimation focus；By adjusting measurement mark
Angle of the directrix plane mirror relative to optical axis, measurement standard plane mirror are corresponding with the variable angle Δ θ of photometry systematic optical axis anti-
The focal length of tested optical system is calculated according to image height and focal length relationship in the change in location Δ y for penetrating auto-collimation focus.
The laser point illumination locating module includes laser light source, illumination spectroscope, illumination objective lens, point illumination pin hole, shines
Bright detector, wherein laser light source is located in the rear focus of illumination objective lens, and the object space that point illumination pin hole is located at illumination objective lens is burnt
On point, illumination spectroscope is used between laser light source and illumination objective lens, and illuminated detector is located at by illumination spectroscope reflection
At illumination objective lens rear focus on.
The F number of the illumination objective lens is less than or equal to the F number of tested optical system.
Described Detection location module includes position locator, detection object lens, point detecting pinhole, wherein position locator
In the rear focus of detection object lens, point detecting pinhole is located in the object focus of detection object lens.
The F number of the detection object lens is less than or equal to the F number of tested optical system.
Another technical solution of the invention is: a kind of Focal Length of Optical method, and this method includes as follows
Step:
The position of s1, adjustment laser point illumination locating module, emit laser light in the focus of tested optical system
Source then forms parallel light emergence so that laser light spectroscope enters tested optical system；
S2, standard flat mirror is placed perpendicular to the position of tested system optical axis in tested optical system object space, makes to put down
Row light reflects back into tested optical system through standard flat mirror and converges to form collimated light, and collimated light reflects to form reflection through spectroscope
Auto-collimation focus；
S3, using Detection location module to reflection auto-collimation focus position, measurement standard plane mirror with by photometry
The angle of systematic optical axis；
S4, the posture for adjusting measurement standard plane mirror change the angle of measurement standard plane mirror and photometry systematic optical axis,
And then the angle of secondary measurement standard plane mirror and tested system optical axis；
S5, reflection auto-collimation focus is repositioned using Detection location module, calculates standard flat mirror and photometry system
The change in location Δ y of the corresponding reflection auto-collimation focus of the variable angle Δ θ of system optical axis；
S6, step s4~step s5 is repeated, obtains the variable angle Δ of one group of standard flat mirror Yu photometry systematic optical axis
θiThe change in location Δ y of corresponding reflection auto-collimation focusi, i=1~N is according to image height and focal length relationship, using least square
The focal length of tested optical system is calculated in method.
The laser point illumination locating module includes laser light source, illumination spectroscope, illumination objective lens, point illumination pin hole, shines
Bright detector, wherein laser light source is located in the rear focus of illumination objective lens, and the object space that point illumination pin hole is located at illumination objective lens is burnt
On point, illumination spectroscope is used between laser light source and illumination objective lens, and illuminated detector is located at by illumination spectroscope reflection
At illumination objective lens rear focus on.
The step s1's method particularly includes:
(1.1), the position of adjustment laser point illumination locating module keeps an illumination pin hole burnt in the design of tested optical system
Point on；
(1.2), it opens laser point illumination locating module and emits laser illuminator light source, so that laser illuminator light source is by light splitting
Mirror enters tested optical system, then forms parallel light emergence, is then reflected back tested optical system through standard flat mirror and converges,
Laser after convergence forms auto-collimation focus after spectroscope transmits；
(1.3), the position of adjustment laser point illumination locating module, the spy until forming auto-collimation focus on illuminated detector
Hot spot is surveyed, thus by the point illumination pin hole Primary Location of laser point illumination locating module in the actual focal spot for being tested optical system
On.
(1.4), the position of further whole laser point illumination locating module, makes the light intensity of hot spot reach maximum value, to make
The point illumination pin hole of laser point illumination locating module is accurately located on the actual focal spot of tested optical system.
Described Detection location module includes position locator, detection object lens, point detecting pinhole, wherein position locator
In the rear focus of detection object lens, point detecting pinhole is located in the object focus of detection object lens.
The method that reflection auto-collimation focus is positioned using Detection location module are as follows:
(3.1), the position of adjustment point Detection location module reflects a detecting pinhole certainly in the design of tested optical system
It collimates in focus；
(3.2), it opens laser point illumination locating module and emits laser illuminator light source, so that laser illuminator light source is by light splitting
Mirror enters tested optical system, then forms parallel light emergence, is then reflected back tested optical system through standard flat mirror and converges,
Laser after convergence forms reflection auto-collimation focus after spectroscope reflects；
(3.3), the position of adjustment point Detection location module, laser are being positioned by point detecting pinhole, detection object lens convergence
Detection hot spot is formed on detector, thus by the point detecting pinhole Primary Location of Detection location module in tested optical system
Practical reflection auto-collimation focus on.
(3.4), the position for further adjusting point Detection location module makes the light intensity for detecting hot spot reach maximum value, thus
It is accurately located at the point detecting pinhole that will put Detection location module in the practical reflection auto-collimation focus of tested optical system.
Compared with the prior art, the invention has the advantages that:
(1), it is burnt to solve existing heavy caliber focal length optical lens for the technological means that the present invention has used confocal laser to measure
Away from test process, the repeatability and accuracy of the positioning measurement result of the focal plane or focus of introducing not can guarantee, can survey bore
The problems such as limited, repeatability, accuracy and practicability with higher；
(2), the present invention uses optical autocollimating technological means, realizes the high accuracy positioning to auto-collimation focus and measurement,
It thus can be improved the accuracy of measurement and precision of focal position changes delta y, thus fundamentally solve existing precision angle
The method problem low to Δ y accuracy of measurement and precision because of the low bring of Focus accuracy；
(3), the present invention use least square method data processing data, can eliminate because Adjustment precision it is limited caused by standard
The influence of plane mirror and the initial angle deviation α of tested system optical axis, it is thus possible to improve the credible of focal length calculating
Degree.
(4), the present invention is appeared in using the peak value of the laterally and axially Intensity response of confocal laser auto-collimating optical system
This feature when the illumination objective lens focus of laser point illumination locating module is overlapped with the focus precision of tested optical system, by laser
The laser light source precision fixed-focus of point illumination locating module outgoing is on the image space axis of tested optical system in focus.
(5), the present invention is appeared in using the peak value of the laterally and axially Intensity response of confocal laser auto-collimating optical system
This feature when the detection object focal point of point Detection location module is overlapped with the focus precision of tested optical system, detection is fixed
The focus of the detection object lens of position module is accurately located on the reflection auto-collimation focal plane of tested optical system and to reflection auto-collimation
It is accurately positioned on axis with the outer focus of axis；
(6), the present invention uses high precision angle-measuring equipment, improves the measurement accuracy of Δ θ；
(7), the bore of the tested optical system of the present invention is limited solely by the bore of standard flat mirror, it can be achieved that in standard flat
Aperture of mirror is able to solve the focometry of large-aperture long-focus lens, camera lens with the detection of inner optical system.
Detailed description of the invention
Fig. 1 is the method implementation diagram of the embodiment of the present invention.
Fig. 2 is that the confocal laser auto-collimating optical system of the embodiment of the present invention laterally and axially responds schematic diagram.
Fig. 3 is the focometry schematic diagram of the embodiment of the present invention.
Specific embodiment
Below in conjunction with the drawings and specific embodiments, the present invention is described in detail.
The present invention provides a kind of Focal Length of Optical system, that is, confocal laser auto-collimating optical systems, utilize laser
Confocal auto-collimating optical system entrance focus and the stringent conjugate property of auto-collimation focus, axial accurate fixed-focus characteristic and transverse direction
High-resolution characteristic realizes the laser light source precision positioning by laser point illumination locating module outgoing in confocal laser auto-collimation optics
Entrance focus on the axis of system, by Detection location module precision positioning confocal laser auto-collimating optical system autocollimatic d-axis
In the outer focus of upper focus, axis, the accurate changes delta y of position between the two is measured；It is synchronous to use precision angle equipment, to autocollimatic
The outer focus respective field of vision angle of focus, axis changes the accurate measurement of 2 Δ θ on d-axis, is closed later using focal length and field angle and image height
It is that formula calculates focal length f, realizes the accurate measurement to tested optical system focal length, easy to operate and criterion is objective accurate, is easy to
It realizes automatic measurement, can satisfy focusing measurement needs in all kinds of optical system optics manufactures and detection.
As shown in Figure 1, the system hardware includes laser point illumination locating module 1, spectroscope 2, point Detection location module
3, standard flat mirror 6, angle-measuring equipment 7, in which:
Laser point illuminates locating module 1, emits laser light source, laser light in the focus of tested optical system 5
Spectroscope 2 enters tested optical system 5, then forms parallel light emergence, directional light reflects back into tested light through standard flat mirror 6
The convergence of system 5 forms collimated light, and collimated light reflects to form reflection auto-collimation focus, 7 measurement standard of angle-measuring equipment through spectroscope 2
The angle of plane mirror 6 and tested 5 optical axis of optical system, 3 pairs of reflection auto-collimation focuses of Detection location module position；Pass through tune
Angle of the whole measurement standard plane mirror 6 relative to optical axis, the variable angle of measurement standard plane mirror 6 and 5 optical axis of photometry system
Tested optical system 5 is calculated according to image height and focal length relationship in the change in location Δ y of the corresponding reflection auto-collimation focus of Δ θ
Focal length.
The laser point illumination locating module 1 includes laser light source 101, illumination spectroscope 102, illumination objective lens 103, point photograph
Bright pin hole 104, illuminated detector 105, wherein laser light source 101 is located in the rear focus of illumination objective lens 103, point illumination needle
Hole 104 is located in the object focus of illumination objective lens 103, and illumination spectroscope 102 is used for laser light source 101 and illumination objective lens 103
Between, illuminated detector 105 is located in 103 rear focus of illumination objective lens reflected to form by illumination spectroscope 102.The illumination
Detector 105 can be point detector, be also possible to face battle array image detector.The F number of the illumination objective lens 103 is less than or equal to quilt
The F number of photometry system 5.It can be replaced according to the F number of tested optical system 5, be allowed to match with the F number of tested optical system 5.
Laser light source 101 generates laser, is focused after laser light spectroscope 102 by illumination objective lens 103 and through illuminating pin hole
104 outgoing, meanwhile, the laser transmitted through spectroscope 2 converges, the laser after convergence through over-illumination pin hole 104, illumination objective lens 103
Detection hot spot is formed on illuminated detector 105 through the illumination reflection of spectroscope 102.
Described Detection location module 3 includes position locator 301, detection object lens 303, point detecting pinhole 302, wherein
Position locator 301 is located in the rear focus of detection object lens 303, carries out shaping filter, point detection needle to incident laser hot spot
Hole 302 is located in the object focus of detection object lens 303.The position locator 301 of Detection location module 3 can be point detector,
It is also possible to face battle array image detector.The F number of the detection object lens 303 is less than or equal to the F number of tested optical system 5.It can root
It is replaced according to the F number of tested optical system 5, is allowed to match with the F number of tested optical system 5.
Based on above-mentioned Focal Length of Optical system, the present invention also provides a kind of Focal Length of Optical method,
This method comprises the following steps:
The position of s1, adjustment laser point illumination locating module 1, emit laser light source in the focus of tested optical system 5,
So that laser light spectroscope 2 enters tested optical system 5, parallel light emergence is then formed；Method particularly includes:
1.1, the position of adjustment laser point illumination locating module 1 makes an illumination pin hole 104 in the design of tested optical system 5
In focus；
1.2, it opens laser point illumination locating module 1 and emits laser illuminator light source, so that laser illuminator light source is by light splitting
Mirror 2 enters tested optical system 5, then forms parallel light emergence, is then reflected back tested optical system 5 through standard flat mirror 6
Convergence, the laser after convergence form auto-collimation focus after the transmission of spectroscope 2；
1.3, the position of adjustment laser point illumination locating module 1, until forming auto-collimation focus on illuminated detector 105
Hot spot is detected, thus by point illumination 104 Primary Location of pin hole of laser point illumination locating module 1 in tested optical system 5
On actual focal spot.
1.4, the further position of whole laser point illumination locating module 1, makes the light intensity of hot spot reach maximum value, thus make by
The point illumination pin hole 104 of laser point illumination locating module 1 is accurately located on the actual focal spot of tested optical system 5.
Specifically:
The optical axis direction for defining tested optical system 5 is Z-direction, perpendicular to tested optical system 5 optical axis direction it is flat
Face is XOY plane, and upper Continuous Drive laser point illuminates locating module 1 in X direction, measures hot spot light by illuminated detector 105
The point of strong simultaneously synchronous recording laser point illumination locating module 1 illuminates the position in the X direction of pin hole 104, is then fitted light intensity and cross
Light intensity peak and its corresponding X-direction position xImax are obtained to positional relationship curve, driving laser point illumination locating module 1 makes
Its point illumination pin hole 104 is located at xImax, then positions its point illumination pin hole 104 in the Y direction using same method
At yImax；Then it is located in its point illumination pin hole 104 at the zImax of axial Z-direction using same method；It thus will be by
Laser point illuminates laser light source precision positioning that locating module 1 is emitted on the image space axis of tested optical system 5 on focal position,
Focus precision on auto-collimation focus and image space axis is transmitted at this time to be overlapped, and it is accurate to provide position for confocal laser auto-collimating optical system
Laser light source illumination.
The peak value that the laterally and axially Intensity response of confocal laser auto-collimating optical system is utilized in the step appears in sharp
When 103 focus of illumination objective lens of spot-illumination locating module 1 is overlapped with the transmission auto-collimation focus precision of tested optical system 5 this
One feature, the laser light source precision positioning that confocal laser microscope system 1 is emitted is on the image space axis of tested optical system 5
In focus, position is provided for confocal laser auto-collimating optical system and accurately puts illumination.
S2, standard flat mirror 6 is placed perpendicular to the position of tested 5 optical axis of optical system in tested 5 object space of optical system, made
Directional light reflects back into the tested convergence of optical system 5 through standard flat mirror 6 and forms collimated light, and collimated light is through 2 reflection of spectroscope
At reflection auto-collimation focus；
S3, it is positioned using 3 pairs of reflection auto-collimation focuses of Detection location module.Due to 6 pose adjustment of standard flat mirror
Precision is limited, and in actual conditions, can only adjust standard flat mirror 6 makes its reflecting surface and the optical axis of tested optical system 5 as far as possible
Vertically, therefore, it is necessary to the angles using measurement standard plane mirror 6 and tested 5 optical axis of optical system.
The method that auto-collimation focus is positioned is reflected using 3 pairs of Detection location module are as follows:
3.1, the position of adjustment point Detection location module 3 keeps a detecting pinhole 302 anti-in the design of tested optical system 5
It penetrates in auto-collimation focus；
3.2, it opens laser point illumination locating module 1 and emits laser illuminator light source, so that laser illuminator light source is by light splitting
Mirror 2 enters tested optical system 5, then forms parallel light emergence, is then reflected back tested optical system 5 through standard flat mirror 6
Convergence, the laser after convergence form reflection auto-collimation focus after the reflection of spectroscope 2；
3.3, the position of adjustment point Detection location module 3, laser are converged by point detecting pinhole 302, detection object lens 303,
Detection hot spot is formed in position locator 301, thus by 302 Primary Location of point detecting pinhole of Detection location module 3
In the practical reflection auto-collimation focus of tested optical system 5.
3.4, the position for further adjusting point Detection location module 3 makes the light intensity for detecting hot spot reach maximum value, to make
The point detecting pinhole 302 of Detection location module 3 is accurately located to the practical reflection auto-collimation focus of tested optical system 5
On.
Specifically:
Equally, the reflection auto-collimation optical axis direction for defining tested optical system 5 is the direction Z ', perpendicular to tested optical system
The plane of 5 reflection auto-collimation optical axis direction is X ' OY ' plane.Using shown in Fig. 2, the cross of confocal laser auto-collimating optical system
To, to 3 precision positioning of Detection location module, specific method is with axial response: Continuous Drive point detects on the lateral direction X '
Locating module 3, synchro measure hot spot light intensity and lateral position, are then fitted light intensity and lateral position relation curve obtains light intensity peak
Value and its corresponding lateral position xImax ', driving point Detection location module 3 position its detecting pinhole 302 at xImax ',
Then it is located in its detecting pinhole 302 at the yImax ' in the lateral direction Y ' using same method；Then same method is used
It is located in its detecting pinhole 302 at the zImax ' in the axial direction X '；It will thus be detected by the point of Detection location module 3
302 precision positioning of pin hole reflects the autocollimatic d-axis part of the body cavity above the diaphragm housing the heart and lungs on the reflection autocollimatic d-axis part of the body cavity above the diaphragm housing the heart and lungs point position of tested optical system 5 at this time
Focus conjugation, provides position for confocal laser auto-collimating optical system and accurately puts detection on point and image space axis；It measures and records
The position y0 of auto-collimation focus is reflected at this time.
The step appears in a spy using the peak value of the laterally and axially Intensity response of confocal laser auto-collimating optical system
This is special when 303 focus of detection object lens of survey locating module 3 is overlapped with the reflection auto-collimation focus precision of tested optical system 5
Point, realize to reflection autocollimatic d-axis on, outside axis the accurate positionin of focus and focal position accurate measurement.
When the maximum that the position locator of Detection location module 3 301 is surveyed, laser point illuminates the photograph of locating module 1
The focus of the detection object lens 303 of the focus and point Detection location module 3 of bright object lens 103 is conjugated；
S4, the posture for adjusting measurement standard plane mirror 6 change the folder of measurement standard plane mirror 6 and 5 optical axis of photometry system
The angle of angle and then secondary measurement standard plane mirror 6 and tested 5 optical axis of optical system；
Driving standard flat mirror 6 makes it turn over a minute angle, measures the angle, θ of standard flat mirror 3 at this time1, measurement is simultaneously
Record reflects the position y1 of auto-collimation focus at this time；Remember that focal position variation is Δ y1=y1-y0；The variation of standard reflection mirror angle
For Δ θ1=θ1-θ0, the variation that focus corresponds to field angle is 2 Δ θ1。
3 pairs of s5, Detection location module reflection auto-collimation focuses reposition, and calculate standard flat mirror 6 and photometry system 5
The change in location Δ y of the corresponding reflection auto-collimation focus of the variable angle Δ θ of optical axis；
S6, step s4~step s5 is repeated, obtains the variable angle of one group of standard flat mirror 6 Yu 5 optical axis of photometry system
ΔθiThe change in location Δ y of corresponding reflection auto-collimation focusi, i=2 ... n, according to image height and focal length relationship, using minimum two
Multiply method, the focal length of tested optical system 5 is calculated.
Image height and focal length relationship are as follows:
Ftan (+2 α of 2 Δ θ)=Δ y
S7, by ftan (+2 α of 2 Δ θ)=Δ y, by Least Square in Processing, obtain tested optical lens focal length f and
The initial angle deviation α of standard flat reflecting mirror and tested system optical axis.
In conjunction with precision angle equipment 7, on reflection autocollimatic d-axis, outside axis focus respective field of vision angle accurate measurement, and tie
Least square data processing method is closed, the initial alignment error of standard flat mirror 6 and tested optical system 5 is separated, is realized to quilt
The focal length of photometry system 5 accurately measures.
Operation of the present invention is simple and criterion is objective accurate, focus registration, it is easy to accomplish automatic measurement, in spatial light
The adjustment of large-aperture long-focus optical lens of remote sensor is learned, in detection, in the heavy caliber focal length of laser fusion optical system
There is highly important application in detection away from lens, it can also be used to which the focal length of all kinds of routine bore focal length optics, top are burnt
Away from measurement.
This specification, which is not described in detail, partly belongs to common sense well known to those skilled in the art.
Claims (10)
1. a kind of Focal Length of Optical system, it is characterised in that including laser point illumination locating module (1), spectroscope (2),
Point Detection location module (3), standard flat mirror (6), angle-measuring equipment (7), in which:
Laser point illuminates locating module (1), and laser light source, laser light light splitting are emitted in the focus of tested optical system (5)
Mirror (2) enters tested optical system (5), then forms parallel light emergence, directional light reflects back into tested through standard flat mirror (6)
Optical system (5) convergence forms collimated light, and collimated light reflects to form reflection auto-collimation focus, angle-measuring equipment (7) through spectroscope (2)
The angle of measurement standard plane mirror (6) and tested optical system (5) optical axis, Detection location module (3) is to reflection auto-collimation focus
It is positioned；Angle by adjusting measurement standard plane mirror (6) relative to optical axis, measurement standard plane mirror (6) and photometry
The change in location Δ y of the corresponding reflection auto-collimation focus of the variable angle Δ θ of system (5) optical axis, according to image height and focal length relationship,
The focal length of tested optical system (5) is calculated.
2. a kind of Focal Length of Optical system according to claim 1, it is characterised in that the laser point illumination is fixed
Position module (1) includes laser light source (101), illumination spectroscope (102), illumination objective lens (103), point illumination pin hole (104), illumination
Detector (105), wherein laser light source (101) is located in the rear focus of illumination objective lens (103), point illumination pin hole (104) position
In in the object focus of illumination objective lens (103), illumination spectroscope (102) is used for laser light source (101) and illumination objective lens (103)
Between, illuminated detector (105) is located in illumination objective lens (103) rear focus reflected to form by illumination spectroscope (102).
3. a kind of Focal Length of Optical system according to claim 2, it is characterised in that the illumination objective lens (103)
F number be less than or equal to the F number of tested optical system (5).
4. a kind of Focal Length of Optical system according to claim 1, it is characterised in that described Detection location mould
Block (3) includes position locator (301), detection object lens (303), point detecting pinhole (302), wherein position locator (301) position
In in the rear focus of detection object lens (303), point detecting pinhole (302) is located in the object focus of detection object lens (303).
5. a kind of Focal Length of Optical system according to claim 4, it is characterised in that the detection object lens (303)
F number be less than or equal to the F number of tested optical system (5).
6. a kind of Focal Length of Optical method based on system described in claim 1, it is characterised in that include the following steps:
S1, adjustment laser point illuminate the position of locating module (1), emit laser light source in the focus of tested optical system (5),
So that laser light spectroscope (2) enters tested optical system (5), parallel light emergence is then formed；
S2, standard flat mirror (6) are placed perpendicular to the position of tested optical system (5) optical axis in tested optical system (5) object space,
So that directional light is reflected back into tested optical system (5) convergence through standard flat mirror (6) and form collimated light, collimated light is through spectroscope
(2) reflection auto-collimation focus is reflected to form；
S3, using Detection location module (3) to reflection auto-collimation focus position, measurement standard plane mirror 6 with by photometry
The angle of system (5) optical axis；
S4, the posture for adjusting measurement standard plane mirror (6) change measurement standard plane mirror (6) and photometry system (5) optical axis
The angle of angle and then secondary measurement standard plane mirror (6) and tested optical system (5) optical axis；
S5, reflection auto-collimation focus is repositioned using Detection location module (3), calculates standard flat mirror (6) and photometry
The change in location Δ y of the corresponding reflection auto-collimation focus of the variable angle Δ θ of system (5) optical axis；
S6, step s4~step s5 is repeated, obtains the variable angle of one group of standard flat mirror (6) Yu photometry system (5) optical axis
ΔθiThe change in location Δ y of corresponding reflection auto-collimation focusi, i=1~N is according to image height and focal length relationship, using least square
The focal length of tested optical system (5) is calculated in method.
7. a kind of Focal Length of Optical method according to claim 6, it is characterised in that the laser point illumination is fixed
Position module (1) includes laser light source (101), illumination spectroscope (102), illumination objective lens (103), point illumination pin hole (104), illumination
Detector (105), wherein laser light source (101) is located in the rear focus of illumination objective lens (103), point illumination pin hole (104) position
In in the object focus of illumination objective lens (103), illumination spectroscope (102) is used for laser light source (101) and illumination objective lens (103)
Between, illuminated detector (105) is located in illumination objective lens (103) rear focus reflected to form by illumination spectroscope (102).
8. a kind of Focal Length of Optical method according to claim 7, it is characterised in that the step s1's is specific
Method are as follows:
(1.1), the position of adjustment laser point illumination locating module (1) makes illumination pin hole (104) in tested optical system (5)
It designs in focus；
(1.2), it opens laser point illumination locating module (1) and emits laser illuminator light source, so that laser illuminator light source is by light splitting
Mirror (2) enters tested optical system (5), then forms parallel light emergence, is then reflected back through standard flat mirror (6) by photometry
System (5) convergence, the laser after convergence form auto-collimation focus after spectroscope (2) transmission；
(1.3), the position of adjustment laser point illumination locating module (1), until illuminated detector (forms auto-collimation focus on 105
Detection hot spot, thus by laser point illumination locating module (1) point illumination pin hole (104) Primary Location in tested optical system
It unites on the actual focal spot of (5).
(1.4), the further position of whole laser point illumination locating module (1), makes the light intensity of hot spot reach maximum value, thus make by
Point illumination pin hole (104) of laser point illumination locating module (1) is accurately located on the actual focal spot of tested optical system (5).
9. a kind of Focal Length of Optical method based on system described in claim 6, it is characterised in that the point detection is fixed
Position module (3) includes position locator (301), detection object lens (303), point detecting pinhole (302), wherein position locator
(301) it is located in the rear focus of detection object lens (303), point detecting pinhole (302) is located at the object focus of detection object lens (303)
On.
10. a kind of Focal Length of Optical method according to claim 9, it is characterised in that use Detection location module
(3) method that reflection auto-collimation focus is positioned are as follows:
(3.1), the position of adjustment point Detection location module (3) makes a detecting pinhole (302) setting in tested optical system (5)
In meter reflection auto-collimation focus；
(3.2), it opens laser point illumination locating module (1) and emits laser illuminator light source, so that laser illuminator light source is by light splitting
Mirror (2) enters tested optical system (5), then forms parallel light emergence, is then reflected back through standard flat mirror (6) by photometry
System (5) convergence, the laser after convergence form reflection auto-collimation focus after spectroscope (2) reflection；
(3.3), the position of adjustment point Detection location module (3), laser are converged by point detecting pinhole (302), detection object lens (303)
It is poly-, detection hot spot is formed on position locator (301), will thus put the point detecting pinhole (302) of Detection location module (3)
Primary Location is in the practical reflection auto-collimation focus of tested optical system (5).
(3.4), the position for further adjusting point Detection location module (3) makes the light intensity for detecting hot spot reach maximum value, to make
The point detecting pinhole (302) for putting Detection location module (3) is accurately located to the practical reflection auto-collimation of tested optical system (5)
In focus.
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