CN110297110B

CN110297110B - Probe structure, clamp, containing box, automatic probe replacing system and method

Info

Publication number: CN110297110B
Application number: CN201810235073.7A
Authority: CN
Inventors: 董兰生; 张卓贤; 朱南昌; 游海洋; 王旭东; 刁艺; 施朱斌
Original assignee: KLA Tencor Corp
Current assignee: KLA Corp
Priority date: 2018-03-21
Filing date: 2018-03-21
Publication date: 2022-02-15
Anticipated expiration: 2038-03-21
Also published as: CN110297110A

Abstract

The present disclosure relates to probe structures, fixtures, containment boxes, automated probe replacement systems, and methods. The embodiment of the invention relates to a non-magnetic probe structure, which comprises: a carrier body having a front side end, a first side end, a second side end, and a rear side end; the front convex part extends from the front side end of the carrier body to the direction far away from the carrier body, and is provided with a far end for bearing the probe and a near end which is connected with the front side end of the carrier body; the first side convex part and the second side convex part respectively extend to a distance from the first side end and the second side end of the carrier body to the direction far away from the carrier body. The probe clamp is used for clamping the probe structure. The containing box is used for containing the probe structure. The system comprises the probe structure, a probe clamp, a containing box, a robot arm and a server, wherein the robot arm is configured to automatically take, place and replace the probe structure between the probe clamp and the containing box through the control of the server.

Description

Probe structure, clamp, containing box, automatic probe replacing system and method

Technical Field

The present disclosure relates to systems and methods for testing electrical properties of semiconductor devices, and more particularly, to a probe structure, a fixture, a receiving box, and an automated probe replacement system and method for testing electrical properties of semiconductor devices.

Background

The following description and examples are not admitted to be prior art by virtue of their inclusion in this section.

In one type of system for detecting the film impedance of a semiconductor device, a plurality of cantilever-type probes are used for making electrical contact with the surface of a sample, and current is transmitted to the sample through two probes to measure the voltage of the other probes, thereby realizing impedance measurement of the sample. In addition, the probe can also measure other electrical properties of the film. A conductive film is coated on the tip of the probe to make electrical contact with the sample. The coating material is gradually removed by contact during use of the probe. When the performance of a certain number of contacts, repeatability and accuracy exceeds an acceptable level, the old probe needs to be replaced and a new probe installed.

Under typical use conditions, the probe may need to be replaced within a day, week or month. In some special cases, if different types of probes need to be used between different chip films, the replacement of the probes is more frequent than under normal use conditions.

Due to the complexity of the thin film impedance measurement system, it is often necessary for a trained engineer to perform probe replacement, fine tuning and/or calibration within 1-2 hours before the measurement system returns to operation. This results in high cost for each manual replacement, and the consistency of the replaced probe is low due to the technical difference of manual replacement, which is a great limiting factor for the full utilization of the measurement system.

Disclosure of Invention

One embodiment of the present disclosure is to provide a probe structure, a fixture, a receiving box, an automated probe replacing system and a method thereof, which can effectively solve the problems of high cost, poor probe consistency and low full utilization rate of a measuring system caused by manual probe replacement.

An embodiment of the present disclosure provides a non-magnetic probe structure, including: a carrier body having a front side end, a first side end, a second side end, and a rear side end; the front convex part extends from the front side end of the carrier body to the direction far away from the carrier body, and the front convex part is provided with a far end for bearing the probe and a near end which is connected with the front side end of the carrier body; a first side protrusion extending from a first side end of the carrier body to a distance in a direction away from the carrier body; and a second side protrusion extending from a second side end of the carrier body to a distance in a direction away from the carrier body.

In some embodiments, the probe structure further comprises a chip and a probe, the chip cantilever is disposed at the distal end of the front convex portion, the probe is fixed to the chip and electrically connected with the chip, and the chip is electrically connected with the metal trace through a wire.

The embodiment of the present disclosure further provides a non-magnetic probe fixture, which is used for mounting and fixing the above-mentioned non-magnetic probe structure, wherein the probe fixture includes: the bearing seat is used for bearing the probe structure; a locking assembly for locking securing the probe structure or unlocking releasing the probe structure; when the locking component locks and fixes the probe structure, the locking state is achieved; when the locking assembly is unlocked to release the probe structure, the probe structure is in an unlocked state.

The embodiment of the present disclosure further provides a non-magnetic containing box for containing the non-magnetic probe structure; the accommodating box comprises one or more first accommodating grooves which are arranged in rows and columns, and each first accommodating groove is used for accommodating the carrier body, the front convex part, the first side convex part and the second side convex part of one probe structure; the first accommodation groove includes: when the probe structure is placed in the first accommodating groove, the third positioning column is located at the first positioning point, and the fourth positioning column is located at the second positioning point; and a second receiving groove for receiving the chip of the probe structure and the probe.

An embodiment of the present disclosure further provides an automated probe replacement system, including: a server, a robot arm, the non-magnetic probe structure, the non-magnetic probe clamp and the non-magnetic accommodating box; the robot arm is configured to automatically pick and place the probe structure between the probe fixture and the accommodating box under the control of the server.

The embodiment of the disclosure further provides an automatic probe replacement method, which includes the following steps: providing an automated probe replacement system as described above; moving a vacuum suction nozzle of a robot arm to a position above a probe structure to be replaced on a probe clamp, starting the vacuum suction nozzle, and sucking the probe structure to be replaced through the vacuum suction nozzle; converting the probe clamp from a locked state to an unlocked state to unlock and release the probe structure to be replaced; moving and storing the probe structure to be replaced into a containing box through the vacuum suction nozzle of the robot arm, and closing the vacuum suction nozzle; moving the vacuum suction nozzle of the robot arm to the position above the probe structure to be used on the containing box, then opening the vacuum suction nozzle, and sucking the probe structure to be used; moving and placing the probe structure to be used on the probe clamp through the robot arm; converting the probe clamp from the unlocking state to the locking state to lock and fix the probe structure to be used; and closing the vacuum nozzle.

Drawings

Fig. 1 is a schematic structural diagram of a probe structure according to an embodiment of the disclosure.

Fig. 2 is a schematic structural diagram of a probe clamp in an unlocked state with a probe structure placed thereon according to an embodiment of the disclosure.

Fig. 3 is a partial schematic structural view of a probe clamp in an unlocked state with a probe structure placed thereon according to an embodiment of the disclosure.

Fig. 4 is a schematic side view of a probe clamp in a locked state with a probe structure placed thereon according to an embodiment of the disclosure.

Fig. 5 is a schematic cross-sectional view of a probe clamp in an unlocked state with a probe structure placed thereon according to an embodiment of the disclosure.

Fig. 6 is a schematic cross-sectional view of a probe clamp in a locked state with a probe structure placed thereon according to an embodiment of the disclosure.

Fig. 7 is a schematic structural diagram of a carrier of a probe fixture according to an embodiment of the disclosure.

Fig. 8 is a schematic structural view illustrating a carrier of a probe fixture with a probe structure disposed thereon according to an embodiment of the disclosure.

Fig. 9 is an enlarged schematic structural view of a structure within a dotted line frame 3 in fig. 3.

Fig. 10 is a schematic cross-sectional view of a portion of a probe clamp in a locked state with a probe structure placed thereon according to an embodiment of the disclosure.

Fig. 11 is a schematic structural diagram of a probe holder with a measuring arm mounted thereon according to an embodiment of the disclosure.

Fig. 12 is a schematic structural diagram of a containing box containing a probe structure according to an embodiment of the disclosure.

Fig. 13 is a schematic structural diagram of an automated probe replacement system according to an embodiment of the disclosure.

Fig. 14 is a schematic diagram of a robot arm of an automated probe replacement system according to an embodiment of the disclosure.

Fig. 15 is a flowchart illustrating an automatic probe replacement method according to an embodiment of the disclosure.

Detailed Description

The disclosed embodiments provide many different embodiments or examples for implementing different features of the disclosed embodiments. Specific examples of components and arrangements are described below to simplify the present disclosure. Of course, these are merely examples and are not intended to be limiting. For example, in the following description, forming a first feature over or on a second feature may include embodiments in which the first and second features are formed in direct contact, and may also include embodiments in which additional features may be formed between the first and second features such that the first and second features may not be in direct contact. Additionally, embodiments of the present disclosure may repeat reference numerals and/or letters in the various examples. This repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed.

Furthermore, for ease of description, spatially relative terms (e.g., "top," "bottom," "below," "lower," "over," "upper," and the like) may be used herein to describe one component or feature's relationship to another component(s) or feature(s), as illustrated in the figures. Spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

As used herein, the terms "substantially", "substantially" and "about" are used to describe and illustrate minor variations. When used in conjunction with an event or circumstance, the terms can refer to instances where the event or circumstance occurs precisely as well as instances where the event or circumstance occurs in close proximity. For example, when used in conjunction with numerical values, the term can refer to a range of variation that is less than or equal to ± 10% of the stated numerical value, such as less than or equal to ± 5%, less than or equal to ± 4%, less than or equal to ± 3%, less than or equal to ± 2%, less than or equal to ± 1%, less than or equal to ± 0.5%, less than or equal to ± 0.1%, or less than or equal to ± 0.05%. For example, two numerical values are considered to be "substantially" identical if the difference between the two numerical values is less than or equal to ± 10% (e.g., less than or equal to ± 5%, less than or equal to ± 4%, less than or equal to ± 3%, less than or equal to ± 2%, less than or equal to ± 1%, less than or equal to ± 0.5%, less than or equal to ± 0.1%, or less than or equal to ± 0.05%) of the mean of the values.

Additionally, amounts, ratios, and other numerical values are sometimes presented herein in a range format. It is to be understood that such range format is used for convenience and brevity, and should be interpreted flexibly to include not only the numerical values explicitly recited as the limits of the range, but also to include all the individual numerical values or sub-ranges encompassed within that range as if each numerical value and sub-range is explicitly recited.

Moreover, for convenience in description, "first," "second," "third," etc. may be used herein to distinguish between different elements of a figure or series of figures. "first," "second," "third," etc. are not intended to describe corresponding components.

Fig. 1 is a schematic structural diagram of a non-magnetic probe structure according to an embodiment of the disclosure. The probe structure 1 includes a carrier body 10, a front convex portion 101, a first side convex portion 102, and a second side convex portion 103. The carrier body 10 has a front side 11, a first side 12, a second side 13 and a rear side 14. The front protrusion 101 extends from the front end 11 of the carrier body 10 in a direction away from the carrier body 10, the front protrusion 101 has a distal end and a proximal end, the distal end of the front protrusion 101 is used for carrying the probe, and the proximal end of the front protrusion 101 is connected to the front end 11 of the carrier body 10. The first side protrusion 102 extends from the first side end 12 of the carrier body 10 to a first distance in a direction away from the carrier body 10, and the second side protrusion 103 extends from the second side end 13 of the carrier body 10 to a second distance in the direction away from the carrier body 10. In some embodiments, the value of the first distance and the value of the second distance may be the same, and in other embodiments, the value of the first distance and the value of the second distance may also be different, and are not limited thereto. Furthermore, the descriptions of "first" and "second" herein are used for distinguishing and not for limiting the embodiments of the present disclosure.

In some embodiments, the first side end 12 may extend a same distance away from the carrier body 10 as the second side end 13 extends away from the carrier body 10. In other embodiments, the first side end 12 may extend a different distance away from the carrier body 10 than the second side end 13.

In one embodiment of the present disclosure, the length of the proximal end of the front protrusion 101 is smaller than the length of the front side end 11 of the carrier body 10, so as to define a first positioning region at the intersection of the first side end of the front protrusion 101 and the front side end 11 of the carrier body 10, and define a second positioning region at the intersection of the second side end of the front protrusion 101 and the front side end 11 of the carrier body 10.

In some embodiments, the distal end of the forward protrusion 101 has a length less than the length of the forward side end 11 of the carrier body 10.

In an embodiment of the present disclosure, the metal traces 141 are disposed on the end surface of the rear end 14 of the carrier body 10. In an embodiment of the present disclosure, the metal trace 141 is made of gold or copper, and the material of the metal trace is not limited thereto, and other non-magnetic conductive materials can be selected according to actual requirements. In the embodiment of the present disclosure, the probe structure 1 further includes a chip and a probe, the chip cantilever is disposed at the distal end of the front protrusion 101, the probe is fixed on the chip and electrically connected to the chip, and the chip is electrically connected to the metal trace 141 through a wire. In the embodiment of the disclosure, the material of the probe structure 1 is ceramic except for the metal traces, or the body of the probe structure 1 is a printed Circuit board (pcb), and the material of the probe structure 1 is not limited thereto and can be selected according to actual requirements.

Fig. 2-6 are schematic structural views of a non-magnetic probe fixture 2 with a probe structure 1 placed thereon according to an embodiment of the present disclosure. Fig. 2 is a schematic structural diagram of a probe holder 2 in an unlocked state, on which a probe structure 1 is placed according to an embodiment of the present disclosure; fig. 3 is a partial structural view of the probe holder 2 in an unlocked state with the probe structure 1 placed thereon according to an embodiment of the present disclosure; fig. 4 is a schematic side view of a probe holder 2 in a locked state with a probe structure 1 according to an embodiment of the present disclosure; fig. 5 is a schematic cross-sectional view of a probe holder 2 in an unlocked state with a probe structure 1 placed thereon according to an embodiment of the present disclosure; fig. 6 is a schematic cross-sectional view of a probe holder 2 in a locked state with a probe structure 1 placed thereon according to an embodiment of the disclosure.

Referring to fig. 2 and 3, a probe holder 2 is used for mounting and fixing the probe structure 1 in any of the above embodiments. The probe holder 1 includes a carrier 22 and a locking assembly (not shown). The carrier 22 is used for carrying the probe structure 1. The locking assembly is used for locking the fixing probe structure 1 or unlocking the releasing probe structure 1; wherein, when the locking assembly locks the fixture probe structure 1, the locking assembly is in a locked state; when the locking assembly unlocks the release probe construction 1, said locking assembly is in an unlocked state.

In an embodiment of the present disclosure, refer to fig. 5 and 6. The locking assembly includes a retainer portion 210, a plunger 212, a compression spring 213, and a clamp portion (not identified in the figures). The fixing portion 210 defines a piston chamber 211 therein, a gas transmission hole 2111 for transmitting compressed gas is formed in a wall of the piston chamber 211, the piston 212 is slidably disposed in the piston chamber 211, and the compression spring 213 is disposed in the piston chamber 211. The clamp is driven by the piston 212 to lock the fixture probe structure 1 or unlock the release probe structure 1.

Wherein, when the locking assembly is in the locked state, no or only a small amount of the compressed gas is present in the piston chamber 211 and the compression spring 213 is in the first state, as shown in fig. 6; when the locking assembly is in the unlocked state, as shown in FIG. 5, the piston chamber 211 is filled with the compressed gas and the compression spring 213 is in the second state; wherein the length of the compression spring 213 in the first state is greater than the length of the compression spring 213 in the second state, or the acting force of the compression spring 213 in the first state is less than the acting force of the compression spring 213 in the second state.

Specifically, when the compressed gas enters the piston cavity 211 through the gas transmission hole 2111, the compressed gas exerts a force on the piston 212, so that the compression spring 213 is switched from the first state to the second state, and the locking assembly is switched from the locked state to the unlocked state; when compressed gas exits piston cavity 211 through transfer port 2111, compression spring 213 transitions from the second state to the first state, and compression spring 213 exerts a force on piston 212, thereby transitioning the locking assembly from the unlocked state to the locked state.

It should be noted that the subsequent mechanical action driven by the compressed gas during its passage into or out of the piston cavity 211 produces vibrations. Since the probe has strict vibration accuracy requirements during measurement, the compressed gas of the piston chamber 211 is discharged to convert the locking assembly from the unlocked state to the locked state, and the compressed gas enters the piston chamber 211 to convert the locking assembly from the locked state to the unlocked state. In this way, the locking assembly is always kept in the locking state for testing by the elastic force of the compression spring 213, and when the probe needs to be replaced or the locking assembly is switched to the non-testing state, the locking assembly is switched from the locking state to the unlocking state by the compressed gas temporarily introduced into the piston cavity 211, so that the influence of vibration generated by the compressed gas driving the subsequent mechanical action on the testing is avoided, and the testing precision is further improved.

In the embodiment of the present disclosure, the Compressed gas may be CDA (Compressed Dry Air), but is not limited thereto. In some embodiments, the compressed gas may be directed into or removed from piston cavity 211 through a solenoid valve that may be commanded, and delivery of the compressed gas may be accomplished by opening or closing a solenoid valve located on a conduit. The control method for the compressed gas transfer is not limited to this.

In an embodiment of the present disclosure, as shown in fig. 2 and fig. 3, the fixed portion 210 is provided with a first sliding rail 2100 and a second sliding rail 2101. The clamping portion includes a clamping block 214, a first prong 2144, and a second prong 2142. The clamping block 214 has a first receiving groove 2146 and a second receiving groove 2141 at an end near the piston 212, and the clamping block 214 can slide along the first slide rail 2100 and the second slide rail 2101. The first fork pin 2144 and the second fork pin 2142 are fixedly disposed on the piston 213 and driven by the piston 213, wherein the first fork pin 2144 is partially inserted into the first receiving groove 2146, and the second fork pin 2142 is partially inserted into the second receiving groove 2141. The portion of the first fork pin 2144 located in the first receiving cavity 2146 may transmit an acting force with the first receiving cavity 2146, and the position of the portion of the first fork pin 2144 located in the first receiving cavity 2146 is allowed to change; similarly, the portion of the second prong 2142 located in the second receiving groove 2141 can transmit a force with the second receiving groove 2141, and the position of the portion of the second prong 2142 located in the second receiving groove 2141 in the first receiving groove 2146 is allowed to change. In this way, the piston 212 drives the first fork pin 2144 and the second fork pin 2142, so that the first fork pin 2144 and the second fork pin 2142 drive the clamping block 214 to make the clamping block 214 slide through the first slide rail 2100 and the second slide rail 2101, thereby realizing the locking fixation or the unlocking release of the probe structure 1.

In an embodiment of the present disclosure, as shown in fig. 2 to 6, the supporting base 22 is connected to the fixing portion 210. Fig. 7 is a schematic structural diagram of the supporting base 22 of the probe holder 2 according to an embodiment of the disclosure. The carrier 22 includes a notch 226, a first positioning column 221 and a second positioning column 222, wherein the first positioning column 221 and the second positioning column 222 are located at two sides of the notch 226, and when the probe structure 1 is placed on the carrier 22, the first positioning column 221 is located in the first positioning area, and the second positioning column is located in the second positioning area. The notch 226 is used for accommodating the chip 15 and the probe when the probe structure 1 is placed on the carrier 22, the notch 226 may be an arc notch, and the shape of the notch 226 is not limited thereto, and can be selected according to actual situations.

As shown in fig. 7, in an embodiment of the present disclosure, the supporting base 22 further includes a first protrusion 223, a second protrusion 224 and a third protrusion 225, wherein the first protrusion 223 and the second protrusion 224 are located at two sides of the first positioning column 221 and the second positioning column 222, and an upper surface of the first protrusion 223, an upper surface of the second protrusion 224 and an upper surface of the third protrusion 225 are located at the same height. When the locking assembly is in the unlocked state or the locked state, the first boss 223 is for carrying the first side boss, the second boss 224 is for carrying the second side boss 103, and the third boss 225 is for carrying the carrier body 10. The first protruding portion 223, the second protruding portion 224, and the third protruding portion 225 may be integrally formed to have the same height, but the invention is not limited thereto.

In an embodiment of the present disclosure, the probe structure 1 is a circular arc at the intersection of the first side end of the front protrusion 101 and the front side end 11 of the carrier body 10 and at the intersection of the second side end of the front protrusion 101 and the front side end 11 of the carrier body 10. The distance between the first positioning column 221 and the second positioning column 222 is greater than the distance between two positions of the two circular arcs far away from the circular arc end of the carrier body 1. Thus, when the probe structure 1 is placed on the carrier 22, the front protrusion 101 of the probe structure 1 can be located between the first positioning pillar 221 and the second positioning pillar 222, and the convenience of grabbing the probe structure 1 when replacing the probe structure 1 can be increased.

In some embodiments, first locating post 221 and second locating post 222 may be cylindrical in shape for mating with an intersection that is a circular arc. In other embodiments, the shapes of the first positioning column 221, the second positioning column 222 and the junction are not limited to a cylinder or an arc, and may be other shapes that are mechanically matched, and thus are not described in detail herein.

In one embodiment of the present disclosure, as shown in fig. 2 and 3, the clamping block 214 includes a first contact fixing block 2145 and a second contact fixing block 2143. The first and second

contact fixing blocks

2145 and 2143 protrude from the front side end of the clamping block 214, respectively, wherein the front side end of the clamping block 214 is an end close to the probe structure 1.

When the locking assembly is in the locked state, the first contact fixing block 2145 presses against the rear side of the first side protrusion 102, the second contact fixing block 2143 presses against the rear side of the second side protrusion 103, and the probe structure 1 presses against the first positioning column 221 and the second positioning column 222, so that the probe structure 1 is locked and fixed on the carrier 22.

In some embodiments, when the first fixing contact block 2145 presses against the rear side of the first side protrusion 102, the first fixing contact block 2145 may be in surface contact with the rear side of the first side protrusion 102; when the second contact fixing block 2143 presses against the rear side of the second side protrusion 103, the second contact fixing block 2143 and the second side protrusion 103 may be in surface contact. In some embodiments, when the first fixing contact block 2145 presses against the rear side of the first side protrusion 102, the first fixing contact block 2145 may be in point contact with the rear side of the first side protrusion 102; when the second contact fixing block 2143 presses against the rear side of the second side protrusion 103, the second contact fixing block 2143 may be in point contact with the rear side of the second side protrusion 103. In some embodiments, the contact manner of the first contact block 2145 with the rear side of the first side protrusion 102 and the contact manner of the second contact fixing block 2143 with the rear side of the second side protrusion 103 may be different, and is not particularly limited herein.

Specifically, as described above, the piston 212 may be driven to move by introducing or removing the compressed gas, and the clamping block 214 may be driven by the piston 212 to slide on the first sliding rail 2100 and the second sliding rail 2101, so as to achieve locking, fixing, or unlocking and releasing of the probe structure 1.

Referring to fig. 5 and 6, when the probe structure 1 needs to be locked and fixed, the compressed gas in the piston cavity 211 is exhausted to release the elastic force of the compression spring 213, so as to push the piston 212 to move in a direction approaching to the probe structure 1, so that the clamping block 214 approaches to the probe structure 1 through the first fork pin 2144 and the second fork pin 2142, so that the first contact fixing block 2145 presses against the rear side of the first side convex portion 102, and the second contact fixing block 2143 presses against the rear side of the second side convex portion 103, so that the probe structure 1 is locked and fixed between the clamping block 214 and the first positioning column 221 and the second positioning column 222, and the locking and fixing of the probe structure 1 is achieved, that is, the locking assembly is in a locking state. When the probe or the probe structure 1 needs to be replaced, compressed gas is introduced into the piston cavity 211 through the gas transmission hole 2111 via the gas transmission hole 2111, the compressed gas exerts a force on the piston 212 to move the piston 212 in a direction away from the probe structure 1, the piston 212 simultaneously moves the clamping block 214 in a direction away from the probe structure 1 via the first fork pin 2144 and the second fork pin 2142, so that the first contact fixing block 2145 is separated from the first lateral convex portion 102, the second contact fixing block 2143 is separated from the second lateral convex portion 103, and the probe structure 1 is unlocked and released, i.e., the locking assembly is switched from the locking state to the unlocking state.

Fig. 8 is a schematic structural view illustrating a probe structure 1 placed on a holder 22 of a probe fixture 2 according to an embodiment of the disclosure. In an embodiment of the present disclosure, when the locking assembly is in the unlocked state, when the probe structure 1 is placed on the locking assembly in the unlocked state, the shortest distance D1 between the front side end 11 of the carrier body 10 and the first positioning pillar 221 and the second positioning pillar 222 is not greater than 1mm, and the shortest distance D2 between the first side end and the second side end of the front protrusion 101 of the probe structure 1 and the first positioning pillar 221 and the second positioning pillar 222 is not greater than 0.3 mm.

Fig. 9 is an enlarged schematic structural view of the structure within the dashed line box 3 in fig. 3. When the end surface of the front side end 11 of the carrier body 10 abuts against the first positioning column 221 and the second positioning column 222 after locking the placed probe construction 1, i.e. when the locking assembly is in the locked state, the shortest distance D3 between the first side end and the second side end of the front projection 101 and the first positioning column 221 and the second positioning column 222, respectively, is not more than 0.1 mm.

The shortest distances D1, D2, and D3 are not limited to these, and may be selected according to actual circumstances.

Fig. 10 is a schematic partial cross-sectional view of a probe holder 2 in a locked state with a probe structure 1 placed thereon according to an embodiment of the disclosure. The clamping block 214 is provided with a connector 215 therein, and the connector 215 includes Pogo pin pins (2151). As shown in fig. 1, when the locking assembly is in the locked state, the connector 215 is pressed against the metal trace 141 on the end surface of the rear end 14 of the carrier body 10 through the pogo pin 2151 and is electrically connected to the metal trace 141. When the lock assembly is in the unlocked state, pogo pin 2151 is separated from metal trace 141 to break the electrical connection. By using connector 215 using pogo pin 2151, probe structure 1 can be electrically connected to probe structure 1 stably in the locked state. When the probe structure 1 vibrates slightly during the testing process, the spring thimble pin can always press against the probe structure 1 under the action of elasticity due to the elasticity of the spring thimble pin, so that the probe structure 1 can be kept in reliable electrical connection.

In some embodiments, the number of pogo pins of connector 215 depends on the number of probes that need to be used, e.g., if the number of probes that need to be used is 4, then the number of pogo pins is greater than 4. In some embodiments, the number of pogo pins and the number of probes are 12, but the number is not limited thereto and can be selected according to actual situations.

Fig. 11 is a schematic structural view of the probe holder 2 to which the measuring arm 23 is attached. In the disclosed embodiment, the probe holder 2 further includes a measuring arm 23, and the probe holder 2 is fixed on the measuring arm 23 through a connecting portion 219. Accurate measurement of the impedance of the membrane can be achieved by corrective and alignment action of the measuring arm 23 when the probe holder 2 is in the locked state. Wherein the measuring arm 23 can perform an automatic adjustment of the measuring angle and position.

In the disclosed embodiment, referring to fig. 2-11, the process of the probe holder 2 to achieve the transition between the locked state and the unlocked state is as follows:

the action process when the probe clamp 2 is switched from the locking state to the unlocking state is as follows:

as shown in fig. 6, when the probe holder 2 is in the locked state, there is no compressed gas in the piston cavity 211, the compression spring 213 is in the first state, and the holding block 214 is in pressing contact with the probe structure 1. As shown in fig. 5, compressed gas is introduced into the piston chamber 211 through the gas delivery hole 2111, and the force applied to the piston 212 by the compressed gas is larger than the force applied to the piston 212 by the compression spring 213, so that the compression spring 213 is changed from the first state to the second state, i.e., the force pushes the piston 212 to contract the compression spring 213. Referring to fig. 2 and 5, the piston 212 drives the clamping block 214 to move along the first slide rail 2100 and the second slide rail 2101 by the first fork pin 2144 and the second fork pin 2142 in a direction away from the probe structure 1, so that the first contact fixing block 2145 and the second contact fixing block 2143 on the clamping block 214 are separated from the first lateral protrusion 102 and the second lateral protrusion 103 of the probe structure 1, respectively, and meanwhile, the pogo pin 2151 of the connector 215 on the clamping block 214 is separated from the metal trace 141 on the probe structure 1 to break the electrical connection, i.e., release the unlocking probe structure 1, so that the probe clamp 2 is switched from the locking state to the unlocking state. When the probe holder 2 is in the unlocked state, the compressed gas is contained in the piston cavity 211, the compression spring 213 is in the second state, and the holding block 214 is separated from the probe structure 1.

The action process when the probe clamp 2 is converted from the non-locking state to the locking state is as follows:

as shown in fig. 5, when the probe holder 2 is in the unlocked state, the compressed gas is contained in the piston cavity 211, the compression spring 213 is in the second state, and the holding block 214 is in the separated state from the probe structure 1. As shown in fig. 6, the compressed gas is discharged out of the piston chamber 211 through the gas delivery hole 2111, and during the discharge of the compressed gas, the force of the compression spring 213 on the piston 212 is greater than the force of the remaining compressed gas in the piston chamber on the piston, and at this time, the compression spring 213 acts on the piston 212 to push the piston 212. Referring to fig. 3 and fig. 6, the piston 212 drives the clamping block 214 to move along the first slide rail 2100 and the second slide rail 2101 towards the direction close to the probe structure 1 by the first fork pin 2144 and the second fork pin 2142, so that the first contact fixing block 2145 and the second contact fixing block 2143 on the clamping block 214 respectively press against the first side convex portion 102 and the second side convex portion 103 of the probe structure 1 to lock and fix the probe structure 1 between the clamping block 214 and the first positioning column 221 and the second positioning column 222, and at the same time, the pogo pin 2151 of the connector 215 on the clamping block 214 presses against the metal trace 141 on the probe structure 1 and is connected to the metal trace 141, and at this time, the probe clamp 2 is in a locked state. When the probe clamp 2 is in the locked state, no or only a small amount of compressed gas is stored in the piston cavity 211, the compression spring 213 is in the first state, and the clamping block 214 and the probe structure 1 are in a pressing contact state.

It should be noted that, when the probe clamp 2 is in a non-testing state, that is, the probe structure 2 does not need to be placed on the probe clamp 2, at this time, the probe clamp 2 is kept in a locking state, that is, compressed gas can be discharged to make the compression spring in a natural extension state, so as to further improve the service life of the compression spring; meanwhile, compressed gas is not needed to be used, so that the energy consumption of the equipment is reduced.

Fig. 12 is a schematic structural diagram of a non-magnetic container 4 according to an embodiment of the disclosure. The accommodating box 4 is used for accommodating the probe structure 1. The accommodating box 4 includes one or more first accommodating grooves (not shown) arranged in rows and columns. Each first receiving slot is used for receiving the carrier body 10, the front protrusion 101, the first side protrusion 102 and the second side protrusion 103 of the probe structure 1. The first receiving groove includes a third positioning column 41, a fourth positioning column 42 and a second receiving groove 43. When the probe structure 1 is placed in the first accommodating groove, the third positioning column 41 is located in the first positioning region, the fourth positioning column 42 is located in the second positioning region, and the chip 15 and the probes of the probe structure 1 are accommodated in the second accommodating groove 43.

Fig. 13 is a schematic structural diagram of an automated probe replacement system according to an embodiment of the disclosure. The automatic probe replacing system comprises a probe structure 1, a probe clamp 2, a containing box 4, a robot arm 5 and a server 6. The robot arm 5 is configured to automatically pick and place the probe structure 1 between the probe clamp 2 and the accommodating box 4 under the control of the server 6.

In some embodiments, probe holder 2 is positioned on probe holder 2 when measuring the film impedance, i.e., probe holder 2 is positioned between the magnetic pole and the chip film. In some embodiments, at least the probe structure 1, the probe holder 2 and the containment box 4 are non-magnetic.

Fig. 14 is a schematic structural diagram of a robot arm 5 according to an embodiment of the disclosure. The robot arm 5 includes a vacuum nozzle 51, and the robot arm 5 performs pick-and-place replacement of the probe structure 1 by the vacuum nozzle 51.

In one embodiment of the present disclosure, the robot arm 5 is pneumatically driven. Further, the pneumatic device for driving the robot arm 5 and the pneumatic device for generating or outputting the compressed gas may be the same or different pneumatic devices, and the present invention is not limited thereto. The pneumatic driving method is suitable for the case where the requirement for the vibration accuracy is high, but the present invention is not limited to this, and the motor driving method may be used, and may be specifically selected according to the actual situation.

In the embodiment of the present disclosure, the automatic probe replacing system may be integrated into a conventional impedance measuring system to implement an automatic replacing function, or may be used as the impedance measuring system itself to implement an automatic replacing function, which is not limited herein.

Fig. 15 is a flowchart illustrating an automatic probe replacement method according to an embodiment of the disclosure. The automatic probe replacing method is realized by adopting the automatic probe replacing system. The automatic probe replacement method comprises the following steps:

step 151, obtaining an automatic replacement instruction from the server 6. Wherein the automated probe replacement system has an initial state in which the robot 5 is retracted and remains in an initial position in which the robot 5 does not interfere with the normal measurements performed by the probe holder 2. Executing the following steps according to the automatic replacing instruction:

and 152, moving the vacuum suction nozzle 51 of the robot arm 5 to the position above the probe structure to be replaced on the probe clamp 2, then starting the vacuum suction nozzle 51, and sucking the probe structure to be replaced through the vacuum suction nozzle 51. At this time, the probe holder 2 is in a locked state.

And step 153, converting the probe clamp 2 from the locking state to the unlocking state to unlock and release the probe structure to be replaced. By confirming that the vacuum suction nozzle 51 sucks the probe structure to be replaced and then unlocks and releases the probe structure to be replaced, the reliability of automatic replacement can be ensured.

And step 154, moving and storing the probe structure to be replaced into the accommodating box 4 through the vacuum suction nozzle 51 of the robot arm 5, and closing the vacuum suction nozzle 51. After the vacuum suction nozzle 51 is closed, the probe structure to be replaced is placed in one of the empty first receiving grooves in the receiving box 4.

Step 155, moving the vacuum suction nozzle 51 of the robot arm 5 to a position above the probe structure to be used on the accommodating box 4, and then opening the vacuum suction nozzle 51 to suck the probe structure to be used.

The probe structure to be used is moved and placed on the probe holder 2 by the robot arm 5, step 156. The probe holder 2 is now in the unlocked state.

Step 157, converting the probe clamp 2 from the unlocking state to the locking state to lock and fix the probe structure to be used; and the vacuum suction nozzle 51 is turned off. After the vacuum nozzle 51 is turned off, the robot arm 5 returns to the initial state, and the automated probe replacement system returns to the initial state to avoid interfering with subsequent normal measurement operations.

In the embodiment of the present disclosure, the angle at which the vacuum nozzle 51 picks and places the probe structure 1 on the accommodating box 4 may be different from or the same as the angle at which the probe structure 1 is picked and placed on the probe fixture 2, and is not limited herein.

As used herein, the term "chip" generally refers to a substrate formed of a semiconductor or non-semiconductor material. Examples include, but are not limited to, monocrystalline silicon, gallium arsenide, and indium phosphide. Such substrates are typically found and/or processed in a semiconductor fabrication facility. In some cases, a chip may include only a substrate (i.e., a bare chip). Alternatively, the chip may include one or more layers of different materials formed on the substrate.

Reference throughout this specification to "one embodiment of the present disclosure" or similar terms means that a particular feature, structure, or characteristic described in connection with the other embodiments is included in at least one embodiment and may not necessarily be present in all embodiments. Thus, respective appearances of the phrase "one embodiment of the present disclosure" or similar terms in various places throughout this specification are not necessarily referring to the same embodiment. Furthermore, the particular features, structures, or characteristics of any specific embodiment may be combined in any suitable manner with one or more other embodiments. It should be understood that other variations and modifications of the embodiments described and illustrated herein are possible in light of the teachings herein and are to be considered as part of the spirit and scope of the present disclosure.

While the foregoing has been with reference to the disclosure of the present invention, it will be apparent to those skilled in the art that various changes and modifications can be made therein without departing from the spirit and scope of the disclosure. Therefore, the scope of the present disclosure should not be limited to the embodiments disclosed, but includes various alternatives and modifications without departing from the disclosure, which are encompassed by the claims of the present patent application.

Claims

1. A non-magnetic probe structure for an automated probe replacement system, comprising:

a carrier body having a front side end, a first side end, a second side end, and a rear side end;

the front convex part extends from the front side end of the carrier body to the direction far away from the carrier body, and the front convex part is provided with a far end for bearing the probe and a near end which is connected with the front side end of the carrier body;

a first side protrusion extending from a first side end of the carrier body to a first distance in a direction away from the carrier body; and

a second side protrusion extending from a second side end of the carrier body to a second distance in a direction away from the carrier body;

wherein the proximal end of the front protrusion has a length less than a length of a front side end of the carrier body, a first positioning region being defined at an intersection of a first side end of the front protrusion and the front side end of the carrier body, a second positioning region being defined at an intersection of a second side end of the front protrusion and the front side end of the carrier body; and

wherein the rear side of the first side protruding portion and the rear side of the second side protruding portion are configured to be pressed by a first contact fixing block and a second contact fixing block of a probe fixture in the system, respectively, so that the probe structure is locked and fixed on a carrier of the probe fixture in the system, at which time the probe structure abuts against a first positioning column of the carrier and a second positioning column of the carrier at the first positioning region and the second positioning region, and wherein the first side protruding portion is configured to be separated from the first contact fixing block, and the second side protruding portion is configured to be separated from the second contact fixing block, so that the probe structure is unlocked and released.

2. The non-magnetic probe structure of claim 1, wherein the first distance is equal to the second distance.

3. The non-magnetic probe structure according to claim 1, wherein a metal trace is provided on an end face of the rear end of the carrier body.

4. The non-magnetic probe structure according to claim 3, wherein the metal trace is made of gold or copper.

5. The non-magnetic probe structure of claim 3 or 4, wherein the probe structure further comprises a chip and a probe, the chip cantilever is disposed at the distal end of the front convex portion, the probe is fixed to the chip and electrically connected to the chip, and the chip is electrically connected to the metal trace through a wire.

6. The non-magnetic probe structure of claim 5, wherein the probe structure is made of ceramic or the probe structure is a Printed Circuit Board (PCB).

7. A non-magnetic probe fixture for mounting and fixing the non-magnetic probe structure according to any one of claims 1 to 6, wherein the probe fixture comprises:

the bearing seat is used for bearing the probe structure;

a locking assembly for locking securing the probe structure or unlocking releasing the probe structure;

when the locking component locks and fixes the probe structure, the locking state is achieved; when the locking assembly is unlocked to release the probe structure, the probe structure is in an unlocked state.

8. The non-magnetic probe fixture of claim 7 wherein the locking assembly comprises:

the fixed part is internally provided with a piston cavity, and a gas transmission hole capable of transmitting compressed gas is arranged in the wall body of the piston cavity;

a piston slidably disposed within the piston chamber;

a compression spring disposed within the piston; and

a clamping portion driven by the piston to lock secure the probe structure or unlock release the probe structure.

9. The non-magnetic probe fixture of claim 8, wherein when said locking assembly is in said locked state, said compressed gas is absent from said piston chamber, said compression spring being in a first state;

when the locking assembly is in the unlocked state, the compressed gas is in the piston chamber and the compression spring is in a second state;

wherein the length of the compression spring in the first state is greater than the length of the compression spring in the second state.

10. The non-magnetic probe holder of claim 9, wherein said locking assembly transitions from said locked state to said unlocked state when said compressed gas enters said piston cavity through said gas transfer port and said compression spring transitions from said first state to said second state; and is

When the compressed gas is discharged out of the piston cavity through the gas transmission hole and the compression spring is converted from the second state to the first state, the locking assembly is converted from the unlocking state to the locking state.

11. The non-magnetic probe fixture of claim 10,

the fixed part is provided with a first slide rail and a second slide rail;

the clamping portion includes:

the clamping block is provided with a first accommodating groove and a second accommodating groove at one end close to the piston, and the clamping block can slide along the first sliding rail and the second sliding rail;

the first fork pin and the second fork pin are fixedly arranged on the piston and driven by the piston, and when the locking state is realized, the first fork pin is partially inserted into the first accommodating groove, and the second fork pin is partially inserted into the second accommodating groove.

12. The non-magnetic probe fixture of any of claims 8-10, wherein the carrier is fixedly connected to the fixing portion, the carrier comprises a gap, a first positioning post and a second positioning post, wherein the first positioning post and the second positioning post are located at two sides of the gap, and when the probe structure is placed on the carrier, the first positioning post is located at the first positioning region and the second positioning post is located at the second positioning region.

13. The non-magnetic probe fixture of claim 12, wherein the interface is an arc of a circle; the distance between the first positioning column and the second positioning column is larger than the distance between two positions of the two arcs far away from the arc ends of the carrier body.

14. The non-magnetic probe fixture as claimed in claim 12, wherein the clamping block of the clamping portion comprises a first contact fixing block and a second contact fixing block respectively protruding from a front side end of the clamping block, when the locking assembly is in the locking state, the first contact fixing block presses against a rear side of the first side protrusion, the second contact fixing block presses against a rear side of the second side protrusion, and the probe structure presses against the first positioning column and the second positioning column, so that the probe structure is fixed on the carrier.

15. The non-magnetic probe fixture of claim 12, wherein when the locking assembly is in an unlocked state, and when a shortest distance between a front side end of the carrier body and the first and second positioning posts is not greater than 1mm, a shortest distance between a first side end and a second side end of the front protrusion and the first and second positioning posts is not greater than 0.3 mm; and is

When the locking assembly is in a locking state and when the end surface of the front side end of the carrier body abuts against the first positioning column and the second positioning column, the shortest distance between the first side end and the second side end of the front convex part and the first positioning column and the shortest distance between the first side end and the second side end of the front convex part and the second positioning column are not more than 0.1 mm.

16. The non-magnetic probe fixture of claim 12, wherein the carrier further comprises a first protrusion, a second protrusion and a third protrusion, wherein the first protrusion and the second protrusion are located on two sides of the first positioning column and the second positioning column, and the upper surface of the first protrusion, the upper surface of the second protrusion and the upper surface of the third protrusion are located at the same height;

when the locking assembly is in the unlocked state or the locked state, the first protruding portion is used for bearing the first side protruding portion, the second protruding portion is used for bearing the second side protruding portion, and the third protruding portion is used for bearing the carrier body.

17. The non-magnetic probe holder of claim 11, wherein said holding block has a connector disposed therein, said connector comprising Pogo pin pins (Pogo pins);

when the locking assembly is in the locking state, the connector is pressed onto the metal trace on the end face of the rear side end of the carrier body through the spring ejector pin and is electrically connected with the metal trace; the pogo pin is separated from the metal trace when the locking assembly is in the unlocked state.

18. The non-magnetic probe fixture of claim 8, wherein the probe fixture further comprises a measurement arm, the probe fixture being secured to the measurement arm by the securing portion.

19. A non-magnetic housing box for housing the non-magnetic probe structure of claim 5 or 6; the accommodating box comprises one or more first accommodating grooves which are arranged in rows and columns, and each first accommodating groove is used for accommodating the carrier body, the front convex part, the first side convex part and the second side convex part of one probe structure;

the first accommodation groove includes:

when the probe structure is placed in the first accommodating groove, the third positioning column is located in the first positioning area, and the fourth positioning column is located in the second positioning area; and

and the second accommodating groove is used for accommodating the chip of the probe structure and the probe.

20. An automated probe replacement system comprising: a server, a robot arm, a non-magnetic probe structure according to claim 5 or 6, a non-magnetic probe fixture according to any of claims 7-18, and a non-magnetic pod according to claim 19;

the robot arm is configured to automatically pick and place the probe structure between the probe fixture and the accommodating box under the control of the server.

21. The automated probe replacement system of claim 20, wherein the robot arm is pneumatically driven and includes a vacuum nozzle by which the robot arm performs pick-and-place replacement of the probe structure.

22. An automatic probe replacing method comprises the following steps:

providing an automated probe replacement system according to claim 20 or 21;

obtaining an instruction from the server, and executing the following steps according to the instruction:

moving a vacuum suction nozzle of a robot arm to a position above a probe structure to be replaced on a probe clamp, starting the vacuum suction nozzle, and sucking the probe structure to be replaced through the vacuum suction nozzle;

converting the probe clamp from a locked state to an unlocked state to unlock and release the probe structure to be replaced;

moving and storing the probe structure to be replaced into a containing box through the vacuum suction nozzle of the robot arm, and closing the vacuum suction nozzle;

moving the vacuum suction nozzle of the robot arm to the position above the probe structure to be used on the containing box, then opening the vacuum suction nozzle, and sucking the probe structure to be used;

moving and placing the probe structure to be used on the probe clamp through the robot arm;

converting the probe clamp from the unlocking state to the locking state to lock and fix the probe structure to be used; and is

The vacuum nozzle is closed.