CN110294321A - A kind of apparatus for fixing substrate - Google Patents
A kind of apparatus for fixing substrate Download PDFInfo
- Publication number
- CN110294321A CN110294321A CN201910569038.3A CN201910569038A CN110294321A CN 110294321 A CN110294321 A CN 110294321A CN 201910569038 A CN201910569038 A CN 201910569038A CN 110294321 A CN110294321 A CN 110294321A
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- CN
- China
- Prior art keywords
- substrate
- adsorption
- braced frame
- fixing substrate
- bar assembly
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention belongs to substrate technique for fixing fields, disclose a kind of apparatus for fixing substrate, it includes braced frame, several Suction cup assemblies and several absorption bar assemblies, wherein, the top surface of several Suction cup assemblies forms the load plane of supporting substrate, absorption bar assembly is set to the upper of braced frame and is distributed in four sides of braced frame, and absorption bar assembly is configured as sorbing substrate, and the adsorption plane of the absorption bar assembly is concordant with load plane.Apparatus for fixing substrate provided by the invention is used cooperatively by setting Suction cup assembly and absorption bar assembly come sorbing substrate, ensure that the apparatus for fixing substrate has biggish adsorption capacity；Bar assembly is adsorbed by increasing, substrate is adsorbed from four sides of substrate, compared to adsorbing only with sucker, the usage quantity of sucker can be efficiently reduced under the premise of guaranteeing identical adsorption capacity, therefore, when substrate is detected, Suction cup assembly can block less caused by substrate, reduce the non-detection area of substrate.
Description
Technical field
The present invention relates to substrate technique for fixing field more particularly to a kind of apparatus for fixing substrate.
Background technique
The mode for generalling use vacuum suction fixed to substrate, i.e., be provided on the securing means be arranged in array it is several
Sucker, substrate are placed on sucker by manipulator, and vaccum-pumping equipment is to suction disc vacuum pumping, so that substrate adsorption is on sucker.
Since the adsorption capacity of sucker is limited, in order to guarantee effective fixed substrate, the quantity setting of sucker is more, there is setting in the prior art
120 suckers, since sucker setting quantity is excessive, when substrate is detected, sucker can cause largely substrate
It blocks, so that the non-detection area of substrate is larger.
Therefore, a kind of apparatus for fixing substrate is needed, to solve the above problems.
Summary of the invention
The purpose of the present invention is to provide a kind of apparatus for fixing substrate, reduce base while guaranteeing the adsorption capacity to substrate
The non-detection area of plate.
To achieve this purpose, the present invention adopts the following technical scheme:
A kind of apparatus for fixing substrate, comprising:
Braced frame；
Several Suction cup assemblies are set in the braced frame, and the top surface of several Suction cup assemblies forms supporting substrate
Load plane；And
Several absorption bar assemblies, the absorption bar assembly are set to the upper of the braced frame and are distributed in the support frame
Four sides of frame, the adsorption plane of the absorption bar assembly is configured as sorbing substrate, and the absorption bar assembly and the carrying are flat
Face is concordant.
Preferably, the absorption bar assembly includes:
Support frame is set in the braced frame；And
Adsorption bar is set on support frame as described above, and the top surface of the adsorption bar is the adsorption plane.
Preferably, the adsorption bar inner hollow and top surface offer it is several be connected to internal adsorption holes, it is described
The side of adsorption bar, which offers to be connected with inside, vacuumizes hole, and the hole that vacuumizes connects a vaccum-pumping equipment.
Preferably, the adsorption bar inner hollow and top surface offer slit, the slit is connected to the absorption
The inside of item, the side of the adsorption bar, which offers to be connected with inside, vacuumizes hole, described to vacuumize hole connection and one vacuumize
Equipment.
Preferably, the apparatus for fixing substrate further includes at least two groups positioning mechanism, the positioning mechanism includes difference
Two of the braced frame with respect to both sides are set to by hyte part, lean on hyte part can be towards or away from movement described in two.
Preferably, described include: by hyte part
Cylinder is set in the braced frame；And
By position column, it is connected to the output end of the cylinder, the institute of hyte part is leaned on described in two of positioning mechanism described in every group
Stating can be towards or away from movement by position column.
Preferably, the apparatus for fixing substrate further includes hold-down mechanism, the hold-down mechanism is configured as the base
Plate is compressed towards the load plane.
Preferably, the hold-down mechanism includes support component and pushes component, the support component is set to the branch
On support frame frame, the pushing component is set in the support component or the braced frame, and the pushing component is configured as
The substrate is compressed towards the support component.
Preferably, the hold-down mechanism includes pushing component, the pushing component is configured as the substrate direction
The absorption bar assembly compresses.
Preferably, the pushing component includes:
Actuator is set in the braced frame；
Briquetting, the briquetting are connected to the output end of the actuator.
Beneficial effects of the present invention:
The present invention provides a kind of apparatus for fixing substrate comprising braced frame, several Suction cup assemblies and several adsorption bars
Component, the top surfaces of several Suction cup assemblies form the load plane of supporting substrate, absorption bar assembly be set to the upper of braced frame and
Four sides of braced frame are distributed in, the adsorption plane for adsorbing bar assembly is concordant with load plane.Pass through Suction cup assembly and adsorption bar group
Part, which is used cooperatively, carrys out sorbing substrate, ensure that the apparatus for fixing substrate has biggish adsorption capacity；By increasing adsorption bar group
Part adsorbs substrate from four sides of substrate, compared to adsorbing only with sucker, in the premise for guaranteeing identical adsorption capacity
The usage quantity of sucker can be efficiently reduced down, and therefore, when substrate is detected, Suction cup assembly can be caused by substrate
It blocks less, reduces the non-detection area of substrate.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of apparatus for fixing substrate provided by the invention；
Fig. 2 is the partial enlarged view in Fig. 1 at A；
Fig. 3 is the structural schematic diagram of absorption bar assembly provided by the invention；
Fig. 4 is the structural schematic diagram provided by the invention by hyte part；
Fig. 5 is the structural schematic diagram of hold-down mechanism provided by the invention；
Fig. 6 is structural schematic diagram when absorption bar assembly provided by the invention is provided with pushing component.
In figure:
1, braced frame；2, Suction cup assembly；3, bar assembly is adsorbed；31, support frame；32, adsorption bar；321, adsorption hole；
322, hole is vacuumized；4, hyte part is leaned on；41, mounting base；42, cylinder；43, position column is leaned on；5, hold-down mechanism；51, component is pushed；
511, the first support base；512, actuator；513, briquetting；514, first connecting rod；515, second connecting rod；52, support component；521,
Second support base；522, supporting block.
Specific embodiment
To further illustrate the technical scheme of the present invention below with reference to the accompanying drawings and specific embodiments.
A kind of apparatus for fixing substrate is present embodiments provided, as shown in Figure 1, the apparatus for fixing substrate includes braced frame 1
With several Suction cup assemblies 2 being set in braced frame 1, the top surface of several Suction cup assemblies 2 forms the load plane of supporting substrate,
Substrate is placed on load plane by manipulator, and Suction cup assembly 2 provides adsorption capacity to substrate, and substrate adsorption is fixed.For side
Suction cup assembly 2 is just set, and braced frame 1 includes a rectangle frame and the latticed support construction being set in rectangle frame, sucker group
Part 2 is connected to the crossover location of latticed support construction.Suction cup assembly 2 includes sucker and inhales column, inhales column and is connected to braced frame 1
On, one end connecting sucker of column is inhaled, the other end connects vaccum-pumping equipment, and vaccum-pumping equipment can provide sucker positive pressure and bear
Pressure, thus absorption or release substrate.
Since the adsorption capacity of sucker is limited, in order to guarantee that more, the prior art is arranged in effective fixed substrate, the quantity of sucker
In have setting 120 suckers, due to sucker setting quantity it is excessive, when substrate is detected, sucker substrate can be caused compared with
Big degree is blocked, so that the non-detection area of substrate is larger.For this purpose, this embodiment reduces the quantity of Suction cup assembly 2, also,
In order to guarantee to have biggish adsorption capacity, which further includes several absorption bar assemblies 3, adsorbs bar assembly 3
Four sides of braced frame 1 are set in braced frame 1 and are distributed in, absorption bar assembly 3 is configured as sorbing substrate, and adsorption bar
The adsorption plane of component 3 is concordant with load plane.
The apparatus for fixing substrate is used cooperatively by Suction cup assembly 2 and absorption bar assembly 3 come sorbing substrate, ensure that the base
Board fixer has biggish adsorption capacity；Bar assembly 3 is adsorbed by increasing, substrate is adsorbed from four sides of substrate,
Compared to adsorbing only with sucker, the use number of sucker can be efficiently reduced under the premise of guaranteeing identical adsorption capacity
Amount, therefore, when substrate is detected, Suction cup assembly 2 can block less caused by substrate, reduce the non-detection of substrate
Area.
As shown in Figures 2 and 3, absorption bar assembly 3 includes support frame 31 and adsorption bar 32, and support frame 31 is set to support frame
On frame 1；Adsorption bar 32 is set on support frame 31, and the top surface of adsorption bar 32 is adsorption plane.Adsorption bar 32 can be fixedly connected on
On support frame 31.For the ease of adjusting the height of adsorption plane, to guarantee that adsorption plane is concordant with load plane, adsorption bar 32 can also be with
The height being set as on support frame 31 is adjustable.Optionally, adsorption bar 32 can be bolted on support frame 31, support
Vertically arranged elongate holes on frame 31, the mounting height of adsorption bar 32 is adjusted by bolt in the position of elongate holes, so as to
It is adjusted in the height to adsorption bar 32.
The inner hollow of adsorption bar 32, the side of adsorption bar 32, which offers to be connected with inside, vacuumizes hole 322, vacuumizes
Hole 322 connects a vaccum-pumping equipment, and the top surface of adsorption bar 32 offers the slit being connected to inside adsorption bar 32 or several absorption
Hole 321.It will be vacuumized inside adsorption bar 32 by vaccum-pumping equipment, to make adsorption hole 321 or slit generate adsorption capacity, by base
Plate is adsorbed on adsorption plane.
As shown in Figure 2 and Figure 4, apparatus for fixing substrate further includes at least two groups positioning mechanism, and wherein at least one group for limiting
Determine the positioning of first direction, at least one set is for limiting the positioning of second direction, and first direction is perpendicular to second direction.Positioning
Mechanism includes being respectively arranged at braced frame 1 with respect to two of both sides by hyte part 4, and two being capable of opposite or phase by hyte part 4
Back movement.Specifically, including mounting base 41, cylinder 42 and position column 43 is leaned on by hyte part 4, mounting base 41 is removably attachable to prop up
On support frame frame 1, cylinder 42 is set in mounting base 41, is connected to the output end of cylinder 42 by position column 43, every group of positioning mechanism
Two are leaned on position column 43 can be towards or away from movement by hyte part 4.It can be two by position column 43, lean on position column 43 by two
A contact plane is formed when it being enabled to be in contact with substrate, it is accurate to the pushing direction of substrate to guarantee.
For the ease of carrying out substrate by position, Suction cup assembly 2 and absorption bar assembly 3 are configured to provide positive pressure or negative
It calms the anger body.It, can be by substrate floating, in order to reduce frictional force when positioning when providing barotropic gas；When offer negative pressure gas
When body, substrate adsorption can be guaranteed that substrate is fixed.
When positioning to substrate, vaccum-pumping equipment is passed through positive pressure gas to Suction cup assembly 2 and absorption bar assembly 3 first
Body, by substrate floating；After substrate floating, cylinder 42 is acted, and in four sides of braced frame 1, the both sides of arbitrary neighborhood can be with
For fixed edge, remaining both sides is active edges, and when positioning, the movement of cylinder 42 is that the cylinder 42 of fixed edge first acts, by fixed edge
Cylinder 42 connect be pushed into a fixed position by position column 43, and keeping should be fixed by position column 43, then, the gas of active edges
Cylinder 42 reoperates, and leans on position column 43 mobile towards fixed edge for what the cylinder 42 of active edges connected, so that substrate is sandwiched in two relative edges
Between the position column 43.To avoid racking substrate, the thrust of the cylinder 42 of active edges is less than the thrust of the cylinder 42 of fixed edge, when
The output end of the cylinder 42 of active edges can retreat under force when 42 stroke of cylinder of fixed edge is excessive, avoid by position column 43
Rack substrate.After substrate positioning, barotropic gas is become negative-pressure gas by vaccum-pumping equipment, by substrate adsorption in 2 He of Suction cup assembly
It adsorbs on bar assembly 3.
It is subsequent after fixed to substrate to need to overturn the apparatus for fixing substrate, to guarantee to the effective solid of substrate
It is fixed, avoid substrate from falling, as shown in Figure 2 and Figure 5, which further includes hold-down mechanism 5, and hold-down mechanism 5 is configured
For substrate is compressed towards load plane.By adsorbing on one side to substrate, while another side is compressed, and can be guaranteed
Substrate is not fallen, and the apparatus for fixing substrate is more reliable to the fixation of substrate.
As shown in figure 5, hold-down mechanism 5 may include support component 52 and push component 51, support component 52 is set to branch
It on support frame frame 1, pushes component 51 and is set in support component 52 or braced frame 1, push component 51 and be configured as substrate court
It is compressed to support component 52.
Specifically, pushing component 51 includes the first support base 511, actuator 512 and briquetting 513, and actuator 512 is set to
On first support base 511, briquetting 513 is connected to the output end of actuator 512；Support component 52 include the second support base 521 and
Supporting block 522, the second support base 521 are set in braced frame 1, and supporting block 522 is set on the second support base 521；First
Support base 511 is set on braced frame 1 or the second support base 521, and supporting block 522 is oppositely arranged with briquetting 513.Pass through driving
Part 512 drives supporting block 522 mobile towards or away from briquetting 513, to realize clamp or release substrate.Wherein, actuator 512 can
Think that cylinder, electric cylinders etc. can be realized the element of linear drives effect.
Pushing component 51 further includes first connecting rod 514 and second connecting rod 515, wherein one end of first connecting rod 514 is articulated with
The output end of actuator 512, the other end are connected with briquetting 513；One end of second connecting rod 515 is articulated with the first support base 511, separately
One end is articulated with the middle part of first connecting rod 514.It is acted on by the transmitting of first connecting rod 514 and second connecting rod 515, by actuator
512 compression and loosening up that drive upside down power and be converted to briquetting 513 ensure that the stability that briquetting 513 acts.
Hold-down mechanism 5 can also only include pushing component 51, as shown in fig. 6, pushing component 51 can be set in adsorption bar
On component 3, pushes component 51 and be configured as compressing substrate towards absorption bar assembly 3.
Hold-down mechanism 5 can also include both the above type simultaneously, i.e., a part pushes component 51 and is set to adsorption bar group
On part 3, cooperates with adsorption bar 32 and realize compression；Another part pushes component 51 and the cooperation of support component 52 is realized and compressed.It compresses
The set-up mode of mechanism 5 is flexible and changeable.
Fixed form of the apparatus for fixing substrate to substrate are as follows: vaccum-pumping equipment is to Suction cup assembly 2 and adsorption bar group first
Part 3 is passed through barotropic gas, by substrate floating；Then, the cylinder 42 of fixed edge first acts, and leans on what the cylinder 42 of fixed edge connected
Position column 43 is pushed into a fixed position, and keeping should be fixed by position column 43, and later, the cylinder 42 of active edges reoperates, and will live
The cylinder 42 on dynamic side connects mobile towards fixed edge by position column 43 so that substrate be sandwiched in two relative edges between position column 43；
After substrate positioning, barotropic gas is become negative-pressure gas by vaccum-pumping equipment, by substrate adsorption in Suction cup assembly 2 and absorption bar assembly
On 3；Finally, substrate is further fixed by hold-down mechanism 5.The non-detection of substrate can be reduced by the apparatus for fixing substrate
Area, it is ensured that substrate fix in position, while guaranteeing reliable to the fixation of substrate.
Obviously, the above embodiment of the present invention is just for the sake of clearly illustrating examples made by the present invention, and being not is pair
The restriction of embodiments of the present invention.For those of ordinary skill in the art, may be used also on the basis of the above description
To make other variations or changes in different ways.There is no necessity and possibility to exhaust all the enbodiments.It is all this
Made any modifications, equivalent replacements, and improvements etc., should be included in the claims in the present invention within the spirit and principle of invention
Protection scope within.
Claims (10)
1. a kind of apparatus for fixing substrate characterized by comprising
Braced frame (1)；
Several Suction cup assemblies (2), are set on the braced frame (1), and the top surface of several Suction cup assemblies (2) forms support
The load plane of substrate；And
Several absorption bar assemblies (3), the absorption bar assembly (3) are set on the braced frame (1) and are distributed in the branch
Four sides of support frame frame (1), the absorption bar assembly (3) are configured as adsorbing the substrate, and the suction of absorption bar assembly (3)
Attached face is concordant with the load plane.
2. apparatus for fixing substrate according to claim 1, which is characterized in that the absorption bar assembly (3) includes:
Support frame (31) is set on the braced frame (1)；And
Adsorption bar (32) is set on support frame as described above (31), and the top surface of the adsorption bar (32) is the adsorption plane.
3. apparatus for fixing substrate according to claim 2, which is characterized in that the inner hollow of the adsorption bar (32) and top
Face offers several adsorption holes (321) for being connected to inside, and the side of the adsorption bar (32), which offers, is connected with inside pumping
Vacuum hole (322), described vacuumize hole (322) connect a vaccum-pumping equipment.
4. apparatus for fixing substrate according to claim 2, which is characterized in that the inner hollow of the adsorption bar (32) and top
Face offers slit, and the slit is connected to the inside of the adsorption bar (32), the side of the adsorption bar (32) offer with
Inside connection vacuumizes hole (322), and described vacuumize hole (322) connect a vaccum-pumping equipment.
5. apparatus for fixing substrate described in any one of -4 according to claim 1, which is characterized in that the apparatus for fixing substrate is also
Including at least two groups positioning mechanism, the positioning mechanism includes being respectively arranged at two of the braced frame (1) with respect to both sides
It, can be towards or away from movement by hyte part (4) described in two by hyte part (4).
6. apparatus for fixing substrate according to claim 5, which is characterized in that described to include: by hyte part (4)
Cylinder (42) is set on the braced frame (1)；And
By position column (43), it is connected to the output end of the cylinder (42), leans on hyte part described in two of positioning mechanism described in every group
(4) it is described by position column (43) can be towards or away from movement.
7. apparatus for fixing substrate according to claim 1, which is characterized in that the apparatus for fixing substrate further includes compacting machine
Structure (5), the hold-down mechanism (5) are configured as compressing the substrate towards the load plane.
8. apparatus for fixing substrate according to claim 7, which is characterized in that the hold-down mechanism (5) includes support component
(52) and component (51) are pushed, the support component (52) is set on the braced frame (1), and the pushing component (51) sets
It is placed in the support component (52) or the braced frame (1), the pushing component (51) is configured as the substrate court
It is compressed to the support component (52).
9. apparatus for fixing substrate according to claim 7, which is characterized in that the hold-down mechanism (5) includes pushing component
(51), the pushing component (51) is configured as compressing the substrate towards the absorption bar assembly (3).
10. apparatus for fixing substrate according to claim 8 or claim 9, which is characterized in that the pushing component (51) includes:
Actuator (512) is set on the braced frame (1)；And
Briquetting (513), the briquetting (513) are connected to the output end of the actuator (512).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910569038.3A CN110294321A (en) | 2019-06-27 | 2019-06-27 | A kind of apparatus for fixing substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910569038.3A CN110294321A (en) | 2019-06-27 | 2019-06-27 | A kind of apparatus for fixing substrate |
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| Publication Number | Publication Date |
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| CN110294321A true CN110294321A (en) | 2019-10-01 |
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ID=68029178
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910569038.3A Pending CN110294321A (en) | 2019-06-27 | 2019-06-27 | A kind of apparatus for fixing substrate |
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| Country | Link |
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| CN (1) | CN110294321A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110884896A (en) * | 2019-12-09 | 2020-03-17 | 苏州精濑光电有限公司 | Turnover device |
| CN115231314A (en) * | 2022-08-29 | 2022-10-25 | 赫曼半导体技术(深圳)有限公司 | Substrate turnover mechanism |
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| CN108872005A (en) * | 2018-07-03 | 2018-11-23 | 京东方科技集团股份有限公司 | A kind of testing agency and transmission equipment |
| CN109279360A (en) * | 2018-10-23 | 2019-01-29 | 苏州精濑光电有限公司 | A kind of substrate bearing device |
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- 2019-06-27 CN CN201910569038.3A patent/CN110294321A/en active Pending
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|---|---|---|---|---|
| JPH06268052A (en) * | 1993-03-15 | 1994-09-22 | Hitachi Ltd | Carrier for processing substrate, basket for processing substrate, and substrate mounter |
| CN104108605A (en) * | 2014-07-08 | 2014-10-22 | 深圳市华星光电技术有限公司 | Glass substrate taking and placing device |
| CN204369104U (en) * | 2014-12-29 | 2015-06-03 | 昆山精讯电子技术有限公司 | A kind of Acetabula device for picking and placeing liquid crystal panel |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110884896A (en) * | 2019-12-09 | 2020-03-17 | 苏州精濑光电有限公司 | Turnover device |
| CN115231314A (en) * | 2022-08-29 | 2022-10-25 | 赫曼半导体技术(深圳)有限公司 | Substrate turnover mechanism |
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