CN110293467B - Intelligent ring polishing machine tool and control method thereof - Google Patents
Intelligent ring polishing machine tool and control method thereof Download PDFInfo
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- CN110293467B CN110293467B CN201910528631.3A CN201910528631A CN110293467B CN 110293467 B CN110293467 B CN 110293467B CN 201910528631 A CN201910528631 A CN 201910528631A CN 110293467 B CN110293467 B CN 110293467B
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- 238000005498 polishing Methods 0.000 title claims abstract description 228
- 238000000034 method Methods 0.000 title description 21
- 238000012937 correction Methods 0.000 claims abstract description 147
- 238000012545 processing Methods 0.000 claims abstract description 38
- 238000001514 detection method Methods 0.000 claims abstract description 34
- 238000007667 floating Methods 0.000 claims abstract description 24
- 230000007246 mechanism Effects 0.000 claims abstract description 16
- 239000010426 asphalt Substances 0.000 claims abstract description 13
- 238000003801 milling Methods 0.000 claims description 88
- 230000005540 biological transmission Effects 0.000 claims description 25
- 239000000725 suspension Substances 0.000 claims description 19
- 238000006073 displacement reaction Methods 0.000 claims description 14
- 230000001360 synchronised effect Effects 0.000 claims description 14
- 238000003754 machining Methods 0.000 claims description 13
- 239000010438 granite Substances 0.000 claims description 8
- 239000003292 glue Substances 0.000 claims description 2
- 239000004568 cement Substances 0.000 abstract description 5
- 230000001276 controlling effect Effects 0.000 description 10
- 230000033001 locomotion Effects 0.000 description 10
- 238000005070 sampling Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 4
- 230000001105 regulatory effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 238000007517 polishing process Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/005—Blocking means, chucks or the like; Alignment devices
- B24B13/0055—Positioning of lenses; Marking of lenses
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/01—Specific tools, e.g. bowl-like; Production, dressing or fastening of these tools
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/02—Frames; Beds; Carriages
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
- B24B47/12—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces by mechanical gearing or electric power
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B51/00—Arrangements for automatic control of a series of individual steps in grinding a workpiece
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/12—Dressing tools; Holders therefor
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention relates to an intelligent ring polishing machine tool, which comprises a base, wherein the top of the base supports the bottom of a turntable; a layer of asphalt cement is poured on the top surface of the turntable to form a polishing disk; a multi-station bridge frame mechanism is arranged on the top of the turntable; a plurality of cross beams of the multi-station bridge frame mechanism are correspondingly provided with an element processing station, a polishing disc detection station and a correction disc station; a first linear sliding guide rail is arranged on the first cross beam corresponding to the element processing station, and the element processing device is slidably connected with the first linear sliding guide rail; an air-floating linear guide rail is arranged on the second cross beam corresponding to the polishing disc detection station, and the polishing disc detection device is in sliding connection with the air-floating linear guide rail; a second linear sliding guide rail is arranged on the third beam corresponding to the correction disc station, and the polishing disc correction device is in sliding connection with the second linear sliding guide rail; the device processing device, the polishing disc detection device and the polishing disc correction device are electrically connected with a control terminal, and programs for processing the device, detecting the polishing disc and correcting the polishing disc are preset in the control terminal.
Description
Technical Field
The invention relates to the technical field of optical processing, in particular to an intelligent ring polishing machine tool and a control method thereof.
Background
Ring polishing (ring polishing for short) is one of the key technologies for processing large-caliber planar optical elements. The annular polishing machine tool generally adopts natural granite with large size and high thermal stability to manufacture a polishing disk base disk, and annular asphalt adhesive layers are cast on the surface of the base disk to serve as the polishing disk. The surface of the endless belt of the asphalt polishing disk is sequentially provided with a correction disk and a workpiece disk, the circumferential side surfaces of the correction disk and the workpiece disk are provided with gear synchronous belts, and the correction disk and the workpiece disk are respectively meshed and driven by a pair of gears and a driving gear belt to realize uniform rotation. The correction disk is used to correct and control shape errors of the polishing disk, while the workpiece disk is used to hold the element. When the element is processed, the polishing disk, the correction disk and the workpiece disk are rotated at a constant speed around the anticlockwise direction at a certain rotating speed, and the optical element placed in the workpiece disk is subjected to material removal under the action of the asphalt polishing disk and polishing particles carried by the asphalt polishing disk so as to form an optical surface.
The bottleneck problem of the ring polishing technology is the efficient and high-precision convergence of the surface shape of the element. In actual processing, shape errors of the polishing disk have a very important influence on the surface shape of the element. The existing annular polishing machine tool generally places a workpiece disc on an asphalt polishing disc directly, so that the shape error of the polishing disc is easily damaged, and the shape error of the polishing disc is not easily controlled by a correction disc; when asphalt glue is poured into the annular polishing machine tool to generate an asphalt polishing disc, the surface shape of the polishing disc is difficult to guarantee, and when the milling cutter is used for milling the polishing disc, the milling cutter is driven by the slide carriage of the linear guide rail to perform uniform linear motion along the radial direction of the polishing disc, and the milling precision of the milling cutter to the disc surface is influenced by the error of the linear guide rail, so that the shape error of the polishing disc is difficult to improve. In addition, when a large-size correction disk is used to correct and control the shape error of the polishing disk, the concave-convex shape of the polishing disk is changed by adjusting the radial position of the correction disk on the surface of the polishing disk, and the process is slow, so that the shape error of the polishing disk is difficult to quickly correct.
Therefore, how to provide an intelligent ring polishing machine tool for reducing the shape error of the polishing disc is a problem to be solved by those skilled in the art.
Disclosure of Invention
In view of the above, the invention provides an intelligent annular polishing machine tool, which solves the problem that the shape error of a polishing disc is difficult to control or correct in the prior art.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
an intelligent ring polishing machine tool, comprising:
a base, a base seat and a base seat,
the top of the base supports the bottom of the turntable and is rotatably connected with the turntable; a layer of asphalt cement is poured on the top surface of the turntable to form a polishing disk; the thickness of the asphalt cement is 10-30mm;
the multi-station bridge frame mechanism is arranged on the top of the turntable; a plurality of cross beams of the multi-station bridge frame mechanism are correspondingly provided with an element processing station, a polishing disc detection station and a correction disc station;
the first transverse beam corresponding to the element processing station is provided with a first linear sliding guide rail, and the element processing device is in sliding connection with the first linear sliding guide rail;
the polishing disc detection device is connected with the air-float linear guide rail in a sliding manner;
the polishing disc correction device is arranged on the third cross beam corresponding to the correction disc station and is in sliding connection with the second linear sliding guide rail;
and the control terminal is electrically connected with the element processing device, the polishing disc detection device and the polishing disc correction device, and a program for element processing, polishing disc detection and polishing disc correction is preset in the control terminal.
Compared with the prior art, the intelligent annular polishing machine tool provided by the invention has the advantages that the element processing device, the polishing disc detection device and the polishing disc correction device are in sliding connection with the multi-station bridge frame mechanism guide rail, do not directly act on the polishing disc, do not damage the shape error of the polishing disc, and are beneficial to correcting the shape error of the polishing disc by the correction disc; meanwhile, the element processing device, the polishing disc detection device and the polishing disc correction device are electrically connected with the control terminal, and the control terminal is used for accurately controlling through a program of element processing, polishing disc detection and polishing disc correction preset in the control terminal, so that the real-time monitoring and the accurate correction of the shape errors of the polishing disc are facilitated.
Preferably, the turntable is an air-floating turntable, a boss with the diameter smaller than that of the turntable is arranged at the bottom of the air-floating turntable, an external engagement gear ring is arranged on the boss, a turntable motor assembly is arranged at the bottom of the air-floating turntable near the edge of the boss, and an output gear of the turntable motor assembly is engaged with the external engagement gear ring.
Preferably, the base bottom is provided with three support blocks in the circumferential direction.
The polishing disc has the advantages that the base is placed on the three supporting blocks uniformly distributed along the circumference, the rotating shaft of the air-floating rotary table can be adjusted to be absolutely vertical or the surface of the rotating shaft is positioned on the horizontal plane through the three supporting blocks, and the stability of the polishing disc in the rotating process can be improved by adopting the air-floating rotary table, so that the system error when the shape error of the polishing disc is detected can be reduced.
The air-floating turntable comprises an upper turntable, a lower support, a middle sleeve, a central shaft and an auxiliary bearing, wherein the central shaft is vertically arranged at the center of the lower support, the middle sleeve and the upper turntable are sequentially sleeved on the central shaft, and the auxiliary bearing is arranged between the upper turntable and the central shaft and between the middle sleeve and the central shaft; the bottom surface or the side surface of the middle sleeve is provided with a gas transmission hole, the inside of the central shaft is hollow and is provided with a gas transmission pipeline, one end of the gas transmission pipeline is connected with the gas transmission hole of the middle sleeve, and the other end of the gas transmission pipeline is connected with a compressed gas source; the middle sleeve with the air transmission holes is arranged between the upper rotary table and the lower support, compressed air is input into the air transmission holes of the middle sleeve, so that the compressed air is filled between the upper rotary table and the lower support, and the upper rotary table and the lower support are made of granite, so that the upper rotary table can float from the top surface of the lower support after enough compressed air enters between the upper rotary table and the lower support, and the upper rotary table is rotated at the moment.
Preferably, the component processing apparatus includes: a suspension type workpiece frame, a workpiece disc holding wheel, a separator and a workpiece disc driving motor;
the suspension type workpiece frame comprises a guide rail matching part and a workpiece disc fixing part which are integrally connected; the guide rail matching part is in sliding connection with the first linear sliding guide rail;
the middle part of the workpiece disc fixing part is provided with a circular space; a plurality of workpiece disc holding wheels are arranged at the bottom around the circular space;
the outer circumference of the workpiece disc is provided with a first gear synchronous belt which is meshed and driven with the plurality of workpiece disc holding wheels, and the workpiece disc is limited to move in a circular space;
the separator is connected to the middle part of the workpiece disc, a workpiece hole is formed in the separator, and the element is fixed in the workpiece hole;
the workpiece disc driving motor is fixed on the workpiece disc fixing part, and an output gear of the workpiece disc driving motor is positioned at the same height with the workpiece disc holding wheel, is meshed with the first gear synchronous belt for transmission, and is electrically connected with the control terminal.
The effect of adopting this scheme is, the work piece dish is not directly placed on the polishing dish, articulates through suspension type work piece frame, does not destroy the shape error of polishing dish, is favorable to the correction of correction dish to polishing dish shape error.
Preferably, a sub-aperture correction guide rail is arranged on the other side of the first beam, and a sub-aperture correction structure is slidably connected to the sub-aperture correction guide rail;
the sub-caliber correcting structure comprises a third slide carriage, a sub-caliber correcting motor, a sub-caliber correcting cylinder, a crank shaft and a small tool correcting disc;
the third slide carriage can slide on the sub-aperture correction guide rail;
the sub-aperture correction motor and the sub-aperture correction cylinder are both fixed on the third slide carriage; the output end of the sub-aperture correction cylinder is connected with a belt pulley, and the belt pulley is meshed with an output gear of the sub-aperture correction motor through a toothed belt for transmission;
one end of the crank shaft is connected with the terminal aperture correction cylinder;
the small tool correction disc is connected to the other end of the crank shaft.
The output gear of the sub-aperture correction motor drives the belt pulley to be meshed and driven through the toothed belt to rotate the crank shaft, the crank shaft drives the small tool correction disc to revolve with a set eccentric distance (the crank shaft structure is realized), the pressure of the crank shaft acting on the small tool correction disc depends on the air pressure of the sub-aperture correction cylinder, and the stability in the sub-aperture correction process is maintained through the arrangement.
Preferably, the polishing disk detection device includes: the device comprises a first slide carriage, a first high-speed motor, a displacement sensor, a polishing and milling structure or a slotting structure;
one end face of the first slide carriage is slidably connected with the air floatation linear guide rail;
the displacement sensor is fixed on the other end face of the first slide carriage through a connecting piece, points to the direction of the polishing disk and is electrically connected with the control terminal; wherein the connecting piece is an adjustable connecting piece, so that the sensor always points to the polishing disk;
the polishing milling structure or the slotting structure is in sliding connection with the first slide carriage along the vertical direction;
the first high-speed motor is fixed on the polishing milling structure or the slotting structure and is electrically connected with the control terminal.
The polishing and milling structure or the slotting structure can slide on the air floatation linear guide rail through the first slide carriage, and the control terminal controls the first height motor to uniformly drive the polishing and milling structure or the slotting structure to work, so that the shape error of the polishing disc is reduced.
Preferably, the finish milling structure or the grooving structure comprises: the vertical linear guide rail, the vertical driving motor, the vertical ball screw and the vertical slide carriage and milling cutter structure;
one side surface of the vertical linear guide rail is vertically fixed on the first slide carriage;
the vertical ball screw is fixed on the other side surface of the vertical linear guide rail;
the vertical driving motor is fixed at the top of the vertical linear guide rail and is connected with the vertical ball screw; the vertical driving motor is electrically connected with the control terminal;
the vertical slide carriage is in sliding connection with the vertical linear guide rail and the vertical ball screw, and the first high-speed motor is fixed on the vertical slide carriage;
the milling cutter structure is connected to the output end of the first high-speed motor and comprises a milling disc milling cutter or a slotting milling cutter, wherein the milling disc milling cutter is selectively installed when a plane surface is milled, and the slotting milling cutter is selectively installed when slotting; the milling disc milling cutter is of a plane cutter head structure, and the slotting milling cutter is of a cone head structure.
The vertical driving motor is used for precisely controlling the position and the moving speed of the first slide carriage on the vertical linear guide rail through the ball screw, a first high-speed motor is arranged on the first slide carriage, a milling cutter mounting structure is arranged at the output end of the first high-speed motor, a milling cutter is arranged on the milling cutter mounting structure, the first high-speed motor drives the milling cutter to rotate at a high speed and mill the polishing disc, and the vertical driving motor is used for controlling the heights of the first slide carriage and the milling cutter in real time through the ball screw.
Preferably, the air-float linear guide rail comprises a guide rail seat, a second ball screw, a guide rail servo motor, an electronic level gauge and a level adjusting structure;
the guide rail seat is made of granite, and one end face of the guide rail seat is fixed on the second cross beam;
the guide rail servo motor is fixed on one side of the guide rail seat;
the second ball screw is arranged on the guide rail seat and is connected with the output end of the guide rail servo motor; the first slide carriage is slidably connected with the guide rail seat and the second ball screw;
the electronic level gauge and the level adjusting structure are both fixed on the guide rail seat;
wherein, guide rail servo motor and electron spirit level all with control terminal electric connection.
An electronic level gauge and a horizontal adjusting structure are arranged on the granite guide rail seat, the electronic level gauge displays the horizontal inclination angle of the air floatation linear guide rail, and the horizontal adjusting mechanism can accurately adjust the horizontal inclination angle of the precise air floatation linear guide rail; when the intelligent ring polishing machine tool is installed and debugged, the air floatation linear guide rail is regulated to be horizontal through the horizontal regulating mechanism; the milling precision of the ring polishing machine tool is ensured.
Preferably, the polishing disc correction device comprises a second slide carriage, a correction disc suspension structure, a correction disc and a correction disc driving motor;
the second slide carriage is in sliding connection with the second linear sliding guide rail;
one end of the correction disc suspension structure is fixedly connected with the second slide carriage;
the top surface of the correction disc is connected with the other end of the correction disc suspension structure, and a second synchronous belt is arranged on the outer circumference of the correction disc;
the correction disc driving motor is fixed on the second slide carriage, and an output gear of the correction disc driving motor is meshed with the second synchronous belt for transmission; which is electrically connected with the control terminal.
The control terminal controls the position and the moving speed of the correction disc driving motor on the second linear sliding guide rail, and the correction disc suspension mechanism can control the loading weight of the large-size correction disc to the polishing disc; the correction disc driving motor drives the large-size correction disc to rotate at a constant speed at a set rotating speed through the second synchronous belt.
The invention also provides a control method of the intelligent annular polishing machine tool, which comprises a conventional processing mode, a polishing disc detection mode and a polishing disc correction mode; the control terminal can switch the modes to work.
The conventional machining mode is to preset various operation parameters and machining time of the intelligent ring polishing machine tool on a control terminal, supply polishing liquid on the surface of a polishing disc, place an element to be machined in a workpiece hole of a separator on a machining station, start the intelligent ring polishing machine tool for machining, and take off the element to finish machining after the machining time reaches the preset time.
The polishing disk detection mode is as follows: a displacement sensor is fixed on a first slide carriage of the air floatation linear guide rail to detect a horizontal plane so as to calibrate the straightness error of the air floatation linear guide rail in the vertical direction; detecting the height of sampling points on the surface of the polishing disk by using a displacement sensor, obtaining the height of the sampling points on the surface of the polishing disk, which are distributed along a spiral line, by controlling the uniform movement of the displacement sensor along the radius direction of the polishing disk and the uniform rotation of the polishing disk, compensating the straightness error of a guide rail corresponding to each sampling point, and generating the surface shape of the polishing disk by an interpolation method.
The polishing disk correction mode includes: a polishing disc slotting mode, a polishing disc milling mode and a polishing disc aperture correction mode;
polishing disk grooving mode: a slotting cutter is arranged on a milling cutter mounting structure of the polishing disc milling structure, slotting is carried out according to a preset slotting depth and slotting path in a control terminal, and a required slot type is obtained;
polishing disc milling flat mode: a milling disc milling cutter is mounted on a milling cutter mounting structure of the polishing disc milling structure, the straightness error of the air floatation linear guide rail is led in a polishing disc milling motion control program, and the initial milling height of the milling cutter, the rotating speed of the polishing disc and the moving speed of the slide carriage along the air floatation linear guide rail are set in a control terminal; then starting a polishing disk milling motion control program, and compensating straightness errors of the air-float linear guide rail in the vertical direction when the milling cutter moves along the radial direction of the polishing disk, so that the surface of the high-precision polishing disk is milled;
polishing a plate aperture correction pattern; setting the air pressure of an air cylinder, obtaining a removal function of a small tool correction disk acting on the polishing disk by referring to the method of the patent ZL201410456502.5, planning the path and residence time of the small tool correction disk according to the measured shape error of the polishing disk, and generating and executing a sub-aperture correction motion control program to realize quantitative correction of the shape error of the polishing disk.
According to the invention, the shape error of the polishing disc is accurately detected by the method, and the comprehensive control of the shape error of the polishing disc is realized by adopting a plurality of methods such as milling the flat disc surface, controlling the large-size correction disc, controlling the small-tool correction disc and the like, so that the intelligent control of the polishing process is realized, and the shape error control of the polishing disc is further improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required to be used in the embodiments or the description of the prior art will be briefly described below, and it is obvious that the drawings in the following description are only embodiments of the present invention, and that other drawings can be obtained according to the provided drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of an intelligent ring polishing machine provided by the invention;
fig. 2 is a schematic diagram of a base structure of an intelligent ring polishing machine tool (a bottom perspective view);
FIG. 3 is a partial enlarged view of a component processing device of the intelligent ring polishing machine tool provided by the invention;
FIG. 4 is a schematic diagram showing another side structure of a device for processing components of an intelligent ring polishing machine according to the present invention;
fig. 5 is a partial enlarged view of a polishing disc detection device of an intelligent ring polishing machine tool provided by the invention;
fig. 6 is an enlarged view of the portion a of fig. 5.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The embodiment of the invention discloses an intelligent annular polishing machine tool, which solves the problem that the shape error of a polishing disc is difficult to control or correct in the prior art.
Referring to fig. 1, the present invention provides an intelligent ring polishing machine tool, comprising:
the base 1 is provided with a plurality of grooves,
the top of the base 1 supports the bottom of the turntable 2 and is rotatably connected with the turntable 2; a layer of asphalt cement is poured on the top surface of the turntable 2 to form a polishing disk 21; the thickness of the asphalt cement is 10-30mm;
the multi-station bridge frame mechanism 3 is arranged on the top of the turntable 2; the multiple cross beams of the multi-station bridge frame mechanism 3 are correspondingly provided with an element processing station 31, a polishing disc detection station 32 and a correction disc station 33;
the component processing device 4, the first beam corresponding to the component processing station 31 is provided with a first linear sliding guide rail 34, and the component processing device 4 is slidably connected with the first linear sliding guide rail 34;
the polishing disc detection device 5 is provided with an air-floating linear guide rail 35 on a second beam corresponding to the polishing disc detection station 32, and the polishing disc detection device 5 is in sliding connection with the air-floating linear guide rail 35;
the polishing disc correction device 6 is provided with a second linear sliding guide rail 36 on a third beam corresponding to the correction disc station 33, and the polishing disc correction device 6 is slidably connected with the second linear sliding guide rail 36;
and the control terminal 7 is electrically connected with the element processing device 4, the polishing disc detection device 5 and the polishing disc correction device 6, and the procedures of element processing, polishing disc detection and polishing disc correction are preset in the control terminal 7.
The invention discloses an intelligent annular polishing machine tool, which is characterized in that an element processing device, a polishing disc detection device and a polishing disc correction device are in sliding connection with a multi-station bridge frame mechanism guide rail, so that the intelligent annular polishing machine tool does not directly act on a polishing disc, does not damage the shape error of the polishing disc, and is beneficial to correction of the shape error of the polishing disc by the correction disc; meanwhile, the element processing device, the polishing disc detection device and the polishing disc correction device are electrically connected with the control terminal, and the control terminal is used for accurately controlling through a program of element processing, polishing disc detection and polishing disc correction preset in the control terminal, so that the real-time monitoring and the accurate correction of the shape errors of the polishing disc are facilitated.
Referring to fig. 2, in one embodiment of the present invention, the turntable 2 is an air-floating turntable, a boss 22 with a diameter smaller than that of the air-floating turntable is arranged at the bottom of the air-floating turntable, an external engagement gear ring is arranged on the boss 22, a turntable motor assembly 23 is arranged at the bottom of the air-floating turntable near the edge of the boss 22, and an output gear of the turntable motor assembly 23 is engaged with the external engagement gear ring.
Wherein, three supporting blocks 11 are arranged at the bottom of the base 1 along the circumferential direction.
The polishing disc has the advantages that the base is placed on the three supporting blocks uniformly distributed along the circumference, the rotating shaft of the air-floating rotary table can be adjusted to be absolutely vertical or the surface of the rotating shaft is positioned on the horizontal plane through the three supporting blocks, and the stability of the polishing disc in the rotating process can be improved by adopting the air-floating rotary table, so that the system error when the shape error of the polishing disc is detected can be reduced.
The air-floating turntable comprises an upper turntable, a lower support, a middle sleeve, a central shaft and an auxiliary bearing, wherein the central shaft is vertically arranged at the center of the lower support, the middle sleeve and the upper turntable are sequentially sleeved on the central shaft, and the auxiliary bearing is arranged between the upper turntable and the central shaft and between the middle sleeve and the central shaft; the bottom surface or the side surface of the middle sleeve is provided with a gas transmission hole, the inside of the central shaft is hollow and is provided with a gas transmission pipeline, one end of the gas transmission pipeline is connected with the gas transmission hole of the middle sleeve, and the other end of the gas transmission pipeline is connected with a compressed gas source; the middle sleeve with the air transmission holes is arranged between the upper rotary table and the lower support, compressed air is input into the air transmission holes of the middle sleeve, so that the compressed air is filled between the upper rotary table and the lower support, and the upper rotary table and the lower support are made of granite, so that the upper rotary table can float from the top surface of the lower support after enough compressed air enters between the upper rotary table and the lower support, and the upper rotary table is rotated at the moment.
Referring to fig. 3, in another embodiment of the present invention, the component processing apparatus 4 includes: a suspension work rest 41, a work tray 42, a work tray holding wheel 43, a separator 44, and a work tray drive motor 45;
the suspension work rest 41 includes a rail engaging portion 411 and a work-piece tray fixing portion 412 integrally connected; the rail fitting portion 411 is slidably connected to the first linear slide rail 34;
the middle part of the workpiece disc fixing part 412 is provided with a circular space; a plurality of workpiece tray holding wheels 43 are arranged around the circular space at the bottom;
the outer circumference of the workpiece disc 42 is provided with a first gear synchronous belt which is meshed with the plurality of workpiece disc holding wheels 43 for transmission, and the workpiece disc 42 is limited to move in a circular space;
the separator 44 is connected to the middle part of the workpiece disc 42, and is provided with a workpiece hole, and the element is fixed in the workpiece hole;
the workpiece disk drive motor 45 is fixed to the workpiece disk fixing portion 412, and its output gear is at the same height as the workpiece disk holding wheel 43, is in meshing transmission with the first gear timing belt, and is electrically connected to the control terminal 7.
The effect of adopting this scheme is, the work piece dish is not directly placed on the polishing dish, articulates through suspension type work piece frame, does not destroy the shape error of polishing dish, is favorable to the correction of correction dish to polishing dish shape error.
Referring to fig. 4, in other embodiments of the present invention, a sub-aperture correction rail is mounted on the other side of the first beam, and a sub-aperture correction structure 46 is slidably connected to the sub-aperture correction rail;
the sub-caliber correcting structure 46 comprises a third slide plate 465, a sub-caliber correcting motor 461, a sub-caliber correcting cylinder 462, a crank shaft 463 and a small tool correcting disc 464;
the third carriage 465 is slidable on the sub-aperture correction rail;
the sub-aperture correction motor 461 and the sub-aperture correction cylinder 462 are both fixed to the third carriage 465; the output end of the sub-aperture correction cylinder 462 is connected with a belt pulley, and the belt pulley is in meshed transmission with an output gear of the sub-aperture correction motor 461 through a toothed belt;
one end of the crank shaft 463 is connected with the terminal aperture correction cylinder 462;
a small tool correction disc 464 is connected to the other end of the bell crank shaft 463.
The output gear of the sub-aperture correction motor drives the belt pulley to be meshed and driven through the toothed belt to rotate the crank shaft, the crank shaft drives the small tool correction disc to revolve with a set eccentric distance (the crank shaft structure is realized), the pressure of the crank shaft acting on the small tool correction disc depends on the air pressure of the sub-aperture correction cylinder, and the stability in the sub-aperture correction process is maintained through the arrangement.
Referring to fig. 5 and 6, in other embodiments of the present invention, the polishing pad inspection apparatus 5 includes: a first slide carriage 51, a first high-speed motor 52, a displacement sensor 53, a polishing and milling structure or a grooving structure 54;
one end face of the first slide carriage 51 is slidably connected with the air floatation linear guide rail 35;
the displacement sensor 53 is fixed on the other end face of the first slide carriage 51 through a connecting piece, and the displacement sensor 53 points to the direction of the polishing disk 21 and is electrically connected with the control terminal 7; wherein the connecting piece is an adjustable connecting piece, so that the sensor always points to the polishing disk;
the polishing and milling structure or grooving structure 54 is slidably connected with the first slide carriage 51 along the vertical direction;
the first high speed motor 52 is fixed to a finish milling structure or slotted structure 54 and is electrically connected to the control terminal 7.
The polishing and milling structure or the slotting structure can slide on the air floatation linear guide rail through the first slide carriage, and the control terminal controls the first height motor to uniformly drive the polishing and milling structure or the slotting structure to work, so that the shape error of the polishing disc is reduced.
Referring to fig. 6, in other embodiments of the present invention, the finish milling or grooving structure 54 comprises: a vertical linear guide 541, a vertical drive motor 542, a vertical ball screw 543, a vertical slide 544, and a milling cutter structure 545;
a side surface of the vertical linear guide 541 is vertically fixed to the first carriage 51;
the vertical ball screw 543 is fixed on the other side surface of the vertical linear guide 541;
the vertical driving motor 542 is fixed on the top of the vertical linear guide 541 and connected to the vertical ball screw 543; and the vertical driving motor 542 is electrically connected with the control terminal 7;
the vertical slide carriage 544 is slidably connected with the vertical linear guide 541 and the vertical ball screw 543, and the first high-speed motor 52 is fixed on the vertical slide carriage 544;
the milling cutter structure 545 is connected to the output end of the first high-speed motor 52, and comprises a milling disc milling cutter or a slotting milling cutter, wherein the milling disc milling cutter is selectively installed when a plane surface is milled, and the slotting milling cutter is selectively installed when slotting; the milling disc milling cutter is of a plane cutter head structure, and the slotting milling cutter is of a cone head structure.
The vertical driving motor is used for precisely controlling the position and the moving speed of the first slide carriage on the vertical linear guide rail through the ball screw, a first high-speed motor is arranged on the first slide carriage, a milling cutter mounting structure is arranged at the output end of the first high-speed motor, a milling cutter is arranged on the milling cutter mounting structure, the first high-speed motor drives the milling cutter to rotate at a high speed and mill the polishing disc, and the vertical driving motor is used for controlling the heights of the first slide carriage and the milling cutter in real time through the ball screw.
Referring to fig. 5, the air-float linear guide 35 includes a guide rail seat 351, a second ball screw, a guide rail servo motor 352, an electronic level 353, and a level adjustment structure 354;
the guide rail seat 351 is made of granite, and one end face of the guide rail seat is fixed on the second beam;
the guide rail servo motor 352 is fixed on one side of the guide rail seat 351;
the second ball screw is arranged on the guide rail seat 351 and is connected with the output end of the guide rail servo motor 352; the first slide carriage 51 is slidably connected with the guide rail seat 351 and the second ball screw;
both the electronic level 353 and the level adjustment structure 354 are fixed to the guide rail seat 351;
wherein, guide rail servo motor 352 and electron level instrument 353 are all connected with control terminal 7 electricity.
An electronic level gauge and a horizontal adjusting structure are arranged on the granite guide rail seat, the electronic level gauge displays the horizontal inclination angle of the air floatation linear guide rail, and the horizontal adjusting mechanism can accurately adjust the horizontal inclination angle of the precise air floatation linear guide rail; when the intelligent ring polishing machine tool is installed and debugged, the air floatation linear guide rail is regulated to be horizontal through the horizontal regulating mechanism; the milling precision of the ring polishing machine tool is ensured.
In one embodiment of the present invention, the polishing pad conditioner 6 includes a second slide 61, a pad suspension 62, a pad 63, and a pad drive motor 64;
the second slide carriage 61 is slidably connected to the second linear slide rail 36;
one end of the correction disc suspension structure 62 is fixedly connected with the second slide carriage 61;
the top surface of the correction disc 63 is connected with the other end of the correction disc suspension structure 62, and a second synchronous belt is arranged on the outer circumference of the correction disc 63;
the correction disc driving motor 64 is fixed on the second slide carriage 61, and an output gear of the correction disc driving motor is meshed with the second synchronous belt for transmission; which is electrically connected with the control terminal.
The control terminal controls the position and the moving speed of the correction disc driving motor on the second linear sliding guide rail, and the correction disc suspension mechanism can control the loading weight of the large-size correction disc to the polishing disc; the correction disc driving motor drives the large-size correction disc to rotate at a constant speed at a set rotating speed through the second synchronous belt.
The invention also provides a control method of the intelligent annular polishing machine tool, which comprises a conventional processing mode, a polishing disc detection mode and a polishing disc correction mode; the control terminal can switch the modes to work.
The conventional machining mode is to set various operation parameters and machining time of the intelligent ring polishing machine tool on a control terminal, supply polishing liquid on the surface of a polishing disc, place an element to be machined in a workpiece hole of a separator on a machining station, start the intelligent ring polishing machine tool for machining, and take off the element to finish machining after the machining time reaches the preset time.
The polishing disk detection mode is as follows: a displacement sensor is fixed on a first slide carriage of the air floatation linear guide rail to detect the water surface so as to calibrate the straightness error of the air floatation linear guide rail in the vertical direction; detecting the height of sampling points on the surface of the polishing disk by using a displacement sensor, obtaining the height of the sampling points on the surface of the polishing disk, which are distributed along a spiral line, by controlling the uniform movement of the displacement sensor along the radius direction of the polishing disk and the uniform rotation of the polishing disk, compensating the straightness error of a guide rail corresponding to each sampling point, and generating the surface shape of the polishing disk by an interpolation method.
The polishing disk correction mode includes: a polishing disc slotting mode, a polishing disc milling mode and a polishing disc aperture correction mode;
polishing disk grooving mode: a slotting cutter is arranged on a milling cutter mounting structure of the polishing disc milling structure, slotting is carried out according to a preset slotting depth and slotting path in a control terminal, and a required slot type is obtained;
polishing disc milling flat mode: a milling disc milling cutter is mounted on a milling cutter mounting structure of the polishing disc milling structure, the straightness error of the air floatation linear guide rail is led in a polishing disc milling motion control program, and the milling height of the milling cutter, the rotating speed of the polishing disc and the moving speed of the slide carriage along the air floatation linear guide rail are set in a control terminal; then starting a polishing disk milling motion control program, and compensating straightness errors of the air-float linear guide rail in the vertical direction when the milling cutter moves along the radial direction of the polishing disk, so that the surface of the high-precision polishing disk is milled; the milling precision of the milling cutter to the disc surface is effectively prevented from being influenced by errors of the linear guide rail when the milling cutter is driven by the slide carriage of the linear guide rail to perform uniform linear motion along the radial direction of the polishing disc in the prior art, and therefore the technical problem that the shape errors of the polishing disc are difficult to improve is effectively solved.
Polishing a plate aperture correction pattern; setting the air pressure of an air cylinder, obtaining a removal function of a small tool correction disk acting on the polishing disk by referring to the method of the patent ZL201410456502.5, planning the path and residence time of the small tool correction disk according to the measured shape error of the polishing disk, and generating and executing a sub-aperture correction motion control program to realize quantitative correction of the shape error of the polishing disk.
According to the invention, the shape error of the polishing disc is accurately detected by the method, and the comprehensive control of the shape error of the polishing disc is realized by adopting a plurality of methods such as the correction of the milling disc surface and the large-size correction disc, the correction of the small tool correction disc and the like, so that the intelligent control of the polishing process is realized, and the shape error control of the polishing disc is further improved.
In the present specification, each embodiment is described in a progressive manner, and each embodiment is mainly described in a different point from other embodiments, and identical and similar parts between the embodiments are all enough to refer to each other. For the device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant points refer to the description of the method section.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (5)
1. An intelligent ring polishing machine tool, which is characterized by comprising:
the base (1), the bottom of the base (1) is provided with three supporting blocks (11) along the circumferential direction;
the top of the base (1) supports the bottom of the turntable (2) and is rotatably connected with the turntable (2); a layer of asphalt glue is poured on the top surface of the turntable (2) to form a polishing disc (21); the rotary table (2) is an air-floating rotary table, a boss (22) with the diameter smaller than that of the air-floating rotary table is arranged at the bottom of the air-floating rotary table, an external meshing gear ring is arranged on the boss (22), a rotary table motor assembly (23) is arranged at the bottom of the air-floating rotary table and close to the edge of the boss (22), and an output gear of the rotary table motor assembly (23) is meshed with the external meshing gear ring;
the multi-station bridge frame mechanism (3) is arranged on the top of the turntable (2); a plurality of cross beams of the multi-station bridge frame mechanism (3) are correspondingly provided with an element processing station (31), a polishing disc detection station (32) and a correction disc station (33);
the device comprises a component processing device (4), wherein a first linear sliding guide rail (34) is arranged on a first cross beam corresponding to a component processing station (31), and the component processing device (4) is slidably connected with the first linear sliding guide rail (34); the component processing device (4) includes: a suspension type workpiece holder (41), a workpiece disc (42), a workpiece disc holding wheel (43), a separator (44) and a workpiece disc driving motor (45); the suspension type workpiece frame (41) comprises a guide rail matching part (411) and a workpiece disc fixing part (412) which are integrally connected; the guide rail matching part (411) is slidably connected with the first linear sliding guide rail (34); the middle part of the workpiece disc fixing part (412) is provided with a circular space; a plurality of workpiece tray holding wheels (43) are arranged at the bottom around the circular space; the outer circumference of the workpiece disc (42) is provided with a first gear synchronous belt which is meshed with the plurality of workpiece disc holding wheels (43) for transmission, and the workpiece disc (42) is limited to move in the circular space; the separator (44) is connected to the middle part of the workpiece disc (42), a workpiece hole is formed in the separator, and an element is fixed in the workpiece hole; the workpiece disc driving motor (45) is fixed on the workpiece disc fixing part (412), and an output gear of the workpiece disc driving motor is positioned at the same height as the workpiece disc holding wheel (43), is meshed with the first gear synchronous belt for transmission, and is electrically connected with the control terminal (7);
a sub-aperture correction guide rail is arranged on the other side of the first beam, and a sub-aperture correction structure (46) is slidably connected to the sub-aperture correction guide rail; the sub-aperture correction structure (46) comprises a third slide carriage (465), a sub-aperture correction motor (461), a sub-aperture correction cylinder (462), a crank shaft (463) and a small tool correction disc (464); the third slide carriage (465) is slidably arranged on the sub-aperture correction guide rail; the sub-aperture correction motor (461) and the sub-aperture correction cylinder (462) are both fixed on the third slide carriage (465); the output end of the sub-aperture correction cylinder (462) is connected with a belt pulley, and the belt pulley is meshed with an output gear of the sub-aperture correction motor (461) through a toothed belt for transmission; one end of the crank shaft (463) is connected with the sub-aperture correction cylinder (462); the small tool correction disc (464) is connected to the other end of the crank shaft (463);
the polishing disc detection device (5) is provided with an air-floating linear guide rail (35) on a second beam corresponding to the polishing disc detection station (32), and the polishing disc detection device (5) is slidably connected with the air-floating linear guide rail (35); the polishing disk detection device (5) comprises: the device comprises a first slide carriage (51), a first high-speed motor (52), a displacement sensor (53), a polishing and milling structure or a slotting structure (54); one end face of the first slide carriage (51) is slidably connected with the air floatation linear guide rail (35); the displacement sensor (53) is fixed on the other end face of the first slide carriage (51) through a connecting piece, and the displacement sensor (53) points to the direction of the polishing disc (21) and is electrically connected with the control terminal (7); the polishing milling structure or the grooving structure (54) is connected with the first slide carriage (51); the first high-speed motor (52) is slidably connected with the polishing and milling structure or the slotting structure (54) along the vertical direction; and is electrically connected with the control terminal (7);
the polishing disc correction device (6) is arranged on a third beam corresponding to the correction disc station (33), and the polishing disc correction device (6) is slidably connected with the second linear sliding guide rail (36);
and the element processing device (4), the polishing disc detection device (5) and the polishing disc correction device (6) are electrically connected with the control terminal (7), and a program for element processing, polishing disc detection and polishing disc correction is preset in the control terminal (7).
2. The intelligent ring polishing machine according to claim 1, wherein the polishing milling or grooving structure (54) comprises: a vertical linear guide rail (541), a vertical driving motor (542), a vertical ball screw (543), a vertical slide carriage (544) and a milling cutter structure (545);
one side surface of the vertical linear guide rail (541) is vertically fixed on the first slide carriage (51);
the vertical ball screw (543) is fixed on the other side surface of the vertical linear guide rail (541);
the vertical driving motor (542) is fixed at the top of the vertical linear guide rail (541) and is connected with the vertical ball screw (543); the vertical driving motor (542) is electrically connected with the control terminal (7);
the vertical slide carriage (544) is slidably connected with the vertical linear guide rail (541) and the vertical ball screw (543), and the first high-speed motor (52) is fixed on the vertical slide carriage (544);
the milling cutter structure (545) is connected to the output of the first high speed motor (52).
3. The intelligent ring polishing machine tool according to claim 1, wherein the air-floating linear guide rail (35) comprises a guide rail seat (351), a second ball screw, a guide rail servo motor (352), an electronic level gauge (353) and a level adjusting structure (354);
the guide rail seat (351) is made of granite, and one end face of the guide rail seat is fixed on the second cross beam;
the guide rail servo motor (352) is fixed on one side of the guide rail seat (351);
the second ball screw is arranged on the guide rail seat (351) and is connected with the output end of the guide rail servo motor (352); the first slide carriage (51) is slidably connected with the guide rail seat (351) and the second ball screw;
the electronic level gauge (353) and the level adjusting structure (354) are both fixed on the guide rail seat (351);
wherein, guide rail servo motor (352) with electron level meter (353) all with control terminal (7) electric connection.
4. An intelligent ring polishing machine according to claim 1, wherein the polishing disc correction device (6) comprises a second slide carriage (61), a correction disc suspension structure (62), a correction disc (63) and a correction disc driving motor (64);
the second slide carriage (61) is slidably connected with the second linear sliding guide rail (36);
one end of the correction disc suspension structure (62) is fixedly connected with the second slide carriage (61);
the top surface of the correction disc (63) is connected with the other end of the correction disc suspension structure (62), and a second synchronous belt is arranged on the outer circumference of the correction disc (63);
the correction disc driving motor (64) is fixed on the second slide carriage (61), and an output gear of the correction disc driving motor is meshed with the second synchronous belt for transmission; which is electrically connected to the control terminal (7).
5. The intelligent ring polishing machine of claim 1, comprising a normal machining mode, a polishing disk detection mode, and a polishing disk correction mode; the control terminal can switch the modes to work.
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| CN2019202622572 | 2019-03-01 | ||
| CN201910157298X | 2019-03-01 | ||
| CN201910157298.XA CN109794825A (en) | 2019-03-01 | 2019-03-01 | A kind of intelligence glass polishing machine bed and its control method |
| CN201920262257 | 2019-03-01 |
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| CN110293467A CN110293467A (en) | 2019-10-01 |
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| CN201920914375.7U Expired - Fee Related CN210550116U (en) | 2019-03-01 | 2019-06-18 | Intelligent ring polishing machine tool |
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| CN110293467B (en) * | 2019-03-01 | 2024-04-16 | 中国工程物理研究院激光聚变研究中心 | Intelligent ring polishing machine tool and control method thereof |
| CN111266937B (en) * | 2020-03-20 | 2021-09-10 | 大连理工大学 | Rocker arm type polishing device and method for full-caliber deterministic polishing of planar parts |
| CN112157561B (en) * | 2020-08-14 | 2022-03-29 | 大连理工大学 | Polishing machine with disk surface in-place measurement and trimming functions |
| CN112405215B (en) * | 2020-11-11 | 2022-04-15 | 中国工程物理研究院激光聚变研究中心 | Off-line dressing device and method for polishing disk |
| CN114453912B (en) * | 2022-02-21 | 2022-11-25 | 赖东平 | Metal forming machine tool and automatic control method thereof |
| CN114986325B (en) * | 2022-06-10 | 2023-09-22 | 中国工程物理研究院激光聚变研究中心 | Optical element full-caliber polishing local area constant temperature processing device and polishing machine |
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