CN110270757A - A kind of method and device of laser transmission porous anodic aluminium oxide preparation nanostructure - Google Patents
A kind of method and device of laser transmission porous anodic aluminium oxide preparation nanostructure Download PDFInfo
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- CN110270757A CN110270757A CN201910474501.6A CN201910474501A CN110270757A CN 110270757 A CN110270757 A CN 110270757A CN 201910474501 A CN201910474501 A CN 201910474501A CN 110270757 A CN110270757 A CN 110270757A
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- porous anodic
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- alumina template
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- aluminium oxide
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- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 title claims abstract description 114
- 238000000034 method Methods 0.000 title claims abstract description 35
- 239000002086 nanomaterial Substances 0.000 title claims abstract description 35
- 238000002360 preparation method Methods 0.000 title claims abstract description 22
- 230000005540 biological transmission Effects 0.000 title claims abstract description 19
- 229910052751 metal Inorganic materials 0.000 claims abstract description 35
- 239000002184 metal Substances 0.000 claims abstract description 35
- 239000011148 porous material Substances 0.000 claims abstract description 5
- 230000003287 optical effect Effects 0.000 claims description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- 238000009415 formwork Methods 0.000 claims description 6
- 239000007789 gas Substances 0.000 claims description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 4
- 239000001301 oxygen Substances 0.000 claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims description 4
- 238000009434 installation Methods 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 241000931526 Acer campestre Species 0.000 claims description 2
- 229910000838 Al alloy Inorganic materials 0.000 claims description 2
- 229910052786 argon Inorganic materials 0.000 claims description 2
- 230000008859 change Effects 0.000 claims description 2
- 239000000463 material Substances 0.000 abstract description 5
- 238000001338 self-assembly Methods 0.000 description 8
- 239000000523 sample Substances 0.000 description 6
- 239000004411 aluminium Substances 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 238000005530 etching Methods 0.000 description 5
- 238000003672 processing method Methods 0.000 description 5
- LSDPWZHWYPCBBB-UHFFFAOYSA-N Methanethiol Chemical compound SC LSDPWZHWYPCBBB-UHFFFAOYSA-N 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 238000001259 photo etching Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000004049 embossing Methods 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 239000005030 aluminium foil Substances 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000002105 nanoparticle Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 239000000084 colloidal system Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 229960000935 dehydrated alcohol Drugs 0.000 description 1
- OGQYPPBGSLZBEG-UHFFFAOYSA-N dimethyl(dioctadecyl)azanium Chemical compound CCCCCCCCCCCCCCCCCC[N+](C)(C)CCCCCCCCCCCCCCCCCC OGQYPPBGSLZBEG-UHFFFAOYSA-N 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002121 nanofiber Substances 0.000 description 1
- 238000006552 photochemical reaction Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000005289 physical deposition Methods 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Laser Beam Processing (AREA)
Abstract
The present invention relates to a kind of method and devices of laser transmission porous anodic aluminium oxide preparation nanostructure, porous anodic alumina template is placed in the top of metal surface to be processed, and it is spaced apart with metal surface to be processed, laser scanning galvanometer system is placed in the top of porous anodic alumina template, the nano-pore for enabling laser to penetrate porous anodic alumina template acts on metal surface to be processed, etches nanostructure in metal surface to be processed.The method of the present invention carries out Physical Processing to material using the system of porous anodic alumina template and laser in combination, and step is more simple, repeatability is high.
Description
Technical field
The invention belongs to laser ablation fields, are related to the processing technology of nanostructure, and especially a kind of laser transmission is porous
The method and device of anodised aluminium preparation nanostructure.
Background technique
Industrial production and research work now is higher and higher to the precision requirement of instrument and equipment, the production of microstructure
More it is valued by people.Nano-substance is substance of the size between molecule and micro-meter scale, by one-dimensional, two-dimentional, three-dimensional
The structure of material composition of the size within the scope of 1-100nm be known as nanostructure.Since people in recent years are for nanostructure
Processing method gradually diversification and maturing, nanostructure obtained in electronic field, optical field, magnetic fields and medical domain
A large amount of application is arrived.The processing method of nanostructure is divided into artificial method for constructing, molecular self-assembling method and template at present.
One, artificial method for constructing is divided into photoetching technique, line etching method, STM/AFM processing method, nanometer embossing.
1, photoetching technique: being using photoresist cooperation optical mask plate using photo-chemical reaction principle to be processed
Pictorial pattern on surface " duplicating " optical mask plate.
2, line etching method: process principle is similar with photoetching technique to have used ion beam and electron beam to replace light source.
3, STM/AFM processing method: think that cooperation carries out object to finished surface using atomic force microscope and different type probe
Reason and modification chemically.
4, the sample with nano-scale patterns nanometer embossing: is being coated with high molecular material using mechanical force pressing
The duplication of pattern is carried out on silicon plate.
Two, molecular self-assembling method is divided into LB membrane technology, mercaptan self assembly and colloidal self-assembly.
1, LB membrane technology: basic principle be will the amphiphile, amphiphilic molecule with hydrophilic head base and hydrophobic long-chain in parfacies surface spreading
It is formed monomolecular film (L film), is then transferred to the monomolecular film on this gas-liquid interface on substrate under constant pressure, shape
At LB film.
2, mercaptan self assembly: film mercaptan self assembly film mainly includes three parts: molecule head base, alkyl chain and substitution end group.
3, colloidal self-assembly: colloid has the characteristic of self assembly, and nanoparticle cluster is easy to disperse in a solvent
Colloidal solution is formed therefore to assemble nanocluster to form well-regulated arrangement as long as having suitable condition.
Three, template is to utilize chemical deposition or physical deposition using generated nano-scale patterns as template
Molecule among template, is finally dissolved template, obtains nanofiber, nanometer rods or this nano particle by method.
The method of above-mentioned a variety of production nanostructures, such as STM/AFM processing method, LB membrane technology, mercaptan self assembly and glue
Body self assembly requires expensive cost, for example, photoetching technique, line etching method and template step all it is relatively cumbersome be not easy it is big
Amount preparation nanostructure.Nanometer embossing is due to using purely mechanic power to process, and the forming degree of nanostructure can be opposite after coining
It is very different.
Summary of the invention
It is an object of the invention in place of overcome the deficiencies in the prior art, provide a kind of laser transmission porous anodic aluminium oxide
The method and device of nanostructure is prepared, nanostructure preparation can be carried out to a variety of metals and nonmetallic surface.
The technical proposal for solving the technical problem of the invention is:
A kind of method of laser transmission porous anodic aluminium oxide preparation nanostructure, porous anodic alumina template is placed in
The top of metal surface to be processed, and it is spaced apart with metal surface to be processed, laser scanning galvanometer system is placed in more
The top of hole anodic oxidation aluminium formwork, the nano-pore for enabling laser to penetrate porous anodic alumina template act on metal to be processed
On surface, nanostructure is etched in metal surface to be processed.
Moreover, laser uses single sweep operation.
Moreover, the spacing of porous anodic alumina template and metal surface to be processed is 0.5~5mm.
Moreover, the spacing of porous anodic alumina template and laser scanning galvanometer system is 215-220mm.
Moreover, the optical maser wavelength is 355nm, less than the aperture 500-600nm of porous anodic alumina template.
Moreover, laser facula is 0.05-0.08mm on porous anodic alumina template.
A kind of device of laser transmission porous anodic aluminium oxide preparation nanostructure, including generating device of laser, porous sun
Pole alumina formwork, platform and controller install metal plate to be processed on platform, at the top interval one of metal plate to be processed
Set a distance installs porous anodic alumina template, in the top of porous anodic alumina template installation laser hair spaced apart
Generating apparatus.
Moreover, the generating device of laser includes laser emitter, reflecting mirror, scanning galvanometer system, scanning galvanometer system
System is mounted on the top of porous anodic alumina template, and scanning galvanometer system changes optical path and Laser emission by 45 ° of reflecting mirrors
Device is connected, and laser emitter is connected with controller.
Moreover, the platform is three-dimensional mobile platform, three-dimensional mobile platform is connect with controller.
Moreover, the porous anodic alumina template and metal plate to be processed are mounted in a seal case, sealing
Bottom is vertically formed with multiple rows of locating slot at the middle part of seal case, fixed by the fixed metal plate to be processed of positioning plate in cabinet
In the slot of position by clamping plate fixation porous anodic alumina template, in the top of porous anodic alumina template, seal case
Top surface is embedded in a lens, and air inlet and exhaust outlet are formed on seal case, and air inlet connects oxygen or nitrogen or argon gas gas source,
It can provide various gas processing atmosphere, exhaust outlet connects vacuum pump, provides vacuum processing environment.
The advantages and positive effects of the present invention are:
1, porous anodic alumina template of the present invention can be controlled by changing the chemical component of the voltage and solution that aoxidize
Size, the spacing of nano-pore processed, so utilizing it as the size and spacing of the nanostructure on its surface of metal of template processing
Also controllable.
2, its surface texture of porous anodic alumina template of the present invention is at regular hexagonal structure, so with its work
Nanostructure, which is processed, for template also possesses relatively high regularity.
3, be still for present invention essence belong to the i.e. physical refining processes of laser processing, so by laser parameter with sweep
The control for retouching speed can carry out nanostructure preparation to a variety of metals and nonmetallic surface.
4, the method for the present invention as a whole carries out material using the system of porous anodic alumina template and laser in combination
Physical Processing, so its step is more simple, repeatability is high.
5, porous anodic alumina template of the present invention can be used for multiple times, and be different from conventional template method preparation a batch dissolution one
It criticizes, cost is more cheap in this way for institute.
Detailed description of the invention
Fig. 1 is schematic structural diagram of the device of the invention；
Fig. 2 is structural schematic diagram in seal case.
Specific embodiment
The invention will be further described with reference to the accompanying drawing and by specific embodiment, and following embodiment is descriptive
, it is not restrictive, this does not limit the scope of protection of the present invention.
A kind of device of laser transmission porous anodic aluminium oxide preparation nanostructure, including generating device of laser, porous sun
Pole alumina formwork 3, platform 1 and controller 8 install metal plate 2 to be processed, between the top of metal plate to be processed on platform
Porous anodic alumina template is installed at a certain distance, installation spaced apart swashs in the top of porous anodic alumina template
Light generating apparatus, laser beam are got on porous anodic alumina template vertically.The generating device of laser includes Laser emission
Device 7, reflecting mirror 6, scanning galvanometer system 5, scanning galvanometer system are mounted on the top of porous anodic alumina template.Scanning galvanometer
System changes optical path by two 45 ° of reflecting mirrors and is connected with laser emitter, and laser emitter is connected with controller.
The platform is three-dimensional mobile platform, and three-dimensional mobile platform is connect with controller.
The porous anodic alumina template and metal plate to be processed are mounted in a seal case 10, in seal case
Interior bottom is vertically formed with multiple rows of locating slot 14 at the middle part of seal case, fixed by the fixed metal plate to be processed of positioning plate 12
By the fixed porous anodic alumina template of clamping plate 11 in the slot of position, porous anodic alumina template is parallel with metal plate to be processed
Setting, the distance between porous anodic alumina template and metal plate to be processed pass through mobile porous anodic alumina template tune
Section.A lens 4 are embedded in the top of porous anodic alumina template, the top surface of seal case, are issued from scanning galvanometer system
Laser passes through lens and is emitted on porous anodic alumina template.
Air inlet 9 and exhaust outlet 13 are formed on seal case, which can connect with vaccum-pumping equipment, provide
Vacuum laser processes atmosphere.Or connect with charger, such as inert gas processing or oxygen/nitrogen oxidation are provided or nitridation adds
Work atmosphere.
Controller controls laser emitter and exports laser, and laser enters scanning galvanometer system, scanning galvanometer through 45 ° of reflecting mirrors
System controls movement of the laser in the X of platform, Y-direction, and a bit (feature is to move regardless of light beam by light beam aggregation
Dynamic, focus position remains at material surface to be processed, guarantees the size Yu energy density one of the hot spot in working region
It causes).Hot spot falls in porous anodic alumina template, adjusts porous anodic alumina template by moving three dimension mobile platform and sweeps
Galvanometer system spacing H is retouched, control hot spot size on porous anodic alumina template (mainly prevents the excessive breakdown of light spot energy more
Hole anodic oxidation aluminium formwork)；Segment beam is irradiated to sample surfaces through the nanometer micropore on porous anodic alumina template, by
Supporting block adjusts the distance between sample and porous anodic alumina template, and sample surfaces perform etching to be formed and porous anode oxygen
Change nanometer micropore size structure on aluminum alloy pattern plate.
The laser model: DRACOTM series laser, wavelength: 355nm.
A kind of method of laser transmission porous anodic aluminium oxide preparation nanostructure, porous anodic alumina template is placed in
The top of metal surface to be processed, and it is spaced apart with metal surface to be processed, laser scanning galvanometer system is placed in more
The top of hole anodic oxidation aluminium formwork, the nano-pore for enabling laser to penetrate porous anodic alumina template act on metal to be processed
On surface, nanostructure is etched in metal surface to be processed.
Specific step are as follows:
1, aluminium foil is successively put to people's acetone, ultrasonic cleaning 10min in dehydrated alcohol, reduces pollutant and laser beam is inhaled
The influence of receipts；
2, cleaned aluminium foil is placed in seal box, and carries out positioning and fixing with positioning plate；
3, porous anodic alumina template is fixed with clamping plate, is placed in seal box, and pass through locating slot tune
Save the distance between porous anodic alumina template and lens H；
4, entire seal box is placed in three-dimensional mobile platform, adjusts three-dimensional mobile platform, pass through laser light source close
Lens on joint sealing, are irradiated on porous anodic alumina template；
5, the distance between porous anodic alumina template and laser lens H 215-220mm is adjusted (mainly to adjust and swash
The defocusing amount of light), control hot spot size 0.05-0.08mm on porous anodic alumina template (mainly prevents light spot energy mistake
Big breakdown porous anodic alumina template)；
6, processing is performed etching to sample surfaces by porous anodic alumina template with laser.The output wavelength of laser
For 355nm, repetition rate 20kHz, focal beam spot diameter is 20 μm.Single sweep operation, scanning are used on aluminium sheet using laser
Interval 0.005mm, scanning speed 1300mm/s, scanning times 3 times.(it can effectively be saved sweep time using single sweep operation,
Processing efficiency is improved, heat affected area is reduced.)
1 laser PAA method of table prepares metal-surface nano porous structure
What has been described above is only a preferred embodiment of the present invention, it is noted that for those of ordinary skill in the art
For, under the premise of not departing from inventive concept, various modifications and improvements can be made, these belong to protection of the invention
Range.
Claims (10)
1. a kind of method of laser transmission porous anodic aluminium oxide preparation nanostructure, it is characterised in that: by porous anode
Aluminum alloy pattern plate is placed in the top of metal surface to be processed, and spaced apart with metal surface to be processed, by laser scanning galvanometer
System is placed in the top of porous anodic alumina template, and the nano-pore for enabling laser to penetrate porous anodic alumina template acts on
On metal surface to be processed, nanostructure is etched in metal surface to be processed.
2. the method for laser transmission porous anodic aluminium oxide preparation nanostructure according to claim 1, it is characterised in that:
Laser uses single sweep operation.
3. the method for laser transmission porous anodic aluminium oxide preparation nanostructure according to claim 1, it is characterised in that:
The spacing of porous anodic alumina template and metal surface to be processed is 0.5~5mm.
4. the method for laser transmission porous anodic aluminium oxide preparation nanostructure according to claim 1, it is characterised in that:
The spacing of porous anodic alumina template and laser scanning galvanometer system is 215-220mm.
5. the method for laser transmission porous anodic aluminium oxide preparation nanostructure according to claim 1, it is characterised in that:
Optical maser wavelength is less than the aperture of porous anodic alumina template.
6. the method for laser transmission porous anodic aluminium oxide preparation nanostructure according to claim 1, it is characterised in that:
Laser facula is 0.05-0.08mm on porous anodic alumina template.
7. a kind of device of laser transmission porous anodic aluminium oxide preparation nanostructure, it is characterised in that: filled including laser
It sets, porous anodic alumina template, platform and controller install metal plate to be processed on platform, in metal plate to be processed
Top installation porous anodic alumina template spaced apart, it is spaced apart in the top of porous anodic alumina template
Generating device of laser is installed.
8. the device of laser transmission porous anodic aluminium oxide preparation nanostructure according to claim 1, it is characterised in that:
The generating device of laser includes laser emitter, reflecting mirror, scanning galvanometer system, and scanning galvanometer system is mounted on porous sun
The top of pole alumina formwork, scanning galvanometer system change optical path by 45 ° of reflecting mirrors and are connected with laser emitter, Laser emission
Device is connected with controller.
9. the device of laser transmission porous anodic aluminium oxide preparation nanostructure according to claim 1, it is characterised in that:
The platform is three-dimensional mobile platform, and three-dimensional mobile platform is connect with controller.
10. the device of laser transmission porous anodic aluminium oxide preparation nanostructure according to claim 1, feature exist
In: the porous anodic alumina template and metal plate to be processed are mounted in a seal case, the bottom in seal case
By the fixed metal plate to be processed of positioning plate, it is vertically formed with multiple rows of locating slot at the middle part of seal case, is passed through in locating slot
Clamping plate fixes porous anodic alumina template, is embedded in one in the top of porous anodic alumina template, the top surface of seal case
Lens, are formed with air inlet and exhaust outlet on seal case, and air inlet connects oxygen or nitrogen or argon gas gas source, exhaust outlet connection
Vacuum pump.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910474501.6A CN110270757A (en) | 2019-06-03 | 2019-06-03 | A kind of method and device of laser transmission porous anodic aluminium oxide preparation nanostructure |
| AU2019100681A AU2019100681A4 (en) | 2019-06-03 | 2019-06-21 | Method and device for preparing nanostructure by laser transmission of porous anodic aluminum oxide |
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|---|---|---|---|
| CN201910474501.6A CN110270757A (en) | 2019-06-03 | 2019-06-03 | A kind of method and device of laser transmission porous anodic aluminium oxide preparation nanostructure |
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| CN110270757A true CN110270757A (en) | 2019-09-24 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111451631A (en) * | 2020-04-02 | 2020-07-28 | 佛山根固激光科技有限公司 | Laser welding head and welding apparatus |
| CN111627800A (en) * | 2020-05-11 | 2020-09-04 | 天津大学 | Efficient processing method for ultrashort pulsed light on atomic-level surface and structure |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114131206A (en) * | 2021-12-22 | 2022-03-04 | 武汉光至科技有限公司 | Laser marking method and marking device thereof |
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| CN107275204A (en) * | 2017-06-20 | 2017-10-20 | 华中科技大学 | A kind of nano photoelectric device preparation method based on porous anodic alumina template |
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