CN203227924U - Laser scanning machining device - Google Patents
Laser scanning machining device Download PDFInfo
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- CN203227924U CN203227924U CN 201320122899 CN201320122899U CN203227924U CN 203227924 U CN203227924 U CN 203227924U CN 201320122899 CN201320122899 CN 201320122899 CN 201320122899 U CN201320122899 U CN 201320122899U CN 203227924 U CN203227924 U CN 203227924U
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Abstract
The utility model relates to a laser scanning machining device which comprises a galvanometer scanning focusing module, a positive pressure air cavity and/or a negative pressure air cavity and a blowing mask plate. Distributed air blowing nozzles are formed by presetting the thickness of the blowing mask plate, the shapes of air flow windows and the like. Meanwhile, the air pressure difference between a laser incident plane and a laser emitting plane of the blowing mask plate is preset, and air with the flowing direction identical with or basically the same as the transmitting direction of laser penetrating the air flow windows of the blowing mask plate is formed. The purpose of large-breadth laser machining distributed auxiliary blowing during galvanometer scanning focusing machining is achieved, and the laser scanning machining device provides a perfect solution scheme of distributed auxiliary blowing of a laser galvanometer scanning focusing machining mode and is suitable for industrial batch production.
Description
Technical field
The utility model relates to field of laser processing, relates in particular to a kind of laser scanning manufacturing device that possesses the mobile control function in assist gas space.
Background technology
Can produce the high velocity jet plasma cloud in the laser cutting, and splash everywhere be cut the material dust.These material dust meeting severe contaminations and damage condenser lens have a strong impact on laser simultaneously and focus on and the laser cutting quality.Laser cutting machine all adopts the coaxial air blowing mode of static focus and laser beam at present, in laser cutting auxiliary effect of blowing have following some: the first, for the metal surface of the easy oxidation of metal laser cutting machine cutting, oxygen blast air lift high the absorptivity of surface to laser.Oxygen blast gas in the LASER HEATING process, the rapid oxidation in metal surface, reflectivity reduces rapidly, has reduced the reflection loss of surface to laser energy.The second, in the Laser Processing in LASER HEATING and the oxygen blast process, oxidation reaction has been emitted a large amount of heats, has replenished the heat energy that needs in the cutting.Three, with the coaxial air blowing of laser beam, can blow and eliminate plasma cloud open to the shielding action of laser, keep constant cutting speed.Four, in laser cutting process, coaxial air blowing can blow the motlten metal in the slit off, improves cutting speed.Five, in the laser cutting process, with the coaxial air blowing of laser beam, can dispel the material that when cutting, upwards sprays, thereby protect the not contaminated and damage of condenser lens.Certainly also having in the air blowing process of nonmetal laser cutting machine makes our operating efficiency, effect that lifting be arranged.
In the laser processing mode that focuses on as for vibration mirror scanning, all take the way of bleeding in the industry, the dust that Laser Processing produces is taken to protect away focus lamp and galvanometer eyeglass, what is called is bled, and is exactly that gas flow is opposite with the Laser Transmission direction.Because the laser beam that vibration mirror scanning focuses on transmission orientation is dynamic change, also there is not at present good air blowing way, make airflow direction or basically identical consistent with the laser beam transmission direction, reach and suppress spark and the isoionic generation that Laser Processing produces, therefore cannot realize the effect of the coaxial air blowing of above-mentioned static focus laser beam, for many years unmanned this technical barrier that solves always.
The utility model content
Technical problem to be solved in the utility model provides a kind of laser scanning manufacturing device, in laser scanning, can realize distributed axial or paraxial auxiliary air blowing function, reach and suppress or eliminate the spark that produces in the Laser Processing and the effect of plasma cloud.
The technical scheme that the utility model solves the problems of the technologies described above is as follows: a kind of laser scanning manufacturing device comprises vibration mirror scanning focus module, positive pressure gas body cavity and/or negative-pressure gas chamber, air blowing mask plate.
For convenience, for above-mentioned each part, the one side of laser incident is defined as laser entrance face, and the one side of laser emitting is defined as laser-emitting face; Perhaps, an end of laser incident is defined as laser incident end, and an end of laser emitting is defined as the laser emitting end.
Described air blowing mask plate is positioned at material to be processed top, has one or more air-flow window on it, is convenient to process laser beam and passes through.Not blocking Laser Transmission during with the laser scanning campaign and arriving material to be processed is standard, the shape of this air-flow window can arrange according to the shape for the treatment of the Laser Processing pattern or Laser Processing trajectory shape, the size of air-flow window is treated the Laser Processing pattern dimension or greater than Laser Processing track live width size greater than described, and perhaps the shape and size of air-flow window require to arrange according to auxiliary inflatable gas stream mode.
Described positive pressure gas body cavity and/or negative-pressure gas chamber are used for forming draught head at the laser entrance face of described air blowing mask plate and laser-emitting face, make to form the auxiliary air blowing air-flow identical or approaching with the Laser Transmission direction at each air-flow the window's position of air blowing mask plate.Because therefore the laser-emitting face of described air blowing mask plate is in the same space with the workpiece to be processed surface directly in the face of workpiece to be processed, described auxiliary air blowing air-flow directly blows to piece surface to be processed.
Described positive pressure gas body cavity comprises positive pressure gas body cavity laser incident end and the positive pressure gas body cavity laser emitting end that the position is relative, and described positive pressure gas body cavity is provided with air inlet and exhaust outlet, and described positive pressure gas body cavity air pressure inside is greater than ambient pressure.
Described negative-pressure gas chamber is provided with air inlet and exhaust outlet, and described negative-pressure gas chamber air pressure inside is less than ambient pressure.
Described vibration mirror scanning focus module comprises scanning galvanometer and scanning flat field focus lamp, and perhaps described vibration mirror scanning focus module comprises dynamic focusing mirror and scanning galvanometer.
When scanning galvanometer cooperates with scanning flat field focus lamp, described scanning galvanometer is used for changing the transmission orientation that is transmitted into the incoming laser beam on it, described scanning galvanometer comprises first speculum, be used for driving first motor of first speculum, second speculum, be used for driving second motor and the scanning galvanometer shell of second speculum, described scanning galvanometer shell is provided with the laser entrance port towards a side of incoming laser beam, described first speculum, first motor, second speculum and second motor are positioned at described scanning galvanometer shell, described first speculum is installed on the main shaft of first motor, described second speculum is installed on the main shaft of second motor, described first electric machine main shaft is vertical mutually with described second electric machine main shaft, described first speculum is used for receiving and reflecting the light beam that is transmitted on it, be transmitted to the folded light beam of described second speculum with formation, described second speculum receives and also reflects described folded light beam, is transmitted into scanning light beam on the described scanning flat field focus lamp with formation.Described scanning flat field focus lamp, be positioned at a side of described scanning galvanometer output scanning light beam, be used for receiving described scanning light beam, and described scanning light beam assembled, to form focused first light beam, described first light beam is transmitted on the object to be processed by the air-flow window on positive pressure gas body cavity and/or negative-pressure gas chamber and the described air blowing mask plate, and workpiece is carried out Laser Processing.Described flat field focus lamp comprises common f-theta lens and heart flat field focus lamp far away.
Described positive pressure gas body cavity, a kind of hollow-core construction, can define laser beam incident end is positive pressure gas body cavity laser incident end, the laser beam exit facet is positive pressure gas body cavity shoot laser end.Its inner space size and shape can be held the flat field focus lamp and can hold laser beam non-blockedly swing under galvanometer control, described positive pressure gas body cavity, be installed on scanning galvanometer below, and in the scanning focused mirror of flat field is enclosed in, perhaps be installed on the scanning focused mirror of flat field.The scanning focused mirror of described flat field can be directly installed on the scanning galvanometer, perhaps is mounted to one with the positive pressure gas body cavity.Be in sealing state between described positive pressure gas body cavity and scanning galvanometer or the scanning flat field focus lamp, described air blowing mask plate is positioned at described positive pressure gas body cavity laser-emitting face.Perhaps described positive pressure gas body cavity, be installed on the scanning focused mirror of flat field below, its laser entrance face adopts the sealing of laser-light transparent optical glass, laser beam is from the scanning focused mirror outgoing of flat field, see through described laser-light transparent optical glass and enter described positive pressure gas body cavity, this moment, described positive pressure gas body cavity internal positive pressure gas was kept off in described positive pressure gas body cavity inside by described laser-light transparent optical glass.In a word, the assembling between described positive pressure gas body cavity and scanning galvanometer or the scanning focused mirror of flat field is in sealing state, and perhaps described positive pressure gas body cavity laser entrance face is with the sealing of laser-light transparent optical glass, to reduce and to avoid barotropic gas to leak.Described air blowing mask plate is installed in positive pressure gas body cavity shoot laser face, and possesses certain thickness and as close as possible workpiece to be processed surface, with the air blowing effect that forms; One or more air inlet of the installation of described positive pressure gas body cavity, described barotropic gas is discharged by the described air blowing mask plate air-flow window that excavation is good in advance, its discharge directions or basically identical consistent with the Laser Transmission direction, select certain thickness air blowing mask plate, design and process the cross sectional shape of the air-flow window of opening, each air-flow window all possesses coaxial or paraxial air blowing valve function like this.By adjusting described positive pressure gas body cavity gas inside pressure, composition, can when laser scanning manufacturing, realize distributed coax or paraxial auxiliary air blowing function.
Described negative-pressure gas chamber is installed on positive pressure gas body cavity bottom or described air blowing mask plate bottom, and its structure can be determined according to concrete processing parts and machining area shape.Described negative-pressure gas chamber air inlet is positioned at the negative-pressure gas chamber near the position at air blowing template bottom or edge, perhaps described air blowing mask plate is positioned at described negative-pressure gas chamber laser entrance face, on the described air blowing mask plate the air-flow window of opening as the air inlet in described negative-pressure gas chamber, be that the positive pressure gas body cavity is connected by described air blowing mask plate with the negative-pressure gas chamber, described positive pressure gas body cavity and negative-pressure gas chamber are positioned at described air blowing mask plate both sides.Described negative-pressure gas chamber exhaust outlet can be installed in the position away from air inlet, for example the side in described negative-pressure gas chamber or the workbench of described fixedly workpiece to be processed are provided with through hole, and in installation negative-pressure gas chamber, bottom steam vent, the part that this moment, described workpiece to be processed workbench also was the negative-pressure gas chamber.
Perhaps described air blowing mask plate is positioned at described negative-pressure gas chamber laser entrance face, and workpiece to be processed is positioned at inside, negative-pressure gas chamber, and is installed on the workbench.Can not need this moment the positive pressure gas body cavity just can form the air blowing air-flow identical or approaching with the Laser Transmission direction at each air-flow window of described air blowing mask plate.Each air-flow window of described air blowing mask plate is the air inlet in negative-pressure gas chamber at this moment, and the workbench of described fixedly workpiece to be processed is provided with negative-pressure gas chamber steam vent, and this moment, described workbench also was the part in negative-pressure gas chamber; Or in side, described negative-pressure gas chamber one or more steam vent is installed.Further, described air blowing mask plate can be dismantled at any time, and for example described air blowing mask plate is moved away, workpiece to be processed puts in, and the location finishes, and described air blowing mask plate is installed and had good positioning and gets final product, the wait Laser Processing finishes, and described air blowing mask plate is moved away again, is convenient to the taking-up of workpiece to be processed.This process can be finished with automation executing agency.
If the focusing arrangement of laser scanning focusing system is the dynamic focusing mirror, namely when described vibration mirror scanning focus module comprises dynamic focusing mirror and this situation of scanning galvanometer, the dynamic focusing mirror is positioned at the scanning galvanometer front, described dynamic focusing mirror comprises the lens of at least two series connection, by the spacing between the dynamic adjustment interior lens, the incoming laser beam that is transmitted on it is carried out dynamic focusing, be transmitted into focused beam on the described scanning galvanometer with formation; Described scanning galvanometer, be positioned at a side of described dynamic focusing mirror output focused beam, be used for changing the transmission orientation that is transmitted into the focused beam on it, described scanning galvanometer comprises first speculum, be used for driving first motor of first speculum, second speculum, be used for driving second motor and the scanning galvanometer shell of second speculum, described scanning galvanometer shell is provided with the laser entrance port towards a side of described incoming laser beam, described first speculum, first motor, second speculum and second motor are positioned at described scanning galvanometer shell, described first speculum is installed on the main shaft of first motor, described second speculum is installed on the main shaft of second motor, described first electric machine main shaft is vertical mutually with described second electric machine main shaft, described first speculum is used for receiving and reflecting the light beam that is transmitted on it, be transmitted to the folded light beam of described second speculum with formation, described second speculum reception is also reflected described folded light beam, to form first light beam, described first light beam is transmitted on the object to be processed by the air-flow window on positive pressure gas body cavity and/or negative-pressure gas chamber and the described air blowing mask plate.
Described positive pressure gas body cavity, be installed on the scanning galvanometer below, connect with the scanning galvanometer body seal, Laser Transmission entrance at scanning galvanometer is placed seal plate glass, described seal plate glass and described scanning galvanometer body seal are assembled together, reducing and to avoid gas to leak, but can allow laser beam by and enter scanning galvanometer.Perhaps described positive pressure gas body cavity, be installed on the scanning galvanometer below, its laser entrance face adopts the clear optical glass sealing, described first light beam is from described scanning galvanometer outgoing, see through described clear optical glass and enter described positive pressure gas body cavity, this moment, described positive pressure gas body cavity internal positive pressure gas was kept off in described positive pressure gas body cavity inside by described clear optical glass.Described air blowing mask plate is installed in positive pressure gas body cavity shoot laser end, and possesses certain thickness and as close as possible workpiece to be processed surface, with the air blowing effect that forms; One or more air inlet of the installation of described positive pressure gas body cavity, described barotropic gas is discharged by the described air blowing mask plate air-flow window that excavation is good in advance, its discharge directions or basically identical consistent with the Laser Transmission direction, select certain thickness air blowing mask plate, design and process the cross sectional shape of the air-flow window of opening, each air-flow window all possesses coaxial air blowing valve function like this.By adjusting described positive pressure gas body cavity gas inside pressure, composition, can when laser scanning manufacturing, realize distributed coax or paraxial auxiliary air blowing function.
Described negative-pressure gas chamber is installed on positive pressure gas body cavity bottom or described air blowing mask plate bottom, and its structure can be determined according to concrete processing parts and machining area shape.Described negative-pressure gas chamber air inlet is positioned at the negative-pressure gas chamber near the position at air blowing template bottom or edge, perhaps described air blowing mask plate is positioned at described negative-pressure gas chamber laser entrance face, on the described air blowing mask plate the air-flow window of opening as the air inlet in described negative-pressure gas chamber, be that the positive pressure gas body cavity is connected by described air blowing mask plate with the negative-pressure gas chamber, described positive pressure gas body cavity and negative-pressure gas chamber are positioned at described air blowing mask plate both sides.Described negative-pressure gas chamber exhaust outlet can be installed in the position away from air inlet, for example the side in described negative-pressure gas chamber or the workbench of described fixedly workpiece to be processed are provided with through hole, and in installation negative-pressure gas chamber, bottom steam vent, the part that this moment, described workpiece to be processed workbench also was the negative-pressure gas chamber.
Perhaps described air blowing mask plate is positioned at described negative-pressure gas chamber laser entrance face, and workpiece to be processed is positioned at inside, negative-pressure gas chamber, and is installed on the workbench.Can not need this moment the positive pressure gas body cavity just can form the air blowing air-flow identical or approaching with the Laser Transmission direction at each air-flow window of described air blowing mask plate.Each air-flow window of described air blowing mask plate is the air inlet in negative-pressure gas chamber at this moment, and the workbench of described fixedly workpiece to be processed is provided with negative-pressure gas chamber steam vent, and this moment, described workbench also was the part in negative-pressure gas chamber; Or in side, described negative-pressure gas chamber one or more steam vent is installed.Further, described air blowing mask plate can be dismantled at any time, and for example described air blowing mask plate is moved away, workpiece to be processed puts in, and the location finishes, and described air blowing mask plate is installed and had good positioning and gets final product, the wait Laser Processing finishes, and described air blowing mask plate is moved away again, is convenient to the taking-up of workpiece to be processed.This process can be finished with automation executing agency.
Further; the gas of described positive pressure gas body cavity the inside is air or oxidizing gas or the combination of protective gas or reducibility gas or oxidizing gas and protective gas or combination or the fog of reducibility gas and oxidizing gas; the gas pressure of described air blowing mask plate laser entrance face is greater than the gas pressure of described air blowing mask plate laser-emitting face, also greater than the gas pressure of workpiece to be processed environment of living in.
Described air is laser process equipment surrounding air of living in; Described oxidizing gas refers to can take place with the workpiece to be processed material gas of oxidation chemistry reaction, for example oxygen under certain condition; Described reducibility gas refers to can reduce the gas of chemical reaction, for example hydrogen under certain condition with the workpiece to be processed material; Described protective gas refers to stop the workpiece to be processed material that the gas of oxidation chemistry reaction or reduction chemical reaction, for example nitrogen, carbon dioxide, inert gas etc. take place under certain condition; Described fog is liquid and vaporific form of mixing of gas, for example water smoke.
Further, described air blowing mask plate material is metal material or glass material or sapphire material or ceramic material or other transparent optical material.
Further, place light beam rotary module or beam wobbling modulation module before the described scanning galvanometer.Described light beam rotary module, be to adopt transmission optical component, thereby rotation drives described transmission optical component rotation and then exports the device that rotates light beam at a high speed under motor-driven, and particularly described transmission optical component is installed on the beam rotator of high speed hollow spindle motor; Described beam wobbling modulation module, be to adopt under the effect of transmission optical component or reflective optical devices or diffraction optical element, the outgoing beam of these optical elements is offset in transmission direction with respect to incident beam, can realize the modulation of beam wobbling space tracking.
The purpose of this utility model is: when laser scanning manufacturing, adopt positive pressure gas body cavity and/or negative-pressure gas chamber to cooperate the air blowing mask plate, can apply the air blast identical or approaching with the Laser Transmission direction very exactly, extraordinary coaxial or paraxial auxiliary air blowing effect is played in the Laser Processing of vibration mirror scanning, and totally collected the dust that Laser Processing generates fast.Gas componant by adjusting air-flow, flow, pressure, flow velocity etc., cooperate laser parameter (pulse energy for example, pulse recurrence frequency, pulse width, focal beam spot size etc.) and parameter such as the track of relevant laser beam motion control such as vibration mirror scanning and speed, extraordinary processing effect and working (machining) efficiency can be obtained.
Operation principle of the present utility model is as follows: under the control of scanning galvanometer oscillatory scanning, also can add laser beam rotary motion control device or laser beam oscillating motion control device, laser beam can carry out the motion of various space trackings; Under the effect of the scanning focused mirror of flat field or dynamic focusing mirror, laser beam can be finished focusing; Described air blowing mask plate, be positioned at material to be processed top, its profile according to predetermined laser cutting figure suitably amplifies or digs out one or more air-flow windows according to the needs of controlling the secondary air state, being used for laser beam treats rapidoprint and adds and pass through from corresponding air-flow window man-hour, select certain thickness air blowing mask plate, design and process the cross sectional shape of the air-flow window of opening, each air-flow window all possesses coaxial or paraxial auxiliary air blowing valve function like this; Described positive pressure gas body cavity and/or negative-pressure gas chamber make the laser entrance face of air blowing mask plate and material surface to be processed form draught head; Each air-flow window of described like this air blowing mask plate forms the air blowing air-flow identical or approaching with the Laser Transmission direction, has realized distributed coax or paraxial auxiliary air blowing function.
The beneficial effects of the utility model are: the utility model is owing to adopted scanning galvanometer, dynamic focusing mirror or the scanning focused mirror of flat field, air blowing mask plate, positive pressure gas body cavity and/or negative-pressure gas chamber, solve laser galvanometer scanning and focused on a difficult problem that adds the auxiliary air blowing of big width laser processing in man-hour, it is the solution of the distributed auxiliary air blowing of the laser processing mode that focuses on of a kind of laser galvanometer scanning, be very big technological progress, be suitable for industrial production in enormous quantities.Benefit of the present utility model has but is not limited to the following aspects:
The first, for the metal surface of the easy oxidation of cutting, oxygen blast air lift height the surface to the absorptivity of laser.Oxygen blast gas in the LASER HEATING process, the rapid oxidation in metal surface, reflectivity reduces rapidly, has reduced the reflection loss of surface to laser energy, makes vibration mirror scanning Laser Processing efficient be improved.
The second, in LASER HEATING and oxygen blast process, oxidation reaction has been emitted a large amount of heats, has replenished the heat energy that needs in the cutting, helps to improve vibration mirror scanning Laser Processing efficient.
Three, rationally adjust the gas pressure difference of described air blowing mask plate both sides, the thickness of appropriate design air blowing mask plate and the cross sectional shape of windowing, structure and the distribution in appropriate design negative-pressure gas chamber, can blow and eliminate plasma cloud open to the shielding action of laser, greatly improve the crudy of vibration mirror scanning Laser Processing, enlarge vibration mirror scanning processing object scope.
Four, in laser cutting process, appropriate design air blowing parameter comprises the thickness of pressure differential, air blowing mask plate and the cross sectional shape etc. of windowing, and can blow cutting slit slag off, improves the vibration mirror scanning cutting speed.
Five, in the laser cutting process; because the air blowing direction is identical with the Laser Transmission direction or approaching; can dispel the dust that when cutting, upwards sprays; thereby protected the not contaminated and damage of the scanning focused lens of flat field, it is the ubiquitous problem of present laser industry that the scanning focused lens of flat field often are lasered dust pollution.
The 6th, for the vibration mirror scanning laser weld, this programme can provide the gaseous environment of excellent protective atmosphere protection solder joint.
The 7th, the technical program can fine solution Laser Processing dust collection problem when having solved the coaxial or paraxial air blowing problem of distributed large format.
Description of drawings
Fig. 1 is the apparatus structure schematic diagram of the utility model embodiment 1 silicon chip laser drill;
Fig. 2 is the apparatus structure schematic diagram of the utility model embodiment 2 LTCC laser drill;
Fig. 3 is the apparatus structure schematic diagram of the utility model embodiment 3 copper sheet laser drill;
Fig. 4 divides the apparatus structure schematic diagram of plate for the utility model embodiment 4 printed circuit board (PCB) laser;
Fig. 5 is that Fig. 4 is in the top plan view at A-A place.
In the accompanying drawing, the list of parts of each label representative is as follows:
1, incident beam, the electric machine main shaft of 2, second motor, 3, second speculum, 4, scanning light beam, 5, folded light beam, 6, first speculum, 8, the electric machine main shaft of first motor, 9, scanning galvanometer shell, 10, the scanning focused mirror of flat field, 11, the positive pressure gas body cavity, 12, first light beam, 13, negative-pressure gas chamber, 14, the air blowing mask plate, 15, workpiece to be processed, 16, dynamic focusing mirror, 17, optical flat seal glass, 18, focused beam, 19, workbench, 20, vibration mirror scanning focus module, 21, clear glass, 22, the air-flow window, 23, groove.
The specific embodiment
Below in conjunction with accompanying drawing principle of the present utility model and feature are described, institute gives an actual example and only is used for explaining the utility model, is not for limiting scope of the present utility model.
Embodiment 1:
Fig. 1 is the apparatus structure schematic diagram of silicon chip laser drill, and as shown in Figure 1: the device of silicon chip laser drill comprises vibration mirror scanning focus module 20, positive pressure gas body cavity 11, air blowing mask plate 14, negative-pressure gas chamber 13.Described vibration mirror scanning focus module 20 comprises scanning galvanometer peace field scan focus lamp 10.
Described scanning galvanometer comprises first speculum 6, first motor 7 that is used for driving first speculum 6, second speculum 3, is used for driving second motor and the scanning galvanometer shell 9 of second speculum 3, described scanning galvanometer shell is provided with the laser entrance port towards a side of described incoming laser beam, and described first speculum 6, first motor 7, second speculum 3 and second motor are positioned at described scanning galvanometer shell 9.First speculum 6 of described scanning galvanometer is installed on the electric machine main shaft 8 of first motor 7 of scanning galvanometer.Second speculum 3 of described scanning galvanometer is installed on the electric machine main shaft 2 of second motor of scanning galvanometer.
The scanning focused mirror of described flat field is types such as the scanning focused mirror of common flat field or telecentric scanning focus lamp.In the present embodiment, scanning flat field focus lamp adopts telecentric scanning focus lamp 10, and the focal length of telecentric scanning focus lamp 10 is 256 millimeters, 156 millimeters * 156 millimeters of flat field focusing ranges.
Described positive pressure gas body cavity 11 adopts the production of 1 millimeter thickness corrosion resistant plate, its laser incident end is fixed on the telecentric scanning flat field focus lamp 10, and air-tightness connects, the air inlet (not showing among the figure) of 4 symmetries is installed in its side, be used for replenishing of barotropic gas, keep positive pressure gas body cavity internal gas normal pressure.The scanning focused mirror 10 of described flat field is installed on the described scanning galvanometer shell 9.
Described air blowing mask plate 14, adopt 1 millimeter corrosion resistant plate production, according to the graph outline of required processing on the silicon chip 15, dig out identical shaped air-flow window 22 at described air blowing mask plate 14 in advance, enlarge 1 millimeter than the overall size that needs on the workpiece to process on air-flow window 22 sizes.Air blowing mask plate 14 is installed on the laser emitting end of described positive pressure gas body cavity 11, and parallel with workpiece to be processed 15 as far as possible, and should be about 6 millimeters with workpiece to be processed 15 spacings by air blowing mask plate 14.Described workpiece to be processed 15 is 200 micron thickness polysilicon silicon chips.
1 millimeter corrosion resistant plate production is adopted in described negative-pressure gas chamber 13, is installed on lower end, described positive pressure gas body cavity side, and its air inlet extends to described air blowing mask plate below; The bleeding point (not showing among the figure) of 4 symmetries is installed in side, described negative-pressure gas chamber, to keep negative-pressure gas chamber internal gas negative pressure.
Light path flow process in the apparatus structure of whole silicon wafer laser drill is as follows: incident beam 1 obtains folded light beam 5 through 6 reflections of scanning galvanometer first speculum, described folded light beam 5 obtains scanning light beam 4 through second reflecting optics, 3 reflections of scanning galvanometer, described scanning light beam 4 focuses on through telecentric scanning focus lamp 10, obtain focused first light beam 12, after described first light beam 12 passes air blowing mask plate 14, directly act on workpiece to be processed 15.
Described incident beam 1 is 15 millimeters incident beam-expanding collimation light beam for diameter.
The relevant parameter of described first light beam 12 is as follows: optical maser wavelength 532 nanometers, beam quality factor is less than 1.2, and hot spot circularity is greater than 90 percent, 30 watts of mean powers, single mode gauss laser (laterally field intensity is Gaussian distribution), pulse recurrence frequency 100 KHzs.
In the case of necessary, can open several and the registration holes of workpiece to be processed location above the described air blowing mask plate 14, whether accurate by the spatial relation of machine vision positioning confirmation air blowing mask plate 14 and silicon chip.
The benefit of this processing mode of present embodiment is, solved the auxiliary air blowing difficult problem of vibration mirror scanning focus module, significantly improved quality and the efficient of Laser Processing.
Present embodiment can also be applied to boring and the scribing of pottery, diamond, monocrystalline silicon silicon chip, the boring of LTCC and scribing, the Laser Processing of flexible PCB vibration mirror scanning, the vibration mirror scanning of printed circuit board (PCB) hardboard divides plate processing, the vibration mirror scanning boring of Copper Foil and other sheet metals and cutting etc., its application is very extensive, and effect improves very obvious.
The range of work of described telecentric scanning focus lamp is still limited after all, if the processing breadth is big not enough, in fact can also place described silicon chip to be processed on the mobile platform, can realize large-scale Laser Processing like this, Laser Processing sweep limits area generally surpasses 200 millimeters * 200 millimeters the large tracts of land that is commonly referred in the practice.
Embodiment 2:
Fig. 2 is the apparatus structure schematic diagram of LTCC laser drill, and as shown in Figure 2: the device of LTCC laser drill comprises vibration mirror scanning focus module 20, positive pressure gas body cavity 11, air blowing mask plate 14 and negative-pressure gas chamber 13.Described vibration mirror scanning focus module 20 comprises dynamic focusing mirror 16 and scanning galvanometer.
Described dynamic focusing mirror 16, wavelength 1064 nanometers, 500 millimeters of center focal lengths, 50 microns of focal beam spots.
Described scanning galvanometer comprises first speculum 6, first motor 7 that is used for driving first speculum 6, second speculum 3, is used for driving second motor and the scanning galvanometer shell 9 of second speculum 3.Described first speculum 6, first motor 7, second speculum 3 and second motor are positioned at described scanning galvanometer shell 9.Described scanning galvanometer shell is provided with the laser entrance port towards a side of described incoming laser beam.First speculum 6 of described scanning galvanometer is installed on the electric machine main shaft 8 of first motor 7 of scanning galvanometer.Second reflecting optics 3 of described scanning galvanometer is installed on the electric machine main shaft 2 of second motor of scanning galvanometer, and the electric machine main shaft 8 of described first motor is vertical mutually with the electric machine main shaft of described second motor 2.The laser entrance port of described scanning galvanometer shell 9 is equipped with optical flat seal glass 17, and this optical flat seal glass 17 is tightly connected with scanning galvanometer shell 9.Described optical flat seal glass 17 is optical plate glass, and 1064 nano wave length anti-reflection films are plated on the two sides, 10 millimeters of thickness.
Described positive pressure gas body cavity 11 adopts the production of 1 millimeter thickness corrosion resistant plate, its laser entrance face is fixed on the described scanning galvanometer shell 9, and air-tightness connects, the air inlet (not showing among the figure) of four symmetries is installed in its side, be used for replenishing of barotropic gas, keep positive pressure gas body cavity internal gas normal pressure.
Described air blowing mask plate 14, adopt 1 millimeter corrosion resistant plate production, prior graph outline according to required processing on the described LTCC, dig out identical shaped air-flow window 22 at described air blowing mask plate 14, enlarge 0.5 millimeter than the overall size that needs on the LTCC to process on the overall size.The air blowing mask plate is installed on the laser emitting end of described positive pressure gas body cavity 11, and parallel with workpiece to be processed 15 as far as possible, and should air blowing mask plate 14 be 6 millimeter with described workpiece to be processed 15 spacings.Described workpiece to be processed 15 is 200 micron thickness LTCCs, and dimensions is 150 millimeters * 150 millimeters.
1 millimeter corrosion resistant plate production is adopted in described negative-pressure gas chamber 13, is installed on lower end, described positive pressure gas body cavity 11 side, and its air inlet extends to the laser-emitting face below of described air blowing mask plate 14; The bleeding point (not showing among the figure) of 4 symmetries is installed in 13 sides, described negative-pressure gas chamber, to keep negative-pressure gas chamber 13 internal gas negative pressure.
Light path flow process in this apparatus structure is as follows: incident beam 1 enters dynamic focusing mirror 16, focuses on through dynamic focusing mirror 16 and obtains focused beam 18, and described focused beam 18 sees through optical flat seal glass 17, is transmitted on the described scanning galvanometer.Described focused beam 18 obtains folded light beam 5 through 6 reflections of described scanning galvanometer first speculum, described folded light beam 5 obtains first light beam 4 through second reflecting optics, 3 reflections of scanning galvanometer, described first light beam 4 is through the accurate location of scanning galvanometer, after passing air blowing mask plate 14, directly act on to be processed LTCC.
1 millimeter of the diameter of described initial incident beam 1 light beam, wavelength 1064 nanometers, all laser beam place air refractions calculate by 1.
The relevant parameter of described focused beam 18 is as follows: optical maser wavelength 1064 nanometers, beam quality factor are less than 1.2, and hot spot circularity is greater than 90 percent, 20 watts of mean powers, single mode gauss laser (laterally field intensity is Gaussian distribution), pulse recurrence frequency 100 KHzs, 100 nanoseconds of pulse width.
In the case of necessary, can open several and the registration holes of workpiece to be processed location above the described air blowing mask plate 14, whether accurate by the spatial relation of machine vision positioning confirmation air blowing mask plate 14 and LTCC.
The benefit of this processing mode of present embodiment is, solved the auxiliary air blowing difficult problem of vibration mirror scanning focus module, significantly improved quality and the efficient of Laser Processing.
Present embodiment can also be applied to the particularly laser ablation of silver slurry thin-film material of touch-screen conducting film, and its application is very extensive, and effect improves very obvious.
The benefit of this processing mode of present embodiment is, solved vibration mirror scanning focus module large format and focused on a coaxial or paraxial auxiliary air blowing difficult problem that adds man-hour, significantly improved quality and the efficient of Laser Processing.
Embodiment 3:
Fig. 3 is the apparatus structure schematic diagram of copper sheet laser drill, as shown in Figure 3: the device of copper sheet laser drill comprises vibration mirror scanning focus module 20, air blowing mask plate 14 and negative-pressure gas chamber 13, and described vibration mirror scanning focus module 20 comprises scanning galvanometer peace field scan focus lamp 10.
Described scanning galvanometer comprises first speculum 6, first motor 7 that is used for driving first speculum, second speculum 3, is used for driving second motor and the scanning galvanometer shell 9 of second speculum 3, described first speculum 6, first motor 7, second speculum 3 and second motor are positioned at described scanning galvanometer shell 9, described scanning galvanometer shell is provided with the laser entrance port towards a side of described incoming laser beam, and described first electric machine main shaft is vertical mutually with described second electric machine main shaft.First speculum 6 of described scanning galvanometer is installed on the electric machine main shaft 8 of first motor 7 of scanning galvanometer.Second speculum 3 of described scanning galvanometer is installed on the electric machine main shaft 2 of second motor of scanning galvanometer, and the electric machine main shaft 8 of described first motor is vertical mutually with the electric machine main shaft of described second motor 2.
The scanning focused mirror of described flat field is types such as the scanning focused mirror of common flat field or telecentric scanning focus lamp.In the present embodiment, scanning flat field focus lamp 10 adopts the telecentric scanning focus lamp, and the focal length of telecentric scanning focus lamp is 100 millimeters, 50 millimeters * 50 millimeters of flat field focusing ranges.
Described air blowing mask plate 14, adopt 5 millimeters steel disc productions, prior graph outline according to required processing on the described copper sheet, dig out identical shaped air-flow window 22 at described air blowing mask plate 14, air-flow window 22 overall sizes enlarge 1 millimeter than the overall size that needs on the workpiece to be processed 15 to process.Described air blowing mask plate 14 air-tightness are installed on the laser entrance face in described negative-pressure gas chamber 13, and parallel with workpiece to be processed 15 as far as possible, and with workpiece to be processed 15 space lengths 2 millimeter.Workpiece to be processed 15 absorption are fixed on the workbench 19, on the described workbench 19 a lot of small through hole are arranged, be used for the absorption workpiece and take gas and dust in the negative-pressure gas chamber 13 away, it is poor to keep described negative-pressure gas chamber 13 inner and outer air pressures, and negative-pressure gas chamber 13 chamber internal gas pressures are lower than air pressure outside the chamber.
Described workpiece to be processed 15 is 200 micron thickness copper sheets.
Light path flow process in the apparatus structure of whole copper sheet laser drill is as follows: incident beam 1 obtains folded light beam 5 through 6 reflections of scanning galvanometer first speculum, described folded light beam 5 obtains scanning light beam 4 through second speculum, 3 reflections of scanning galvanometer, described scanning light beam 4 focuses on through the telecentric scanning focus lamp, obtain focused first light beam 12, described focused first light beam 12 by air blowing mask plate 14 after, directly act on workpiece to be processed 15.
Described incident beam 1 is 10 millimeters incident beam-expanding collimation light beam for diameter.
The relevant parameter of described first light beam 12 is as follows: optical maser wavelength 532 nanometers, beam quality factor is less than 1.2, and hot spot circularity is greater than 90 percent, 30 watts of mean powers, single mode gauss laser (laterally field intensity is Gaussian distribution), pulse recurrence frequency 100 KHzs.
In the case of necessary, can open several and the registration holes of workpiece to be processed location above the described air blowing mask plate 14, whether accurate by the spatial relation of machine vision positioning confirmation air blowing mask plate 14 and copper sheet.
The benefit of this processing mode of present embodiment is, solved the distributed auxiliary air blowing difficult problem of vibration mirror scanning focus module, significantly improved quality and the efficient of Laser Processing.
Present embodiment can also be applied to boring and the scribing of pottery, diamond, monocrystalline silicon silicon chip, the boring of LTCC and scribing, the Laser Processing of flexible PCB vibration mirror scanning, the vibration mirror scanning of printed circuit board (PCB) hardboard divides plate processing, the vibration mirror scanning boring of Copper Foil and other sheet metals and cutting etc., its application is very extensive, and effect improves very obvious.
In the present embodiment, can also place light beam rotation modulation module or beam wobbling modulation module at scanning galvanometer laser incident end, described light beam rotation modulation module or beam wobbling modulation module are used for the space tracking modulation of laser beam, described scanning galvanometer is responsible for laser beam and is switched between each air-flow window 22 of described air blowing mask plate, can realize more complexity Laser Micro-Machining efficiently like this.
The range of work of described telecentric scanning focus lamp is still limited after all, if the processing breadth is big not enough, in fact can also place described workbench 19 on the mobile platform (figure does not indicate), can realize large-scale Laser Processing like this, Laser Processing sweep limits area generally surpasses 200 millimeters * 200 millimeters the large tracts of land that is commonly referred in the practice.
Embodiment 4:
Fig. 4 divides the apparatus structure schematic diagram of plate for printed circuit board (PCB) laser, and as shown in Figure 4: printed circuit board (PCB) laser divides the device of plate to comprise vibration mirror scanning focusing system 20, air blowing mask plate 14, negative-pressure gas chamber 13.Described vibration mirror scanning focusing system 20 comprises scanning galvanometer peace field scan focus lamp 10.
Described scanning galvanometer comprises first speculum 6, first motor 7 that is used for driving first speculum, second speculum 3, is used for driving second motor and the scanning galvanometer shell 9 of second speculum 3, described first speculum 6, first motor 7, second speculum 3 and second motor are positioned at described scanning galvanometer shell 9, described scanning galvanometer shell is provided with the laser entrance port towards a side of described incoming laser beam, and described first electric machine main shaft is vertical mutually with described second electric machine main shaft.First speculum 6 of described scanning galvanometer is installed on the electric machine main shaft 8 of first motor 7 of scanning galvanometer.Second speculum 3 of described scanning galvanometer is installed on the electric machine main shaft 2 of second motor of scanning galvanometer, and the electric machine main shaft 8 of described first motor is vertical mutually with the electric machine main shaft of described second motor 2.
The scanning focused mirror of described flat field is types such as the scanning focused mirror of common flat field or telecentric scanning focus lamp.In the present embodiment, scanning flat field focus lamp 10 adopts the scanning focused mirror of common flat fields, i.e. f-theta lens, and focal length is 160 millimeters, 80 millimeters * 80 millimeters of flat field focusing ranges.
Described air blowing mask plate 14, adopt the production of 5 millimeters thickness acrylic materials, prior cutting track according to required processing on the described printed circuit board (PCB) 15, dig out the wire air-flow air-flow window 22 identical with cutting track at described air blowing mask plate 14, and wire air-flow window 22 live widths are of a size of 2 millimeters.On the described air blowing mask plate 14 clear glass 21 is installed, described clear glass 21 is positioned at a side at described air blowing mask plate laser entrance face place, and described air blowing mask plate 14 is fixedlyed connected with described clear glass 21.Fig. 5 is that Fig. 4 is in the top plan view at A-A place, as shown in Figure 5, be carved with groove 23 on the described air blowing mask plate laser entrance face, this groove leads to the air blowing clear glass 22 of described air blowing mask plate 14, after air-flow passes through from groove 23 the insides, blow to workpiece to be processed 15 through the air-flow window 22 of described air blowing mask plate 14.
Described workpiece to be processed 15 is 400 micron thickness printed circuit board (PCB)s.
Described clear glass 21, wavelength 532 nanometers, 6 millimeters of thickness, two sides plating green glow anti-reflection film.
Described air blowing mask plate 14 air-tightness are installed on the laser entrance face in described negative-pressure gas chamber 13, and parallel with described printed circuit board (PCB) as far as possible, and with described printed circuit board (PCB) 2 millimeter.Described printed circuit board (PCB) absorption is fixed on the workbench 19, on the described workbench 19 a lot of small through hole are arranged, be used for the absorption workpiece and take gas and dust in the negative-pressure gas chamber 13 away, it is poor to keep described negative-pressure gas chamber 13 inner and outer air pressures, and negative-pressure gas chamber 13 chamber internal gas pressures are lower than air pressure outside the chamber.
Whole printed circuit board (PCB) laser divides the light path flow process in the apparatus structure of plate as follows: incident beam 1 obtains folded light beam 5 through 6 reflections of scanning galvanometer first speculum, described folded light beam 5 obtains scanning light beam 4 through second speculum, 3 reflections of scanning galvanometer, described scanning light beam 4 focuses on through f-theta lens 10, obtain focused first light beam 12, described focused first light beam 12 sees through described clear glass 21, according to certain laser scanning track, by air blowing mask plate 14 and negative-pressure gas chamber 13, directly act on printed circuit board (PCB), finish the Laser Processing action.
Described incident beam 1 is 10 millimeters incident beam-expanding collimation light beam for diameter.
The relevant parameter of described first light beam 12 is as follows: optical maser wavelength 532 nanometers, beam quality factor is less than 1.2, and hot spot circularity is greater than 90 percent, 30 watts of mean powers, single mode gauss laser (laterally field intensity is Gaussian distribution), pulse recurrence frequency 100 KHzs.
In the case of necessary, can open several and the registration holes of workpiece to be processed location above the described air blowing mask plate 14, whether accurate by the spatial relation of machine vision positioning confirmation air blowing mask plate 14 and described printed circuit board (PCB).
The benefit of this processing mode of present embodiment is, solved the distributed auxiliary air blowing difficult problem of vibration mirror scanning focusing system, significantly improved quality and the efficient of Laser Processing.
Present embodiment can also be applied to boring and the scribing of pottery, diamond, monocrystalline silicon silicon chip, solar energy crystal silicon cell edge insulation, the boring of LTCC and scribing, the Laser Processing of flexible PCB vibration mirror scanning, the vibration mirror scanning boring of Copper Foil and other sheet metals and cutting etc., its application is very extensive, and effect improves very obvious.
Above-described embodiment 1, with embodiment 2, embodiment 3 and embodiment 4 be four or three typical application of the present utility model, in fact its principle is used and is not limited to top described situation.
In a word, the utility model proposes a kind of laser scanning manufacturing device, comprise scanning galvanometer, the scanning focused mirror of dynamic focusing mirror or flat field, the air blowing mask plate, positive pressure gas body cavity and/or negative-pressure gas chamber, thickness by default described air blowing mask plate, air-flow window shape etc. constitute distributed inflatable mouth, preset the gas pressure difference of described air blowing mask plate laser entrance face and laser-emitting face simultaneously, formed the gas of the flow direction of or basically identical identical with the Laser Transmission direction that sees through described each air-flow window of air blowing mask plate, having solved vibration mirror scanning focuses on and adds the man-hour big width laser and process the difficult problem of distributed auxiliary air blowing, be the perfect solution that a kind of laser galvanometer scanning focuses on the distributed auxiliary air blowing of processing mode, be very suitable for big batch production.
The above only is preferred embodiment of the present utility model, and is in order to limit the utility model, not all within spirit of the present utility model and principle, any modification of doing, is equal to replacement, improvement etc., all should be included within the protection domain of the present utility model.
Claims (10)
1. laser scanning manufacturing device is characterized in that: comprise vibration mirror scanning focus module, positive pressure gas body cavity and/or negative-pressure gas chamber, air blowing mask plate,
Described positive pressure gas body cavity comprises positive pressure gas body cavity laser incident end and the positive pressure gas body cavity laser emitting end that the position is relative, and described positive pressure gas body cavity is provided with air inlet and exhaust outlet, and described positive pressure gas body cavity air pressure inside is greater than ambient pressure;
Described negative-pressure gas chamber is provided with air inlet and exhaust outlet, and described negative-pressure gas chamber air pressure inside is less than ambient pressure;
Described air blowing mask plate is provided with one or more air-flow windows, and the air-flow window on the described air blowing mask plate is used for air-flow and laser beam passes through;
Described vibration mirror scanning focus module is for the transmission orientation that the light beam that is transmitted on this vibration mirror scanning focus module was focused on and modulated this light beam, be transmitted into first light beam in described positive pressure gas body cavity and/or negative-pressure gas chamber with formation, described positive pressure gas body cavity and/or negative-pressure gas chamber are positioned at a side of described vibration mirror scanning focus module outgoing beam;
Described vibration mirror scanning focus module outgoing beam one side is provided with described positive pressure gas body cavity and described air blowing mask plate, the laser incident end of described positive pressure gas body cavity is positioned at outgoing beam one side of described vibration mirror scanning focus module, the clear glass sealed attachment that described positive pressure gas body cavity laser incident end and laser beam can pass through or with described vibration mirror scanning focus module sealed attachment, described air blowing mask plate is installed in the laser emitting end of described positive pressure gas body cavity;
Perhaps, described vibration mirror scanning focus module outgoing beam one side is provided with described air blowing mask plate and described negative-pressure gas chamber, described negative-pressure gas chamber air inlet is positioned at outgoing beam one side of described vibration mirror scanning focus module, and described air blowing mask plate is installed in described negative-pressure gas chamber air inlet;
Perhaps, described vibration mirror scanning focus module outgoing beam one side is provided with described positive pressure gas body cavity, air blowing mask plate and negative-pressure gas chamber, described positive pressure gas body cavity laser incident end is positioned at a side of described vibration mirror scanning focus module outgoing beam, and described positive pressure gas body cavity laser incident end seals with the clear glass that laser beam can pass through or connects sealing with described vibration mirror scanning focus module; Described positive pressure gas body cavity is communicated with by described air blowing mask plate and described negative-pressure gas chamber, described air blowing mask plate is connected with described negative-pressure gas chamber laser incident end with described positive pressure gas body cavity laser emitting end, and described positive pressure gas body cavity laser emitting end and described negative-pressure gas chamber laser incident end lay respectively at the both sides of described air blowing mask plate.
2. a kind of laser scanning manufacturing device according to claim 1, it is characterized in that: described vibration mirror scanning focus module comprises scanning galvanometer and scanning flat field focus lamp, described scanning galvanometer is used for changing the transmission orientation that is transmitted into the incoming laser beam on it, forming scanning light beam, and this scanning light beam is transmitted into described scanning flat field focus lamp; Described scanning flat field focus lamp, be positioned at a side of described scanning galvanometer output scanning light beam, be used for receiving described scanning light beam, and described scanning light beam assembled, to form focused first light beam, described first light beam is transmitted on the object to be processed by the air-flow window on positive pressure gas body cavity and/or negative-pressure gas chamber and the described air blowing mask plate.
3. a kind of laser scanning manufacturing device according to claim 2, it is characterized in that: described scanning galvanometer comprises first speculum, be used for driving first motor of first speculum, second speculum, be used for driving second motor and the scanning galvanometer shell of second speculum, described scanning galvanometer shell is provided with the laser entrance port towards a side of described incoming laser beam, described first speculum, first motor, second speculum and second motor are positioned at described scanning galvanometer shell, described first speculum is installed on the main shaft of first motor, described second speculum is installed on the main shaft of second motor, described first electric machine main shaft is vertical mutually with described second electric machine main shaft, described first speculum is used for receiving and reflecting the light beam that is transmitted on it, be transmitted to the folded light beam of described second speculum with formation, described second speculum receives and reflects described folded light beam, to form scanning light beam.
4. a kind of laser scanning manufacturing device according to claim 3, it is characterized in that: described scanning galvanometer laser incident end is provided with light beam rotation modulation module or beam wobbling modulation module, described light beam rotation modulation module is used for the laser beam that is transmitted on it is carried out space rotation modulation, and described beam wobbling modulation module is used for the laser beam that is transmitted on it is carried out the space wobble modulations.
5. a kind of laser scanning manufacturing device according to claim 1, it is characterized in that: described vibration mirror scanning focus module comprises dynamic focusing mirror and scanning galvanometer, described dynamic focusing mirror is used for the light beam that is transmitted on it is carried out dynamic focusing, is transmitted into focused beam on the described scanning galvanometer with formation; Described scanning galvanometer, be positioned at a side of described dynamic focusing mirror output focused beam, be used for changing the transmission orientation that is transmitted into the focused beam on it, to form first light beam, described first light beam is transmitted on the object to be processed by the air-flow window on positive pressure gas body cavity and/or negative-pressure gas chamber and the described air blowing mask plate.
6. a kind of laser scanning manufacturing device according to claim 5, it is characterized in that: described scanning galvanometer comprises first speculum, be used for driving first motor of first speculum, second speculum, be used for driving second motor and the scanning galvanometer shell of second speculum, described scanning galvanometer shell is provided with the laser entrance port towards a side of incoming laser beam, described first speculum, first motor, second speculum and second motor are positioned at described scanning galvanometer shell, described first speculum is installed on the main shaft of first motor, described second speculum is installed on the main shaft of second motor, described first electric machine main shaft is vertical mutually with described second electric machine main shaft, described first speculum is used for receiving and reflecting the light beam that is transmitted on it, be transmitted to the folded light beam of described second speculum with formation, described second speculum receives and reflects described folded light beam, to form first light beam.
7. according to the arbitrary described a kind of laser scanning manufacturing device of claim 1 to 6, it is characterized in that: described air blowing mask plate overdraught window be shaped as the shape for the treatment of the Laser Processing pattern, and the size of described air blowing mask plate overdraught window is greater than the described Laser Processing pattern dimension for the treatment of; Perhaps, described air blowing mask plate overdraught window be shaped as shape at workpiece to be processed laser scanning surface track, and the size of described air blowing mask plate overdraught window is greater than described laser scanning track live width.
8. according to the arbitrary described a kind of laser scanning manufacturing device of claim 1 to 6, it is characterized in that: the material of described air blowing mask plate is metal material or ceramic material or transparent optical material.
9. according to the arbitrary described a kind of laser scanning manufacturing device of claim 1 to 6, it is characterized in that: the gas of described positive pressure gas body cavity the inside is air or oxidizing gas or protective gas or reducibility gas or comprises oxidizing gas and the mist of protective gas or comprise reducibility gas and the mist of oxidizing gas or fog.
10. according to the arbitrary described a kind of laser scanning manufacturing device of claim 1 to 6, it is characterized in that: the gas of described negative-pressure gas chamber the inside is air or oxidizing gas or protective gas or reducibility gas or comprises oxidizing gas and the mist of protective gas or comprise reducibility gas and the mist of oxidizing gas or fog.
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| CN 201320122899 CN203227924U (en) | 2013-03-18 | 2013-03-18 | Laser scanning machining device |
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| CN 201320122899 CN203227924U (en) | 2013-03-18 | 2013-03-18 | Laser scanning machining device |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103182603A (en) * | 2013-03-18 | 2013-07-03 | 张立国 | Laser scanning processing device |
| CN105974581A (en) * | 2016-07-15 | 2016-09-28 | 北京金海创科技发展有限公司 | High-speed dynamic focusing laser vibrating mirror module group |
| CN106163731A (en) * | 2014-03-31 | 2016-11-23 | 林肯环球股份有限公司 | There is laser shroud and the using method thereof of the shuttle machine structure being reciprocally moveable |
| CN110270757A (en) * | 2019-06-03 | 2019-09-24 | 天津科技大学 | A kind of method and device of laser transmission porous anodic aluminium oxide preparation nanostructure |
| CN112817147A (en) * | 2021-01-04 | 2021-05-18 | 上海镭天激光设备有限公司 | Octahedral prism device for high-speed one-dimensional high-power laser scanning |
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2013
- 2013-03-18 CN CN 201320122899 patent/CN203227924U/en not_active Expired - Lifetime
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103182603A (en) * | 2013-03-18 | 2013-07-03 | 张立国 | Laser scanning processing device |
| CN103182603B (en) * | 2013-03-18 | 2015-11-04 | 张立国 | A kind of laser scanning manufacturing device |
| CN106163731A (en) * | 2014-03-31 | 2016-11-23 | 林肯环球股份有限公司 | There is laser shroud and the using method thereof of the shuttle machine structure being reciprocally moveable |
| CN106163731B (en) * | 2014-03-31 | 2018-05-29 | 林肯环球股份有限公司 | Laser shroud and its application method with the shuttle machine structure being reciprocally moveable |
| CN105974581A (en) * | 2016-07-15 | 2016-09-28 | 北京金海创科技发展有限公司 | High-speed dynamic focusing laser vibrating mirror module group |
| CN110270757A (en) * | 2019-06-03 | 2019-09-24 | 天津科技大学 | A kind of method and device of laser transmission porous anodic aluminium oxide preparation nanostructure |
| CN112817147A (en) * | 2021-01-04 | 2021-05-18 | 上海镭天激光设备有限公司 | Octahedral prism device for high-speed one-dimensional high-power laser scanning |
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