CN110265313A - Energy integration welds chopper - Google Patents
Energy integration welds chopper Download PDFInfo
- Publication number
- CN110265313A CN110265313A CN201910676255.2A CN201910676255A CN110265313A CN 110265313 A CN110265313 A CN 110265313A CN 201910676255 A CN201910676255 A CN 201910676255A CN 110265313 A CN110265313 A CN 110265313A
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- Prior art keywords
- plane
- chamfer
- chopper
- energy
- inner chamfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 230000010354 integration Effects 0.000 title claims abstract description 26
- 101100063504 Mus musculus Dlx2 gene Proteins 0.000 claims description 3
- 101150041890 TES1 gene Proteins 0.000 claims description 3
- 238000003466 welding Methods 0.000 abstract description 39
- 241000251468 Actinopterygii Species 0.000 abstract description 11
- 238000000034 method Methods 0.000 abstract description 7
- 239000004065 semiconductor Substances 0.000 abstract description 3
- 208000037656 Respiratory Sounds Diseases 0.000 abstract description 2
- 230000000694 effects Effects 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000000354 decomposition reaction Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000012356 Product development Methods 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012858 packaging process Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000010979 ruby Substances 0.000 description 1
- 229910001750 ruby Inorganic materials 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/75—Apparatus for connecting with bump connectors or layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/78—Apparatus for connecting with wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/7525—Means for applying energy, e.g. heating means
- H01L2224/753—Means for applying energy, e.g. heating means by means of pressure
- H01L2224/75343—Means for applying energy, e.g. heating means by means of pressure by ultrasonic vibrations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/7825—Means for applying energy, e.g. heating means
- H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
- H01L2224/78343—Means for applying energy, e.g. heating means by means of pressure by ultrasonic vibrations
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Wire Bonding (AREA)
Abstract
The invention discloses a kind of energy integrations to weld chopper, belongs to semiconductor packages ultrasonic welding technique field, including cutter hub, and cutter hub has bonding wire through-hole;The head of the cutter hub includes inner chamfer, the first plane and outer chamfer, and the first plane is set to the intersection of inner chamfer and outer chamfer, and the central axes of the first plane and cutter hub are perpendicular.The balanced energy accumulating occurred in intersection, avoids energy accumulating herein and excessive to the energy at place to be welded, therefore crater or crackle occurs in circuit below pad when avoiding ball bonding, the probability being broken at fish tail and line tail when effectively reducing fish tail welding.
Description
Technical field
The invention belongs to semiconductor packages ultrasonic welding technique fields, and in particular to a kind of energy integration welding chopper.
Background technique
Currently, the head surface of chopper employed in semiconductor packaging process is usually all by inner chamfer and outer chamfer structure
At inner chamfer and outer chamfer directly connect to forming tip, for example the gold ball bonding capillary that notification number is CN202259205U is split
Knife, notification number are the blade structure etc. of CN107275242A.But in welding process, welding energy is concentrated under ultrasonic wave effect
The tip of chopper generates energy accumulating;Chopper tip is excessive to soldered ball and energy below chip bonding pad when ball bonding, is easy to cause weldering
Circuit below disk cracks and crater, in turn results in electrical measurement failure or reliability failures after chip welding;Fish tail welding
When chopper tip energy accumulating, energy is excessive at bonding wire with substrate, causes to be easy to cause in welding at fish tail and line tail and send out
The case where raw fracture.
Summary of the invention
The purpose of the present invention is to provide a kind of energy integrations to weld chopper, to solve existing chopper tip energy accumulating
The bring above problem.
Purpose to realize the present invention, the technical solution of use are as follows: energy integration welds chopper, including cutter hub, cutter hub have
Bonding wire through-hole;The head of the cutter hub includes inner chamfer, the first plane and outer chamfer, and the first plane is set to inner chamfer and falls outside
The central axes of the intersection at angle, the first plane and cutter hub are perpendicular.
As the further optinal plan, the diameter of the cutter head body is T, and the diameter of inner chamfer is CD, described
The width TES1 < (T-CD)/2 μm of first plane.
It further include at least one second plane set on inner chamfer as the further optinal plan.
As the further optinal plan, inner chamfer is divided at least two sections by second plane;At least two sections
Inner chamfer respectively is the first inner chamfer from the first plane to bonding wire through-hole inner surface direction, in the second inner chamfer ... n-th
Chamfering.
As the further optinal plan, the angle of spot hole CA2 of the inner chamfer of angle of spot hole CA1 >=second of first inner chamfer
>=... the angle of spot hole CAn of the n-th inner chamfer.
As the further optinal plan, angle of spot hole CAn >=45 ° of n-th inner chamfer.
As the further optinal plan, angle of spot hole CA1≤150 ° of the 70 °≤first inner chamfer.
As the further optinal plan, the bonding wire through-hole aperture of the cutter head body is H, and the diameter of inner chamfer is
CD, width C ES≤(CD-H)/2 μm of second plane.
It further include at least one third plane set on outer chamfer, third plane as the further optinal plan
Outer chamfer is divided at least two sections;At least two sections of outer chamfer respectively is first from the first plane to cutter hub outer surface direction
Outer chamfer, second the n-th outer chamfer of outer chamfer ....
As the further optinal plan, the end face angle FA of at least two sections of the outer chamfer is all larger than 0 ° and is less than
45°。
As the further optinal plan, the bonding wire through-hole aperture of the cutter head body is H, the diameter of cutter head body
For T, the diameter of inner chamfer is CD, the width TES2 < (T-CD)/2 μm of the third plane.
The beneficial effects of the present invention are: the energy of ultrasonic wave passes through first in the intersection of inner chamfer and outer chamfer when welding
Plane is dispersed, the balanced energy accumulating occurred in intersection, avoids energy accumulating herein and the energy mistake to place to be welded
Greatly, there is crater or crackle in circuit below pad when therefore avoiding ball bonding, fish tail and line tail when effectively reducing fish tail welding
Locate the probability being broken.Energy transmission is more efficient, also extends the service life of chopper.
Detailed description of the invention
It, below will be to attached drawing needed in embodiment description in order to illustrate more clearly of technical solution of the present invention
It is briefly described, it should be appreciated that drawings in the following description are some embodiments of the invention, common for this field
For technical staff, without creative efforts, it is also possible to obtain other drawings based on these drawings.
Fig. 1 is the cross-sectional view at the cutter head of the energy integration welding chopper of embodiment 1 provided by the invention;
Fig. 2 is the cross-sectional view at the cutter head of the energy integration welding chopper of embodiment 2 provided by the invention;
Fig. 3 is the cross-sectional view at the cutter head of the energy integration welding chopper of embodiment 3 provided by the invention;
Fig. 4 is the cross-sectional view at the cutter head of the energy integration welding chopper of embodiment 4 provided by the invention;
Appended drawing reference: 1. cutter hubs;2. bonding wire through-hole;3. inner chamfer;4. the first plane;5. outer chamfer;6. circular arc chamfering;
7. the second plane;8. third plane.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
The embodiment of the present invention, those of ordinary skill in the art's obtained every other reality without making creative work
Example is applied, protection scope of the present invention is belonged to.It is understood that attached drawing be provided solely for reference and description use, not be used to pair
The present invention limits.The connection relationship shown in attached drawing is intended merely to facilitate clear description, does not limit connection type.
It should be noted that it can be directly to when a component is considered as " connection " another component
Another component, or may be simultaneously present component placed in the middle.Unless otherwise defined, all technology and science used herein
Term has the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs.Herein in specification of the invention
Used in term be only for the purpose of describing specific embodiments and be not intended to limit the present invention.
With reference to the accompanying drawing and specific embodiment the present invention is further elaborated.
Fig. 1 to Fig. 4 shows energy integration welding chopper provided in an embodiment of the present invention, including cutter hub, cutter hub have weldering
Line three-way hole;The head of the cutter hub includes inner chamfer, the first plane and outer chamfer, and the first plane is set to inner chamfer and outer chamfer
Intersection, the central axes of the first plane and cutter hub are perpendicular.First plane is balanced to be gone out in inner chamfer and outer chamfer intersection
Existing energy accumulating reintegrates the energy of chopper, avoids the influence that energy accumulating is caused at traditional chopper tip.
Embodiment 1
Energy integration shown in Fig. 1 welds chopper, including cutter hub 1, and cutter hub 1 has bonding wire through-hole 2;The head of cutter hub 1 includes
Inner chamfer 3, the first plane 4 and outer chamfer 5, the first plane 4 are set to the intersection of inner chamfer 3 and outer chamfer 5, the first plane 4
It is perpendicular with the central axes of cutter hub 1.Chopper vertical state uses, and the first plane 4 is the plane of horizontal direction.
2 aperture of bonding wire through-hole on 1 head of cutter hub is H, and the diameter on 1 head of cutter hub is T, and the diameter of inner chamfer 3 is CD.It is preferred that
, the width TES1 < (T-CD)/2 μm of the first plane 4, the width of the first plane 4 is its size in cutter hub 1 radially.
The material of chopper can be ceramics or ruby or sapphire.
Outer chamfer 5 and the settable circular arc chamfering 6 of 1 outer wall intersection of cutter hub.
Embodiment 2
Energy integration welds chopper on the basis of embodiment 1, further includes at least one second plane set on inner chamfer 3
7。
Traditional chopper is other than the energy accumulating problem at tip, and chopper inner chamfer is an integral ramp, in supersonic welding
A decomposition is had when inner chamfer energy acts on soldered ball inclined-plane when connecing, and leads to energy loss.And such chopper design method
In the welding parameter range shorter that product development stage can debug, it is affected by board otherness.
The present embodiment at least one increased second plane 7 at inner chamfer 3, in conjunction with 5 intersection of inner chamfer 3 and outer chamfer
The first plane 4, power dissipation at traditional chopper tip is integrated into this corresponding welding surface at two, not only balanced energy is poly-
Collection, also reduces energy loss, to can reach the identical welding effect of existing design using lesser welding energy.In ball
The second plane 7 and the first plane 4 can be distributed to the energy accumulating point of traditional chopper under the two structures when welding, chopper
Energy reintegrate, the identical welding effect of traditional chopper can be reached using lesser energy, and then increase ball-bonding process
Parameter area.
Second plane 7 can be parallel with the first plane 4.The width C ES of second plane 7≤(CD-H)/2 μm, the second plane 7
Width is its size in cutter hub 1 radially.When CES=(CD-H)/2 μm the first plane 4 to 2 inner surface of bonding wire through-hole it
Between be the second plane 7.
It is at least two sections that inner chamfer 3 can be divided to by the second plane 7;At least two sections of inner chamfer 3 leads to from the first plane 4 to bonding wire
2 inner surface direction of hole respectively is the first inner chamfer, second the n-th inner chamfer of inner chamfer ....I.e. in the first plane 4
Chamfering 3 is the first inner chamfer, and the inner chamfer 3 close to 2 inner surface of bonding wire through-hole is the n-th inner chamfer.Fig. 2 is with second plane 7
Inner chamfer 3 is divided to be two sections for, more can also be set.
The size of inner chamfer is preferably arranged as follows: the angle of spot hole CA2 of the inner chamfer of angle of spot hole CA1 >=second of the first inner chamfer
>=... the angle of spot hole CAn of the n-th inner chamfer.
Angle of spot hole CAn >=45 ° of n-th inner chamfer, CA2 >=45 ° in Fig. 2.Angle of spot hole CA1≤150 ° of 70 °≤first inner chamfer.
Embodiment 3
Energy integration welds chopper on the basis of embodiment 1, further includes at least one third plane set on outer chamfer 5
8, it is at least two sections that outer chamfer 5 is divided to by third plane 8;At least two sections of outer chamfer 5 is from the first plane 4 to 1 outer surface side of cutter hub
To respectively being the first outer chamfer, second the n-th outer chamfer of outer chamfer ....It is first close to the outer chamfer 5 of the first plane 4
Outer chamfer, the outer chamfer 5 close to 1 outer surface of cutter hub are the n-th outer chamfer.Outer chamfer 5 is divided to a third plane 8 for two by Fig. 3
For section, more can also be set.
Existing chopper reduces chopper tip and welding substrate contact area, shortens the chopper longevity
Life, and it is unfavorable for the transmission of energy at the big fillet on existing chopper outer chamfer, so that being needed when fish tail welds bigger
Energy reaches welding requirements, so that further chopper service life is shortened in aggravation.Specifically, fish tail welding performance is mainly reflected in
Corresponding position is welded in the lower section of outer chamfer, but due to the outer chamfer inclined-plane or rounded slope of existing chopper can to welding Energy Decomposition,
Lead to welding energy deficiency here, welding quality is influenced, so that high welding energy is needed to can be only achieved welding requirements.So
High-energy bring result is exactly chopper serious wear, shortens the service life.
The present embodiment increases at least one third plane 8 at outer chamfer 5, is equivalent to ladder platform, in fish tail welding,
Third plane 8 can effectively transmit welding energy at the welding surface of lower section, incorporate the energy transmission of chopper, use lesser energy
The identical welding effect of traditional chopper can be reached, to increase fish tail welding condition range.So that total energy transmits
More efficiently, the first plane 4 at lesser energy and chopper tip makes the service life of chopper extend 2~4 times, finally to give birth to
It produces from this decline.
Design parameter is preferably arranged as follows: the end face angle FA of at least two sections of outer chamfer 5 is all larger than 0 ° and less than 45 °.Fig. 3
Middle FA1 and FA2 is all larger than 0 ° and less than 45 °.
Third plane 8 can be parallel with the first plane 4.The width TES2 < (T-CD)/2 μm of third plane 8, the width are
Its size in cutter hub 1 radially.
Embodiment 4
Energy integration welds chopper on the basis of embodiment 2, further includes at least one third plane set on outer chamfer 5
8, it is at least two sections that outer chamfer 5 is divided to by third plane 8;At least two sections of outer chamfer 5 is from the first plane 4 to 1 outer surface side of cutter hub
To respectively being the first outer chamfer, second the n-th outer chamfer of outer chamfer ....It is first close to the outer chamfer 5 of the first plane 4
Outer chamfer, the outer chamfer 5 close to 1 outer surface of cutter hub are the n-th outer chamfer.
More can also be arranged so that outer chamfer 5 is divided to for two sections by a third plane 8 as an example in Fig. 4.Design parameter is preferred
Following setting: the end face angle FA of at least two sections of outer chamfer 5 is all larger than 0 ° and less than 45 °.In Fig. 3 FA1 and FA2 be all larger than 0 ° and
Less than 45 °.Third plane 8 can be parallel with the first plane 4.The width TES2 < (T-CD)/2 μm of third plane 8, the width are
Its size in cutter hub 1 radially.
In fish tail weldering, traditional chopper inner chamfer energy has a decomposition when acting on online position, leads to energy at online tail
Amount loss, not prison welding, there is a situation where short-term tails.And in the present embodiment, the design of the second plane 7 of inner chamfer 3 can enable
Amount assembles online tail weld and solves the problems, such as short-term tail to reinforce welding of the chopper to line tail.In addition, in the present embodiment
The combination of first plane 4, the second plane 7 and third plane 8 designs, and also realizes and compares compared with existing design and use is reached compared with low energy
To the purpose of same weld, to reduce the abrasion at broadsword v.broadsword tip, the new design in longer chopper service life is finally realized.
This energy integration welding chopper can effectively expand the ball-bonding process ability of chip, solve ball bonding and do not glue, fish tail weldering
The problem of what is connect does not glue, short-term tail reduce board alarm to improve board alarm time interval, and improves 2~4 times and split
The knife service life, so that production efficiency improves, cost decline.
The present invention is not limited to above-mentioned optional embodiment, anyone can show that other are various under the inspiration of the present invention
The product of form, however, make any variation in its shape or structure, it is all to fall into the claims in the present invention confining spectrum
Technical solution, be within the scope of the present invention.
Claims (10)
1. a kind of energy integration welds chopper, including cutter hub, cutter hub has bonding wire through-hole;It is characterized in that, the head of the cutter hub
Portion includes inner chamfer, the first plane and outer chamfer, and the first plane is set to the intersection of inner chamfer and outer chamfer, the first plane with
The central axes of cutter hub are perpendicular.
2. energy integration according to claim 1 welds chopper, which is characterized in that the diameter of the cutter head body is T, interior
The diameter of chamfering is CD, the width TES1 < (T-CD)/2 μm of first plane.
3. energy integration according to claim 1 welds chopper, which is characterized in that further include set at least the one of inner chamfer
A second plane.
4. energy integration according to claim 3 welds chopper, which is characterized in that inner chamfer is divided by second plane
At least two sections;At least two sections of inner chamfer respectively be from the first plane to bonding wire through-hole inner surface direction the first inner chamfer,
Second the n-th inner chamfer of inner chamfer ....
5. energy integration according to claim 4 welds chopper, which is characterized in that the angle of spot hole CA1 of first inner chamfer
The angle of spot hole CA2 of >=the second inner chamfer >=... the angle of spot hole CAn of the n-th inner chamfer.
6. energy integration according to claim 4 or 5 welds chopper, which is characterized in that the angle of spot hole of the 70 °≤first inner chamfer
CA1≤150°。
7. energy integration according to claim 3 welds chopper, which is characterized in that the bonding wire through-hole hole of the cutter head body
Diameter is H, and the diameter of inner chamfer is CD, width C ES≤(CD-H)/2 μm of second plane.
8. energy integration described according to claim 1 or 3 or 4 welds chopper, which is characterized in that further include being set to outer chamfer
Outer chamfer is divided at least two sections by least one third plane, third plane;At least two sections of outer chamfer is from the first plane to knife
External surface direction respectively is the first outer chamfer, second the n-th outer chamfer of outer chamfer ....
9. energy integration according to claim 8 welds chopper, which is characterized in that the end of at least two sections of the outer chamfer
Face angle FA is all larger than 0 ° and less than 45 °.
10. energy integration according to claim 8 welds chopper, which is characterized in that the bonding wire through-hole of the cutter head body
Aperture is H, and the diameter of cutter head body is T, and the diameter of inner chamfer is CD, width TES2 < (T-CD)/2 μ of the third plane
m。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201910676255.2A CN110265313A (en) | 2019-07-25 | 2019-07-25 | Energy integration welds chopper |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910676255.2A CN110265313A (en) | 2019-07-25 | 2019-07-25 | Energy integration welds chopper |
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Publication Number | Publication Date |
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CN110265313A true CN110265313A (en) | 2019-09-20 |
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ID=67928202
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CN201910676255.2A Pending CN110265313A (en) | 2019-07-25 | 2019-07-25 | Energy integration welds chopper |
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Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201226353Y (en) * | 2008-07-08 | 2009-04-22 | 科威(肇庆)半导体有限公司 | Ultrasonic bonding cleaver for increasing gold-remaining angle |
CN202259205U (en) * | 2011-08-31 | 2012-05-30 | 北京时代民芯科技有限公司 | Gold ball bonding capillary chopper |
CN103311136A (en) * | 2012-03-06 | 2013-09-18 | 深圳赛意法微电子有限公司 | Copper wire welding device and copper wire welding realization method based on BGA package |
CN205723468U (en) * | 2016-05-10 | 2016-11-23 | 海太半导体(无锡)有限公司 | A kind of chopper |
CN107275243A (en) * | 2017-06-06 | 2017-10-20 | 潮州三环(集团)股份有限公司 | Weld chopper and preparation method thereof |
CN107710394A (en) * | 2015-07-03 | 2018-02-16 | Toto株式会社 | Weld chopper |
-
2019
- 2019-07-25 CN CN201910676255.2A patent/CN110265313A/en active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201226353Y (en) * | 2008-07-08 | 2009-04-22 | 科威(肇庆)半导体有限公司 | Ultrasonic bonding cleaver for increasing gold-remaining angle |
CN202259205U (en) * | 2011-08-31 | 2012-05-30 | 北京时代民芯科技有限公司 | Gold ball bonding capillary chopper |
CN103311136A (en) * | 2012-03-06 | 2013-09-18 | 深圳赛意法微电子有限公司 | Copper wire welding device and copper wire welding realization method based on BGA package |
CN107710394A (en) * | 2015-07-03 | 2018-02-16 | Toto株式会社 | Weld chopper |
CN205723468U (en) * | 2016-05-10 | 2016-11-23 | 海太半导体(无锡)有限公司 | A kind of chopper |
CN107275243A (en) * | 2017-06-06 | 2017-10-20 | 潮州三环(集团)股份有限公司 | Weld chopper and preparation method thereof |
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