CN110247295A - A kind of heat sink structure and slab laser reducing slab laser wavefront distortion - Google Patents

A kind of heat sink structure and slab laser reducing slab laser wavefront distortion Download PDF

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Publication number
CN110247295A
CN110247295A CN201811393390.8A CN201811393390A CN110247295A CN 110247295 A CN110247295 A CN 110247295A CN 201811393390 A CN201811393390 A CN 201811393390A CN 110247295 A CN110247295 A CN 110247295A
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CN
China
Prior art keywords
heat sink
laser
microchannel
sink structure
wavefront distortion
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Pending
Application number
CN201811393390.8A
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Chinese (zh)
Inventor
陈中正
徐一汀
孟帅
薄勇
彭钦军
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Technical Institute of Physics and Chemistry of CAS
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Technical Institute of Physics and Chemistry of CAS
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Priority to CN201811393390.8A priority Critical patent/CN110247295A/en
Publication of CN110247295A publication Critical patent/CN110247295A/en
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H01S3/0405—Conductive cooling, e.g. by heat sinks or thermo-electric elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H01S3/042—Arrangements for thermal management for solid state lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • H01S3/094038—End pumping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/16—Solid materials

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

The invention discloses a kind of heat sink structures for reducing slab laser wavefront distortion, including heat sink body, are internally provided with a plurality of microchannel in the heat sink body；The arrangement mode of a plurality of microchannel is corresponding with laser lath temperature gradient distribution.The angle of divergence is big on output laser width direction caused by the existing heat sink cooling scheme of structure solution, and thermal lensing effect is obvious, and output facula has the wavefront distortion of defocus, and focal beam spot disperse, far-field energy concentration degree are low, the poor problem of beam quality.The structure low order aberration and has both feature compact-sized, that integrated level is high in can reducing；The wavefront distortion of output laser facula width direction can be reduced with effective compensation crystal lath the phenomenon that there are larger thermal gradients for width direction；Quality for outputting laser beam can be effectively promoted, realizes high power, the output of high light beam quality laser.

Description

A kind of heat sink structure and slab laser reducing slab laser wavefront distortion
Technical field
The present invention relates to slab laser building block technique field more particularly to a kind of heat for reducing slab laser wavefront distortion Sink structure and slab laser.
Background technique
Semiconductor pumped all solid state laser is due to having many advantages, such as that compact-sized, high-efficient, good beam quality has Broad application prospect, is the emphasis of current laser field research, and the laser output for obtaining high power and high light beam quality is even more The target that scientific research personnel pursues always.Currently, the main bottleneck that solid state laser develops to higher power and more high light beam quality It is how a large amount of unwanted heats generated inside laser material to be transferred to outside, the presence of waste heat will lead to thermal lens, hot depolarization Etc. effects, generate thermal stress and phenomena such as thermal deformation, cause the decline of output power and beam quality, resulted even in when serious The fracture of laser material.Traditional rod-shaped laser material be used for superpower laser when thermal lensing effect it is serious, beam quality compared with Difference, and the solid laser material of lath-shaped is moved back using the heat that zigzag optic path is theoretically expected to solve solid state laser Partially, the fuel factors problem such as hot focus, but experimental result is far from reaching expected.Wavefront of its output beam with defocus is abnormal Become, width of sheet direction is different from thickness direction beam divergence angle, causes focal beam spot disperse, far-field energy concentration degree drop It is low, so as to cause beam quality decline.
Since size is small, cooling uniformly thermal gradient is smaller on the thickness direction of lath, and pass through zigzag optic path So that all light is all passed through identical temperature gradient between upper and lower surface, is subjected to identical thermotropic phase delay, substantially reduces The thermotropic wavefront distortion of thickness direction.It could be theoretically argued that lath uniformity of temperature profile in the direction of the width, without thermal gradient, but thing Real really not so, uneven since there are crystal dopings, pump light distribution is uneven, and inhomogeneous cooling is even, the absorption etc. of stray light More serious thermal gradient distribution is presented in width direction for many reasons, therefore width direction wavefront distortion is big, width of sheet direction It is different from thickness direction beam divergence angle, focal beam spot disperse, the reduction of far-field energy concentration degree are caused, beam quality is poor, Especially in high power pump, when high power laser light exports, the above problem is more prominent.
In current solid laser field, heat transfer area is big, radiates because having for the conduction type of cooling with micro-channel heat sink Uniformly the features such as, is widely used in the cooling heat dissipation of slab laser module.Existing micro-channel heat sink be all fluid is passed through into Mouth, which enters diversion channel, to be completed to shunt, and even into micro channel array convection current heat loss through conduction, is flowed out via collecting tray, is reached heat dissipation Purpose.Although current heat sink structure design improves the size, shape, arrangement of microchannel, do not account in width direction Heat distribution is uneven, thermal gradient large effect, thus causes the angle of divergence on output laser width direction big, and thermal lensing effect is bright Aobvious, output facula has the wavefront distortion of defocus, and focal beam spot disperse, far-field energy concentration degree are low, and beam quality is poor.Also have Scientific research personnel reduces the thermal gradient of width direction in such a way that upper and lower side heats or freezes, but the operation of this method is tired Difficulty, effect are also unsatisfactory.Currently, Laser beam quality control can also be corrected by adaptive optics AO distorting lens, but in height Laser beam-wave front-distortion amount reaches dozens of wavelength when power, and laser beam quality will after the correction stroke of distorting lens reaches saturation Sharply deteriorate, and AO system complex.
Summary of the invention
(1) goal of the invention
The object of the present invention is to provide it is a kind of reduce slab laser wavefront distortion heat sink structure and slab laser with It solves the above problems.
(2) technical solution
To solve the above problems, the first aspect of the present invention provide it is a kind of reduce slab laser wavefront distortion it is heat sink Structure, including heat sink body are internally provided with a plurality of microchannel in the heat sink body；The arrangement mode of a plurality of microchannel It is corresponding with gain media temperature gradient distribution.
Further, wherein the depth of a plurality of microchannel is proportional to temperature difference at corresponding lath position.
Further, wherein a plurality of microchannel is arranged in array, the depth of the microchannel is outside gradually from centre Become larger.
Further, wherein a plurality of microchannel is arranged in array, the depth of the microchannel is outside gradually from centre Reduce
According to another aspect of the present invention, a kind of single side pump laser is provided, is provided with as described in above scheme Heat sink structure.
According to another aspect of the invention, a kind of end-pumped laser is provided, the heat as described in above scheme is provided with Sink structure.
According to another aspect of the invention, a kind of disk laser is provided, the heat sink knot as described in above scheme is provided with Structure.
According to another aspect of the invention, a kind of slab laser is provided, is provided with described in gain media and above scheme Heat sink structure, the gain media is welded on the side of the heat sink structure.
Further, the gain media is crystal, ceramics or glass.
Further, the shape of the solid laser material is strip type or disc shaped.
The heat sink structure of reduction slab laser wavefront distortion of the invention, including heat sink body, in the heat sink body It is internally provided with a plurality of microchannel；The arrangement mode of a plurality of microchannel is corresponding with laser lath temperature gradient distribution. The angle of divergence is big on output laser width direction caused by the existing heat sink cooling scheme of structure solution, and thermal lensing effect is obvious, defeated Glossing up has the wavefront distortion of defocus, and focal beam spot disperse, far-field energy concentration degree are low, the poor problem of beam quality.
(3) beneficial effect
Above-mentioned technical proposal of the invention has following beneficial technical effect:
(1) low order aberration and feature compact-sized, that integrated level is high is had both in can reducing；
(2) output laser light can be reduced with effective compensation crystal lath the phenomenon that there are larger thermal gradients for width direction The wavefront distortion in spot width direction；
(3) quality for outputting laser beam can be effectively promoted, realizes high power, the output of high light beam quality laser.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of first embodiment heat sink structure according to the present invention；
Fig. 2 is the partial schematic diagram of the single side pump laser of an optional embodiment according to the present invention；
Fig. 3 is the partial schematic diagram of the end-pumped laser of an optional embodiment according to the present invention；
Fig. 4 is the partial schematic diagram of the disk laser of an optional embodiment according to the present invention.
Appended drawing reference:
1: heat sink body；11: microchannel；2: gain media；21: welding surface.
Specific embodiment
In order to make the objectives, technical solutions and advantages of the present invention clearer, With reference to embodiment and join According to attached drawing, the present invention is described in more detail.It should be understood that these descriptions are merely illustrative, and it is not intended to limit this hair Bright range.In addition, in the following description, descriptions of well-known structures and technologies are omitted, to avoid this is unnecessarily obscured The concept of invention.
Schematic diagram of a layer structure according to an embodiment of the present invention is shown in the attached drawings.These figures are not drawn to scale , wherein for purposes of clarity, some details are magnified, and some details may be omitted.It is shown in the drawings various Region, the shape of layer and relative size, positional relationship between them are merely exemplary, in practice may be public due to manufacture Difference or technical restriction and be deviated, and those skilled in the art may be additionally designed as required has not similar shape Shape, size, the regions/layers of relative position.
Obviously, described embodiments are some of the embodiments of the present invention, instead of all the embodiments.Based on the present invention In embodiment, every other implementation obtained by those of ordinary skill in the art without making creative efforts Example, shall fall within the protection scope of the present invention.
As long as in addition, the non-structure each other of technical characteristic involved in invention described below different embodiments It can be combined with each other at conflict.
Fig. 1 is the structural schematic diagram of first embodiment heat sink structure according to the present invention.
As shown in Figure 1, first embodiment of the invention provides a kind of heat sink structure for reducing slab laser wavefront distortion, packet Heat sink body 1 is included, is internally provided with a plurality of microchannel 11 in the heat sink body 1；The arrangement mode of a plurality of microchannel 11 It is corresponding with 2 temperature gradient distribution of gain media.Microchannel is coolant liquid diversion trench.11 array distribution of microchannel can be The arc-shaped arrangement of solid laser material surface distance, that is, heat sink convection current everywhere are arrived in arc-shaped arrangement, i.e., cooling microchannel 11 The arc-shaped arrangement of exchange capability of heat；The arc can be the either parabola shaped arrangement of arc-shaped, ellipse arc；11 gusts of microchannel Column depth includes that intermediate depth two sides are shallow, intermediate shallow two sides are deep, gradient depth or other irregular depth are arranged.The structure can drop Low middle low order aberration and have both feature compact-sized, that integrated level is high；It can be deposited with effective compensation crystal lath in width direction The larger thermal gradient the phenomenon that, the wavefront distortion of output laser facula width direction is reduced；Output laser light can effectively be promoted Beam quality realizes high power, the output of high light beam quality laser.
Optionally, wherein the depth of a plurality of microchannel 11 is proportional to temperature difference at corresponding lath position.It is i.e. micro- Channel unit depth H is proportional to temperature difference Δ T at its corresponding lath position.Coolant liquid is smaller at a distance from panel surface, right It is stronger to flow exchange capability of heat.The structure can be reduced with effective compensation crystal lath the phenomenon that there are larger thermal gradients for width direction Export the wavefront distortion of laser facula width direction.
Optionally, wherein a plurality of microchannel 11 is arranged in array, the length of the microchannel 11 from it is intermediate outward by Gradual change is big.The structure can effectively promote quality for outputting laser beam, realize high power, the output of high light beam quality laser.
Optionally, wherein a plurality of microchannel 11 is arranged in array, the length of the microchannel 11 from it is intermediate outward by Gradual change is big.
Fig. 2 is the partial schematic diagram of the single side pump laser of an optional embodiment according to the present invention.
As shown in Fig. 2, the other side of the embodiment of the present invention, provides a kind of single side pump laser, it is provided with as above State heat sink structure described in scheme.
Fig. 3 is the partial schematic diagram of the end-pumped laser of an optional embodiment according to the present invention.
As shown in figure 3, the another aspect of the embodiment of the present invention, provides a kind of end-pumped laser, it is provided with as above State heat sink structure described in scheme.
Fig. 4 is the partial schematic diagram of the disk laser of an optional embodiment according to the present invention
As shown in figure 4, the another aspect of the embodiment of the present invention, provides a kind of disk laser, it is provided with such as above-mentioned side Heat sink structure described in case.
Another aspect according to an embodiment of the present invention provides a kind of slab laser, is provided with gain media 2 and above-mentioned Heat sink structure described in scheme, the gain media 2 are welded on the side of the heat sink structure.
Optionally, the gain media 2 is crystal, ceramics or glass.
Optionally, the shape of the solid laser material is strip type or disc shaped.
In an alternative embodiment, a kind of arc micro channel array heat sink structure for compensating lath defocus, including heat are provided Heavy ontology 1, gain media 2, welding surface 21 and microchannel 11；The arc-shaped row of 11 distributed architecture of microchannel of the heat sink body 1 Cloth；The welding surface 21 welds gain media；The microchannel is arranged in array, and the array distribution structure of the microchannel is in arc Shape arrangement, i.e., cooling microchannel to the arc-shaped arrangement of solid laser material surface distance, that is, heat sink heat convection energy everywhere The arc-shaped arrangement of power；
In an alternative embodiment, as shown in Fig. 2, the heat sink structure of design is pumped for single side, the cooling lath of single side Laser module, heat sink microchannel arrangement design suitable irregular arrangement according to analysis mode calculating in advance, The temperature gradient of width direction is reduced, the beam quality of output laser is improved.
As shown in figure 3, the heat sink structure of design is used for end pumping, the lath of two-sided cooling in an alternative embodiment Laser module, heat sink microchannel arrangement design suitable irregular arrangement according to analysis mode calculating in advance, The temperature gradient of width direction is reduced, the beam quality of output laser is improved.
As shown in figure 4, the heat sink structure of design is used for disc laser module in an alternative embodiment, heat sink is micro- logical Road arrangement designs suitable irregular arrangement according to analysis mode calculating in advance, reduces the temperature ladder of disc radial Degree improves the beam quality of output laser.
The present invention is directed to protect a kind of heat sink structure for reducing slab laser wavefront distortion, including heat sink body 1, in institute It states heat sink body 1 and is internally provided with a plurality of microchannel 11；The arrangement mode and laser lath temperature of a plurality of microchannel 11 Gradient distribution is corresponding.The angle of divergence is big on output laser width direction caused by the existing heat sink cooling scheme of structure solution, heat Lens effect is obvious, and output facula has the wavefront distortion of defocus, and focal beam spot disperse, far-field energy concentration degree are low, light beam matter Measure poor problem.The structure low order aberration and has both feature compact-sized, that integrated level is high in can reducing；It can effectively mend Crystal lath is repaid the phenomenon that there are larger thermal gradients for width direction, reduces the wavefront distortion of output laser facula width direction； Quality for outputting laser beam can be effectively promoted, realizes high power, the output of high light beam quality laser.
It should be understood that above-mentioned specific embodiment of the invention is used only for exemplary illustration or explains of the invention Principle, but not to limit the present invention.Therefore, that is done without departing from the spirit and scope of the present invention is any Modification, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.In addition, appended claims purport of the present invention Covering the whole variations fallen into attached claim scope and boundary or this range and the equivalent form on boundary and is repairing Change example.

Claims (10)

1. a kind of heat sink structure for reducing slab laser wavefront distortion, which is characterized in that including heat sink body (1), described Heat sink body (1) is internally provided with a plurality of microchannel (11)；
The arrangement mode of a plurality of microchannel (11) is corresponding with gain media (2) temperature gradient distribution.
2. heat sink structure according to claim 1, wherein the depth of a plurality of microchannel (11) is proportional to correspondence Temperature difference at lath position.
3. heat sink structure according to claim 1, wherein a plurality of microchannel (11) is arranged in array, the microchannel (11) depth becomes larger outward from centre.
4. heat sink structure according to claim 1, wherein a plurality of microchannel (11) is arranged in array, the microchannel (11) depth is gradually reduced outward from centre.
5. a kind of single side pump laser, which is characterized in that be provided with heat sink structure as described in any one of claims 1-3.
6. a kind of end-pumped laser, which is characterized in that be provided with heat sink structure as described in any one of claims 1-3.
7. a kind of disk laser, which is characterized in that be provided with heat sink structure as described in any one of claims 1-3.
8. a kind of slab laser, which is characterized in that be provided with gain media (2) and as described in any one of claims 1-3 Heat sink structure；
The gain media (2) is welded on the heat sink structure side.
9. slab laser according to claim 8, which is characterized in that the gain media (2) is crystal, ceramics or glass Glass.
10. slab laser according to claim 9, which is characterized in that the shape of the solid laser material is lath Type or disc shaped.
CN201811393390.8A 2018-11-21 2018-11-21 A kind of heat sink structure and slab laser reducing slab laser wavefront distortion Pending CN110247295A (en)

Priority Applications (1)

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CN201811393390.8A CN110247295A (en) 2018-11-21 2018-11-21 A kind of heat sink structure and slab laser reducing slab laser wavefront distortion

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201811393390.8A CN110247295A (en) 2018-11-21 2018-11-21 A kind of heat sink structure and slab laser reducing slab laser wavefront distortion

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101859738A (en) * 2009-04-07 2010-10-13 康舒科技股份有限公司 Large-area liquid-cooled heat dissipation device
CN104426048A (en) * 2013-08-29 2015-03-18 大族激光科技产业集团股份有限公司 Heat sink and laser device with heat sink

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101859738A (en) * 2009-04-07 2010-10-13 康舒科技股份有限公司 Large-area liquid-cooled heat dissipation device
CN104426048A (en) * 2013-08-29 2015-03-18 大族激光科技产业集团股份有限公司 Heat sink and laser device with heat sink

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