CN104852257A - Large-diameter laser liquid cooling mirror structure - Google Patents
Large-diameter laser liquid cooling mirror structure Download PDFInfo
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- CN104852257A CN104852257A CN201510253077.4A CN201510253077A CN104852257A CN 104852257 A CN104852257 A CN 104852257A CN 201510253077 A CN201510253077 A CN 201510253077A CN 104852257 A CN104852257 A CN 104852257A
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Abstract
The invention discloses a large-diameter laser liquid cooling mirror structure, which comprises a reflection panel, a distribution plate and a back plate, wherein the back face of the distribution plate is provided with water inlet first-level flow channels and water outlet first-level flow channels; the front face of the distribution plate is provided with water inlet second-level flow channels and water outlet second-level flow channels distributed parallelly; a plurality of water inlet holes and water outlet holes are arranged in the back plate; and the front face of the reflection panel is a reflection face, and the back face is provided with third-level flow channels. By adopting a multilevel cooling flow channel structure based on interdigitated flow channels, cooling liquid with a large flow can be provided for transferring reflection face sedimentary hot under small water through pressure, pressure and flow of the cooling liquid inside each micro flow channel can be distributed comparatively uniformly, uniform cooling is realized on the reflection face, and over large thermal distortion of the large-diameter endoscope can be restrained. Adjacent second-level flow channels are communicated with the water inlet first-level flow channels and the water outlet first-level flow channels respectively and stacked with the third-level flow channels vertically, liquid does not need to flow through the whole section of the thin third-level flow channel, and flow resistance is greatly reduced.
Description
Technical field
The invention belongs to laser optics field, be specifically related to a kind of liquid cools mirror structure, particularly relate to a kind of large-caliber laser liquid cooling mirror configuration, be mainly used in high power density and the high high-energy laser optical resonator of surface figure accuracy requirement and optical train.
Background technology
Laser optics resonator mirror can absorb part energy when accepting laser irradiation, mirror temperature is caused to raise, due to thermal diffusion effect, minute surface temperature rise is uneven, thermal deformation is also uneven, and then cause mirror shape deterioration in accuracy, cause laser wave front to distort, worsen output beam quality and stability.Therefore, reduce the thermal distoftion of reflecting surface and improve the key that surface figure accuracy is the development of high-power laser resonance cavity mirror.Current solution is mainly divided into three aspects: select the basis material that thermal coefficient of expansion is low, and make reflecting surface under absorption equal heat quantity, thermal deformation is minimum; Plate high-reflecting film on the reflecting surface, improve reflectivity, reduce minute surface to the absorptivity of laser energy; Adopt Active Cooling, the heat of transfer reflecting surface deposition, thus reduce its temperature rise.Selection due to Mirror blank materials is limited to the physical property of material, optical manufacturing performance and mechanical performance, only adopts the single method optimizing basis material can not meet the particular/special requirement of superlaser to high light beam quality; The reflectivity improving reflecting surface is the most direct effective means, but current reflectance has reached the technological limits of 99.99%, is still difficult to meet growing high power requirements.Therefore, the heat of Active Cooling transfer mirror surface deposition is adopted to be considered to the topmost solution solving laser resonant cavity mirror, the particularly thermal deformation of high power resonator mirror at present.
In various cooling technology, liquid cooling technology is generally used because heat exchange efficiency is high.In existing liquid cooling mirror structure, extensively adopt the fine straight channel array of cross section scale between millimeter to hundred micron, micro-flow path array can provide very large surface area/volume ratio, thus strengthens heat transfer effect, reduces the thermal deformation of reflecting surface.Further, straight channel version is simple, is convenient to design and machining.But because straight channel exists heat entance effect, heat exchange coefficient reduces along with the increase of import distance, simultaneously by the impact of flow resistance, fluid existence is lost along stroke pressure.This makes fluid inlet and outlet there is temperature and pressure difference, causes the uneven problem of reflecting surface temperature; In addition, for large-caliber laser speculum, because laser irradiation area becomes large, corresponding water-cooled region area also will become large, so flow channel length is longer, on-way resistance raises, and higher liquid supply pressure must be provided to maintain heat dispersion.In this case, fluid pressure can cause larger surface deformation.
US Patent No. 4314742 proposes a kind of laser mirror with the spiral type coolant flow channel of multilayer aliasing, many spiral flow channels with minute surface center for entrance flows to mirror edges, there is uniform heat transfer characteristic, be suitable for cooling the minute surface of major diameter size; But cooling liquid can run into very large resistance when flowing in the flow passage structure of this mirror body equally.Further, for difficult-to-machine materials such as monocrystalline silicon, the extremely difficult processing of this structure.
Summary of the invention
For foregoing, for solving the deficiency of existing method for designing, the present invention propose to propose a kind of cooling liquid flow resistance little and be easy to process large-caliber laser liquid cooling mirror configuration.
To achieve these goals, the concrete technical scheme of the present invention's employing is as follows:
A method for designing for large-caliber laser liquid cooling mirror configuration, in laser optics resonant cavity and optical train, by arranging some interdigitated runners crossing with it below micro-flow path, to shorten the flow distance of cooling liquid in micro-flow path.Interdigitated runner is also called interdigitation runner or interdigitated runner, is a kind of flow passage structure of comb form.
A kind of large-caliber laser liquid cooling mirror configuration, comprise one piece of Reflector Panel, one piece of distribution plate and one piece of backboard, there are some water inlet one-level runners and water outlet one-level runner in the described distribution plate back side, and there are water inlet secondary runner and the water outlet secondary runner of parallel distribution in distribution plate front; Described backboard there are some inlet openings and apopore; The front of described Reflector Panel is reflecting surface, and the back side is then three grades of runners of width 0.1-2mm spacing 0.1-2mm; Described reflecting surface is working face, Stimulated Light irradiation reflects laser; Some water inlet one-level runners at the described distribution plate back side and water outlet one-level runner directly communicate with the inlet opening on backboard and apopore respectively; Described water inlet secondary runner communicates and to communicate with one-level runner of intaking, and water outlet secondary runner communicates with water outlet one-level runner, and intake secondary runner and water outlet secondary runner are intervally arranged on distribution plate, form interdigital flow passage structure; The front laminating of the back side of Reflector Panel and distribution plate, three grades of flow channel length directions on Reflector Panel and the secondary runner length direction on distribution plate orthogonal.
Three grades of cross section of fluid channel shapes of the present invention comprise rectangle, trapezoidal, triangle or semicircle.
Reflector Panel of the present invention, distribution plate are identical with the face profile shape of backboard, and face profile shape comprises circle or regular polygon.
Compared with prior art, beneficial effect of the present invention is as follows:
1, the present invention is owing to have employed the multistage coolant flow channel structure based on interdigitated runner, can for transfer reflecting surface deposition heat provides the cooling liquid compared with large discharge under less water flowing pressure, make cooling liquid pressure and assignment of traffic in each micro-flow path relatively uniform simultaneously, achieve on the reflecting surface and dispel the heat more uniformly, thus the thermal distoftion that inhibit heavy caliber chamber mirror excessive.
2, the secondary runner that the present invention is adjacent respectively with water inlet one-level runner and water outlet one-level runner communicate, and with three grades of runner vertical stackings.As key structure, the drainage of secondary runner makes cooling liquid flow to apopore from inlet opening, need not flow through whole section of elongated three grades of runners, and need only flow through three grades of runners and be positioned at part between two adjacent secondary streams roads, thus greatly reduces flow resistance.In addition, because I and II cross section of fluid channel size is larger, flow resistance is less in theory, cooling liquid is also less along stroke pressure loss, it is better that this makes each three grades of runners be positioned at the pressure drop consistency of the part between adjacent two secondary runners, thus ensure assigned by flow relatively uniform, finally achieve reflecting surface heat exchange everywhere relatively uniform.
3, the present invention is relative to traditional straight channel liquid cooling mirror, the new configuration of mirror body proposed is due to while reservation micro-flow path height heat exchange efficiency advantage, also possess that flow resistance is little, uniform flow and the feature such as heat exchange consistency is good, be more suitable for large-caliber laser liquid cooling mirror.
4, the present invention passes through hierarchical design, remain straight channel structure, avoid excessive use non-linear structural design, even if adopt the difficult-to-machine materials such as monocrystalline silicon like this, also skive circumference grinding mode can be used to make mirror body, and the advantage such as relative to processing modes such as chemical etching, electric spark, bistrique grindings, this processing mode has that working (machining) efficiency is high, precision is convenient to control and tool wear is little.
5, the present invention is stacked gradually by Reflector Panel, distribution plate and backboard and forms, and the cooling at the Reflector Panel back side flows to directly plays thermolysis, and liquid flow is wherein driven by the adjacent interdigital flowpath pressure difference in distribution plate.By the interdigitated runner of particular design, greatly reduce the flow resistance of cooling liquid, and, by hierarchical design, even if adopt the difficult-to-machine materials such as monocrystalline silicon, traditional grinding technique also can be adopted to carry out the processing of mirror body.
Accompanying drawing explanation
Fig. 1 is STRUCTURE DECOMPOSITION figure of the present invention.
Fig. 2 is a kind of component diagram with the large-caliber laser liquid cooling mirror configuration of interdigitated runner.
Fig. 3 is a kind of flow field structure with the large-caliber laser liquid cooling mirror configuration of interdigitated runner.
Fig. 4 is the Temperature Distribution cloud atlas of example of the present invention when reaching heat balance on reflecting surface.
Fig. 5 be example of the present invention when reaching heat balance on reflecting surface thermal deformation in the x direction with the curve of radial distance change.
Fig. 6 be example of the present invention when reaching heat balance on reflecting surface thermal deformation in y-direction with the curve of radial distance change.
In figure: 1, Reflector Panel, 2, distribution plate, 3, backboard, 11, reflecting surface, 12, three grades of runners, 21, water outlet secondary runner, 22, water inlet secondary runner, 23, water inlet one-level runner, 24, water outlet one-level runner, 31, apopore, 32, inlet opening.
Embodiment
Below in conjunction with accompanying drawing, the present invention is further described.Design in the present invention is on the basis retaining Traditional DC road liquid cooling mirror micro-flow path cooling structure, increasing a kind of interdigitated flow passage structure makes mirror body flow resistance reduce, and improve the uniformity of flow field and heat radiation, avoid whole reflecting surface and excessive thermal distoftion occurs.
As Figure 1-3, reflecting surface 11 and fluid channel heat radiation structure design on same panel, i.e. Reflector Panel 1.Reflector Panel 1 front is coated with high-reflecting film, and as reflecting surface 11, for reflects laser, three grades of runners 12 that the back side is produced are some fine straight channel, for cooling mirror body.The heavy in section runner be parallel to each other is produced in distribution plate 2 front, and as water inlet secondary runner 21 and water outlet secondary runner 22, adjacent water inlet secondary runner 21 and water outlet secondary runner 22 communicate with water inlet one-level runner 23 and water outlet one-level runner 24 respectively.The sectional dimension of water inlet one-level runner 23 and water outlet one-level runner 24 is also very large, communicates respectively with inlet opening 32 and apopore 31, and forms interdigitated structure with water inlet secondary runner 21 and water outlet secondary runner 22.Like this, inlet opening 32 → water inlet one-level runner 23 → water inlet secondary runner 21 → tri-grades of runner 12 → water outlet secondary runner 22 → water outlet one-level runner 24 → apopores 31 just constitute a flow passage of cooling liquid turnover mirror body
Below in conjunction with accompanying drawing and concrete embodiment, the present invention is further detailed explanation.Wherein, mirror body diameter is 300mm, and three grades of cross section of fluid channel are rectangle, and width is 1mm, and the degree of depth is 2mm, and spacing is 2mm, and the water-cooled region that it is formed is sub-circular, and diameter is 200mm; Secondary cross section of fluid channel is rectangle, and width is 4mm, and the degree of depth wherein communicated with water inlet one-level runner 23 is 10mm, and the degree of depth communicated with water outlet one-level runner 24 is 15mm, and spacing is 16mm; One-level cross section of fluid channel is also rectangle, and hydraulic diameter is all greater than three grades of runners more than 10 times; Inlet opening 32 is 1:2 with the diameter ratio of apopore 31, and the Reynolds number of such holes can remain consistent; Mirror body gross thickness after assembling is 52.5mm; Mirror blank materials is monocrystalline silicon; Laser irradiation region is diameter is 200mm, and center is with the border circular areas of minute surface center superposition, and the power density of surface absorption is 5000W/m2, and original ambient temperature is 300K, and general import flow is 62.8mL/s.
As shown in Figure 4, Temperature Distribution cloud atlas when reaching stable state after the large-caliber laser liquid cooling mirror with interdigitated runner proposed for the present embodiment accepts laser irradiation on reflecting surface 11.The result of calculation display utilizing the stream thermosetting coupling analysis based on finite volume method to obtain, reflecting surface maximum temperaturerise is only 1.5K, and the maximum temperature rise difference in irradiation zone is then less than 1K.This shows, new configuration can make reflecting surface 11 realize lower and uniform temperature rise.
Shown in Fig. 5 and Fig. 6, when reaching stable state after the large-caliber laser liquid cooling mirror with interdigitated runner proposed for the present embodiment accepts laser irradiation on reflecting surface 11 thermal deformation in the x and y direction with the change curve of radial distance.The result of calculation display utilizing the stream thermosetting coupling analysis based on finite volume method to obtain, the distortion of reflecting surface maximum heat is about 158nm, the peak-to-valley value (difference of maxima and minima) of thermal deformation in irradiation zone is 104nm, be less than 1/10th oxygen-iodine chemical laser wavelength (1.31 μm), meet the instructions for use of Chemical oxygen-iodine laser.In addition, mirror body is imported and exported pressure drop and is only 80Pa, and relative to the Traditional DC road water-cooled mirror of same yardstick, required hydraulic pressure significantly reduces, negligible on the impact of minute surface distortion.
Claims (3)
1. a large-caliber laser liquid cooling mirror configuration, it is characterized in that: comprise one piece of Reflector Panel (1), one piece of distribution plate (2) and one piece of backboard (3), there are some water inlet one-level runners (23) and water outlet one-level runner (24) in described distribution plate (2) back side, and there are water inlet secondary runner (22) and the water outlet secondary runner (21) of parallel distribution in distribution plate (2) front; Described backboard (3) there are some inlet openings (32) and apopore (31); The front of described Reflector Panel (1) is reflecting surface (11), and the back side is then three grades of runners (12) of width 0.1-2mm spacing 0.1-2mm; Described reflecting surface (11) is working face, Stimulated Light irradiation reflects laser; Some water inlet one-level runners (23) at described distribution plate (2) back side and water outlet one-level runner (24) directly communicate with the inlet opening (32) on backboard (3) and apopore (31) respectively; Described water inlet secondary runner (22) communicates and to communicate with one-level runner (23) of intaking, water outlet secondary runner (21) communicates with water outlet one-level runner (24), and intake secondary runner (22) and water outlet secondary runner (21) are intervally arranged on distribution plate (2), form interdigital flow passage structure; The front laminating of the back side of Reflector Panel (1) and distribution plate (2), three grades of runner (12) length directions on Reflector Panel (1) and the secondary runner length direction on distribution plate (2) orthogonal.
2. a kind of large-caliber laser liquid cooling mirror configuration according to claim 1, is characterized in that: three grades of described runner (12) cross sectional shapes comprise rectangle, trapezoidal, triangle or semicircle.
3. a kind of large-caliber laser liquid cooling mirror configuration according to claim 1, it is characterized in that: described Reflector Panel (1), distribution plate (2) are identical with the face profile shape of backboard (3), and face profile shape comprises circle or regular polygon.
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| CN201510253077.4A CN104852257A (en) | 2015-05-18 | 2015-05-18 | Large-diameter laser liquid cooling mirror structure |
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| CN201510253077.4A CN104852257A (en) | 2015-05-18 | 2015-05-18 | Large-diameter laser liquid cooling mirror structure |
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Cited By (8)
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|---|---|---|---|---|
| CN105322418A (en) * | 2015-11-23 | 2016-02-10 | 华中科技大学 | Non-uniform water cooling grid structure for high-power radio frequency slab CO2 laser electrode |
| CN107831583A (en) * | 2017-12-19 | 2018-03-23 | 中国科学院光电技术研究所 | A kind of high-power laser mirror of preprocessing |
| CN108803216A (en) * | 2017-05-03 | 2018-11-13 | 台达电子工业股份有限公司 | fluorescence colour wheel and projector |
| CN108957767A (en) * | 2018-07-16 | 2018-12-07 | 湖北三江航天红林探控有限公司 | High power light energy choking device |
| CN109013568A (en) * | 2018-08-09 | 2018-12-18 | 武汉武钢华工激光大型装备有限公司 | Laser reflection bronze mirror and laser cleaning head |
| CN109597179A (en) * | 2019-01-02 | 2019-04-09 | 中国科学院上海光学精密机械研究所 | Optical element is internally embedded the fluid for radiating heat channel that declines |
| CN113644401A (en) * | 2021-08-06 | 2021-11-12 | 中国电子科技集团公司第三十八研究所 | Cooling plate for integrated multistage runner of active phased-array antenna |
| CN116699791A (en) * | 2023-08-01 | 2023-09-05 | 长春长光智欧科技有限公司 | Actively-cooled ellipsoidal reflector and manufacturing method thereof |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105322418A (en) * | 2015-11-23 | 2016-02-10 | 华中科技大学 | Non-uniform water cooling grid structure for high-power radio frequency slab CO2 laser electrode |
| CN105322418B (en) * | 2015-11-23 | 2018-04-24 | 华中科技大学 | A kind of high power RF CO slab2The non-homogeneous water cooling network of laser electrode |
| CN108803216A (en) * | 2017-05-03 | 2018-11-13 | 台达电子工业股份有限公司 | fluorescence colour wheel and projector |
| CN108803216B (en) * | 2017-05-03 | 2021-02-12 | 台达电子工业股份有限公司 | Fluorescent color wheel and projector |
| CN107831583A (en) * | 2017-12-19 | 2018-03-23 | 中国科学院光电技术研究所 | A kind of high-power laser mirror of preprocessing |
| CN108957767A (en) * | 2018-07-16 | 2018-12-07 | 湖北三江航天红林探控有限公司 | High power light energy choking device |
| CN109013568A (en) * | 2018-08-09 | 2018-12-18 | 武汉武钢华工激光大型装备有限公司 | Laser reflection bronze mirror and laser cleaning head |
| CN109597179A (en) * | 2019-01-02 | 2019-04-09 | 中国科学院上海光学精密机械研究所 | Optical element is internally embedded the fluid for radiating heat channel that declines |
| CN109597179B (en) * | 2019-01-02 | 2020-11-10 | 中国科学院上海光学精密机械研究所 | Embedded microfluid heat dissipation channel inside optical element |
| CN113644401A (en) * | 2021-08-06 | 2021-11-12 | 中国电子科技集团公司第三十八研究所 | Cooling plate for integrated multistage runner of active phased-array antenna |
| CN113644401B (en) * | 2021-08-06 | 2023-05-09 | 中国电子科技集团公司第三十八研究所 | Cooling plate for integrated multi-stage runner of active phased array antenna |
| CN116699791A (en) * | 2023-08-01 | 2023-09-05 | 长春长光智欧科技有限公司 | Actively-cooled ellipsoidal reflector and manufacturing method thereof |
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Application publication date: 20150819 |