CN217362135U

CN217362135U - Laser mirror cooling structure and laser mirror

Info

Publication number: CN217362135U
Application number: CN202221190931.9U
Authority: CN
Inventors: 李�杰; 王建; 袁果; 郭浩
Original assignee: Beijing U Precision Tech Co Ltd
Current assignee: Beijing U Precision Tech Co Ltd
Priority date: 2022-05-18
Filing date: 2022-05-18
Publication date: 2022-09-02
Anticipated expiration: 2032-05-18

Abstract

The utility model discloses a laser mirror cooling structure and laser mirror, cooling structure include many mutually independent cooling flow channel, and each cooling flow channel sets up respectively at laser mirror central zone and periphery region, and the coolant temperature that central zone's cooling flow channel let in is less than the coolant temperature that the cooling flow channel of periphery region let in. The utility model discloses can make laser reflector temperature can both the temperature tend to unanimity in the place that laser energy density is high and energy density is low, greatly improve temperature uniformity, reflector temperature also tends to unanimity with ambient temperature moreover, and after fixing the restraint to the reflector, the heat altered shape volume also can be very little, reaches the demand of high accuracy annealing process.

Description

Laser mirror cooling structure and laser mirror

Technical Field

The utility model relates to a chip manufacture technical field, specifically speaking relates to a laser mirror cooling structure and laser mirror.

Background

In the field of chip manufacturing, the previous laser annealing process is one of core processes and plays a vital role. In the annealing process, laser is irradiated onto the reflecting mirror through the laser, a stable heat source is formed on the reflecting surface of the reflecting mirror, and the reflecting mirror absorbs heat brought by the laser beam, so that the temperature of the reflecting mirror is increased. In the prior art, a flow channel is arranged in a reflector, the reflector is cooled by water, and a more complicated flow channel adopts a double-layer stacked type, but the flow channel is internally communicated (such as a patent number: CN214477413U), and comprises a water inlet and a water outlet, so that the reflector can be greatly cooled, but the temperature uniformity has obvious defects.

And for the laser showing Gaussian distribution, because the temperature of the inner side of the laser reflector is high, and the temperature of the outer side of the laser reflector is low, and because the double-layer stacked flow channels are stacked together, the temperature of the laser reflector cannot be effectively and uniformly reduced, and further the laser reflector deforms too much.

SUMMERY OF THE UTILITY MODEL

The utility model discloses adopt the parallel mode of double-flow-passage in the speculum inside, do not circulate between two runners, lead to the coolant with different temperatures to the region that is different to energy density is cooled down respectively, makes the temperature of laser speculum tend to unanimously. The utility model discloses the technical scheme who adopts as follows:

a cooling structure of a laser reflector comprises a plurality of mutually independent cooling flow channels, wherein the cooling flow channels are respectively arranged in a central area and an outer peripheral area of the laser reflector, and the temperature of a cooling medium introduced into the cooling flow channels in the central area is lower than that of the cooling medium introduced into the cooling flow channels in the outer peripheral area.

Optionally, the cooling flow passage of the peripheral region extends peripherally around the central region.

Optionally, the laser mirror is made of brass, and the inlet cooling medium temperature of the cooling flow channel in the central region and the cooling flow channel in the peripheral region is lower than 22 ℃.

Optionally, the cooling flow channel of the central region turns in a spiral shape or a U-shape.

Optionally, the cooling flow channel of the peripheral region is square.

Optionally, the central area and the peripheral area are divided in a manner that laser energy is distributed in a gaussian manner, wherein the central area is defined as the area with energy density larger than a set threshold, and the peripheral area is defined as the area with energy density smaller than the set threshold.

Optionally, the laser reflecting surface of the laser mirror is concave, convex or planar.

The utility model also provides a laser reflector adopts above laser reflector cooling structure to be provided with the fix with screw hole on the back of its laser reflection face, and the coolant import and the coolant export that each cooling flow way of central zone, periphery region corresponds respectively.

The utility model discloses can be so that laser reflector temperature can both the temperature tend to unanimity in the place that laser energy density is high and energy density is low, greatly degree ground has improved temperature uniformity, and the reflector temperature also tends to unanimity with ambient temperature in addition, and after fixed restraint to the reflector, the heat altered volume also can be very little, reaches high accuracy annealing process's demand.

Drawings

The above features and technical advantages of the present invention will become more apparent and readily appreciated from the following description of the embodiments thereof taken in conjunction with the accompanying drawings.

Fig. 1 is a schematic flow path diagram showing a cooling structure of a laser mirror according to an embodiment of the present invention;

fig. 2 is a schematic back view of a laser mirror according to an embodiment of the present invention;

fig. 3 is a schematic view showing a reflection surface of a laser mirror according to an embodiment of the present invention.

Detailed Description

The embodiments of the present invention will be described below with reference to the accompanying drawings. Those of ordinary skill in the art will recognize that the described embodiments can be modified in various different ways, or combinations thereof, without departing from the spirit and scope of the present invention. Accordingly, the drawings and description are illustrative in nature and not intended to limit the scope of the claims. Furthermore, in the present description, the drawings are not to scale and like reference numerals refer to like parts.

The laser reflector cooling structure of the embodiment includes a plurality of mutually independent cooling channels, and each cooling channel is respectively arranged in the central area and the peripheral area of the laser reflector. As shown in fig. 1 in the form of two flow channels, a central flow channel 7 is provided in the central region of the laser mirror, and a peripheral flow channel 6 surrounds the periphery of the central region. However, the number of flow channels is not limited in this embodiment, and one flow channel may be provided in each of the central region and the outer peripheral region, or more than one flow channel may be provided in each of the central region and the outer peripheral region.

The central area and the peripheral area are divided in a Gaussian distribution mode of laser energy, and the laser of the Gaussian distribution is characterized in that the energy density of the center of a laser reflection surface is large, and the energy density is gradually reduced along the directions of two sides of the laser reflection surface, so that the temperature of the center of a laser receiving surface of the reflector is high, and the ambient temperature is gradually reduced. According to the Gaussian distribution, the region with the energy density larger than the set threshold is defined as a central region, and the region with the energy density smaller than the set threshold is defined as an outer region.

The temperature of the cooling medium flowing through the cooling channels in the central region is lower than the temperature of the cooling medium flowing through the cooling channels in the outer peripheral region. Because the temperature of the introduced cooling medium is adjusted to be low in the central area with high energy density, more heat can be absorbed, the purpose of greatly reducing the temperature is achieved, and the temperature is within the temperature index range. The peripheral flow channel 6 can be in a shape of a Chinese character 'kou', the periphery of the central area is surrounded by the peripheral flow channel, the temperature of the cooling medium introduced into the peripheral flow channel 6 is higher than that of the cooling medium introduced into the central flow channel 7, and therefore the temperature reduction capability of the peripheral flow channel is weaker than that of the central area. Therefore, the temperature of the whole reflector tends to be consistent between the places with high energy density and the places with low energy density, the thermal deformation is lower, and the high-precision annealing process is facilitated.

Further, the laser mirror is generally made of brass material and is manufactured in an environment of 22 ℃. Since the center flow path 7 is located in the center region where the energy density is highest, the cooling medium temperature T1 of the center flow path 7 is lower than 22 ℃, the mirror center region temperature is controlled to be around 22 ℃, the cooling medium temperature T2 of the outer peripheral flow path 6 is higher than T1 and lower than 22 ℃, and the mirror outer peripheral region temperature is also controlled to be around 22 ℃.

Furthermore, the cooling flow channel in the central area turns in a winding manner in a vortex or U shape.

The utility model also provides a laser reflector, as shown in fig. 2, the reflecting surface 8 of the laser reflector can be a concave surface, a convex surface or a plane. The reflector adopts the laser reflector cooling structure, the back surface of the laser reflecting surface of the reflector is provided with a bolt fixing hole 1, and a cooling medium inlet and a cooling medium outlet which respectively correspond to each cooling flow channel in the central area and the peripheral area. Specifically, the central flow channel 7 has a central flow channel inlet 2 and a central flow channel outlet 3, and the peripheral flow channel 6 has a peripheral flow channel inlet 4 and a peripheral flow channel outlet 5. The fixed holes on the other surface of the reflector are restrained and fixed, and the reflector is placed in an environment with the temperature of 22 ℃ to work, so that the deformation is small, and the requirement of a high-precision annealing process is met.

The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A cooling structure of a laser reflector is characterized by comprising a plurality of mutually independent cooling flow channels, wherein the cooling flow channels are respectively arranged in a central area and an outer peripheral area of the laser reflector, and the temperature of a cooling medium introduced into the cooling flow channels in the central area is lower than that of the cooling medium introduced into the cooling flow channels in the outer peripheral area.

2. The laser mirror cooling structure according to claim 1, wherein the cooling flow passage of the outer peripheral region extends circumferentially around the central region.

3. The cooling structure for laser mirrors according to claim 1, wherein the laser mirrors are made of brass, and the inlet cooling medium temperature of the cooling channels of the central and peripheral regions is lower than 22 ℃.

4. The cooling structure for a laser reflector according to claim 1, wherein the cooling channel of the central region is formed in a spiral or U-shaped zigzag.

5. The laser mirror cooling structure according to claim 2, wherein the cooling flow passage of the outer peripheral region is square-shaped.

6. The cooling structure for a laser mirror according to claim 1, wherein the central region and the peripheral region are divided in a gaussian distribution of laser energy, and the central region having an energy density higher than a predetermined threshold value and the peripheral region having an energy density lower than the predetermined threshold value are provided.

7. The laser mirror cooling structure according to any one of claims 1 to 6, wherein the laser reflecting surface of the laser mirror is a concave surface, a convex surface, or a flat surface.

8. A laser reflector characterized by adopting the cooling structure of a laser reflector according to any one of claims 1 to 7 and being provided with screw fixing holes on the back of the laser reflecting surface thereof and a cooling medium inlet and a cooling medium outlet corresponding to each cooling flow channel of the central region and the peripheral region, respectively.