CN110243394B - Resonant sensor based on intelligent material - Google Patents
Resonant sensor based on intelligent material Download PDFInfo
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- CN110243394B CN110243394B CN201910654627.1A CN201910654627A CN110243394B CN 110243394 B CN110243394 B CN 110243394B CN 201910654627 A CN201910654627 A CN 201910654627A CN 110243394 B CN110243394 B CN 110243394B
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- 239000000463 material Substances 0.000 title claims abstract description 58
- 238000001514 detection method Methods 0.000 claims abstract description 23
- 230000008859 change Effects 0.000 claims abstract description 18
- 238000006073 displacement reaction Methods 0.000 claims abstract description 14
- 230000006698 induction Effects 0.000 claims description 33
- 230000009471 action Effects 0.000 claims description 18
- 230000005284 excitation Effects 0.000 claims description 8
- 239000002520 smart material Substances 0.000 claims description 7
- 230000035945 sensitivity Effects 0.000 abstract description 9
- 239000000126 substance Substances 0.000 description 20
- 239000010408 film Substances 0.000 description 16
- 238000010586 diagram Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 9
- 238000005259 measurement Methods 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 239000000203 mixture Substances 0.000 description 5
- 230000004308 accommodation Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
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- 230000009286 beneficial effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/10—Measuring force or stress, in general by measuring variations of frequency of stressed vibrating elements, e.g. of stressed strings
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/12—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress
- G01L1/125—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress by using magnetostrictive means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/08—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of piezoelectric devices, i.e. electric circuits therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/16—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in the magnetic properties of material resulting from the application of stress
Abstract
The invention provides a resonant sensor based on intelligent materials, which comprises a resonant element (1), an exciting coil (2), a sensitive body (5), a shell (7), a front end cover (8), a rear end cover (10), a space occupying cylinder (11) and a sensing piece (14); the resonant element (1) outputs force and displacement and acts on the sensitive body (5), and the sensitive body (5) outputs a first detection signal; when the sensing piece (14) senses that the natural frequency of the resonant element (1) changes due to the change of the external physical quantity, the force and displacement output by the resonant element (14) change, and the sensitive body outputs a second detection signal, so that detection of different physical quantities is realized. The intelligent sensor provided by the invention creatively uses intelligent materials as the resonant element and the sensitive body, directly converts the measured materials into the output of the sensitive body, and improves the sensitivity, the structural compactness and the sensing precision of the sensor.
Description
Technical Field
The invention relates to the technical field of detection sensors, in particular to a resonant sensor based on intelligent materials.
Background
The resonant sensor measures the resonant frequency, amplitude or phase of the modulated resonant element being measured. Resonant sensors have a large dynamic range, high sensitivity, repeatability and little hysteresis. Precision sensing with resonant sensors is a very potential area.
Patent document CN208902313U discloses a resonant pressure sensor, comprising a silicon wafer, a thin film portion, a resonant portion fixing point, a back hole, a cap, a getter layer, a supporting silicon layer, a buried oxide layer, a top silicon film, a polysilicon film and an oxide layer film deposited alternately; the SOI wafer consists of a top silicon film, a buried oxide layer and a supporting silicon layer; a silicon wafer or an SOI wafer is used as a substrate to form a film part of the resonant pressure sensor, or a film is alternatively deposited on the SOI wafer substrate by a top silicon film, a polysilicon film and an oxide film to form the film part of the resonant pressure sensor. A process for manufacturing a resonant pressure sensor, wherein the resonant portion is realized by depositing an epitaxial/polysilicon layer, and the substrate forms a back hole of the channel-resonant pressure sensor for fluid entering the thin film through an etching process. However, the resonant sensor is complicated to manufacture and high in cost.
Patent document CN105203234B discloses a resonant pressure sensor. The method comprises the following steps: a sensor body, a pressure sensitive film being formed at the bottom of the sensor body; two resonators, namely a first resonator and a second resonator, are formed on the pressure sensitive film, wherein the two resonators have the same natural frequency, the sensitivity of the two resonators to the pressure P acting on the pressure sensitive film is equal, the first resonator is positioned at the central position of the pressure sensitive film, and the second sensitive film is positioned at the edge position of the pressure sensitive film, but the design detection amount is single.
Disclosure of Invention
In view of the drawbacks of the prior art, an object of the present invention is to provide a resonant sensor based on smart materials.
The invention provides a resonance type sensor based on intelligent materials, which comprises a resonance element 1, an exciting coil 2, a sensitive body 5, a shell 7, a front end cover 8, a rear end cover 10, a space occupying cylinder 11 and a sensing piece 14, wherein the front end cover is provided with a plurality of sensors;
the shell 7, the front end cover 8 and the rear end cover 10 enclose an accommodating space 16;
the resonance element 1, the sensitive body 5 and the sensing piece 14 are sequentially arranged in the accommodating space 16, and the sensing piece 14 extends to the outer side of the front end cover 8;
the space cylinder 11 is arranged in the accommodation space 16 and outside the resonator element 1;
the exciting coil 2 is wound around the resonant element 1;
the resonator element 1 and the sensitive body 5 are the same element or different elements.
Preferably, the magnetic conductive rear cover 9, the permanent magnet 13 and the disc spring 15 are included;
the magnetic conductive rear cover 9 is arranged between the resonant element 1 and the rear end cover 10;
the magnetic conductive rear cover 9 is respectively connected with the resonance element 1 and the rear end cover 10 in a contact way;
the permanent magnet 13 is arranged between the resonant element 1 and the occupying cylinder 11 and on the porcelain-guiding rear cover 9;
the disc spring 15 is arranged between the front end cover 8 and the sensing piece 14;
both ends of the disc spring 15 are respectively and tightly connected with the front end cover 8 and the sensing piece 14.
Preferably, further comprising a sensing body 4 and a spherical housing 12;
the sensing body 4 is fixedly connected with the sensing piece 14;
the sensing body 4 and the spherical shell 12 jointly enclose a sphere;
the housing 7, the front cover 8, and the rear cover 10 are provided inside the sensing body 4 and the spherical shell 12.
Preferably, the device also comprises a conducting piece 6, wherein the conducting piece 6 adopts tunnel magnetic resistance material;
the conducting element 6 is arranged between the placeholder cylinder 11 and the sensor element 14 and is in gap connection with the sensitive body 5.
Preferably, further comprising a sensing body 4 and a spherical housing 12;
the sensing body 4 is fixedly connected with the sensing piece 14;
the sensing body 4 and the spherical shell 12 jointly enclose a sphere;
the housing 7, the front cover 8, and the rear cover 10 are provided inside the sensing body 4 and the spherical shell 12.
Preferably, an induction coil 3 is also included.
Preferably, the magnetic conductive back cover 9, the permanent magnet 13 and the disc spring 15 are also included;
the magnetic conductive rear cover 9 is arranged between the resonant element 1 and the rear end cover 10;
the magnetic conductive rear cover 9 is respectively connected with the resonance element 1 and the rear end cover 10 in a contact way;
the permanent magnet 13 is arranged between the resonant element 1 and the occupying cylinder 11 and on the porcelain-guiding rear cover 9;
the disc spring 15 is arranged between the front end cover 8 and the sensing piece 14;
both ends of the disc spring 15 are respectively and tightly connected with the front end cover 8 and the sensing piece 14.
The invention provides a resonance type sensor based on intelligent materials, which comprises a resonance element 1, an induction coil 3, a sensitive body 5, a shell 7, a front end cover 8, a rear end cover 10, a space occupying cylinder 11 and a sensing piece 14, wherein the front end cover is provided with a sensing element;
the shell 7, the front end cover 8 and the rear end cover 10 enclose an accommodating space 16;
the resonance element 1, the sensitive body 5 and the sensing piece 14 are sequentially arranged in the accommodating space 16, and the sensing piece 14 extends to the outer side of the front end cover 8;
the space cylinder 11 is arranged in the accommodation space 16 and outside the resonator element 1;
the induction coil 3 is wound on the sensitive body 5;
the resonator element 1 and the sensitive body 5 are the same element or different elements.
Preferably, the sensor further comprises a sensing body 4, a magnetic conductive rear cover 9 and a spherical shell 12;
the magnetic conductive rear cover 9 is arranged between the resonant element 1 and the rear end cover 10;
the magnetic conductive rear cover 9 is respectively connected with the resonance element 1 and the rear end cover 10 in a contact way;
the sensing body 4 is fixedly connected with the sensing piece 14;
the sensing body 4 and the spherical shell 12 jointly enclose a sphere;
the housing 7, the front cover 8, and the rear cover 10 are provided inside the sensing body 4 and the spherical shell 12.
Preferably, the materials of the resonant element 1 and the sensitive body 5 are any one of the following combinations:
the resonator element 1 is a piezoelectric material and the sensitive body 5 is a piezoelectric material;
the resonant element 1 is a piezoelectric material and the sensitive body 5 is a magnetostrictive material;
the resonant element 1 is a magnetostrictive material and the sensitive body 5 is a piezoelectric material;
the resonator element 1 is a magnetostrictive material and the sensitive body 5 is a magnetostrictive material.
Compared with the prior art, the invention has the following beneficial effects:
1. the measured physical quantity is directly converted into the output of the sensitive body, so that the processing difficulty and the cost are reduced.
2. Various physical quantity measurements can be made.
3. The sensitivity, the structural compactness and the sensing precision of the sensor are improved.
Drawings
Other features, objects and advantages of the present invention will become more apparent upon reading of the detailed description of non-limiting embodiments, given with reference to the accompanying drawings in which:
FIG. 1 is a schematic diagram of an embodiment;
FIG. 2 is a schematic diagram of an embodiment;
FIG. 3 is a schematic diagram of an embodiment;
FIG. 4 is a schematic view of an embodiment
FIG. 5 is a schematic diagram of an embodiment;
FIG. 6 is a schematic diagram of an embodiment;
FIG. 7 is a schematic view of an embodiment
FIG. 8 is a schematic diagram of an embodiment;
FIG. 9 is a schematic diagram of an embodiment;
FIG. 10 is a schematic view of an embodiment
FIG. 11 is a schematic diagram of an embodiment;
FIG. 12 is a schematic view of an embodiment;
FIG. 13 is a schematic view of an embodiment
FIG. 14 is a schematic view of an embodiment;
FIG. 15 is a schematic view of an embodiment;
FIG. 16 is a schematic view of an embodiment
FIG. 17 is a schematic diagram of an embodiment;
fig. 18 is a schematic structural view of an embodiment.
The figure shows:
Detailed Description
The present invention will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the present invention, but are not intended to limit the invention in any way. It should be noted that variations and modifications could be made by those skilled in the art without departing from the inventive concept. These are all within the scope of the present invention.
According to the intelligent material-based resonant sensor provided by the invention, the resonant element 1 outputs force and displacement under the excitation of the same frequency as the natural frequency and acts on the sensitive body 5, and the sensitive body 5 outputs a first detection signal; when the sensing piece 14 senses that the external physical quantity changes to change the natural frequency of the resonant element 1, the force and displacement output by the resonant element 1 change, so that the sensitive body 5 is prompted to output a second detection signal, and the detection of the medium physical quantity is realized by obtaining different detection signals output by the sensitive body 5. Comprises a resonance element 1, an exciting coil 2, a sensitive body 5, a shell 7, a front end cover 8, a rear end cover 10, a occupying cylinder 11 and a sensing piece 14; the shell 7, the front end cover 8 and the rear end cover 10 enclose an accommodating space 16; the resonance element 1, the sensitive body 5 and the sensing piece 14 are sequentially arranged in the accommodating space 16, and the sensing piece 14 extends to the outer side of the front end cover 8; the space cylinder 11 is arranged in the accommodation space 16 and surrounds the outside of the resonator element 1; the excitation coil 2 is arranged on the resonator element 1, and the resonator element 1 and the sensitive body 5 are the same element or different elements. When the exciting coil 2 inputs Ie, the resonant element 1 outputs force and displacement to the sensitive body 5, and the sensitive body 5 outputs a first detection signal; when the sensing piece 14 contacts the measured object, the resonant element 1 is driven to output different forces and displacements to act on the sensitive body 5, and the sensitive body 5 outputs a second detection signal.
Embodiment one:
the resonant element 1 is a resonant element made of magnetostrictive material, the sensitive body 5 is a resonant element made of piezoelectric material, as shown in fig. 1, exciting current Ie is conducted to the exciting coil 2, the resonant element 1 generates high-frequency vibration under the action of the exciting coil 2, the vibration frequency is the natural frequency, and the vibration force acts on the piezoelectric material 5 to generate induced voltage V; when the sensing piece 14 contacts with external media, the sensing piece 14 is acted by the external media to drive the natural frequency of the resonant element 1 to change, at this time, the induced voltage V of the sensitive body 5 changes, and the physical quantity of the media is detected through the obtained different induced voltages V.
Embodiment two:
the second embodiment is a variation of the first embodiment, as shown in fig. 2, and includes a resonant element 1, an exciting coil 2, a sensitive body 5, a housing 7, a front end cover 8, a magnetically conductive rear cover 9, a rear end cover 10, a space occupying cylinder 11, a permanent magnet 13, a sensing member 14, and a disc spring 15, wherein the magnetically conductive rear cover 9 is disposed between the resonant element 1 and the rear end cover 10 and is in contact connection with the resonant element 1 and the rear end cover 10, the permanent magnet 13 is disposed between the resonant element 1 and the space occupying cylinder 11 and is disposed on the magnetically conductive rear cover 9, the disc spring 15 is disposed between the front end cover 8 and the sensing member 14, and two ends of the disc spring 15 are respectively and tightly connected with the front end cover 8 and the sensing member 14; the permanent magnet 13 and the disc spring 15 respectively provide a bias magnetic field and prestress for the resonant element 1, so that output displacement is increased, and when external substances adhere to the resonant element 1 to cause mass change of the sensing element 14 and different adhered substance components, the sensing element 14 drives vibration frequency of the resonant element 1 to change, so that the vibration frequency acts on the sensitive body 5 to change induced voltage V output by the sensitive body 5, and physical quantities such as mass, substance components and the like can be detected.
Embodiment III:
the third embodiment is a variation of the second embodiment, as shown in fig. 3, and includes a resonant element 1, an exciting coil 2, a sensing body 4, a piezoelectric material 5, a housing 7, a front end cover 8, a magnetically conductive rear cover 9, a rear end cover 10, a space cylinder 11, a spherical shell 12, a permanent magnet 13, a sensing element 14, and a disc spring 15, wherein the sensing body 4 is tightly connected with the sensing element 14; the sensing body contacts the detection medium and applies external force to the resonant element 1 through the sensing member 14; the sensing body 4 and the spherical shell 12 jointly enclose a sphere; the housing 7, the front cover 8, and the rear cover 10 are provided inside the sensing body 4 and the spherical shell 12. The permanent magnet 13 and the disc spring 15 respectively provide a bias magnetic field and prestress for the resonant element 1, the output displacement of the resonant element 1 is increased, the shell 7 is spherical, the measurement is convenient to be carried out in building structures such as concrete, and the like, and the physical quantity such as external force and the like received by the sensing body 4 can be detected, so that the detection of the external force is realized through the change of the output induction voltage V of the sensing body 5.
Embodiment four:
the resonant element 1 is a resonant element made of piezoelectric material; as shown in fig. 4, the sensor comprises a resonant element 1, an induction coil 3, a sensitive body 5, a shell 7, a front end cover 8, a rear end cover 10, a occupying cylinder 11 and a sensing piece 14, wherein the resonant element 5 is made of a resonant element made of piezoelectric material, the sensitive body 5 is made of a sensitive body made of magnetostrictive material, the resonant element 1 generates high-frequency vibration under the action of exciting voltage Ve, the vibration frequency is the natural frequency, the vibration acts on the resonant element 1, and the resonant element 1 generates an alternating magnetic field due to the inverse magnetostriction effect to generate an induced voltage V on the induction coil 3; when the sensing piece 14 senses the action of the external physical quantity, the natural frequency of the resonant element changes, so that the induction voltage V of the induction coil 3 changes, and the detection of the physical quantity is realized.
Fifth embodiment:
in a variation of the fourth embodiment, as shown in fig. 5, the sensor includes a resonator element 1, an induction coil 3, a sensitive body 5, a housing 7, a front end cover 8, a magnetically conductive rear cover 9, a rear end cover 10, a space cylinder 11, and a sensing member 14, wherein when the mass of the sensing member 14 is changed due to adhesion of external substances and the adhered substance components are different, physical quantities such as mass, substance components, and the like can be detected. The resonant element 1 generates high-frequency vibration under the action of excitation voltage Ve, the vibration frequency is the natural frequency of the resonant element, the vibration acts on the resonant element 1, and the resonant element 1 generates an alternating magnetic field due to the inverse magnetostriction effect, and induction voltage V is generated on the induction coil 3; when the mass of the sensing piece 14 changes due to the adhesion of external matters and the components of the adhered matters are different, the natural frequency of the resonant element changes, so that the induction voltage V of the induction coil 3 changes, and the detection of the mass and the components of the external matters is realized.
Example six:
another variation of the fourth embodiment, as shown in fig. 6, includes a resonant element 1, an induction coil 3, a sensing body 4, a sensing body 5, a housing 7, a front end cover 8, a magnetically conductive rear cover 9, a rear end cover 10, a space cylinder 11, a spherical housing 12, and a sensing member 14, where the resonant element 1 generates high-frequency vibration under the action of an excitation voltage Ve, the vibration frequency is its natural frequency, the vibration acts on the resonant element 1, and the resonant element 1 generates an alternating magnetic field due to the inverse magnetostriction effect, and an induction voltage V is generated on the induction coil 3; wherein, spherical shell 12 is spherical, is convenient for bury in building structure such as concrete and measure, and when sensing piece 14 through sensing body 4 sensing external force, the induced voltage V that causes on induction coil 3 changes to realize the measurement of physical quantities such as atress in building structure such as concrete.
Embodiment seven:
as shown in fig. 7, the sensor comprises a resonance element 1, an exciting coil 2, a sensitive body 5, a conducting piece 6, a shell 7, a front end cover 8, a rear end cover 10, a space occupying cylinder 11 and a sensing piece 14, wherein the conducting piece 6 is arranged between the space occupying cylinder 11 and the sensing piece 14 and is in clearance connection with the sensitive body 5. The resonance element 1 adopts a resonance element of piezoelectric material, the sensitive body 5 adopts a sensitive body of magnetostrictive material, the conducting piece 6 adopts a conducting piece of tunnel magnetic resistance material, the resonance element 1 generates high-frequency vibration under the action of exciting voltage Ve, the vibration frequency is the natural frequency of the resonance element, the vibration acts on the sensitive body 5, and the sensitive body 5 generates an alternating magnetic field due to the inverse magnetostriction effect, and the conducting piece 6 detects the magnetic field to generate induction voltage V; when the sensing piece 14 senses the action of the external physical quantity, the natural frequency of the resonant element 1 changes, so that the induced voltage V of the conducting piece 6 changes, and the detection of the external physical quantity is realized; the tunnel magneto-resistive material has high magnetic field sensitivity, thereby improving the sensitivity of the sensor detection.
Example eight:
an eighth embodiment is a variation of the seventh embodiment, as shown in fig. 8, and includes, a resonant element 1, an exciting coil 2, a sensitive body 5, a conductive member 6, a housing 7, a front end cover 8, a magnetically conductive rear cover 9, a rear end cover 10, a space cylinder 11 and a sensing member 14, wherein the resonant element 1 is a resonant element made of piezoelectric material, the sensitive body 5 is a sensitive body made of magnetostrictive material, the conductive member 6 is a conductive member made of tunnel magneto-resistive material, the resonant element 1 generates high-frequency vibration under the action of an exciting voltage Ve, the vibration frequency is the natural frequency thereof, the vibration acts on the sensitive body 5, the sensitive body 5 generates an alternating magnetic field due to the inverse magnetostriction effect, and the magnetic field is detected by the conductive member 6 to generate an induced voltage V; when the mass of the sensing element 14 changes due to the adhesion of foreign substances and the components of the adhered substances are different, the conductive element 6 detects the magnetic field to generate different induced voltages V, so that the physical quantities of the mass, the components of the substances and the like can be detected.
Example nine:
an embodiment nine is another variation of embodiment seven, as shown in fig. 9, and includes a resonant element 1, an exciting coil 2, a sensing body 4, a sensing body 5, a conducting member 6, a housing 7, a front end cover 8, a magnetic conductive rear cover 9, a rear end cover 10, a occupying cylinder 11, a spherical shell 12 and a sensing member 14, wherein the resonant element 1 adopts a resonant element of piezoelectric material, the sensing body 5 adopts a sensing body of magnetostrictive material, the conducting member 6 adopts a conducting member of tunnel magneto-resistive material, the resonant element 1 generates high-frequency vibration under the action of exciting voltage Ve, the vibration frequency is the natural frequency of the resonant element, the vibration acts on the sensing body 5, the sensing body 5 generates an alternating magnetic field due to the inverse magnetostriction effect, and the sensing member 6 detects the magnetic field to generate induction voltage V; the spherical shell 12 is spherical, and is convenient to be buried in building structures such as concrete for measurement, when external force acts on the sensing body 4, the sensing body 4 is fixedly connected with the sensing piece 14, the sensing piece 14 causes the natural frequency of the resonant element 1 to change, the alternating magnetic field generated by the sensing body 5 is changed, the induction voltage V of the conducting piece 6 is changed, and therefore the physical quantity such as the received external force is detected.
Example ten:
as shown in fig. 10, the sensor comprises a resonance element 1, an exciting coil 2, an induction coil 3, a sensitive body 5, a shell 7, a front end cover 8, a rear end cover 10, a space occupying cylinder 11 and a sensing piece 14, wherein the resonance element 1 and the sensitive body 5 are integrally connected and all adopt magnetostrictive materials. Exciting current Ie is conducted to the exciting coil 2, the sensitive body 5 generates high-frequency vibration under the action of the exciting coil 2, the vibration frequency is the natural frequency of the sensitive body 5, the sensitive body 5 generates an alternating magnetic field due to the inverse magnetostriction effect, induced voltage V is generated on the induction coil 3, when the sensing piece 14 senses the action of external physical quantity, the natural frequency of the resonant element 1 changes, the induced voltage V of the sensitive body 5 changes, and therefore the detection of the physical quantity is achieved; the advantage of this embodiment is that the resonator element and the sensitive body are the same element, which improves the compactness of the sensor. In a preferred embodiment, as shown in fig. 11, the magnetic resonance device comprises a resonance element 1, an exciting coil 2, an induction coil 3, a sensitive body 5, a shell 7, a front end cover 8, a magnetic conduction rear cover 9, a rear end cover 10, a space occupying cylinder 11, a permanent magnet 13, a sensing piece 14, a disc spring 15, wherein the permanent magnet 13 and the disc spring 15 respectively provide a bias magnetic field and prestress for the resonance element 1, so that the output displacement of the resonance element is increased. When the sensing member 14 senses a mass change of an external adhesion substance, a composition of the adhesion substance, etc., physical quantities of the mass, the composition of the substance, etc., can be detected. In another variation, as shown in fig. 12, the sensor comprises a resonant element 1, an exciting coil 2, an induction coil 3, a sensing body 4, a sensing body 5, a shell 7, a front end cover 8, a magnetic conduction rear cover 9, a rear end cover 10, a space cylinder 11, a spherical shell 12, a permanent magnet 13, a sensing piece 14 and a disc spring 15, wherein the permanent magnet 13 and the disc spring 15 respectively provide a bias magnetic field and prestress for the resonant element 1, increase the output displacement of the resonant element, and the spherical shell 12 is spherical and is convenient to be buried in building structures such as concrete for measurement. The physical quantity such as the external force applied to the sensing element 14 can be detected.
Example eleven:
as shown in fig. 13, the resonant element 1, the exciting coil 2, the sensitive body 5, the conducting piece 6, the shell 7, the front end cover 8, the rear end cover 10, the occupying cylinder 11 and the sensing piece 14 are made of magnetostrictive materials, the resonant element 1 and the sensitive body 5 are integrally connected, exciting current Ie is supplied to the exciting coil 2, and the resonant element 1 generates high-frequency vibration under the action of the exciting coil 2, wherein the vibration frequency is the natural frequency. Due to the inverse magnetostriction effect, the sensitive body 5 generates an alternating magnetic field, which is detected by the conducting element 6, generating an induced voltage V. When the sensing piece 14 senses the action of external physical quantity, the natural frequency of the resonant element 1 changes, so that the induced voltage V of the conducting piece 6 changes, and the detection of the physical quantity is realized; the advantage of this embodiment is that the resonator element 1 and the sensitive body 5 are the same element, which improves the compactness of the sensor, and the conductive member 6 is made of tunnel magneto-resistive material, which has high magnetic field sensitivity, and improves the sensitivity of the sensor. In a variation, as shown in fig. 14, the resonant element 1, the exciting coil 2, the sensitive body 5, the conducting piece 6, the housing 7, the front end cover 8, the magnetic conductive rear cover 9, the rear end cover 10, the occupying cylinder 11, the permanent magnet 13, the sensing piece 14 and the disc spring 15, wherein the resonant element 1 and the sensitive body 5 are the same element and are all made of magnetostrictive materials, the permanent magnet 13 and the disc spring 15 respectively provide a bias magnetic field and prestress for the resonant element 1, increase the output displacement thereof, and supply exciting current Ie to the exciting coil 2, and the resonant element 1 generates high-frequency vibration under the action of the exciting coil 2, and the vibration frequency is the natural frequency thereof. Due to the inverse magnetostriction effect, the sensitive body 5 generates an alternating magnetic field, which is detected by the conducting element 6, generating an induced voltage V. When the sensing piece 14 senses a mass change caused by adhesion of an external substance, a difference in adhered substance composition, a physical quantity of the mass, the substance composition, or the like can be detected. In another variation, as shown in fig. 15, the sensor comprises a resonant element 1, an exciting coil 2, a sensing body 4, a sensitive body 5, a conducting piece 6, a shell 7, a front end cover 8, a magnetic conduction rear cover 9, a rear end cover 10, a space cylinder 11, a spherical shell 12, a permanent magnet 13, a sensing piece 14 and a disc spring 15, wherein the permanent magnet 13 and the disc spring 15 respectively provide a bias magnetic field and prestress for the resonant element, and increase the output displacement of the resonant element 1. The spherical shell 12 is spherical, is convenient to be buried in building structures such as concrete and the like for measurement, and can detect physical quantities such as external force and the like applied to the sensing piece.
Embodiment twelve:
specifically, as shown in fig. 16, the sensor comprises a resonant element 1, a sensitive body 5, a housing 7, a front end cover 8, a rear end cover 10, a occupying cylinder 11 and a sensing element 14, wherein the resonant element 1 and the sensitive body 5 are made of piezoelectric materials, the resonant element 1 generates high-frequency vibration under the action of an excitation voltage Ve, the vibration frequency is the natural frequency of the resonant element, the vibration acts on the sensitive body 5 to generate an induction voltage V, and when the sensing element 14 senses the change of an external physical quantity, such as the action of external force, and for example, the mass of the sensing element is increased due to the adhesion of external substances, and the natural frequency of the sensing element changes, so that the induction voltage V of the sensitive body 5 changes, and further the physical quantity such as force, mass, substance composition and the like is detected. In a variation, as shown in fig. 17, the sensor includes a resonator element 1, a sensitive body 5, a housing 7, a front end cover 8, a magnetically conductive rear cover 9, a rear end cover 10, a space cylinder 11, and a sensor 14, where when the sensor 14 senses that the external substances adhere to cause a mass change, the adhered substance components are different, physical quantities such as mass, substance components, etc. can be detected. In another variation, as shown in fig. 18, the sensor comprises a resonant element 1, a sensing body 4, a sensing body 5, a housing 7, a front end cover 8, a magnetic conductive rear cover 9, a rear end cover 10, a space cylinder 11, a spherical shell 12 and a sensing piece 14, wherein the spherical shell 12 is spherical, is convenient to be buried in a building structure such as concrete for measurement, and can detect physical quantities such as external force applied to the sensing piece 14.
The invention innovatively applies piezoelectric materials, magnetostriction materials, tunnel magnetic resistance materials and the like to the resonant element and the sensitive body, directly converts the measured physical quantity into the output of the sensitive body, reduces the processing difficulty and cost, and can realize the measurement of various physical quantities; meanwhile, the sensitivity, the structural compactness and the sensing precision of the sensor are improved.
In the description of the present application, it should be understood that the terms "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate orientations or positional relationships based on the orientations or positional relationships illustrated in the drawings, merely to facilitate description of the present application and simplify the description, and do not indicate or imply that the devices or elements being referred to must have a specific orientation, be configured and operated in a specific orientation, and are not to be construed as limiting the present application.
The foregoing describes specific embodiments of the present invention. It is to be understood that the invention is not limited to the particular embodiments described above, and that various changes or modifications may be made by those skilled in the art within the scope of the appended claims without affecting the spirit of the invention. The embodiments of the present application and features in the embodiments may be combined with each other arbitrarily without conflict.
Claims (10)
1. The resonant sensor based on the intelligent material is characterized by comprising a resonant element (1), an exciting coil (2), a sensitive body (5), a shell (7), a front end cover (8), a rear end cover (10), a space occupying cylinder (11) and a sensing piece (14);
the shell (7), the front end cover (8) and the rear end cover (10) enclose an accommodating space (16);
the resonance element (1), the sensitive body (5) and the sensing piece (14) are sequentially arranged in the accommodating space (16), and the sensing piece (14) extends to the outer side of the front end cover (8);
the space occupying cylinder (11) is arranged in the accommodating space (16) and is arranged outside the resonant element (1);
the exciting coil (2) is arranged on the resonant element (1);
the resonant element (1) and the sensitive body (5) are the same element or different elements;
the electric signal fed by the exciting coil (2) is an alternating electric signal, the resonant element (1) outputs force and displacement under the excitation of the same frequency of the natural frequency and acts on the sensitive body (5), and the sensitive body (5) outputs a first detection signal; when the sensing piece (14) senses the change of the external physical quantity to change the natural frequency of the resonant element (1), the force and displacement output by the resonant element (1) change, the sensitive body (5) is prompted to output a second detection signal, and the detection of the medium physical quantity is realized by obtaining different detection signals output by the sensitive body (5).
2. The resonant sensor based on intelligent materials according to claim 1, characterized by further comprising a magnetically conductive back cover (9), a permanent magnet (13), a disc spring (15);
the magnetic conduction rear cover (9) is arranged between the resonant element (1) and the rear end cover (10);
the magnetic conduction rear cover (9) is respectively in contact connection with the resonance element (1) and the rear end cover (10);
the permanent magnet (13) is arranged between the resonant element (1) and the occupying cylinder (11) and is arranged on the porcelain-guiding rear cover (9);
the disc spring (15) is arranged between the front end cover (8) and the sensing piece (14);
the two ends of the disc spring (15) are respectively and tightly connected with the front end cover (8) and the sensing piece (14).
3. The smart material based resonant sensor of claim 2, further comprising a sensing body (4) and a spherical housing (12);
the sensing body (4) is fixedly connected with the sensing piece (14);
the sensing body (4) and the spherical shell (12) jointly enclose a sphere;
the shell (7), the front end cover (8) and the rear end cover (10) are arranged inside the sensing body (4) and the spherical shell (12).
4. The smart material-based resonant sensor of claim 1, further comprising a conductive element (6), the conductive element (6) being a tunnel magneto-resistive material;
the conducting piece (6) is arranged between the occupying cylinder (11) and the sensing piece (14) and is in clearance connection with the sensitive body (5).
5. The smart material based resonant sensor of claim 4, further comprising a sensing body (4) and a spherical housing (12);
the sensing body (4) is fixedly connected with the sensing piece (14);
the sensing body (4) and the spherical shell (12) jointly enclose a sphere;
the shell (7), the front end cover (8) and the rear end cover (10) are arranged inside the sensing body (4) and the spherical shell (12).
6. The smart material based resonant sensor of claim 1, further comprising an induction coil (3).
7. The resonant sensor based on smart materials according to claim 6, further comprising a magnetically permeable back cover (9), a permanent magnet (13), a disc spring (15);
the magnetic conduction rear cover (9) is arranged between the resonant element (1) and the rear end cover (10);
the magnetic conduction rear cover (9) is respectively in contact connection with the resonance element (1) and the rear end cover (10);
the permanent magnet (13) is arranged between the resonant element (1) and the occupying cylinder (11) and is arranged on the porcelain-guiding rear cover (9);
the disc spring (15) is arranged between the front end cover (8) and the sensing piece (14);
the two ends of the disc spring (15) are respectively and tightly connected with the front end cover (8) and the sensing piece (14).
8. The resonant sensor based on the intelligent material is characterized by comprising a resonant element (1), an induction coil (3), a sensitive body (5), a shell (7), a front end cover (8), a rear end cover (10), a space occupying cylinder (11) and a sensing piece (14);
the shell (7), the front end cover (8) and the rear end cover (10) enclose an accommodating space (16);
the resonance element (1), the sensitive body (5) and the sensing piece (14) are sequentially arranged in the accommodating space (16), and the sensing piece (14) extends to the outer side of the front end cover (8);
the space occupying cylinder (11) is arranged in the accommodating space (16) and is arranged outside the resonant element (1);
the induction coil (3) is arranged on the sensitive body (5);
the resonant element (1) and the sensitive body (5) are the same element or different elements;
the excitation electric signal adopted by the resonant element (1) is an alternating electric signal, the resonant element (1) generates high-frequency vibration under the action of the excitation voltage, the vibration frequency is the natural frequency of the resonant element (1), the vibration acts on the resonant element (1) to enable the resonant element (1) to generate an alternating magnetic field, and the induction coil (3) generates induction voltage; when the sensing piece (14) senses the action of an external physical quantity, the natural frequency of the resonant element (1) changes to change the induction voltage of the induction coil (3), so that the physical quantity is detected.
9. The smart material based resonant sensor of claim 8, further comprising a sensing body (4), a magnetically permeable back cover (9) and a spherical housing (12);
the magnetic conduction rear cover (9) is arranged between the resonant element (1) and the rear end cover (10);
the magnetic conduction rear cover (9) is respectively in contact connection with the resonance element (1) and the rear end cover (10);
the sensing body (4) is fixedly connected with the sensing piece (14);
the sensing body (4) and the spherical shell (12) jointly enclose a sphere;
the shell (7), the front end cover (8) and the rear end cover (10) are arranged inside the sensing body (4) and the spherical shell (12).
10. The intelligent material-based resonant sensor according to claim 8, wherein the material of the resonant element (1) and the sensitive body (5) is any combination of the following:
-the resonator element (1) is a piezoelectric material and the sensitive body (5) is a piezoelectric material;
-the resonator element (1) is a piezoelectric material and the sensitive body (5) is a magnetostrictive material;
-the resonator element (1) is a magnetostrictive material and the sensitive body (5) is a piezoelectric material;
-the resonator element (1) is a magnetostrictive material and the sensitive body (5) is a magnetostrictive material.
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| CN111403915B (en) * | 2020-03-31 | 2021-07-13 | 西安交通大学 | Double-clamping longitudinal vibration mode magnetoelectric antenna and preparation method thereof |
| CN112945426B (en) * | 2021-01-29 | 2022-02-01 | 西南石油大学 | Vibrating wire sensor and stress displacement testing method |
| CN114199119B (en) * | 2021-12-07 | 2023-01-06 | 上海交通大学 | Composite detection sensor and detection device suitable for angle and angular speed of swing rotor |
| CN114563113B (en) * | 2022-03-03 | 2023-11-21 | 中国工程物理研究院总体工程研究所 | Hollow resonance type stress assembly and stress meter |
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