Self-sensing actuator based on magnetostriction materials
Technical field
The present invention relates to drivers and sensor technical field, more particularly to a kind of autobiography based on magnetostriction materials
Feel driver.
Background technique
Magnetostrictive effect refers to that because of the change of external magnetic field condition geometric dimension occurs for magnetisable material in magnetic history
The effect of reversible change.Magnetostriction materials can generate physical strain, while its piezomagnetic coefficient, Young under external magnetic fields
Modulus can generate corresponding variation with physical parameters such as magnetic conductivities.For magnetostriction materials when by external force, magnetization is bent
Line can be known as Villari effect, also referred to as magnetostrictive reaction with stress variation, this phenomenon.Based on magnetostriction material
The magnetostrictive effect designing driver of material, other effects (such as Villari effect) based on magnetostriction materials design sensing
Device becomes a very promising field.
Existing patent, such as Publication No. CN206399361U, a kind of entitled " high-precision magnetorestrictive linear
Displacement sensor " Chinese patent application, provide a kind of displacement sensor based on magnetostrictive effect.Publication No.
CN104167954A, the Chinese patent Shen of entitled " a kind of linear magnetostriction driver of coil permanent magnet excitation "
Please, a kind of controllable magnetic telescopic driver of pure permanent magnet excitation of coil is provided.
But magnetic telescopic driver or sensor that these patent applications propose, can only realize single driving or
Sensing function does not integrate both functions, and structure is not compact, generally requires to occupy bigger space.
Summary of the invention
For the defects in the prior art, the object of the present invention is to provide a kind of, and the sensing certainly based on magnetostriction materials is driven
Dynamic device.
A kind of self-sensing actuator based on magnetostriction materials provided according to the present invention, including drive part, sensing
Part;Wherein, the drive part includes driving coil and driving body;The transducing part include excitation coil, induction coil,
Sense body;
The driving body is mainly made of magnetostriction materials, and after driving coil input drive signal, driving body is being driven
Magnetostrictive effect occurs under the action of signal, driving body elongates or shortens, so that drive part output displacement and power;
The sensing body is mainly made of magnetostriction materials;After excitation coil input signal, induction coil is swashing
Encourage output inductive signal V under signal function1;Transducing part is by after the percussion of drive part, and sensing body is in mangneto
Under the action of flexible back wash effect, sensing body magnetic field changes, and the inductive signal variation of transducing part induction coil output is V2;
The displacement of drive part and the size of power are detected by the signal intensity V (δ) of measurement induction coil output;
Wherein, V (δ)=V1-V2, δ is detection variable.
Preferably, the pumping signal is high frequency small-signal very much smaller than driving signal, and high frequency small-signal makes to sense
It ignores for displacement and power that the displacement of part output and power export drive part with respect to driving signal;By adjusting sharp
The signal frequency of coil is encouraged, so that the induced voltage of induction coil is in the maximum operating point of change rate of relative magnetic field.
Preferably, the drive part is mainly made of the driving body for being wound with driving coil, wherein driving body mainly by
Magnetostrictive rod composition;
The sensing body of the transducing part is mainly made of rectangle frame rack-like magnetostriction materials, each side coiling
Circle, wherein side is excitation coil, and the other side is induction coil, and sensing body is provided with semicircle convex with one end that driving body collides
The portion of rising.
Preferably, the drive part is mainly made of the driving body for being wound with driving coil, wherein driving body mainly by
Magnetostriction materials cylinder composition;
The sensing body of the transducing part is mainly made of magnetostrictive rod, and sensing is placed in the cylinder of driving body in vivo,
Wherein, it senses and winds induction coil on body, the driving coil of drive part and the excitation coil for constituting transducing part.
Preferably, the sensing body of the driving body of the drive part and transducing part includes same magnetostrictive rod, mangneto
The coil that outside is arranged in radially is wound on extension stem, outside winds driving coil, and inner opposite end portion winds excitation coil, interior
Side the other end winds induction coil.
Preferably, the drive part is mainly made of the driving body for being wound with driving coil, wherein driving body mainly by
Magnetostriction cylinder composition;
The sensing body of the transducing part is mainly made of the cylinder-shaped driving body of rodlike piezoelectric material and drive part, is passed
The piezoelectric material part of sense body is built in driving body cylinder, wherein piezoelectric material both ends input signal, drive part
Driving coil and the induction coil for constituting transducing part.
Preferably, the drive part is mainly made of the driving body for being wound with driving coil, wherein driving body mainly by
First magnetostrictive rod composition;
The sensing body of the transducing part includes permanent magnet, the second magnetostrictive rod, is wound on the second magnetostrictive rod
Coil and composition excitation coil and induction coil, permanent magnet is between the first magnetostrictive rod and the second magnetostrictive rod.
Preferably, the drive part is mainly made of the driving body for being wound with driving coil, wherein driving body mainly by
Magnetostrictive rod composition;
The main rectangular frame group made of magnetostriction materials, high magnetic permeability metal of the sensing body of the transducing part
At wherein each side coiling, wherein side is excitation coil, and the other side is induction coil, and rectangular frame composition only twines
Part around excitation coil is made of magnetostriction materials, and rectangular frame rest part is mainly made of high magnetic permeability metal;
The driving body of drive part is located at lower left side or the lower right side of induction part square frame, and one with rectangular frame
Side alignment.
Preferably, the drive part is mainly made of the driving body for being wound with driving coil, wherein driving body mainly by
Magnetostrictive rod composition;
The sensing body of the transducing part is divided into two parts, and every part winds a coil, and one is excitation coil, separately
One is induction coil;The a part for sensing body is the stick being mainly made of magnetostriction materials and high magnetic permeability metal, wherein
The part of wound around coil is magnetostriction materials;The another part for sensing body includes C-shaped high magnetic permeability becket, the high magnetic conductance of C-shaped
It is provided with one and the sensing comparable through-hole of body bar-like portion diameter on the upside of rate becket opening portion, senses the bar-like portion of body
Through this through-hole;Coil is wound on C-shaped high magnetic permeability becket;
The driving body of drive part is located at lower left side or the lower right side of induction part rectangular frame, and one with rectangular frame
Side alignment.
Preferably, including drive part, transducing part;Wherein, the drive part includes driving coil and driving body;Institute
Stating transducing part includes excitation coil, induction coil, sensing body;
The drive part is mainly made of the driving body for being wound with driving coil, and wherein driving body is mainly by magnetostriction
Stick composition;
The sensing body of the transducing part is divided into two parts, and every part winds a coil, and one is excitation coil, separately
One is induction coil;The a part for sensing body is the stick being mainly made of high magnetic permeability metal, low magnetic permeability metal, wherein
The bar-like portion top of sensing body is mainly made of low magnetic permeability metal, and lower part is mainly made of high magnetic permeability metal, senses body
The part wound around coil that is made of high magnetic permeability metal of bar-like portion;Another part of sensing body includes C-shaped high magnetic permeability gold
Belong to ring, the upper and lower two sides in C-shaped high magnetic permeability becket opening portion be each provided with one with sense body bar-like portion diameter it is comparable
Through-hole senses the bar-like portion of body through this through-hole, and low magnetic permeability metal bar passes through logical on the upside of C-shaped high magnetic permeability becket
Hole, and be in contact with high magnetic permeability metal bar in the endface of C-shaped high magnetic permeability becket;It is twined on C-shaped high magnetic permeability becket
It is wound with coil;
The driving body of drive part is located at lower left side or the lower right side of induction part rectangular frame, and one with rectangular frame
Side alignment;
After driving coil input drive signal, magnetostrictive effect occurs under the action of driving signal for driving body, driving
Body elongates or shortens, so that drive part output displacement and power;
After excitation coil input signal, induction coil exports inductive signal V under pumping signal effect1;Detecting means
Divide by after the percussion of drive part, low magnetic permeability metal bar moves up, high magnetic permeability metal bar below
Instead of low magnetic permeability metal bar component part magnetic circuit, senses body magnetic field and change, the induction of transducing part induction coil output
Signal intensity is V2;By measurement induction coil output signal intensity V (δ) detect drive part displacement and power it is big
It is small, wherein V (δ)=V1-V2, δ is detection variable.
Compared with prior art, the present invention have it is following the utility model has the advantages that
1, drive part and transducing part are integrated together by the present invention, are improved the compactness of structure, are reduced device
Volume, be particularly suitable for the operating environment of narrow space.
2, present invention utilizes magnetostriction materials, while realizing the function of driving and sensing, and can be to driving portion
The displacement and power for dividing output carry out accurate real-time control, improve driving precision and sensing efficiency.
3, the power frequency of the invention by adjusting excitation coil, so that the induced potential of induction coil is in relative magnetic field
The maximum operating point of change rate, improve detection sensitivity.
Detailed description of the invention
Upon reading the detailed description of non-limiting embodiments with reference to the following drawings, other feature of the invention,
Objects and advantages will become more apparent upon:
Fig. 1 is 1 structure and working principle schematic diagram of the embodiment of the present invention.
Fig. 2 is 2 structure and working principle schematic diagram of the embodiment of the present invention.
Fig. 3 is 3 structure and working principle schematic diagram of the embodiment of the present invention.
Fig. 4 is 4 structure and working principle schematic diagram of the embodiment of the present invention.
Fig. 5 is 5 structure and working principle schematic diagram of the embodiment of the present invention.
Fig. 6 is 6 structure and working principle schematic diagram of the embodiment of the present invention.
Fig. 7 is 7 structure and working principle schematic diagram of the embodiment of the present invention.
Fig. 8 is 8 structure and working principle schematic diagram of the embodiment of the present invention.
Fig. 9 is 9 structure and working principle schematic diagram of the embodiment of the present invention.
It is shown in figure:
Specific embodiment
The present invention is described in detail combined with specific embodiments below.Following embodiment will be helpful to the technology of this field
Personnel further understand the present invention, but the invention is not limited in any way.It should be pointed out that the ordinary skill of this field
For personnel, without departing from the inventive concept of the premise, several changes and improvements can also be made.These belong to the present invention
Protection scope.
A kind of self-sensing actuator based on magnetostriction materials provided according to the present invention, including drive part, sensing
Part;Wherein, the drive part includes driving coil and driving body;The transducing part include excitation coil, induction coil,
Sense body;
The driving body is mainly made of magnetostriction materials, and after driving coil input drive signal, driving body is being driven
Magnetostrictive effect occurs under the action of signal, driving body elongates or shortens, so that drive part output displacement and power;
The sensing body is mainly made of magnetostriction materials;After excitation coil input signal, induction coil is swashing
Encourage output inductive signal V under signal function1;Transducing part is by after the percussion of drive part, and sensing body is in mangneto
Under the action of flexible back wash effect, sensing body magnetic field changes, and the inductive signal variation of transducing part induction coil output is V2;
The displacement of drive part and the size of power are detected by the signal intensity V (δ) of measurement induction coil output;
Wherein, V (δ)=V1-V2, δ is detection variable.
Wherein, the pumping signal is high frequency small-signal very much smaller than driving signal, and high frequency small-signal makes detecting means
It ignores for the displacement and power that divide the displacement exported and power to export drive part with respect to driving signal;By adjusting excitation
The signal frequency of coil improves inspection so that the induced voltage of induction coil is in the maximum operating point of change rate of relative magnetic field
Survey sensitivity.
Embodiment 1:
As shown in Figure 1, the drive part is mainly made of the driving body for being wound with driving coil, wherein driving body is main
It is made of magnetostrictive rod;The sensing body of the transducing part is mainly made of rectangle frame rack-like magnetostriction materials, left and right two
Each coiling in side, wherein side is excitation coil, and the other side is induction coil, and one end that sensing body is collided with driving body is provided with
Semi-circular projected part, the effect of semi-circular projected part are to ensure that driving body applies the effect force of sensing body along axis direction,
It avoids generating moment of flexure.
Excitation coil input stimulus high frequency low current Ie is given, induction coil exports sense under excitation high frequency low current Ie effect
Answer voltage V1;Driving current I is inputted to driving coilD, driving body elongation, hit sensing body below semi-circular projected part, sensing
Body is generated Villari effect, i.e. magnetostrictive reaction by stress, body changes of magnetic field is sensed, so that induction coil is defeated
Induced voltage out becomes V2, by measuring V (δ)=V1-V2Detect the size of drive part displacement and power.
Embodiment 2:
As shown in Fig. 2, the drive part is mainly made of the driving body for being wound with driving coil, wherein driving body is main
It is made of magnetostriction cylinder;The sensing body of the transducing part is mainly made of magnetostrictive rod, and sensing is placed in driving in vivo
In the cylinder of body, wherein wind induction coil, the driving coil of drive part and the excitation line for constituting transducing part on sensing body
Circle.
Driving current I is inputted to driving coilDSuperposition excitation high frequency low current Ie, induction coil is under exciting current effect
Export induced voltage V1, driving body is in driving current IDUnder the action of extend, hit sensing body, sensing body by stress produce
Raw Villari effect, senses body changes of magnetic field, so that the induced voltage of induction coil output becomes V2, by measurement V (δ)=
V1-V2Detect the size of drive part displacement and power.
The advantages of this embodiment is that transducing part does not need power supply.
Embodiment 3:
As shown in figure 3, the driving body of the drive part and the sensing body of transducing part include same magnetostrictive rod, magnetic
Causing to wind the coil that outside is arranged in radially on extension stem, outside winds driving coil, and inner opposite end portion winds excitation coil,
Inside the other end winds induction coil.
Excitation induced coil input stimulus high frequency low current Ie is given, induction coil exports induced electricity under exciting current effect
Press V1, driving current I is inputted to driving coilD, magnetostrictive rod is in driving current IDUnder the action of extend, generated after elongation
Villari effect, changes of magnetic field, so that the induced voltage of induction coil output becomes V2, by measuring V (δ)=V1-V2Detection
The size of drive part displacement and power out.
Embodiment 4:
As shown in figure 4, the drive part is mainly made of the driving body for being wound with driving coil, wherein driving body is main
It is made of magnetostriction materials cylinder;The sensing body of the transducing part is mainly by the cylinder of rodlike piezoelectric material and drive part
Shape driving body composition, the piezoelectric material part for sensing body are built in driving body cylinder, wherein piezoelectric material both ends input stimulus
Signal, the driving coil of drive part and the induction coil for constituting transducing part.
Piezoelectric material both ends input stimulus high frequency small voltage Ve is given, piezoelectric material generates high-frequency vibration, magnetostriction materials
Cylinder generates high-frequency vibration under the action of piezoelectric material, and induction coil generates induced voltage V1;It inputs and drives to driving coil
Electric current ID, magnetostriction materials cylinder elongation generation Villari effect, sensing body changes of magnetic field, induced voltage variation is V2, lead to
Cross measurement V (δ)=V1-V2Detect the size of drive part displacement and power.
The advantages of this embodiment is using voltage source, and when work stablizes than current source.
Embodiment 5:
As shown in figure 5, the drive part is mainly made of the driving body for being wound with driving coil, wherein driving body is main
It is made of the first magnetostrictive rod;The sensing body of the transducing part includes permanent magnet, the second magnetostrictive rod, and the second mangneto is stretched
The coil and composition excitation coil and induction coil wound on contracting stick, permanent magnet is located at the first magnetostrictive rod and the second mangneto is stretched
Between contracting stick, it is preferable that the first magnetostrictive rod heads on permanent magnet;Have between permanent magnet and the second magnetostrictive rod it is larger away from
From measured displacement is displacement of the drive part on this range direction.
Under initial situation, magnetic fields of second magnetostrictive rod by permanent magnet generate certain initial elongation.To sharp
Coil input stimulus high frequency low current Ie is encouraged, induction coil exports induced voltage V under excitation high frequency low current Ie effect1;It gives
Driving coil inputs driving current ID, driving body elongation, shock permanent magnet, permanent magnet is close to the second magnetostrictive rod, permanent magnet
The magnetic field acted on the second magnetostrictive rod changes, and therefore, the elongation of the second magnetostrictive rod changes, and generates
Villari effect, so that the changes of magnetic field of the second magnetostrictive rod, the induced voltage variation that induction coil generates is V2, pass through
Measure V (δ)=V1-V2Detect the size of drive part displacement and power.
Embodiment 6:
As shown in fig. 6, the drive part is mainly made of the driving body for being wound with driving coil, wherein driving body is main
It is made of magnetostrictive rod;The main square made of magnetostriction materials, high magnetic permeability metal of the sensing body of the transducing part
Shape frame composition, wherein each side coiling, wherein side is excitation coil, and the other side is induction coil, rectangular frame
The part that composition only winds excitation coil is made of magnetostriction materials, and rectangular frame rest part is mainly by high magnetic permeability metal
It is made;The driving body of drive part is located at lower left side or the lower right side of induction part square frame, and the side with rectangular frame
Side alignment.
Excitation coil input stimulus high frequency low current Ie is given, induction coil exports sense under excitation high frequency low current Ie effect
Answer voltage V1;Driving current I is inputted to driving coilD, the elongation of driving body magnetostrictive rod, a side of shock sensing body, sensing
The magnetostrictive rod that body is embedded in high magnetic permeability metal is generated Villari effect by stress, senses body changes of magnetic field, so that
The induced voltage of induction coil output becomes V2, by measuring V (δ)=V1-V2Detect the size of drive part displacement and power.
The advantages of this embodiment is the generation for avoiding transducing part moment of flexure, improves the rigidity of structure;Due to using high
Magnetic permeability metallic can generate bigger induced electromotive force.
Embodiment 7:
As shown in fig. 7, the drive part is mainly made of the driving body for being wound with driving coil, wherein driving body is main
It is made of magnetostrictive rod;The sensing body of the transducing part is divided into two parts, and every part winds a coil, and one is sharp
Coil is encouraged, another is induction coil;A part of sensing body is mainly to be made of magnetostriction materials and high magnetic permeability metal
Stick, wherein the part of wound around coil be magnetostriction materials;The another part for sensing body includes C-shaped high magnetic permeability becket, C
It is provided with one and the sensing comparable through-hole of body bar-like portion diameter on the upside of shape high magnetic permeability becket opening portion, senses body
Bar-like portion runs through this through-hole;Coil is wound on C-shaped high magnetic permeability becket;The driving body of drive part is located at induction part
Divide lower left side or the lower right side of rectangular frame, and be aligned with a side of rectangular frame, it is preferable that driving position and sensing body stick
The downside of shape part.
Excitation coil input stimulus high frequency low current Ie is given, induction coil exports sense under excitation high frequency low current Ie effect
Answer voltage V1;Driving current I is inputted to driving coilD, the elongation of driving body magnetostrictive rod, the directly bar-shaped portion of shock sensing body
Point, the magnetostrictive rod for sensing body bar-like portion is generated Villari effect by stress, body changes of magnetic field is sensed, so that
The induced voltage of induction coil output becomes V2, by measuring V (δ)=V1-V2Detect the size of drive part displacement and power.
The advantages of this embodiment be avoid because C-shaped high magnetic permeability metal outer part bear part driving force due to cause it is defeated
The reduction of power output.
Embodiment 8:
As shown in figure 8, a kind of self-sensing actuator based on magnetostriction materials, including drive part, transducing part;Its
In, the drive part includes driving coil and driving body;The transducing part includes excitation coil, induction coil, sensing body;
The drive part is mainly made of the driving body for being wound with driving coil, and wherein driving body is mainly made of magnetostrictive rod;
The sensing body of the transducing part is divided into two parts, and every part winds a coil, and one is excitation coil, another is sense
Answer coil;The a part for sensing body is the stick being mainly made of high magnetic permeability metal, low magnetic permeability metal, wherein senses body
Bar-like portion top is mainly made of low magnetic permeability metal, and lower part is mainly made of high magnetic permeability metal, senses the bar-shaped portion of body
Divide the part wound around coil being made of high magnetic permeability metal;The another part for sensing body includes C-shaped high magnetic permeability becket, C-shaped
The upper and lower two sides in high magnetic permeability becket opening portion are each provided with one and the sensing comparable through-hole of body bar-like portion diameter, pass
Feel body bar-like portion run through this through-hole, low magnetic permeability metal bar pass through C-shaped high magnetic permeability becket on the upside of through-hole, and with
High magnetic permeability metal bar is in contact in the endface of C-shaped high magnetic permeability becket;It is wound on C-shaped high magnetic permeability becket wired
Circle;The driving body of drive part is located at lower left side or the lower right side of induction part rectangular frame, and a side with rectangular frame
Alignment;Preferably, the downside of driving position and sensing body bar-like portion.
Excitation coil input stimulus high frequency low current Ie is given, induction coil exports sense under excitation high frequency low current Ie effect
Induction signal V1;Driving current I is inputted to driving coilD, driving body is in driving current IDUnder the action of magnetostrictive effect occurs,
Driving body elongation, directly hits the bar-like portion of sensing body, senses body bar-like portion by the percussion from drive part
Afterwards, low magnetic permeability metal bar moves up, and high magnetic permeability metal bar below replaces low magnetic permeability metal bar component part magnetic
Road, sensing body magnetic field change, and the inductive signal variation of transducing part induction coil output is V2, by measuring induction coil
The signal intensity V (δ) of output detects the displacement of drive part and the size of power, wherein V (δ)=V1-V2, δ is detection variable.
Embodiment 9:
As shown in figure 9, drive part is mainly by the driving body magnetostriction bar construction of winding driving coil, transducing part master
It to be made of tunnel magnetoresistive material, the permanent magnet being embedded on driving body magnetostrictive rod.To the driving line on magnetostrictive rod
Circle applies driving current ID, magnetostrictive rod elongation, permanent magnet moves up therewith, so that the magnetic field of tunnel magnetoresistive surrounding materials
It changes, and then resistance changes, so that the output voltage of tunnel magnetoresistive material ends changes, is exported by measurement
The variation V (δ) of voltage detects the displacement of drive part and the size of power, wherein V (δ)=V1-V2, δ is detection variable, V1For
The output voltage at original tunnel magnetoresistance material both ends, V2For the output voltage of tunnel magnetoresistive material ends after variation.
Specific embodiments of the present invention are described above.It is to be appreciated that the invention is not limited to above-mentioned
Particular implementation, those skilled in the art can make a variety of changes or modify within the scope of the claims, this not shadow
Ring substantive content of the invention.In the absence of conflict, the feature in embodiments herein and embodiment can any phase
Mutually combination.