CN109495009A - Self-sensing actuator based on magnetostriction materials - Google Patents

Self-sensing actuator based on magnetostriction materials Download PDF

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Publication number
CN109495009A
CN109495009A CN201811204066.7A CN201811204066A CN109495009A CN 109495009 A CN109495009 A CN 109495009A CN 201811204066 A CN201811204066 A CN 201811204066A CN 109495009 A CN109495009 A CN 109495009A
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driving
coil
sensing
mainly made
magnetic permeability
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CN109495009B (en
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杨斌堂
刘鲁楠
杨诣坤
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Lingji Shanghai Drive Technology Center LP
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Shanghai Jiaotong University
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/0075Electrical details, e.g. drive or control circuits or methods
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001Driving devices, e.g. vibrators

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

The present invention provides a kind of self-sensing actuators based on magnetostriction materials, including drive part, transducing part;Wherein, the drive part includes driving coil and driving body;The transducing part includes excitation coil, induction coil, sensing body;The driving body is mainly made of magnetostriction materials, and magnetostrictive effect occurs under the action of driving signal for driving body, and driving body elongates or shortens, so that drive part output displacement and power;The sensing body is mainly made of magnetostriction materials, and induction coil exports inductive signal V under pumping signal effect1;By after the percussion of drive part, sensing body magnetic field changes transducing part, and the inductive signal variation of transducing part induction coil output is V2;The displacement of drive part and the size of power are detected by the signal intensity V of measurement induction coil output.The present invention can be achieved at the same time the function of driver and sensor, improve compact-sized degree, driving precision and sensing efficiency.

Description

Self-sensing actuator based on magnetostriction materials
Technical field
The present invention relates to drivers and sensor technical field, more particularly to a kind of autobiography based on magnetostriction materials Feel driver.
Background technique
Magnetostrictive effect refers to that because of the change of external magnetic field condition geometric dimension occurs for magnetisable material in magnetic history The effect of reversible change.Magnetostriction materials can generate physical strain, while its piezomagnetic coefficient, Young under external magnetic fields Modulus can generate corresponding variation with physical parameters such as magnetic conductivities.For magnetostriction materials when by external force, magnetization is bent Line can be known as Villari effect, also referred to as magnetostrictive reaction with stress variation, this phenomenon.Based on magnetostriction material The magnetostrictive effect designing driver of material, other effects (such as Villari effect) based on magnetostriction materials design sensing Device becomes a very promising field.
Existing patent, such as Publication No. CN206399361U, a kind of entitled " high-precision magnetorestrictive linear Displacement sensor " Chinese patent application, provide a kind of displacement sensor based on magnetostrictive effect.Publication No. CN104167954A, the Chinese patent Shen of entitled " a kind of linear magnetostriction driver of coil permanent magnet excitation " Please, a kind of controllable magnetic telescopic driver of pure permanent magnet excitation of coil is provided.
But magnetic telescopic driver or sensor that these patent applications propose, can only realize single driving or Sensing function does not integrate both functions, and structure is not compact, generally requires to occupy bigger space.
Summary of the invention
For the defects in the prior art, the object of the present invention is to provide a kind of, and the sensing certainly based on magnetostriction materials is driven Dynamic device.
A kind of self-sensing actuator based on magnetostriction materials provided according to the present invention, including drive part, sensing Part;Wherein, the drive part includes driving coil and driving body;The transducing part include excitation coil, induction coil, Sense body;
The driving body is mainly made of magnetostriction materials, and after driving coil input drive signal, driving body is being driven Magnetostrictive effect occurs under the action of signal, driving body elongates or shortens, so that drive part output displacement and power;
The sensing body is mainly made of magnetostriction materials;After excitation coil input signal, induction coil is swashing Encourage output inductive signal V under signal function1;Transducing part is by after the percussion of drive part, and sensing body is in mangneto Under the action of flexible back wash effect, sensing body magnetic field changes, and the inductive signal variation of transducing part induction coil output is V2; The displacement of drive part and the size of power are detected by the signal intensity V (δ) of measurement induction coil output;
Wherein, V (δ)=V1-V2, δ is detection variable.
Preferably, the pumping signal is high frequency small-signal very much smaller than driving signal, and high frequency small-signal makes to sense It ignores for displacement and power that the displacement of part output and power export drive part with respect to driving signal;By adjusting sharp The signal frequency of coil is encouraged, so that the induced voltage of induction coil is in the maximum operating point of change rate of relative magnetic field.
Preferably, the drive part is mainly made of the driving body for being wound with driving coil, wherein driving body mainly by Magnetostrictive rod composition;
The sensing body of the transducing part is mainly made of rectangle frame rack-like magnetostriction materials, each side coiling Circle, wherein side is excitation coil, and the other side is induction coil, and sensing body is provided with semicircle convex with one end that driving body collides The portion of rising.
Preferably, the drive part is mainly made of the driving body for being wound with driving coil, wherein driving body mainly by Magnetostriction materials cylinder composition;
The sensing body of the transducing part is mainly made of magnetostrictive rod, and sensing is placed in the cylinder of driving body in vivo, Wherein, it senses and winds induction coil on body, the driving coil of drive part and the excitation coil for constituting transducing part.
Preferably, the sensing body of the driving body of the drive part and transducing part includes same magnetostrictive rod, mangneto The coil that outside is arranged in radially is wound on extension stem, outside winds driving coil, and inner opposite end portion winds excitation coil, interior Side the other end winds induction coil.
Preferably, the drive part is mainly made of the driving body for being wound with driving coil, wherein driving body mainly by Magnetostriction cylinder composition;
The sensing body of the transducing part is mainly made of the cylinder-shaped driving body of rodlike piezoelectric material and drive part, is passed The piezoelectric material part of sense body is built in driving body cylinder, wherein piezoelectric material both ends input signal, drive part Driving coil and the induction coil for constituting transducing part.
Preferably, the drive part is mainly made of the driving body for being wound with driving coil, wherein driving body mainly by First magnetostrictive rod composition;
The sensing body of the transducing part includes permanent magnet, the second magnetostrictive rod, is wound on the second magnetostrictive rod Coil and composition excitation coil and induction coil, permanent magnet is between the first magnetostrictive rod and the second magnetostrictive rod.
Preferably, the drive part is mainly made of the driving body for being wound with driving coil, wherein driving body mainly by Magnetostrictive rod composition;
The main rectangular frame group made of magnetostriction materials, high magnetic permeability metal of the sensing body of the transducing part At wherein each side coiling, wherein side is excitation coil, and the other side is induction coil, and rectangular frame composition only twines Part around excitation coil is made of magnetostriction materials, and rectangular frame rest part is mainly made of high magnetic permeability metal;
The driving body of drive part is located at lower left side or the lower right side of induction part square frame, and one with rectangular frame Side alignment.
Preferably, the drive part is mainly made of the driving body for being wound with driving coil, wherein driving body mainly by Magnetostrictive rod composition;
The sensing body of the transducing part is divided into two parts, and every part winds a coil, and one is excitation coil, separately One is induction coil;The a part for sensing body is the stick being mainly made of magnetostriction materials and high magnetic permeability metal, wherein The part of wound around coil is magnetostriction materials;The another part for sensing body includes C-shaped high magnetic permeability becket, the high magnetic conductance of C-shaped It is provided with one and the sensing comparable through-hole of body bar-like portion diameter on the upside of rate becket opening portion, senses the bar-like portion of body Through this through-hole;Coil is wound on C-shaped high magnetic permeability becket;
The driving body of drive part is located at lower left side or the lower right side of induction part rectangular frame, and one with rectangular frame Side alignment.
Preferably, including drive part, transducing part;Wherein, the drive part includes driving coil and driving body;Institute Stating transducing part includes excitation coil, induction coil, sensing body;
The drive part is mainly made of the driving body for being wound with driving coil, and wherein driving body is mainly by magnetostriction Stick composition;
The sensing body of the transducing part is divided into two parts, and every part winds a coil, and one is excitation coil, separately One is induction coil;The a part for sensing body is the stick being mainly made of high magnetic permeability metal, low magnetic permeability metal, wherein The bar-like portion top of sensing body is mainly made of low magnetic permeability metal, and lower part is mainly made of high magnetic permeability metal, senses body The part wound around coil that is made of high magnetic permeability metal of bar-like portion;Another part of sensing body includes C-shaped high magnetic permeability gold Belong to ring, the upper and lower two sides in C-shaped high magnetic permeability becket opening portion be each provided with one with sense body bar-like portion diameter it is comparable Through-hole senses the bar-like portion of body through this through-hole, and low magnetic permeability metal bar passes through logical on the upside of C-shaped high magnetic permeability becket Hole, and be in contact with high magnetic permeability metal bar in the endface of C-shaped high magnetic permeability becket;It is twined on C-shaped high magnetic permeability becket It is wound with coil;
The driving body of drive part is located at lower left side or the lower right side of induction part rectangular frame, and one with rectangular frame Side alignment;
After driving coil input drive signal, magnetostrictive effect occurs under the action of driving signal for driving body, driving Body elongates or shortens, so that drive part output displacement and power;
After excitation coil input signal, induction coil exports inductive signal V under pumping signal effect1;Detecting means Divide by after the percussion of drive part, low magnetic permeability metal bar moves up, high magnetic permeability metal bar below Instead of low magnetic permeability metal bar component part magnetic circuit, senses body magnetic field and change, the induction of transducing part induction coil output Signal intensity is V2;By measurement induction coil output signal intensity V (δ) detect drive part displacement and power it is big It is small, wherein V (δ)=V1-V2, δ is detection variable.
Compared with prior art, the present invention have it is following the utility model has the advantages that
1, drive part and transducing part are integrated together by the present invention, are improved the compactness of structure, are reduced device Volume, be particularly suitable for the operating environment of narrow space.
2, present invention utilizes magnetostriction materials, while realizing the function of driving and sensing, and can be to driving portion The displacement and power for dividing output carry out accurate real-time control, improve driving precision and sensing efficiency.
3, the power frequency of the invention by adjusting excitation coil, so that the induced potential of induction coil is in relative magnetic field The maximum operating point of change rate, improve detection sensitivity.
Detailed description of the invention
Upon reading the detailed description of non-limiting embodiments with reference to the following drawings, other feature of the invention, Objects and advantages will become more apparent upon:
Fig. 1 is 1 structure and working principle schematic diagram of the embodiment of the present invention.
Fig. 2 is 2 structure and working principle schematic diagram of the embodiment of the present invention.
Fig. 3 is 3 structure and working principle schematic diagram of the embodiment of the present invention.
Fig. 4 is 4 structure and working principle schematic diagram of the embodiment of the present invention.
Fig. 5 is 5 structure and working principle schematic diagram of the embodiment of the present invention.
Fig. 6 is 6 structure and working principle schematic diagram of the embodiment of the present invention.
Fig. 7 is 7 structure and working principle schematic diagram of the embodiment of the present invention.
Fig. 8 is 8 structure and working principle schematic diagram of the embodiment of the present invention.
Fig. 9 is 9 structure and working principle schematic diagram of the embodiment of the present invention.
It is shown in figure:
Specific embodiment
The present invention is described in detail combined with specific embodiments below.Following embodiment will be helpful to the technology of this field Personnel further understand the present invention, but the invention is not limited in any way.It should be pointed out that the ordinary skill of this field For personnel, without departing from the inventive concept of the premise, several changes and improvements can also be made.These belong to the present invention Protection scope.
A kind of self-sensing actuator based on magnetostriction materials provided according to the present invention, including drive part, sensing Part;Wherein, the drive part includes driving coil and driving body;The transducing part include excitation coil, induction coil, Sense body;
The driving body is mainly made of magnetostriction materials, and after driving coil input drive signal, driving body is being driven Magnetostrictive effect occurs under the action of signal, driving body elongates or shortens, so that drive part output displacement and power;
The sensing body is mainly made of magnetostriction materials;After excitation coil input signal, induction coil is swashing Encourage output inductive signal V under signal function1;Transducing part is by after the percussion of drive part, and sensing body is in mangneto Under the action of flexible back wash effect, sensing body magnetic field changes, and the inductive signal variation of transducing part induction coil output is V2; The displacement of drive part and the size of power are detected by the signal intensity V (δ) of measurement induction coil output;
Wherein, V (δ)=V1-V2, δ is detection variable.
Wherein, the pumping signal is high frequency small-signal very much smaller than driving signal, and high frequency small-signal makes detecting means It ignores for the displacement and power that divide the displacement exported and power to export drive part with respect to driving signal;By adjusting excitation The signal frequency of coil improves inspection so that the induced voltage of induction coil is in the maximum operating point of change rate of relative magnetic field Survey sensitivity.
Embodiment 1:
As shown in Figure 1, the drive part is mainly made of the driving body for being wound with driving coil, wherein driving body is main It is made of magnetostrictive rod;The sensing body of the transducing part is mainly made of rectangle frame rack-like magnetostriction materials, left and right two Each coiling in side, wherein side is excitation coil, and the other side is induction coil, and one end that sensing body is collided with driving body is provided with Semi-circular projected part, the effect of semi-circular projected part are to ensure that driving body applies the effect force of sensing body along axis direction, It avoids generating moment of flexure.
Excitation coil input stimulus high frequency low current Ie is given, induction coil exports sense under excitation high frequency low current Ie effect Answer voltage V1;Driving current I is inputted to driving coilD, driving body elongation, hit sensing body below semi-circular projected part, sensing Body is generated Villari effect, i.e. magnetostrictive reaction by stress, body changes of magnetic field is sensed, so that induction coil is defeated Induced voltage out becomes V2, by measuring V (δ)=V1-V2Detect the size of drive part displacement and power.
Embodiment 2:
As shown in Fig. 2, the drive part is mainly made of the driving body for being wound with driving coil, wherein driving body is main It is made of magnetostriction cylinder;The sensing body of the transducing part is mainly made of magnetostrictive rod, and sensing is placed in driving in vivo In the cylinder of body, wherein wind induction coil, the driving coil of drive part and the excitation line for constituting transducing part on sensing body Circle.
Driving current I is inputted to driving coilDSuperposition excitation high frequency low current Ie, induction coil is under exciting current effect Export induced voltage V1, driving body is in driving current IDUnder the action of extend, hit sensing body, sensing body by stress produce Raw Villari effect, senses body changes of magnetic field, so that the induced voltage of induction coil output becomes V2, by measurement V (δ)= V1-V2Detect the size of drive part displacement and power.
The advantages of this embodiment is that transducing part does not need power supply.
Embodiment 3:
As shown in figure 3, the driving body of the drive part and the sensing body of transducing part include same magnetostrictive rod, magnetic Causing to wind the coil that outside is arranged in radially on extension stem, outside winds driving coil, and inner opposite end portion winds excitation coil, Inside the other end winds induction coil.
Excitation induced coil input stimulus high frequency low current Ie is given, induction coil exports induced electricity under exciting current effect Press V1, driving current I is inputted to driving coilD, magnetostrictive rod is in driving current IDUnder the action of extend, generated after elongation Villari effect, changes of magnetic field, so that the induced voltage of induction coil output becomes V2, by measuring V (δ)=V1-V2Detection The size of drive part displacement and power out.
Embodiment 4:
As shown in figure 4, the drive part is mainly made of the driving body for being wound with driving coil, wherein driving body is main It is made of magnetostriction materials cylinder;The sensing body of the transducing part is mainly by the cylinder of rodlike piezoelectric material and drive part Shape driving body composition, the piezoelectric material part for sensing body are built in driving body cylinder, wherein piezoelectric material both ends input stimulus Signal, the driving coil of drive part and the induction coil for constituting transducing part.
Piezoelectric material both ends input stimulus high frequency small voltage Ve is given, piezoelectric material generates high-frequency vibration, magnetostriction materials Cylinder generates high-frequency vibration under the action of piezoelectric material, and induction coil generates induced voltage V1;It inputs and drives to driving coil Electric current ID, magnetostriction materials cylinder elongation generation Villari effect, sensing body changes of magnetic field, induced voltage variation is V2, lead to Cross measurement V (δ)=V1-V2Detect the size of drive part displacement and power.
The advantages of this embodiment is using voltage source, and when work stablizes than current source.
Embodiment 5:
As shown in figure 5, the drive part is mainly made of the driving body for being wound with driving coil, wherein driving body is main It is made of the first magnetostrictive rod;The sensing body of the transducing part includes permanent magnet, the second magnetostrictive rod, and the second mangneto is stretched The coil and composition excitation coil and induction coil wound on contracting stick, permanent magnet is located at the first magnetostrictive rod and the second mangneto is stretched Between contracting stick, it is preferable that the first magnetostrictive rod heads on permanent magnet;Have between permanent magnet and the second magnetostrictive rod it is larger away from From measured displacement is displacement of the drive part on this range direction.
Under initial situation, magnetic fields of second magnetostrictive rod by permanent magnet generate certain initial elongation.To sharp Coil input stimulus high frequency low current Ie is encouraged, induction coil exports induced voltage V under excitation high frequency low current Ie effect1;It gives Driving coil inputs driving current ID, driving body elongation, shock permanent magnet, permanent magnet is close to the second magnetostrictive rod, permanent magnet The magnetic field acted on the second magnetostrictive rod changes, and therefore, the elongation of the second magnetostrictive rod changes, and generates Villari effect, so that the changes of magnetic field of the second magnetostrictive rod, the induced voltage variation that induction coil generates is V2, pass through Measure V (δ)=V1-V2Detect the size of drive part displacement and power.
Embodiment 6:
As shown in fig. 6, the drive part is mainly made of the driving body for being wound with driving coil, wherein driving body is main It is made of magnetostrictive rod;The main square made of magnetostriction materials, high magnetic permeability metal of the sensing body of the transducing part Shape frame composition, wherein each side coiling, wherein side is excitation coil, and the other side is induction coil, rectangular frame The part that composition only winds excitation coil is made of magnetostriction materials, and rectangular frame rest part is mainly by high magnetic permeability metal It is made;The driving body of drive part is located at lower left side or the lower right side of induction part square frame, and the side with rectangular frame Side alignment.
Excitation coil input stimulus high frequency low current Ie is given, induction coil exports sense under excitation high frequency low current Ie effect Answer voltage V1;Driving current I is inputted to driving coilD, the elongation of driving body magnetostrictive rod, a side of shock sensing body, sensing The magnetostrictive rod that body is embedded in high magnetic permeability metal is generated Villari effect by stress, senses body changes of magnetic field, so that The induced voltage of induction coil output becomes V2, by measuring V (δ)=V1-V2Detect the size of drive part displacement and power.
The advantages of this embodiment is the generation for avoiding transducing part moment of flexure, improves the rigidity of structure;Due to using high Magnetic permeability metallic can generate bigger induced electromotive force.
Embodiment 7:
As shown in fig. 7, the drive part is mainly made of the driving body for being wound with driving coil, wherein driving body is main It is made of magnetostrictive rod;The sensing body of the transducing part is divided into two parts, and every part winds a coil, and one is sharp Coil is encouraged, another is induction coil;A part of sensing body is mainly to be made of magnetostriction materials and high magnetic permeability metal Stick, wherein the part of wound around coil be magnetostriction materials;The another part for sensing body includes C-shaped high magnetic permeability becket, C It is provided with one and the sensing comparable through-hole of body bar-like portion diameter on the upside of shape high magnetic permeability becket opening portion, senses body Bar-like portion runs through this through-hole;Coil is wound on C-shaped high magnetic permeability becket;The driving body of drive part is located at induction part Divide lower left side or the lower right side of rectangular frame, and be aligned with a side of rectangular frame, it is preferable that driving position and sensing body stick The downside of shape part.
Excitation coil input stimulus high frequency low current Ie is given, induction coil exports sense under excitation high frequency low current Ie effect Answer voltage V1;Driving current I is inputted to driving coilD, the elongation of driving body magnetostrictive rod, the directly bar-shaped portion of shock sensing body Point, the magnetostrictive rod for sensing body bar-like portion is generated Villari effect by stress, body changes of magnetic field is sensed, so that The induced voltage of induction coil output becomes V2, by measuring V (δ)=V1-V2Detect the size of drive part displacement and power.
The advantages of this embodiment be avoid because C-shaped high magnetic permeability metal outer part bear part driving force due to cause it is defeated The reduction of power output.
Embodiment 8:
As shown in figure 8, a kind of self-sensing actuator based on magnetostriction materials, including drive part, transducing part;Its In, the drive part includes driving coil and driving body;The transducing part includes excitation coil, induction coil, sensing body; The drive part is mainly made of the driving body for being wound with driving coil, and wherein driving body is mainly made of magnetostrictive rod; The sensing body of the transducing part is divided into two parts, and every part winds a coil, and one is excitation coil, another is sense Answer coil;The a part for sensing body is the stick being mainly made of high magnetic permeability metal, low magnetic permeability metal, wherein senses body Bar-like portion top is mainly made of low magnetic permeability metal, and lower part is mainly made of high magnetic permeability metal, senses the bar-shaped portion of body Divide the part wound around coil being made of high magnetic permeability metal;The another part for sensing body includes C-shaped high magnetic permeability becket, C-shaped The upper and lower two sides in high magnetic permeability becket opening portion are each provided with one and the sensing comparable through-hole of body bar-like portion diameter, pass Feel body bar-like portion run through this through-hole, low magnetic permeability metal bar pass through C-shaped high magnetic permeability becket on the upside of through-hole, and with High magnetic permeability metal bar is in contact in the endface of C-shaped high magnetic permeability becket;It is wound on C-shaped high magnetic permeability becket wired Circle;The driving body of drive part is located at lower left side or the lower right side of induction part rectangular frame, and a side with rectangular frame Alignment;Preferably, the downside of driving position and sensing body bar-like portion.
Excitation coil input stimulus high frequency low current Ie is given, induction coil exports sense under excitation high frequency low current Ie effect Induction signal V1;Driving current I is inputted to driving coilD, driving body is in driving current IDUnder the action of magnetostrictive effect occurs, Driving body elongation, directly hits the bar-like portion of sensing body, senses body bar-like portion by the percussion from drive part Afterwards, low magnetic permeability metal bar moves up, and high magnetic permeability metal bar below replaces low magnetic permeability metal bar component part magnetic Road, sensing body magnetic field change, and the inductive signal variation of transducing part induction coil output is V2, by measuring induction coil The signal intensity V (δ) of output detects the displacement of drive part and the size of power, wherein V (δ)=V1-V2, δ is detection variable.
Embodiment 9:
As shown in figure 9, drive part is mainly by the driving body magnetostriction bar construction of winding driving coil, transducing part master It to be made of tunnel magnetoresistive material, the permanent magnet being embedded on driving body magnetostrictive rod.To the driving line on magnetostrictive rod Circle applies driving current ID, magnetostrictive rod elongation, permanent magnet moves up therewith, so that the magnetic field of tunnel magnetoresistive surrounding materials It changes, and then resistance changes, so that the output voltage of tunnel magnetoresistive material ends changes, is exported by measurement The variation V (δ) of voltage detects the displacement of drive part and the size of power, wherein V (δ)=V1-V2, δ is detection variable, V1For The output voltage at original tunnel magnetoresistance material both ends, V2For the output voltage of tunnel magnetoresistive material ends after variation.
Specific embodiments of the present invention are described above.It is to be appreciated that the invention is not limited to above-mentioned Particular implementation, those skilled in the art can make a variety of changes or modify within the scope of the claims, this not shadow Ring substantive content of the invention.In the absence of conflict, the feature in embodiments herein and embodiment can any phase Mutually combination.

Claims (10)

1. a kind of self-sensing actuator based on magnetostriction materials, which is characterized in that including drive part, transducing part;Its In, the drive part includes driving coil and driving body;The transducing part includes excitation coil, induction coil, sensing body;
The driving body is mainly made of magnetostriction materials, and after driving coil input drive signal, driving body is in driving signal Under the action of magnetostrictive effect occurs, driving body elongates or shortens, so that drive part output displacement and power;
The sensing body is mainly made of magnetostriction materials;After excitation coil input signal, induction coil is believed in excitation Number effect is lower exports inductive signal V1;Transducing part is by after the percussion of drive part, and sensing body is in magnetostriction Under the action of back wash effect, sensing body magnetic field changes, and the inductive signal variation of transducing part induction coil output is V2;Pass through The signal intensity V (δ) of measurement induction coil output detects the displacement of drive part and the size of power;
Wherein, V (δ)=V1-V2, δ is detection variable.
2. the self-sensing actuator according to claim 1 based on magnetostriction materials, which is characterized in that the excitation letter It number is high frequency small-signal very much smaller than driving signal, the displacement and power that high frequency small-signal exports transducing part are opposite to be driven It ignores for displacement and power that signal exports drive part;By adjusting the signal frequency of excitation coil, so that induction The induced voltage of coil is in the maximum operating point of change rate of relative magnetic field.
3. the self-sensing actuator according to claim 1 based on magnetostriction materials, which is characterized in that the driving portion Divide and be mainly made of the driving body for being wound with driving coil, wherein driving body is mainly made of magnetostrictive rod;
The sensing body of the transducing part is mainly made of rectangle frame rack-like magnetostriction materials, each side coiling, Middle side is excitation coil, and the other side is induction coil, and one end of sensing body and driving body collision is provided with semi-circular projected part.
4. the self-sensing actuator according to claim 1 based on magnetostriction materials, which is characterized in that the driving portion Divide and be mainly made of the driving body for being wound with driving coil, wherein driving body is mainly made of magnetostriction cylinder;
The sensing body of the transducing part is mainly made of magnetostrictive rod, and sensing is placed in the cylinder of driving body in vivo, wherein Induction coil, the driving coil of drive part and the excitation coil for constituting transducing part are wound on sensing body.
5. the self-sensing actuator according to claim 1 based on magnetostriction materials, which is characterized in that the driving portion The sensing body of the driving body and transducing part that divide includes same magnetostrictive rod, and outside cloth in radially is wound on magnetostrictive rod The coil set, outside wind driving coil, and inner opposite end portion winds excitation coil, and inside the other end winds induction coil.
6. the self-sensing actuator according to claim 1 based on magnetostriction materials, which is characterized in that the driving portion Divide and be mainly made of the driving body for being wound with driving coil, wherein driving body is mainly made of magnetostriction materials cylinder;
The sensing body of the transducing part is mainly made of the cylinder-shaped driving body of rodlike piezoelectric material and drive part, senses body Piezoelectric material part be built in driving body cylinder, wherein piezoelectric material both ends input signal, the driving of drive part Coil and the induction coil for constituting transducing part.
7. the self-sensing actuator according to claim 1 based on magnetostriction materials, which is characterized in that the driving portion Divide and be mainly made of the driving body for being wound with driving coil, wherein driving body is mainly made of the first magnetostrictive rod;
The sensing body of the transducing part includes permanent magnet, the second magnetostrictive rod, the coil wound on the second magnetostrictive rod And excitation coil and induction coil are constituted, permanent magnet is between the first magnetostrictive rod and the second magnetostrictive rod.
8. the self-sensing actuator according to claim 1 based on magnetostriction materials, which is characterized in that the driving portion Divide and be mainly made of the driving body for being wound with driving coil, wherein driving body is mainly made of magnetostrictive rod;
Mainly the rectangular frame made of magnetostriction materials, high magnetic permeability metal forms the sensing body of the transducing part, In each side coiling, wherein side is excitation coil, and the other side is induction coil, the only winding excitation of rectangular frame composition The part of coil is made of magnetostriction materials, and rectangular frame rest part is mainly made of high magnetic permeability metal;
The driving body of drive part is located at lower left side or the lower right side of induction part square frame, and a side with rectangular frame Alignment.
9. the self-sensing actuator according to claim 1 based on magnetostriction materials, which is characterized in that the driving portion Divide and be mainly made of the driving body for being wound with driving coil, wherein driving body is mainly made of magnetostrictive rod;
The sensing body of the transducing part is divided into two parts, and every part winds a coil, and one is excitation coil, another For induction coil;The a part for sensing body is the stick being mainly made of magnetostriction materials and high magnetic permeability metal, wherein winding The part of coil is magnetostriction materials;Another part of sensing body includes C-shaped high magnetic permeability becket, C-shaped high magnetic permeability gold Belong to and be provided with one and the sensing comparable through-hole of body bar-like portion diameter on the upside of ring opening portion, the bar-like portion for sensing body runs through This through-hole;Coil is wound on C-shaped high magnetic permeability becket;
The driving body of drive part is located at lower left side or the lower right side of induction part rectangular frame, and a side with rectangular frame Alignment.
10. a kind of self-sensing actuator based on magnetostriction materials, which is characterized in that including drive part, transducing part;Its In, the drive part includes driving coil and driving body;The transducing part includes excitation coil, induction coil, sensing body;
The drive part is mainly made of the driving body for being wound with driving coil, and wherein driving body is mainly by magnetostrictive rod group At;
The sensing body of the transducing part is divided into two parts, and every part winds a coil, and one is excitation coil, another For induction coil;The a part for sensing body is the stick being mainly made of high magnetic permeability metal, low magnetic permeability metal, wherein sensing The bar-like portion top of body is mainly made of low magnetic permeability metal, and lower part is mainly made of high magnetic permeability metal, senses the stick of body The part wound around coil that shape part is made of high magnetic permeability metal;The another part for sensing body includes C-shaped high magnetic permeability becket, The upper and lower two sides in C-shaped high magnetic permeability becket opening portion are each provided with one and the sensing comparable through-hole of body bar-like portion diameter, The bar-like portion for sensing body runs through this through-hole, and low magnetic permeability metal bar passes through the through-hole on the upside of C-shaped high magnetic permeability becket, and It is in contact with high magnetic permeability metal bar in the endface of C-shaped high magnetic permeability becket;It is wound on C-shaped high magnetic permeability becket wired Circle;
The driving body of drive part is located at lower left side or the lower right side of induction part rectangular frame, and a side with rectangular frame Alignment;
After driving coil input drive signal, magnetostrictive effect occurs under the action of driving signal for driving body, and driving body is stretched Long or shortening, so that drive part output displacement and power;
After excitation coil input signal, induction coil exports inductive signal V under pumping signal effect1;Transducing part by After percussion from drive part, low magnetic permeability metal bar is moved up, and high magnetic permeability metal bar below replaces low Magnetic permeability metallic stick component part magnetic circuit, sensing body magnetic field change, and the inductive signal of transducing part induction coil output becomes Turn to V2;The displacement of drive part and the size of power are detected by the signal intensity V (δ) of measurement induction coil output, wherein V (δ)=V1-V2, δ is detection variable.
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