CN109495009B - Self-sensing driver based on magnetostrictive material - Google Patents

Self-sensing driver based on magnetostrictive material Download PDF

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CN109495009B
CN109495009B CN201811204066.7A CN201811204066A CN109495009B CN 109495009 B CN109495009 B CN 109495009B CN 201811204066 A CN201811204066 A CN 201811204066A CN 109495009 B CN109495009 B CN 109495009B
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driving
coil
sensing
magnetostrictive
rod
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CN109495009A (en
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杨斌堂
刘鲁楠
杨诣坤
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Lingji Shanghai Drive Technology Center LP
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Shanghai Jiaotong University
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/0075Electrical details, e.g. drive or control circuits or methods
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001Driving devices, e.g. vibrators

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Abstract

The invention provides a self-sensing driver based on magnetostrictive materials, which comprises a driving part and a sensing part, wherein the driving part is provided with a magnetic core; wherein the driving part includes a driving coil and a driving body; the sensing part comprises an exciting coil, an induction coil and a sensing body; the driving body is mainly made of magnetostrictive material and is made of a material with a high magnetic permeabilityUnder the action of a driving signal, a magnetostriction effect is generated, and the driving body is stretched or shortened, so that the driving part outputs displacement and force; the sensor body is mainly made of magnetostrictive material, and the induction coil outputs an induction signal V under the action of an excitation signal1(ii) a After the sensing part is impacted by the driving part, the magnetic field of the sensing body changes, and the sensing signal output by the sensing coil of the sensing part changes into V2(ii) a The displacement of the driving part and the magnitude of the force are detected by measuring the signal change V output by the induction coil. The invention can realize the functions of the driver and the sensor at the same time, and improves the structural compactness, the driving precision and the sensing efficiency.

Description

Self-sensing driver based on magnetostrictive material
Technical Field
The invention relates to the technical field of drivers and sensors, in particular to a self-sensing driver based on magnetostrictive materials.
Background
The magnetostriction effect is an effect that a magnetic substance undergoes a reversible change in geometric dimension due to a change in the condition of an external magnetic field during magnetization. The magnetostrictive material can generate physical strain under the action of an external magnetic field, and simultaneously, the piezomagnetic coefficient, the Young modulus, the magnetic permeability and other physical parameters of the magnetostrictive material can generate corresponding changes. When the magnetostrictive material is acted by external force, the magnetization curve of the magnetostrictive material changes along with the stress, and the phenomenon is called Villari effect and also called magnetostriction inverse effect. Designing drivers based on the magnetostrictive effect of magnetostrictive materials and designing sensors based on other effects (such as the Villari effect) of magnetostrictive materials are a potential field.
The prior patent, for example, chinese patent application with publication number CN206399361U entitled "a high precision magnetostrictive linear displacement sensor", provides a displacement sensor based on the magnetostrictive effect. The Chinese patent application with the publication number of CN104167954A and the invention name of 'a linear magnetostrictive actuator without coil permanent magnet excitation' provides a controllable magnetostrictive actuator without coil pure permanent magnet excitation.
However, the magnetostrictive actuators or sensors proposed in these patent applications can only realize a single driving or sensing function, and the two functions are not integrated, so that the structure is not compact, and a larger space is often required.
Disclosure of Invention
In view of the deficiencies in the prior art, it is an object of the present invention to provide a magnetostrictive material based self-sensing actuator.
The invention provides a self-sensing driver based on magnetostrictive materials, which comprises a driving part and a sensing part, wherein the driving part is provided with a driving hole; wherein the driving part includes a driving coil and a driving body; the sensing part comprises an exciting coil, an induction coil and a sensing body;
the driving body is mainly made of magnetostrictive materials, after the driving coil inputs a driving signal, the driving body generates a magnetostrictive effect under the action of the driving signal, and the driving body extends or shortens to enable the driving part to output displacement and force;
the sensor body is mainly made of magnetostrictive materials; after the exciting coil inputs the exciting signal, the induction coil outputs an induction signal V under the action of the exciting signal1(ii) a After the sensing part is impacted by the driving part, the magnetic field of the sensing body is changed under the action of the inverse magnetostrictive effect, and the sensing signal output by the sensing coil of the sensing part is changed into V2(ii) a Detecting the displacement and force of the driving part by measuring the signal change V (delta) output by the induction coil;
wherein V (δ) is V1-V2And δ is a detection variable.
Preferably, the excitation signal is a small high frequency signal smaller than the drive signal, the small high frequency signal being such that the displacement and force output by the sensing section are negligible with respect to the displacement and force output by the drive section; by adjusting the signal frequency of the exciting coil, the induced voltage of the induction coil is at the working point with the maximum change rate relative to the magnetic field.
Preferably, the driving part is mainly composed of a driving body wound with a driving coil, wherein the driving body is mainly composed of a magnetostrictive rod;
the sensor body of the sensing part is mainly made of a rectangular frame-shaped magnetostrictive material, the left side and the right side of the sensor body are respectively provided with a winding coil, one side of the winding coil is provided with an exciting coil, the other side of the winding coil is provided with an induction coil, and one end of the sensor body, which is collided with the driving body, is provided with a semicircular protruding part.
Preferably, the driving portion is mainly composed of a driving body wound with a driving coil, wherein the driving body is mainly composed of a cylinder of magnetostrictive material;
the sensor body of the sensing part mainly comprises a magnetostrictive rod, and the sensor body is arranged in a cylinder of the driving body, wherein an induction coil is wound on the sensor body, and a driving coil of the driving part also forms an excitation coil of the sensing part.
Preferably, the driving body of the driving portion and the sensing body of the sensing portion comprise the same magnetostrictive rod, coils arranged along the inner side and the outer side in the radial direction are wound on the magnetostrictive rod, the driving coil is wound on the outer side, one end part of the inner side is wound on the exciting coil, and the other end part of the inner side is wound on the sensing coil.
Preferably, the driving part is mainly composed of a driving body wound with a driving coil, wherein the driving body is mainly composed of a magnetostrictive cylinder;
the sensor body of the sensing part mainly comprises a bar-shaped piezoelectric material and a cylindrical driving body of the driving part, the piezoelectric material part of the sensor body is arranged in the cylinder of the driving body, excitation signals are input at two ends of the piezoelectric material, and a driving coil of the driving part also forms an induction coil of the sensing part.
Preferably, the driving part is mainly composed of a driving body wound with a driving coil, wherein the driving body is mainly composed of a first magnetostrictive rod;
the sensing body of the sensing part comprises a permanent magnet and a second magnetostrictive rod, a coil wound on the second magnetostrictive rod can form an exciting coil and an induction coil, and the permanent magnet is positioned between the first magnetostrictive rod and the second magnetostrictive rod.
Preferably, the driving part is mainly composed of a driving body wound with a driving coil, wherein the driving body is mainly composed of a magnetostrictive rod;
the sensor body of the sensing part mainly comprises a rectangular frame made of magnetostrictive materials and high-permeability metal, wherein the left side and the right side of the rectangular frame are respectively provided with a winding coil, one side of the winding coil is provided with an exciting coil, the other side of the winding coil is provided with an induction coil, the part of the rectangular frame only wound with the exciting coil is made of magnetostrictive materials, and the rest part of the rectangular frame is mainly made of high-permeability metal;
the driving body of the driving part is positioned at the left lower side or the right lower side of the square frame of the sensing part and is aligned with one side of the rectangular frame.
Preferably, the driving part is mainly composed of a driving body wound with a driving coil, wherein the driving body is mainly composed of a magnetostrictive rod;
the sensing body of the sensing part is divided into two parts, each part is respectively wound with a coil, one is an exciting coil, and the other is an induction coil; one part of the sensor body is a rod mainly composed of magnetostrictive materials and high-permeability metal, wherein the part wound with the coil is made of magnetostrictive materials; the other part of the sensor comprises a C-shaped high-permeability metal ring, a through hole with the diameter equivalent to that of the rod-shaped part of the sensor is arranged on the upper side of the opening part of the C-shaped high-permeability metal ring, and the rod-shaped part of the sensor penetrates through the through hole; a coil is wound on the C-shaped high-magnetic-permeability metal ring;
the driving body of the driving part is positioned at the left lower side or the right lower side of the rectangular frame of the sensing part and is aligned with one side of the rectangular frame.
Preferably, the device comprises a driving part and a sensing part; wherein the driving part includes a driving coil and a driving body; the sensing part comprises an exciting coil, an induction coil and a sensing body;
the driving part mainly comprises a driving body wound with a driving coil, wherein the driving body mainly comprises a magnetostrictive rod;
the sensing body of the sensing part is divided into two parts, each part is respectively wound with a coil, one is an exciting coil, and the other is an induction coil; the sensor comprises a sensor body, a coil winding and a magnetic field generating device, wherein one part of the sensor body is a rod mainly composed of high-permeability metal and low-permeability metal, the upper part of the rod-shaped part of the sensor body is mainly composed of low-permeability metal, the lower part of the rod-shaped part of the sensor body is mainly composed of high-permeability metal, and the coil winding is wound on the part of the rod-shaped part of the sensor body composed of high-permeability metal; the other part of the sensor comprises a C-shaped high-magnetic-permeability metal ring, the upper side and the lower side of the opening part of the C-shaped high-magnetic-permeability metal ring are respectively provided with a through hole with the diameter equivalent to that of the rod-shaped part of the sensor, the rod-shaped part of the sensor penetrates through the through hole, and the low-magnetic-permeability metal rod penetrates through the through hole on the upper side of the C-shaped high-magnetic-permeability metal ring and is in contact with the high-magnetic-permeability metal rod at the end face of the C-shaped high-magnetic; a coil is wound on the C-shaped high-magnetic-permeability metal ring;
the driving body of the driving part is positioned at the left lower side or the right lower side of the rectangular frame of the sensing part and is aligned with one side of the rectangular frame;
after the driving coil inputs a driving signal, the driving body generates a magnetostrictive effect under the action of the driving signal, and the driving body extends or shortens to enable the driving part to output displacement and force;
after the exciting coil inputs the exciting signal, the induction coil outputs an induction signal V under the action of the exciting signal1(ii) a After the sensing part is impacted by the driving part, the low-magnetic-permeability metal rod moves upwards, the high-magnetic-permeability metal rod below the sensing part replaces the low-magnetic-permeability metal rod to form a part of magnetic circuit, the magnetic field of the sensing body changes, and the sensing signal output by the sensing coil of the sensing part changes into V2(ii) a The displacement and force of the drive part are detected by measuring the signal change V (delta) output by the induction coil, wherein V (delta) is V1-V2And δ is a detection variable.
Compared with the prior art, the invention has the following beneficial effects:
1. the invention integrates the driving part and the sensing part together, improves the compactness of the structure, reduces the volume of the device and is particularly suitable for the operation environment with narrow space.
2. The invention utilizes magnetostrictive materials, realizes the functions of driving and sensing simultaneously, can accurately control the displacement and force output by the driving part in real time, and improves the driving precision and the sensing efficiency.
3. The invention makes the induced voltage of the induction coil at the working point with the maximum change rate relative to the magnetic field by adjusting the current frequency of the exciting coil, thereby improving the detection sensitivity.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments with reference to the following drawings:
fig. 1 is a schematic view of the structure and the working principle of embodiment 1 of the present invention.
Fig. 2 is a schematic view of the structure and the working principle of embodiment 2 of the present invention.
Fig. 3 is a schematic view of the structure and the operation principle of embodiment 3 of the present invention.
Fig. 4 is a schematic diagram of the structure and the operation principle of embodiment 4 of the present invention.
Fig. 5 is a schematic view of the structure and the operation principle of embodiment 5 of the present invention.
Fig. 6 is a schematic view of the structure and the operation principle of embodiment 6 of the present invention.
Fig. 7 is a schematic view of the structure and the operation principle of embodiment 7 of the present invention.
Fig. 8 is a schematic view of the structure and the operation principle of embodiment 8 of the present invention.
Fig. 9 is a schematic diagram of the structure and the operation principle of embodiment 9 of the present invention.
The figures show that:
Figure GDA0002252166070000041
Figure GDA0002252166070000051
Detailed Description
The present invention will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the invention, but are not intended to limit the invention in any way. It should be noted that it would be obvious to those skilled in the art that various changes and modifications can be made without departing from the spirit of the invention. All falling within the scope of the present invention.
The invention provides a self-sensing driver based on magnetostrictive materials, which comprises a driving part and a sensing part, wherein the driving part is provided with a driving hole; wherein the driving part includes a driving coil and a driving body; the sensing part comprises an exciting coil, an induction coil and a sensing body;
the driving body is mainly made of magnetostrictive materials, after the driving coil inputs a driving signal, the driving body generates a magnetostrictive effect under the action of the driving signal, and the driving body extends or shortens to enable the driving part to output displacement and force;
the sensor body is mainly made of magnetostrictive materials; after the exciting coil inputs the exciting signal, the induction coil outputs an induction signal V under the action of the exciting signal1(ii) a After the sensing part is impacted by the driving part, the magnetic field of the sensing body is changed under the action of the inverse magnetostrictive effect, and the sensing signal output by the sensing coil of the sensing part is changed into V2(ii) a Detecting the displacement and force of the driving part by measuring the signal change V (delta) output by the induction coil;
wherein V (δ) is V1-V2And δ is a detection variable.
The excitation signal is a high-frequency small signal smaller than the driving signal, and the high-frequency small signal enables the displacement and the force output by the sensing part to be ignored relative to the displacement and the force output by the driving part by the driving signal; by adjusting the signal frequency of the exciting coil, the induction voltage of the induction coil is positioned at the working point with the maximum change rate relative to the magnetic field, and the detection sensitivity is improved.
Example 1:
as shown in fig. 1, the driving part is mainly composed of a driving body wound with a driving coil, wherein the driving body is mainly composed of a magnetostrictive rod; the sensor body of the sensing part is mainly made of a rectangular frame-shaped magnetostrictive material, the left side and the right side of the sensor body are respectively provided with a winding coil, one side of the winding coil is an exciting coil, the other side of the winding coil is an induction coil, one end of the sensor body, which is collided with the driving body, is provided with a semicircular protruding part, and the semicircular protruding part is used for ensuring that acting force of the driving body on the sensor body is applied along the axis direction, so that bending moment is avoided.
The exciting coil is input with exciting high-frequency small current Ie, and the induction coil outputs under the action of the exciting high-frequency small current IeInduced voltage V1(ii) a Inputting a drive current I to the drive coilDThe driving body extends to impact a semicircular convex part below the sensor body, the sensor body generates Villari effect, namely magnetostriction inverse effect under the action of stress, and the magnetic field of the sensor body changes, so that the induction voltage output by the induction coil is changed into V2By measuring V (delta) ═ V1-V2The magnitude of the drive portion displacement and force is detected.
Example 2:
as shown in fig. 2, the driving part is mainly composed of a driving body wound with a driving coil, wherein the driving body is mainly composed of a magnetostrictive cylinder; the sensor body of the sensing part mainly comprises a magnetostrictive rod, and the sensor body is arranged in a cylinder of the driving body, wherein an induction coil is wound on the sensor body, and a driving coil of the driving part also forms an excitation coil of the sensing part.
Inputting a drive current I to the drive coilDSuperpose exciting high-frequency small current Ie, and the induction coil outputs induction voltage V under the action of exciting current1Driving body at driving current IDThe sensing body is extended to impact the sensing body, the Villari effect is generated under the stress action of the sensing body, and the magnetic field of the sensing body is changed, so that the induction voltage output by the induction coil is changed into V2By measuring V (delta) ═ V1-V2The magnitude of the drive portion displacement and force is detected.
This embodiment has the advantage that no power supply is required for the sensing section.
Example 3:
as shown in fig. 3, the driving body of the driving portion and the sensing body of the sensing portion include the same magnetostrictive rod, coils arranged radially inside and outside are wound on the magnetostrictive rod, a driving coil is wound on the outside, an exciting coil is wound on one end portion of the inside, and an induction coil is wound on the other end portion of the inside.
Exciting high-frequency small current Ie is input to the induction exciting coil, and the induction coil outputs induction voltage V under the action of the exciting current1Inputting a driving current I to the driving coilDMagnetostrictive rod at drive Current IDIs elongated under the action of (A) and produces Villari effect after the elongationThe magnetic field is changed so that the induced voltage output from the induction coil becomes V2By measuring V (delta) ═ V1-V2The magnitude of the drive portion displacement and force is detected.
Example 4:
as shown in fig. 4, the driving part is mainly composed of a driving body wound with a driving coil, wherein the driving body is mainly composed of a cylinder of magnetostrictive material; the sensor body of the sensing part mainly comprises a bar-shaped piezoelectric material and a cylindrical driving body of the driving part, the piezoelectric material part of the sensor body is arranged in the cylinder of the driving body, excitation signals are input at two ends of the piezoelectric material, and a driving coil of the driving part also forms an induction coil of the sensing part.
The piezoelectric material generates high-frequency vibration when excited high-frequency small voltage Ve is input to two ends of the piezoelectric material, the magnetostrictive material cylinder generates high-frequency vibration under the action of the piezoelectric material, and the induction coil generates induction voltage V1(ii) a Inputting a drive current I to the drive coilDThe Villari effect is generated by the extension of the cylinder made of magnetostrictive material, the magnetic field of the sensor changes, and the induced voltage changes into V2By measuring V (delta) ═ V1-V2The magnitude of the drive portion displacement and force is detected.
The advantage of this embodiment is that the voltage source is used and is more stable than the current source in operation.
Example 5:
as shown in fig. 5, the driving part is mainly composed of a driving body wound with a driving coil, wherein the driving body is mainly composed of a first magnetostrictive rod; the sensing body of the sensing part comprises a permanent magnet and a second magnetostrictive rod, a coil wound on the second magnetostrictive rod can form an exciting coil and an induction coil, the permanent magnet is positioned between the first magnetostrictive rod and the second magnetostrictive rod, and preferably, the first magnetostrictive rod props against the permanent magnet; there is a large distance between the permanent magnet and the second magnetostrictive rod and the measured displacement is the displacement of the driving part in the direction of this distance.
In the initial condition, the second magnetostrictive rod is subjected to the magnetic field of the permanent magnet to generate certain initial elongation. Excitation wireThe coil inputs exciting high-frequency small current Ie, and the induction coil outputs induction voltage V under the action of the exciting high-frequency small current Ie1(ii) a Inputting a drive current I to the drive coilDThe driving body extends to impact the permanent magnet, the permanent magnet is close to the second magnetostrictive rod, and the magnetic field of the permanent magnet acting on the second magnetostrictive rod changes, so that the extension amount of the second magnetostrictive rod changes to generate Villari effect, the magnetic field of the second magnetostrictive rod changes, and the induced voltage generated by the induction coil changes to V2By measuring V (delta) ═ V1-V2The magnitude of the drive portion displacement and force is detected.
Example 6:
as shown in fig. 6, the driving part is mainly composed of a driving body wound with a driving coil, wherein the driving body is mainly composed of a magnetostrictive rod; the sensor body of the sensing part mainly comprises a rectangular frame made of magnetostrictive materials and high-permeability metal, wherein the left side and the right side of the rectangular frame are respectively provided with a winding coil, one side of the winding coil is provided with an exciting coil, the other side of the winding coil is provided with an induction coil, the part of the rectangular frame only wound with the exciting coil is made of magnetostrictive materials, and the rest part of the rectangular frame is mainly made of high-permeability metal; the driving body of the driving part is positioned at the left lower side or the right lower side of the square frame of the sensing part and is aligned with one side of the rectangular frame.
Inputting exciting high-frequency small current Ie to the exciting coil, and outputting induction voltage V by the induction coil under the action of the exciting high-frequency small current Ie1(ii) a Inputting a drive current I to the drive coilDThe magnetostrictive rod of the driving body extends to impact one side of the sensing body, the magnetostrictive rod of the sensing body embedded in the metal with high magnetic conductivity generates Villari effect under the action of stress, and the magnetic field of the sensing body changes, so that the induced voltage output by the induction coil is changed into V2By measuring V (delta) ═ V1-V2The magnitude of the drive portion displacement and force is detected.
The embodiment has the advantages that the generation of bending moment of the sensing part is avoided, and the rigidity of the structure is improved; because of the adoption of the metal with high magnetic conductivity, larger induced electromotive force can be generated.
Example 7:
as shown in fig. 7, the driving part is mainly composed of a driving body wound with a driving coil, wherein the driving body is mainly composed of a magnetostrictive rod; the sensing body of the sensing part is divided into two parts, each part is respectively wound with a coil, one is an exciting coil, and the other is an induction coil; one part of the sensor body is a rod mainly composed of magnetostrictive materials and high-permeability metal, wherein the part wound with the coil is made of magnetostrictive materials; the other part of the sensor comprises a C-shaped high-permeability metal ring, a through hole with the diameter equivalent to that of the rod-shaped part of the sensor is arranged on the upper side of the opening part of the C-shaped high-permeability metal ring, and the rod-shaped part of the sensor penetrates through the through hole; a coil is wound on the C-shaped high-magnetic-permeability metal ring; the driving body of the driving part is positioned at the left lower side or the right lower side of the rectangular frame of the sensing part and is aligned with one side edge of the rectangular frame, and preferably, the driving body position is aligned with the lower side of the rod-shaped part of the sensing body.
Inputting exciting high-frequency small current Ie to the exciting coil, and outputting induction voltage V by the induction coil under the action of the exciting high-frequency small current Ie1(ii) a Inputting a drive current I to the drive coilDThe magnetostrictive rod of the rod-shaped part of the sensor is stressed to generate Villari effect, and the magnetic field of the sensor changes to change the induced voltage output by the induction coil into V2By measuring V (delta) ═ V1-V2The magnitude of the drive portion displacement and force is detected.
This embodiment has the advantage of avoiding a reduction in output force due to the C-shaped high permeability metal outer section bearing part of the driving force.
Example 8:
as shown in fig. 8, a self-sensing actuator based on magnetostrictive material includes an actuating portion, a sensing portion; wherein the driving part includes a driving coil and a driving body; the sensing part comprises an exciting coil, an induction coil and a sensing body; the driving part mainly comprises a driving body wound with a driving coil, wherein the driving body mainly comprises a magnetostrictive rod; the sensing body of the sensing part is divided into two parts, each part is respectively wound with a coil, one is an exciting coil, and the other is an induction coil; the sensor comprises a sensor body, a coil winding and a magnetic field generating device, wherein one part of the sensor body is a rod mainly composed of high-permeability metal and low-permeability metal, the upper part of the rod-shaped part of the sensor body is mainly composed of low-permeability metal, the lower part of the rod-shaped part of the sensor body is mainly composed of high-permeability metal, and the coil winding is wound on the part of the rod-shaped part of the sensor body composed of high-permeability metal; the other part of the sensor comprises a C-shaped high-magnetic-permeability metal ring, the upper side and the lower side of the opening part of the C-shaped high-magnetic-permeability metal ring are respectively provided with a through hole with the diameter equivalent to that of the rod-shaped part of the sensor, the rod-shaped part of the sensor penetrates through the through hole, and the low-magnetic-permeability metal rod penetrates through the through hole on the upper side of the C-shaped high-magnetic-permeability metal ring and is in contact with the high-magnetic-permeability metal rod at the end face of the C-shaped high-magnetic; a coil is wound on the C-shaped high-magnetic-permeability metal ring; the driving body of the driving part is positioned at the left lower side or the right lower side of the rectangular frame of the sensing part and is aligned with one side of the rectangular frame; preferably, the body position is driven with the underside of the sensor rod portion.
Inputting exciting high-frequency small current Ie to the exciting coil, and outputting an induction signal V by the induction coil under the action of the exciting high-frequency small current Ie1(ii) a Inputting a drive current I to the drive coilDDriving body at driving current IDThe drive body extends to directly impact the rod-shaped part of the sensor body, after the rod-shaped part of the sensor body is impacted by the drive part, the low-permeability metal rod moves upwards, the high-permeability metal rod below the low-permeability metal rod replaces the low-permeability metal rod to form a part of magnetic circuit, the magnetic field of the sensor body changes, and the induction signal output by the induction coil of the sensing part changes into V2The displacement and force of the driving part are detected by measuring the signal change V (delta) output by the induction coil, wherein V (delta) is V1-V2And δ is a detection variable.
Example 9:
as shown in fig. 9, the driving portion is mainly constituted by a driving body magnetostrictive rod wound around the driving coil, and the sensing portion is mainly constituted by a tunnel magnetoresistive material and a permanent magnet embedded on the driving body magnetostrictive rod. To a magnetostrictive rodThe drive coil applies a drive current IDThe magnetostrictive rod extends, the permanent magnet moves upwards along with the magnetostrictive rod, so that the magnetic field around the tunnel magnetoresistive material is changed, further the resistance is changed, the output voltage at two ends of the tunnel magnetoresistive material is changed, and the displacement and the force of the driving part are detected by measuring the change V (delta) of the output voltage, wherein V (delta) is V (delta)1-V2Delta is the measured variable, V1Is the output voltage, V, across the initial tunnel magnetoresistive material2Is the output voltage across the tunnel magnetoresistive material after the change.
The foregoing description of specific embodiments of the present invention has been presented. It is to be understood that the present invention is not limited to the specific embodiments described above, and that various changes or modifications may be made by one skilled in the art within the scope of the appended claims without departing from the spirit of the invention. The embodiments and features of the embodiments of the present application may be combined with each other arbitrarily without conflict.

Claims (10)

1. A self-sensing driver based on magnetostrictive material is characterized by comprising a driving part and a sensing part; wherein the driving part includes a driving coil and a driving body; the sensing part comprises an exciting coil, an induction coil and a sensing body;
the driving body is mainly made of magnetostrictive materials, after the driving coil inputs a driving signal, the driving body generates a magnetostrictive effect under the action of the driving signal, and the driving body extends or shortens to enable the driving part to output displacement and force;
the sensor body is mainly made of magnetostrictive materials; after the exciting coil inputs the exciting signal, the induction coil outputs an induction signal V under the action of the exciting signal1(ii) a After the sensing part is impacted by the driving part, the magnetic field of the sensing body is changed under the action of the inverse magnetostrictive effect, and the sensing signal output by the sensing coil of the sensing part is changed into V2(ii) a Detecting the displacement and force of the driving part by measuring the signal change V (delta) output by the induction coil;
wherein V (δ) is V1-V2And δ is a detection variable.
2. The magnetostrictive-material-based self-sensing actuator according to claim 1, wherein the excitation signal is a small high frequency signal smaller than the drive signal, the small high frequency signal causing the sensing section to output a negligible displacement and force relative to the displacement and force caused by the drive signal to output the drive section; by adjusting the signal frequency of the exciting coil, the induced voltage of the induction coil is at the working point with the maximum change rate relative to the magnetic field.
3. The magnetostrictive material based self-sensing driver according to claim 1, wherein the driving part consists essentially of a driving body wrapped with a driving coil, wherein the driving body consists essentially of a magnetostrictive rod;
the sensor body of the sensing part is mainly made of a rectangular frame-shaped magnetostrictive material, the left side and the right side of the sensor body are respectively provided with a winding coil, one side of the winding coil is provided with an exciting coil, the other side of the winding coil is provided with an induction coil, and one end of the sensor body, which is collided with the driving body, is provided with a semicircular protruding part.
4. The magnetostrictive-material-based self-sensing driver according to claim 1, wherein the driving part consists essentially of a driving body wound with a driving coil, wherein the driving body consists essentially of a magnetostrictive cylinder;
the sensor body of the sensing part mainly comprises a magnetostrictive rod, and the sensor body is arranged in a cylinder of the driving body, wherein an induction coil is wound on the sensor body, and a driving coil of the driving part also forms an excitation coil of the sensing part.
5. The magnetostrictive-material-based self-sensing actuator according to claim 1, wherein the driving body of the driving part and the sensing body of the sensing part comprise the same magnetostrictive rod, coils arranged radially inside and outside are wound on the magnetostrictive rod, a driving coil is wound on the outside, an exciting coil is wound on one end part of the inside, and an induction coil is wound on the other end part of the inside.
6. The magnetostrictive material based self-sensing driver according to claim 1, wherein the driving part consists essentially of a driving body wrapped with a driving coil, wherein the driving body consists essentially of a cylinder of magnetostrictive material;
the sensor body of the sensing part mainly comprises a bar-shaped piezoelectric material and a cylindrical driving body of the driving part, the piezoelectric material part of the sensor body is arranged in the cylinder of the driving body, excitation signals are input at two ends of the piezoelectric material, and a driving coil of the driving part also forms an induction coil of the sensing part.
7. The magnetostrictive-material-based self-sensing driver according to claim 1, wherein the drive section consists essentially of a drive body wrapped with a drive coil, wherein the drive body consists essentially of a first magnetostrictive rod;
the sensing body of the sensing part comprises a permanent magnet and a second magnetostrictive rod, a coil wound on the second magnetostrictive rod can form an exciting coil and an induction coil, and the permanent magnet is positioned between the first magnetostrictive rod and the second magnetostrictive rod.
8. The magnetostrictive material based self-sensing driver according to claim 1, wherein the driving part consists essentially of a driving body wrapped with a driving coil, wherein the driving body consists essentially of a magnetostrictive rod;
the sensor body of the sensing part mainly comprises a rectangular frame made of magnetostrictive materials and high-permeability metal, wherein the left side and the right side of the rectangular frame are respectively provided with a winding coil, one side of the winding coil is provided with an exciting coil, the other side of the winding coil is provided with an induction coil, the part of the rectangular frame only wound with the exciting coil is made of magnetostrictive materials, and the rest part of the rectangular frame is mainly made of high-permeability metal;
the driving body of the driving part is positioned at the left lower side or the right lower side of the square frame of the sensing part and is aligned with one side of the rectangular frame.
9. The magnetostrictive material based self-sensing driver according to claim 1, wherein the driving part consists essentially of a driving body wrapped with a driving coil, wherein the driving body consists essentially of a magnetostrictive rod;
the sensing body of the sensing part is divided into two parts, each part is respectively wound with a coil, one is an exciting coil, and the other is an induction coil; one part of the sensor body is a rod mainly composed of magnetostrictive materials and high-permeability metal, wherein the part wound with the coil is made of magnetostrictive materials; the other part of the sensor comprises a C-shaped high-permeability metal ring, a through hole with the diameter equivalent to that of the rod-shaped part of the sensor is arranged on the upper side of the opening part of the C-shaped high-permeability metal ring, and the rod-shaped part of the sensor penetrates through the through hole; a coil is wound on the C-shaped high-magnetic-permeability metal ring;
the driving body of the driving part is positioned at the left lower side or the right lower side of the rectangular frame of the sensing part and is aligned with one side of the rectangular frame.
10. A self-sensing driver based on magnetostrictive material is characterized by comprising a driving part and a sensing part; wherein the driving part includes a driving coil and a driving body; the sensing part comprises an exciting coil, an induction coil and a sensing body;
the driving part mainly comprises a driving body wound with a driving coil, wherein the driving body mainly comprises a magnetostrictive rod;
the sensing body of the sensing part is divided into two parts, each part is respectively wound with a coil, one is an exciting coil, and the other is an induction coil; the sensor comprises a sensor body, a coil winding and a magnetic field generating device, wherein one part of the sensor body is a rod mainly composed of high-permeability metal and low-permeability metal, the upper part of the rod-shaped part of the sensor body is mainly composed of low-permeability metal, the lower part of the rod-shaped part of the sensor body is mainly composed of high-permeability metal, and the coil winding is wound on the part of the rod-shaped part of the sensor body composed of high-permeability metal; the other part of the sensor comprises a C-shaped high-magnetic-permeability metal ring, the upper side and the lower side of the opening part of the C-shaped high-magnetic-permeability metal ring are respectively provided with a through hole with the diameter equivalent to that of the rod-shaped part of the sensor, the rod-shaped part of the sensor penetrates through the through hole, and the low-magnetic-permeability metal rod penetrates through the through hole on the upper side of the C-shaped high-magnetic-permeability metal ring and is in contact with the high-magnetic-permeability metal rod at the end face of the C-shaped high-magnetic; a coil is wound on the C-shaped high-magnetic-permeability metal ring;
the driving body of the driving part is positioned at the left lower side or the right lower side of the rectangular frame of the sensing part and is aligned with one side of the rectangular frame;
after the driving coil inputs a driving signal, the driving body generates a magnetostrictive effect under the action of the driving signal, and the driving body extends or shortens to enable the driving part to output displacement and force;
after the exciting coil inputs the exciting signal, the induction coil outputs an induction signal V under the action of the exciting signal1(ii) a After the sensing part is impacted by the driving part, the low-magnetic-permeability metal rod moves upwards, the high-magnetic-permeability metal rod below the sensing part replaces the low-magnetic-permeability metal rod to form a part of magnetic circuit, the magnetic field of the sensing body changes, and the sensing signal output by the sensing coil of the sensing part changes into V2(ii) a The displacement and force of the drive part are detected by measuring the signal change V (delta) output by the induction coil, wherein V (delta) is V1-V2And δ is a detection variable.
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