CN110211911A - Incorporate the high-precision support plate device of needle plate structure - Google Patents
Incorporate the high-precision support plate device of needle plate structure Download PDFInfo
- Publication number
- CN110211911A CN110211911A CN201910573548.8A CN201910573548A CN110211911A CN 110211911 A CN110211911 A CN 110211911A CN 201910573548 A CN201910573548 A CN 201910573548A CN 110211911 A CN110211911 A CN 110211911A
- Authority
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- China
- Prior art keywords
- needle plate
- support plate
- several
- pedestal
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 25
- 230000006978 adaptation Effects 0.000 claims abstract description 5
- 239000000523 sample Substances 0.000 claims description 23
- 238000012360 testing method Methods 0.000 abstract description 16
- 238000010586 diagram Methods 0.000 description 3
- 238000004880 explosion Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Measuring Leads Or Probes (AREA)
Abstract
The present invention is intended to provide a kind of structure is simple, practical, measuring accuracy is high and can be suitably used for the high-precision support plate device for the involvement needle plate structure that pin mark is tested apart from small chip product.The present invention includes pedestal and the positioning component that adaptation is mounted on the pedestal, the pedestal is equipped with movable chamber and the needle plate component in the movable chamber, the pushing block that the positioning component is equipped with locating slot and is slidably fitted on the positioning component, the inside of the positioning component is equipped with the support plate being equipped with above the needle plate component, and the pushing block and the support plate match setting with the locating slot.The present invention is applied to the technical field of chip testing.
Description
Technical field
The present invention relates to a kind of carrying board structure, in particular to a kind of high-precision support plate device for incorporating needle plate structure.
Background technique
It in chip manufacturing process, needs to test chip, in the test of small-size chips, due to small size
Apart from small, contraposition is difficult to control the pin mark of chip, generally uses manual testing, and testing efficiency is low, and rework rate is high；Although
There are chip testing devices, and but its structure is complex, volume is big and can not accurately complete survey to pin mark apart from small chip
Examination.
Summary of the invention
It is simple, practical the technical problem to be solved by the present invention is to overcome the deficiencies of the prior art and provide a kind of structure
Property it is strong, measuring accuracy is high and can be suitably used for the high-precision support plate for the involvement needle plate structure that pin mark is tested apart from small chip product
Device.
The technical scheme adopted by the invention is that: the present invention includes pedestal and the positioning that adaptation is mounted on the pedestal
Component, the pedestal are equipped with movable chamber and the needle plate component in the movable chamber, and the positioning component is equipped with positioning
Slot and the pushing block being slidably fitted on the positioning component, the inside of the positioning component, which is equipped with, to be equipped in the needle plate group
Support plate above part, the pushing block and the support plate match setting with the locating slot.
By above scheme as it can be seen that by pushing the pushing block, so that the spring being connected with the pushing block is compressed, then
Product is placed on the locating slot, the support plate forms support to the bottom of product at this time, is pushed by spring reset
The pushing block, so that product orientation on the positioning component, is moved upwards, so that the needle by the driving needle plate component
Probe on board group part is in contact with product, and the test data of final products is transferred to computer via the needle plate component, thus
The test to product is completed, so, the present invention reduces occupied space and realization by being arranged needle plate structure on support plate device
Test to pin mark apart from small chip product, the present apparatus have that structure is simple, manufacturing cost is low and measuring accuracy is high
Feature.
One preferred embodiment is that several guide posts are equipped at the top of the pedestal, and the base bottom is equipped with several guide sleeves.
By above scheme as it can be seen that the setting of the guide post and the guide sleeve guarantees to finish for the contraposition with other structures
The accuracy of structure preciseness and test.
One preferred embodiment is, the positioning component includes fixed block and the locating piece that is adapted to the fixed block, described
The arc-shaped edges of fixed block bottom are equipped with the first arc panel, and the arc-shaped edges of the locating piece bottom are equipped with the second arc panel, institute
Positioning component is stated to be threaded on the pedestal by first arc panel and second arc panel.
By above scheme as it can be seen that the positioning component is threadedly coupled by first arc panel and second arc panel
On the pedestal, i.e., the described positioning component be removable design, by replace positioning component, thus realize it is various sizes of fixed
Position slot adapts to corresponding chip product, and the practicality is high.
One preferred embodiment is that the fixed block is equipped with sliding groove, and the pushing block is slidably fitted on the sliding groove.
By above scheme as it can be seen that by applying thrust and pulling force to the pushing block, so that the pushing block is in the sliding groove
It is upper reciprocating, and cooperate the limit of the locating slot, to realize the fixation to chip product, good positioning effect.
One preferred embodiment is that the bottom of the fixed block is equipped with the first groove, and the bottom of the locating piece is equipped with
Second groove, first groove and second groove form cavity, and the cavity is adapted with the needle plate component, described
Support plate is set on the cavity.
By above scheme as it can be seen that the support plate is mounted on the cavity, the occupied space of the present apparatus is reduced, and is realized
Support force is formed to chip product.
One preferred embodiment is that the fixed block is equipped with spring mounting groove and the fixation in the spring mounting groove
Spring, the fixed spring are connected with the tail end of the pushing block.
By above scheme as it can be seen that by pushing the pushing block so that the fixed spring is compressed, when product be placed on it is described
When on locating slot, the fixed spring resets, so that the fixed spring applies thrust to the pushing block, to push away described in realizing
Block fixes product.
One preferred embodiment is, the needle plate component includes that PCB adapter board, adaptation are mounted in the PCB adapter board
Needle plate, the mounting blocks on the needle plate and several be set to the probe on the mounting blocks, the PCB adapter board
Several switching needles are fixedly connected on bottom.
By above scheme as it can be seen that by applying upward thrust to the needle plate component, so that the needle plate component is toward institute
The movement of support plate direction is stated, so that the probe is in contact with the pin mark of chip product, to complete the test of chip product, is surveyed
It tries data and computer for analysis is transferred to by the switching needle in the PCB adapter board.
One preferred embodiment is that the PCB adapter board is aligned by several positioning pins and the needle plate, and institute
It states PCB adapter board and is fixedly connected by several screws with the needle plate.
By above scheme as it can be seen that the PCB adapter board and the needle plate pass through the positioning finger setting and pass through the spiral shell
Silk is fixedly mounted with, of a tightly knit structure, and the precision of test is effectively ensured.
One preferred embodiment is that the support plate is equipped with supporting block and several are provided with the probe in the supporting block
The bottom in hole, the supporting block is equipped with alignment grooves compatible with the mounting blocks, and the probe aperture is connected with the alignment grooves
Logical, several described probe apertures and several described probes correspond.
By above scheme as it can be seen that when the needle plate component up moves, the probe and the mounting blocks are with the needle
Board group part moves upwards, and during this, the mounting hole carries out guide and limit by the alignment grooves, enables the probe standard
It really passes through the probe aperture and is finally in contact with the pin mark of chip product.
One preferred embodiment is that the bottom of the support plate is equipped with several spring grooves, is equipped on the top of the needle plate
Several and the one-to-one reset spring of the spring groove.
By above scheme as it can be seen that when completing chip testing, the setting of the reset spring, for answering for the needle plate component
Position provides power.
Detailed description of the invention
Fig. 1 is structural schematic diagram of the invention；
Fig. 2 is cross-sectional view of the invention；
Fig. 3 is perspective view of the explosion of the invention；
Fig. 4 is the structural schematic diagram of the support plate
Fig. 5 is the structural schematic diagram of the needle plate component；
Fig. 6 is the perspective view of the explosion of the needle plate component.
Specific embodiment
As shown in Figures 1 to 6, in the present embodiment, the present invention includes that pedestal 1 and adaptation are mounted on the pedestal 1
Positioning component 2, several guide posts 8 are equipped at the top of the pedestal 1,1 bottom of pedestal is equipped with several guide sleeves 9, the base
Seat 1 is equipped with movable chamber 3 and the needle plate component 4 in the movable chamber 3, and the positioning component 2 is equipped with locating slot 5 and slides
Pushing block 6 of the dynamic cooperation on the positioning component 2, the inside of the positioning component 2, which is equipped with, to be equipped in the needle plate component 4
The support plate 7 of top, the pushing block 6 and the support plate 7 match setting with the locating slot 5, in this design, the pushing block 6
It is equipped with fixing groove compatible with product, the support plate 7 forms support, the fixing groove and the positioning to the bottom of product
Product is fixed in the mutual cooperation of slot 5.
The positioning component 2 includes fixed block 10 and the locating piece 11 being adapted to the fixed block 10, the fixed block 10
The arc-shaped edges of bottom are equipped with the first arc panel 12, and the arc-shaped edges of 11 bottom of locating piece are equipped with the second arc panel 13, institute
Positioning component 2 is stated to be threaded on the pedestal 1 by first arc panel 12 and second arc panel 13, it is described solid
Block 10 is determined equipped with sliding groove 14, and the pushing block 6 is slidably fitted on the sliding groove 14, sets on the bottom of the fixed block 10
There is the first groove, the bottom of the locating piece 11 is equipped with the second groove, and first groove and second groove form sky
Chamber 15, the cavity 15 are adapted with the needle plate component 4, and the support plate 7 is set on the cavity 15, on the fixed block 10
Fixed spring equipped with spring mounting groove and in the spring mounting groove, the tail end of the fixed spring and the pushing block 6
It is connected.
The needle plate component 4 includes PCB adapter board 16, is adapted to the needle plate 17 being mounted in the PCB adapter board 16, is set to
Mounting blocks 18 on the needle plate 17 and several be set to the probe 19 on the mounting blocks 18, the PCB adapter board 16
Bottom on be fixedly connected with several switching needles 20, the PCB adapter board 16 passes through several positioning pins 21 and the needle plate
17 are aligned, and the PCB adapter board 16 is fixedly connected by several screws with the needle plate 17, in this design, institute
The bottom for stating needle plate component 4 is equipped with guide post and guide sleeve, for aligning with the power source of the needle plate component 4 is pushed.
The support plate 7 is equipped with supporting block 22 and several are provided with the probe aperture 23 in the supporting block 22, described
The bottom of supporting block 22 is equipped with alignment grooves 24 compatible with the mounting blocks 18, the probe aperture 23 and 24 phase of alignment grooves
Connection, several described probe apertures 23 are corresponded with several described probes 19, in this design, on the top of the support plate 7
The guide pin 26 for being used to align with the positioning component 2 equipped with several.
The bottom of the support plate 7 is equipped with several spring grooves, be equipped on the top of the needle plate 17 several with it is described
The one-to-one reset spring 25 of spring groove.
The working principle of the invention:
Chip product is placed on the locating slot 5, is supported at this point, the support plate 7 forms chip product, the fixed spring
It is compressed, is resetted by the fixed spring, so that the fixed spring applies thrust to the pushing block 6, so that the pushing block 6
It is slided along the direction of sliding groove 14 toward the chip product, is produced chip by the fixing groove and the locating slot 5
Product are fixed, then by applying the thrust moved upwards to the needle plate component 4, so that the needle plate component 4 is along institute
It states movable chamber 3 to move upwards, during this, the mounting blocks 18 and the probe 19 are with moving upwards, the reset spring
25 are compressed, and the mounting blocks 18 carry out guide and limit by the alignment grooves 24, and the probe 19 is enabled accurately to pass through institute
Probe aperture 23 is stated, is finally in contact with the pin mark of chip product, to complete to test, after completing test, by the pushing block 6
Apply pulling force, so that the pushing block 6 is far from chip product, at this point, chip product can be removed and placed to next chip to be measured
Product, the needle plate component 4 are resetted by the compressed reset spring 25.
The present invention is applied to the technical field of chip testing.
Claims (10)
1. a kind of high-precision support plate device for incorporating needle plate structure, it is characterised in that: it includes that pedestal (1) and adaptation are mounted on
Positioning component (2) on the pedestal (1), the pedestal (1) are equipped with movable chamber (3) and are set in the movable chamber (3)
Needle plate component (4), the pushing block that the positioning component (2) is equipped with locating slot (5) and is slidably fitted on the positioning component (2)
(6), the inside of the positioning component (2) is equipped with the support plate (7) being equipped with above the needle plate component (4), the pushing block
(6) and the support plate (7) matches setting with the locating slot (5).
2. the high-precision support plate device according to claim 1 for incorporating needle plate structure, it is characterised in that: the pedestal (1)
Top is equipped with several guide posts (8), and pedestal (1) bottom is equipped with several guide sleeves (9).
3. the high-precision support plate device according to claim 1 for incorporating needle plate structure, it is characterised in that: the positioning component
It (2) include fixed block (10) and the locating piece (11) being adapted to the fixed block (10), the circular arc of fixed block (10) bottom
Side is equipped with the first arc panel (12), and the arc-shaped edges of locating piece (11) bottom are equipped with the second arc panel (13), described fixed
Hyte part (2) is threaded on the pedestal (1) by first arc panel (12) and second arc panel (13).
4. the high-precision support plate device according to claim 3 for incorporating needle plate structure, it is characterised in that: the fixed block
(10) sliding groove (14) are equipped with, the pushing block (6) is slidably fitted on the sliding groove (14).
5. the high-precision support plate device according to claim 3 for incorporating needle plate structure, it is characterised in that: the fixed block
(10) bottom is equipped with the first groove, and the bottom of the locating piece (11) is equipped with the second groove, first groove and institute
It states the second groove and forms cavity (15), the cavity (15) is adapted with the needle plate component (4), and the support plate (7) is set to institute
It states on cavity (15).
6. the high-precision support plate device according to claim 3 for incorporating needle plate structure, it is characterised in that: the fixed block
(10) spring mounting groove and the fixed spring in the spring mounting groove, the fixed spring and the pushing block are equipped with
(6) tail end is connected.
7. the high-precision support plate device according to claim 1 for incorporating needle plate structure, it is characterised in that: the needle plate component
(4) include PCB adapter board (16), be adapted to the needle plate (17) being mounted on the PCB adapter board (16), be set to the needle plate (17)
On mounting blocks (18) and several be set to the probe (19) on the mounting blocks (18), the PCB adapter board (16)
Several switchings needle (20) are fixedly connected on bottom.
8. the high-precision support plate device according to claim 7 for incorporating needle plate structure, it is characterised in that: the PCB switching
Plate (16) is aligned by several positioning pins (21) with the needle plate (17), and the PCB adapter board (16) is if pass through
A dry screw is fixedly connected with the needle plate (17).
9. the high-precision support plate device according to claim 7 for incorporating needle plate structure, it is characterised in that: the support plate (7)
It is equipped with supporting block (22) and several is provided with the probe aperture (23) on the supporting block (22), the supporting block (22)
Bottom is equipped with compatible alignment grooves (24), the probe aperture (23) are connected with the alignment grooves (24) with the mounting blocks (18)
Logical, several described probe apertures (23) and several described probes (19) correspond.
10. the high-precision support plate device according to claim 7 for incorporating needle plate structure, it is characterised in that: the support plate (7)
Bottom be equipped with several spring grooves, it is one-to-one with the spring groove to be equipped with several on the top of the needle plate (17)
Reset spring (25).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910573548.8A CN110211911A (en) | 2019-06-28 | 2019-06-28 | Incorporate the high-precision support plate device of needle plate structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910573548.8A CN110211911A (en) | 2019-06-28 | 2019-06-28 | Incorporate the high-precision support plate device of needle plate structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110211911A true CN110211911A (en) | 2019-09-06 |
Family
ID=67795207
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910573548.8A Pending CN110211911A (en) | 2019-06-28 | 2019-06-28 | Incorporate the high-precision support plate device of needle plate structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110211911A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203241443U (en) * | 2013-05-09 | 2013-10-16 | 金英杰 | Clamp of unpacked chip testing tool |
| CN105182142A (en) * | 2015-10-16 | 2015-12-23 | 苏州赛腾精密电子股份有限公司 | Probe testing device |
| CN207883670U (en) * | 2018-02-08 | 2018-09-18 | 珠海市运泰利自动化设备有限公司 | A kind of high-precision of chip positions fixed module entirely |
| CN209859935U (en) * | 2019-06-28 | 2019-12-27 | 珠海市运泰利自动化设备有限公司 | High-precision carrier plate device integrated with needle plate structure |
-
2019
- 2019-06-28 CN CN201910573548.8A patent/CN110211911A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203241443U (en) * | 2013-05-09 | 2013-10-16 | 金英杰 | Clamp of unpacked chip testing tool |
| CN105182142A (en) * | 2015-10-16 | 2015-12-23 | 苏州赛腾精密电子股份有限公司 | Probe testing device |
| CN207883670U (en) * | 2018-02-08 | 2018-09-18 | 珠海市运泰利自动化设备有限公司 | A kind of high-precision of chip positions fixed module entirely |
| CN209859935U (en) * | 2019-06-28 | 2019-12-27 | 珠海市运泰利自动化设备有限公司 | High-precision carrier plate device integrated with needle plate structure |
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