CN110202226A - A kind of high aspect ratio trench quite processing unit (plant) and method - Google Patents
A kind of high aspect ratio trench quite processing unit (plant) and method Download PDFInfo
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- CN110202226A CN110202226A CN201910426137.6A CN201910426137A CN110202226A CN 110202226 A CN110202226 A CN 110202226A CN 201910426137 A CN201910426137 A CN 201910426137A CN 110202226 A CN110202226 A CN 110202226A
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- 238000000034 method Methods 0.000 title claims abstract description 18
- 239000003792 electrolyte Substances 0.000 claims abstract description 32
- 230000033001 locomotion Effects 0.000 claims abstract description 9
- 238000003801 milling Methods 0.000 claims description 11
- 230000005611 electricity Effects 0.000 claims description 6
- 230000001133 acceleration Effects 0.000 claims description 5
- 238000005452 bending Methods 0.000 claims description 5
- 230000035939 shock Effects 0.000 claims description 4
- 238000003672 processing method Methods 0.000 claims description 3
- 238000005119 centrifugation Methods 0.000 claims description 2
- 238000005868 electrolysis reaction Methods 0.000 abstract description 10
- 241000196324 Embryophyta Species 0.000 description 10
- 238000003754 machining Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 230000007797 corrosion Effects 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 241000208340 Araliaceae Species 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 230000003542 behavioural effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000000571 coke Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 235000008434 ginseng Nutrition 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008450 motivation Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
- 210000003934 vacuole Anatomy 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H11/00—Auxiliary apparatus or details, not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H5/00—Combined machining
- B23H5/06—Electrochemical machining combined with mechanical working, e.g. grinding or honing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H5/00—Combined machining
- B23H5/10—Electrodes specially adapted therefor or their manufacture
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H5/00—Combined machining
- B23H5/14—Supply or regeneration of working media
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H9/00—Machining specially adapted for treating particular metal objects or for obtaining special effects or results on metal objects
- B23H9/008—Surface roughening or texturing
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Abstract
The present invention provides a kind of high aspect ratio trench quite processing unit (plant) and method, including machine tool main body, workpiece anode, anode drive mechanism, tool cathode, cathode driving mechanism, the spherical surface ultrasonic focusing system being connected with the tool cathode, electrolysis power is axially disposed at the cathode through-hole and electrolyte circulation system of tool cathode position of center line.The electrolyte of the electrolyte circulation system impacts the finished surface of the workpiece anode from the cathode through-hole high speed ejection, the electrolysis power is powered, the cathode driving mechanism drives the tool cathode movement, the anode drive mechanism drives the workpiece anode movement, the tool cathode carries out micro-structure processing to the workpiece anode, ultrasonic energy is focused on the narrow region in work pieces process face by the spherical surface ultrasonic focusing system, required groove structure easily and efficiently can be processed in workpiece surface, realize the processing of high aspect ratio trench quite.
Description
Technical field
The present invention relates to milling technology field more particularly to a kind of high aspect ratio trench quite processing unit (plant) and methods.
Background technique
When pipe electrode is electrolysed Milling Process high aspect ratio trench quite, since processing gap is smaller and pipe electrode internal diameter is smaller,
So that Joule heat, bubble, non-conductive insoluble product that Electrolyzed Processing generates easily are jammed in processing gap, cause electrolyte
Conductivity changes, and causes electrolyte to timely update, electrolysate discharge difficulty, so that processing uniformity, stability decline
The problems such as.When pipe electrode is electrolysed Milling Process, machining area edge is dissolved under low current density, causes slot wedge spuious
Corrosion.And in electrode Milling Processes, electrolyte jet stream sprays impact to workpiece machining surface, with workpiece material
Dissolution and the variation of groove structure size, electrolyte are reflected onto the undressed area of workpiece surface when flowing along slot negative camber, draw
Dispersion corrosion is played, groove processing locality and machining accuracy are reduced.
Summary of the invention
Technical problem solved by the invention is to provide a kind of high aspect ratio trench quite processing unit (plant) and method.
In order to solve the above technical problems, the present invention provides a kind of high aspect ratio trench quite processing unit (plant), including machine tool main body, if
The workpiece anode being placed in the machine tool main body drives the workpiece anode to drive in the mobile anode of X-axis, Y-axis and Z-direction
Motivation structure, the tool cathode being set to above the workpiece anode, drives the tool cathode in X-axis, Y-axis and Z-direction
Mobile cathode driving mechanism, the spherical surface ultrasonic focusing system being connected with the tool cathode, be connected to the tool cathode and
Electrolysis power between the workpiece anode is axially disposed at the cathode through-hole of the tool cathode position of center line, and
The electrolyte circulation system being connected to the cathode through-hole.
Further, the tool cathode includes micro-electrode and the insulation that is set on the micro-electrode lateral wall
Layer, the cathode through-hole are set to the center of the micro-electrode.
Further, the spherical surface ultrasonic focusing system include the longitudinal vibration amplitude transformer being connected with the tool cathode, with
It the connected single-excitation ultrasonic oval vibration energy converter of the longitudinal vibration amplitude transformer, the ultrasonic power being connected with the single-excitation ultrasonic oval vibration energy converter and sets
It is placed in the bending vibration spherical shell of longitudinal vibration amplitude transformer bottom, the position of center line of the longitudinal vibration amplitude transformer is provided with and the yin
The connected luffing rod through-hole of pole through-hole, the electrolyte circulation system are connected with the luffing rod through-hole.
Further, the electrolyte circulation system include electrolytic bath, the centrifugal pump being connected with the electrolytic bath,
The outlet tube for being connected to the centrifugation pump output terminal, the pressure gauge and pressure-control valve, Yi Jishe being set on the outlet tube
The filter being placed at the centrifugal pump inlet, the outlet tube are connected with the luffing rod through-hole.
The present invention also provides a kind of high aspect ratio trench quite processing methods, including high-aspect-ratio ditch described in any one as above
Grooving apparatus the described method comprises the following steps:
A) workpiece anode is placed in the anode drive mechanism of machine tool main body, the electrolyte of the electrolyte circulation system
It is sprayed on the workpiece anode by the cathode through-hole；The cathode driving mechanism drives the tool cathode move, is described
Anode drive mechanism drives the workpiece anode movement, carries out milling to the workpiece anode；
B) it when the workpiece anode surface is left in the tool cathode acceleration, processes and forms very big negative pressure drawn game in gap
Portion's vacuum, so that moment forms microdischarge cavities in electrolyte；
C) when the tool cathode is accelerated close to the workpiece anode surface, the microdischarge cavities are re-closed, and are formed hydraulic
Shock wave；
D) step b) and step c) are repeated repeatedly, mills out high aspect ratio trench quite micro-structure on the workpiece anode.
High aspect ratio trench quite processing unit (plant) of the invention, the electrolyte of the electrolyte circulation system is from the cathode through-hole
High speed ejection impacts the finished surface of the workpiece anode, and the electrolysis power is powered, described in the cathode driving mechanism driving
Tool cathode movement, the anode drive mechanism drive the workpiece anode movement, and the tool cathode is to the workpiece anode
Micro-structure processing is carried out, ultrasonic energy is focused on the narrow region in work pieces process face by the spherical surface ultrasonic focusing system, can be square
Just required groove structure efficiently is processed in workpiece surface, realizes the processing of high aspect ratio trench quite.
Detailed description of the invention
Fig. 1 is the schematic diagram of high aspect ratio trench quite processing unit (plant) of the invention；
Fig. 2 is the structural schematic diagram of high aspect ratio trench quite processing unit (plant) of the invention；
Fig. 3 is the schematic illustration of the spherical surface ultrasonic focusing system of high aspect ratio trench quite processing unit (plant) of the invention；
In the figure, it is marked as machine tool main body 1, workpiece anode 2, industrial CCD camera detection unit 21, voltage sensor 22, electricity
Flow sensor 23, data collecting card 24, anode drive mechanism 3, tool cathode 4, cathode through-hole 41, micro-electrode 42, insulating layer
43, cathode driving mechanism 5, spherical surface ultrasonic focusing system 6, longitudinal vibration amplitude transformer 61, single-excitation ultrasonic oval vibration energy converter 62, ultrasonic power
63, bending vibration spherical shell 64, luffing rod through-hole 65, electrolysis power 7, electrolyte circulation system 8, electrolytic bath 81, centrifugal pump 82,
Outlet tube 83, pressure gauge 84, pressure-control valve 85, filter 86, laser doppler vibrometer 9.
Specific embodiment
Embodiments of the present invention are described below in detail, the example of the embodiment is shown in the accompanying drawings, wherein from beginning
Same or similar element or element with the same or similar functions are indicated to same or similar label eventually.Below by ginseng
The embodiment for examining attached drawing description is exemplary, it is intended to is used to explain the present invention, and is not considered as limiting the invention.
In the following description, structure and working method of the invention in order to clearly demonstrate, will be by many Directional words
Be described, but should by "upper", "lower", "left", "right", "front", "rear", "inner", "outside", " upward ", " downward ", " to
The Word Understandings such as a left side ", " to the right ", " forward ", " backward ", " inside ", " outside " are not construed as limiting for convenience of term
Property word.
As shown in Figures 1 and 2, the present invention provides a kind of high aspect ratio trench quite processing unit (plant), including machine tool main body 1, setting
Workpiece anode 2 in the machine tool main body 1 drives the anode that the workpiece anode 2 is mobile in X-axis, Y-axis and Z-direction
Driving mechanism 3 is set to the tool cathode 4 of 2 top of workpiece anode, drives the tool cathode 4 in X-axis, Y-axis and Z
The mobile cathode driving mechanism 5 of axis direction, the spherical surface ultrasonic focusing system 6 being connected with the tool cathode 4 are connected to the work
Have the electrolysis power 7 between cathode 4 and the workpiece anode 2, is axially disposed at the yin of 4 position of center line of tool cathode
Pole through-hole 41, and the electrolyte circulation system 8 being connected to the cathode through-hole 41.The electrolysis of the electrolyte circulation system 8
Liquid impacts the finished surface of the workpiece anode 2 from 41 high speed ejection of cathode through-hole, and the electrolysis power 7 is powered, described
Cathode driving mechanism 5 drives the tool cathode 4 to move, and the anode drive mechanism 3 drives the workpiece anode 2 to move, institute
It states tool cathode 4 and micro-structure processing is carried out to the workpiece anode 2, the spherical surface ultrasonic focusing system 6 focuses ultrasonic energy
In the region that work pieces process face is narrow, required groove structure easily and efficiently can be processed in workpiece surface, realize high-aspect-ratio
The processing of groove.
Since electrolysis generates the passivating film that thickness is very thin, intensity is far below basis material in workpiece surface, ball is utilized
Ultrasonic focusing system 6 effect of vibration in face can with locality remove workpiece surface processing district passivating film, improve workpiece surface material
Dissolved state, the surface after Damage of Passive Film promptly generate new passivating film due to electrolysis again, prevent further electricity
Solution, the dispersion corrosion effect that high current density usually avoidable in this way generates when being electrolysed, improves micro-structure machining accuracy and processing
Quality.
The tool cathode 4 includes micro-electrode 42 and the insulating layer 43 being set on 42 lateral wall of micro-electrode,
The cathode through-hole 41 is set to the center of the micro-electrode 42.Use rodlike or spherical micro-electrode as described micro-
Thin electrode 42 is connect, in the outside of the subtle electrode 42 with the spherical curve of the spherical surface ultrasonic focusing system 6 vibration spherical shell
The insulating layer 43 is set on wall, the 42 lateral wall stray electrical current of micro-electrode can be greatly reduced in process to micro-
The influence of structure surface quality improves the technological level of micro-electrochemical machining Milling Process micro-structure, improves product quality.
As shown in connection with fig. 3, the spherical surface ultrasonic focusing system 6 includes the longitudinal vibration amplitude transformer being connected with the tool cathode 4
61, the single-excitation ultrasonic oval vibration energy converter 62 being connected with the longitudinal vibration amplitude transformer 61, the ultrasound being connected with the single-excitation ultrasonic oval vibration energy converter 62
Wave power supply 63 and the bending vibration spherical shell 64 for being set to 61 bottom of longitudinal vibration amplitude transformer, the center of the longitudinal vibration amplitude transformer 61
Line position is provided with the luffing rod through-hole 65 being connected with the cathode through-hole 41, the electrolyte circulation system 8 and the luffing
Rod through-hole 65 is connected.According to ultrasonic vibration principle and focus ultrasonic effect, the extensional vibration generated by piezoelectric ceramics is through described vertical
Amplitude transformer 61 of shaking is amplified, and is converted in 6 end face of spherical surface ultrasonic focusing system by compound curved of extensional vibration and radial vibration
Qu Zhendong, the compound vibration of the vibration of bending vibration spherical shell 64 and the 62 median plane extensional vibration of single-excitation ultrasonic oval vibration energy converter composition
It is dynamic to focus on ultrasonic energy field-effect in Milling Process workpiece surface region, wherein La is focal length, and L is burnt section length, and W is coke
Sector width.
The electrolyte circulation system 8 includes electrolytic bath 81, the centrifugal pump 82 being connected with the electrolytic bath 81, connect
In the outlet tube 83 of 82 output end of centrifugal pump, the pressure gauge 84 that is set on the outlet tube 83 and pressure-control valve 85,
And it is set to the filter 86 of 82 inlet of centrifugal pump, the outlet tube 83 is connected with the luffing rod through-hole 65.
As the preferred embodiment of the present invention, the high aspect ratio trench quite processing unit (plant) further includes being set to the spherical surface to surpass
Laser doppler vibrometer 9 at sound focusing system 6.The laser doppler vibrometer 9 is used for On-line testing ultrasonic amplitude, frequency
The parameters such as rate.
The workpiece anode 2 is located at the lower section of the tool cathode 4, is provided with industrial CCD camera at the workpiece anode 2
Detection unit 21.The industrial CCD camera detection unit 21 is CCD camera high-definition, and three-dimensional focusing platform is established
Line video observation system, for observing the microscopic motions behavioural characteristic such as processing district bubble, insoluble product.
Voltage sensor 22 and current sensor 23 are connected between the workpiece anode 2 and the tool cathode 4, it is described
Voltage sensor 22 is connected with data collecting card 24 respectively with the current sensor 23.The voltage sensor 22, the electricity
Flow sensor 23 detects voltage, current signal between the tool cathode 4 and the workpiece anode 2 respectively, is transferred to and is based on
The virtual DSO of PC, virtual oscilloscope are fed back by real-time waveform, determine whether machining state feature, auxiliary judgment are sent out
Whether the abnormalities such as raw short circuit and processing are stable.
The present invention also provides a kind of high aspect ratio trench quite processing methods, including high-aspect-ratio ditch described in any one as above
Grooving apparatus the described method comprises the following steps:
A) workpiece anode 2 is placed in the anode drive mechanism 3 of machine tool main body 1, the electricity of the electrolyte circulation system 8
Solution liquid is sprayed on the workpiece anode 2 by the cathode through-hole 41；The cathode driving mechanism 5 drives the tool cathode 4
Movement, the anode drive mechanism 3 drive the workpiece anode 2 to move, and carry out milling to the workpiece anode 2；
B) when 2 surface of workpiece anode is left in the tool cathode 4 acceleration, formed in processing gap very big negative pressure with
Parital vacuum, so that moment forms microdischarge cavities in electrolyte；
C) when the tool cathode 4 is accelerated close to 2 surface of workpiece anode, the microdischarge cavities are re-closed, and form liquid
Press shock wave；
D) step b) and step c) are repeated repeatedly, mills out high aspect ratio trench quite micro-structure on the workpiece anode 2.
When carrying out micro-electrochemical machining Milling Process by this method, auxiliary spherical surface ultrasonic vibration acts on the workpiece cathode
4 carry out Milling Process, and " cavitation " effect of ultrasonic vibration can strengthen the convection current of processing gap electrolyte inside, be conducive to electrolyte
Update and remove electrolysate in time, conducive to the processing of high aspect ratio trench quite." cavitation " effect of ultrasonic vibration, which refers to, works as institute
When stating 4 end face of workpiece cathode and leaving workpiece surface with very big acceleration, very big negative pressure and part are formed in processing gap very
Sky so that in electrolyte moment form microdischarge cavities, when 4 end face of workpiece cathode with very big acceleration close to workpiece surface
When, vacuole re-closes, and causes stronger hydraulic shock wave.Above-mentioned effect promptly, is repeatedly applied to the workpiece yin
In electrolyte between pole 4 and workpiece in minim gap, process can be strengthened significantly, improve groove processing quality.More than
It is described, it is only highly preferred embodiment of the present invention, is not intended to limit the present invention in any form, it is any to be familiar with this field
Technical staff, without departing from the scope of the technical proposal of the invention, using the method content of the disclosure above to skill of the present invention
Art scheme makes many possible changes and modifications, belongs to protective scope of the claims.
Claims (5)
1. a kind of high aspect ratio trench quite processing unit (plant), it is characterised in that: including machine tool main body, be set in the machine tool main body
Workpiece anode drives the anode drive mechanism that the workpiece anode is mobile in X-axis, Y-axis and Z-direction, is set to the work
Tool cathode above part anode drives the cathode driving mechanism that the tool cathode is mobile in X-axis, Y-axis and Z-direction,
The spherical surface ultrasonic focusing system being connected with the tool cathode, the electricity being connected between the tool cathode and the workpiece anode
Power supply is solved, the cathode through-hole of the tool cathode position of center line is axially disposed at, and be connected to the cathode through-hole
Electrolyte circulation system.
2. high aspect ratio trench quite processing unit (plant) as described in claim 1, it is characterised in that: the tool cathode includes fine electricity
Pole and the insulating layer being set on the micro-electrode lateral wall, the cathode through-hole are set to the centre bit of the micro-electrode
It sets.
3. high aspect ratio trench quite processing unit (plant) as claimed in claim 2, it is characterised in that: the spherical surface ultrasonic focusing system packet
Include the longitudinal vibration amplitude transformer being connected with the tool cathode, the single-excitation ultrasonic oval vibration energy converter being connected with the longitudinal vibration amplitude transformer, with it is described
The connected ultrasonic power of single-excitation ultrasonic oval vibration energy converter and the bending vibration spherical shell for being set to longitudinal vibration amplitude transformer bottom, it is described
The position of center line of longitudinal vibration amplitude transformer is provided with the luffing rod through-hole being connected with the cathode through-hole, the electrolyte circulation system
It is connected with the luffing rod through-hole.
4. high aspect ratio trench quite processing unit (plant) as claimed in claim 3, it is characterised in that: the electrolyte circulation system includes
Electrolytic bath, the centrifugal pump being connected with the electrolytic bath, the outlet tube for being connected to the centrifugation pump output terminal, be set to it is described
Pressure gauge and pressure-control valve on outlet tube and the filter being set at the centrifugal pump inlet, the outlet tube and
The luffing rod through-hole is connected.
5. a kind of high aspect ratio trench quite processing method, it is characterised in that: including the height as described in Claims 1-4 any one
Aspect ratio trench processing unit (plant), the described method comprises the following steps:
A) workpiece anode is placed in the anode drive mechanism of machine tool main body, the electrolyte of the electrolyte circulation system passes through
The cathode through-hole is sprayed on the workpiece anode；The cathode driving mechanism drives the tool cathode movement, the anode
Driving mechanism drives the workpiece anode movement, carries out milling to the workpiece anode；
B) when the workpiece anode surface is left in the tool cathode acceleration, it is true that very big negative pressure and part are formed in processing gap
Sky, so that moment forms microdischarge cavities in electrolyte；
C) when the tool cathode is accelerated close to the workpiece anode surface, the microdischarge cavities are re-closed, and form hydraulic shock
Wave；
D) step b) and step c) are repeated repeatedly, mills out high aspect ratio trench quite micro-structure on the workpiece anode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910426137.6A CN110202226A (en) | 2019-05-21 | 2019-05-21 | A kind of high aspect ratio trench quite processing unit (plant) and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910426137.6A CN110202226A (en) | 2019-05-21 | 2019-05-21 | A kind of high aspect ratio trench quite processing unit (plant) and method |
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| CN110202226A true CN110202226A (en) | 2019-09-06 |
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| CN201910426137.6A Pending CN110202226A (en) | 2019-05-21 | 2019-05-21 | A kind of high aspect ratio trench quite processing unit (plant) and method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114309840A (en) * | 2022-01-18 | 2022-04-12 | 苏州科技大学 | Ultrasonic vibration assisted electric spark inverted cone micropore machining device and control method thereof |
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2019
- 2019-05-21 CN CN201910426137.6A patent/CN110202226A/en active Pending
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| CN114309840A (en) * | 2022-01-18 | 2022-04-12 | 苏州科技大学 | Ultrasonic vibration assisted electric spark inverted cone micropore machining device and control method thereof |
| CN114309840B (en) * | 2022-01-18 | 2023-08-29 | 苏州科技大学 | Ultrasonic vibration assisted electric spark back taper micropore machining device and control method thereof |
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