CN110177668B - Curing device - Google Patents

Abstract

According to one embodiment, a curing apparatus is disclosed, comprising: a platform; a light emitting module including a substrate disposed on the stage and a plurality of light emitting elements disposed on the substrate; and a plurality of transparent blocks disposed between the light emitting modules and the stage, wherein the substrate includes a plurality of first portions and a plurality of second portions, the plurality of first portions and the plurality of second portions are disposed in a first direction, an interval in the first direction between the light emitting elements disposed in the first portions is smaller than an interval in the first direction between the light emitting elements disposed in the second portions, and the plurality of transparent blocks are disposed on the first portions.

Description

Curing device

Technical Field

The present application relates to an ultraviolet curing apparatus.

Background

In general, an apparatus for curing or adhering a curing target by irradiating the curing target with ultraviolet light is called an ultraviolet curing apparatus. In this case, the curing target may be a uv-curable paint, an adhesive, or an opaque material.

Mercury ultraviolet lamps, halogen lamps, and the like may be used as the light source for generating ultraviolet light for the ultraviolet curing apparatus. However, the problem is that these lamps are inefficient and expensive.

An ultraviolet Light Emitting Diode (LED) may be used as a light source of the ultraviolet curing apparatus. The ultraviolet LED has the advantages of high efficiency, relatively low cost and long service life.

However, since a plurality of ultraviolet LEDs are provided, irradiance uniformity is an important issue.

Disclosure of Invention

Embodiments are directed to providing ultraviolet curing apparatus with improved irradiance uniformity.

Embodiments are also directed to providing an ultraviolet curing device capable of preventing a reduction in irradiance uniformity according to a temperature variation of a light emitting element.

The problem to be solved in the embodiments is not limited to the above-described problem, and also includes objects and effects that can be determined from the solutions and embodiments of the problems described below.

One aspect of the present invention provides a curing apparatus comprising a platform; the light emitting module comprises a substrate and a plurality of light emitting elements, wherein the substrate is arranged on the platform, and the plurality of light emitting elements are arranged on the substrate; and a plurality of transparent blocks disposed between the light emitting module and the stage, wherein the substrate includes a plurality of first portions and a plurality of second portions, the plurality of first portions and the plurality of second portions are disposed in a first direction, an interval of the light emitting elements disposed in the first portions in the first direction is narrower than an interval of the light emitting elements disposed in the second portions in the first direction, and the plurality of transparent blocks are disposed in the first portions.

The plurality of transparent blocks may extend in a direction perpendicular to the first direction.

A plurality of transparent blocks may be disposed in the first portion.

The plurality of first portions and the plurality of second portions may be alternately arranged in the first direction.

The plurality of first portions and the plurality of second portions may extend in a second direction perpendicular to the first direction.

The substrate may include a plurality of third portions and a plurality of fourth portions, the plurality of third portions and the plurality of fourth portions being disposed in a second direction perpendicular to the first direction, and intervals of the light emitting elements disposed in the third portions in the second direction may be narrower than intervals of the light emitting elements disposed in the fourth portions in the second direction.

Each of the plurality of fourth portions may be disposed between two third portions disposed on an edge of the substrate.

The plurality of third portions and the plurality of fourth portions may extend in the first direction.

The substrate may include a fifth region in which the first portion and the third portion intersect, and the number of the plurality of light emitting elements arranged in the fifth region is largest per unit area.

Intervals in the first direction and intervals in the second direction of the plurality of light emitting elements disposed in the fifth region may be the same as each other.

A ratio between an interval of the plurality of light emitting elements disposed in the second portion in the first direction and an interval of the plurality of light emitting elements disposed in the first portion in the first direction may be in a range of 1: 0.62 to 1: 0.83.

A ratio between an interval of the plurality of light emitting elements disposed in the fourth portion in the second direction and an interval of the plurality of light emitting elements disposed in the third portion in the second direction may be in a range of 1: 0.62 to 1: 0.83.

Intervals in the second direction of the light emitting elements disposed in the third section may be narrower than intervals in the second direction of the light emitting elements disposed in the fourth section.

The light emitting element may include: a first light emitting element configured to emit light of a first wavelength range; and a second light emitting element configured to emit light of a second wavelength range different from the first wavelength range, the first light emitting element and the second light emitting element may be alternately disposed in a first direction and a second direction perpendicular to the first direction.

A plurality of transparent blocks may fix a mask pattern of a curing target located on the stage.

Another aspect of the present invention provides a curing apparatus including a stage on which a curing target is disposed, a substrate disposed on the stage and including a plurality of arrangement regions, and a light emitting element disposed in each of the plurality of arrangement regions, wherein the plurality of placement regions are adjacent to an apex of the substrate and include a first placement region, the light emitting elements are arranged in the first arrangement region in the form of the first matrix, rows and columns of the first matrix closest to corresponding vertices among vertices of the substrate are defined as a first row and a first column, an order of the rows and columns is defined as increasing in a direction away from the corresponding vertices, and a spacing distance between two adjacent light emitting elements provided in each of the first arrangement regions decreases as the two adjacent light emitting elements become closer to a corresponding one of the vertices of the substrate.

The plurality of arrangement regions may further include a second arrangement region spaced apart from an apex of the substrate and contacting a side of the substrate, and the light emitting elements are disposed in a second matrix in the second arrangement region.

The spacing distance between two adjacent rows of the first matrix may decrease as the two adjacent rows approach corresponding ones of the substrate vertices.

The separation distance between two adjacent columns of the first matrix may decrease as the two adjacent columns become closer to a corresponding one of the vertices of the substrate.

A first spacing distance between the first and second rows of the first matrix may be shorter than a second spacing distance between the second and third rows; the second spacing distance, the third spacing distance between the third row and the fourth row of the first matrix, the fourth spacing distance between the fourth row and the fifth row of the first matrix may be the same as each other, and the fourth spacing distance may be shorter than the fifth spacing distance between the fifth row and the sixth row of the first matrix.

Each of the separation distances between two adjacent rows selected from the sixth row to the last row of the first matrix may be equal to the fifth separation distance.

A sixth spacing distance between the first column and the second column of the first matrix may be shorter than a seventh spacing distance between the second column and the third column, the seventh spacing distance may be equal to an eighth spacing distance between the third column and the fourth column, the eighth spacing distance may be shorter than a ninth spacing distance between the fourth column and the fifth column of the first matrix, and each of the spacing distances between two adjacent columns selected from the fifth column to the last column of the first matrix may be equal to the ninth spacing distance.

The spacing distances in the first direction between two adjacent rows of the second matrix of each of the second arrangement regions may be the same as each other, and the first direction may be a direction parallel to a side of the substrate adjacent to each of the second arrangement regions.

The row or column of the second matrix in each of the second arrangement regions adjacent to one of the sides of the substrate may be aligned with the row or column of the first matrix in the first arrangement region including the vertex adjacent to one of the sides in the first direction. And the first direction may be a direction parallel to a side of the substrate adjacent to each of the second arrangement regions.

The number of arrangement and the arrangement distance of columns or rows of the second matrix parallel to the second direction may be the same as those of columns or rows of the first matrix parallel to the second direction, and the second direction may be a direction perpendicular to the first direction.

The ratio of the first spacing distance, the second spacing distance, the third spacing distance, the fourth spacing distance, and the fifth spacing distance to a total length of the first arrangement region parallel to a side of the first matrix may be 3.18: 3.85: 5.77.

A ratio of the sixth, seventh, eighth, and ninth spacing distances to a total length of a side of the first arrangement region parallel to the rows of the first matrix may be 3.81: 5.02: 6.58.

A ratio of the first, second, third, fourth, and fifth separation distances may be x 1: x 2: x 3: x 4: x5, x1 may be greater than 0.55 and less than 0.7, each of x2, x3, and x4 may be greater than 0.7 and less than 1, and x5 may be 1.

The ratio of the sixth, seventh, eighth, and ninth spacing distances may be y 1: y 2: y 3: y4, y1 may be greater than 0.5 and less than 0.65, each of y2 and y3 may be greater than 0.65 and less than 1, and y4 may be 1.

The ratio of the arrangement area of the light emitting elements disposed in the plurality of arrangement areas to the surface area of the target area for the curing platform may be in the range of 1: 1.08 to 1: 1.37.

Yet another aspect of the present invention provides a curing apparatus including a stage on which a curing target is disposed, and a light emitting module including a substrate disposed on the stage and including a plurality of arrangement regions in each of which the light emitting elements are alternately disposed, wherein the plurality of arrangement regions include a first arrangement region near a vertex of the substrate, in which the light emitting elements are disposed in a first matrix, a second arrangement region spaced apart from the vertex of the substrate and in contact with a side of the substrate, and a third arrangement region in which the light emitting elements are disposed in a second matrix, the third arrangement region being spaced apart from the vertex of the substrate and in contact with a side of the substrate, the light emitting elements being disposed in a third matrix, wherein rows and columns of the first matrix closest to respective ones of the substrate vertices are defined as a first row and a first column, an order of the rows and columns is defined as sequentially increasing in a direction away from the respective vertices, the rows of the first matrix are divided into: a first-first group including a first row; a first-second group including second to fifth rows; and first-third groups including sixth to last rows; a first spacing distance between the first-first group and the first-second group is shorter than a spacing distance between the first-second group and the first-third group, the first spacing distance is shorter than a spacing distance between two adjacent rows included in the first-second group, and a spacing distance between two adjacent rows included in the first-second group is shorter than a second spacing distance.

The second spacing distance may be equal to a spacing distance between two adjacent rows included in the first-third groups.

The columns of the first matrix may be divided into: a second-first group comprising a first column; a second-second group including a second column and a third column; and second-third groups including fourth to last columns. A third spacing distance between the second-first group and the second-second group may be shorter than a fourth spacing distance between the second-second group and the second-third group, and the third spacing distance may be shorter than a spacing distance between two adjacent columns included in the second-second group.

A spacing distance between two adjacent columns included in the second-third groups may be equal to the fourth spacing distance.

The spacing distances between two adjacent rows of the second matrix may be the same as each other, and the first spacing distance and the second spacing distance may each be shorter than the spacing distance between two adjacent rows of the second matrix.

The spacing distances between two adjacent columns of the second matrix may be the same as each other, and the third spacing distance and the spacing distance between two adjacent columns included in the second-second group may each be shorter than the spacing distance between two adjacent columns of the second matrix.

Yet another aspect of the present invention provides a curing apparatus including a platform having a curing target disposed thereon; a light emitting module including a substrate disposed on the stage and including a first arrangement region, a second arrangement region, and a third arrangement region, and a light emitting element alternately disposed in each of the first arrangement region, the second arrangement region, and the third arrangement region; and a cooling part provided on the light emitting module, wherein each of the first arrangement regions is adjacent to a corresponding one of the first apexes of the substrate, the second arrangement region is spaced apart from the first apexes of the substrate and is in contact with the side of the substrate, the third arrangement region is spaced apart from the first apexes and the side of the substrate, and an arrangement density of the light emitting elements of each of the first arrangement regions provided in the first arrangement regions increases as the light emitting elements approach the corresponding one of the first apexes, and an arrangement density of the light emitting elements of each of the second arrangement regions provided in the second arrangement regions increases as the light emitting elements approach the side, the cooling part including a first cooling block corresponding to the first arrangement region and having a second apex corresponding to the first apexes, each of the first cooling blocks including a first body for introducing a fluid into the first body, a first inlet for introducing a fluid into the first body, and a first outlet, the first outlet is for discharging fluid from the first body, and the first inlet is disposed closer to the second vertex of each first cooling block than the first outlet.

The cooling part may further include second cooling blocks corresponding to the second arrangement region, and each of the second cooling blocks may include a second body, a second inlet for introducing the fluid into the second body, and a second outlet for discharging the fluid from the second body. The second inlet of the second cooling block may be disposed closer to a side of the second cooling block, which corresponds to a side of the substrate, than the second outlet.

The light emitting elements may include first and second light emitting elements alternately arranged, and the first and second light emitting elements may emit ultraviolet light having different wavelengths.

Still another aspect of the present invention provides a curing apparatus, comprising a platform and a light emitting module, wherein the platform is provided with a curing target; a light emitting module including a substrate disposed on the stage and including a plurality of arrangement regions, and a light emitting element disposed in each of the plurality of arrangement regions; a temperature sensor provided in at least one arrangement region of the plurality of arrangement regions and configured to detect temperature information on a first light emitting element arranged in the at least one arrangement region; and a controller configured to set a slope of a driving signal for driving the first light emitting element based on the temperature information.

The controller may set the target value. The controller may change the slope of the driving signal based on the temperature information before the amplitude of the driving signal reaches the target value.

The controller may generate a plurality of driving signals for individually controlling the driving of the light emitting elements according to the arrangement region.

The at least one temperature sensor may comprise a plurality of temperature sensors. Each of the plurality of temperature sensors may be arranged in a corresponding one of the plurality of arrangement regions.

The controller may receive a plurality of pieces of temperature information provided from the plurality of temperature sensors, and set a slope of a corresponding one of the plurality of driving signals based on the plurality of pieces of temperature information.

The controller may decrease the slope of the driving signal based on the plurality of pieces of temperature information during a first period of the driving signal, and the first period may be a period from a time when the light emitting element is turned on to a time when the amplitude of the driving signal reaches a target value.

During the first period, the controller may non-linearly decrease the slope of the driving signal.

The drive signal may be in the form of a drive current.

The controller may maintain the amplitude of the driving signal at a constant target value during the second period, and the second period may be a period from a time when the amplitude of the driving signal reaches the target value to a time when the light emitting element is turned off.

The temperature sensor may include two or more temperature sensors provided in any one of the plurality of arrangement regions spaced apart from each other.

The two or more temperature sensors may include a first temperature sensor disposed in a first region of the at least one arrangement region and a second temperature sensor disposed in a second region of the at least one arrangement region. The first region may be a region adjacent to one corner of the at least one arrangement region, and the second region may be the remaining region other than the first region.

The controller may detect temperature information corresponding to at least one arrangement region based on first temperature information received from the first temperature sensor and second temperature information received from the second temperature sensor.

The controller may calculate an average value of the first temperature information and the second temperature information, and set a slope of a driving signal for driving the light emitting elements arranged in the at least one arrangement region based on the calculated average value.

Yet another aspect of the present invention provides a curing apparatus, comprising a platform, on which a curing target is disposed; a light emitting module including a substrate disposed on the stage and including a plurality of arrangement regions, a first light emitting element and a second light emitting element alternately disposed in each of the plurality of arrangement regions; a temperature sensor provided in at least one arrangement region of the plurality of arrangement regions and configured to detect temperature information on a first light-emitting element arranged in the at least one arrangement region; and a controller configured to set a slope of a driving signal for driving the first light emitting element based on the temperature information; wherein the plurality of arrangement regions include a first arrangement region adjacent to a corner of the substrate and in which the first and second light emitting elements are disposed in a first matrix, and a second arrangement region spaced apart from the corner of the substrate and in which the second light emitting elements are disposed in a second matrix. The rows and columns of one of the corners of the first matrix closest to the substrate are defined as a first row and a first column, the order of the rows and columns is defined as increasing in a direction away from the one corresponding corner, and a separation distance between two adjacent first and second light-emitting elements provided in each of the first arrangement regions decreases as the two adjacent first and second light-emitting elements become closer to the corresponding one of the corners of the substrate.

[ advantageous effects ]

According to embodiments, irradiance uniformity of a curing device may be improved.

Further, according to the embodiment, deterioration in irradiance uniformity due to a temperature gradient caused by the arrangement of the light emitting element can be prevented.

Various advantageous advantages and effects of the present invention are not limited by the detailed description, and are easily understood by the description of the detailed embodiments of the present invention.

Drawings

Fig. 1 is a perspective view of an ultraviolet curing apparatus according to an embodiment.

Fig. 2 is a view illustrating the cooling part, the light emitting module, and the stage shown in fig. 1.

Fig. 3 is a plan view illustrating a light emitting module according to an embodiment of the present invention.

Fig. 4 is a diagram showing the arrangement of the first light emitting element and the second light emitting element in one of the first arrangement regions shown in fig. 3

Fig. 5a is a graph showing the result of irradiance simulation of a light emitting module in which light emitting elements are disposed at regular intervals.

Fig. 5b is a graph showing irradiance uniformity according to the simulation results of fig. 5 a.

Fig. 5c is a graph illustrating irradiance simulation results for a light emitting module according to an embodiment.

Fig. 5d is a graph showing irradiance uniformity according to the simulation results of fig. 5 c.

Fig. 6a is a graph showing dimensions of an irradiance meter for an irradiance measurement simulation of the light emitting module shown in fig. 4.

Fig. 6b is a graph showing the separation distance between the light emitting module shown in fig. 4 and an irradiance meter for irradiance measurement simulation of the light emitting module.

Fig. 6c is a graph illustrating the reflectance of the substrate simulated for irradiance measurement of the light emitting module shown in fig. 4.

Fig. 7a is a graph showing the result of irradiance simulation of the light emitting module in the case where all of the first and second light emitting elements are turned on according to the variation of the separation distance in fig. 6a to 6 c.

Fig. 7b is a graph showing the result of irradiance simulation of the light emitting module in the case where only the second light emitting element is turned on according to the variation of the spacing distance in fig. 6a to 6 c.

Fig. 7c is a graph showing an irradiance simulation result of the light emitting module in the case where only the first light emitting element is turned on according to the variation of the separation distance in fig. 6a to 6 c.

Fig. 8 is a top view of a light emitting module according to another embodiment of the present invention.

Fig. 9 is an enlarged view of a portion of fig. 8.

Fig. 10 is a conceptual diagram of a curing apparatus according to an embodiment of the present invention.

Fig. 11 is a conceptual diagram of a curing apparatus according to another embodiment of the present invention.

Fig. 12 is a result of measuring uniformity of light emitted from the curing device of fig. 11.

Fig. 13 is a top view of a light emitting module according to yet another embodiment of the present invention.

Fig. 14 is an enlarged view of a portion of fig. 13.

Fig. 15 is an exploded perspective view of the cooling part and the support frame shown in fig. 2.

Fig. 16 is an exploded perspective view of the cooling part shown in fig. 15.

Fig. 17a is a perspective view of the cooling block shown in fig. 16.

Fig. 17b is an enlarged view of a portion of fig. 17 a.

FIG. 18 is a bottom perspective view of the cooling block shown in FIG. 17 a.

Fig. 19 is a schematic view illustrating a fluid adjusting part for supplying fluid to the cooling block shown in fig. 17 a.

Fig. 20 is a schematic view showing the arrangement of the inlet and outlet of the cooling block shown in fig. 17 a.

Fig. 21 is a configuration diagram showing an ultraviolet curing apparatus according to another embodiment.

Fig. 22 is a flowchart illustrating a method of controlling a slope of an amplitude of a driving signal of a light emitting module by the controller shown in fig. 21.

Fig. 23 is a diagram illustrating a waveform of a driving signal generated by the method illustrated in fig. 22.

Fig. 24a is a diagram showing a general driving signal of the first light emitting element or the second light emitting element.

Fig. 24b is a graph showing the irradiance of the first light-emitting element or the second light-emitting element according to the drive signal of fig. 24 a.

Detailed Description

Hereinafter, exemplary embodiments of the present invention capable of achieving the above objects will be described with reference to the accompanying drawings.

In the description of the embodiments, when an element is described as being formed "on" or "under" another element, the terms "on. Further, when an element is described as being formed "on" or "under" another element, the description may include the meaning of forming the other element in an upward direction of the element and forming the other element in a downward direction from the element.

Furthermore, as used herein, relational terms such as "first," "second," "upper/upper portion," and "lower/lower portion" may be used solely to distinguish one entity or element from another entity or element without necessarily requiring or implying any physical or logical relationship or order between such entities or elements. Moreover, like reference numerals refer to like parts throughout the description of the figures.

Furthermore, the terms "comprising," "configuring," or "having" specify the presence of stated components, unless otherwise indicated herein, but do not preclude the presence thereof and should be interpreted as further including other components.

Fig. 1 is a perspective view of an ultraviolet curing apparatus according to one embodiment. Fig. 2 is a view illustrating the cooling part, the light emitting module, and the stage shown in fig. 1.

Referring to fig. 1 and 2, the ultraviolet curing device 100 includes a housing 110, a cooling part 120, a transparent plate 125, a support frame 127, a light emitting module 130, a stage 140, and a controller 150.

The ultraviolet curing device 100 may further include a line electrically connecting the controller 150 to the light emitting module 130, and a storage part 115 in which a cooling water supply pipe 160 for supplying cooling water to the cooling part 120 is disposed.

The case 110 may provide a space for accommodating the cooling part 120, the transparent plate 125, the light emitting module 130, and the platform 140.

For example, the housing 110 may be a vacuum chamber. The housing 110 may also serve to prevent ultraviolet light emitted from the light emitting module from leaking to the outside.

The transparent plate 125 may be disposed within the case 110, and upper and lower surfaces of the transparent plate 125 may be disposed in parallel with an upper surface of the platform.

The transparent plate 125 may support the cooling part 120 and the light emitting module 130, and may allow light emitted from the light emitting module 130 to penetrate the transparent plate 125.

The transparent plate 125 may be made of transparent glass or quartz, but the present invention is not limited thereto.

The transparent plate 125 may have an ultraviolet transmittance of 90% to 99%, but the present invention is not limited thereto.

The cooling part 120 may absorb heat generated from the light emitting module 130 to lower the temperature of the light emitting module 130. The support frame 127 may support the cooling part 120 and the light emitting module 130 and be disposed on the transparent plate 125. The cooling portion 120 will be described later.

The light emitting module 130 may emit light having an ultraviolet wavelength range to the stage 140.

The stage 140 may be a region where a curing target is placed or set, and may be disposed to be spaced apart from the light emitting module 130 under the transparent plate 125.

Fig. 3 is a plan view illustrating the light emitting module shown in fig. 2.

Referring to fig. 3, the light emitting module 130 may include a substrate 131 and a plurality of light emitting elements 132 disposed on the substrate 131.

Each of the plurality of light emitting elements 132 may be a Light Emitting Diode (LED).

The plurality of light emitting elements 132 may include first light emitting elements 132a and second light emitting elements 132b, each of the first light emitting elements 132a emitting light of a first wavelength range, and each of the second light emitting elements 132b emitting light of a second wavelength range.

The first and second light emitting elements 132a and 132b may emit ultraviolet light having different wavelengths. For example, the wavelength of light emitted from each of the first light emitting elements 132a may be included in a wavelength range of more than 315nm and less than 375 nm. Further, the wavelength of light emitted from each of the second light emitting elements 132b may be included in a wavelength range of 375nm to 420 nm.

Alternatively, each of the first light emitting elements 132a may emit light having a wavelength of 365nm, and each of the second light emitting elements 132b may emit light having a wavelength of 385 nm.

The wavelengths of the light emitted from the first light emitting elements 132a may be the same as each other, and the wavelengths of the light emitted from the second light emitting elements 132b may be the same as each other.

Since the wavelength of light emitted from the first light emitting element 132a is different from the wavelength of light emitted from the second light emitting element 132b, the light emitting module 130 may implement a wavelength having a plurality of peaks. With the above configuration, multiple wavelengths can be realized to improve curing characteristics of Ultraviolet (UV) resin. In addition, light emitting elements each emitting light having a wavelength of another wavelength range may be additionally provided.

Each of the first and second light emitting elements 132a and 132b may be implemented as an LED chip or an LED package emitting UV light, but the present invention is not limited thereto.

The first and second light emitting elements 132a and 132b may be driven independently of each other. For example, the first light emitting element 132a may be turned on, and simultaneously the second light emitting element 132b may be turned off. Alternatively, the first light emitting element 132a may be turned off and, at the same time, the second light emitting element 132b may be turned on. Alternatively, the first and second light emitting elements 132a and 132b may be simultaneously turned on.

The substrate 131 may be a Printed Circuit Board (PCB) or a metal PCB, but the present invention is not limited thereto.

As shown in fig. 3, the substrate 131 may have a polygonal shape, for example, a quadrangular shape. For example, one surface of the substrate 131 may include first to fourth sides 301 to 304, and may include a vertex between two adjacent sides. Here, one surface of the substrate 131 may be a surface on which the light emitting elements 132 are disposed.

The substrate 131 may include a plurality of arrangement regions P1 to P16 for providing the light emitting elements 132.

For example, the plurality of arrangement regions P1 to P16 may be provided in the form of a matrix composed of rows and columns, but the present invention is not limited thereto.

In fig. 3, the substrate 131 is illustrated as including an arrangement region divided into 16 regions, but the present invention is not limited thereto.

The plurality of arrangement regions P1 to P16 may correspond to a plurality of cooling blocks S1 to S16 of the cooling part 120, which will be described below.

A plurality of first light emitting elements 132a and a plurality of second light emitting elements 132b may be disposed in each of the plurality of arrangement regions P1 through P16 of the substrate 131.

The plurality of arrangement regions P1 to P16 may have the same shape, for example, a quadrangular shape, but the present invention is not limited thereto.

The plurality of arrangement regions P1 to P16 may have the same size, for example, the same area, but the present invention is not limited thereto.

For example, the plurality of arrangement regions P1 to P16 may have the same lateral length, and the plurality of arrangement regions P1 to P16 may have the same longitudinal length.

For example, adjacent arrangement regions among the plurality of arrangement regions P1 to P16 may contact each other, but the present invention is not limited thereto. Alternatively, the plurality of arrangement regions P1 to P16 may be spaced apart from each other at regular intervals.

The plurality of arrangement regions P1 to P16 may include first arrangement regions P1, P4, P13, and P16, second arrangement regions P2, P3, P5, P8, P9, P12, P14, and P15, and third arrangement regions P6, P7, P10, and P11.

The first disposition regions P1, P4, P13, and P16 may each include any one of the vertices E1, E2, E3, or E4 of the substrate 131, or may each be a region adjacent to any one of the vertices.

For example, the first arrangement regions P1, P4, P13, and P16 may each include, or may be adjacent to, any corresponding vertex E1, E2, E3, or E4 of the substrate 131.

The second arrangement regions P2, P3, P5, P8, P9, P12, P14, and P15 may be regions spaced apart from the vertexes E1 to E4 of the substrate 131 and in contact with the sides 301 to 304 of the substrate 131.

The third arrangement regions P6, P7, P10, and P11 may be regions spaced apart from the vertices E1 to E4 and the sides 301 to 304 of the substrate 131.

For example, the first arrangement regions P1, P4, P13, and P16 and the second arrangement regions P2, P3, P5, P8, P9, P12, P14, and P15 may be arranged to surround the peripheries of the third arrangement regions P6, P7, P10, and P11.

The first and second light emitting elements 132a and 132b may be disposed in each of the first arrangement regions P1, P4, P13, and P16 in the form of a first matrix including rows and columns.

The first and second light emitting elements 132a and 132b may be disposed in each of the second arrangement regions P2, P3, P5, P8, P9, P12, P14, and P15 in the form of a second matrix including rows and columns.

The first and second light emitting elements 132a and 132b may be disposed in each of the third arrangement regions P6, P7, P10, and P11 in the form of a third matrix including rows and columns.

For example, the first and second light emitting elements 132a and 132b may be alternately disposed in each of the first arrangement regions P1, P4, P13, and P16 in the row direction and the column direction of the first matrix.

Further, for example, the first and second light emitting elements 132a and 132b may be alternately disposed in each of the second arrangement regions P2, P3, P5, P8, P9, P12, P14, and P15 in the row direction and the column direction of the second matrix.

Further, for example, the first light emitting elements 132a and the second light emitting elements 132b may be alternately disposed in each of the third arrangement regions P6, P7, P10, and P11 in the row direction and the column direction of the third matrix.

The row direction of each of the first to third matrices may be a direction in which rows of the first to third matrices are arranged, and the column direction of each of the first to third matrices may be a direction in which columns of the first to third matrices are arranged.

For example, the row direction may be a direction from the first vertex E1 to the fourth vertex E4 among the vertices E1 to E4 of the substrate 131, the column direction may be a direction from the first vertex E1 to the second vertex E2, and the row direction may be perpendicular to the column direction.

For example, the number of rows of the first to third matrices may be different, and the number of columns of the first to third matrices may be different, but the present invention is not limited thereto.

Alternatively, the number of rows of two matrices selected from the first to third matrices may be identical to each other, and the number of columns of two matrices selected from the first to third matrices may be identical to each other.

The reason why the first light emitting elements 132a and the second light emitting elements 132b are alternately disposed in the row direction and the column direction of each of the first to third matrices is to improve the uniformity of light having a composite wavelength of the light emitting module 100.

In the first arrangement regions P1, P4, P13, and P16, the arrangement of the first light-emitting elements and the second light-emitting elements is as follows.

The order of rows and columns of the first matrix composed of the first light emitting elements and the second light emitting elements arranged in each of the first arrangement regions P1, P4, P13, and P16 may be defined as follows.

The rows and columns closest to corresponding ones of the vertices of the substrate 131 may be defined as first rows and first columns, and the order of the columns and the rows may sequentially increase in a direction away from the respective vertices.

For example, the first row and the first column of the first arrangement region P1 may be the row and the column closest to the first vertex E1, the order of the rows may increase in a direction (e.g., the direction 101a) parallel to the row direction and away from the first vertex E1, and the order of the columns may increase in a direction (e.g., the direction 101b) parallel to the column direction and away from the first vertex E1.

Further, for example, the first row and the first column of the first arrangement region P4 may be the row and the column closest to the fourth vertex E4, the order of the rows may increase in a direction (e.g., the direction 104a) parallel to the row direction and away from the fourth vertex E4, and the order of the columns may increase in a direction (e.g., the direction 104b) parallel to the column direction and away from the fourth vertex E4.

As described above, a first row and a first column may be defined for each of the first arrangement regions P13 and P16, the order of the rows may increase in a direction (e.g., directions 102a and 103a) parallel to the row direction and away from the second vertex E2 and the third vertex E3, and the order of the columns may increase in a direction (e.g., direction 102b) parallel to the column direction and away from the second vertex E2 and the third vertex E3.

Fig. 4 is a diagram showing the arrangement of the first light emitting element and the second light emitting element in one of the first arrangement regions shown in fig. 3.

As shown in fig. 4, in order to improve irradiance uniformity of light generated from the first and second light emitting elements 132a and 132b having the composite wavelength, a spacing distance between two adjacent first light emitting elements 132a and 132b in a row of the first matrix included in each of the first arrangement regions P1, P4, P13, and P16 is as follows.

In the arrangement of the first and second light emitting elements 132a and 132b of the first matrix according to each of the first arrangement regions P1, P4, P13, and P16, a first spacing distance d11 between the first and second rows of the first matrix may be shorter than a second spacing distance d12 between the second and third rows (d11< d 12).

Further, the second spacing distance d12, the third spacing distance d13 between the third row and the fourth row of the first matrix, and the fourth spacing distance d14 between the fourth row and the fifth row of the first matrix may be identical to each other (d12 ═ d13 ═ d 14).

Further, the fourth spacing distance d14 may be shorter than a fifth spacing distance d15 between the fifth and sixth rows of the first matrix (d14< d 15).

Each separation distance (e.g., d16, d 17..) between two adjacent rows selected from the sixth row to the last row of the first matrix may be equal to the fifth separation distance d15(d15 ═ d16 ═ d 17.).

Further, in order to improve the irradiance uniformity of light having a composite wavelength generated from the first and second light-emitting elements 132a and 132b, the spacing distance between two adjacent first light-emitting elements 132a and 132b in the columns of the first matrix included in each of the first arrangement regions P1, P4, P13, and P16 is as follows.

The sixth spacing distance d21 between the first and second columns of the first matrix may be shorter than the seventh spacing distance d22 between the second and third columns (d21< d 22).

Further, the seventh spacing distance d22 may be equal to an eighth spacing distance d23 between the third and fourth columns of the first matrix (d22 ═ d 23).

The eighth spacing distance d23 may be shorter than a ninth spacing distance d24 between the fourth column and the fifth column of the first matrix (d23< d 24).

Each spacing distance (e.g., D25, D26, D27.) between two adjacent columns selected from the fifth column to the last column of the first matrix may be equal to the ninth spacing distance D24(D24 ═ D25 ═ D26 ═ D27.).

A sixth spacing distance d21 between the first and second columns of the first matrix may be less than the first spacing distance d11 between the first and second rows (d21< d 11).

Further, for example, a seventh spacing distance d22 between the second and third columns of the first matrix may be less than a second spacing distance d12 between the second and third rows (d22< d 12).

For example, d 11: d 12: d 13: d 14: d 15: d16 ═ x 1: x 2: x 3: x 4: x 5: x6, x1 may be greater than 0.55 and less than 0.7, x2, x3, and x4 may each be greater than 0.7 and less than 1, and x5 and x6 may each be 1, x2, x3, and x4 may be identical to each other, but the present invention is not limited thereto. Alternatively, x2, x3, and x4 may be different from each other.

In addition, for example, d 21: d 22: d 23: d 24: d25 ═ y 1: y 2: y 3: y 4: y5, y1 may be greater than 0.5 and less than 0.65, y2 and y3 may each be greater than 0.65 and less than 1, y4 and y5 may each be 1, and y2 and y3 may be identical to each other, but the present invention is not limited thereto. Alternatively, y2 and y3 may be different from each other.

For example, d 11: d 12: d 15: 0.58: 0.76: 1 can be satisfied, and d 21: d 22: d 24: 0.55: 0.67: 1.

For example, the ratios between d11, d12, and d15 and the total length of one side of the first arrangement regions P1, P4, P13, and P16, which is parallel to the columns of the first matrix, may be 3.18%, 3.85%, and 5.77%.

Further, for example, the ratios between d21, d22, and d24 and the total length of one side of the first arrangement regions P1, P4, P13, and P16, which is parallel to the rows of the first matrix, may be 3.81%, 5.02%, and 6.58%. The percentages relative to each of d11, d12, d15, d21, d22, and d24 may be values rounded to the three decimal places.

Further, between distances in the first irregularly spaced section of each of the first arrangement regions P1, P4, P13, and P16 in the direction parallel to the columns of the first matrix, the ratio thereof may be in the range of 16% to 17% with respect to the total length of one side of each of the first arrangement regions P1, P4, P13, and P16 parallel to the columns of the first matrix. For example, the first irregularly spaced segments may be segments that include spacing distances, each spacing distance being less than d 15.

Further, between distances in the second irregularly spaced section of each of the first arrangement regions P1, P4, P13, and P16 in the direction parallel to the rows of the first matrix, the ratio thereof may be in the range of 12% to 13% with respect to the total length of one side of each of the first arrangement regions P1, P4, P13, and P16 parallel to the rows of the first matrix. For example, the second irregularly spaced segments may be segments that include spacing distances, each spacing distance being less than d 24.

The rows of the first arrangement regions P1, P4, P13, and P16 may be divided into a first-first group G11, a first-second group G12, and a first-third group G13, and the columns of the first arrangement regions P1, P4, P13, and P16 may be divided into a second-first group G21, a second-second group G22, and a second-third group G23.

For example, the first-first group G11 may include a first row of the first matrix, the first-second group G12 may include second to fifth rows of the first matrix, and the first-third group G13 may include sixth to last rows of the first matrix.

Also, for example, the second-first group G21 may include a first column of the first matrix, the second-second group G22 may include a second column and a third column of the first matrix, and the second-third group G23 may include a fourth column to a last column of the first matrix.

A separation distance between two adjacent first groups selected from the first groups (e.g., G11, G12, G13.....) may become shorter toward an apex of the substrate 131 corresponding to the first arrangement region.

For example, the spacing distance between two adjacent first groups may be a spacing distance in a direction parallel to the row direction.

For example, the first spacing distance d11 between the first-first group G11 and the first-second group G12 may be shorter than the fifth spacing distance d15 between the first-second group G12 and the first-third group G13.

Further, the first separation distance d11 may be shorter than each of the separation distances d12, d13, and d14 between two adjacent rows included in the first-second group G12.

Further, for example, each of the spacing distances d12, d13, and d14 included between two adjacent rows in the first-second group G12 may be shorter than the fifth spacing distance d 15.

Further, for example, the fifth spacing distance d5 may be equal to a spacing distance between two adjacent rows included in the first-third group G13.

A spacing distance between two adjacent second groups selected from the second groups (e.g., G21, G22, G23..) may become shorter toward a vertex of the substrate corresponding to the first arrangement region. For example, the spacing distance between two adjacent second groups may be a spacing distance in a direction parallel to the column direction.

For example, the sixth separation distance d21 between the second-first group G21 and the second-second group G22 may be shorter than the ninth separation distance d24 between the second-second group G22 and the second-third group G23.

Further, the sixth spacing distance d21 may be shorter than each of the spacing distances d22 and d23 between two adjacent columns included in the second-second group G22.

Also, for example, each of the spacing distances d25, d26, and d27 between two adjacent columns included in the second-third group G23 may be equal to the ninth spacing distance d 24.

The arrangement of the first light-emitting element and the second light-emitting element in each of the second arrangement regions P2, P3, P5, P8, P9, P12, P14, and P15 is as follows.

The spacing distances between two adjacent rows of the second matrix in each of the second arrangement regions P2, P3, P14, and P15 in the first direction may be the same as each other.

Further, the spacing distances between two adjacent columns of the second matrix in each of the second arrangement regions P5, P8, P9, and P12 in the first direction may be the same as each other.

The first direction may be a direction parallel to one side surface of the substrate 131 adjacent to each of the second arrangement regions P2, P3, P5, P8, P9, P12, P14, and P15.

For example, the first direction with respect to the second arrangement regions P2 and P3 may be a direction parallel to the first side 301 of the substrate 131 adjacent to the second arrangement regions P2 and P3.

The column or row of the second matrix in each of the second arrangement regions adjacent to one of the sides 301 to 304 of the substrate 131 may correspond to or be aligned with the column or row of the first matrix in the first arrangement region including the vertex adjacent to the one side in the first direction.

For example, the column of the second matrix in each of the second arrangement regions P2 and P3 adjacent to the first side 301 may be aligned with the column of the first matrix in the first arrangement regions P1 and P4, which first arrangement regions P1 and P4 include vertices E1 and E4 adjacent to the first side 301 in the first direction.

Further, for example, rows of the second matrix in each of the second arrangement regions P8 and P12 adjacent to the second side 302 may be aligned with rows of the first matrix in the first arrangement regions P4 and P16, the first arrangement regions P4 and P16 including vertices E4 and E4 adjacent to the second side 302 in the first direction.

Further, for example, the arrangement distance and the number of arrangements of the columns or rows of the second matrix parallel to the second direction may be the same as those of the columns or rows of the first matrix parallel to the second direction. The second direction may be a direction perpendicular to the first direction.

For example, in each of the second arrangement regions adjacent to one side of the substrate 131, a spacing distance between two adjacent columns or two adjacent rows of the second matrix parallel to the second direction may be equal to a spacing distance between two columns corresponding to two adjacent columns of the second matrix among columns of the first matrix in the first arrangement region including the vertex adjacent to the one side.

For example, a spacing distance between the first and second columns of the second matrix in each of the second arrangement regions P2 and P3 may be equal to a sixth spacing distance d21 between the first and second columns of the first matrix in the first arrangement region P1.

Further, a spacing distance between the first and second rows of the second matrix in each of the second arrangement regions P5 and P9 may be equal to a first spacing distance d11 between the first and second rows of the first matrix in the first arrangement region P1. As described above, the spacing distance between two adjacent columns or adjacent rows of each of the other arrangement regions may also be equal to the spacing distance between two adjacent columns or adjacent rows of each of the respective first arrangement regions.

A spacing distance between two adjacent rows or columns parallel to the second direction of the second matrix in each second arrangement region adjacent to one side surface of the substrate 131 may decrease toward the one side surface.

In the third arrangement regions P6, P7, P10, and P11, the first light emitting elements 132a and the second light emitting elements 132b may be disposed at regular intervals in a direction parallel to the row direction and in a direction parallel to the column direction.

For example, the spacing distances between two adjacent rows selected from the rows of the third matrix may be the same as each other. Further, for example, the spacing distances between two adjacent columns selected from the columns of the third matrix in the direction parallel to the column direction may be the same as each other.

The order of rows of the second matrix in each of the second arrangement regions P2, P3, P5, P8, P9, P12, P14, and P15, and the order of rows of the third matrix in each of the third arrangement regions P6, P7, P10, and P11 may be defined to increase in a direction from left to right, and the order of columns of the second matrix and the order of columns of the third matrix may be defined to increase in a direction from top to bottom.

A spacing distance between a row of the first matrix in the first arrangement region and a row of the second matrix in the second arrangement region adjacent to the first arrangement region may be equal to a spacing distance between two adjacent rows of the second matrix in the second arrangement region.

For example, a spacing distance between the last row of the first matrix in the first arrangement region P1 and the first row of the second matrix in the second arrangement region P2 adjacent to the first arrangement region P1 may be equal to a spacing distance between two adjacent rows of the second matrix in the second arrangement region P2.

A separation distance between a column of the first matrix in the first arrangement region and a column of the second matrix in the second arrangement region adjacent to the first arrangement region may be equal to a separation distance between two adjacent columns of the second matrix in the second arrangement region.

For example, a spacing distance between the last column of the first matrix in the first arrangement region P1 and the first column of the second matrix in the second arrangement region P5 adjacent to the first arrangement region P1 may be equal to a spacing distance between two adjacent columns of the second matrix in the second arrangement region P5.

A spacing distance between one row of one of the two adjacent second arrangement regions and another row adjacent to the one row in the other second arrangement region may be equal to a spacing distance between two adjacent rows in each second arrangement region.

For example, the spacing distance between the last row of the second arrangement region P2 and the first row of the second arrangement region P3 may be equal to the spacing distance between two adjacent rows in each of the second arrangement regions P2 and P3.

A separation distance between one column of one of the two adjacent second arrangement regions and another column adjacent to the one column in the other second arrangement region may be equal to a separation distance between two adjacent columns in each second arrangement region.

For example, the spacing distance between the last row of the second arrangement region P5 and the first row of the second arrangement region P9 may be equal to the spacing distance between two adjacent rows in each of the second arrangement regions P5 and P9.

A spacing distance between a row of the second matrix in the second arrangement region and a row of the third matrix in a third arrangement region adjacent to the second arrangement region may be equal to a spacing distance between two adjacent rows of the third matrix in the third arrangement region.

For example, a spacing distance between the last row of the second matrix in the second arrangement region P5 and the first row in the third arrangement region P6 may be equal to a spacing distance between two adjacent rows in the third arrangement region P6.

A spacing distance between a column of the second matrix in the second arrangement region and a column of the third matrix in the third arrangement region may be equal to a spacing distance between two adjacent columns of the third matrix in the third arrangement region.

For example, a spacing distance between the last column of the second matrix in the second arrangement region P2 and the first column in the third arrangement region P6 adjacent to and in the second arrangement region P2 may be equal to a spacing distance between two adjacent columns in the third arrangement region P6.

A spacing distance between one column of one of the two adjacent third arrangement regions and another column adjacent to the one column in the other third arrangement region may be equal to a spacing distance between the two adjacent columns in each of the third arrangement regions.

A spacing distance between one row of one of the two adjacent third arrangement regions and another row adjacent to the one row in the other third arrangement region may be equal to a spacing distance between two adjacent rows in each of the third arrangement regions.

In fig. 3, the substrate 131 has been shown as being divided into first to third arrangement regions, but the present invention is not limited thereto.

Alternatively, the second and third arrangement regions may be omitted, and the substrate 131 may have the first arrangement region.

Still alternatively, the second arrangement region is omitted, and the substrate 131 may have the first arrangement region and the third arrangement region.

Still alternatively, the third arrangement region is omitted, and the substrate 131 may have the first arrangement region and the second arrangement region.

As described above, in the light emitting module 130 according to the embodiment, the first and second light emitting elements 132a and 132b are densely disposed in the region adjacent to the vertex and the side of the substrate 131, and the first and second light emitting elements 132a and 132b are disposed at regular intervals in the region distant from the vertex and the side of the substrate 131, so that the uniformity of irradiance in the curing region where the curing target is disposed may be improved.

Further, in order to satisfy the target uniformity in the cured region having a size equal to that in this case, the embodiment can reduce the number of light emitting elements required, thereby reducing the area of the light emitting module, as compared with the case where the first and second light emitting elements are disposed on the substrate at regular intervals without distinguishing the first to third arrangement regions.

Fig. 5a is a graph showing a simulation result of irradiance of a light emitting module in which light emitting elements are disposed at regular intervals. Fig. 5b is a graph showing irradiance uniformity according to the simulation results of fig. 5 a. Fig. 5c is a graph representing the simulation result of irradiance of the light emitting module according to the present embodiment. Fig. 5d is a graph showing the uniformity of irradiance according to the simulation results of fig. 5 c.

In fig. 5a and 5c, the surface areas of the curing zones may be equal to each other, the distance between the light emitting module and the curing zone may be equal to 100mm, and the surface area of the target area of the stage 140 for the curing zone may be the same as 1300mm × 1100 mm.

In fig. 5c, the arrangement of the first and second light emitting elements may be set according to the ratio described in fig. 4.

For example, it can satisfy d 11: d 12: d 13: d 14: d 15: d 16: 0.58: 0.76: 1.

For example, d 21: d 22: d 23: d 24: d 25: 0.55: 0.67: 1 can be satisfied.

In fig. 5a, the first and second light emitting elements may be disposed in a matrix of 68 × 80, and an array area (LED array area) of the light emitting elements may be 1500mm × 1307 mm. Here, the surface area of the LED array region may be the surface area of one region of the substrate 131 where the first and second light emitting elements 132a and 132b are disposed.

In fig. 5a, the lateral length of the LED array region is greater than the longitudinal length thereof, but the present invention is not limited thereto.

Alternatively, the lateral length of the LED array area may be equal to its longitudinal length. In this case, a ratio with respect to the arrangement of the first light emitting elements and the second light emitting elements adjacent to each other in the row direction of each of the first arrangement regions P1, P4, P13, and P16 may be equal to a ratio with respect to the arrangement of the first light emitting elements and the second light emitting elements adjacent to each other in the column direction of each of the first arrangement regions P1, P4, P13, and P16.

In another embodiment where the lateral and longitudinal lengths of the LED array regions are the same as each other, the description of the ratio of d11 to d16 may be equally applied to the row and column directions. For example, the arrangement of the first light emitting elements and the second light emitting elements in the row direction and the column direction may satisfy a ratio d 11: d 12: d 13: d 14: d 15: d16 ═ x 1: x 2: x 3: x 4: x 5: x6, x1 may be greater than 0.55 and less than 0.7, x2, x3, and x4 may each be greater than 0.7 and less than 1, and x5 and x6 may each be 1, x2, x3, and x4 may be the same as each other, but the present invention is not limited thereto. Alternatively, x2, x3, and x4 may be different from each other.

For example, when the lateral length and the longitudinal length of the LED array region are the same as each other, the arrangement of the first and second light emitting elements in the row direction and the column direction of the first arrangement regions P1, P4, P13, and P16 may satisfy a ratio of d 11: d 12: d 13: d 14: d 15: d 16: 0.58: 0.76: 1.

Further alternatively, the description of the ratio of d21 to d25 may equally apply to the row and column directions.

For example, in a further embodiment in which the lateral length and the longitudinal length of the LED array region are the same as each other, the arrangement of the first and second light emitting elements in the row direction and the column direction may be d 21: d 22: d 23: d 24: d 25: y 1: y 2: y 3: y 4: y 5.

y1 may be greater than 0.5 and less than 0.65, y2 and y3 may each be greater than 0.65 and less than 1, and y4 and y5 may each be 1, y2 and y3 may be identical to each other, but the present invention is not limited thereto. Alternatively, y2 and y3 may be different from each other.

For example, when the lateral length and the longitudinal length of the LED array region are identical to each other, the arrangement of the first and second light emitting elements in the row direction and the column direction of the first arrangement regions P1, P4, P13, and P16 may satisfy a ratio of d 21: d 22: d 23: d 24: d 25: 0.55: 0.67: 1.

Meanwhile, in fig. 5c, the first and second light emitting elements may be disposed in a matrix of 62 × 74, and the LED array area may be 1344mm × 1146 mm.

"Max" represents the maximum value of irradiance, "Min" represents the minimum value of irradiance, "Avg" represents the average value of irradiance, and "UNI" is represented by 1- { (Max-Min)/(2Avg) }.

Referring to fig. 5c and 5d, the irradiance uniformity in fig. 5c is improved compared to that in fig. 5 a. Therefore, according to the present embodiment, uniformity can be improved as compared with that in fig. 5 a. Further, according to the present embodiment, the number of light emitting elements of the light emitting module for satisfying such uniformity improvement can be reduced by 16% and the LED array area can be reduced by about 20% when compared with the number of light emitting elements in fig. 5 a.

The area ratio S1 of the surface area S1 of the target region to the surface area S2 of the LED array region according to the present embodiment: s2 may be in the range 1: 1.08 to 1: 1.37.

Even if the surface area of the target region varies, the surface area of the LED array region can be freely set according to the above area ratio. Therefore, according to the present embodiment, the surface area of the LED array region can be reduced, and at the same time, the irradiance uniformity can be ensured.

Fig. 6a is a graph showing dimensions of an irradiance meter used for an irradiance measurement simulation of the light emitting module shown in fig. 4, fig. 6b is a graph showing a separation distance between the light emitting module and the irradiance meter used for the irradiance measurement simulation of the light emitting module shown in fig. 4, and fig. 6c is a graph showing a reflectance of a substrate used for the irradiance measurement simulation of the light emitting module shown in fig. 4.

In fig. 4, the power of the first light emitting element 132a may be 1.90W, the power of the second light emitting element 132b may be 2.19W, d11 may be 11 millimeters, d12, d13 and d14 may each be 14.50 millimeters, d15 may be 19mm, d21 may be 10.75mm, d22 and d23 may each be 13mm, and d24 may be 19.50 mm.

Referring to fig. 6a, the light emitting element array including the first and second light emitting elements disposed on the substrate 131 of the light emitting module 130 may have a lateral length of 1355.75mm and a longitudinal length of 1155.50 mm. The irradiance meter 210 may have a transverse length of 1300mm and a longitudinal length of 1100 mm.

Referring to fig. 6b, irradiance may be measured by changing the distance H of the first and second light-emitting elements 132a and 132b of the light-emitting module 130 to the sensing portion of the irradiance meter 210 by 10mm in the range of 50mm to 100 mm.

Referring to fig. 6c, the reflectivity of one surface of the substrate 131, on which the first and second light emitting elements 132a and 132b are disposed, may be 70%. A reflective sidewall 220 may be provided to protrude from one surface of the substrate 131 to surround the periphery of the first and second light emitting elements 132a and 132 b. The reflectivity of the reflective sidewall 220 may be 70%.

Fig. 7a to 7c show irradiance modes of the first and second light-emitting elements shown in fig. 6a to 6cAnd (5) drawing a simulated result. As shown in fig. 7a, the average value of the target irradiance of the light emitting module according to the embodiment may be 500mW/cm²And the uniformity UNI of the target irradiance may be 80% or 90%.

Fig. 7a is a graph showing an irradiance simulation result of the light emitting module in the case where all of the first and second light emitting elements are turned on according to the variation of the spacing distance H of fig. 6a to 6 c.

Fig. 7b is a graph showing the irradiance simulation result of the light emitting module in the case where only the second light emitting element is turned on according to the variation of the spacing distance H of fig. 6a to 6 c.

Fig. 7c is a graph showing an irradiance simulation result of the light emitting module in the case where only the first light emitting element is turned on according to the variation of the spacing distance H of fig. 6a to 6 c.

In the case of each of fig. 7a, 7b and 7c, it can be seen that the uniformity UNI of irradiance satisfies 80% or more when the separation distance H is in the range of 50mm to 100 mm.

Further, in the case of each of fig. 7a, 7b, and 7c, it can be seen that the uniformity UNI of irradiance satisfies 90% or more when the separation distance H is in the range of 50mm to 70 mm.

Further, in the case of each of fig. 7a, 7b, and 7c, it can be seen that uniformity UNI of irradiance satisfies 95% or more when the separation distance H is 50 mm.

Further, in the case of each of fig. 7a, 7b, and 7c, it can be seen that the uniformity Avg/Max of irradiance satisfies 95% or more when the spacing distance H is in the range of 50mm to 100 mm.

Further, in fig. 7a, it can be seen that the average Avg of irradiance of the light emitting module 130 according to the embodiment is 500mW/cm²Or larger.

Fig. 8 is a top view of a light emitting module according to another embodiment of the present invention. Fig. 9 is an enlarged view of a portion of fig. 8.

Referring to fig. 8 and 9, the substrate 131 of the light emitting module may include: a central region CA1 in which a plurality of light emitting elements 132 are disposed, and edge regions EA1, EA2, EA3, and EA4, which surround the central region CA 1.

The central region CA1 may account for 85% to 98% of the total area of the substrate 131. The substrate 131 may include first and third sides 301 and 303 opposite to each other, and second and fourth sides 302 and 304 opposite to each other.

In the plurality of light emitting elements 132 provided in the center region CA1, the intervals B25 and B26 in the second direction (Y-axis direction) may be larger than the intervals B15 or B16 in the first direction (X-axis direction). However, the present invention is not limited thereto, and the intervals B25 and B26 in the second direction may be equal to the intervals B15 and B16 in the first direction. For example, in the plurality of light emitting elements 132 disposed in the center area CA1, the intervals B25 and B26 in the second direction may each be 19.5mm, and the intervals B15 and B16 in the first direction may each be 19.0 mm.

Hereinafter, the first direction (X-axis direction) is defined as a lateral direction and the second direction (Y-axis direction) is defined as a longitudinal direction based on the drawings.

The edge areas EA1, EA2, EA3, and EA4 may include a first edge area EA1, a second edge area EA2, a third edge area EA3, and a fourth edge area EA4, the first edge area EA1 being disposed adjacent to the first side 301 of the substrate 131, the second edge area EA2 being disposed adjacent to the second side 302 of the substrate 131, the third edge area EA3 being disposed adjacent to the third side 303 of the substrate 131, and the fourth edge area EA4 being disposed adjacent to the fourth side 304 of the substrate 131.

The first and third edge areas EA1 and EA3 may extend in the lateral direction, and the second and fourth edge areas EA2 and EA4 may extend in the longitudinal direction.

The widths of the first and third edge areas EA1 and EA3 in the longitudinal direction may be the same as each other, and the widths of the second and fourth edge areas EA2 and EA4 in the lateral direction may be the same as each other.

For example, four columns of the light emitting elements 132 may be continuously disposed in the lateral direction in each of the first and third edge areas EA1 and EA3, and four rows of the light emitting elements 132 may be continuously disposed in the longitudinal direction in each of the second and fourth edge areas EA2 and EA 4. However, the number of the light emitting elements 132 may be appropriately adjusted according to the size of the substrate 131. For example, five columns of the light emitting elements 132 may be disposed in the lateral direction in each of the first and third edge regions EA1 and EA 1. Five rows of light emitting elements 132 may be disposed in the longitudinal direction in each of the second and fourth edge areas EA2 and EA 4.

The interval between the light emitting elements 132 disposed in each of the first to fourth edge regions EA1, EA2, EA3, and EA4 may be smaller than the interval between the light emitting elements 132 disposed in the center region CA 1. With the above configuration, deterioration in irradiance uniformity in each of the edge areas EA1, EA2, EA3, and EA4 can be prevented. That is, since the amount of light superimposed is relatively small and thus the irradiance at the edge is low, the light emitting element 132 may be further provided so that the irradiance can be adjusted generally.

For example, the intervals B21, B22, and B23 of the light emitting elements 132 disposed in the longitudinal direction in each of the first and third edge regions EA1 and EA3 may be narrower than the intervals B24, B25, and B26 of the light emitting elements 132 disposed in the longitudinal direction in the central region CA 1.

Further, the intervals B11, B12, and B13 of the light emitting elements 132 disposed in the lateral direction in each of the second and fourth edge areas EA2 and EA4 may be narrower than the intervals B15 and B16 of the light emitting elements 132 disposed in the lateral direction in the central area CA 1.

For example, the intervals B21, B22, and B23 of the light emitting elements 132 disposed in the longitudinal direction in each of the first and third edge areas EA1 and EA3 may each be 13.5mm, and the intervals B11, B12, and B13 disposed in the transverse direction in each of the second and fourth edge areas EA2 and EA4 may each be 13.5 mm. However, such an interval may be appropriately adjusted according to the size of the substrate 131.

The edge regions EA1, EA2, EA3, and EA4 may include a first corner region VA1, a second corner region VA2, a third corner region VA3, and a fourth corner region VA 4. In the first corner region VA1, the first edge region EA1 intersects the fourth edge region EA4, in the second corner region VA2 the first edge region EA1 intersects the second edge region EA2, in the third corner region VA3 the third edge region EA3 intersects the second edge region EA2, and in the fourth corner region VA4 the third edge region EA3 intersects the fourth edge region EA 4.

The number per unit area of the light emitting elements 132 in each of the first to fourth corner regions VA1, VA2, VA3, and VA4 may be greater than the number per unit area of the light emitting elements 132 in each of the other regions. That is, the light emitting elements 132 may be most densely arranged in the first to fourth corner regions VA1, VA2, VA3, and VA 4.

With the above configuration, low irradiance at the corners of the substrate 131 can be compensated to improve irradiance uniformity. For example, in each of the first to fourth edge regions VA1, VA2, VA3, and VA4, the intervals of the light emitting elements 132 in the lateral direction and the longitudinal direction may be each 13.5 mm. However, these intervals may be appropriately adjusted according to the size of the substrate 131.

The plurality of light emitting elements 132 disposed in the center area CA1 and the edge areas EA1, EA2, EA3, and EA4 of the substrate 131 may include a plurality of first light emitting elements 132a and a plurality of second light emitting element elements 132 b. The plurality of first light emitting elements 132a and the plurality of second light emitting elements 132b may be alternately disposed, but the present invention is not limited thereto. As depicted in fig. 3, the plurality of first light emitting elements 132a and the plurality of second light emitting elements 132b may output light having different UV wavelength ranges. Therefore, like the UV lamp, since a plurality of wavelengths can be realized, the curing performance can be improved.

Fig. 10 is a conceptual diagram of a curing apparatus according to an embodiment of the present invention. Fig. 11 is a conceptual diagram of a curing apparatus according to another embodiment of the present invention. Fig. 12 is a result of measuring uniformity of light emitted from the curing device of fig. 11.

Referring to fig. 10, in the curing apparatus according to an embodiment, the transparent plate 125 may fix the mask pattern 1100. Specifically, a suction channel (not shown) may be formed in the transparent plate 125. The transparent plate 125 may fix the mask pattern 1100 while air is sucked through the suction channel.

Accordingly, all light emitted from the plurality of light emitting elements 132 disposed in the light emitting module 130 may be selectively irradiated according to the mask pattern 1100 to cure the curing object 1000. The curing target 1000 disposed on the stage 140 may be a UV resin layer coated on glass, but the present invention is not limited thereto.

Most of the light emitted from the plurality of light emitting elements 132 passes through the transparent plate 125. Thus, some light loss may occur, but the irradiance is generally reduced so that a relatively uniform irradiance may be achieved.

However, as shown in fig. 11, in the case of a large-area curing apparatus, the mask pattern 1100 may be sucked using the transparent block 126 instead of the transparent plate 125. In the case of a large-area display, the mask pattern 1100 should be increased as the curing target 1000 is increased. Therefore, the transparent plate 125 for fixing the curing target 1000 should also be increased. In this case, it may be effective to use the transparent block 126 instead of enlarging the transparent plate 125 in various ways. For example, when the transparent blocks 126 are disposed at predetermined intervals to fix the mask pattern 1100, the manufacturing cost may be reduced.

The transparent block 126 may be made of transparent glass or quartz, but the present invention is not limited thereto. The transparent block 126 may have an ultraviolet transmittance of 90% to 99%, but the present invention is not limited thereto.

However, when the transparent block 126 is used, a part of the light L2 emitted from the plurality of light emitting elements 132 penetrates the transparent block 126, so that light loss occurs while a part of the light L1 does not penetrate the transparent block. So that no light loss occurs. Therefore, a problem of reduction in irradiance uniformity may occur.

Referring to fig. 12, it can be seen that the irradiance of the light transmitting region U2 and the light transmitting region U1 of the transparent block 126 is not uniform.

Fig. 13 is a top view of a light emitting module according to yet another embodiment of the present invention. Fig. 14 is an enlarged view of a portion of fig. 13.

Referring to fig. 13, the substrate 131 may include a plurality of arrangement regions MT1 for setting the light emitting elements 132. For example, the plurality of arrangement areas MT1 may be provided in the form of a matrix composed of rows and columns, but the present invention is not limited thereto.

In fig. 13, the substrate 131 has been shown to include nine divided arrangement areas MT1, but the present invention is not limited thereto. For example, the substrate 131 may include thirty-six divided arrangement areas MT 1.

A size of each of the arrangement regions MT1 in the first direction (X-axis direction) may be 436mm, and a size thereof in the second direction (Y-axis direction) may be 389 mm. Thus, the substrate 131 may include nine or thirty-six layout regions, each having a transverse dimension of 436mm and a longitudinal dimension of 389 mm. That is, as the size of the substrate 131 increases, the number of arrangement regions may increase. In this case, the surface area of each of the placement areas MT1 may be adjusted as needed.

The arrangement region of the substrate 131 may correspond to the size of a plurality of cooling blocks of a cooling part to be described below. Further, the arrangement area MT1 of the substrate 131 may be equal to the area of a plurality of circuit boards.

Referring to fig. 13 and 14, a plurality of first light emitting elements 132a and a plurality of second light emitting elements 132b may be disposed on the substrate 13. The plurality of first light emitting elements 132a and the plurality of second light emitting elements 132b may be alternately disposed, but the present invention is not limited thereto. As depicted in fig. 3, the plurality of first light emitting elements 132a and the plurality of second light emitting elements 132b may output light having different UV wavelength ranges. Therefore, like the UV lamp, since a plurality of wavelengths can be realized, the curing performance can be improved.

The substrate 131 may include a plurality of first portions Q11 and Q12 and a plurality of second portions Q21 and Q22 that are disposed to be spaced apart in the first direction (X-axis direction) and extend in the second direction (Y-axis direction). The plurality of first portions Q11 and Q12 and the plurality of second portions Q21 and Q22 may be alternately arranged in the first direction (X-axis direction).

Hereinafter, the first direction (X-axis direction) is defined as a lateral direction, and the second direction (Y-axis direction) is defined as a longitudinal direction.

The plurality of first portions Q11 and Q12 may include: a first sub-portion Q11 comprising an edge region of the substrate 131, and a second sub-portion Q12 in which a plurality of transparent blocks 126 are arranged.

Accordingly, the sub-part disposed at the leftmost position among the plurality of first sub-parts Q11 may include the fourth side 304 of the base plate 131, and the sub-part disposed at the rightmost position among the plurality of first sub-parts Q11 includes the second side 302 of the base plate 131.

A plurality of transparent blocks 126 may be provided in the second sub-portion Q12. A plurality of transparent blocks 126 may be disposed to be spaced apart in a lateral direction and extend in a longitudinal direction. In this case, the spaced distances between the plurality of transparent blocks 126 in the lateral direction may be the same as each other, but the present invention is not limited thereto.

The intervals R11 of the light emitting elements 132 disposed in the first portions Q11 and Q12 in the lateral direction may be narrower than the intervals R12 of the light emitting elements 132 disposed in the second portions Q21 and Q22 in the lateral direction. That is, according to the present embodiment, the light emitting elements 132 may be densely disposed in the edge area where the irradiance is relatively low and the area where the transparent block 126 is disposed, so that the irradiance uniformity may be improved.

The ratio of the interval R12 of the light emitting elements 132 disposed in the second portions Q21 and Q22 in the lateral direction to the interval R11 of the light emitting elements 132 disposed in the first portions Q11 and Q12 in the lateral direction may be in the range of 1: 0.62 to 1: 0.83. As the ratio decreases, the intervals R11 of the light emitting elements 132 disposed in the lateral direction in the first portions Q11 and Q12 become dense.

When the ratio is less than 1: 0.62, light emitting elements disposed in the first portions Q11 and Q12 are dense, and thus irradiance is excessively high, so that irradiance uniformity may be reduced. Further, when the ratio is less than 1: 0.83, the intervals of the light emitting elements provided in the first portions Q11 and Q12 increase, and thus the irradiance becomes low, so that the irradiance uniformity may decrease.

For example, the intervals R11 of the light emitting elements 132 disposed in the first portions Q11 and Q12 in the lateral direction may each be 13.5mm, and the intervals R12 of the light emitting elements 132 disposed in the second portions Q21 and Q22 in the lateral direction may each be 19.0 mm. However, these intervals may be appropriately adjusted according to the size of the substrate 131.

A plurality of light emitting elements 132 arranged in five rows may be arranged in each of the first and second sub-sections Q11 and Q12 in the longitudinal direction. That is, the widths of the first and second sub-portions Q11 and Q12 in the lateral direction may be identical to each other. However, the width may vary depending on the width of the transparent block 126. For example, when the width of the transparent block 126 is increased, the width of the second sub-portion Q12, in which the transparent block 126 is disposed, may be greater than the width of the first sub-portion Q11 disposed in the edge region in proportion to the increase in the width of the transparent block 126.

The second sections Q21 and Q22 may include third and fourth subsections Q21 and Q22, the third subsection Q21 being disposed between the first and second subsections Q11 and Q12, and the fourth subsection Q22 being disposed between adjacent second subsections Q12.

That is, the third sub-portion Q21 may be a portion between the side of the substrate 131 and the transparent block 126. The fourth sub-portion Q22 may be the portion between transparent blocks 126. The width of the fourth sub-portion Q22 in the lateral direction may be greater than the width of the third sub-portion Q21. However, such intervals may vary depending on the size of the substrate 131 and the number of transparent blocks 126.

The substrate 131 may include a plurality of third portions Q31 and Q32 and a fourth portion Q4 arranged in the longitudinal direction. Each of the third portions Q31 and Q32 and the fourth portion Q4 may extend in the lateral direction. In this case, the third portions Q31 and Q32 may include fifth and sixth sub-portions Q31 and Q32, the fifth sub-portion Q31 being disposed on the first side 301 of the substrate 131, and the sixth sub-portion Q32 being disposed on the third side 303 of the substrate 131.

The fourth portion Q4 may be disposed longitudinally between the fifth subsection Q31 and the sixth subsection Q32.

In this case, the intervals R21 of the light emitting elements 132 disposed in the third portions Q31 and Q32 in the longitudinal direction may be narrower than the intervals R22 of the light emitting elements 132 disposed in the fourth portions Q4 in the longitudinal direction. That is, according to the present embodiment, the light emitting elements 132 may be densely disposed in an edge region where irradiance is relatively low, so that uniformity of light emission may be improved.

The ratio of the interval R21 of the light emitting elements 132 disposed in the fourth portion Q4 in the longitudinal direction to the interval R11 of the light emitting elements 132 disposed in the third portions Q31 and Q32 in the longitudinal direction may be in the following range: 1: 0.62 to 1: 0.83.

When the ratio is less than 1: 0.62, the light emitting elements provided in the third portions Q31 and Q32 are dense, and thus light emission becomes higher than that in the fourth portions, so that uniformity of irradiance may be reduced. Further, when the ratio is less than 1: 0.83, the intervals of the light emitting elements disposed in the third portions Q31 and Q32 increase, and thus the irradiance becomes lower than that in the fourth portions, so that irradiance uniformity may decrease.

For example, the intervals R21 of the light emitting elements 132 disposed in the third portions Q31 and Q32 in the longitudinal direction may each be 13.5mm, and the intervals R21 of the light emitting elements 132 disposed in the fourth portions Q4 in the longitudinal direction may each be 19.5 mm. However, these intervals may be appropriately adjusted according to the size of the substrate 131.

The substrate 131 may include a fifth region Q5, wherein the first portions Q11 and Q12 intersect the third portions Q31 and Q32. The light emitting elements 132 disposed in each fifth region Q5 may be most densely disposed. That is, in the corner regions where the four edge regions intersect and the region where the transparent block 126 is provided, since the irradiance of the portion near the side of the substrate is the lowest, more light-emitting elements 132 are arranged so that the uniformity of the irradiance can be improved.

The interval R11 in the lateral direction of the light emitting elements 132 disposed in the fifth region Q5 may be equal to the interval R21 in the longitudinal direction thereof. For example, the interval R11 in the lateral direction and the interval R21 in the longitudinal direction of the light emitting elements 132 disposed in the fifth region Q5 may each be 13.5mm, but these intervals may be appropriately adjusted according to the size of the substrate 131.

Fig. 15 is an exploded perspective view of the cooling part and the support frame shown in fig. 2. Fig. 16 is an exploded perspective view of the cooling part shown in fig. 15. Fig. 17a is a perspective view of the cooling block shown in fig. 16. Fig. 17b is an enlarged view of a portion of fig. 17 a. FIG. 18 is a bottom perspective view of the cooling block shown in FIG. 17 a.

Referring to fig. 15 to 18, the support frame 127 may include: a frame 127a for supporting the cooling part 120, and at least one support 127b engaged with the frame 127a and placing the frame 127a on the transparent plate 125.

For example, the support frame 127 may have a shape, for example, a quadrangle, which is the same as the shape of the outer circumferential surface of the cooling part 120.

The supporting member 127b may be provided in plurality. The plurality of supporting pieces 127b may be disposed to be spaced apart from each other. For example, the supports may each be in the form of a leg, although the invention is not limited thereto.

The cooling part 120 may include a radiator 305, a plurality of cooling blocks S1 to S16 provided on the radiator 305, a fluid regulating part 330 for controlling supply of a fluid (e.g., cooling water) to the plurality of cooling blocks S1 to S16, and a plurality of cover members 121a to 121d coupled to the radiator 305 and covering the cooling blocks S1 to S16 and the fluid regulating part 330.

Each of the plurality of cooling blocks S1 to S16 may correspond to any one of the plurality of arrangement regions P1 to P16 of the base plate 131.

The heat sink 305 may include a bottom portion 305a and a plurality of side plates 305-1 to 305-8 disposed on sides of the bottom portion 305 a.

The cooling blocks S1 through S16 may be provided on the bottom 305a of the heat sink 305.

As shown in fig. 18, the bottom 305a of the heat sink 305 may be divided into a plurality of cooling blocks to correspond to the cooling blocks S1 to S16.

For example, the heat sink 305 may include a bottom portion 305a1 corresponding to the cooling blocks S1 to S16. The bottom 305a1 of the heat sink 305 may become the bottom of the main body 510 corresponding to any one of the cooling blocks S1 to S16.

The first and second light emitting elements 132a and 132b may be disposed on the first surface of the substrate 131 of the light emitting module 130, and the substrate 131 may be disposed under the bottom 305a1 of the heat sink 305 to allow the second surface of the substrate 131 to contact the bottom 305a1 of the heat sink 305. The first and second surfaces of the substrate 131 may be opposite to each other.

The substrate 131 may be divided into a plurality of arrangement regions P1 to P16, and the plurality of arrangement regions P1 to P16 may be separated or separated from each other.

Each of the plurality of arrangement regions P1 to P16 may correspond to any one of the bottoms of the heat sink 305. For example, the second surface of each of the plurality of arrangement regions P1 to P16 may be in contact with a corresponding one of the bottoms of the heat sink 305.

Referring to FIG. 17a, each of the plurality of cooling blocks S1 to S16 may include a main body 510, an inlet Q_INAnd an outlet Q_OUT。

Inlet Q_INMay be disposed in a region of body 510 and may be a channel for introducing or placing a fluid into body 510. Outlet Q_OUTCan be connected with an inlet Q_INSpaced apart to be disposed in another region of the body 510, which may be a passage for discharging fluid from the interior of the body 510 to the exterior.

The body 510 is provided for allowing passage through the inlet Q_INA flow path of the introduced fluid flow. Fluid flowing within the body 510 may pass through the outlet Q_OUTAnd is discharged to the outside of the main body 510.

Fig. 19 is a schematic view illustrating the fluid-regulating portion 330 for supplying fluid to the cooling blocks S4, S8, S12 and S16 shown in fig. 17 a.

Referring to fig. 17a to 19, the fluid regulating part 330 may include: a fluid supply pipe 321 through which fluid is supplied from the outside; a first connection pipe 331 connecting the fluid supply pipe 321 to the inlet Q_IN(ii) a A flow sensor 341 mounted on the first connection pipe 331; a fluid discharge pipe 322 for discharging fluid; and a second connection pipe 332 connecting the fluid discharge pipe 322 to the outlet Q_OUT。

The fluid regulating portion 330 may further include a first valve 351 and a second valve 352.

A first valve 351 may be installed on the first connection pipe 331 between the flow sensor 341 and the fluid supply pipe 321 to regulate introduction of the inlet Q through the first connection pipe 331_INThe flow rate of (c).

The second valve 352 may be installed on the second connection pipe 332 and may control a flow rate discharged to the fluid discharge pipe 322 through the second connection pipe 332.

The cooling blocks S1 to S16 corresponding to the arrangement regions P1 to P16 may be provided in the form of a matrix composed of rows and columns, but the present invention is not limited thereto.

For example, the fluid regulating part 330 may include a plurality of fluid supply tubes and a plurality of fluid discharge tubes. A pair of fluid supply pipe 321 and fluid discharge pipe 322 may be provided to correspond to the cooling blocks included in each row.

Although only the fluid conditioning portion for each of the cooling blocks S4, S8, S12, and S16 included in the last row is shown in fig. 17 a. The above description in fig. 17a can also be equally applied to the fluid conditioning section for each cooling block included in the row.

For example, a pair of the fluid supply pipe 321 and the fluid discharge pipe 322 may be shared by the cooling blocks included in each row. Alternatively, a first connection pipe 331, a second connection pipe 332, first and second valves 351 and 352, and a flow sensor 341 may be provided in each cooling block. Further, due to the above-described independent and separate configuration, when a problem occurs due to malfunction or damage of portions such as the first connection pipe 331, the second connection pipe 332, the first and second valves 351 and 352, and the flow sensor 341, the portion where the problem occurs may be separately replaced.

Fig. 20 is a schematic view showing the arrangement of the inlet and outlet of the cooling block shown in fig. 17 a.

Referring to fig. 20, the cooling blocks S1 to S16 may include: first cooling blocks S1, S4, S13, and S16 corresponding to the first arrangement regions P1, P4, P13, and P16 of fig. 1; second cooling blocks S2, S3, S5, S8, S9, S12, S14, and S15 corresponding to the second arrangement regions P2, P3, P5, P8, P9, P12, P14, and P15; and third cooling blocks S6, S7, S10, and S11 corresponding to the third arrangement regions P6, P7, P10, and P11.

The first cooling blocks S1, S4, S13, and S16 may include apexes E11 to E14 corresponding to apexes of the first disposition regions P1, P4, P13, and P16.

An inlet Q of each of the first cooling blocks S1, S4, S13 and S16_INInstead of the outlet Q_OUTMay be disposed near the corresponding one of the vertexes E11 to E14.

For example, first coolingAn inlet Q of each of the blocks S1, S4, S13 and S16_INAnd an outlet Q_OUTMay be disposed in the row direction of the cooling blocks S1 to S16. Inlet Q_INCan be set to be larger than the outlet Q_OUTCloser to the respective vertex.

In FIG. 20, the inlet Q of each of the first cooling blocks S1, S4, S13 and S16_INAnd an outlet Q_OUTArranged in the row direction, but the invention is not limited thereto. Alternatively, the inlet Q of each of the first cooling blocks S1, S4, S13, and S16_INAnd an outlet Q_OUTMay be disposed in the column direction of the cooling blocks S1 to S16.

In addition, an inlet Q of each of the first cooling blocks S1, S4, S13, and S16_INAnd an outlet Q_OUTMay be arranged in a diagonal direction. Here, the diagonal direction may be a direction parallel to a straight line connecting each of the vertexes E11 to E14 of the first cooling blocks S1, S4, S13, and S16 to the other vertex opposite to each of the vertexes E11 to E14.

Introduction inlet Q_INIs lower than the temperature of the cooling water passing through the outlet Q_OUTThe temperature of the discharged cooling water. This is because the cooling water flowing in the main body 510 absorbs heat generated from the first and second light emitting elements 132a and 132 b.

In each of the first arrangement regions P1, P4, P13, and P16, since the arrangement density of the first light-emitting elements and the second light-emitting elements in the regions adjacent to the vertices E1 to E4 is higher than that of the first light-emitting elements and the second light-emitting elements in the remaining regions, a relatively large amount of heat may be generated.

A temperature gradient caused by heat generated by the first and second light-emitting elements may occur with respect to each of the first arrangement regions P1, P4, P13, and P16, so that uniformity of irradiance may be reduced. This is because the irradiance value of the light generated from the first and second light emitting elements 132a and 132b may vary depending on the temperature, and the arrangement density of the first and second light emitting elements 132a and 132b is high in the region adjacent to the apex among the first arrangement regions P1, P4, P13, and P16.

According to the present embodiment, the inlet Q_INIs disposed close to the relatively heat-generating apexes E1 to E4 of the first arrangement regions P1, P4, P13, and P16, so that the temperature gradient can be reduced, thereby preventing a reduction in irradiance uniformity due to the temperature gradient. This is because of the proximity of the inlet Q within the body 510_INThe temperature of the flowing cooling water is lower than that of the cooling water adjacent to the outlet Q in the body 510_OUTThe temperature of the flowing cooling water.

That is, according to the present embodiment, the temperatures of the first light emitting element and the second light emitting element of the light emitting module implementing the surface light source are kept constant, so that it is possible to prevent deterioration of optical characteristics and reduction of service life according to a part of the curing target. s is

Further, in order to reduce the temperature gradient in each of the second arrangement regions P2, P3, P5, P8, P9, P12, P14, and P15, the inlet Q_INCan be set to specific outlet Q_OUTThe sides closer to the second cooling blocks S2, S3, S5, S8, S9, S12, S14, and S15 corresponding to the sides of the substrate 131.

For example, the inlet Q of each of the second cooling blocks S2, S3, S5, S8, S9, S12, S14, and S15_INAnd an outlet Q_OUTMay be disposed in parallel with the row direction or the column direction of the cooling blocks S1 to S16.

An inlet Q of each of the third cooling blocks S6, S7, S10 and S11_INAnd an outlet Q_OUTMay be disposed in a direction parallel to the row direction or the column direction of the cooling blocks S1 to S16.

The controller 150 may provide a driving signal or power to drive the first and second light emitting elements 132a and 132b of the light emitting module 130.

For example, the controller 150 may drive the first and second light emitting elements 132a and 132b disposed in the arrangement regions P1 through P16, respectively, according to the arrangement regions.

The controller 150 may control the supply of the cooling water to the cooling part 120 or the discharge of the cooling water from the cooling part 120 through the cooling water supply pipe 160 of the cooling water connected to the fluid supply pipe 321 and the fluid discharge pipe 322 of the cooling part 120.

The ultraviolet curing device 100 may further include wires or cables that electrically connect the controller 150 to the first and second light emitting elements 132a and 132b of the light emitting module 130.

For example, as shown in fig. 17a and 18, the ultraviolet curing device 100 may have terminals 520 electrically connected to the first and second light emitting elements 132a and 132b, which pass through the bodies 510 of the cooling blocks S1 to S16 to be disposed in respective ones of the arrangement regions P1 to P16 of the substrate 131.

A wire (or cable) may be connected to each terminal 520. The wire (or cable) connected to the terminal 520 may be electrically connected to the controller 150.

The controller 150 may supply a driving signal or power to the first and second light emitting elements 132a and 132b provided at each of the arrangement regions P1 through P16 of the substrate 131 through wires.

The ultraviolet curing apparatus 100 may further include a display 170 for displaying the flow rate of the cooling water measured by the flow rate sensor 341 included in each of the cooling blocks S1 to S16.

As described above, according to the present embodiment, in order to improve the uniformity of irradiance, the separation distance between the first light-emitting element 132a and the second light-emitting element 132b provided in each of the arrangement regions P1 to P16 is optimized by simulation, so that the uniformity of light irradiated to the entire region of the curing target can be improved.

Further, according to the present embodiment, in consideration of the above-described arrangement of the first light emitting element 132a and the second light emitting element 132b in each of the arrangement regions P1 to P16, the inlets Q of the cooling blocks S1 to S16 of the cooling portion 120_INAnd an outlet Q_OUTArranged in the manner shown in fig. 20, so that the temperature gradient is reduced, and thus the reduction in the irradiance uniformity of the ultraviolet curing device 100 can be prevented.

Fig. 21 is a configuration diagram showing an ultraviolet curing apparatus according to another embodiment.

The same reference numerals as in fig. 1 denote the same components, and the description of the same components will be simplified or omitted.

Referring to fig. 21, the UV curing apparatus 100-1 may include a housing 110, a cooling part 120, a transparent plate 125, a support frame 127, a light emitting module 130, a temperature sensor 134, a platform 140, and a controller 150 a.

The temperature sensor 134 may detect temperature information regarding the temperature of the light emitting module 130. For example, the temperature sensor 134 may be disposed on the substrate 131, and may detect temperature information regarding the temperature of the substrate 131, or temperature information regarding the temperature of the first and second light emitting elements 132a and 132b formed due to heat generated by the first and second light emitting elements 132a and 132 b.

For example, the temperature sensor 134 may be implemented as a sensor in which a resistance value varies according to temperature, but the present invention is not limited thereto.

For example, the temperature sensor 134 may be disposed in at least one of the disposition regions P1 to P16.

For example, a plurality of temperature sensors 134 may be provided. Each of the plurality of temperature sensors 134 may be arranged in a corresponding one of the first arrangement regions P1 to P16.

For example, each of the plurality of temperature sensors 134 may transmit temperature information Ts1 to Ts16 regarding the temperature of the first light emitting element 132a and the second light emitting element 132b provided in a corresponding one of the arrangement regions P1 to P16 to the controller 150 a.

The controller 150a may generate the driving signals Cs1 to Cs16 to drive the first and second light emitting elements provided in each of the arrangement regions P1 to P16, respectively, using the temperature information Ts1 to Ts16 supplied from the temperature sensor 134, and supply the generated driving signals Cs1 to Cs16 to the first and second light emitting elements provided in the corresponding one of the arrangement regions P1 to P16. For example, each of the driving signals Cs1 to Cs16 may be in the form of a current, but the present invention is not limited thereto, and each of the driving signals Cs1 to Cs16 may be in the form of a voltage.

For example, the controller 150a may set or adjust the slope of a corresponding one of the plurality of driving signals Cs1 to Cs16 based on the temperature information Ts1 to Ts 16.

Alternatively, the temperature sensor 134 may include two or more temperature sensors disposed to be spaced apart from each other in at least one of the arrangement regions P1 to P16.

For example, the temperature sensor 134 may include two or more temperature sensors disposed to be spaced apart from each other in each of the first arrangement regions P1, P4, P13, and P16.

For example, the two or more temperature sensors may include a first temperature sensor disposed in a first region in each of the first arrangement regions P1, P4, P13, and P16, and a second temperature sensor disposed in a second region in each of the first arrangement regions P1, P4, P13, and P16.

The first region 201 (see fig. 3) may be a region adjacent to each of the edges E1 to E4 of the first arrangement regions P1, P4, P13, and P16, and in which the spacing distances between two adjacent first and second light-emitting elements are not uniform or different from each other.

The second region 202 (see fig. 3) may be a region other than the first region, and in which two adjacent first light emitting elements and second light emitting elements are disposed at regular intervals.

The controller 150a may detect temperature information corresponding to at least one arrangement region (e.g., P1, P4, P13, or P16) based on first temperature information received from the first temperature sensor and second temperature information received from the second temperature sensor.

For example, the controller 150a may calculate an average value of the first temperature information and the second temperature information, and set or change a slope of a driving signal for driving the first and second light emitting elements disposed in at least one arrangement region (e.g., P1, P4, P13, or P16) based on the calculated average value.

Since the arrangement density of the first and second light emitting elements with respect to the first region 201 is different from the arrangement density of the first and second light emitting elements with respect to the second region 202, a temperature deviation may occur between the first region 201 and the second region 202, so that a deviation of an illuminance value occurs. According to the present invention, the average value of the first temperature information and the second temperature information is used, so that the deviation of the illuminance value can be reduced. Therefore, the irradiance uniformity of the light emitting module may be further improved.

Fig. 24a is a diagram showing a general drive signal Ic of the first light emitting element or the second light emitting element. Fig. 24b is a graph showing the irradiance of the first light-emitting element or the second light-emitting element according to the drive signal Ic of fig. 24 a. In fig. 24a and 24b, the x-axis may be a time axis, the y-axis in fig. 24a may be a current value of a driving signal, and the y-axis in fig. 24b may be an irradiance value of the first light emitting element or the second light emitting element.

Referring to fig. 24a and 24b, the driving signal Ic may be a pulse waveform in general. Generally, as the temperature of the light emitting diode increases, the amount of light decreases, and thus the irradiance value decreases.

Therefore, immediately after the first light emitting element or the second light emitting element emits light due to the driving signal, the irradiance value of the first light emitting element or the second light emitting element is the highest since the temperature of the first light emitting element or the second light emitting element is the lowest.

Further, during the first period between t1 and t2, the irradiance value of the first light-emitting element or the second light-emitting element gradually decreases as the temperature of the first light-emitting element or the second light-emitting element gradually increases.

During a second period between t2 and t3 after the first period between t1 and t2, since the temperature of the first light-emitting element or the second light-emitting element is no longer increased, the irradiance of the first light-emitting element or the second light-emitting element may be kept constant, or even when the temperature of the first light-emitting element or the second light-emitting element is increased, the light emission value may be kept constant without being decreased.

During the first period between t1 and t2, irradiance uniformity of the light emitting module may decrease because the irradiance value of the first light emitting element or the second light emitting element is not constant and varies according to changes in temperature changes. That is, as shown by a dotted line 701 in fig. 24b, during the first period between t1 and t2, the irradiance value of the first light-emitting element or the second light-emitting element may be higher than the target irradiance value, as shown in fig. 24 b.

Fig. 22 is a flowchart illustrating a method in which the controller shown in fig. 21 controls the slope of the amplitude (magnitude) of the driving signal of the light emitting module 130.

Referring to fig. 22, a target value regarding the amplitude of a driving signal for driving the first light emitting element 132a or the first light emitting element 132b may be set using the controller 130.

For example, the target value may be a current value of a driving signal for driving the first light emitting element or the second light emitting element so as to produce a desired target illuminance value (S110).

Next, temperature information Cs1 to Cs16 regarding the temperatures of the first light-emitting element 132a and the second light-emitting element 132b provided in the arrangement regions P1 to P16 is detected using the temperature sensor 134 (S120).

For example, it is possible to detect the temperatures of the detection arrangement regions P1 to P16 using the temperature sensors 134 provided in the arrangement regions P1 to P16, and detect temperature information Cs1 to Cs16 about the temperatures of the first light emitting element 132a and the second light emitting element 132b based on the detected temperatures.

Next, the controller 150 may set the slope of the driving signal (e.g., the driving current) based on the detected temperature information Cs1 to Cs 16. Here, the slope of the driving signal may be a change in current value with time. For example, the current value of the drive signal (e.g., the drive current) may be set based on the detected temperature information Cs1 to Cs 16.

When the detected temperature is low, the slope of the driving signal may be set to be high. For example, the change in the current value of the drive signal with respect to the unit time may be set large in accordance with the detected temperature.

On the other hand, as the detected temperature gradually increases, the slope of the amplitude of the drive signal may be gradually set low. For example, the change in the current value of the drive signal with respect to the unit time may be set small in accordance with the detected temperature.

Next, the controller 150 determines whether the amplitude (e.g., current value) of the driving signal having the set slope reaches a target value (e.g., target current value) (S140).

For example, when the current value of the driving signal does not reach the target current value, the above operations S120 to S140 may be repeatedly performed.

Otherwise, when the current value of the driving signal reaches the target current value, the set slope and the set current value of the driving signal are maintained (S150).

The controller 150 may change the slope of the driving signal based on the temperature information before the amplitude of the driving signal reaches the target value.

The controller 150 may generate a plurality of driving signals corresponding to a plurality of arrangement regions. The plurality of driving signals may drive the first light emitting element and the second light emitting element arranged in a corresponding one of the plurality of arrangement regions. Due to the plurality of driving signals, the controller 150 may drive the first and second light emitting elements individually and independently according to the arrangement region.

Fig. 23 is a diagram illustrating a waveform of a driving signal generated by the method illustrated in fig. 22.

Referring to fig. 23, as described in fig. 4A and 4B, since the temperatures of the first and second light emitting elements during the first period between t1 and t4 are low, the irradiance values of the first and second light emitting elements are higher than the target irradiance value.

As shown in fig. 23, during the first period between t1 and t2, the controller 150 repeatedly performs operations S120 to S140 to change the driving signal I_LEDThe slope of the waveform of (a).

For example, during a first period between t1 and t2 of the drive signal, the controller 150a may decrease the slope of the drive signal based on the temperature information. For example, the first period between t1 and t2 may be a period from the turn-on timing of the first and second light emitting elements 132a and 132b to the timing at which the amplitude of the driving signal (e.g., current value) reaches a target value (e.g., target current value).

For example, during the first period between t1 and t2, the controller 150a may non-linearly decrease the slope of the drive signal.

Further, for example, during the second period between t2 and t3, the controller 150a may constantly maintain the amplitude (e.g., current value) of the drive signal at a target value (e.g., target current value). the second period between t2 and t3 may be from the time when the amplitude (e.g., current value) of the driving signal reaches a target value (e.g., target current value) to the time when the first and second light emitting elements 132a and 132b are turned off.

Due to the drive signal I_LEDIs less than the target current value during a first period between t1 and t2, and the drive signal I_LEDHas a variation corresponding to a temperature variation of the first and second light emitting elements 132a and 132b, the irradiance values of the first and second light emitting elements 132a and 132b in the first period between t1 and t2 may each be equal to a target irradiance value, or may each be adjusted to have a value close to the target irradiance value.

That is, according to the present embodiment, during the first period between t1 and t3, excessive irradiance 701 exceeding the target irradiance value described in fig. 4B does not occur.

Therefore, even if the temperatures of the first and second light emitting elements 132a and 132b vary, the irradiance values of the first and second light emitting elements 132a and 132b may be kept constant during the first period between t1 and t2 and the second period between t2 and t3, and the irradiance uniformity of the light emitting module may be ensured regardless of the temperature. That is, according to the present embodiment, it is possible to prevent the irradiance uniformity of the light emitting module 130 from being deteriorated according to the temperature variation of the first and second light emitting elements 132a and 132 b.

The features, structures, effects, and the like described in the above embodiments are included in at least one embodiment of the present invention, and are not necessarily limited to one embodiment. Further, the features, structures, effects, and the like shown in each embodiment can be practiced by combining and modifying another embodiment by those skilled in the art to which the embodiment belongs. Therefore, it is to be understood that the description relating to these combinations and modifications falls within the scope of the present invention.

Claims (15)

1. A curing apparatus, comprising:

a platform;

a light emitting module including a substrate and a plurality of light emitting elements, the substrate being disposed on the platform, and the plurality of light emitting elements being disposed on the substrate; and

a plurality of transparent blocks disposed between the light emitting module and the stage and disposed in a first direction,

wherein the plurality of transparent blocks extend in a second direction perpendicular to the first direction,

wherein the substrate comprises:

a plurality of first portions overlapping the plurality of transparent blocks,

a plurality of second portions disposed between the plurality of first portions and not overlapping the plurality of transparent blocks,

two third portions disposed on edges of the substrate in the second direction,

a fourth section arranged between the two third sections, an

A plurality of fifth portions in which the plurality of first portions intersect with the two third portions,

wherein the plurality of first portions and the plurality of second portions are alternately arranged in the first direction,

wherein intervals in the first direction of the light emitting elements disposed in the first portion are narrower than intervals in the first direction of the light emitting elements disposed in the second portion,

wherein an interval in the second direction of the light emitting elements provided in the first portion is the same as an interval in the second direction of the light emitting elements provided in the second portion,

wherein intervals in the second direction of the light emitting elements disposed in the third section are narrower than intervals in the second direction of the light emitting elements disposed in the fourth section, an

The number of the plurality of light emitting elements provided in the fifth portion is largest per unit area.

2. The curing device of claim 1, wherein the plurality of first portions and the plurality of second portions extend in the second direction.

3. The curing apparatus of claim 1, wherein the plurality of transparent blocks fix a mask pattern of a curing target located on the stage.

4. The curing apparatus of claim 1, wherein:

intervals in the first direction and intervals in the second direction of the plurality of light emitting elements disposed in the fifth portion are the same as each other.

5. The curing apparatus of claim 1, wherein:

a ratio of an interval of the plurality of light emitting elements disposed in the second section in the first direction to an interval of the plurality of light emitting elements disposed in the first section in the first direction is in a range of 1: 0.62 to 1: 0.83.

6. The curing apparatus of claim 1, wherein:

the ratio of the interval of the plurality of light emitting elements disposed in the fourth section in the second direction to the interval of the plurality of light emitting elements disposed in the third section in the second direction is in the range of 1: 0.62 to 1: 0.83.

7. The curing apparatus of claim 1, wherein:

the light emitting element includes a first light emitting element configured to emit light of a first wavelength range and a second light emitting element configured to emit light of a second wavelength range different from the first wavelength range; and is

The first light emitting elements and the second light emitting elements are alternately arranged in a first direction and a second direction.

8. The curing apparatus of claim 1, further comprising:

at least one temperature sensor configured to detect temperature information about the plurality of light emitting elements; and

a controller configured to set a slope of a driving signal for driving the plurality of light emitting elements based on the temperature information;

wherein the controller sets a target value, and changes the slope of the driving signal based on the temperature information before the amplitude of the driving signal reaches the target value.

9. The curing apparatus of claim 8, wherein said substrate comprises a plurality of arrangement regions in a matrix shape;

wherein the plurality of light emitting elements are provided in the plurality of arrangement regions;

wherein the at least one temperature sensor includes the plurality of temperature sensors for detecting temperatures of the plurality of arrangement areas.

10. The curing apparatus of claim 8, wherein said controller generates a plurality of drive signals for individually controlling the driving of said light emitting elements according to said arrangement region.

11. The curing apparatus of claim 9, wherein the plurality of temperature sensors includes a first temperature sensor disposed in a first region of at least one deployment region and a second temperature sensor disposed in a second region of the at least one deployment region; and

the first region is a region adjacent to one corner of the at least one arrangement region, and the second region is a region other than the first region.

12. The curing apparatus of claim 11, wherein said controller calculates an average of first temperature information of said first temperature sensor and second temperature information of said second temperature sensor; and

wherein the controller sets a slope of the driving signal for driving the light emitting elements disposed in the at least one arrangement region based on the calculated average value.

13. The curing apparatus of claim 9, further comprising: a plurality of cooling blocks corresponding to the plurality of arrangement regions.

14. The curing apparatus of claim 13, wherein a size of each of the plurality of cooling blocks corresponds to a size of each of the plurality of placement areas.

15. The curing device of claim 13, further comprising:

a fluid supply pipe connected to inlets of the plurality of cooling blocks; and

a fluid discharge pipe connected to outlets of the plurality of cooling blocks.

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