CN110168406A - X射线探测器和x射线成像装置 - Google Patents

X射线探测器和x射线成像装置 Download PDF

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Publication number
CN110168406A
CN110168406A CN201780082055.3A CN201780082055A CN110168406A CN 110168406 A CN110168406 A CN 110168406A CN 201780082055 A CN201780082055 A CN 201780082055A CN 110168406 A CN110168406 A CN 110168406A
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CN
China
Prior art keywords
ray
sensor array
scintillator
ray detector
optical filter
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Pending
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CN201780082055.3A
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English (en)
Chinese (zh)
Inventor
H·施泰因豪泽
O·J·维默斯
P·L·阿尔温
M·西蒙
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Koninklijke Philips NV
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Koninklijke Philips NV
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Publication of CN110168406A publication Critical patent/CN110168406A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/2006—Measuring radiation intensity with scintillation detectors using a combination of a scintillator and photodetector which measures the means radiation intensity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/2002—Optical details, e.g. reflecting or diffusing layers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/2008—Measuring radiation intensity with scintillation detectors using a combination of different types of scintillation detectors, e.g. phoswich
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/2018—Scintillation-photodiode combinations
    • G01T1/20181—Stacked detectors, e.g. for measuring energy and positional information
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/2018—Scintillation-photodiode combinations
    • G01T1/20187—Position of the scintillator with respect to the photodiode, e.g. photodiode surrounding the crystal, the crystal surrounding the photodiode, shape or size of the scintillator
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/24—Measuring radiation intensity with semiconductor detectors
    • G01T1/242—Stacked detectors, e.g. for depth information
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • H10F39/189—X-ray, gamma-ray or corpuscular radiation imagers
    • H10F39/1898—Indirect radiation image sensors, e.g. using luminescent members
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/805—Coatings
    • H10F39/8053—Colour filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/208—Circuits specially adapted for scintillation detectors, e.g. for the photo-multiplier section
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/805—Coatings
    • H10F39/8057—Optical shielding

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
  • Measurement Of Radiation (AREA)
CN201780082055.3A 2017-01-02 2017-12-24 X射线探测器和x射线成像装置 Pending CN110168406A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP17150028.3 2017-01-02
EP17150028 2017-01-02
PCT/EP2017/084573 WO2018122213A1 (en) 2017-01-02 2017-12-24 X-ray detector and x-ray imaging apparatus

Publications (1)

Publication Number Publication Date
CN110168406A true CN110168406A (zh) 2019-08-23

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Family Applications (1)

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CN201780082055.3A Pending CN110168406A (zh) 2017-01-02 2017-12-24 X射线探测器和x射线成像装置

Country Status (5)

Country Link
US (1) US20190353802A1 (https=)
EP (1) EP3563182A1 (https=)
JP (1) JP2020503518A (https=)
CN (1) CN110168406A (https=)
WO (1) WO2018122213A1 (https=)

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CN112713163A (zh) * 2020-12-30 2021-04-27 上海奕瑞光电子科技股份有限公司 双能辐射平板探测器、制备方法及探测系统
CN112834530A (zh) * 2020-12-31 2021-05-25 上海奕瑞光电子科技股份有限公司 双面x射线探测器及成像方法
CN113671553A (zh) * 2021-09-03 2021-11-19 南京安科医疗科技有限公司 X射线探测阵列像素单元、制造工艺和双层能谱ct探测器
CN114846359A (zh) * 2019-12-09 2022-08-02 皇家飞利浦有限公司 X射线探测器
CN115084176A (zh) * 2022-06-02 2022-09-20 上海奕瑞光电子科技股份有限公司 直接型多能平板探测器及其制备方法
CN115808707A (zh) * 2021-09-14 2023-03-17 睿生光电股份有限公司 感测装置
WO2023123161A1 (en) * 2021-12-30 2023-07-06 Shenzhen Xpectvision Technology Co., Ltd. Imaging systems with image sensors for side radiation incidence during imaging
CN116437549A (zh) * 2023-04-18 2023-07-14 四川轻化工大学 一种高能x射线靶

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USRE48612E1 (en) 2013-10-31 2021-06-29 Sigray, Inc. X-ray interferometric imaging system
CA3071647A1 (en) * 2017-08-03 2019-02-07 The Research Foundation For The State University Of New York Dual-screen digital radiography with asymmetric reflective screens
JP6991835B2 (ja) * 2017-11-10 2022-01-13 キヤノン株式会社 放射線撮像装置および放射線撮像システム
EP3553568A1 (en) 2018-04-12 2019-10-16 Koninklijke Philips N.V. X-ray detector with focused scintillator structure for uniform imaging
US10845491B2 (en) 2018-06-04 2020-11-24 Sigray, Inc. Energy-resolving x-ray detection system
GB2591630B (en) 2018-07-26 2023-05-24 Sigray Inc High brightness x-ray reflection source
US10656105B2 (en) 2018-08-06 2020-05-19 Sigray, Inc. Talbot-lau x-ray source and interferometric system
WO2020051061A1 (en) * 2018-09-04 2020-03-12 Sigray, Inc. System and method for x-ray fluorescence with filtering
WO2020051221A2 (en) 2018-09-07 2020-03-12 Sigray, Inc. System and method for depth-selectable x-ray analysis
EP3657219A1 (en) * 2018-11-20 2020-05-27 Koninklijke Philips N.V. Photodiode array on flexible substrate for tomography
CN112068178B (zh) * 2019-06-10 2023-08-29 睿生光电股份有限公司 放射线感测装置
US11175243B1 (en) 2020-02-06 2021-11-16 Sigray, Inc. X-ray dark-field in-line inspection for semiconductor samples
US11217357B2 (en) 2020-02-10 2022-01-04 Sigray, Inc. X-ray mirror optics with multiple hyperboloidal/hyperbolic surface profiles
CN111198397B (zh) * 2020-02-21 2025-10-21 江苏康众数字医疗科技股份有限公司 双能谱双分辨率的x-射线探测器、探测系统及成像方法
DE102020113015B3 (de) * 2020-05-13 2021-07-01 Vega Grieshaber Kg Radiometrisches Messgerät, Anordnung eines radiometrischen Messgerätes und Verfahren zur radiometrischen Ermittlung einer Messgröße
JP7395775B2 (ja) 2020-05-18 2023-12-11 シグレイ、インコーポレイテッド 結晶解析装置及び複数の検出器素子を使用するｘ線吸収分光法のためのシステム及び方法
WO2022061347A1 (en) 2020-09-17 2022-03-24 Sigray, Inc. System and method using x-rays for depth-resolving metrology and analysis
JP7572033B2 (ja) * 2020-10-23 2024-10-23 株式会社リガク 結像型ｘ線顕微鏡
US12480892B2 (en) 2020-12-07 2025-11-25 Sigray, Inc. High throughput 3D x-ray imaging system using a transmission x-ray source
KR20260030946A (ko) 2020-12-07 2026-03-06 시그레이, 아이엔씨. 투과 x-선 소스를 이용한 고처리량 3D x-선 이미징 시스템
JP7587980B2 (ja) * 2020-12-23 2024-11-21 浜松ホトニクス株式会社 放射線検出器、放射線検出器の製造方法、及びシンチレータパネルユニット
JP7608148B2 (ja) * 2020-12-23 2025-01-06 浜松ホトニクス株式会社 放射線検出器、放射線検出器の製造方法、及びシンチレータパネルユニット
JP7470631B2 (ja) * 2020-12-23 2024-04-18 浜松ホトニクス株式会社 放射線検出器、放射線検出器の製造方法、及びシンチレータパネルユニット
CN112987073A (zh) * 2021-02-10 2021-06-18 奕瑞影像科技（太仓）有限公司 双能探测器
EP4184218A1 (en) 2021-11-23 2023-05-24 Koninklijke Philips N.V. Multi-layer x-ray detector
WO2023168204A1 (en) 2022-03-02 2023-09-07 Sigray, Inc. X-ray fluorescence system and x-ray source with electrically insulative target material
WO2023177981A1 (en) 2022-03-15 2023-09-21 Sigray, Inc. System and method for compact laminography utilizing microfocus transmission x-ray source and variable magnification x-ray detector
CN119173759A (zh) 2022-05-02 2024-12-20 斯格瑞公司 X射线顺序阵列波长色散光谱仪
CN121013975A (zh) 2023-02-16 2025-11-25 斯格瑞公司 具有至少两个堆叠的平面布拉格衍射器的x射线探测器系统
US20240310306A1 (en) * 2023-03-13 2024-09-19 The Boeing Company X-ray line scan for foreign object debris detection
US12181423B1 (en) 2023-09-07 2024-12-31 Sigray, Inc. Secondary image removal using high resolution x-ray transmission sources
US12429437B2 (en) 2023-11-07 2025-09-30 Sigray, Inc. System and method for x-ray absorption spectroscopy using spectral information from two orthogonal planes
US12429436B2 (en) 2024-01-08 2025-09-30 Sigray, Inc. X-ray analysis system with focused x-ray beam and non-x-ray microscope
WO2025155719A1 (en) 2024-01-18 2025-07-24 Sigray, Inc. Sequential array of x-ray imaging detectors
WO2025174966A1 (en) 2024-02-15 2025-08-21 Sigray, Inc. System and method for generating a focused x‑ray beam

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114846359A (zh) * 2019-12-09 2022-08-02 皇家飞利浦有限公司 X射线探测器
CN112713163A (zh) * 2020-12-30 2021-04-27 上海奕瑞光电子科技股份有限公司 双能辐射平板探测器、制备方法及探测系统
CN112834530A (zh) * 2020-12-31 2021-05-25 上海奕瑞光电子科技股份有限公司 双面x射线探测器及成像方法
CN113671553A (zh) * 2021-09-03 2021-11-19 南京安科医疗科技有限公司 X射线探测阵列像素单元、制造工艺和双层能谱ct探测器
CN113671553B (zh) * 2021-09-03 2024-05-31 南京安科医疗科技有限公司 X射线探测阵列像素单元、制造工艺和双层能谱ct探测器
CN115808707A (zh) * 2021-09-14 2023-03-17 睿生光电股份有限公司 感测装置
WO2023123161A1 (en) * 2021-12-30 2023-07-06 Shenzhen Xpectvision Technology Co., Ltd. Imaging systems with image sensors for side radiation incidence during imaging
CN115084176A (zh) * 2022-06-02 2022-09-20 上海奕瑞光电子科技股份有限公司 直接型多能平板探测器及其制备方法
CN116437549A (zh) * 2023-04-18 2023-07-14 四川轻化工大学 一种高能x射线靶

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Publication number Publication date
WO2018122213A1 (en) 2018-07-05
JP2020503518A (ja) 2020-01-30
EP3563182A1 (en) 2019-11-06
US20190353802A1 (en) 2019-11-21

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Application publication date: 20190823