CN110161595A - It is coated with the optical mirror slip and optical lens of anti-reflection membrane system - Google Patents
It is coated with the optical mirror slip and optical lens of anti-reflection membrane system Download PDFInfo
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- CN110161595A CN110161595A CN201910574391.0A CN201910574391A CN110161595A CN 110161595 A CN110161595 A CN 110161595A CN 201910574391 A CN201910574391 A CN 201910574391A CN 110161595 A CN110161595 A CN 110161595A
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- membrane system
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- 230000003287 optical effect Effects 0.000 title claims abstract description 54
- 239000012528 membrane Substances 0.000 title claims abstract description 37
- 230000003667 anti-reflective effect Effects 0.000 claims abstract description 52
- 239000000758 substrate Substances 0.000 claims abstract description 51
- 239000000463 material Substances 0.000 claims description 34
- 238000002310 reflectometry Methods 0.000 claims description 13
- 239000000203 mixture Substances 0.000 claims description 12
- MWUXSHHQAYIFBG-UHFFFAOYSA-N nitrogen oxide Inorganic materials O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 claims description 9
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Chemical compound O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 claims description 7
- 229910009815 Ti3O5 Inorganic materials 0.000 claims description 5
- 229910000577 Silicon-germanium Inorganic materials 0.000 claims description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 4
- 229910052681 coesite Inorganic materials 0.000 claims description 4
- 229920001577 copolymer Polymers 0.000 claims description 4
- 229910052593 corundum Inorganic materials 0.000 claims description 4
- 229910052906 cristobalite Inorganic materials 0.000 claims description 4
- 239000000377 silicon dioxide Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052682 stishovite Inorganic materials 0.000 claims description 4
- 229910052718 tin Inorganic materials 0.000 claims description 4
- 229910052905 tridymite Inorganic materials 0.000 claims description 4
- 229910001845 yogo sapphire Inorganic materials 0.000 claims description 4
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 3
- 125000004122 cyclic group Chemical group 0.000 claims description 3
- 239000003822 epoxy resin Substances 0.000 claims description 3
- 238000005984 hydrogenation reaction Methods 0.000 claims description 3
- 150000004767 nitrides Chemical class 0.000 claims description 3
- 229920000647 polyepoxide Polymers 0.000 claims description 3
- 229920000098 polyolefin Polymers 0.000 claims description 3
- 229910000077 silane Inorganic materials 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 claims description 3
- -1 Cyclic olefin Chemical class 0.000 claims description 2
- 229920001038 ethylene copolymer Polymers 0.000 claims description 2
- 229910003465 moissanite Inorganic materials 0.000 claims description 2
- JRZJOMJEPLMPRA-UHFFFAOYSA-N olefin Natural products CCCCCCCC=C JRZJOMJEPLMPRA-UHFFFAOYSA-N 0.000 claims description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 claims description 2
- 239000004926 polymethyl methacrylate Substances 0.000 claims description 2
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 2
- 230000001603 reducing effect Effects 0.000 abstract description 3
- 239000010408 film Substances 0.000 description 188
- 238000002834 transmittance Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000002366 time-of-flight method Methods 0.000 description 4
- 238000001228 spectrum Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 150000001925 cycloalkenes Chemical class 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(IV) oxide Inorganic materials O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 150000004702 methyl esters Chemical class 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- MEYZYGMYMLNUHJ-UHFFFAOYSA-N tunicamycin Natural products CC(C)CCCCCCCCCC=CC(=O)NC1C(O)C(O)C(CC(O)C2OC(C(O)C2O)N3C=CC(=O)NC3=O)OC1OC4OC(CO)C(O)C(O)C4NC(=O)C MEYZYGMYMLNUHJ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/113—Anti-reflection coatings using inorganic layer materials only
- G02B1/115—Multilayers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/001—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras
- G02B13/008—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras designed for infrared light
Abstract
The present invention relates to a kind of optical mirror slips for being coated with anti-reflection membrane system, comprising: substrate (1), antireflective film (2) and eyeglass;The antireflective film (2) is made of the alternately stacked first refractive index film layer (H) of multilayer and the second refractivity film layer (L);It is first refractive index film layer (H) or the second refractivity film layer (L) that the antireflective film (2), which is coated on the film layer on the surface of the substrate (1),;The antireflective film (2) is first refractive index film layer (H) or the second refractivity film layer (L) far from the substrate (1) outermost film layer;Wherein the refractive index n1 of each first refractive index film layer (H) meets: 2.0≤n1≤4.0, and the refractive index n2 of each second refractivity film layer (L) meets: 1.4≤n2≤2.0.Antireflection film system structure of the invention can sufficiently reduce near infrared region light reflectance while reducing the light reflectance of visible light region.
Description
Technical field
The present invention relates to a kind of optical mirror slips and optical lens for being coated with anti-reflection membrane system.
Background technique
For 3D camera using infrared ray as transmitting light, the ambient lighting for being able to solve visible light influences problem.At present
In industry there are three types of used mainstream 3D vision techniques: structured light technique, time-of-flight method (TOF), binocular it is polygonal it is three-dimensional at
Picture.TOF scheme most prospect due to its is easy to use, cost is relatively low the advantages that.Wherein, TOF scheme is caught by proprietary sensor
Near infrared light is caught from being emitted to received flight time, judgment object distance.Antireflective film is applied in the optics such as lens, prism
The surface of component, main purpose are to improve the transmissivity for the optical element being made of multiple lens, visible especially by inhibition
The reflection of spectrum becomes easy the brightness of image and improved optical instrument visible.Since near infrared region light reflects
Rate is increased with the increase of wavelength of light, and antireflective film in the prior art can only reduce the anti-of visible light region in spectrum
It penetrates, it is unobvious for the reflection reducing effect of near infrared region.
Summary of the invention
It is an object of the invention to solve problem above, providing one kind can be in the light reflectance for reducing visible light region
While, it sufficiently reduces the optical mirror slip for being coated with anti-reflection membrane system of near infrared region light reflectance and includes the optical mirror slip
Optical lens.
To achieve the above object, the present invention provides a kind of optical mirror slip for being coated with anti-reflection membrane system, comprising:
Substrate, antireflective film and eyeglass;The antireflective film is reflected by the alternately stacked first refractive index film layer of multilayer and second
Rate film layer is constituted;
Film layer of the antireflection coating on the surface of the substrate is first refractive index film layer or the second refractive index
Film layer;
The antireflective film is first refractive index film layer or the second refractivity film layer far from the outermost film layer of the substrate;
Wherein the refractive index n1 of each first refractive index film layer meets: 2.0≤n1≤4.0, each second folding
The refractive index n2 for penetrating rate film layer meets: 1.4≤n2≤2.0.
According to an aspect of the present invention, the material of the first refractive index film layer are as follows: silane, hydrogenation SiGe, SiC,
Nb2O5、Ta2O5And at least one of oxide of Ti.
According to an aspect of the present invention, the material of second refractivity film layer are as follows: Al, Ti, Si, Sn, Hf, Ta, Y's
At least one of oxide, nitride and nitrogen oxides.
According to an aspect of the present invention, the material of the first refractive index film layer is Ti3O5, the second refractive index film
The material of layer is Al2O3And SiO2Mixture.
According to an aspect of the present invention, the material of the substrate be include one of following material or a variety of compositions
Mixture:
Polymethyl methacrylate materials,
Epoxide resin material,
Polyolefine material,
Cyclic olefine copolymer,
Cyclic olefin material,
Ethylene copolymer;
And the substrate refractive index n meets: 1.5≤n≤1.7.
According to an aspect of the present invention, at least one surface of the substrate is coated with the antireflective film.
According to an aspect of the present invention, the overall thickness ratio of the first refractive index film layer and second refractivity film layer
For H:L=1:1-1:3.
According to an aspect of the present invention, which is characterized in that maximum reflectivity Rmax of the optical mirror slip in each wave band
And average reflectance Rave meets following condition:
In 430nm-630nm, Rmax≤5%, Rave≤3%;
In 850nm-1050nm, Rmax≤3%.
According to an aspect of the present invention, at 850nm or 940nm of the optical mirror slip within the scope of near infrared band
Reflectivity R < 0.5%.
According to an aspect of the present invention, mean transmissivity Tave and minimum transmitance of the optical lens in each wave band
Tmin meets following condition:
In 850nm-1050nm, Tave >=95%;
In 430nm-900nm, Tave >=88%, Tmin >=74.5%.
A scheme according to the present invention engages a surface of substrate when antireflective film is arranged according to (H-L) n sequence
Film layer be first refractive index film layer, far from substrate outermost film layer be the second refractivity film layer;According to (L-H) n sequence cloth
When setting, the film layer for engaging a surface of substrate is the second refractivity film layer, and the outermost film layer far from substrate is the first folding
Penetrate rate film layer.Two kinds of setting methods can make antireflective film two sides thin-film refractive index different, realize that near infrared region light is passing through
Also sufficient anti-reflection effect can be obtained when crossing antireflective film, to increase the light transmittance of optical lens in the near infrared region.
A scheme according to the present invention engages a table of substrate when antireflective film is arranged according to (H-L) n-H sequence
The film layer in face and the outermost film layer of separate substrate are first refractive index film layer;When being arranged according to (L-H) n-L sequence, connect
Closing the film layer on a surface of substrate and the outermost film layer far from substrate is the second refractivity film layer.Two kinds of setting methods are equal
Antireflective film two sides thin-film refractive index can be made identical, realize near infrared region light by can also obtain when antireflective film sufficiently
Anti-reflection effect, to increase the light transmittance of optical lens in the near infrared region.
A scheme according to the present invention, antireflective film include two membrane systems, are individually coupled to two surfaces of substrate.It is this
Mode can strengthen interference effect of the light in anti-reflection membrane system, so that near infrared region light when antireflective film by obtaining
More fully anti-reflection, effectively increases the light transmittance of optical lens in the near infrared region.
The antireflection film system structure that its is proposed according to the present invention is coated with the optical mirror slip of antireflection film system structure and optical lens can
It is effectively reduced the light reflectance of visible light region, while making light transmitance is abundant in the near infrared region, is effectively dropped
The low reflectivity of near infrared region light.
Detailed description of the invention
Fig. 1 is the antireflection film system structure being coated on eyeglass for schematically showing the first embodiment according to the present invention
Figure;
Fig. 2 is to schematically show the optical mirror slip for being coated with anti-reflection membrane system of the first embodiment according to the present invention visible
Reflectivity schematic diagram in light and near infrared band;
Fig. 3 is the optical lens transmitance schematic diagram for schematically showing the first embodiment according to the present invention;
Fig. 4 is the antireflection film system structure being coated on eyeglass for schematically showing second of embodiment according to the present invention
Figure;
Fig. 5 is the antireflection film system structure being coated on eyeglass for schematically showing the third embodiment according to the present invention
Figure;
Fig. 6 is the antireflection film system structure being coated on eyeglass for schematically showing the 4th kind of embodiment according to the present invention
Figure;
Fig. 7 is to schematically show the optical mirror slip for being coated with anti-reflection membrane system of the 4th kind of embodiment according to the present invention visible
Reflectivity schematic diagram in light and near infrared band;
Fig. 8 is the antireflection film system structure being coated on eyeglass for schematically showing the 5th kind of embodiment according to the present invention
Figure.
Specific embodiment
It, below will be to embodiment in order to illustrate more clearly of embodiment of the present invention or technical solution in the prior art
Needed in attached drawing be briefly described.It should be evident that the accompanying drawings in the following description is only of the invention some
Embodiment for those of ordinary skills without creative efforts, can also be according to these
Attached drawing obtains other attached drawings.
When being described for embodiments of the present invention, term " longitudinal direction ", " transverse direction ", "upper", "lower", " preceding ",
" rear ", "left", "right", "vertical", "horizontal", "top", "bottom" "inner", orientation or positional relationship expressed by "outside" are based on phase
Orientation or positional relationship shown in the drawings is closed, is merely for convenience of description of the present invention and simplification of the description, rather than instruction or dark
Show that signified device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore above-mentioned term cannot
It is interpreted as limitation of the present invention.
The present invention is described in detail with reference to the accompanying drawings and detailed description, embodiment cannot go to live in the household of one's in-laws on getting married one by one herein
It states, but therefore embodiments of the present invention are not defined in following implementation.
Fig. 1 schematically shows the antireflection film system structure figure according to the present invention being coated on eyeglass.Light according to the present invention
Learning eyeglass includes substrate 1, antireflective film 2 and eyeglass, since inventive point of the invention is to be coated with antireflection film system structure on eyeglass,
Therefore antireflection film system structure is only schematically shown in attached drawing, i.e., be coated with antireflective film 2 on substrate 1, eyeglass is not shown.Antireflective film 2
It is made of multilayer alternately stacked first refractive index film layer H and the second refractivity film layer L.Antireflective film 2 is coated on one of substrate 1
On surface, or two membrane systems in the antireflective film 2 comprising two membrane systems are coated on respectively on two surfaces of substrate 1, with
The outermost layer film layer of any one membrane system in substrate 1 or antireflective film 2 comprising two membrane systems is coated on eyeglass afterwards.Anti-reflection
It is that first refractive index film layer H or the second refractivity film layer L, antireflective film 2 are separate that film 2, which is coated with the film layer on the surface of the substrate 1,
The film layer of the plating control surface of substrate 1 is first refractive index film layer H or the second refractivity film layer L.
In the present invention, the material of first refractive index film layer H are as follows: silane (Si:H), hydrogenation SiGe (SiGe:H), SiC,
Nb2O5、Ta2O5And at least one of oxide of Ti;The material of second refractivity film layer L are as follows: Al, Ti, Si, Sn, Hf,
At least one of oxide, nitride and nitrogen oxides of Ta, Y.First refractive index film layer H: hydrogenated silicon film layer material exists
Refractive index in 800-1100nm wave-length coverage is 1.46-3.7, and the refractive index of SiC film material is 2.57-3.13, Ti3O5Film
The refractive index of layer material is 2.23-2.60, Nb2O5Refractive index of the film material at 550nm wavelength is 2.30.Second refractive index
Film layer L:SiO2The refractive index of film material is 1.43-1.54, Al2O3The refractive index of film material is 1.73-1.83, HfO2Film
The refractive index of layer is 1.89-2.12, and the refractive index of TiN film layer material is 1.20-2.69.In order to guarantee antireflective film 2 in near-infrared
The light transmittance of zonal ray, anti-reflection membrane system of the invention use Ti3O5Material as first refractive index film layer H;And the second refraction
The material of rate film layer L uses SiO2And Al2O3Mixture, smoothly transmitted spectrum may be implemented.
In the present invention, it needs that first refractive index film layer H, the second refractivity film layer L and substrate 1 is arranged suitable anti-
Rate is penetrated to realize that anti-reflection acts on.In the present invention, refractive index n1 of the material of high refractive index in wavelength 550nm meet 2.0≤
n1≤4.0;Refractive index n2 of the material of low-refraction in wavelength 550nm meets 1.4≤n2≤2.0;Substrate is in wavelength 550nm
When refractive index n meet 1.5≤n≤1.7.Since the supporting surface that substrate 1 is antireflective film 2 is also simultaneously transparent surface, substrate 1
Should have sufficient light transmittance and possess stable chemical property and enough rigidity, so its material should be polymethylacrylic acid
Methyl esters, epoxy resin, polyolefin, cyclic olefine copolymer, one of the copolymer of cycloolefin and ethylene or a variety of compositions it is mixed
Close object.
Fig. 1 schematically shows the antireflection film system structure figure of the first embodiment according to the present invention being coated on eyeglass,
In the present embodiment, the film layer in antireflective film 2 is arranged according to (H-L) n, and wherein n is 4, and antireflective film 2 is alternately stacked by eight layers
First refractive index film layer H and the second refractivity film layer L is constituted, and the film layer that antireflective film 2 engages a surface of substrate 1 is the first folding
Rate film layer H is penetrated, is successively stacked with the second refractivity film layer L, first refractive index film layer H, the second refractivity film layer in order later
L, first refractive index film layer H, the second refractivity film layer L, first refractive index film layer H and the second refractivity film layer L, it is preferential by light
It is preliminary to reduce light reflection by the second refractivity film layer L, then in turn through the refractivity film layer being stacked alternately, most pass through afterwards
It crosses after first refractive index film layer H and enters camera lens through substrate 1.In the present embodiment, each film layer physics of eight tunic architectures is thick
Degree than be 1:5:2:2:7:1:3:9, first refractive index film layer H and the second refractivity film layer L overall thickness ratio 1:1 to 1:3 it
Between, wherein the Ti of the first film layer3O5Layer with a thickness of 10~15nm, the mixture layer of the second film layer with a thickness of 40~50nm;The
The Ti of three film layers3O5Layer with a thickness of 20~40nm, the mixture layer of the 4th film layer with a thickness of 10~20nm, the 5th film layer
Ti3O5Layer with a thickness of 70~90nm, the mixture layer of the 6th film layer with a thickness of 10~20nm;The Ti of 7th film layer3O5Layer
With a thickness of 20~30nm, the mixture layer of the 8th film layer with a thickness of 90~110nm.The anti-reflection membrane system of present embodiment makes light
Line is more in the refraction number of antireflective film 2, so that the shorter visible light region light of wavelength obtains abundant anti-reflection, cooperates this implementation
The above-mentioned each film layer of mode stacks the setting of sequence and thickness while can reduce the reflectivity of near infrared region, ensure that optical frames
Head possesses enough light transmittances in visible light and near infrared region, is all satisfied its transparency in visible light and near infrared region
Transparency requirement.
Fig. 2 shows the optical mirror slips for being coated with anti-reflection membrane system of the first embodiment of the invention in visible light and near-infrared wave
Reflectivity schematic diagram in section;Fig. 3 shows the optical lens transmitance schematic diagram of the first embodiment of the invention.In conjunction with Fig. 2
With Fig. 3 it is found that being coated with the antireflection film system structure of present embodiment, so that optical mirror slip is near infrared band 850nm to 1050nm
Maximum reflectivity Rmax≤ 3%, in the average reflectance R of 920nm to 980nmave≤ 0.3%;It and include at least four mirrors
T of the optical lens of piece in the mean transmissivity of near infrared band 850nm to 1050nm rangeave>=95%, it is seen that this embodiment party
Formula antireflection film system structure, optical mirror slip and optical lens meet the use demand near infrared band.In addition, in visible light wave range
The maximum reflectivity R of 430nm to 630nmmax≤ 5%, average reflectance Rave≤ 3%;In the maximum reflection of 630nm to 900nm
Rate Rmax≤ 2%, average reflectance Rave≤ 1.6%.The optical lens comprising at least four eyeglasses is in visible light wave range simultaneously
Mean transmissivity T in 430nm to 900nmave>=88% and minimum transmitance Tmin>=74.5%.It is coated with it can be seen that loading
The optical lens of the optical mirror slip of the anti-reflection membrane system of present embodiment reaches making for transparency in visible light and near infrared band
With requiring.
The antireflection film system structure of second of embodiment being coated on eyeglass according to the present invention, in the present embodiment,
The film layer of antireflective film 2 arranges that wherein n is 4, and antireflective film 2 is by eight layers of alternately stacked first refractive index film according to (L-H) n sequence
Layer H and the second refractivity film layer L is constituted, and the film layer for engaging a surface of substrate 1 can also be the second refractivity film layer L, far
Outermost film layer from substrate 1 is first refractive index film layer H.As shown in figure 4, remaining each film layer of antireflective film 2 is still alternately laminated
Setting, specific alternately the number of plies can be depending on specific product requirement.This set method is able to achieve near infrared region light and is passing through
Sufficient anti-reflection is obtained when crossing antireflective film, to increase the light transmittance of optical lens in the near infrared region.
The antireflection film system structure of the third embodiment being coated on eyeglass according to the present invention, in the present embodiment,
The film layer of antireflective film 2 arranges that wherein n is 4, and antireflective film 2 is by nine layers of alternately stacked first refractive index according to (H-L) n-H sequence
Film layer H and the second refractivity film layer L is constituted.As shown in figure 5, the film layer that antireflective film 2 engages a surface of substrate 1 is the first folding
Rate film layer H is penetrated, the outermost film layer far from substrate 1 is also first refractive index film layer H, remaining each film layer of antireflective film 2 still replaces
It is stacked.The 2 two sides thin-film refractive index of antireflective film of present embodiment is identical, realizes that near infrared region light is passing through antireflective film
Also sufficient anti-reflection effect can be obtained when 2, to increase the light transmittance of optical lens in the near infrared region.
The antireflection film system structure of 4th kind of embodiment being coated on eyeglass according to the present invention, in the present embodiment,
The film layer of antireflective film 2 arranges that wherein n is 4, and antireflective film 2 is by nine layers of alternately stacked first refractive index according to (L-H) n-L sequence
Film layer H and the second refractivity film layer L is constituted.As shown in fig. 6, the film layer that antireflective film 2 engages a surface of substrate 1 is the second folding
Rate film layer L is penetrated, the outermost film layer far from substrate 1 is also the second refractivity film layer L, remaining each film layer is still alternately laminated to be set
It sets.Light preferentially passes through the second refractivity film layer L, preliminary to reduce light reflection, then in turn through the refractive index being stacked alternately
Film layer finally still enters camera lens through substrate 1 after the second refractivity film layer L.In the present embodiment, first refractive index film
The thickness ratio of layer H and the second refractivity film layer L is 15:1:5:3:3:6:1:3:9.First refractive index film layer H and the second refractive index
The overall thickness ratio of film layer L is in 1:1 between 1:3.Fig. 7 shows the optical mirror slip for being coated with anti-reflection membrane system of present embodiment visible
Reflectivity schematic diagram in light and near infrared band.It can be seen that be coated with the optical mirror slip of the anti-reflection membrane system of present embodiment
Albedo parameters are identical as the first embodiment of the invention.Equally, the transmission of the optical lens comprising at least four eyeglasses
Rate parameter is also identical as the first embodiment of the invention.Therefore, technical effect acquired by present embodiment also with the present invention
The first embodiment is identical.
The antireflection film system structure of 5th kind of embodiment being coated on eyeglass according to the present invention, antireflective film 2 are handed over by eight layers
It is constituted for the first refractive index film layer H and the second refractivity film layer L of stacking.As shown in figure 8, antireflective film 2 is included as two membrane systems,
Each alternately laminated setting of film layer in each membrane system, membrane system above substrate 1 contain that there are five film layers, wherein being engaged on substrate 1
The film layer on surface is the second refractivity film layer L, and the outermost film layer far from substrate 1 is also the second refractivity film layer L;Positioned at substrate
The membrane system of 1 lower section film layer containing there are three, wherein the film layer for being engaged in 1 upper surface of substrate is the second refractivity film layer L, far from substrate
1 outermost film layer is also the second refractivity film layer L.This mode can strengthen interference of the light in anti-reflection membrane system and make
With so that near infrared region light effectively increases optical lens and exists by having obtained more fully anti-reflection when antireflective film
The light transmittance of near infrared region.Conceive according to the present invention, be located at the membrane system of about 1 two sides of substrate film layer quantity distribution with
And it stacks sequence and the setting of each thicknesses of layers and by the set-up mode in first to fourth embodiment of the invention and can combine practical
Product demand adjusts accordingly.
The optical mirror slip for being coated with anti-reflection membrane system and optical lens proposed according to the present invention can be effectively reduced visible light
The light reflectance in region, while making light transmitance is abundant in the near infrared region, significantly reduce near infrared region light
The reflectivity of line.
Above content is only enumerating for a specific embodiment of the invention, for the equipment and knot of wherein not detailed description
Structure, it should be understood that the existing common apparatus in this field and universal method is taken to be practiced.
The foregoing is merely an embodiment of the invention, are not intended to restrict the invention, for this field
For technical staff, the invention may be variously modified and varied.All within the spirits and principles of the present invention, made any
Modification, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.
Claims (10)
1. a kind of optical mirror slip for being coated with anti-reflection membrane system, comprising: substrate (1), antireflective film (2) and eyeglass;The antireflective film (2) by
The alternately stacked first refractive index film layer (H) of multilayer and the second refractivity film layer (L) are constituted;
It is first refractive index film layer (H) or the second folding that the antireflective film (2), which is coated on the film layer on the surface of the substrate (1),
Penetrate rate film layer (L);
The antireflective film (2) is first refractive index film layer (H) or the second refractive index far from the substrate (1) outermost film layer
Film layer (L);
Wherein the refractive index n1 of each first refractive index film layer (H) meets: 2.0≤n1≤4.0, each second refraction
The refractive index n2 of rate film layer (L) meets: 1.4≤n2≤2.0.
2. the optical mirror slip according to claim 1 for being coated with anti-reflection membrane system, which is characterized in that the first refractive index film layer
(H) material are as follows: silane, hydrogenation SiGe, SiC, Nb2O5、Ta2O5And at least one of oxide of Ti.
3. the optical mirror slip according to claim 2 for being coated with anti-reflection membrane system, which is characterized in that second refractivity film layer
(L) material are as follows: at least one of oxide, nitride and nitrogen oxides of Al, Ti, Si, Sn, Hf, Ta, Y.
4. the optical mirror slip according to claim 3 for being coated with anti-reflection membrane system, which is characterized in that the first refractive index film layer
(H) material is Ti3O5, the material of second refractivity film layer (L) is Al2O3And SiO2Mixture.
5. the optical mirror slip according to claim 1 for being coated with anti-reflection membrane system, which is characterized in that the material of the substrate (1)
It is the mixture for including one of following material or a variety of compositions:
Polymethyl methacrylate materials,
Epoxide resin material,
Polyolefine material,
Cyclic olefine copolymer,
Cyclic olefin material,
Ethylene copolymer;
And substrate (1) the refractive index n meets: 1.5≤n≤1.7.
6. the optical mirror slip according to claim 1 for being coated with anti-reflection membrane system, which is characterized in that the substrate (1) is at least
One surface is coated with the antireflective film (2).
7. the optical mirror slip according to claim 1 for being coated with anti-reflection membrane system, which is characterized in that the first refractive index film layer
It (H) is H:L=1:1-1:3 with the overall thickness ratio of second refractivity film layer (L).
8. the optical mirror slip according to any one of claim 1 to 7 for being coated with anti-reflection membrane system, which is characterized in that the light
It learns eyeglass and meets following condition in the maximum reflectivity Rmax and average reflectance Rave of each wave band:
In 430nm-630nm, Rmax≤5%, Rave≤3%;
In 850nm-1050nm, Rmax≤3%.
9. the optical mirror slip according to any one of claim 1 to 7 for being coated with anti-reflection membrane system, which is characterized in that the light
Learn reflectivity R < 0.5% of the eyeglass at the 850nm or 940nm within the scope of near infrared band.
10. a kind of optical lens comprising being coated with the optical mirror slip of anti-reflection membrane system described in any one of claims 1 to 9,
It is characterized in that, the optical lens meets following condition in the mean transmissivity Tave and minimum transmitance Tmin of each wave band:
In 850nm-1050nm, Tave >=95%;
In 430nm-900nm, Tave >=88%, Tmin >=74.5%.
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Cited By (4)
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CN111897034A (en) * | 2020-08-21 | 2020-11-06 | 福建福特科光电股份有限公司 | Super large angle subtracts anti-lens |
CN112437222A (en) * | 2020-12-15 | 2021-03-02 | 维沃移动通信有限公司 | Camera shooting assembly and electronic equipment |
CN115308820A (en) * | 2022-08-12 | 2022-11-08 | 江苏斯迪克新材料科技股份有限公司 | Semi-transparent semi-reflective waterproof film, optical lens and imaging device |
CN115421225A (en) * | 2022-08-12 | 2022-12-02 | 江苏斯迪克新材料科技股份有限公司 | Large-angle antireflection film, optical lens and imaging device |
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CN107957600A (en) * | 2018-01-17 | 2018-04-24 | 江苏康耐特光学有限公司 | A kind of anti-reflection anti-infrared plated film resin lens and preparation method thereof |
CN108761582A (en) * | 2018-07-10 | 2018-11-06 | 浙江舜宇光学有限公司 | Film layer structure and lens barrel comprising the film layer structure |
CN210347972U (en) * | 2019-06-28 | 2020-04-17 | 浙江舜宇光学有限公司 | Optical lens plated with antireflection film system and optical lens |
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WO1991008106A1 (en) * | 1989-12-01 | 1991-06-13 | Viratec Thin Films, Inc. | Antireflection layer system with integral uv blocking properties |
CN107957600A (en) * | 2018-01-17 | 2018-04-24 | 江苏康耐特光学有限公司 | A kind of anti-reflection anti-infrared plated film resin lens and preparation method thereof |
CN108761582A (en) * | 2018-07-10 | 2018-11-06 | 浙江舜宇光学有限公司 | Film layer structure and lens barrel comprising the film layer structure |
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CN111897034A (en) * | 2020-08-21 | 2020-11-06 | 福建福特科光电股份有限公司 | Super large angle subtracts anti-lens |
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CN115308820A (en) * | 2022-08-12 | 2022-11-08 | 江苏斯迪克新材料科技股份有限公司 | Semi-transparent semi-reflective waterproof film, optical lens and imaging device |
CN115421225A (en) * | 2022-08-12 | 2022-12-02 | 江苏斯迪克新材料科技股份有限公司 | Large-angle antireflection film, optical lens and imaging device |
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