CN110132939A - A kind of confocal-photoelectric current test macro - Google Patents
A kind of confocal-photoelectric current test macro Download PDFInfo
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- CN110132939A CN110132939A CN201910506433.7A CN201910506433A CN110132939A CN 110132939 A CN110132939 A CN 110132939A CN 201910506433 A CN201910506433 A CN 201910506433A CN 110132939 A CN110132939 A CN 110132939A
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- 238000012360 testing method Methods 0.000 title claims abstract description 65
- 239000000523 sample Substances 0.000 claims abstract description 91
- 230000005611 electricity Effects 0.000 claims abstract description 35
- 238000001069 Raman spectroscopy Methods 0.000 claims abstract description 19
- 230000003287 optical effect Effects 0.000 claims abstract description 10
- 238000006073 displacement reaction Methods 0.000 claims description 20
- 238000001228 spectrum Methods 0.000 claims description 2
- 230000005622 photoelectricity Effects 0.000 abstract description 12
- 238000012512 characterization method Methods 0.000 abstract description 5
- 238000004458 analytical method Methods 0.000 abstract description 2
- 230000003595 spectral effect Effects 0.000 abstract description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 7
- 229910021389 graphene Inorganic materials 0.000 description 6
- 239000000463 material Substances 0.000 description 4
- 239000013078 crystal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000001237 Raman spectrum Methods 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 150000001336 alkenes Chemical class 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- CWQXQMHSOZUFJS-UHFFFAOYSA-N molybdenum disulfide Chemical compound S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 description 1
- 229910052982 molybdenum disulfide Inorganic materials 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
- G01N2223/084—Investigating materials by wave or particle radiation secondary emission photo-electric effect
Abstract
The invention discloses a kind of confocal-photoelectric current test macros, it is related to photoelectricity test and Raman testing field, main control device passes through laser in the system, optical splitter, the cooperation of microcobjective and spectrometer can be with the raman spectral signal of the sample to be tested on collecting test platform, the photo-signal of the sample to be tested can be acquired by the cooperation of electricity probe and lock-in amplifier simultaneously, so that the system, which can separately or concurrently treat test sample, carries out Raman test and photoelectricity current test, to which the physical characteristic and device performance to photoelectric device carry out quick accurate Characterization, analysis foundation is provided for the promotion of photoelectric device performance.
Description
Technical field
The present invention relates to photoelectricity test and Raman testing field, especially a kind of confocal-photoelectric current test macro.
Background technique
Graphene be 2004 discovery new carbon, have linear electron band structure, big carrier mobility,
The excellent photoelectric characteristics such as height-adjustable fermi level and good light permeability (fine constant relevant absorption coefficient).Utilize stone
It is the research key point that graphene moves towards large-scale application that unique photoelectric characteristic of black alkene, which prepares high performance electrooptical device,.
Therefore, how fastly in the heterogeneous device of graphene, the quality and interfacial state of graphene play a key effect to the performance of device,
The quality of the speed graphene that nondestructively characterization is transferred on semiconductor is most important.
Summary of the invention
The present inventor regarding to the issue above and technical need, proposes a kind of confocal-photoelectric current test macro, should
System can treat test sample and separately or concurrently carry out Raman test and photoelectricity current test, to treat the physics of test sample
Characteristic and device performance carry out quick accurate Characterization.
Technical scheme is as follows:
A kind of confocal-photoelectric current test macro, including sample to be tested, the confocal-photoelectricity current test
System includes main control device, testboard, laser, optical splitter, microcobjective, spectrometer, electricity probe and lock-in amplifier；
Sample to be tested is placed on testboard, the sample to be tested on microcobjective face testboard, the laser letter that laser issues
It number is focused on sample to be tested after optical splitter is divided by microcobjective, the Raman signal that sample to be tested generates is by micro- object
Spectrometer is collected and be coupled to mirror, and spectrometer is electrically connected main control device；Be connected to electricity probe on testboard, electricity probe with to
The contact electrode of test sample, electricity probe connect lock-in amplifier, and lock-in amplifier is connected to main control device, main control device
It separately or concurrently treats test sample and carries out Raman test and photoelectricity current test.
Its further technical solution is that electricity probe connects lock-in amplifier by source table, and source table is for passing through electricity
Probe treats test sample and applies zero-bias and measure from the photoelectric respone for driving sample, alternatively, source table is used to visit by electricity
Apply none zero bias for sample to be tested and measures non-from the photoelectric respone for driving sample.
Its further technical solution is, testboard is electric test bench, testboard include the first displacement drive and
Second displacement driving device, main control device connect and drive the first displacement drive and second displacement driving device, and first
It moves driving device and second displacement driving device is respectively used to the both direction movement perpendicular in horizontal plane of driving testboard, survey
Test stand drives sample to be tested condition mobile to microcobjective and electricity probe.
Its further technical solution is that laser is multiple spot line laser mould group.
The method have the benefit that:
This application discloses a kind of confocal-photoelectric current test macro, in the system main control device by laser,
The cooperation of optical splitter, microcobjective and spectrometer can be with the raman spectral signal of the sample to be tested on collecting test platform, simultaneously
The photo-signal that the sample to be tested can be acquired by the cooperation of electricity probe and lock-in amplifier, so that the system can
Raman test and photoelectricity current test are carried out separately or concurrently to treat test sample, thus to the physical characteristic and device of photoelectric device
Part performance carries out quick accurate Characterization, provides analysis foundation for the promotion of photoelectric device performance.
Main control device control testboard drives the movement of sample to be tested, can treat automatically test sample surface and be swept
It retouches, the Raman signal scan image and photoelectric current scan image of sample surfaces to be tested is obtained, so as to large area phototube
Part surfacing quality, device performance are detected.
Detailed description of the invention
Fig. 1 is confocal disclosed in the present application-photoelectric current test macro.
Fig. 2 is the enlarged drawing of the package assembly in the application between testboard and electricity probe.
Specific embodiment
The following further describes the specific embodiments of the present invention with reference to the drawings.
This application discloses a kind of confocal-photoelectric current test macros, referring to FIG. 1, the system includes that master control is set
Standby 1, testboard 2, laser 3, optical splitter 4, microcobjective 5, spectrometer 6, electricity probe 7 and lock-in amplifier 8.It is to be tested
Sample M is placed on testboard 2, and laser 3 issues laser signal as light source and is irradiated on optical splitter 4, and optical splitter 4 is to laser
Signal is irradiated to microcobjective 5 after being split, the sample M to be tested on 5 face testboard 2 of microcobjective, microcobjective 5 will
Laser signal after beam splitting focuses on sample M to be tested.The Raman signal that sample M to be tested is generated is collected by microcobjective 5
And be coupled to spectrometer 6 and handled, spectrometer 6 is electrically connected main control device 1 and the spectroscopic data of generation is transmitted to master control
Equipment 1 is analyzed.Main control device 1 is the intellectual computing device with data processing and control ability, is including but not limited to counted
Word computer, Industrial Control Computer, DSP digital signal processor and Single Chip MC in Embedded System.
Meanwhile electricity probe 7 is connected on testboard 2, usually include two electricity probes 7, electricity probe 7 with it is to be tested
The contact electrode of sample M.Please refer to Fig. 2 shows the enlarged drawing to the package assembly between testboard 2 and electricity probe 7,
Insulating layer 11 is deposited on testboard 2, sample M to be tested is placed on insulating layer 11, the upper and lower surface deposition of sample M to be tested
Have an electrode 12, the two sides of sample M to be tested respectively there are two electricity probe 7, the electricity probe 7 of two sides respectively with sample to be tested
The electrode 12 of the upper and lower surface of M is in contact.
Electricity probe 7 is connected to lock-in amplifier 8, and in this application, electricity probe 7 connects locking phase amplification by source table 9
Collected electrical signal is sent to source table 9 and lock-in amplifier 8 and carries out signal processing, source table 9 and locking phase by device 8, electricity probe 7
Amplifier 8 is grounded respectively.Source table 9 can be treated test sample M by electricity probe 7 and apply zero-bias, be can measure at this time from driving
The photoelectric respone of sample.Alternatively, source table 9 can treat test sample M by electricity probe 7 applies none zero bias, can measure at this time
The non-photoelectric respone from driving sample.Lock-in amplifier 8 is connected to main control device 1, and practical is usually to pass through photosignal interface
10 are connected to main control device 1, and the amplified signal of lock-in amplifier 8 is converted into corresponding photoelectric current by photosignal interface 10
Then information is collected by main control device 1.
Practical disclosed system includes two modules: by main control device 1, testboard 2, laser 3, optical splitter 4,
The spectrum test module treated test sample M and carry out Raman spectrum test that microcobjective 5 and spectrometer 6 form；And by
What control equipment 1, testboard 2, electricity probe 7, lock-in amplifier 8, source table 9 and photosignal interface 10 formed treats test sample
The photoelectric current test module of M progress photoelectricity current test.Two modules share main control device 1 and testboard 2, which not only can be with
Test sample M is individually treated respectively and carries out Raman test and photoelectricity current test, can also be treated test sample M simultaneously and be carried out Raman
Test and photoelectricity current test.Raman is tested achievable quick nondestructive and is characterized in the crystal structure and orientation, material of sample M to be tested
Portion's stress, chemical component and characteristics of luminescence etc. can also obtain the two-dimensional/three-dimensional of material crystals and luminosity by Raman image
Spatial distribution.Photoelectricity current test can get the photoelectricity flow imaging of micro-nano device and its photoelectric respone efficiency of different location, can
The nonequilibrium state carrier of micro-nano device is studied, the electrical properties such as local electric field intensity, right in doping concentration distribution and material
The photoelectric device performance for studying the new materials such as graphene, molybdenum disulfide is most important.Therefore the application can be simultaneously to phototube
The physical characteristic and device performance of part carry out quick accurate Characterization.
Further, the testboard 2 in the application be electric test bench, testboard 2 include the first displacement drive and
The practical structures of second displacement driving device, the first displacement drive and second displacement driving device can there are many, such as
It is constituted using servo-system.Main control device 1 connects and drives the first displacement drive and second displacement driving device, the two
The driving direction of displacement drive in the horizontal direction and is mutually perpendicular to namely the first displacement drive and second displacement
Driving device is respectively used to the both direction movement perpendicular in horizontal plane of driving testboard 2, and testboard 2 drives sample to be tested
M is mobile relative to microcobjective 5 and electricity probe 7, so that sweeping for test sample M is treated in microcobjective 5 and the realization of electricity probe 7
Retouch, then main control device 1 drives sample M to be tested mobile by controlling testboard 2, can individually treat respectively test sample M into
The sweep test of row Raman and photoelectric current sweep test can also treat test sample M simultaneously and carry out Raman sweep test and photoelectricity
Scan flow test.Further, in order to save the test required time, the application laser 3 uses multiple spot line laser mould group,
Compared with common Typical laser mould group, testboard 2 need to drive sample M to be tested mobile be able to achieve is swept in one direction
It retouches.
Above-described is only the preferred embodiment of the application, and present invention is not limited to the above embodiments.It is appreciated that this
The other improvements and change that field technical staff directly exports or associates without departing from the spirit and concept in the present invention
Change, is considered as being included within protection scope of the present invention.
Claims (4)
1. a kind of confocal-photoelectric current test macro, including sample to be tested, which is characterized in that the confocal-
Photoelectric current test macro include main control device, testboard, laser, optical splitter, microcobjective, spectrometer, electricity probe and
Lock-in amplifier；The sample to be tested is placed on the testboard, the institute on testboard described in the microcobjective face
Sample to be tested is stated, the laser signal that the laser issues focuses on institute by the microcobjective after optical splitter light splitting
It states on sample to be tested, the Raman signal that the sample to be tested generates is collected by the microcobjective and is coupled to the spectrum
Instrument, the spectrometer are electrically connected the main control device；Be connected to the electricity probe on the testboard, the electricity probe with
The contact electrode of the sample to be tested, the electricity probe connect the lock-in amplifier, the lock-in amplifier connection
To the main control device, the main control device separately or concurrently carries out Raman test to the sample to be tested and photoelectric current is surveyed
Examination.
2. confocal according to claim 1-photoelectric current test macro, which is characterized in that the electricity probe is logical
It crosses source table and connects the lock-in amplifier, the source table is used to apply zero bias to the sample to be tested by the electricity probe
It presses and measures from the photoelectric respone for driving sample, alternatively, the source table is used for through the electricity probe to the sample to be tested
Product apply none zero bias and measure non-from the photoelectric respone for driving sample.
3. confocal according to claim 1-photoelectric current test macro, which is characterized in that the testboard is electricity
Dynamic testboard, the testboard include the first displacement drive and second displacement driving device, and the main control device connection is simultaneously
Drive first displacement drive and second displacement driving device, first displacement drive and second displacement driving
Device is respectively used to drive the testboard mobile in the perpendicular both direction of horizontal plane, and the testboard drives described to be measured
Test agent is mobile relative to the microcobjective and the electricity probe.
4. confocal according to claim 1-photoelectric current test macro, which is characterized in that the laser is more
Dotted line mode of laser group.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201910506433.7A CN110132939A (en) | 2019-06-12 | 2019-06-12 | A kind of confocal-photoelectric current test macro |
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| CN201910506433.7A CN110132939A (en) | 2019-06-12 | 2019-06-12 | A kind of confocal-photoelectric current test macro |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111855633A (en) * | 2020-08-21 | 2020-10-30 | 中国科学院长春应用化学研究所 | Rapid automatic accurate alignment system for steady-state transient fluorescence spectrum measurement technology and control method |
| CN113009247A (en) * | 2021-01-29 | 2021-06-22 | 电子科技大学 | Characteristic testing device of organic photoelectric sensor |
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