CN110124920A - A kind of nozzle cleaning device and coating apparatus - Google Patents
A kind of nozzle cleaning device and coating apparatus Download PDFInfo
- Publication number
- CN110124920A CN110124920A CN201910464860.3A CN201910464860A CN110124920A CN 110124920 A CN110124920 A CN 110124920A CN 201910464860 A CN201910464860 A CN 201910464860A CN 110124920 A CN110124920 A CN 110124920A
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- Prior art keywords
- nozzle
- cleaned
- scraping blade
- cleaning device
- spout
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
- B05B15/50—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter
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- Coating Apparatus (AREA)
Abstract
The present invention discloses a kind of nozzle cleaning device and coating apparatus, nozzle cleaning device includes: two squeegee units being oppositely arranged and driving unit, each squeegee unit includes at least two scraping blade disposed in parallel, the length direction of scraping blade is parallel to the length direction of nozzle to be cleaned, driving unit is for driving the squeegee unit to clean nozzle to be cleaned, so that the cleaning end of the scraping blade of squeegee unit wipes corresponding surface to be cleaned, scrape off PI glue remained on surface to be cleaned, to, in the preparation process of flexible display panels, avoid the inorganic film or technique board of the remaining PI glue pollution subsequent technique in nozzle two sides, and remaining PI glue is avoided to kill rear plug nozzle slit exit, and then improve the yield rate and craft precision of flexible substrate.
Description
Technical field
The present invention relates to coating apparatus technical field more particularly to a kind of nozzle cleaning devices and coating apparatus.
Background technique
With the development of display technology, flexible display apparatus shows the prospect of being more and more widely used, and flexibility OLED
Display device accounts for rate and constantly rises as the flexible display technologies being currently most expected, various aspects investment and city.
Prepared by the mode that the flexible substrate of realization flexible bendable display panel generallys use coating at present, in preparation process
In, the nozzle for coating is easy the residue there are spray coating liquor, and the residue of the spray coating liquor on nozzle is easy to subsequent technique
Board generate pollution, influence the yield rate and craft precision of flexible substrate.
Summary of the invention
The embodiment of the invention provides a kind of nozzle cleaning device and coating apparatus, can be avoided the remaining PI in nozzle two sides
The inorganic film or technique board of glue stain subsequent technique, and remaining PI glue is avoided to kill rear plug nozzle slit exit,
And then improve the yield rate and craft precision of flexible substrate.
In a first aspect, the embodiment of the invention provides a kind of nozzle cleaning devices, comprising:
Two squeegee units being oppositely arranged, each squeegee unit include at least two scraping blade disposed in parallel, often
The cleaning end of at least two scraping blades of one squeegee unit is generally aligned in the same plane；
Driving unit, for driving the squeegee unit to clean nozzle to be cleaned.
Optionally, the driving unit is for driving the squeegee unit along the surface to be cleaned by separate described to clear
One end of the discharge port of clean nozzle is moved to the direction of the discharge port of the nozzle to be cleaned.
Optionally, nozzle cleaning device further includes two mounting assemblies corresponding with two squeegee units, two institutes
The scraping blade for stating squeegee unit is separately mounted to two mounting assemblies close to the side of the nozzle to be cleaned.
Optionally, the angle that the surface to be cleaned of the scraping blade and the nozzle to be cleaned is formed described is scraped less than 90 °
The cleaning end of piece is vertically lower than the installation end with the scraping blade.
Optionally, spout is additionally provided in the mounting assembly；
The notch setting, close to the surface of the nozzle to be cleaned, is used for the scraping blade surface in the mounting assembly
And/or the surface to be cleaned sprays cleaning solution or clean gas.
Optionally, each scraping blade is correspondingly arranged on a spout, and the spout is located at the corresponding scraping blade
Lower section, the spout are used to spray cleaning solution or clean gas to the lower surface of the corresponding scraping blade.
Optionally, each spout is connected to at least one gas distribution channel and at least one infusion channel；
The gas distribution channel is used to convey clean gas to the spout, and the infusion channel is used to convey to the spout
Cleaning solution.
Optionally, the spout is the slit being set in the mounting assembly, and the slit includes two be oppositely arranged
A side, the extended surface of side scraping blade corresponding with the slit intersect.
Optionally, nozzle cleaning device further includes fraction collection slot, for receiving the squeegee unit from described to clear
The residue scraped on clean nozzle.
Second aspect further includes such as first party of the present invention the embodiment of the invention provides a kind of coating apparatus, including nozzle
Nozzle cleaning device described in face.
Nozzle cleaning device nozzle cleaning device provided in an embodiment of the present invention includes two squeegee units being oppositely arranged,
Each squeegee unit includes at least two scraping blades, and the cleaning end of at least two scraping blades is generally aligned in the same plane, to spray to be cleaned
When mouth is cleaned, the cleaning end of at least two scraping blades can be contacted with surface to be cleaned, and one time cleaning action may be implemented
Multiple clean effect, improves the cleaning capacity of nozzle cleaning device, nozzle cleaning device is effectively removed to clear
Clean PI glue remained on surface, to effectively avoid the remaining PI glue in nozzle two sides dirty in the preparation process of flexible display panels
The inorganic film or technique board of subsequent technique are contaminated, and remaining PI glue is avoided to kill rear plug nozzle slit exit, in turn
Improve the yield rate and craft precision of flexible substrate.
Detailed description of the invention
The present invention will be further described in detail below based on the drawings and embodiments.
Fig. 1 is a kind of structural schematic diagram of nozzle；
Fig. 2 is a kind of cross-sectional view of nozzle cleaning device provided in an embodiment of the present invention；
Fig. 3 is the top view of nozzle cleaning device in Fig. 2；
Fig. 4 is a kind of cross-sectional view of nozzle cleaning device.
Specific embodiment
To keep the technical problems solved, the adopted technical scheme and the technical effect achieved by the invention clearer, below
It will the technical scheme of the embodiment of the invention will be described in further detail in conjunction with attached drawing, it is clear that described embodiment is only
It is a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, those skilled in the art exist
Every other embodiment obtained under the premise of creative work is not made, shall fall within the protection scope of the present invention.
In the description of the present invention unless specifically defined or limited otherwise, term " connected ", " connection ", " fixation " are answered
It is interpreted broadly, for example, it may be being fixedly connected, may be a detachable connection, or is integral；It can be mechanical connection；It can
To be to be connected directly, connection inside two elements or two elements can also be can be indirectly connected through an intermediary
Interaction relationship.For the ordinary skill in the art, above-mentioned term can be understood in the present invention with concrete condition
Concrete meaning.
In the present invention unless specifically defined or limited otherwise, fisrt feature second feature "upper" or "lower"
It may include that the first and second features directly contact, also may include that the first and second features are not direct contacts but pass through it
Between other characterisation contact.Moreover, fisrt feature includes the first spy above the second feature " above ", " above " and " above "
Sign is right above second feature and oblique upper, or is merely representative of first feature horizontal height higher than second feature.Fisrt feature exists
Second feature " under ", " lower section " and " following " include that fisrt feature is directly below and diagonally below the second feature, or is merely representative of
First feature horizontal height is less than second feature.
Just as mentioned in the background art, the flexible substrate of existing flexible bendable display panel during the preparation process,
The residue of spray coating liquor on the nozzle of coating is easy to generate pollution to the board of subsequent technique, influences the system of display panel
Standby precision.Inventor has found that the reasons for the above problems are: the flexibility of flexible bendable display panel at present
Substrate generallys use Kapton and is alternately stacked with inorganic matter film layer, and the substrate layer of flexible display device is collectively formed.And
Polyimides (Polyimide, PI) film layer as wherein important component mainly passes through slot coated (Slot Die
Coating mode) realizes,
Fig. 1 is a kind of structural schematic diagram of nozzle, as shown in Figure 1, nozzle is slot coated nozzle, the cross section of nozzle is in
V-type, slit discharge port are located at the lower end of V-structure.In coating, nozzle is transported in the horizontal plane along the direction perpendicular to slit
It is dynamic, and then polyimide film layer is formed on substrate.Due to forming the precursor solution of the polyimide film layer of flexible substrate
(abbreviation PI glue) viscosity in 3000-7000cps, causes coating nozzles in coating, nozzle two sides or nozzle edge can be residual
Part PI glue is stayed, as shown in figure 1 shown in A, the inorganic film or technique of subsequent technique are polluted in flexible display panels preparation process
Board, and remaining PI glue kill after can plug nozzle slit exit to influence subsequent coating homogeneity lead to flexible liner
The craft precision at bottom reduces, and even results in panel and scraps.
In view of the above-mentioned problems, a kind of nozzle cleaning device is present embodiments provided, to remove the remaining PI of nozzle edge
Glue, the nozzle cleaning device include:
Two squeegee units being oppositely arranged, each squeegee unit includes at least two scraping blade disposed in parallel, each to scrape
The cleaning end of at least two scraping blades of blade unit is generally aligned in the same plane；
Driving unit, for driving the squeegee unit to clean nozzle to be cleaned.
Wherein, driving unit can drive squeegee unit to move along the direction close to or far from nozzle to be cleaned, and drive
Squeegee unit is moved along the surface to be cleaned of parallel nozzle to be cleaned, and perpendicular to the length direction of scraping blade, so that squeegee unit
It treats clean surface to be cleaned, the length direction of scraping blade is parallel to the length direction of nozzle to be cleaned.Scraping blade for scrape off to
Residual PI glue on the surface to be cleaned of cleaning nozzle, one end that scraping blade is contacted with nozzle to be cleaned are the cleaning end of scraping blade, often
The cleaning end of at least two scraping blades of one squeegee unit is generally aligned in the same plane, when treating cleaning nozzle and being cleaned, at least two
Plane where the cleaning end of a scraping blade is parallel with corresponding surface to be cleaned, i.e., the cleaning end of at least two scraping blades with it is to be cleaned
Surface contact, a cleaning action may be implemented multiple clean effect, improve the cleaning capacity of nozzle cleaning device.
The nozzle cleaning device of the present embodiment includes two squeegee units being oppositely arranged, and each squeegee unit includes at least
Two scraping blades, and the cleaning end of at least two scraping blades is generally aligned in the same plane, when treating cleaning nozzle and being cleaned, at least two
The cleaning end of scraping blade can be contacted with surface to be cleaned, and multiple clean effect may be implemented in a cleaning action, improve spray
The cleaning capacity of mouth cleaning device allows nozzle cleaning device effectively to remove PI glue remained on surface to be cleaned, thus
In the preparation process of flexible display panels, effectively avoid nozzle two sides remaining PI glue pollution subsequent technique inorganic film or
Technique board, and remaining PI glue is avoided to kill rear plug nozzle slit exit, so improve flexible substrate yield rate and
Craft precision.
In order to illustrate more clearly of technical solution of the present invention, combined with specific embodiments below to technical solution of the present invention
It is illustrated.
Fig. 2 is a kind of cross-sectional view of nozzle cleaning device provided in an embodiment of the present invention, and Fig. 3 is nozzle in Fig. 2
The top view of cleaning device, for clearer description technical solution of the present invention, as shown in Figures 2 and 3, two squeegee units
First direction X in along the horizontal plane is oppositely arranged, and each squeegee unit is arranged including Z along the vertical direction, and three to be parallel to each other
A scraping blade 111, wherein the length direction of scraping blade 111 is parallel to the second direction Y in horizontal plane, and second direction Y is perpendicular to first
Direction X and vertical direction Z, the length direction of nozzle 200 to be cleaned are parallel to second direction Y.Three of each squeegee unit scrape
The cleaning end 1110 of piece 111 is generally aligned in the same plane, i.e. three scraping blades 111 surface to be cleaned corresponding with nozzle 200 to be cleaned
Contact jaw when 201 contact is generally aligned in the same plane, in one embodiment, the cleaning end of three scraping blades 111 of squeegee unit
Plane where 1110 is parallel to corresponding surface to be cleaned 201.
Driving unit (not shown) can be moved by driving squeegee unit along first direction X, lean on squeegee unit
It moves, makes along first direction X and vertical direction Z both direction close or remote from nozzle 200 to be cleaned, and by driving squeegee unit
Squeegee unit moves in XZ plane along the surface to be cleaned 201 for being parallel to nozzle 200 to be cleaned, so that the cleaning of scraping blade 111
End 1110 wipes surface 201 to be cleaned, treats clean surface 201 and is cleaned.
Specifically, driving unit drives two squeegee units along first when needing to treat cleaning nozzle 200 and being cleaned
Direction X is moved toward one another, respectively close to two surfaces 201 to be cleaned of nozzle 200 to be cleaned, until the scraping blade of two squeegee units
111 cleaning end 1110 is contacted with corresponding surface 201 to be cleaned, and then, driving unit drives two squeegee units flat in XZ
It moves in face along the surface to be cleaned 201 for being parallel to nozzle 200 to be cleaned, is corresponded to so that the cleaning end 1110 of scraping blade 111 wipes
Surface to be cleaned 201, treat clean surface 201 and cleaned, scrape off the remaining PI glue in surface 201 to be cleaned.Squeegee unit
Including at least two scraping blades 111, primary wiping movement can treat clean surface 210 and be wiped at least twice, improve nozzle
The cleaning capacity of cleaning device.
It should be noted that the present embodiment it is merely exemplary show the driving method of driving unit, not to the present invention
Restriction, in other embodiments, can also use other driving methods, as long as can be realized treat cleaning nozzle surface into
Row wipes.Illustratively, driving unit can drive squeegee unit to move along the direction perpendicular to nozzle surface to be cleaned,
Make squeegee unit close to or far from nozzle to be cleaned, and drives squeegee unit along the surface to be cleaned of parallel nozzle to be cleaned, and
Perpendicular to length direction (second direction Y) movement of scraping blade, so that squeegee unit is treated clean surface and is cleaned, the length of scraping blade
Degree is oriented parallel to the length direction of nozzle to be cleaned.
Nozzle cleaning device provided in this embodiment, including two squeegee units being oppositely arranged and driving unit, driving
Unit drives squeegee unit to move along the surface to be cleaned of parallel nozzle to be cleaned, and perpendicular to the length direction of scraping blade, so that
The cleaning end of the scraping blade of squeegee unit wipes corresponding surface to be cleaned, scrapes off PI glue remained on surface to be cleaned, thus, soft
Property display panel preparation process in, avoid the inorganic film or technique machine of nozzle two sides remaining PI glue pollution subsequent technique
Platform, and avoid remaining PI glue from killing rear plug nozzle slit exit, and then improve the production precision of display panel；In addition,
Each squeegee unit is provided at least two scraping blades, and primary wiping movement can treat clean surface and be wiped at least twice,
Improve the cleaning capacity of nozzle cleaning device.
It should be noted that the merely exemplary each squeegee unit that shows of the present embodiment includes three scraping blades, not pair
Restriction of the invention, in other embodiments, each squeegee unit can also include multiple scraping blades.
Optionally, driving unit is used to drive squeegee unit along surface 201 to be cleaned by going out far from nozzle 200 to be cleaned
One end of material mouth 203 is moved to the direction of the discharge port 203 of nozzle 200 to be cleaned.I.e. driving unit drives squeegee unit in XZ
It is moved obliquely in plane along the surface to be cleaned 201 for being parallel to nozzle 200 to be cleaned, by the residual on surface 201 to be cleaned
PI glue scrapes off, and the PI glue scraped is directly fallen, and will not be deposited on scraping blade 111, without carrying out additional processing to scraping blade 111.
Optionally, the length of the cleaning end 1110 of scraping blade 111 is greater than or equal to the length of nozzle 200 to be cleaned.
In this way, squeegee unit is to be cleaned along being parallel in XZ plane when treating cleaning nozzle 200 and being cleaned
The surface to be cleaned 201 of nozzle 200 moves obliquely, only need to once be the whole surface on cleanable surface 201 to be cleaned, be not necessarily to
Repeatedly movement.
In one embodiment of the invention, as shown in figure 3, the length D1 of the cleaning end of scraping blade 111 is equal to spray to be cleaned
The length D2 of mouth 200.
It should be noted that in another embodiment of the invention, the length of the cleaning end of scraping blade 111 might be less that
The length of cleaning nozzle 200, squeegee unit are oblique along the surface to be cleaned 201 for being parallel to nozzle 200 to be cleaned in XZ plane
Lower movement, the partial region for treating clean surface 201 are cleaned, then, squeegee unit in a second direction Y it is mobile certain away from
From, and the cleaning action before repetition, until the cleaning of the whole surface of clean surface 201 is treated in completion.
In embodiments of the present invention, as shown in Fig. 2, nozzle cleaning device further includes two corresponding with two squeegee units
Mounting assembly 120, the scraping blade 111 of two squeegee units are separately mounted to two mounting assemblies 120 close to nozzle 200 to be cleaned
On side 121.Specifically, a part of scraping blade 111 is embedded in inside mounting assembly 120, another part self installation component 120
Side 121 is stretched out, and the end for being embedded in the part inside mounting assembly 120 is the installation end 1111 of scraping blade 111, extension
End is the cleaning end 1110 of scraping blade 111.Driving unit drives squeegee unit to transport by the movement of driving mounting assembly 120
It is dynamic, to clean nozzle 200 to be cleaned.
The v-angle of the angle of two sides 121 of mounting assembly 120 and nozzle 200 to be cleaned is adapted, that is, be greater than or
Equal to the angle on two surfaces 201 to be cleaned of nozzle 200 to be cleaned.In one embodiment, as shown in figure 3, side 121
It is parallel with corresponding surface 201 to be cleaned.
Fig. 4 is a kind of cross-sectional view of nozzle cleaning device, in the embodiment shown in fig. 4, the surface of scraping blade 111
It is at an angle with corresponding surface 201 to be cleaned, and the cleaning end 1110 of scraping blade 111 is higher than scraping blade on vertical direction Z
111 installation end 1111, it moves, scrapes when driving unit driving squeegee unit edge in XZ plane is parallel to surface 201 to be cleaned
When wiping surface 201 to be cleaned, the PI glue scraped from surface to be cleaned can flow to scraping blade 111 and mounting assembly 120 along scraping blade 111
Link position, cause PI glue accumulation be difficult to clean off at this location.In addition, in embodiments of the present invention, in driving unit
Drive squeegee unit in XZ plane along be parallel to surface 201 to be cleaned move move obliquely in the case where, scraping blade 111 it is clear
Inclination be easy to cause the cleaning end 1110 of scraping blade 111 to bend damage upwards at clean end 1110.
To solve the above problems, in one embodiment of the invention, as shown in Fig. 2, the surface of scraping blade 111 with it is corresponding
The angle on surface 201 to be cleaned is acute angle, i.e. the angle on the surface to be cleaned 201 of scraping blade 111 and nozzle to be cleaned less than 90 °,
And the cleaning end 1110 of scraping blade 111 is lower than the installation end 1111 with scraping blade 111 on vertical direction Z.
Specifically, being moved when driving unit driving squeegee unit edge in XZ plane is parallel to surface 201 to be cleaned, wipe
When surface 201 to be cleaned, the PI glue scraped from surface to be cleaned can flow to the cleaning end 1110 of scraping blade 111 along scraping blade 111,
After scraping blade 111 and surface 201 to be cleaned are detached from, PI glue can directly be fallen, and will not be deposited on scraping blade 111, without to scraping blade 111
Carry out additional processing.In addition, in embodiments of the present invention, being parallel on driving unit driving squeegee unit edge in XZ plane
In the case that the movement of surface 201 to be cleaned moves obliquely, the bending damage of cleaning end 1110 of scraping blade 111 can be avoided.
In one embodiment of the invention, as shown in Fig. 2, being additionally provided with spout 122 in mounting assembly 120, spout 122
Mounting assembly 120 is set to close to the surface of nozzle 200 to be cleaned, i.e. the side 121 that mounting assembly 120 is set of spout 122
On, for spraying cleaning solution or clean gas to the surface of scraping blade 111 and/or surface to be cleaned 201.Spout 122 sprays cleaning
Liquid or clean gas wash away scraping blade 111 and surface to be cleaned 201, auxiliary removal scraping blade 111 and surface to be cleaned 201
On PI glue, improve the cleaning capacity of nozzle cleaning device.
Wherein, cleaning solution can be N-Methyl pyrrolidone solution (nmp solution), and nmp solution can dissolve the PI of hardening
Glue, clean gas can be dry gas, specifically, can be the nitrogen of dry air or drying.
Illustratively, as shown in Fig. 2, each scraping blade 111, which is correspondingly arranged on 122 spout 122 of a spout, is set to installation group
The side 121 of part 120, and it is located at the lower section of corresponding scraping blade 111, spout 122 is used to spray to the lower surface of corresponding scraping blade 111
Cleaning solution or clean gas out, with to scraping blade 111 lower surface and surface to be cleaned 201 be rinsed or dry up, realize to every
One scraping blade 111 is rinsed and dries, and PI glue and cleaning solution is avoided to remain on scraping blade 111.
Optionally, with reference to Fig. 2, spout 122 is the slit being set in mounting assembly 120, and slit is embedded in mounting assembly
Inside, slit include two sides (1221 and 1222) opposite and disposed in parallel, the extended surface of side (1221 and 1222) with
The corresponding scraping blade 111 of slit intersects.
Specifically, the lower section of each scraping blade 111 is provided with slit, and the outlet end of the slit is used for inside mounting assembly 120
Clean gas or cleaning solution are sprayed to scraping blade, the input end 123 of slit is for inputting clean gas or cleaning solution.Clean gas or
Cleaning solution is inputted from the input end 123 of slit, inside slit, is sprayed from spout 122, due to slit two sides with it is corresponding
Scraping blade 111 surface intersection so that from spout 122 spray cleaning solution or clean gas spray to corresponding scraping blade 111
Lower surface.
It should be noted that having the cleaning that residue glue is attached to scraping blade 111 when scraping blade 111 wipes surface 201 to be cleaned
The case where lower surface at end 1110 or even residue glue can be spread to the position far from cleaning end 1110.It can be according to 111 following table of scraping blade
The sprawling situation of the residue glue of face attachment, adjusts the angle of the side of slit and the surface of scraping blade 111, to 111 lower surface of scraping blade
The residue glue of attachment is rinsed.It, can be with when discovery residue glue is attached to the end of the cleaning end 1110 of scraping blade 111 for example, when cleaning
The angle of the appropriate side for reducing slit and the surface of scraping blade 111, so that the cleaning solution or clean gas that spray are sprayed to scraping blade
111 extensions are close to the position of cleaning end 1110；When finding that the case where residue glue is spread far from cleaning end 1110 is more serious, i.e.,
Residue glue spread to installation end 1111 it is more when, can suitably increase the angle of the side of slit and the surface of scraping blade 111 so that
The cleaning solution or clean gas of ejection are sprayed to 111 extension of scraping blade (i.e. scraping blade 111 extend mounting assembly 120 part)
Position apart from 1110 set distance of cleaning end.Residue glue is to far from cleaning end 1110 when in a particular embodiment, due to cleaning
The midpoint of sprawling usually not more than 111 extension of scraping blade, therefore, can with the surface of the side of fixed slit and scraping blade 111,
So that cleaning solution or clean gas that spout 122 sprays are sprayed to the midpoint of 111 extension of scraping blade.
It should be noted that in another embodiment of the present invention, spout 122 is also possible to multiple Y in a second direction
Arrangement, discrete hole equally can spray cleaning solution or clean gas to the lower surface of corresponding scraping blade 111, to scraping blade
111 lower surface and surface to be cleaned 201 are rinsed or dry up.
In one embodiment of the invention, each spout at least one gas distribution channel and at least one infusion channel
Connection, gas distribution channel are used to convey clean gas to spout 122, and infusion channel is used to convey cleaning solution to spout 122.It is exemplary
, as shown in Fig. 2, a plurality of gas distribution channel and a plurality of infusion channel (not shown) can connect the input end 123 in slit.
By a plurality of gas distribution channel and a plurality of infusion channel is supplied gas spout 122 or liquor charging, improves each position of spout 122 and sprays
Liquid or gas uniformity.
In one embodiment, it is illustrated, is being needed to spray to be cleaned by taking nozzle cleaning device shown in Fig. 2 as an example
When mouth 200 is cleaned, driving unit drives two mounting assemblies 120 to carry squeegee unit and moves toward one another along first direction X, point
Not close to two surfaces 201 to be cleaned of nozzle 200 to be cleaned, until the cleaning end of the scraping blade 111 of two squeegee units with it is right
The surface to be cleaned 201 answered contacts, and then, driving unit drives mounting assembly 120 to carry squeegee unit in XZ plane along flat
Row moves obliquely in the surface to be cleaned 201 of nozzle 200 to be cleaned, while spout 122 is to the lower surface of corresponding scraping blade 111
High pressure nmp solution is sprayed, is rinsed to being scraped by scraping blade 111 and being attached on the PI glue of 111 lower surface of scraping blade, by what is be scraped
PI glue is dissolved and is rinsed out, and improves the cleaning capacity of nozzle cleaning device；Wiping the residual PI glue on surface 201 to be cleaned
Afterwards, spout 122 sprays the dry gas of high pressure to 111 lower surface of scraping blade, washes away to scraping blade 111 and nozzle to be cleaned 200,
Scraping blade 111 and the remaining nmp solution of nozzle to be cleaned 200 and PI glue are washed away, and dries up scraping blade 111 and nozzle to be cleaned 200, into
The cleaning capacity of one step raising nozzle cleaning device.
Optionally, in one embodiment of the invention, as shown in Fig. 2, nozzle cleaning device further includes fraction collection
Slot 300 is set to the underface of two installation units 120, the PI scraped from nozzle 200 to be cleaned for collecting squeegee unit
Glue, and collect the nmp solvent for washing away scraping blade 111 and nozzle to be cleaned 200.
The embodiment of the invention also provides a kind of coating apparatus, including nozzle, the structure of the nozzle is as shown in Figure 1, also wrap
Include nozzle cleaning device as described in the above embodiment the present invention.
In the description of this article, it is to be understood that term " on ", "lower", " right side ", etc. orientation or positional relationships be based on
Orientation or positional relationship shown in the drawings is merely for convenience of description and simplification and operates, rather than the dress of indication or suggestion meaning
It sets or element must have a particular orientation, be constructed and operated in a specific orientation, therefore should not be understood as to limit of the invention
System.In addition, term " first ", " second ", are only used to distinguish between description, have no special meaning.
In the description of this specification, the description of reference term " embodiment ", " example " etc. means to combine the embodiment
Or example particular features, structures, materials, or characteristics described are included at least one embodiment or example of the invention.?
In this specification, schematic expression of the above terms be may not refer to the same embodiment or example.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped
Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should
It considers the specification as a whole, the technical solutions in the embodiments can also be appropriately combined, and forming those skilled in the art can
With the other embodiments of understanding.
The technical principle of the invention is described above in combination with a specific embodiment.These descriptions are intended merely to explain of the invention
Principle, and shall not be construed in any way as a limitation of the scope of protection of the invention.Based on the explanation herein, the technology of this field
Personnel can associate with other specific embodiments of the invention without creative labor, these modes are fallen within
Within protection scope of the present invention.
Claims (10)
1. a kind of nozzle cleaning device characterized by comprising
Two squeegee units being oppositely arranged, each squeegee unit include at least two scraping blade disposed in parallel, Mei Yisuo
The cleaning end for stating at least two scraping blades of squeegee unit is generally aligned in the same plane；
Driving unit, for driving the squeegee unit to clean nozzle to be cleaned.
2. nozzle cleaning device according to claim 1, it is characterised in that:
The driving unit is used to drive the squeegee unit along the surface to be cleaned by going out far from the nozzle to be cleaned
One end of material mouth is moved to the direction of the discharge port of the nozzle to be cleaned.
3. nozzle cleaning device according to claim 1, which is characterized in that further include corresponding with two squeegee units
Two mounting assemblies, the scraping blade of two squeegee units is separately mounted to two mounting assemblies close to described to be cleaned
The side of nozzle.
4. nozzle cleaning device according to claim 3, which is characterized in that the scraping blade and the nozzle to be cleaned to
The angle of clean surface is less than 90 °, and the cleaning end of the scraping blade is vertically lower than the installation end of the scraping blade.
5. nozzle cleaning device according to claim 3, which is characterized in that be additionally provided with spout in the mounting assembly；
The notch setting in the mounting assembly close to the surface of the nozzle to be cleaned, for the scraping blade surface and/
Or the surface to be cleaned sprays cleaning solution or clean gas.
6. nozzle cleaning device according to claim 5, which is characterized in that each scraping blade is correspondingly arranged on described in one
Spout, the spout are located at the lower section of the corresponding scraping blade, and the spout is used to spray to the lower surface of the corresponding scraping blade
Cleaning solution or clean gas out.
7. nozzle cleaning device according to claim 6, which is characterized in that each spout at least one gas transmission
Channel is connected to at least one infusion channel；
The gas distribution channel is used to convey clean gas to the spout, and the infusion channel is used to convey to the spout and clean
Liquid.
8. nozzle cleaning device according to claim 5, which is characterized in that the spout is to be set to the mounting assembly
On slit, the slit includes two sides being oppositely arranged, the extended surface of side scraping blade corresponding with the slit
Intersection.
9. -8 any nozzle cleaning device according to claim 1, which is characterized in that further include fraction collection slot, use
In the residue that the reception squeegee unit is scraped from the nozzle to be cleaned.
10. a kind of coating apparatus, including nozzle, which is characterized in that further include the nozzle cleaning as described in claim 1-9 is any
Device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910464860.3A CN110124920B (en) | 2019-05-30 | 2019-05-30 | Nozzle cleaning device and coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910464860.3A CN110124920B (en) | 2019-05-30 | 2019-05-30 | Nozzle cleaning device and coating equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110124920A true CN110124920A (en) | 2019-08-16 |
| CN110124920B CN110124920B (en) | 2020-07-10 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910464860.3A Active CN110124920B (en) | 2019-05-30 | 2019-05-30 | Nozzle cleaning device and coating equipment |
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|---|---|
| CN (1) | CN110124920B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015033679A (en) * | 2013-08-09 | 2015-02-19 | 東京エレクトロン株式会社 | Priming treatment method, coating apparatus, program, and computer storage medium |
| WO2016089132A1 (en) * | 2014-12-04 | 2016-06-09 | 주식회사 디엠에스 | Nozzle lip cleaner and slit coater using same |
| CN206046340U (en) * | 2016-09-27 | 2017-03-29 | 京东方科技集团股份有限公司 | One kind scrapes device |
| CN106733358A (en) * | 2017-02-06 | 2017-05-31 | 京东方科技集团股份有限公司 | Nozzle cleaning device and coating solution equipment |
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2019
- 2019-05-30 CN CN201910464860.3A patent/CN110124920B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015033679A (en) * | 2013-08-09 | 2015-02-19 | 東京エレクトロン株式会社 | Priming treatment method, coating apparatus, program, and computer storage medium |
| WO2016089132A1 (en) * | 2014-12-04 | 2016-06-09 | 주식회사 디엠에스 | Nozzle lip cleaner and slit coater using same |
| CN206046340U (en) * | 2016-09-27 | 2017-03-29 | 京东方科技集团股份有限公司 | One kind scrapes device |
| CN106733358A (en) * | 2017-02-06 | 2017-05-31 | 京东方科技集团股份有限公司 | Nozzle cleaning device and coating solution equipment |
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| CN110124920B (en) | 2020-07-10 |
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Denomination of invention: A nozzle cleaning device and coating equipment Effective date of registration: 20201221 Granted publication date: 20200710 Pledgee: Xin Xin Finance Leasing Co.,Ltd. Pledgor: KunShan Go-Visionox Opto-Electronics Co.,Ltd. Registration number: Y2020980009652 |