CN110118756A - Space charge test macro and method with nanometer resolution - Google Patents
Space charge test macro and method with nanometer resolution Download PDFInfo
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- CN110118756A CN110118756A CN201910413477.5A CN201910413477A CN110118756A CN 110118756 A CN110118756 A CN 110118756A CN 201910413477 A CN201910413477 A CN 201910413477A CN 110118756 A CN110118756 A CN 110118756A
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
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Abstract
The space charge test macro with nanometer resolution that the invention discloses a kind of, the system comprises THz wave excitation unit and bullet light sample detection units, in which: THz wave excitation unit is made of femto-second laser, spectroscope, the first plane mirror, electro-optic polymer, parabolic reflector microscope group；Bullet light sample detection unit is made of second plane mirror, optical delay line, third plane mirror, fourth plane reflecting mirror, the 5th plane mirror, bullet light sampling detector, quarter-wave plate, balanced detector, lock-in amplifier, chopper.The present invention is using THz wave as excitation, the detection and reception of response signal are completed with bullet light sampling technique, using full optical instrument, avoid limitation of the Electronic Testing Technology to system bandwidth, it can not only realize the nanoscale test to distribution of space charge, and there is no any special limitation and requirement to sample to be tested and test environment.
Description
Technical field
The present invention relates to a kind of elastic wave space-like charge test macro and methods, and in particular to one kind is based on THz wave
With the distribution of space charge test macro and method with nanometer resolution of bullet light sampling technique.
Background technique
The basic act of heterogeneous interface first is that charge injects, i.e. electronics occurs turn in some scale of material intersection
It moves, and forms certain space charge region in interface.The distribution of space charge and characteristic significantly affect the part in material
Electric field is directly changed the power and distribution of internal field, causes under the various aspects electric property such as breakdown, aging of material and device
Drop, the operational reliability for resulting even in large scale electrical power unit reduce.In recent years, micro-nano electronic device, MEMS and
The research of nano material deepens continuously with application, the spy for the complicated interfaces characteristic such as metal/dielectric, semiconductor/dielectric
Rope has become a hot topic of research.However, since the space scale of heterogeneous interface is generally acknowledged that the order of magnitude (gold in a few to tens of nanometers
Category/interface scale is slightly larger), and lack effective research side on nanoscale to distribution of charges and interfacial characteristics at present
The acquisition of method, reliable experimental data has difficulties.
Space charge measuring resolution is promoted to nanoscale, critical issue is that the bandwidth of test macro must reach terahertz
Hereby magnitude.And test method mature at present is all based on greatly Electronic Testing Technology progress, it is clear that be unable to reach so high bandwidth.
The frequency of THz wave is 1012The Hz order of magnitude, in electromagnetic spectrum just between electromagnetic wave and light wave, Terahertz Technology
It is fast-developing to provide strong support with mature application for the solution of this problem.
Summary of the invention
The object of the present invention is to provide a kind of space charge test macro and method with nanometer resolution, with terahertz
Hereby wave avoids electronics using full optical instrument with detection and reception that bullet light sampling technique completes response signal as excitation
Limitation of the measuring technology to system bandwidth tests the nanoscale of distribution of space charge to realize.
The purpose of the present invention is what is be achieved through the following technical solutions:
A kind of space charge test macro with nanometer resolution, including THz wave excitation unit and bullet light sample detection
Unit, in which:
The THz wave excitation unit is by femto-second laser, spectroscope, the first plane mirror, electro-optic polymer, paraboloid
Microscope group is reflected to constitute；
The bullet light sample detection unit is anti-by second plane mirror, optical delay line, third plane mirror, fourth plane
Penetrate mirror, the 5th plane mirror, bullet light sampling detector, quarter-wave plate, balanced detector, lock-in amplifier, chopper
It constitutes；
The polarization femtosecond laser of the laser excitation is divided into two beams through spectroscope, a branch of to shine after the reflection of the first plane mirror
Radio photopolymer material inspires THz wave based on optical rectification effect, and THz wave is collimated by parabolic reflector microscope group
After focusing, as in excitation light pulse irradiation sample to be tested, photoelectricity field component treats test specimens Space-charge and generates disturbance
Effect is to inspire elastic wave, and elastic wave is propagated in the medium, by the bullet light sampling detector with sample to be tested close-coupled
It receives, under elastic wave effect, bullet light sampling detector optical characteristics changes, and generates stress birfringence effect；Another beam
Light is incident on third plane mirror after second plane mirror reflection, optical delay wire delay, through third as detection light
The other side table of bullet light sampling detector is incident on after plane mirror, fourth plane reflecting mirror, the reflection of the 5th plane mirror
Face, since stress birfringence effect occurs for bullet light sampling detector, detection light enters projectile light sampling detector and retrodeviates polarization state
Variation, emergent light are divided into two bundles after quarter-wave plate and are transmitted on balanced detector, and balanced detector detects two-beam light
Strong variation is simultaneously converted to and inputs lock-in amplifier as measuring signal after electric signal, and chopper obtains polarization femtosecond laser information
Lock-in amplifier is inputted as reference signal afterwards.
A kind of space charge test method with nanometer resolution carried out using above system, including walk as follows
It is rapid:
It is fitted closely with bullet light sampling detector after silicone oil Step 1: one side surface of sample to be tested is uniformly smeared, is fixed on sample
In product room；
Step 2: setting optical delay line stepper motor step-length, obtains sampling time interval and sample frequency, such as to silicon PN junction
When space-charge region is tested, it is 15 μm/step by optical delay line stepper motor step size settings, sampling time interval can be obtained
For 100fs, sample frequency 1THz；
Step 3: starting femto-second laser, test start；
Step 4: optical delay line is scanned in a scanning range (0ps ~ 560ps), when detection light carries out elastic wave
Sampling is differentiated, efficient sampling point was distributed in several periods of elastic wave impulse；
Step 5: lock-in amplifier and chopper receive and record the electric signal from balanced detector output, acquisition each has
Imitate the amplitude and phase information of elastic wave on sample point；
Step 6: sample intelligence is synthesized, elastic wave entire time domain waveform is obtained, test terminates.
Compared with the prior art, the present invention has the advantage that
The present invention can not only realize the nanoscale test to distribution of space charge, and not have to sample to be tested and test environment
Any special limitation and requirement, and combined with other test methods with can be convenient, obtain the feature of more space charges
Information.
Detailed description of the invention
Fig. 1 is the space charge test with nanometer resolution the present invention is based on THz wave and bullet light sampling technique
The working principle diagram of system；
Fig. 2 is the structural schematic diagram of bullet light sampling detector；
Fig. 3 is the working principle diagram of bullet light sampling detector；
Fig. 4 is bullet light sampling process schematic diagram；
Fig. 5 is test result figure.
Specific embodiment
Further description of the technical solution of the present invention with reference to the accompanying drawing, and however, it is not limited to this, all to this
Inventive technique scheme is modified or replaced equivalently, and without departing from the spirit and scope of the technical solution of the present invention, should all be covered
Within the protection scope of the present invention.
The present invention provides a kind of space with nanometer resolution based on THz wave and bullet light sampling technique is electric
Lotus test macro, as shown in Figure 1, the system comprises THz wave excitation unit and bullet light sample detection unit two parts,
In:
The THz wave excitation unit is by femto-second laser 1, spectroscope 2, the first plane mirror 4, electro-optic polymer 5, throwing
Parabolic mirror group 6 is constituted；
The parabolic reflector microscope group 6 is made of upper parabolic mirror and lower parabolic mirror；
The bullet light sample detection unit is by second plane mirror 9, optical delay line 10, third plane mirror the 12, the 4th
Plane mirror 11, the 5th plane mirror 13, bullet light sampling detector 7, quarter-wave plate 8, balanced detector 14, locking phase
Amplifier 15, chopper 3 are constituted；
The polarization femtosecond laser is excited by laser 1, is divided into two beams through spectroscope 2, a branch of to reflect through the first plane mirror 4
Electro-optic polymer material 5 is irradiated afterwards, THz wave is inspired based on optical rectification effect, THz wave passes through upper parabolic mirror
After collimating and focus with lower parabolic mirror, as in excitation light pulse irradiation sample to be tested, photoelectricity field component treats test
Sample Space-charge generates perturbation action to inspire elastic wave, and elastic wave is propagated in the medium, by close with sample to be tested
The bullet light sampling detector 7 of coupling receives, and under elastic wave effect, 7 optical characteristics of bullet light sampling detector changes, and generates
Stress birfringence effect；Another light beam postpones centainly as detection light through the reflection of second plane mirror 9, optical delay line 10
Third plane mirror 12 is incident on after time, through third plane mirror 12, fourth plane reflecting mirror 11, the 5th plane reflection
Mirror 13 is incident on another side surface of bullet light sampling detector 7 after reflecting, since 7 optical characteristics of bullet light sampling detector has been sent out
Changing, the detection light of linear polarization enter projectile light sampling detector 7 and retrodeviate polarization state and will change, and emergent light is through quarter-wave
It is divided into two bundles and is transmitted on balanced detector 14 after piece 8, the variation that balanced detector 14 detects two-beam light intensity is converted to telecommunications
Lock-in amplifier 15 is inputted as measuring signal after number, chopper 3 is used as reference signal defeated after obtaining polarization femtosecond laser information
Enter lock-in amplifier 15.Optical delay line 10 (0ps ~ 560ps) in a scanning range scans, and can obtain elastic wave with timesharing
Time-domain information, these information are combined, it is final to obtain elastic wave entire time domain waveform.
As shown in Fig. 2, bullet light sampling detector 7 is " sandwich " structure, from bottom to top by substrate 7-1, high reflection aluminium film
7-2, luminescent material 7-3, ito glass cover board 7-4 played constitute, it is specific the preparation method is as follows:
(1) high reflection aluminium film is uniformly plated on substrate；
(2) luminescent material (2,4- dinitroanilines are grafted carbazole polyphosphazene) will be played to be completely dissolved in tetrahydrofuran (THF) solvent,
Mixed solution is filtered for multiple times with filter paper (0.2 μm), sufficiently removes undissolved solid material；
(3) using spin coater, solution, revolving speed are set as 3000 after uniform spin coating filter on the substrate for being coated with high reflection aluminium film side
R/min, time are set as 30s, can prepare film of the thickness at 2 μm or so；
(4) it after polarization process, is packaged with ito glass cover board.
As shown in figure 3, the working principle of bullet light sampling detector is as follows:
Excitation light pulse is incident in a side surface of sample to be tested, and optical electric field vector can be decomposed into two components, it may be assumed that enter with light
It is vertical to penetrate facesComponent and parallel with light incident surfacepComponent.Since s component orthogonal is in the excitation light pulse plane of incidence, light
Direction of an electric field is parallel with sample to be tested surface, does not generate any active force to space charge.Similarly,pComponent is parallel to exciting light
The pulse plane of incidence, therefore photoelectricity field direction is vertical with sample to be tested surface, when excitation light pulse be incident at a certain angle it is to be measured
When specimen surface, the photoelectricity field component perpendicular with space charge layer can produce, active force is generated to space charge layer.If swashing
LED pulse incidence angle isθ, then whenθWhen=0, light pulse vertical surface is incident, and the parallel sample to be tested surface of photoelectricity field direction is right
Space charge undisturbed；WhenθWhen=90, for optical electric field component orthogonal in sample to be tested surface, disturbance at this time reaches theoretical maximum
Value.It cannot achieve in fact, incident light is parallel to the incidence of sample to be tested surface, thereforeθValue is set between 0 ° to 90 °.
The process for carrying out bullet light sampling and testing using above-mentioned test macro is as follows:
Bullet light sampling process is similar with electro-optic sampling process, Yao Liyong delay line, by the accurate control to delay time come real
It is existing.Optical delay line displacement unit be μm, speed unit be μm/s.Stepper motor is adjusted, the accurate sampling time interval that controls is
Δ t, if assume that delay line light path is Δ s, direct impulse light path is 2 Δ s.If the speed of light propagation is c in air, adopt
Sample time interval Δ t can be indicated are as follows:
。
As shown in figure 4, bullet light sampling and testing process can be described as follows: the timing excitation instant since the femtosecond laser,
Stepper motor accurately controls optical delay line (0ps ~ 560ps) in a scanning range and is scanned, and detecting optical pulses are to bullet
Property wave differentiate sampling when carrying out, efficient sampling point is distributed in several periods of elastic wave impulse.With lock-in amplifier and cut
Wave device constitutes detection unit, and the electric signal of receiving balance detector output obtains the amplitude and phase information of elastic wave.It will sampling
Information is synthesized, and the entire time domain waveform of elastic wave can be obtained.
Using the above method, the present invention completes the test to PN junction space-charge region, be illustrated in figure 5 equilibrium state,
Test result when forward bias is 0.5V and reverse biased is -5V, when the elastic wave of positive and negative charge excitation occurs in depletion layer
Between between be divided into Δ T, spread speed of the elastic wave in silicon materials is 5760m/s, calculate known to corresponding space-charge region width
Degree is respectively 30nm, 12nm and 62nm, and show that space charge sector width is changing into power function relationship variation with bias voltage,
When forward bias voltage is about 0.65V, space charge sector width is 9nm, hereafter when positive bias-voltage continues to increase, space electricity
Lotus sector width remains unchanged, and test result and silicon PN junction fundamental characteristics and sample factory reference value are coincide.The experimental results showed that should
Space charge measuring resolution efficiently and securely can be promoted to nanometer scale by test method.
Claims (9)
1. a kind of space charge test macro with nanometer resolution, it is characterised in that the system comprises THz waves to swash
Bill member and bullet light sample detection unit, in which:
The THz wave excitation unit is by femto-second laser, spectroscope, the first plane mirror, electro-optic polymer, paraboloid
Microscope group is reflected to constitute；
The bullet light sample detection unit is anti-by second plane mirror, optical delay line, third plane mirror, fourth plane
Penetrate mirror, the 5th plane mirror, bullet light sampling detector, quarter-wave plate, balanced detector, lock-in amplifier, chopper
It constitutes；
The polarization femtosecond laser of the laser excitation is divided into two beams through spectroscope, a branch of to shine after the reflection of the first plane mirror
Radio photopolymer material inspires THz wave based on optical rectification effect, and THz wave is collimated by parabolic reflector microscope group
After focusing, as in excitation light pulse irradiation sample to be tested, photoelectricity field component treats test specimens Space-charge and generates disturbance
Effect is to inspire elastic wave, and elastic wave is propagated in the medium, by the bullet light sampling detector with sample to be tested close-coupled
It receives, under elastic wave effect, bullet light sampling detector optical characteristics changes, and generates stress birfringence effect；Another beam
Light is incident on third plane mirror after second plane mirror reflection, optical delay wire delay, through third as detection light
The other side table of bullet light sampling detector is incident on after plane mirror, fourth plane reflecting mirror, the reflection of the 5th plane mirror
Face, since stress birfringence effect occurs for bullet light sampling detector, detection light enters projectile light sampling detector and retrodeviates polarization state
Variation, emergent light are divided into two bundles after quarter-wave plate and are transmitted on balanced detector, and balanced detector detects two-beam light
Strong variation is simultaneously converted to and inputs lock-in amplifier as measuring signal after electric signal, and chopper obtains polarization femtosecond laser information
Lock-in amplifier is inputted as reference signal afterwards.
2. the space charge test macro according to claim 1 with nanometer resolution, it is characterised in that the throwing
Parabolic mirror group is made of upper parabolic mirror and lower parabolic mirror.
3. the space charge test macro according to claim 1 with nanometer resolution, it is characterised in that the bullet
Light sampling detector is " sandwich " structure, from bottom to top by substrate, high reflection aluminium film, bullet luminescent material, ito glass cover board structure
At.
4. the space charge test macro according to claim 3 with nanometer resolution, it is characterised in that the bullet
Light sampling detector specific the preparation method is as follows:
(1) high reflection aluminium film is uniformly plated on substrate；
(2) luminescent material will be played to be completely dissolved in tetrahydrofuran solvent, mixed solution is filtered for multiple times with filter paper, and sufficiently removal is not molten
The solid material of solution；
(3) using spin coater, solution, preparation bullet luminescent material are thin after uniform spin coating filter on the substrate for being coated with high reflection aluminium film side
Film；
(4) it after polarization process, is packaged with ito glass cover board.
5. the space charge test macro according to claim 4 with nanometer resolution, it is characterised in that the bullet
Luminescent material is that 2,4- dinitroaniline is grafted carbazole polyphosphazene.
6. the space charge test macro according to claim 1 with nanometer resolution, it is characterised in that the light
Learn delay line scanning in 0ps ~ 560ps scanning range.
7. the space charge test macro according to claim 1 with nanometer resolution, it is characterised in that described to swash
The incidence angle of LED pulse irradiation sample to be testedθValue is set between 0 ° to 90 °.
8. a kind of space charge with nanometer resolution carried out using system described in claim 1-7 any claim
Test method, it is characterised in that described method includes following steps:
It is fitted closely with bullet light sampling detector after silicone oil Step 1: one side surface of sample to be tested is uniformly smeared, is fixed on sample
In product room；
Step 2: setting optical delay line stepper motor step-length, obtains sampling time interval and sample frequency；
Step 3: starting femto-second laser, test start；
Step 4: optical delay line is scanned in a scanning range, differentiates and sample when detection light carries out elastic wave, have
Effect sample point was distributed in several periods of elastic wave impulse；
Step 5: lock-in amplifier and chopper receive and record the electric signal from balanced detector output, acquisition each has
Imitate the amplitude and phase information of elastic wave on sample point；
Step 6: sample intelligence is synthesized, elastic wave entire time domain waveform is obtained, test terminates.
9. the space charge test method according to claim 8 with nanometer resolution, it is characterised in that described to adopt
Sample time interval Δ t is indicated are as follows:
,
In formula, Δ s is delay line light path, and 2 Δ s are direct impulse light path, and c is the speed of light propagation in air.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111505397A (en) * | 2020-04-02 | 2020-08-07 | 清华大学 | Nano-resolution fast solid dielectric space charge measurement system and method |
| CN112710906A (en) * | 2021-01-05 | 2021-04-27 | 华北电力大学 | Photoelectronics space charge measurement platform with nanometer spatial resolution and method |
| CN113092886A (en) * | 2021-04-08 | 2021-07-09 | 华北电力大学 | Improved electroacoustic pulse method space charge distribution measuring platform based on photoelastic effect |
| CN113433385A (en) * | 2021-06-22 | 2021-09-24 | 华北电力大学 | Elastic wave detection platform based on photoelastic effect |
| CN114034645A (en) * | 2021-11-17 | 2022-02-11 | 华北电力大学 | Space charge rapid measurement platform and method based on elliptical polarization principle |
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| CN109374571A (en) * | 2018-12-07 | 2019-02-22 | 中国科学技术大学 | A kind of optical detection integrated system |
| CN109557041A (en) * | 2017-09-25 | 2019-04-02 | 四川省科学城凌云科技有限责任公司 | A kind of Terahertz scanning system and detection method based on fibre delay line |
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| CN106093596A (en) * | 2016-06-03 | 2016-11-09 | 江苏宝源高新电工有限公司 | The full measuring method of space charge of nanometer resolution can be realized |
| CN109557041A (en) * | 2017-09-25 | 2019-04-02 | 四川省科学城凌云科技有限责任公司 | A kind of Terahertz scanning system and detection method based on fibre delay line |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111505397A (en) * | 2020-04-02 | 2020-08-07 | 清华大学 | Nano-resolution fast solid dielectric space charge measurement system and method |
| CN111505397B (en) * | 2020-04-02 | 2021-07-09 | 清华大学 | Nano-resolution fast solid dielectric space charge measurement system and method |
| CN112710906A (en) * | 2021-01-05 | 2021-04-27 | 华北电力大学 | Photoelectronics space charge measurement platform with nanometer spatial resolution and method |
| CN112710906B (en) * | 2021-01-05 | 2023-08-25 | 华北电力大学 | Photoelectron space charge measurement platform and method with nanometer space resolution |
| CN113092886A (en) * | 2021-04-08 | 2021-07-09 | 华北电力大学 | Improved electroacoustic pulse method space charge distribution measuring platform based on photoelastic effect |
| CN113433385A (en) * | 2021-06-22 | 2021-09-24 | 华北电力大学 | Elastic wave detection platform based on photoelastic effect |
| CN114034645A (en) * | 2021-11-17 | 2022-02-11 | 华北电力大学 | Space charge rapid measurement platform and method based on elliptical polarization principle |
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