CN110118602A - A kind of broadband high-resolution spectroscopy image-forming information acquisition device simultaneously - Google Patents

A kind of broadband high-resolution spectroscopy image-forming information acquisition device simultaneously Download PDF

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Publication number
CN110118602A
CN110118602A CN201910502845.3A CN201910502845A CN110118602A CN 110118602 A CN110118602 A CN 110118602A CN 201910502845 A CN201910502845 A CN 201910502845A CN 110118602 A CN110118602 A CN 110118602A
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China
Prior art keywords
diffraction grating
plane mirror
acquisition device
forming information
mirror
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CN201910502845.3A
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CN110118602B (en
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李颖
张振铎
薛永琪
刘瑀
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Dalian Maritime University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0243Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows having a through-hole enabling the optical element to fulfil an additional optical function, e.g. a mirror or grating having a throughhole for a light collecting or light injecting optical fiber
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/2803Investigating the spectrum using photoelectric array detector

Abstract

The invention discloses a kind of broadband high-resolution spectroscopy image-forming information while acquisition device, specifically include entrance slit, collimating mirror, the plane mirror of layering setting, diffraction grating, imaging lens and face battle array photodetector, under working condition: by the radiation energy of entrance spectrometer slit first pass around collimating mirror collimation, then through plane mirror reflection, after diffraction grating is divided finally by imaging lens by the dispersion spectrum of every layer of corresponding different-waveband range simultaneously focal imaging on photodetector.The acquisition while present apparatus can realize wide spectrum wavelength band, high spectral resolution and image-forming information.Target quick for changes in optical properties carries out light spectrum image-forming detection, obtains while realizing multidimensional information, can be obviously improved the inverting to target and accuracy of identification.

Description

A kind of broadband high-resolution spectroscopy image-forming information acquisition device simultaneously
Technical field
The present invention relates to technical field of optical instrument more particularly to a kind of broadband high-resolution spectroscopy image-forming informations simultaneously Acquisition device.
Background technique
In imaging spectrometer field, conventional grating or prism mechanical scanning method can be realized in wider spectral region High spectral resolution ability, but this time connects while mechanical sweep type measurement pattern cannot achieve all spectral informations and obtains It takes, and duplicate measurements precision in long-time mechanical scanning measurement process and reliability are lower.Using the one of non-scan Peacekeeping two-dimensional array detector mode can realize spectral information while measure, but be limited by detector physical size and pixel resolution System can not meet the requirement of high spectral resolution, wide spectrum response range and wide imaging viewing field simultaneously.
The more grating folded spectrum techniques of two dimension are collected multiple gratings with different blaze angles and dispersion characteristics in groups It closes, each sub-gratings press certain angle ordered arrangement, so that the difraction spectrum of different sub-gratings all falls in almost the same diffraction In subtended angle, by bi-focal focusing mirror to detector.Devise filter in the optical path to realize different spectral bands Filtering detection, can be realized broadband high-resolution spectroscopy image-forming information while obtaining.But in order to realize different spectral bands Filtering detection, using bi-focal reflecting mirror and filter, so that the spatial resolution of light spectrum image-forming is lower.There is also a kind of light Spectrometer structural shape, i.e., by the way that plane mirror is added in conventional spectrometers optical path, using switching, different, monolith plane is anti- The mode of mirror is penetrated, realizes broadband high-resolution spectroscopy imaging detection, but since the detection mode needs timesharing to carry out, Wu Fatong When obtain broadband high-resolution spectroscopy image-forming information.
Summary of the invention
According to problem of the existing technology, the invention discloses a kind of broadband high-resolution spectroscopy image-forming informations simultaneously Acquisition device, specific structure include:
Entrance slit, collimating mirror, the plane mirror of layering setting, diffraction grating, imaging lens and face battle array photodetector, Collimating mirror collimation is first passed around by the radiation energy of entrance spectrometer slit, then is reflected through plane mirror, through diffraction grating After light splitting finally by imaging lens by the dispersion spectrum of every layer of corresponding different-waveband range simultaneously focal imaging face battle array photoelectricity On detector.
Further, it is determined according to the spectral resolution of the reflection of object to be measured, radiation spectrum range and required detection The number of plies of plane mirror.
Further, wherein the plane mirror of different level is arranged along diffraction grating groove direction is parallel to, different layers Plane mirror be respectively provided with different placement locations, azimuth and pitch angle, wherein setting incident ray direction as Z axis side To, be parallel to diffraction grating delineation direction be X-direction, perpendicular to diffraction grating delineation direction be Y direction, azimuth be around X-axis rotational angle, pitch angle axis are around Y-axis rotational angle.
By adopting the above-described technical solution, a kind of broadband high-resolution spectroscopy image-forming information provided by the invention is simultaneously Acquisition device, it can be achieved that wide spectrum wavelength band, high spectral resolution and image-forming information while obtain.For optical characteristics Change quick target and carry out light spectrum image-forming detection, is obtained while realizing multidimensional information, the inverting to target can be obviously improved And accuracy of identification.The present invention has lower cost and high reliability, will obtain in high-performance imaging spectrometer widely Promotion and application.
Detailed description of the invention
In order to illustrate the technical solutions in the embodiments of the present application or in the prior art more clearly, to embodiment or will show below There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this The some embodiments recorded in application, for those of ordinary skill in the art, without creative efforts, It is also possible to obtain other drawings based on these drawings.
Fig. 1 is the overlooking structure diagram of apparatus of the present invention;
Fig. 2 is the side structure schematic view of apparatus of the present invention;
Fig. 3 is imaging spectrometer system hlerarchy ideal image result schematic diagram of the present invention.
1, entrance slit, 2, collimating mirror, 3, plane mirror, 4, diffraction grating, 5, imaging lens, 6, face battle array photodetection Device.
Specific embodiment
To keep technical solution of the present invention and advantage clearer, with reference to the attached drawing in the embodiment of the present invention, to this Technical solution in inventive embodiments carries out clear and complete description:
A kind of broadband high-resolution spectroscopy image-forming information as shown in FIG. 1 to FIG. 3 simultaneously acquisition device, specifically include into Penetrate slit 1, collimating mirror 2, the plane mirror 3 of layering setting, diffraction grating 4, imaging lens 5 and face battle array photodetector 6, work State is as follows: first passing around collimating mirror collimation 2 by the radiation energy of entrance spectrometer slit 1, then anti-through plane mirror 3 It penetrates, by the dispersion spectrum of every layer of corresponding different-waveband range while focusing after the light splitting of diffraction grating 4 finally by imaging lens 5 It is imaged on the battle array photodetector 6 of face.
Further, it is determined according to the spectral resolution of the reflection of object to be measured, radiation spectrum range and required detection The number of plies of plane mirror 3.
Further, wherein the plane mirror 3 of different level is arranged along diffraction grating groove direction is parallel to, different layers Plane mirror 3 be respectively provided with different placement locations, azimuth and pitch angle, wherein setting incident ray direction as Z axis side To, be parallel to diffraction grating delineation direction be X-direction, perpendicular to diffraction grating delineation direction be Y direction, azimuth be around X-axis rotational angle, pitch angle axis are around Y-axis rotational angle.
Wherein there is different incidence angles to grating by the layering emergent ray of plane mirror 3, ensuring grating scale In the case that very little area is constant, while realizing the independent dispersion of spectrum in multiple wavelength bands.
Wherein each single layer structure of plane mirror 3 corresponds to a wavelength band, bows using between multilayer planar mirror The difference at the elevation angle, it is ensured that the corresponding multiple and different wavelength band energy centralizations of multilayer are imaged on the different location of detector.
It is specific to the layering of plane mirror 3 setting in the following way, as entire plane mirror is divided into 10 layers (if Become layering reflecting mirror), different layers plane mirror all has different placement locations, azimuth and pitch angle, therefore passes through The light that reflects of layering reflecting mirror is crossed for next optical element grating, there is different incidence angles, be incident on The different location of grating 4, is then incident on the different location of imaging lens 5, is finally incident on the different positions of face battle array photodetector 6 It sets.
Further, every layer plane reflecting mirror in plane mirror 3 has different placement locations, azimuth and pitching Angle, it is ensured that corresponding same diffraction grating.
The foregoing is only a preferred embodiment of the present invention, but scope of protection of the present invention is not limited thereto, Anyone skilled in the art in the technical scope disclosed by the present invention, according to the technique and scheme of the present invention and its Inventive concept is subject to equivalent substitution or change, should be covered by the protection scope of the present invention.

Claims (3)

1. a kind of broadband high-resolution spectroscopy image-forming information while acquisition device, it is characterised in that including entrance slit, collimation Mirror, the plane mirror of layering setting, diffraction grating, imaging lens and face battle array photodetector, by entrance spectrometer slit Radiation energy first pass around collimating mirror collimation, then through plane mirror reflection, after diffraction grating is divided finally by imaging lens By the dispersion spectrum of every layer of corresponding different-waveband range while focal imaging is on the battle array photodetector of face.
2. a kind of broadband high-resolution spectroscopy image-forming information according to claim 1 while acquisition device, feature is also It is: plane mirror is determined according to the spectral resolution of the reflection of object to be measured, radiation spectrum range and required detection The number of plies.
3. a kind of broadband high-resolution spectroscopy image-forming information according to claim 1 while acquisition device, feature is also Be: wherein the plane mirror of different level is arranged along diffraction grating groove direction is parallel to, the plane mirror of different layers It is respectively provided with different placement locations, azimuth and pitch angle, wherein setting incident ray direction as Z-direction, is parallel to diffraction Grating ruling direction is X-direction, is Y direction perpendicular to diffraction grating delineation direction, and azimuth is to turn about the X axis angle, Pitch angle axis is around Y-axis rotational angle.
CN201910502845.3A 2019-06-11 2019-06-11 Device for simultaneously acquiring broadband high-resolution spectral imaging information Active CN110118602B (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112098337A (en) * 2020-08-31 2020-12-18 清华大学深圳国际研究生院 High-resolution spectral image rapid acquisition device and method

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CN102620827A (en) * 2012-03-28 2012-08-01 北京理工大学 Raster imaging spectrometer
CN103033265A (en) * 2012-12-21 2013-04-10 南京理工大学 Device and method of space heterodyning interference hyper spectrum imaging
CN204964018U (en) * 2015-04-30 2016-01-13 北京空间机电研究所 Can realize super high spectral resolution's spectrum splitting system
CN209727262U (en) * 2019-06-11 2019-12-03 李颖 A kind of broadband high-resolution spectroscopy image-forming information acquisition device simultaneously

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US6100974A (en) * 1998-09-15 2000-08-08 California Institute Of Technology Imaging spectrometer/camera having convex grating
US20040090623A1 (en) * 2002-11-07 2004-05-13 Isaac Richman Hyperspectral imager
CN102620827A (en) * 2012-03-28 2012-08-01 北京理工大学 Raster imaging spectrometer
CN103033265A (en) * 2012-12-21 2013-04-10 南京理工大学 Device and method of space heterodyning interference hyper spectrum imaging
CN204964018U (en) * 2015-04-30 2016-01-13 北京空间机电研究所 Can realize super high spectral resolution's spectrum splitting system
CN209727262U (en) * 2019-06-11 2019-12-03 李颖 A kind of broadband high-resolution spectroscopy image-forming information acquisition device simultaneously

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ZHOU GUANGYA ET AL.: "Hyperspectral imaging using a microelectrical-mechanical-systems-based in-plane vibratory grating scanner with a single photodetector", OPTICS LETTERS, vol. 34, no. 6, XP001522405, DOI: 10.1364/OL.34.000764 *
李研: "基于LASIS的高分辨高光谱成像仪光学系统设计及杂光分析", 中国优秀硕士学位论文全文数据库工程科技Ⅱ辑 *

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Publication number Priority date Publication date Assignee Title
CN112098337A (en) * 2020-08-31 2020-12-18 清华大学深圳国际研究生院 High-resolution spectral image rapid acquisition device and method
CN112098337B (en) * 2020-08-31 2023-10-10 清华大学深圳国际研究生院 High-resolution spectrum image rapid acquisition device and method

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