CN110117778A - A kind of self-cleaning magnetic control spattering target cooling system - Google Patents
A kind of self-cleaning magnetic control spattering target cooling system Download PDFInfo
- Publication number
- CN110117778A CN110117778A CN201910540838.2A CN201910540838A CN110117778A CN 110117778 A CN110117778 A CN 110117778A CN 201910540838 A CN201910540838 A CN 201910540838A CN 110117778 A CN110117778 A CN 110117778A
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- CN
- China
- Prior art keywords
- target
- cooling
- water
- pipe
- self
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 title claims abstract description 42
- 238000004140 cleaning Methods 0.000 title claims abstract description 22
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 44
- 239000000498 cooling water Substances 0.000 claims abstract description 32
- 239000000463 material Substances 0.000 claims abstract description 9
- 239000008188 pellet Substances 0.000 abstract description 12
- 230000000694 effects Effects 0.000 abstract description 7
- 239000011521 glass Substances 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000005265 energy consumption Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000005684 electric field Effects 0.000 description 2
- 230000008676 import Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 210000003739 neck Anatomy 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25C—PRODUCING, WORKING OR HANDLING ICE
- F25C5/00—Working or handling ice
- F25C5/02—Apparatus for disintegrating, removing or harvesting ice
- F25C5/04—Apparatus for disintegrating, removing or harvesting ice without the use of saws
- F25C5/046—Ice-crusher machines
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28G—CLEANING OF INTERNAL OR EXTERNAL SURFACES OF HEAT-EXCHANGE OR HEAT-TRANSFER CONDUITS, e.g. WATER TUBES OR BOILERS
- F28G1/00—Non-rotary, e.g. reciprocated, appliances
- F28G1/12—Fluid-propelled scrapers, bullets, or like solid bodies
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Combustion & Propulsion (AREA)
- Cleaning In General (AREA)
Abstract
The invention discloses a kind of self-cleaning magnetic control spattering target cooling systems, it include: water pump, mixed waterpipe, ice crusher, target and cooling tower, cooling water cavity is provided in the target, described target one end is provided with the first pipe fitting being connected to cooling water cavity, the target other end is provided with the second pipe fitting being connected to cooling water cavity, water supplying pipe is provided between first pipe fitting and the water outlet of cooling tower, return pipe is provided between second pipe fitting and the water inlet of cooling tower, the mixed waterpipe is connected on water supplying pipe, the ice crusher setting is above mixed waterpipe, the bottom of the ice crusher is provided with the material blanking tube with mixed waterpipe vertical connection.By the above-mentioned means, self-cleaning magnetic control spattering target cooling system of the present invention, sequentially enters water supplying pipe, cooling water cavity and return pipe with cooling water by ice pellets, washes away to its inner wall, clean up dirt, improve the cooling effect to target.
Description
Technical field
The present invention relates to coating film on glass technical fields, more particularly to a kind of self-cleaning magnetic control spattering target cooling system
System.
Background technique
Coating film on glass technique is to cross one or more layers metal film or metallic compound in glass surface painting, to change glass
Optical property, coating film on glass technique more advanced at present, which includes that magnetic control is low-priced, penetrates plated film.The working principle of magnetron sputtering plating
It is as follows:
Electronics collides during flying to substrate with ar atmo under the action of electric field, make its ionization produce Ar just from
Sub and new electronics, new electronics fly to substrate, and Ar cation accelerates to fly to cathode target under electric field action, and is bombarded with high-energy
Target surface, sputters target, and in sputtering particle, neutral target atom or molecule deposition form film on substrate.
It in actual production process, needs to cool down target, generally use cold in the cooling water importing target of circulation
But water chamber is cooled down.With the passage for using the time, the cooling water cavity inner wall and pipe inner wall of target can generate dirt,
Dirt is difficult to clear up and reduce cooling efficiency, increases the load and energy consumption of cooling system, needs to improve.
Summary of the invention
The invention mainly solves the technical problem of providing a kind of self-cleaning magnetic control spattering target cooling systems, without tearing open
It unloads, carries out the cleaning of target cooling water cavity inner wall and pipe inner wall, promote cooling efficiency.
In order to solve the above technical problems, one technical scheme adopted by the invention is that: a kind of self-cleaning magnetic control is provided and is splashed
It shoots at the target material cooling system, comprising: water pump, mixed waterpipe, ice crusher, target and cooling tower are provided with cooling water in the target
Cavity, described target one end are provided with the first pipe fitting being connected to cooling water cavity, the target other end be provided with it is cold
But the second pipe fitting of water chamber connection, is provided with water supplying pipe between first pipe fitting and the water outlet of cooling tower, described
Return pipe is provided between second pipe fitting and the water inlet of cooling tower, the water pump is connected on water supplying pipe or return pipe,
The mixed waterpipe is connected on water supplying pipe, and above mixed waterpipe, the bottom of the ice crusher is arranged for the ice crusher setting
There is the material blanking tube with mixed waterpipe vertical connection.
In a preferred embodiment of the present invention, filter is in series on the return pipe.
In a preferred embodiment of the present invention, the bottom of the mixed waterpipe is provided with horizontal bracket.
In a preferred embodiment of the present invention, sieve is provided in the ice crusher.
In a preferred embodiment of the present invention, the mesh diameter of the sieve is 1 ~ 2mm.
In a preferred embodiment of the present invention, valve is provided on the material blanking tube.
The beneficial effects of the present invention are: a kind of self-cleaning magnetic control spattering target cooling system that the present invention points out, maintenance
Ice cube is periodically imported ice crusher by personnel, after forming the ice pellets of 1 ~ 2mm of diameter, valve on material blanking tube is opened, so that ice pellets is fallen into
Mixed waterpipe sequentially enters water supplying pipe, cooling water cavity and return pipe with cooling water, and the hardness of ice pellets is high, can to water supplying pipe,
The inner wall of cooling water cavity and return pipe is washed away, and cleans up dirt, ice pellets is in water supplying pipe, cooling water cavity and return water
Flowing in pipe and melt and become smaller, absorb heat and reduce the temperature of cooling water, improve the cooling effect to target, and dirt
After cleaning, it is ensured that cooling water can suitably reduce the power of cooling tower and water pump to the cooling effect of target, to reduce energy
Consumption.
Detailed description of the invention
To describe the technical solutions in the embodiments of the present invention more clearly, make required in being described below to embodiment
Attached drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for
For those of ordinary skill in the art, without creative efforts, it can also be obtained according to these attached drawings other
Attached drawing, in which:
Fig. 1 is the structural schematic diagram that a kind of self-cleaning magnetic control spattering target cooling system of the present invention unifies preferred embodiment.
Specific embodiment
The technical scheme in the embodiments of the invention will be clearly and completely described below, it is clear that described implementation
Example is only a part of the embodiments of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, this field is common
Technical staff's all other embodiment obtained without making creative work belongs to the model that the present invention protects
It encloses.
Referring to Fig. 1, the embodiment of the present invention includes:
Self-cleaning magnetic control spattering target cooling system as shown in Figure 1, comprising: water pump 5, mixed waterpipe 4, ice crusher 2, target
8 and cooling tower 1, cooling water cavity is provided in the target 8, can be passed through cooling water, be carried out the direct cooling of target 8.
Described 8 one end of target is provided with the first pipe fitting 7 being connected to cooling water cavity, 8 other end of the target setting
There is the second pipe fitting 9 being connected to cooling water cavity, is provided with confession between first pipe fitting 7 and the water outlet of cooling tower 1
Water pipe 6 is provided with return pipe 11 between second pipe fitting 9 and the water inlet of cooling tower 1, form cooling water circulation pipe,
The water pump 5 is connected on water supplying pipe 6 or return pipe 11, drives the circulation of cooling water, is adjusted by the driving switch of water pump 5
Flow velocity, it is ensured that on the basis of cooling effect, advantageously reduce energy consumption.
The mixed waterpipe 4 is connected on water supplying pipe 6, and the bottom of the mixed waterpipe 4 is provided with horizontal bracket 12, it is ensured that
The level of mixed waterpipe 4 mixes waterpipe 4 and uses stainless steel tube, sound construction, good corrosion resistance.
The ice crusher 1 is arranged above mixed waterpipe 4, and the bottom of the ice crusher 2 is provided with vertical with mixed waterpipe 4
The material blanking tube 3 of connection after ice cube imports ice crusher 2, opens ice crusher 2, generates lesser ice pellets.It is arranged on the material blanking tube 3
There is valve, after opening valve, the ice pellets of material blanking tube 3 imports mixed waterpipe 4, sequentially enters water supply with the water flow in mixed waterpipe 4
The hardness of pipe 6, cooling water cavity and return pipe 11, ice pellets is high, can be to 11 inner wall of water supplying pipe 6, cooling water cavity and return pipe
Dirt washed away, realize automated cleaning.The top feeding inlet of ice crusher 2 is provided with flashboard, and before valve is opened, flashboard is closed
It closes, outside air is avoided to enter ice crusher 2, reduce the adverse effect to water pump 5.
It is in series with filter 10 on the return pipe 11, cooling water is filtered, the dirt for washing away is avoided to enter
Cooling tower 1, it is ensured that cleaning effect.Water-thermometer can also be installed on return pipe 11, carry out the monitoring of cooling water temperature, facilitate progress
The power adjustment of cooling tower 1 and water pump 5.
Be provided with sieve in the ice crusher 2, the mesh diameter of the sieve is 1 ~ 2mm so that the diameter of ice pellets be 1 ~
2mm.Ice pellets melts and becomes smaller with flowing in water supplying pipe 6, cooling water cavity and return pipe 11, absorbs heat and reduces cooling water
Temperature, improve the cooling effect to target, avoid wasting, not will cause ice pellets blockage problem also.
In conclusion a kind of self-cleaning magnetic control spattering target cooling system that the present invention points out, is generated by ice crusher
Ice pellets, realize the cleaning of water supplying pipe, cooling water cavity and return water inside pipe wall, improve the cooling efficiency of target.
The above description is only an embodiment of the present invention, is not intended to limit the scope of the invention, all to utilize this hair
Equivalent structure or equivalent flow shift made by bright description is applied directly or indirectly in other relevant technology necks
Domain is included within the scope of the present invention.
Claims (6)
1. a kind of self-cleaning magnetic control spattering target cooling system characterized by comprising water pump, mixed waterpipe, ice crusher,
Target and cooling tower, be provided with cooling water cavity in the target, and described target one end is provided with to be connected to cooling water cavity
First pipe fitting, the target other end are provided with the second pipe fitting being connected to cooling water cavity, first pipe fitting with
It is provided with water supplying pipe between the water outlet of cooling tower, is provided with return water between second pipe fitting and the water inlet of cooling tower
Pipe, the water pump are connected on water supplying pipe or return pipe, and the mixed waterpipe is connected on water supplying pipe, the ice crusher setting
Above mixed waterpipe, the bottom of the ice crusher is provided with the material blanking tube with mixed waterpipe vertical connection.
2. self-cleaning magnetic control spattering target cooling system according to claim 1, which is characterized in that on the return pipe
It is in series with filter.
3. self-cleaning magnetic control spattering target cooling system according to claim 1, which is characterized in that the mixed waterpipe
Bottom be provided with horizontal bracket.
4. self-cleaning magnetic control spattering target cooling system according to claim 1, which is characterized in that in the ice crusher
It is provided with sieve.
5. self-cleaning magnetic control spattering target cooling system according to claim 4, which is characterized in that the net of the sieve
Bore dia is 1 ~ 2mm.
6. self-cleaning magnetic control spattering target cooling system according to claim 1, which is characterized in that on the material blanking tube
It is provided with valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910540838.2A CN110117778A (en) | 2019-06-21 | 2019-06-21 | A kind of self-cleaning magnetic control spattering target cooling system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910540838.2A CN110117778A (en) | 2019-06-21 | 2019-06-21 | A kind of self-cleaning magnetic control spattering target cooling system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110117778A true CN110117778A (en) | 2019-08-13 |
Family
ID=67524380
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910540838.2A Pending CN110117778A (en) | 2019-06-21 | 2019-06-21 | A kind of self-cleaning magnetic control spattering target cooling system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110117778A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11153373A (en) * | 1997-11-20 | 1999-06-08 | Mitsubishi Heavy Ind Ltd | Method and apparatus for removing stain |
| CN1413933A (en) * | 2002-09-06 | 2003-04-30 | 鲍冠中 | Magnetic control sputtering hot-bending coated glass and its production method and device |
| JP2005169220A (en) * | 2003-12-09 | 2005-06-30 | Mitsubishi Electric Building Techno Service Co Ltd | Pipe washing device and pipe washing method |
| JP2011016149A (en) * | 2009-07-08 | 2011-01-27 | Sumitomo Metal Ind Ltd | Continuous casting method for steel |
| US20180371608A1 (en) * | 2015-12-18 | 2018-12-27 | Nippon Itf, Inc. | Coating film, manufacturing method therefor, and pvd apparatus |
| CN210215525U (en) * | 2019-06-21 | 2020-03-31 | 张家港市和瑞创先智能光学有限公司 | Self-cleaning magnetron sputtering target material cooling system |
-
2019
- 2019-06-21 CN CN201910540838.2A patent/CN110117778A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11153373A (en) * | 1997-11-20 | 1999-06-08 | Mitsubishi Heavy Ind Ltd | Method and apparatus for removing stain |
| CN1413933A (en) * | 2002-09-06 | 2003-04-30 | 鲍冠中 | Magnetic control sputtering hot-bending coated glass and its production method and device |
| JP2005169220A (en) * | 2003-12-09 | 2005-06-30 | Mitsubishi Electric Building Techno Service Co Ltd | Pipe washing device and pipe washing method |
| JP2011016149A (en) * | 2009-07-08 | 2011-01-27 | Sumitomo Metal Ind Ltd | Continuous casting method for steel |
| US20180371608A1 (en) * | 2015-12-18 | 2018-12-27 | Nippon Itf, Inc. | Coating film, manufacturing method therefor, and pvd apparatus |
| CN210215525U (en) * | 2019-06-21 | 2020-03-31 | 张家港市和瑞创先智能光学有限公司 | Self-cleaning magnetron sputtering target material cooling system |
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