CN210215525U - Self-cleaning magnetron sputtering target material cooling system - Google Patents
Self-cleaning magnetron sputtering target material cooling system Download PDFInfo
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- CN210215525U CN210215525U CN201920939463.2U CN201920939463U CN210215525U CN 210215525 U CN210215525 U CN 210215525U CN 201920939463 U CN201920939463 U CN 201920939463U CN 210215525 U CN210215525 U CN 210215525U
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- water
- cooling
- pipe
- target material
- mixing pipeline
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- 238000001816 cooling Methods 0.000 title claims abstract description 37
- 239000013077 target material Substances 0.000 title claims abstract description 20
- 238000004140 cleaning Methods 0.000 title claims abstract description 16
- 238000001755 magnetron sputter deposition Methods 0.000 title claims abstract description 14
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 72
- 239000000498 cooling water Substances 0.000 claims abstract description 35
- 239000002245 particle Substances 0.000 abstract description 13
- 230000000694 effects Effects 0.000 abstract description 7
- 238000000576 coating method Methods 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000005265 energy consumption Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical group [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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Abstract
The utility model discloses a self-cleaning formula magnetron sputtering target cooling system, include: the water mixing device comprises a water pump, a water mixing pipeline, an ice crusher, a target material and a cooling tower, wherein a cooling water cavity is arranged in the target material, a first pipe joint communicated with the cooling water cavity is arranged at one end of the target material, a second pipe joint communicated with the cooling water cavity is arranged at the other end of the target material, a water supply pipe is arranged between the first pipe joint and a water outlet of the cooling tower, a water return pipe is arranged between the second pipe joint and a water inlet of the cooling tower, the water mixing pipeline is connected in series on the water supply pipe, the ice crusher is arranged above the water mixing pipeline, and a blanking pipe vertically communicated with the water mixing pipeline is arranged at the bottom of the ice. In this way, automatically cleaning formula magnetron sputtering target cooling system, get into delivery pipe, cooling water cavity and wet return in proper order along with the cooling water through the ice particle, erode its inner wall, clear up the dirt, promoted the cooling effect to the target.
Description
Technical Field
The utility model relates to a glass coating technical field especially relates to a self-cleaning formula magnetron sputtering target cooling system.
Background
The glass coating process is to coat one or more layers of metal films or metal compounds on the surface of glass to change the optical performance of the glass, and the current more advanced glass coating process comprises magnetic control base-emission coating. The working principle of the magnetron sputtering coating is as follows:
under the action of an electric field, the electrons collide with argon atoms in the process of flying to the substrate, so that the argon atoms are ionized to generate Ar positive ions and new electrons, the new electrons fly to the substrate, the Ar positive ions are accelerated to fly to a cathode target under the action of the electric field and bombard the surface of the target at high energy, so that the target is sputtered, and neutral target atoms or molecules in sputtered particles are deposited on the substrate to form a film.
In the actual production process, the target needs to be cooled, and usually, circulating cooling water is introduced into a cooling water cavity in the target for cooling. As the use time goes on, dirt is generated on the inner wall of the cooling water cavity and the inner wall of the water pipe of the target material, the dirt is difficult to clean, the cooling efficiency is reduced, the load and the energy consumption of a cooling system are increased, and improvement is needed.
SUMMERY OF THE UTILITY MODEL
The utility model discloses the main technical problem who solves provides a self-cleaning formula magnetron sputtering target cooling system, need not to dismantle, carries out the cleanness of target cooling water cavity inner wall and water pipe inner wall, promotes cooling efficiency.
In order to solve the technical problem, the utility model discloses a technical scheme be: provided is a self-cleaning magnetron sputtering target material cooling system, comprising: the water mixing device comprises a water pump, a water mixing pipeline, an ice crusher, a target material and a cooling tower, wherein a cooling water cavity is arranged in the target material, a first pipe joint communicated with the cooling water cavity is arranged at one end of the target material, a second pipe joint communicated with the cooling water cavity is arranged at the other end of the target material, a water supply pipe is arranged between the first pipe joint and a water outlet of the cooling tower, a water return pipe is arranged between the second pipe joint and a water inlet of the cooling tower, the water pump is connected in series on the water supply pipe or the water return pipe, the water mixing pipeline is connected in series on the water supply pipe, the ice crusher is arranged above the water mixing pipeline, and a blanking pipe vertically communicated with the water mixing pipeline.
In a preferred embodiment of the present invention, a filter is connected in series to the water return pipe.
In a preferred embodiment of the present invention, a horizontal bracket is disposed at the bottom of the water mixing pipe.
In a preferred embodiment of the present invention, a screen is disposed in the ice crusher.
In a preferred embodiment of the present invention, the mesh diameter of the screen is 1-2 mm.
In a preferred embodiment of the present invention, the blanking pipe is provided with a valve.
The utility model has the advantages that: the utility model provides a self-cleaning formula magnetron sputtering target cooling system, maintainer is regularly to the leading-in ice crusher of ice-cube, form behind the ice particle of diameter 1~2mm, open the blanking on the pipe valve, make the ice particle fall into muddy water pipeline, get into the delivery pipe in proper order along with the cooling water, cooling water cavity and wet return, the hardness of ice particle is high, can be to the delivery pipe, the inner wall of cooling water cavity and wet return erodees, the dirt is fallen in the clearance, the ice particle is along with at the delivery pipe, flow in cooling water cavity and the wet return melts and diminishes, the heat absorption and the temperature of cooling water has been reduced, the cooling effect to the target has been promoted, and after the dirt clearance, the cooling effect of cooling water to the target has been ensured, can suitably reduce the power of cooling tower and water pump, thereby reduce the energy consumption.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained without inventive work, wherein:
fig. 1 is a schematic structural diagram of a preferred embodiment of a self-cleaning magnetron sputtering target cooling system of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely below, and it should be apparent that the described embodiments are only some embodiments of the present invention, but not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
Referring to fig. 1, an embodiment of the present invention includes:
the self-cleaning magnetron sputtering target cooling system shown in fig. 1 comprises: the target material 8 is provided with a cooling water cavity, and cooling water can be introduced into the cooling water cavity to directly cool the target material 8.
8 one ends of target are provided with first coupling 7 with the cooling water cavity intercommunication, 8 other ends of target are provided with the second coupling 9 with the cooling water cavity intercommunication, be provided with delivery pipe 6 between the delivery port of first coupling 7 and cooling tower 1, be provided with wet return 11 between the water inlet of second coupling 9 and cooling tower 1, form the cooling water circulation pipeline, water pump 5 establishes ties on delivery pipe 6 or wet return 11, and the circulation of drive cooling water is through the gear switch governing flow rate of water pump 5, on the basis of guaranteeing the cooling effect, is favorable to reducing the energy consumption.
The water mixing pipeline 4 is connected in series on the water supply pipe 6, the bottom of the water mixing pipeline 4 is provided with the horizontal support 12, the level of the water mixing pipeline 4 is ensured, the water mixing pipeline 4 is made of stainless steel pipes, the structure is firm, and the corrosion resistance is good.
The ice crusher 1 is arranged above the water mixing pipeline 4, the blanking pipe 3 vertically communicated with the water mixing pipeline 4 is arranged at the bottom of the ice crusher 2, and after ice cubes are guided into the ice crusher 2, the ice crusher 2 is opened to generate smaller ice particles. The automatic cleaning device is characterized in that the blanking pipe 3 is provided with a valve, after the valve is opened, ice particles of the blanking pipe 3 are guided into the water mixing pipeline 4 and sequentially enter the water supply pipe 6, the cooling water cavity and the water return pipe 11 along with water flow in the water mixing pipeline 4, the hardness of the ice particles is high, dirt on the inner walls of the water supply pipe 6, the cooling water cavity and the water return pipe 11 can be washed away, and automatic cleaning is achieved. The top feeding port of the ice crusher 2 is provided with the gate plate, and before the valve is opened, the gate plate is closed, so that external air is prevented from entering the ice crusher 2, and adverse effects on the water pump 5 are reduced.
The water return pipe 11 is connected with a filter 10 in series to filter cooling water, so that dirt washed away is prevented from entering the cooling tower 1, and the cleaning effect is ensured. A water temperature meter can be further installed on the water return pipe 11 to monitor the temperature of cooling water, and power adjustment of the cooling tower 1 and the water pump 5 is facilitated.
The ice crusher 2 is internally provided with a screen, and the diameter of the mesh of the screen is 1-2 mm, so that the diameter of ice particles is 1-2 mm. The ice particles flow in the water supply pipe 6, the cooling water cavity and the water return pipe 11 to melt and become small, the temperature of the cooling water is reduced by heat absorption, the cooling effect on the target material is improved, waste is avoided, and the problem of ice particle blockage cannot be caused.
To sum up, the utility model provides a self-cleaning formula magnetron sputtering target cooling system through the ice particle that the ice crusher produced, has realized the cleanness of delivery pipe, cooling water cavity and return water pipe inner wall, has promoted the cooling efficiency of target.
The above only is the embodiment of the present invention, not limiting the patent scope of the present invention, all of which utilize the equivalent structure or equivalent flow transformation made by the content of the specification of the present invention, or directly or indirectly applied to other related technical fields, all included in the same way in the patent protection scope of the present invention.
Claims (6)
1. A self-cleaning magnetron sputtering target material cooling system is characterized by comprising: the water mixing device comprises a water pump, a water mixing pipeline, an ice crusher, a target material and a cooling tower, wherein a cooling water cavity is arranged in the target material, a first pipe joint communicated with the cooling water cavity is arranged at one end of the target material, a second pipe joint communicated with the cooling water cavity is arranged at the other end of the target material, a water supply pipe is arranged between the first pipe joint and a water outlet of the cooling tower, a water return pipe is arranged between the second pipe joint and a water inlet of the cooling tower, the water pump is connected in series on the water supply pipe or the water return pipe, the water mixing pipeline is connected in series on the water supply pipe, the ice crusher is arranged above the water mixing pipeline, and a blanking pipe vertically communicated with the water mixing pipeline.
2. The system of claim 1, wherein a filter is connected in series to the water return pipe.
3. The system for cooling a self-cleaning magnetron sputtering target according to claim 1, wherein a horizontal bracket is arranged at the bottom of the water mixing pipeline.
4. The system of claim 1, wherein a screen is disposed in the ice crusher.
5. The system of claim 4, wherein the mesh diameter of the screen is 1-2 mm.
6. The system of claim 1, wherein a valve is disposed on the blanking tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920939463.2U CN210215525U (en) | 2019-06-21 | 2019-06-21 | Self-cleaning magnetron sputtering target material cooling system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920939463.2U CN210215525U (en) | 2019-06-21 | 2019-06-21 | Self-cleaning magnetron sputtering target material cooling system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210215525U true CN210215525U (en) | 2020-03-31 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920939463.2U Expired - Fee Related CN210215525U (en) | 2019-06-21 | 2019-06-21 | Self-cleaning magnetron sputtering target material cooling system |
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| CN (1) | CN210215525U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110117778A (en) * | 2019-06-21 | 2019-08-13 | 张家港市和瑞创先智能光学有限公司 | A kind of self-cleaning magnetic control spattering target cooling system |
-
2019
- 2019-06-21 CN CN201920939463.2U patent/CN210215525U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110117778A (en) * | 2019-06-21 | 2019-08-13 | 张家港市和瑞创先智能光学有限公司 | A kind of self-cleaning magnetic control spattering target cooling system |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200331 |
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| CF01 | Termination of patent right due to non-payment of annual fee |