CN110109271B - Liquid knife - Google Patents
Liquid knife Download PDFInfo
- Publication number
- CN110109271B CN110109271B CN201910302232.5A CN201910302232A CN110109271B CN 110109271 B CN110109271 B CN 110109271B CN 201910302232 A CN201910302232 A CN 201910302232A CN 110109271 B CN110109271 B CN 110109271B
- Authority
- CN
- China
- Prior art keywords
- liquid
- groove
- knife
- nozzle
- injection channel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000007788 liquid Substances 0.000 title claims abstract description 68
- 238000002347 injection Methods 0.000 claims abstract description 26
- 239000007924 injection Substances 0.000 claims abstract description 26
- 238000004519 manufacturing process Methods 0.000 claims abstract description 6
- 239000012530 fluid Substances 0.000 claims description 13
- 238000005507 spraying Methods 0.000 claims description 8
- 229910045601 alloy Inorganic materials 0.000 claims description 6
- 239000000956 alloy Substances 0.000 claims description 6
- 239000004033 plastic Substances 0.000 claims description 6
- 229920003023 plastic Polymers 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 3
- 239000004800 polyvinyl chloride Substances 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 229920000915 polyvinyl chloride Polymers 0.000 claims 1
- 230000007547 defect Effects 0.000 abstract description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 18
- 238000000034 method Methods 0.000 description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 238000003860 storage Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- JEGUKCSWCFPDGT-UHFFFAOYSA-N h2o hydrate Chemical compound O.O JEGUKCSWCFPDGT-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000005484 gravity Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
- B08B11/04—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto specially adapted for plate glass, e.g. prior to manufacture of windshields
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
Abstract
The invention provides a liquid knife which is used for applying treatment liquid in a display panel manufacturing process and comprises a body and a fixing piece. The body comprises a liquid injection channel, a nozzle communicated with the liquid injection channel and at least one groove arranged on the nozzle in an adjacent mode. The groove comprises a notch and a closed groove bottom, wherein the size of the notch is smaller than the height of the groove. The fixing piece is fixedly connected with the body, and the fixing piece is fixedly connected between the liquid injection channel and the groove. Therefore, liquid can uniformly flow out when passing through the nozzle of the liquid knife, the defect that the formed display panel has uneven brightness (mura) caused by uneven liquid pressure is overcome, the uniformity of Critical Dimension (CD) is improved, and the uniformity of the brightness of the display panel is improved.
Description
Technical Field
The present invention relates to a liquid knife for applying a processing liquid during a manufacturing process of a display panel.
Background
In the conventional wet process technique of Thin Film Transistor (TFT), a slit type liquid knife is used to uniformly flow out a developer, for example, and apply the developer onto a glass substrate during cleaning or developing of the glass substrate. After the slit type liquid knife is fixed through the screw, liquid is sprayed on the glass substrate through the slit type liquid knife to splash, and partial liquid can splash back to the liquid knife. After long-time operation, water vapor can be condensed on the liquid knife, and water drops condensed on the surface of the liquid knife can flow to the opening of the liquid knife under the action of gravity to affect a water curtain (liquid curtain) sprayed by the liquid knife, so that the water curtain is not uniform, the defect that linear/wavy uneven brightness (mura) is easily generated at a display panel corresponding to a Photoresist (PR) pattern after development is caused, and the yield (yield) is reduced. The uneven liquid outflow causes a difference in a pattern pitch to be finally formed, that is, a difference in a Critical Dimension (CD) of the front and rear patterns, thereby causing uneven brightness display of the liquid crystal display.
Disclosure of Invention
In view of the above, there is a need for a fluid knife that solves the problems of the prior art.
The invention aims to provide a liquid knife, which avoids uneven spraying caused by the confluence of water vapor or splashed liquid and the falling of the converged liquid into a water curtain, overcomes the defect of uneven brightness (mura) of a display panel caused by uneven liquid pressure, and improves the uniformity of Critical Dimension (CD), thereby improving the uniformity of the brightness of the display panel.
To achieve the above object, the present invention provides a liquid knife for applying a processing liquid in a display panel manufacturing process, including a main body and a fixing member. The body comprises a liquid injection channel, a nozzle communicated with the liquid injection channel and at least one groove arranged on the nozzle in an adjacent mode. The groove comprises a notch and a closed groove bottom, wherein the size of the notch is smaller than the height of the groove. The fixing piece is fixedly connected to the body and penetrates between the liquid injection channel and the groove.
In an embodiment of the invention, the groove bottom is parallel to or inclined to the liquid spraying direction of the nozzle.
In one embodiment of the invention, the slope angle of the groove bottom is between zero and 2 times the groove height/length of arctangent (0< θ < arctan (2H/L)).
In an embodiment of the invention, the groove is rectangular, circular or polygonal in shape, and the groove is located at an upper edge of the nozzle opening.
In an embodiment of the invention, the body includes two corresponding smooth surfaces, and the liquid injection channel and the at least one groove are spaced apart from each other and arranged on one of the two smooth surfaces.
In an embodiment of the invention, the number of the grooves is 2 or more than 2, and each groove is respectively opened on any one of the smooth surfaces.
In an embodiment of the invention, the liquid injection channel comprises an injection pipeline for injecting liquid and an output pipeline communicated with the nozzle, the output pipeline is positioned in the middle of the body, and the size of the output pipeline is set according to the outflow of the liquid.
In an embodiment of the invention, the fixing member is a screw, and the fixing member is fixedly connected between the injection pipeline and the groove.
In an embodiment of the invention, the material of the body is plastic, metal or alloy, the plastic is Polyvinyl Chloride (PVC), and the alloy is Stainless Steel (SUS).
In an embodiment of the invention, the body is integrally formed or assembled in blocks.
The invention also has the following effect that the groove can be a closed parallel groove bottom or a groove bottom with a slope, and can store water vapor, water drops and other liquids and increase the water vapor storage capacity. Moreover, the number of the grooves is more than 2, and the storage capacity can be increased.
Drawings
In order to illustrate the embodiments or the technical solutions in the prior art more clearly, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the invention, and it is obvious for a person skilled in the art that other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic cross-sectional view of a fluid knife of the present invention;
FIG. 2 is a schematic plan view of a fluid knife of the present invention; and
FIG. 3 is a schematic view of a groove of the fluid knife of the present invention.
Detailed Description
Reference in the detailed description to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the invention. The appearances of the same phrases in various places in the specification are not necessarily limited to the same embodiment, but are to be construed as independent or alternative embodiments to other embodiments. In light of the disclosure of the embodiments provided by the present invention, it should be understood by those skilled in the art that the embodiments described in the present invention can have other combinations or variations consistent with the concept of the present invention.
The following description of the embodiments refers to the accompanying drawings for illustrating the specific embodiments in which the invention may be practiced. Directional phrases referred to herein, such as [ upper ], [ lower ], [ front ], [ rear ], [ left ], [ right ], [ inner ], [ outer ], [ side ], [ vertical ], [ horizontal ], etc., refer only to the directions of the attached drawings. Accordingly, the directional terms used are used for explanation and understanding of the present invention, and are not used for limiting the present invention. In the drawings, elements having similar structures are denoted by the same reference numerals.
Referring to fig. 1 and 2, fig. 1 is a schematic cross-sectional view of a fluid knife of the present invention, and fig. 2 is a schematic plan view of the fluid knife of the present invention. As shown in the drawings, the present invention provides a liquid knife 1 for applying a treating liquid 2 in a display panel manufacturing process, including a body 11 and a fixing member 15. The liquid knife 1 can achieve the effect of even spraying by injecting the liquid 2. Such as water, photoresist or developer (developer), etc. The liquid knife 1 is connected to the main body 11 through a fixing member 15 and is fixed to an equipment table (not shown) of a display panel manufacturing process. The display panel process includes, but is not limited to, a cleaning process, a PR process, etc.
The body 1 comprises a liquid injection channel 12, a nozzle 13 communicated with the liquid injection channel 12 and at least one groove 14 which is adjacent to the nozzle 13 and is arranged on the nozzle 13. The groove 14 includes a notch 141 and a closed groove bottom 142, wherein the size of the notch 141 is smaller than the height H of the groove 14. The fixing member 15 is fixedly connected to the body 11, and the fixing member 15 is fixedly connected between the liquid injection channel 12 and the groove 14.
As shown in fig. 1, the grooves 14 are preferably rectangular in shape; in alternative embodiments, the shape of the groove 14 may be circular, polygonal, or a combination thereof, without limitation. The groove 14 is located at the upper edge of the opening of the nozzle 13. The body 11 comprises two corresponding smooth surfaces 16, and each smooth surface 16 is provided with a bevel edge 17 close to the nozzle 13, so that the nozzle 13 is in a sharp nozzle shape, and the spraying is facilitated to be aligned. The liquid injection channel 12 and the at least one groove 14 are spaced apart from each other by the smooth surface 16.
Specifically, the liquid injection passage 12 includes an injection pipe 121 for injecting the liquid 2 and an output pipe 122 communicating with the nozzle 13. The injection pipe 121 and the output pipe 122 are perpendicular to each other, and the output pipe 122 is located at a middle position of the body 11. In other alternative embodiments, the injection conduit 121 can also be arranged obliquely to the outlet conduit 122, and the outlet conduit 122 can be disposed offset to one of the smooth surfaces 16, as desired. The size (pipe diameter) of the output pipe 122 may be set according to the outflow amount of the liquid 2. Furthermore, the fixing member 15 shown in fig. 1 is preferably a screw or a bolt, and the fixing member 15 is penetrated between the injection pipe 121 and the groove 14.
The groove bottom 142 is parallel to the direction of the liquid spray from the nozzles 13 as shown in fig. 1. However, in the embodiment shown in fig. 3, the groove bottom 142 may be inclined to the spraying direction of the nozzles 13, so as to increase the amount of the stored moisture 21. The inclination angle theta of the groove bottom 142 is between zero and 2 times of the inverse tangent of the groove height H/the groove length L, namely 0< theta < arctan (2H/L), so that the phenomenon that the water vapor 21 or the splashed liquid 2 flows together and falls into the water curtain 22 to cause uneven spraying is avoided. In other words, the grooves 14 can store the water vapor/water droplets 21 or the splashed liquid 2, so as to prevent the water vapor/water droplets from directly flowing to the nozzles 13, which causes the uneven water curtain 22 sprayed by the nozzles 13 and causes the defect of uneven brightness (mura) on the display panel. Therefore, the present invention improves the uniformity of the brightness of the display panel by improving the Critical Dimension (CD) uniformity by using the grooves 14 to overcome the defect of the linear/corrugated brightness unevenness (mura) caused by the uneven pressure of the liquid 2.
In an embodiment of the present invention, the number of the grooves 14 is 2 or more, and each of the grooves 14 is opened on any one of the smooth surfaces 16. In addition, the material of the body 11 may be plastic, metal or alloy, so as to be suitable for spraying liquids 2 with different properties. The plastic is preferably Polyvinyl Chloride (PVC); the alloy is preferably Stainless Steel (SUS). Furthermore, the body 11 may be formed integrally or assembled in blocks, and may be changed as required.
Therefore, the grooves 14 of the present invention can be closed parallel grooves 142 or inclined grooves 142, which can store moisture, water droplets 21, and other liquids 2, and can increase the moisture storage capacity. Moreover, the number of the grooves 14 is more than 2, and the storage capacity can be increased.
In view of the foregoing, while the present invention has been described in conjunction with specific embodiments thereof, it is to be understood that many alternatives, modifications, and variations will be apparent to those skilled in the art. Accordingly, it is intended to embrace all such alternatives, modifications, and variations that fall within the scope of the included claims.
Claims (8)
1. A liquid knife for applying a treatment liquid in a display panel manufacturing process, the liquid knife comprising:
the body comprises a liquid injection channel, a nozzle communicated with the liquid injection channel and at least one groove which is arranged on the nozzle and is adjacent to the nozzle, wherein the groove comprises a notch and a closed groove bottom, and the size of the notch is smaller than the height of the groove; and
the fixing piece is fixedly connected between the liquid injection channel and the groove;
the groove bottom is inclined to the liquid spraying direction of the nozzle;
the inclination angle theta of the groove bottom is 0< theta < arctan (2H/L), wherein H is the height of the groove, and L is the length of the groove.
2. The fluid knife of claim 1, wherein the groove is rectangular, circular, or polygonal in shape and is located at an upper edge of the nozzle opening.
3. The fluid knife of claim 1, wherein the body includes a corresponding planar surface, the fluid injection channel and the at least one groove being spaced apart from the planar surface.
4. The fluid knife of claim 3, wherein the number of the grooves is 2 or more than 2, and each groove is respectively arranged on any one of the smooth surfaces.
5. The liquid knife according to claim 1, wherein the liquid injection channel comprises an injection pipe for injecting the liquid and an output pipe communicated with the nozzle, the output pipe is located at a middle position of the body, and the size of the output pipe is set according to the outflow of the liquid.
6. The fluid knife of claim 5, wherein the fastener is a screw, the fastener passing between the injection conduit and the channel.
7. The fluid knife of claim 1, wherein the body is made of plastic, metal or alloy, the plastic is polyvinyl chloride, and the alloy is stainless steel.
8. The fluid knife of claim 1, wherein the body is integrally formed or assembled in pieces.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910302232.5A CN110109271B (en) | 2019-04-16 | 2019-04-16 | Liquid knife |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910302232.5A CN110109271B (en) | 2019-04-16 | 2019-04-16 | Liquid knife |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110109271A CN110109271A (en) | 2019-08-09 |
| CN110109271B true CN110109271B (en) | 2022-02-22 |
Family
ID=67485370
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910302232.5A Active CN110109271B (en) | 2019-04-16 | 2019-04-16 | Liquid knife |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110109271B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112899757B (en) * | 2020-12-31 | 2022-03-25 | 珠海松柏科技有限公司 | Electroplating water knife for electroplating PCB (printed circuit board) micropores |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001021872A (en) * | 1999-07-06 | 2001-01-26 | Matsushita Electric Ind Co Ltd | Apparatus for production of substrate for liquid crystal display |
| CN1803321A (en) * | 2006-01-17 | 2006-07-19 | 友达光电股份有限公司 | Knife mechanism with liquid passage |
| KR20070057474A (en) * | 2005-12-02 | 2007-06-07 | 엘지.필립스 엘시디 주식회사 | Air knife for liquid crystal display and method for controlling thereof |
| CN101303968A (en) * | 2007-05-07 | 2008-11-12 | 大日本网目版制造株式会社 | Substrate processing apparatus |
| CN201520802U (en) * | 2009-08-21 | 2010-07-07 | 深圳华映显示科技有限公司 | Wet etching equipment |
| CN207856553U (en) * | 2017-12-11 | 2018-09-14 | 广东澳森环保科技有限责任公司 | It is a kind of to apply exhaust gas cleaner without water pumping churning |
-
2019
- 2019-04-16 CN CN201910302232.5A patent/CN110109271B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001021872A (en) * | 1999-07-06 | 2001-01-26 | Matsushita Electric Ind Co Ltd | Apparatus for production of substrate for liquid crystal display |
| KR20070057474A (en) * | 2005-12-02 | 2007-06-07 | 엘지.필립스 엘시디 주식회사 | Air knife for liquid crystal display and method for controlling thereof |
| CN1803321A (en) * | 2006-01-17 | 2006-07-19 | 友达光电股份有限公司 | Knife mechanism with liquid passage |
| CN101303968A (en) * | 2007-05-07 | 2008-11-12 | 大日本网目版制造株式会社 | Substrate processing apparatus |
| CN201520802U (en) * | 2009-08-21 | 2010-07-07 | 深圳华映显示科技有限公司 | Wet etching equipment |
| CN207856553U (en) * | 2017-12-11 | 2018-09-14 | 广东澳森环保科技有限责任公司 | It is a kind of to apply exhaust gas cleaner without water pumping churning |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110109271A (en) | 2019-08-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information | ||
| CB02 | Change of applicant information |
Address after: 9-2 Tangming Avenue, Guangming New District, Shenzhen City, Guangdong Province Applicant after: TCL Huaxing Photoelectric Technology Co.,Ltd. Address before: 9-2 Tangming Avenue, Guangming New District, Shenzhen City, Guangdong Province Applicant before: Shenzhen China Star Optoelectronics Technology Co.,Ltd. |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Liquid knife Effective date of registration: 20231113 Granted publication date: 20220222 Pledgee: Industrial and Commercial Bank of China Limited Shenzhen Guangming Sub branch Pledgor: TCL Huaxing Photoelectric Technology Co.,Ltd. Registration number: Y2023980065368 |