CN110109221A - Based on graphene-silicon nitride hybrid integrated optical waveguide three people's voting machine of electric light - Google Patents
Based on graphene-silicon nitride hybrid integrated optical waveguide three people's voting machine of electric light Download PDFInfo
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- CN110109221A CN110109221A CN201910321334.1A CN201910321334A CN110109221A CN 110109221 A CN110109221 A CN 110109221A CN 201910321334 A CN201910321334 A CN 201910321334A CN 110109221 A CN110109221 A CN 110109221A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/011—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour in optical waveguides, not otherwise provided for in this subclass
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- G—PHYSICS
- G07—CHECKING-DEVICES
- G07C—TIME OR ATTENDANCE REGISTERS; REGISTERING OR INDICATING THE WORKING OF MACHINES; GENERATING RANDOM NUMBERS; VOTING OR LOTTERY APPARATUS; ARRANGEMENTS, SYSTEMS OR APPARATUS FOR CHECKING NOT PROVIDED FOR ELSEWHERE
- G07C13/00—Voting apparatus
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12145—Switch
Abstract
The invention discloses a kind of based on graphene-silicon nitride hybrid integrated optical waveguide three people's voting machine of electric light, including four photoswitches and the identical 2 × 1MMI coupler of two structures, each photoswitch includes two three-dB couplers, two phase displacement arm and three electrodes, each phase displacement arm passes through graphene respectively, the three kinds of material preparations of silicon nitride and silica, first output end of the first three-dB coupler is connect with one end of the first phase displacement arm, the first input end of second three-dB coupler is connect with the other end of the first phase displacement arm, the second output terminal of first three-dB coupler is connect with one end of the second phase displacement arm, second input terminal of the second three-dB coupler is connect with the other end of the second phase displacement arm, first phase displacement arm be connected to respectively by its interior graphene between first electrode and second electrode, second phase displacement arm and second Pass through its interior graphene connection between electrode and third electrode respectively；Advantage is that power consumption is smaller, and bandwidth is larger, and occupied area is smaller, is conducive to cascade extension.
Description
Technical field
The present invention relates to a kind of three people's voting machines of electric light, are based on graphene-silicon nitride hybrid integrated more particularly, to one kind
Three people's voting machine of electric light of optical waveguide.
Background technique
With increasingly expanding for internet and being constantly progressive for information technology, the requirement for information transmission and processing speed
Also constantly increasing.In order to meet the needs of people are to information, information transmission and processing are all towards high-speed and large capacity
Direction is developed, this just needs to greatly improve the bandwidth of signal and the rate of information processing, and with signal bandwidth and information processing
The continuous improvement of rate, signal is propagated the problems such as encountering bandwidth limitation and fever in circuit, therefore optical signal processing technology
Start to be concerned by people, optical device has high speed, large capacity, super low-power consumption and parallel intrinsic characteristic, for ideal letter
Cease carrier.Silicon based photon device has and complementary metal oxide semiconductor (Complement ary Metal-Oxide-
Semiconductor, CMOS) feature that technique is mutually compatible with, therefore, silicon based photon technology can be as current advantage technology
It solves this critical issue and effective means is provided.
In following optical-fiber network, optical signal prosessing is its key technology, and logic gate device is realized at optical signal
One of Primary Component of reason, it can be used for realizing the multiple networks function such as addressing and light packet.And logic gate device can divide
Are as follows: all-optical logic gate device, electric light logic gate device and hot logic gate device.And three people's voting machines based on silicon nitride waveguides
Quan Guangsan people's voting machine based on silicon nitride waveguides, three people's voting machine of electric light based on silicon nitride waveguides can be divided into and based on nitridation
Three people's voting machine of hot light of silicon waveguide.Quan Guangsan people's voting machine based on silicon nitride waveguides is non-in silicon nitride material by utilizing
Linear effect, for example specific logic function is realized in the effects such as Kerr effect and four-wave mixing, control optical signal output.Though
Right all-optical logic gates have ultraspeed, but need because of it non-linear in stronger photo-induced silicon nitride material of pumping
Thus effect is unfavorable for large-scale integrated.Three people's voting machine of hot light based on silicon nitride waveguides utilizes the heat in silicon nitride material
Luminous effect, the refractive index of silicon nitride and the phase of light are when being propagated in silicon nitride waveguides by electric current heating change light to realize
Its logic function, but its speed is slow, is in musec order, and power consumption is big, and crosstalk is also bigger, far from the following high speed of satisfaction
The requirement of optical signal prosessing.And three people's voting machine of electric light based on silicon nitride waveguides, the opposite Quan Guangsan based on silicon nitride waveguides
For people's voting machine and three people's voting machine of hot light based on silicon nitride waveguides, not only it is contemplated that the demand of speed, but also it is easily achieved collection
Cheng Hua becomes a kind of current the most widely used three people voting machine.
There are mainly two types of existing three people's voting machines of electric light based on silicon nitride waveguides: the first is using micro-ring resonant cavity
Cascade is then by realizing its voting machine function to micro-ring resonant cavity electrified regulation, but this makes the bandwidth of voting machine smaller；
Another kind is to apply electricity to the electrooptical material in Mach Zehnder interference arm excessively using Mach Zehnder interference structural level connection
Pressure changes its own effective refractive index to realize its logic function, but since its method realizes that logic function needs are very strong
Applied voltage be just able to achieve so that its power consumption is larger, the effective refractive index variation of interfere arm is also smaller, so that device
It is relatively large sized, be unfavorable for cascade extension.
Summary of the invention
Technical problem to be solved by the invention is to provide a kind of power consumption is smaller, bandwidth is larger, and occupied area is smaller, is conducive to
Cascade extension based on graphene-silicon nitride hybrid integrated optical waveguide three people's voting machine of electric light.
The technical scheme of the invention to solve the technical problem is: a kind of based on graphene-silicon nitride mixing collection
At three people's voting machine of electric light of optical waveguide, including the identical photoswitch of four structures and the identical 2 × 1MMI coupling of two structures
Device, each photoswitch are respectively provided with control terminal, first input end, the second input terminal, the first output end and the second output
End, each 2 × 1MMI coupler is respectively provided with first input end, the second input terminal and output end, described in first
The first input end connection of photoswitch described in first output end of photoswitch and second, the of photoswitch described in first
The second input terminal connection of photoswitch described in two output ends and second, the first output end of photoswitch described in second and
The second input terminal connection of the third photoswitch, described in the second output terminal of photoswitch described in second and the 4th
Photoswitch first input end connection, the second output terminal and first 2 × 1MMI coupler of the third photoswitch
First input end connection, the second of the first output end of photoswitch described in the 4th and first 2 × 1MMI coupler be defeated
Enter end connection, the first output end of the third photoswitch and the first input end of second 2 × 1MMI coupler connect
It connecing, the second output terminal of photoswitch described in the 4th is connect with the second input terminal of second 2 × 1 MMI coupler, and first
The control terminal of a photoswitch is the first control terminal of three people's voting machine of electric light, for accessing the first control letter
Number, the control terminal of the control terminal of photoswitch described in second photoswitch described with third connects and its connecting pin is described
Three people's voting machine of electric light the second control terminal, for accessing second control signal, the control terminal of photoswitch described in the 4th
For the third control terminal of three people's voting machine of electric light, for accessing third control signal, photoswitch described in first
First input end is the input terminal of three people's voting machine of electric light, and the output end of 2 × 1MMI coupler described in second is
The output end of three people's voting machine of electric light；The photoswitch respectively include identical two three-dB couplers of structure,
The identical two phase displacement arm of structure and identical three electrodes of structure, each three-dB coupler are respectively provided with the first input
Three-dB coupler described in two is referred to as the first 3dB coupling by end, the second input terminal, the first output end and second output terminal
Phase displacement arm described in two is referred to as the first phase displacement arm and the second phase displacement arm, described in three by device and the second three-dB coupler
Electrode be referred to as first electrode, second electrode and third electrode, the phase displacement arm passes through graphene, nitridation respectively
Three kinds of materials of silicon and silica are prepared, the first output end of first three-dB coupler and first phase shift
One termination of arm, the first input end of second three-dB coupler is connect with the other end of the first phase displacement arm, described
The second output terminal of the first three-dB coupler connect with one end of the second phase displacement arm, second three-dB coupler
Second input terminal is connect with the other end of the second phase displacement arm；The first phase displacement arm and the first electrode and institute
Respectively by its interior graphene connection between the second electrode stated, the second phase displacement arm and the second electrode and described
Third electrode between pass through its interior graphene connection respectively.
Each phase displacement arm respectively includes two completely identical in structure rectangular waveguides, covering and regulating course, by two
A rectangular waveguide is referred to as the first rectangular waveguide and the second rectangular waveguide, first rectangular waveguide and described
The material of second rectangular waveguide is respectively silicon nitride, and the material of the covering is silica, first rectangular waveguide,
The regulating course and second rectangular waveguide arrange from top to bottom, the covering by first rectangular waveguide,
The regulating course and second rectangular waveguide envelope, and the regulating course includes completely identical in structure four layers of graphite
Alkene layer and completely identical in structure four layers of silicon dioxide layer, by graphene layer described in four layers be referred to as the first graphene layer,
Silicon dioxide layer described in four layers is referred to as the one or two by the second graphene layer, third graphene layer and the 4th graphene layer
Silicon oxide layer, the second silicon dioxide layer, third silicon dioxide layer and the 4th silicon dioxide layer, first silicon dioxide layer,
First graphene layer, second silicon dioxide layer, second graphene layer, the third graphene
Layer, the third silicon dioxide layer, the 4th graphene layer and the 4th silicon dioxide layer are according to from the top down
Sequence is laminated, and the upper surface of first silicon dioxide layer is connected with the lower surface of first rectangular waveguide, described
The lower surface of the 4th silicon dioxide layer be connected with the upper surface of second rectangular waveguide；In the first phase displacement arm
One end of first rectangular waveguide and one end of the second rectangular waveguide are connect with the first output end of the first 3dB coupler,
Connect with the first input end of second three-dB coupler, in the second phase displacement arm one end of the first rectangular waveguide and
One end of second rectangular waveguide is connect with the second output terminal of first three-dB coupler, in the second phase displacement arm
Second input terminal of the other end of the other end of one rectangular waveguide and the second rectangular waveguide and second three-dB coupler connects
It connects；The first graphene layer is connect with the first electrode in the first phase displacement arm, second in the first phase displacement arm
Graphene layer is connect with the second electrode, third graphene layer and the second electrode phase in the first phase displacement arm
It connects, the 4th graphene layer is connect with the first electrode in the first phase displacement arm；In the second phase displacement arm
First graphene layer is connect with the third electrode, the second graphene layer in the second phase displacement arm and described second
Electrode is connected, and the third graphene layer in the second phase displacement arm is connected with the second electrode, and described second
The 4th graphene layer in phase displacement arm is connected with the third electrode.In the structure, by being embedded in each phase displacement arm
First graphene layer, the second graphene layer, third graphene layer and the 4th graphene layer, between the first electrode and the second electrode
On-load voltage or on-load voltage changes in the first phase displacement arm or the second phase displacement arm between third electrode and second electrode
The fermi level of each graphene layer, so as to change Mach Zehnder interference arm, the first phase displacement arm and the second phase displacement arm medium wave are led
Mode effective refractive index, due to apply very little voltage the mode of waveguide in Mach Zehnder interference arm can be made effective
Variations in refractive index is very big, the mode effective refractive index that each phase displacement arm medium wave is led can be adjusted with larger range, it is possible thereby to make
The size of Mach Zehnder interference arm reduces, meanwhile, the electric light of Mach Zehnder interference structure and MMI coupler cascade composition
Whole size can be made to reduce when three people's voting machines, additionally, due to the voltage very little of application, so the power consumption of three people's voting machines
It is relatively low, and each graphene layer and each silicon dioxide layer form capacity plate antenna model to increase the bandwidth of device；In addition
First capacity plate antenna model that first graphene layer, the second graphene layer and the second silicon dioxide layer are constituted, third graphene
Second capacity plate antenna model that layer, the 4th graphene layer and third silicon dioxide layer are constituted, the two capacity plate antenna models are simultaneously
Connection, when graphene layer applies voltage, the two capacity plate antenna models will not generate electric current, in this way in circuit operational process not
Biggish power consumption can be generated.
The width of first rectangular waveguide and second rectangular waveguide is 1200 nanometers, is highly 170
Nanometer, refractive index is 1.9894, and the thickness of graphene layer described in every layer is 0.7 nanometer, silica described in every layer
The thickness of layer is 7 nanometers, and the refractive index of silicon dioxide layer described in every layer is 1.444.In the structure, the first rectangular waveguide
Size matching with the second rectangular waveguide enables to TE basic mode to transmit in this configuration, and transmission loss is lower.
First electrode, the second electrode and the third electrode respectively by be located at lower part platinum electrode and
Superposed gold electrode composition, the first electrode, the second electrode and the third electrode pass through it respectively
Gold electrode is connect with the first phase displacement arm and the second phase displacement arm.
Compared with the prior art, the advantages of the present invention are as follows by between the first electrode and the second electrode or second
Apply voltage between electrode and third electrode, changes Fermi's energy of the first phase displacement arm or the grapheme material in the second phase displacement arm
Grade, the mode effective refractive index led so as to the first phase displacement arm of large range of change or the second phase displacement arm medium wave and power consumption
It is smaller, it is can control when optical signal is propagated in the first phase displacement arm or the second phase displacement arm in this way and generates phase difference, to control
Optical signal is exported from the different output port of Mach Zehnder interference structure, can make Mach-due to applying lesser voltage
The mode effective refractive index variation of waveguide in Zeng Deer interfere arm very greatly, can adjust what each phase displacement arm medium wave was led with larger range
Mode effective refractive index, this meeting so that the size of phase displacement arm reduces, be advantageous for that cascade constitutes in this way based on graphene-nitridation
The size of the three entire device of people's voting machine of electric light of silicon hybrid integrated optical waveguide also reduces accordingly, and the graphite in phase displacement arm
The capacity plate antenna model structure that alkene and silica are constituted, so that modulation bandwidth increases, and in graphite in capacity plate antenna model
Electric current will not be generated by applying voltage on alkene, will not generate biggish power consumption in circuit operational process in this way.
Detailed description of the invention
Fig. 1 is that the structure of the invention based on graphene-silicon nitride hybrid integrated optical waveguide three people's voting machine of electric light is former
Manage block diagram；
Fig. 2 is of the invention based on photoswitch in graphene-silicon nitride hybrid integrated optical waveguide three people's voting machine of electric light
Structural principle block diagram；
Fig. 3 is of the invention based on photoswitch in graphene-silicon nitride hybrid integrated optical waveguide three people's voting machine of electric light
Main view；
Fig. 4 is invention based in photoswitch in graphene-silicon nitride hybrid integrated optical waveguide three people's voting machine of electric light
Main view after two phase displacement arm removal insulating layers；
Fig. 5 is the cross-sectional view in Fig. 3 at A-A'.
Specific embodiment
The present invention will be described in further detail below with reference to the embodiments of the drawings.
Embodiment one: as shown, a kind of decided by vote based on graphene-silicon nitride hybrid integrated optical waveguide three people of electric light
Device, including the identical photoswitch of four structures and the identical 2 × 1MMI coupler of two structures, each photoswitch are respectively provided with control
End, first input end, the second input terminal, the first output end and second output terminal processed, each 2 × 1MMI coupler are respectively provided with
One input terminal, the second input terminal and output end, the first output end and second photoswitch of first photoswitch GSNMZ1
The first input end of GSNMZ2 connects, and the of the second output terminal of first photoswitch GSNMZ1 and second photoswitch GSNMZ2
The connection of two input terminals, the first output end of second photoswitch GSNMZ2 and the second input terminal of third photoswitch GSNMZ3
Connection, the second output terminal of second photoswitch GSNMZ2 are connected with the first input end of the 4th photoswitch GSNMZ4, third
The second output terminal of a photoswitch GSNMZ3 is connect with the first input end of first 2 × 1MMI coupler MMI1, the 4th light
The first output end of switch GSNMZ4 is connect with the second input terminal of first 2 × 1MMI coupler MMI1, third photoswitch
The first output end of GSNMZ3 is connect with the first input end of second 2 × 1MMI coupler MMI2, the 4th photoswitch
The second output terminal of GSNMZ4 is connect with the second input terminal of second 2 × 1MMI coupler MMI2, first photoswitch
The control terminal of GSNMZ1 is the first control terminal of three people's voting machine of electric light, for accessing first control signal A, second photoswitch
The control terminal of GSNMZ2 is connected with the control terminal of third photoswitch GSNMZ3 and its connecting pin is the of three people's voting machine of electric light
Two control terminals, for accessing second control signal B, the control terminal of the 4th photoswitch GSNMZ4 is the of three people's voting machine of electric light
Three control terminals, the first input end for accessing third control signal C, first photoswitch GSNMZ1 is three people's voting machine of electric light
Input terminal, the output end of second 2 × 1MMI coupler MMI2 is the output end of three people's voting machine of electric light；Each photoswitch point
Not Bao Kuo the identical two 3dB couplers of structure, the identical two phase displacement arm of structure and identical three electrodes of structure, each
Three-dB coupler is respectively provided with first input end, the second input terminal, the first output end and second output terminal, by two three-dB couplers
Be referred to as the first 3dB coupler D1 and the second three-dB coupler D2, by two phase displacement arm be referred to as the first phase displacement arm S1 and
Three electrodes are referred to as first electrode T1, second electrode T2 and third electrode T3, each phase displacement arm by the second phase displacement arm S2
Be prepared respectively by three kinds of graphene, silicon nitride and silica materials, the first output end of the first three-dB coupler D1 with
One end of first phase displacement arm S1 connects, and the first input end of the second three-dB coupler D2 is connect with the other end of the first phase displacement arm S1,
The second output terminal of first three-dB coupler D1 is connect with one end of the second phase displacement arm S2, and the second of the 2nd 3dB coupler D2 is defeated
Enter end to connect with the other end of the second phase displacement arm S2；Between first phase displacement arm S1 and first electrode T1 and second electrode T2 respectively
It is connected to by graphene in it, passes through its interior graphene between the second phase displacement arm S2 and second electrode T2 and third electrode T3 respectively
Connection.
Embodiment two: the present embodiment is basically the same as the first embodiment, and difference is:
In the present embodiment, each phase displacement arm respectively includes two completely identical in structure rectangular waveguides, covering 1 and adjusts
Two rectangular waveguides are referred to as the first rectangular waveguide 2 and the second rectangular waveguide 3, the first rectangular waveguide 2 and the second rectangle by layer
The material of waveguide 3 is respectively silicon nitride, and the material of covering 1 is silica, the first rectangular waveguide 2, regulating course and the second rectangle
Waveguide 3 arranges from top to bottom, and covering 1 envelopes the first rectangular waveguide 2, regulating course and the second rectangular waveguide 3, and regulating course includes
Completely identical in structure four layers of graphene layer and completely identical in structure four layers of silicon dioxide layer, four layers of graphene layer are claimed respectively
For the first graphene layer 4, the second graphene layer 5, third graphene layer 6 and the 4th graphene layer 7, four layers of silicon dioxide layer are divided
It is also known as the first silicon dioxide layer 8, the second silicon dioxide layer 9, third silicon dioxide layer 10 and the 4th silicon dioxide layer 11, first
Silicon dioxide layer 8, the first graphene layer 4, the second silicon dioxide layer 9, the second graphene layer 5, third graphene layer the 6, the 3rd 2
Silicon oxide layer 10, the 4th graphene layer 7 and the 4th silicon dioxide layer 11 are laminated according to sequence from the top down, the first silicon dioxide layer
8 upper surface is connected with the lower surface of the first rectangular waveguide 2, the lower surface of the 4th silicon dioxide layer 11 and the second rectangular waveguide
3 upper surface is connected；One end and first of one end of the first rectangular waveguide 2 and the second rectangular waveguide 3 in first phase displacement arm S1
The first output end of three-dB coupler D1 connects, and connect with the first input end of the second three-dB coupler D2, in the second phase displacement arm S2
One end of first rectangular waveguide 2 and one end of the second rectangular waveguide 3 are connect with the second output terminal of the first three-dB coupler D1, the
The other end and the second three-dB coupler D2 of the other end of first rectangular waveguide 2 and the second rectangular waveguide 3 in two-phase displacement arm S2
The connection of second input terminal；The first graphene layer 4 is connect with first electrode T1 in first phase displacement arm S1, in the first phase displacement arm S1
Two graphene layers 5 are connect with second electrode T2, and third graphene layer 6 is connected with second electrode T2 in the first phase displacement arm S1, the
The 4th graphene layer 7 is connect with first electrode T1 in one phase displacement arm S1；The first graphene layer 4 in second phase displacement arm S2 and
Three electrode T3 connections, the second graphene layer 5 in the second phase displacement arm S2 is connected with second electrode T2, in the second phase displacement arm S2
Third graphene layer 6 is connected with second electrode T2, the 4th graphene layer 7 in the second phase displacement arm S2 and third electrode T3 phase
Connection.
In the present embodiment, it is highly 170 that the width of the first rectangular waveguide 2 and the second rectangular waveguide 3, which is 1200 nanometers,
Nanometer, refractive index is 1.9894, and the thickness of every layer of graphene layer is 0.7 nanometer, and the thickness of every layer of silicon dioxide layer is 7
Nanometer, the refractive index of every layer of silicon dioxide layer is 1.444.
In the present embodiment, first electrode T1, second electrode T2 and third electrode T3 respectively by be located at lower part platinum electrode and
Superposed gold electrode composition, first electrode T1, second electrode T2 and third electrode T3 pass through its gold electrode and first respectively
Phase displacement arm S1 and the second phase displacement arm S2 connection.
Claims (4)
1. a kind of based on graphene-silicon nitride hybrid integrated optical waveguide three people's voting machine of electric light, it is characterised in that including four
The identical photoswitch of structure and the identical 2 × 1MMI coupler of two structures, the photoswitch be respectively provided with control terminal,
First input end, the second input terminal, the first output end and second output terminal, each 2 × 1MMI coupler are respectively provided with
First input end, the second input terminal and output end, light described in the first output end of photoswitch described in first and second
The first input end of switch connects, and second of photoswitch described in the second output terminal of photoswitch described in first and second
Second input terminal of input terminal connection, the first output end and the third photoswitch of photoswitch described in second connects
It connects, the second output terminal of photoswitch described in second is connected with the first input end of photoswitch described in the 4th, third
The second output terminal of the photoswitch is connect with the first input end of first 2 × 1MMI coupler, light described in the 4th
First output end of switch connect with the second input terminal of first 2 × 1MMI coupler, and the of the photoswitch described in third is a
One output end is connect with the first input end of second 2 × 1MMI coupler, the second output terminal of photoswitch described in the 4th
It is connect with the second input terminal of second 2 × 1MMI coupler, the control terminal of photoswitch described in first is the electric light
First control terminal of three people's voting machines, for accessing first control signal, the control terminal and third of photoswitch described in second
The control terminal of a photoswitch connects and its connecting pin is the second control terminal of three people's voting machine of electric light, for connecing
Entering second control signal, the control terminal of photoswitch described in the 4th is the third control terminal of three people's voting machine of electric light,
For accessing third control signal, the first input end of photoswitch described in first is the defeated of three people's voting machine of electric light
Enter end, the output end of 2 × 1MMI coupler described in second is the output end of three people's voting machine of electric light；It is each described
Photoswitch to respectively include identical two three-dB couplers of structure, the identical two phase displacement arm of structure and structure three identical
Electrode, each three-dB coupler are respectively provided with first input end, the second input terminal, the first output end and second output terminal,
Three-dB coupler described in two is referred to as the first three-dB coupler and the second three-dB coupler, by phase displacement arm described in two
It is referred to as the first phase displacement arm and the second phase displacement arm, electrode described in three is referred to as first electrode, second electrode and
Three electrodes, each phase displacement arm passes through graphene respectively, three kinds of materials of silicon nitride and silica are prepared, described
First output end of the first three-dB coupler is connect with one end of the first phase displacement arm, and the of second three-dB coupler
One input terminal is connect with the other end of the first phase displacement arm, the second output terminal of first three-dB coupler with it is described
The second phase displacement arm one end connection, the second input terminal of second three-dB coupler is another with the second phase displacement arm
One end connection；Pass through its interior graphite between the first phase displacement arm and the first electrode and the second electrode respectively
Alkene connection, passes through its interior graphene respectively between the second phase displacement arm and the second electrode and the third electrode
Connection.
2. it is according to claim 1 a kind of based on graphene-silicon nitride hybrid integrated optical waveguide three people's voting machine of electric light,
It is characterized in that each phase displacement arm respectively includes two completely identical in structure rectangular waveguides, covering and regulating course, it will
Rectangular waveguide described in two is referred to as the first rectangular waveguide and the second rectangular waveguide, first rectangular waveguide and described
The material of the second rectangular waveguide be respectively silicon nitride, the material of the covering is silica, first rectangular wave
Lead, the regulating course and second rectangular waveguide arrange from top to bottom, the covering is by first rectangular wave
Lead, the regulating course and second rectangular waveguide envelope, the regulating course includes completely identical in structure four layers
Graphene layer and completely identical in structure four layers of silicon dioxide layer, are referred to as the first graphene for graphene layer described in four layers
Silicon dioxide layer described in four layers is referred to as first by layer, the second graphene layer, third graphene layer and the 4th graphene layer
Silicon dioxide layer, the second silicon dioxide layer, third silicon dioxide layer and the 4th silicon dioxide layer, first silica
Layer, first graphene layer, second silicon dioxide layer, second graphene layer, the third graphite
Alkene layer, the third silicon dioxide layer, the 4th graphene layer and the 4th silicon dioxide layer according on to
Lower sequence stacking, the upper surface of first silicon dioxide layer are connected with the lower surface of first rectangular waveguide, institute
The lower surface for the 4th silicon dioxide layer stated is connected with the upper surface of second rectangular waveguide；The first phase displacement arm
In the first output end of one end of the first rectangular waveguide and one end of the second rectangular waveguide and first three-dB coupler connect
It connects, is connect with the first input end of second three-dB coupler, one end of the first rectangular waveguide in the second phase displacement arm
It is connect with one end of the second rectangular waveguide with the second output terminal of first three-dB coupler, in the second phase displacement arm
Second input terminal of the other end of the other end of the first rectangular waveguide and the second rectangular waveguide and second three-dB coupler connects
It connects；The first graphene layer is connect with the first electrode in the first phase displacement arm, second in the first phase displacement arm
Graphene layer is connect with the second electrode, third graphene layer and the second electrode phase in the first phase displacement arm
It connects, the 4th graphene layer is connect with the first electrode in the first phase displacement arm；In the second phase displacement arm
First graphene layer is connect with the third electrode, the second graphene layer in the second phase displacement arm and described second
Electrode is connected, and the third graphene layer in the second phase displacement arm is connected with the second electrode, and described second
The 4th graphene layer in phase displacement arm is connected with the third electrode.
3. it is according to claim 2 a kind of based on graphene-silicon nitride hybrid integrated optical waveguide three people's voting machine of electric light,
It is characterized in that the width of first rectangular waveguide and second rectangular waveguide is 1200 nanometers, highly it is
170 nanometers, refractive index is 1.9894, and the thickness of graphene layer described in every layer is 0.7 nanometer, titanium dioxide described in every layer
The thickness of silicon layer is 7 nanometers, and the refractive index of silicon dioxide layer described in every layer is 1.444.
4. it is according to claim 2 a kind of based on graphene-silicon nitride hybrid integrated optical waveguide three people's voting machine of electric light,
It is characterized in that the first electrode, the second electrode and the third electrode are respectively by the platinum electrode positioned at lower part
It is formed with superposed gold electrode, the first electrode, the second electrode and the third electrode pass through respectively
Its gold electrode is connect with the first phase displacement arm and the second phase displacement arm.
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