CN110108218A - Spit the adjustment system of glue rate - Google Patents
Spit the adjustment system of glue rate Download PDFInfo
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- CN110108218A CN110108218A CN201910417443.3A CN201910417443A CN110108218A CN 110108218 A CN110108218 A CN 110108218A CN 201910417443 A CN201910417443 A CN 201910417443A CN 110108218 A CN110108218 A CN 110108218A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
- G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/251—Colorimeters; Construction thereof
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
Abstract
The application provides a kind of adjustment system for spitting glue rate, which includes: color film apparatus for coating and the first measuring device；First measuring device, for obtaining the wet film parameter difference between the wet film measurement parameter of the first wet film and wet film parameter preset, and wet film parameter difference is fed back into color film apparatus for coating, first wet film is color film apparatus for coating based on the wet film for currently spitting the formation of glue rate, and wet film measurement parameter and wet film parameter preset include: coloration or thickness；Color film apparatus for coating, for according to wet film parameter difference, and wet film parameter difference and spit the corresponding relationship of glue rate difference, glue rate is currently spat in adjustment, so that the wet film parameter difference of the second wet film is less than difference threshold, the second wet film is color film apparatus for coating based on the wet film adjusted for spitting the formation of glue rate.System provided by the present application spits glue rate according to the adjustment of the wet film parameter difference of wet film, can be improved regulated efficiency.
Description
Technical field
This application involves color membrane preparation technology field more particularly to a kind of adjustment systems for spitting glue rate.
Background technique
Display panel is formed box by array substrate and color membrane substrates, and liquid is provided between array substrate and color membrane substrates
It is brilliant.It include multiple color film units in color membrane substrates, each coloured silk film unit is made of three color pixel cells, respectively red, blue
With green three pixel units.Currently, color membrane substrates are that coating chromatic photoresist glue is formed on substrate by color film apparatus for coating.
In the prior art, by measuring device on substrate coating chromatic photoresist glue formed dry film coloration or thickness into
Row measurement, in coloration or thickness abnormity (such as and setting value deviation is larger) for determining dry film, by technical staff to apparatus for coating
Glue rate of spitting be adjusted so that the coloration of dry film or thickness reach setting value.This kind of mode imitates the adjustment for spitting glue rate
Rate is low, and the coloration of measurement dry film or thickness need to wait the long period.
Summary of the invention
The application provides a kind of adjustment system for spitting glue rate, can be improved and spits glue speed adjust efficiency.
The application provides a kind of adjustment system for spitting glue rate, comprising: color film apparatus for coating and the first measuring device；
First measuring device, it is wet between the wet film measurement parameter of the first wet film and wet film parameter preset for obtaining
Film parameters difference, and the wet film parameter difference is fed back into the color film apparatus for coating, first wet film is the color film
Based on the wet film for currently spitting the formation of glue rate, the wet film measurement parameter and the wet film parameter preset include: apparatus for coating
Coloration or thickness；
The coloured silk film apparatus for coating, is used for according to the wet film parameter difference and wet film parameter difference and spits glue rate
The corresponding relationship of difference, adjustment is described currently to spit glue rate, so that the wet film parameter difference of the second wet film is less than difference threshold, institute
Stating the second wet film is the color film apparatus for coating based on the wet film adjusted for spitting the formation of glue rate.
Optionally, the adjustment system further include: the second measuring device；
Second measuring device, the dry film that the dry film formed after high-temperature process is carried out for obtaining first wet film are surveyed
The dry film parameter difference between parameter and dry film parameter preset is measured, and the dry film parameter difference is fed back into the color film coating
Device, the dry film measurement parameter and the dry film parameter preset include: coloration or thickness；
The coloured silk film apparatus for coating is also used to according to the dry film parameter difference and dry film parameter difference and spits glue speed
The corresponding relationship of rate difference verifies the glue rate adjusted of spitting.
Optionally, first measuring device is also used to before the wet film parameter difference for obtaining first wet film, right
First wet film measures, and obtains the wet film measurement parameter of first wet film.
Optionally, second measuring device is also used to before obtaining the dry film parameter difference, to the dry film into
Row measurement, obtains the dry film measurement parameter.
Optionally, the color film apparatus for coating, if spitting glue specifically for the expectation obtained according to the dry film parameter difference
Rate with described adjusted to spit glue rate identical, it is determined that it is described adjusted to spit the verification of glue rate and pass through；
If it is different from the glue rate adjusted of spitting to spit glue rate according to the expectation that the dry film parameter difference obtains,
It determines that the glue rate adjusted of spitting verifies failure, and exports warning message.
Optionally, the color film apparatus for coating, is also used to during pre-manufactured, and i-th cycle period is spat glue speed
Rate adjustment are as follows: the glue rate of spitting of (i-1)-th cycle period spits the sum of glue rate with default；I is the integer more than or equal to 1, the
The glue rate of spitting of one cycle period spits glue rate for first；
First measuring device is also used to measure the wet film that each cycle period is formed, and obtains each described
The wet film measurement parameter of cycle period, and the wet film measurement parameter of each cycle period is fed back into the color film painting and is arranged
It sets；
Second measuring device is also used to measure the dry film that each cycle period is formed, and obtains each described
The dry film measurement parameter of cycle period, and the dry film measurement parameter of each cycle period is fed back into the color film painting and is arranged
It sets；
The coloured silk film apparatus for coating, be also used to according to each cycle period spit glue rate, wet film measurement parameter and
Dry film measurement parameter obtains wet film parameter difference and spits the corresponding relationship of glue rate difference and dry film parameter difference and spit glue
The corresponding relationship of rate difference.
Optionally, the color film apparatus for coating, is specifically used for according to first cycle period and remaining each cycle period
Wet film parameter difference, dry film parameter difference, and spit glue rate difference, obtain wet film parameter difference and spit glue rate difference
Corresponding relationship and dry film parameter difference and the corresponding relationship for spitting glue rate difference.
Optionally, the color film apparatus for coating, specifically for determining wet film parameter difference and spitting the correspondence of glue rate difference
In relationship, if the wet film parameter difference including first wet film is corresponding to spit glue rate difference；
If it is not, then determining the wet of first wet film according to wet film parameter difference and the corresponding relationship for spitting glue rate difference
Film parameters difference is corresponding to spit glue rate difference；
Glue rate difference is spat according to the wet film parameter difference for currently spitting glue rate and first wet film is corresponding, is adjusted
It is whole described currently to spit glue rate.
Optionally, the wet film parameter difference of first wet film is corresponding spits glue rate difference are as follows: in the wet film parameter
It difference and spits in the corresponding relationship of glue rate difference, joins with the smallest wet film of difference of the wet film parameter difference of first wet film
Difference is corresponding spits glue rate difference for number；Or, lesser two wet films of difference with the first wet film wet film parameter difference are joined
The corresponding mean value for spitting glue rate difference of number difference.
Optionally, the adjustment system further include: high temperature treating device；
The high temperature treating device obtains the dry film for carrying out high-temperature process to first wet film.
The application provides a kind of adjustment system for spitting glue rate, which includes: color film apparatus for coating and the first measurement dress
It sets；First measuring device, for obtaining the wet film parameter difference between the wet film measurement parameter of the first wet film and wet film parameter preset
Value, and wet film parameter difference is fed back into color film apparatus for coating, the first wet film is that color film apparatus for coating is based on currently spitting glue rate
The wet film of formation, wet film measurement parameter and wet film parameter preset include: coloration or thickness；Color film apparatus for coating is used for basis
Wet film parameter difference and wet film parameter difference and the corresponding relationship for spitting glue rate difference, adjustment currently spit glue rate, so that the
The wet film parameter difference of two wet films is less than difference threshold, and the second wet film spits glue rate shape based on adjusted for color film apparatus for coating
At wet film.System provided by the present application spits glue rate according to the adjustment of the wet film parameter difference of wet film, can be improved regulated efficiency.
Detailed description of the invention
Fig. 1 is the structural schematic diagram one of the adjustment system provided by the present application for spitting glue rate；
Fig. 2 is the structural schematic diagram two of the adjustment system provided by the present application for spitting glue rate；
Fig. 3 is the structural schematic diagram of color film apparatus for coating provided by the present application；
Fig. 4 is the structural schematic diagram of the first measuring device provided by the present application；
Fig. 5 is the structural schematic diagram of the second measuring device provided by the present application.
Specific embodiment
To keep the purposes, technical schemes and advantages of the application clearer, below in conjunction with embodiments herein, to this
Technical solution in application embodiment is clearly and completely described, it is clear that described embodiment is that the application a part is real
Example is applied, instead of all the embodiments.Based on the embodiment in the application, those of ordinary skill in the art are not making creation
Property labour under the premise of every other embodiment obtained, shall fall in the protection scope of this application.
Currently, the display quality in order to guarantee display panel, needs the thickness strict control to color membrane substrates, that is, need pair
The thickness control of the chromatic photoresist glue on color membrane substrates is formed in the effective range of setting thickness value.In the prior art, it adopts more
Whether just the method measured with the coloration of the dry film formed to chromatic photoresist glue or thickness determines the thickness of chromatic photoresist glue
Often.
Due to the formation of color membrane substrates, it is necessary first to the coating chromatic photoresist glue on substrate.Wherein, it is coated with the chromatic photoresist
Glue formation is wet film, and wet film forms dry film by high-temperature process.From on substrate coating chromatic photoresist glue to forming dry film
Process was needed after or so half an hour, in that case, was measured in the prior art by coloration to dry film or thickness,
And be adjusted by the way of manually adjusting to spitting glue rate, this kind of mode is low to the regulated efficiency for spitting glue rate, and has
Hysteresis quality.
To solve the above-mentioned problems, the application provides a kind of adjustment system for spitting glue rate, passes through the parameter to wet film
Measurement, can timely and effective, automatic adjustment of the realization to glue rate is spat, to reach the mesh for improving the regulated efficiency for spitting glue rate
's.
Fig. 1 is the structural schematic diagram one of the adjustment system provided by the present application for spitting glue rate.As shown in Figure 1, the application mentions
It include: color film apparatus for coating 100 and the first measuring device 200 in the adjustment system for spitting glue rate supplied.
It should be understood that the color film apparatus for coating 100 in the present embodiment can be realized color film apparatus for coating in the prior art
Function can form wet film by coating chromatic photoresist glue on substrate.
First measuring device 200 obtains the wet film measurement parameter of the first wet film for measuring to the first wet film.Its
In, wet film measurement parameter may include: coloration or thickness.The first measuring device 200 is wet for obtaining first i.e. in the present embodiment
The coloration or thickness of film.It should be understood that the first wet film is coloured silk film apparatus for coating 100 based on the wet film for currently spitting the formation of glue rate, i.e.,
Spit the wet film formed before glue speed adjust.
In order to distinguish the wet film for spitting the formation before and after glue rate for adjusting color film apparatus for coating 100 in the present embodiment, respectively
It is distinguished with the first wet film and the second wet film.Wherein, the first wet film is that color film apparatus for coating 100 is based on currently spitting glue rate shape
At wet film, the second wet film is color film apparatus for coating 100 based on the wet film adjusted for spitting the formation of glue rate.
Wet film parameter preset is can store in the first measuring device 200 in the present embodiment.Wherein, wet film parameter preset
It may include: coloration or thickness.It should be understood that wet film measurement parameter is identical with the type of wet film parameter preset, even wet film is default
When parameter is coloration, wet film measurement parameter is also coloration；If wet film parameter preset is thickness, wet film measurement parameter is also thick
Degree.Optionally, when wet film measurement parameter is thickness, the first measuring device 200 in the present embodiment can be surveyed for laser thickness
Measure any one in instrument, infrared-ray reflectance spectrum thickness measurement equipment or β ray thickness measurement equipment.Optionally, when wet film is surveyed
When amount parameter is coloration, the first measuring device 200 in the present embodiment can be spectroradiometer, spectrophotometer or three thorns
Swash any one in value colorimeter.
First measuring device 200 is after the wet film parameter preset for obtaining the first wet film, the wet film of available first wet film
Wet film parameter difference between measurement parameter and wet film parameter preset, the wet film parameter difference are the wet film measurement of the first wet film
The difference of parameter and wet film parameter preset.And first measuring device 200 wet film parameter difference can be fed back to color film apparatus for coating
100。
Color film apparatus for coating 100 in the present embodiment is receiving the wet of the first wet film of the first measuring device 200 feedback
After film parameters difference, according to the wet film parameter difference and wet film parameter difference and the corresponding relationship of glue rate difference can be spat,
Glue rate is currently spat in adjustment.Wherein, wet film parameter difference and to spit may include different wet in the corresponding relationship of glue rate difference
Film parameters difference is corresponding to spit glue rate difference.After color film apparatus for coating 100 gets the wet film parameter difference of the first wet film,
Can be in the corresponding relationship, the wet film parameter difference of the first wet film of acquisition is corresponding to spit glue rate difference, and then is spat according to this
Glue rate is currently spat in the adjustment of glue rate difference.It should be understood that wet film parameter difference can be pre- with the corresponding relationship for spitting glue rate difference
It is first stored in color film apparatus for coating 100.
Following table one in table form to wet film parameter difference (chroma difference) and spit the corresponding relationship of glue rate difference into
Row illustrates, can also be using other forms to wet film parameter difference and the corresponding relationship for spitting glue rate difference in the present embodiment
It is stored.
Table one
Shown in table one as above, if currently spitting glue rate is 25000ul/s, and the first of the first measuring device 200 feedback is wet
When the wet film parameter difference of film is spent for -0.0008, then color film apparatus for coating 100 can be true according to a kind of corresponding relationship of storage of table
Surely spitting glue rate difference is -100ul/s, then can reduce 100ul/s for glue rate is currently spat, then glue rate adjusted of spitting is
24900ul/s。
It should be understood that the wet film parameter difference in the present embodiment is color film apparatus for coating with the corresponding relationship for spitting glue rate difference
100 according to the acquisition of a large amount of historical data, and may include that different wet film parameters is corresponding in the historical data spits glue rate,
And then according to difference two-by-two, establishes above-mentioned wet film parameter difference and spit the corresponding relationship of glue rate difference.
It is worth noting that, according to the parameter difference of the first wet film and wet film parameter difference and spitting glue in the present embodiment
The corresponding relationship of rate difference can make the second wet film to currently spitting after glue rate is adjusted for color film apparatus for coating 100
Wet film parameter difference be less than difference threshold, the second wet film is that color film apparatus for coating 100 is formed based on glue rate adjusted of spitting
Wet film.The second wet film that the color film apparatus for coating 100 after spitting glue rate is coated with formation on substrate is adjusted i.e. in the present embodiment
Wet film parameter difference be less than difference threshold.It should be understood that the wet film parameter difference of the second wet film is also by the first measuring device 200
Feedback, wherein the first measuring device 200 obtain and feedback the second wet film wet film parameter difference mode can with obtain with
And the mode of the wet film parameter difference of the first wet film of feedback is identical, is specifically referred to Chinese fir associated description.
Optionally, the present embodiment prizes film apparatus for coating 100 according to the wet film parameter difference and wet film of the first wet film ginseng
Number difference and the corresponding relationship for spitting glue rate difference, determine that the wet film parameter difference of first wet film is corresponding and spit glue rate difference
When, it is thus necessary to determine that it the wet film parameter difference and spits in the corresponding relationship of glue rate difference, if the wet film including first wet film
Parameter difference is corresponding to spit glue rate difference.
Wherein, in wet film parameter difference and the corresponding relationship for spitting glue rate difference, the wet film ginseng including first wet film
Difference is corresponding spits glue rate difference for number, directly can spit glue rate difference for the wet film parameter difference of first wet film is corresponding
That glue rate is currently spat as adjustment spits glue rate difference.In wet film parameter difference and the corresponding relationship for spitting glue rate difference,
Do not include first wet film wet film parameter difference it is corresponding spit glue rate difference, need according to wet film parameter difference and spit glue speed
The corresponding relationship of rate difference determines that the wet film parameter difference of the first wet film is corresponding and spits glue rate difference, then according to currently spitting
The glue rate and wet film parameter difference of the first wet film is corresponding spits glue rate difference, glue rate is currently spat in adjustment.
Optionally, it can determine that the wet film parameter difference of the first wet film is corresponding in the present embodiment using interpolation method and spit glue speed
Rate difference.For example, according to obtaining wet film parameter difference and spitting the corresponding relationship of glue rate difference, fit wet film parameter difference and
The function between glue rate difference is spat, the wet film parameter difference of the first wet film is substituted into the function, obtains the first wet film
Wet film parameter difference is corresponding to spit glue rate difference.
For example, as above shown in table one, if the wet film parameter difference of the first wet film of the first measuring device 200 feedback be-
It then include the corresponding glue rate difference of spitting of -0.0008 degree in a kind of corresponding relationship of storage of table for -100ul/s at 0.0008 degree.
If the wet film parameter difference of the first wet film of the first measuring device 200 feedback is spent for -0.0006, a kind of correspondence of storage of table
Not including that -0.0006 degree is corresponding in relationship spits glue rate difference.
Specifically, in the present embodiment in wet film parameter difference and the corresponding relationship for spitting glue rate difference, do not include this
The wet film parameter difference of one wet film is corresponding when spitting glue rate difference, can be by the difference of the wet film parameter difference with the first wet film
The smallest wet film parameter difference is corresponding to spit glue rate difference as the wet film parameter difference of the first wet film and corresponding spits glue rate
Difference.It, can will -0.0008 degree be corresponding spits glue speed difference for example, the wet film parameter difference of the first wet film is -0.0006 when spending
Value is -100ul/s as wet film parameter difference is corresponding and spits glue rate difference
Alternatively, not including the wet film of first wet film in wet film parameter difference and the corresponding relationship for spitting glue rate difference
Parameter difference is corresponding when spitting glue rate difference, can be wet by the difference of the wet film parameter difference with the first wet film lesser two
The corresponding mean value for spitting glue rate difference of film parameters difference corresponding spits glue speed difference as the wet film parameter difference of the first wet film
Value.
For example, available -0.0008 spends and 0.000 degree pair when the wet film parameter difference of the first wet film is spent for -0.0006
That answers spits the mean value -50ul/s that glue rate difference is -100ul/s and 0, regard -50ul/s as wet film parameter difference is corresponding spits
Glue rate difference.
The present embodiment provides a kind of adjustment system for spitting glue rate, which includes: color film apparatus for coating and the first measurement
Device；First measuring device, for obtaining the wet film parameter between the wet film measurement parameter of the first wet film and wet film parameter preset
Difference, and wet film parameter difference is fed back into color film apparatus for coating, the first wet film is that color film apparatus for coating is based on currently spitting glue speed
The wet film that rate is formed, wet film measurement parameter and wet film parameter preset include: coloration or thickness；Color film apparatus for coating is used for root
Glue rate currently is spat according to wet film parameter difference and wet film parameter difference and the corresponding relationship for spitting glue rate difference, adjustment, so that
The wet film parameter difference of second wet film is less than difference threshold, and the second wet film spits glue rate based on adjusted for color film apparatus for coating
The wet film of formation.System provided by the present application spits glue rate according to the adjustment of the wet film parameter difference of wet film, on the one hand, compared to existing
Have in technology to the mode of the measurement of dry film, reduces time of measuring, improve regulated efficiency；On the other hand, it is adopted in the application
With wet film parameter difference and the corresponding relationship for spitting glue rate difference, the adjustment to glue rate is spat can be automatically and quickly realized, into
One step improves regulated efficiency.
On the basis of the above embodiments, combine Fig. 2 to the adjustment system provided by the present application for spitting glue rate in the present embodiment
System is further illustrated.Fig. 2 is the structural schematic diagram two of the adjustment system provided by the present application for spitting glue rate.As shown in Fig. 2,
The adjustment system provided by the present application for spitting glue rate can also include: the second measuring device 300 and high temperature treating device 400.
For color film apparatus for coating 100 after coating chromatic photoresist glue forms the first wet film on substrate, which can be into
One step forms corresponding dry film.Wherein, it is dry to obtain this for carrying out high-temperature process to the first wet film for high temperature treating device 400
Film.It should be understood that the high temperature treating device 400 in the present embodiment can be with the structure and function of high temperature treating device in the prior art
It can be identical.
Second measuring device 300 obtains dry film measurement parameter for measuring to dry film.Wherein, dry film measurement parameter
It may include: coloration or thickness.Dry film parameter preset is can store in the second measuring device 300 in the present embodiment, this is dry
Film parameter preset may include: coloration or thickness.It should be understood that dry film measurement parameter, dry film parameter preset and wet film measurement parameter,
The type of wet film parameter preset is identical.Optionally, in the present embodiment measurement obtain dry film measurement parameter method can with it is above-mentioned
The measurement method of wet film measurement parameter in embodiment is identical.
Second measuring device 300 after obtaining dry film measurement parameter, can be used for obtaining dry film dry film measurement parameter and
Dry film parameter difference between dry film parameter preset, and dry film parameter difference is fed back into color film apparatus for coating 100.It should be understood that
Dry film parameter difference is the dry film measurement parameter of dry film and the difference of dry film parameter preset.
It is previously stored with dry film parameter difference in color film apparatus for coating 100 in the present embodiment and spits pair of glue rate difference
It should be related to.It, can be with after the dry film parameter difference that color film apparatus for coating 100 receives the dry film of the second measuring device 300 feedback
According to the dry film parameter difference and dry film parameter difference and the corresponding relationship for spitting glue rate difference, the determining and dry film parameter
Difference is corresponding to spit glue rate difference.
Optionally, the dry film parameter difference in the present embodiment and spit the corresponding relationship of glue rate difference can be with above-mentioned table one
Form it is identical, as shown in following table two:
Table two
| Spit glue rate difference (ul/s) | Chroma difference (degree) |
| -200 | -0.0008 |
| -100 | -0.0004 |
| 0 | 0.0000 |
| 100 | 0.0004 |
| 200 | 0.0008 |
Shown in table two as above, if currently spitting glue rate is 25000ul/s, and the first of the second measuring device 300 feedback is wet
When the wet film parameter difference of film is spent for -0.0004, then color film apparatus for coating 100 can be true according to a kind of corresponding relationship of storage of table
Surely spitting glue rate difference is -100ul/s, then can reduce 100ul/s for glue rate is currently spat, then glue rate adjusted of spitting is
24900ul/s。
Color film apparatus for coating 100 in the present embodiment, be also used to according to dry film parameter difference and dry film parameter difference and
The corresponding relationship for spitting glue rate difference verifies glue rate adjusted of spitting.
Wherein, color film apparatus for coating 100, if spitting glue rate specifically for the expectation obtained according to dry film parameter difference and adjusting
After whole to spit glue rate identical, it is determined that it is adjusted to spit the verification of glue rate and pass through.For example, obtained according to dry film parameter difference
It is expected that spitting glue rate is 24900ul/s, and glue adjusted is spat according to stating of obtaining of the wet film parameter difference of above-mentioned first wet film
Rate is also 24900ul/s, it is determined that it is above-mentioned it is adjusted spit glue rate verification pass through.
If according to the expectation that dry film parameter difference obtains spit glue rate with adjusted to spit glue rate different, it is determined that adjust
Glue rate verification of spitting afterwards fails, and exports warning message.For example, spitting glue rate according to the expectation that dry film parameter difference obtains and being
24900ul/s, and spit glue rate according to stating of obtaining of the wet film parameter difference of above-mentioned first wet film is adjusted also and be
24000ul/s, it is determined that it is adjusted to spit the verification failure of glue rate, and export warning message.
Optionally, the mode of the color film apparatus for coating 100 output warning message in the present embodiment can be display alarm signal
Breath, such as " spitting the failure of glue speed adjust "；Or it can beep and spit the failure of glue speed adjust with reminding technology personnel.
It illustrates to be stored with wet film parameter difference in color film apparatus for coating 100 in above-described embodiment and spits glue rate difference
Corresponding relationship and dry film parameter difference and spit the corresponding relationship of glue rate difference.Below in the present embodiment in pre- life
During production, how to obtain wet film parameter difference and spit the corresponding relationship of glue rate difference and dry film parameter difference and spit glue
The corresponding relationship of rate difference is illustrated.
It should be understood that color film apparatus for coating 100 during pre-manufactured according to the wet film of the wet film repeatedly obtained for measuring
The dry film measurement parameter of parameter and dry film, obtains above-mentioned two corresponding relationship.
Wherein, color film apparatus for coating 100 is also used to i-th cycle period spitting glue speed adjust are as follows: (i-1)-th is followed
The sum of glue rate is spat in spitting glue rate and presetting for ring period；I is integer more than or equal to 1, and first cycle period spits glue
Rate spits glue rate for first.
For example, first to spit glue rate be 20000ul/s, default glue rate of spitting is 100ul/s, then second cycle period
Spitting glue rate is 20100ul/s, and the glue rate of spitting of third cycle period is 20200ul/s ..., and so on, color film coating
Device 100 can be adjusted the glue rate of spitting of each cycle period.Under each cycle period, color film apparatus for coating 100
Glue rate coating chromatic photoresist glue on substrate is spat according to corresponding.
Further, during pre-manufactured, the first measuring device 200 is also used to form each cycle period wet
Film measures, and obtains the wet film measurement parameter of each cycle period, and the wet film measurement parameter of each cycle period is fed back
To color film apparatus for coating 100.For example, the wet film measurement parameter that the first measuring device 200 is fed back since first cycle period
Respectively 1.0000 degree, 1.0008 degree, 1.0016 degree ....
Second measuring device 300 is also used to measure the dry film that each cycle period is formed, obtains each circulating cycle
The dry film measurement parameter of phase, and the dry film measurement parameter of each cycle period is fed back into color film apparatus for coating 100.For example, from
First cycle period start the wet film measurement parameter of the first measuring device 200 feedback be respectively 2.0000 degree, 2.0004 degree,
2.0008 degree ....
Color film apparatus for coating 100 is also used to be surveyed according to spit glue rate, wet film measurement parameter and the dry film of each cycle period
It measures parameter, acquisition wet film parameter difference and the corresponding relationship for spitting glue rate difference and dry film parameter difference and spits glue speed difference
The corresponding relationship of value.
Optionally, in the present embodiment, color film apparatus for coating 100 is specifically used for every according to first cycle period and residue
Wet film parameter difference, the dry film parameter difference of a cycle period, and spit glue rate difference, obtain wet film parameter difference and spit glue
The corresponding relationship and dry film parameter difference of rate difference and the corresponding relationship for spitting glue rate difference.Wherein, remaining each circulation
Period is the cycle period in addition to first cycle period in i cycle period.
The glue rate difference of spitting of each cycle period and first cycle period is the default integral multiple for spitting glue rate.Example
Such as, the glue rate difference of spitting of second cycle period, first cycle period is 100ul/s, and third cycle period first is followed
The glue rate difference of spitting that glue rate difference is i-th of cycle period of 200ul/s ..., first cycle period of spitting in ring period is
200×i ul/s。
In the present embodiment, by the wet film parameter difference of i-th of cycle period and first cycle period, glue rate difference is spat
Corresponding storage, can obtain wet film parameter difference and spit the corresponding relationship of glue rate difference；By i-th of cycle period and first
The dry film parameter difference of cycle period spits the corresponding storage of glue rate difference, can obtain dry film parameter difference and spit glue speed difference
The corresponding relationship of value.
For example, the wet film parameter difference of second cycle period and first cycle period, dry film parameter difference, spit glue speed
Rate difference is respectively 0.0008 degree, 0.0004 degree and 100ul/s, then obtains 0.0008 degree of wet film parameter difference and dry film parameter difference
0.0004 degree of value corresponding glue rate difference of spitting is 100ul/s.It can be pre-established as shown in following table three, in the present embodiment every
The wet film parameter difference of a cycle period, dry film parameter difference, the corresponding relationship for spitting glue rate difference, the wet film parameter difference,
Dry film parameter difference, to spit in the corresponding relationship of glue rate difference may include: wet film parameter difference and pair for spitting glue rate difference
It should be related to and dry film parameter difference and spit the corresponding relationship of glue rate difference.
Table three
| Spit glue rate difference (ul/s) | Dry film chroma difference (degree) | Wet film chroma difference (degree) |
| 0 | 0.0000 | 0.0000 |
| 100 | 0.0004 | 0.0008 |
| 200 | 0.0008 | 0.0016 |
In the adjustment system provided in this embodiment for spitting glue rate, color film apparatus for coating is also used to according to dry film parameter difference
Value and dry film parameter difference and the corresponding relationship for spitting glue rate difference, verify glue rate adjusted of spitting, improve
Spit the accuracy of glue speed adjust.And the present embodiment prize film apparatus for coating can be according to i-th of circulating cycle during pre-manufactured
The wet film parameter difference of phase and first cycle period, spits glue rate difference at dry film parameter difference, can obtain wet film parameter difference
It is worth and spits the corresponding relationship of glue rate difference and dry film parameter difference and spit the corresponding relationship of glue rate difference, and then can
Realize the adjustment for currently spitting glue rate to color film apparatus for coating.
Fig. 3 is the structural schematic diagram of color film apparatus for coating provided by the present application.As shown in figure 3, coloured silk film provided by the present application
Apparatus for coating 100 includes: transceiver module 101 and processing module 102.
Wherein, transceiver module 101, the wet film parameter difference of the first wet film for receiving the first measuring device feedback.
Processing module 102, for according to wet film parameter difference and wet film parameter difference and the correspondence for spitting glue rate difference
Relationship, adjustment currently spit glue rate, so that the wet film parameter difference of the second wet film is less than difference threshold, the second wet film is that color film applies
Cloth apparatus is based on the wet film adjusted for spitting the formation of glue rate.
Optionally, transceiver module 101 are also used to receive the dry film parameter difference of the dry film of the second measuring device feedback.
Optionally, processing module 102 are also used to according to dry film parameter difference and dry film parameter difference and spit glue rate
The corresponding relationship of difference verifies glue rate adjusted of spitting.
Optionally, processing module 102, if spitting glue rate and adjustment specifically for the expectation obtained according to dry film parameter difference
Afterwards to spit glue rate identical, it is determined that it is adjusted to spit the verification of glue rate and pass through；If the expectation obtained according to dry film parameter difference
Spit glue rate from adjusted to spit glue rate different, it is determined that it is adjusted to spit the verification failure of glue rate, and export warning message.
Optionally, processing module 102 are also used to during pre-manufactured, and i-th cycle period is spat glue speed adjust
Are as follows: the glue rate of spitting of (i-1)-th cycle period spits the sum of glue rate with default；I is the integer more than or equal to 1, and first is followed
The glue rate of spitting in ring period spits glue rate for first.
Optionally, transceiver module 101 are also used to during pre-manufactured, are received each of the first measuring device feedback and are followed
The wet film measurement parameter in ring period, and receive the dry film measurement parameter of each cycle period of the second measuring device feedback.
Optionally, processing module 102 are also used to spit glue rate, wet film measurement parameter and dry according to each cycle period
Film measurement parameter, obtain wet film parameter difference and spit glue rate difference corresponding relationship and dry film parameter difference and spit glue speed
The corresponding relationship of rate difference.
Optionally, processing module 102, specifically for the wet film according to first cycle period and remaining each cycle period
Parameter difference, dry film parameter difference, and glue rate difference is spat, it obtains wet film parameter difference and spits the corresponding of glue rate difference and close
System and dry film parameter difference and the corresponding relationship for spitting glue rate difference.
Optionally, processing module 102, specifically for determining wet film parameter difference and spitting the corresponding relationship of glue rate difference
In, if the wet film parameter difference including the first wet film is corresponding to spit glue rate difference；If it is not, then according to wet film parameter difference and
The corresponding relationship for spitting glue rate difference determines that the wet film parameter difference of the first wet film is corresponding and spits glue rate difference；According to current
Spit glue rate and the first wet film wet film parameter difference it is corresponding spit glue rate difference, glue rate is currently spat in adjustment.
Optionally, wet film parameter difference is corresponding spits glue rate difference are as follows: the difference with the wet film parameter difference of the first wet film
It is worth that the smallest wet film parameter difference is corresponding to spit glue rate difference；Or, smaller with the difference of the wet film parameter difference of the first wet film
The corresponding mean value for spitting glue rate difference of two wet film parameter differences.
Fig. 4 is the structural schematic diagram of the first measuring device provided by the present application.As shown in figure 4, provided by the present application first
Measuring device 200 includes: transceiver module 201 and processing module 202.
Wherein, processing module 202, it is wet between the wet film measurement parameter of the first wet film and wet film parameter preset for obtaining
Film parameters difference, the first wet film are color film apparatus for coating based on the wet film for currently spitting the formation of glue rate, wet film measurement parameter and wet
Film parameter preset includes: coloration or thickness.
Transceiver module 201, for wet film parameter difference to be fed back to color film apparatus for coating.
Optionally, processing module 202 are also used to before the wet film parameter difference for obtaining the first wet film, to the first wet film
It measures, obtains the wet film measurement parameter of the first wet film.
Optionally, processing module 202 are also used to during pre-manufactured, are carried out to the wet film that each cycle period is formed
Measurement, obtains the wet film measurement parameter of each cycle period.
Optionally, transceiver module 201 are also used to feed back to the wet film measurement parameter of each cycle period color film painting and arrange
It sets.
Fig. 5 is the structural schematic diagram of the second measuring device provided by the present application.As shown in 4 figures, provided by the present application second
Measuring device 300 includes: transceiver module 301 and processing module 302.
Wherein, processing module 302 carry out the dry film measurement ginseng of the dry film formed after high-temperature process for obtaining the first wet film
Dry film parameter difference between several and dry film parameter preset, dry film measurement parameter and dry film parameter preset include: coloration or thickness
Degree.
Transceiver module 301, for dry film parameter difference to be fed back to color film apparatus for coating.
Optionally, processing module 302 are also used to before the wet film parameter difference for obtaining the first wet film, to the first wet film
It measures, obtains the wet film measurement parameter of the first wet film.
Optionally, processing module 302 are also used to during pre-manufactured, are carried out to the dry film that each cycle period is formed
Measurement, obtains the dry film measurement parameter of each cycle period.
Optionally, transceiver module 301 are also used to feed back to the dry film measurement parameter of each cycle period color film painting and arrange
It sets.
In several embodiments provided herein, it should be understood that disclosed device and method can pass through it
Its mode is realized.For example, the apparatus embodiments described above are merely exemplary, for example, the division of the module, only
Only a kind of logical function partition, there may be another division manner in actual implementation, such as multiple module or components can be tied
Another system is closed or is desirably integrated into, or some features can be ignored or not executed.Another point, it is shown or discussed
Mutual coupling, direct-coupling or communication connection can be through some interfaces, the INDIRECT COUPLING or logical of device or module
Letter connection can be electrical property, mechanical or other forms.
The module as illustrated by the separation member may or may not be physically separated, aobvious as module
The component shown may or may not be physical module, it can and it is in one place, or may be distributed over multiple
On network module.Some or all of the modules therein can be selected to realize the mesh of this embodiment scheme according to the actual needs
's.
It, can also be in addition, can integrate in a processing module in each functional module in each embodiment of the application
It is that modules physically exist alone, can also be integrated in two or more modules in a module.Above-mentioned integrated mould
Block both can take the form of hardware realization, can also realize in the form of hardware adds software function module.
The above-mentioned integrated module realized in the form of software function module, can store and computer-readable deposit at one
In storage media.Above-mentioned software function module is stored in a storage medium, including some instructions are used so that a computer
Equipment (can be personal computer, server or the network equipment etc.) or processor (English: processor) execute this Shen
Please each embodiment the method part steps.And storage medium above-mentioned includes: USB flash disk, mobile hard disk, read-only memory
(English: Read-Only Memory, abbreviation: ROM), random access memory (English: Random Access Memory, letter
Claim: RAM), the various media that can store program code such as magnetic or disk.
Finally, it should be noted that the above various embodiments is only to illustrate the technical solution of the application, rather than its limitations；To the greatest extent
Pipe is described in detail the application referring to foregoing embodiments, those skilled in the art should understand that: its according to
So be possible to modify the technical solutions described in the foregoing embodiments, or to some or all of the technical features into
Row equivalent replacement；And these are modified or replaceed, each embodiment technology of the application that it does not separate the essence of the corresponding technical solution
The range of scheme.
Claims (10)
1. a kind of adjustment system for spitting glue rate characterized by comprising color film apparatus for coating and the first measuring device；
First measuring device, for obtaining the ginseng of the wet film between the wet film measurement parameter of the first wet film and wet film parameter preset
Number difference, and the wet film parameter difference is fed back into the color film apparatus for coating, first wet film is the color film coating
For device based on the wet film for currently spitting the formation of glue rate, the wet film measurement parameter and the wet film parameter preset include: coloration
Or thickness；
The coloured silk film apparatus for coating, is used for according to the wet film parameter difference and wet film parameter difference and spits glue rate difference
Corresponding relationship, adjust it is described currently spits glue rate so that the wet film parameter difference of the second wet film is less than difference threshold, described the
Two wet films are the color film apparatus for coating based on the wet film adjusted for spitting the formation of glue rate.
2. adjustment system according to claim 1, which is characterized in that the adjustment system further include: the second measuring device；
Second measuring device carries out the dry film measurement ginseng of the dry film formed after high-temperature process for obtaining first wet film
Dry film parameter difference between several and dry film parameter preset, and the dry film parameter difference is fed back into the color film painting and is arranged
It sets, the dry film measurement parameter and the dry film parameter preset include: coloration or thickness；
The coloured silk film apparatus for coating, is also used to according to the dry film parameter difference and dry film parameter difference and spits glue speed difference
The corresponding relationship of value verifies the glue rate adjusted of spitting.
3. adjustment system according to claim 1 or 2, which is characterized in that first measuring device is also used to obtaining
Before the wet film parameter difference of first wet film, first wet film is measured, obtains the wet film of first wet film
Measurement parameter.
4. adjustment system according to claim 2, which is characterized in that second measuring device is also used to obtaining institute
Before stating dry film parameter difference, the dry film is measured, obtains the dry film measurement parameter.
5. adjustment system according to claim 2, which is characterized in that
The coloured silk film apparatus for coating, if spitting glue rate and the tune specifically for the expectation obtained according to the dry film parameter difference
After whole to spit glue rate identical, it is determined that it is described adjusted to spit the verification of glue rate and pass through；
If according to the expectation that the dry film parameter difference obtains spit glue rate from described adjusted to spit glue rate different, it is determined that
The glue rate adjusted of spitting verifies failure, and exports warning message.
6. adjustment system according to claim 2, which is characterized in that
The coloured silk film apparatus for coating, is also used to during pre-manufactured, and i-th cycle period is spat glue speed adjust are as follows: the
The glue rate of spitting of i-1 cycle period spits the sum of glue rate with default；I is the integer more than or equal to 1, first cycle period
Glue rate of spitting be first to spit glue rate；
First measuring device is also used to measure the wet film that each cycle period is formed, obtains each circulation
The wet film measurement parameter in period, and the wet film measurement parameter of each cycle period is fed back into the color film apparatus for coating；
Second measuring device is also used to measure the dry film that each cycle period is formed, obtains each circulation
The dry film measurement parameter in period, and the dry film measurement parameter of each cycle period is fed back into the color film apparatus for coating；
The coloured silk film apparatus for coating, is also used to spit glue rate, wet film measurement parameter and dry film according to each cycle period
Measurement parameter obtains wet film parameter difference and spits the corresponding relationship of glue rate difference and dry film parameter difference and spit glue rate
The corresponding relationship of difference.
7. adjustment system according to claim 6, which is characterized in that
The coloured silk film apparatus for coating, specifically for the wet film parameter difference according to first cycle period and remaining each cycle period
Value, dry film parameter difference, and spit glue rate difference, obtain wet film parameter difference and spit the corresponding relationship of glue rate difference, with
And dry film parameter difference and spit the corresponding relationship of glue rate difference.
8. adjustment system according to claim 1, which is characterized in that
The coloured silk film apparatus for coating specifically for determining wet film parameter difference and is spat in the corresponding relationship of glue rate difference, if
Wet film parameter difference including first wet film is corresponding to spit glue rate difference；
If it is not, then determining the wet film ginseng of first wet film according to wet film parameter difference and the corresponding relationship for spitting glue rate difference
Difference is corresponding spits glue rate difference for number；
Glue rate difference is spat according to the wet film parameter difference for currently spitting glue rate and first wet film is corresponding, adjusts institute
It states and currently spits glue rate.
9. adjustment system according to claim 1, which is characterized in that the wet film parameter difference of first wet film is corresponding
Spit glue rate difference are as follows: in the wet film parameter difference and the corresponding relationship for spitting glue rate difference, with first wet film
The smallest wet film parameter difference of the difference of wet film parameter difference is corresponding to spit glue rate difference；Or, wet with first wet film
The corresponding mean value for spitting glue rate difference of the lesser two wet film parameter differences of the difference of film parameters difference.
10. adjustment system according to claim 2, which is characterized in that the adjustment system further include: high-temperature process dress
It sets；
The high temperature treating device obtains the dry film for carrying out high-temperature process to first wet film.
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| CN110108218B (en) | 2021-04-20 |
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