CN105132881B - Optical thin film system design method for large-caliber lens with curvature radius ratio - Google Patents
Optical thin film system design method for large-caliber lens with curvature radius ratio Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 55
- 238000013461 design Methods 0.000 title claims abstract description 50
- 239000010409 thin film Substances 0.000 title claims abstract description 21
- 230000003287 optical effect Effects 0.000 title abstract description 28
- 239000010408 film Substances 0.000 claims abstract description 70
- 238000009826 distribution Methods 0.000 claims abstract description 37
- 239000012788 optical film Substances 0.000 claims abstract description 37
- 238000004458 analytical method Methods 0.000 claims abstract description 4
- 238000001704 evaporation Methods 0.000 claims description 22
- 230000008020 evaporation Effects 0.000 claims description 22
- 238000004544 sputter deposition Methods 0.000 claims description 22
- 238000000576 coating method Methods 0.000 claims description 15
- 239000011248 coating agent Substances 0.000 claims description 13
- 238000005457 optimization Methods 0.000 claims description 13
- 238000007747 plating Methods 0.000 claims description 13
- 238000001228 spectrum Methods 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 7
- 238000012937 correction Methods 0.000 claims description 5
- 238000001771 vacuum deposition Methods 0.000 claims description 5
- 238000012360 testing method Methods 0.000 claims description 4
- 238000005498 polishing Methods 0.000 claims description 3
- 230000002068 genetic effect Effects 0.000 claims description 2
- 238000005259 measurement Methods 0.000 claims description 2
- 239000002245 particle Substances 0.000 claims description 2
- 238000002922 simulated annealing Methods 0.000 claims description 2
- 230000003595 spectral effect Effects 0.000 abstract description 3
- 238000004364 calculation method Methods 0.000 abstract 1
- 238000005240 physical vapour deposition Methods 0.000 description 8
- 239000012528 membrane Substances 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 5
- 238000000151 deposition Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 238000000411 transmission spectrum Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000001659 ion-beam spectroscopy Methods 0.000 description 1
- 230000005499 meniscus Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- 230000003245 working effect Effects 0.000 description 1
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Abstract
The invention discloses a method for designing an optical thin film system for a lens with a large aperture radius ratio of curvature, which is used for preparing an optical thin film with good spectral performance consistency on the lens with the large aperture radius ratio of curvature in order to optimize the performance of an optical system, and therefore, the design of the optical thin film system needs to be globally optimized. The invention firstly determines the thickness distribution of the optical film on the lens with large caliber curvature radius ratio through experiment or theoretical analysis. Secondly, according to the light incidence angle and the spectral performance requirement of each position on the large-caliber curvature radius ratio lens, the design of the optical thin film system is globally optimized by adopting a numerical calculation method. Compared with the traditional optical film system design method, the invention simultaneously considers the film thickness and the light ray incidence angle on the lens with the large aperture curvature radius ratio, and is particularly suitable for the design of the optical film system on the lens with the large aperture curvature radius ratio with various sizes.
Description
Technical field
The present invention relates to optical thin film elements to design preparation field, and especially one kind compares lens for heavy caliber radius of curvature
System design of optical film method.
Background technology
As Optical System Design is increasingly accurate, to meet the performance indicator of optical system, using more next in optical system
More heavy caliber radius of curvature than lens, and need in heavy caliber radius of curvature to be coated with high performance increasing than lens surface
Permeable membrane, and then improve the performance of optical system.Surface residual reflection of the usual heavy caliber radius of curvature than lens can cause two
Serious consequence：First, light energy losses make the luminance-reduction of picture；Second, surface reflection is by multiple reflections or unrestrained
Penetrate, some become stray light, once stray light reach image plane so that as contrast reduce, so as to influence system into
Image quality amount.In short, it in optical system is non-serviceable not to be coated with the heavy caliber radius of curvature of anti-reflection film than lens.
It is for general on heavy caliber radius of curvature and can be divided mainly into physical vapor than preparing the technology of optical thin film on lens
Deposition and chemical vapor deposition.And physical vapour deposition (PVD) be it is a kind of under vacuum, by evaporation or sputtered film material, and
Technical process (the Hany H.Bauer, " Advanced to form optical thin film are deposited than lens surface in heavy caliber radius of curvature
broadband AR coatings in the visible–a comparative study of different
deposition technologies,”SPIE,2776(1996):138-143.).Prepared by usual physical gas phase deposition technology
Optical thin film is more poor than the thickness distribution uniformity of lens surface in heavy caliber radius of curvature.In addition, it was applied in optical system
Journey Large diameter radius of curvature is than lens surface glazed thread Incident angle distribution wider range, and angle of incidence of light is poor at each position
It is different larger.These factors will all severely impact heavy caliber radius of curvature than anti-reflection film spectrum property that lens surface is coated with
(D.Isfort,D.Tonova,M.Sundermann,T.Koch,“Optimization of the spectral
performance of multilayer coatings oncomplex optics in plasma assisted
deposition processes,”SPIE,9131(2014):913109.)。
Currently, there are serious thickness non-uniformities than lens surface optical thin film for heavy caliber radius of curvature,
Baffle technology selectively optimization thin-film material deposition distribution can be used, realize more optically thin than lens surface to heavy caliber radius of curvature
(Li Bincheng, Guo Chun, Kong Mingdong and Liu Cunding, " one kind is used for coating machine planet to Chinese invention patent to film thickness Nonuniformity Correction
The plate design method of spherical optical elements film thickness distribution is controlled in system ", application number：201210407852.3).But this method
Heavy caliber radius of curvature only sufficiently large to physical dimension is more effective than lens, and to the smaller lens of physical dimension, baffle is corrected thin
Film thickness distribution heterogeneity can not be achieved substantially.On the other hand, enter for heavy caliber radius of curvature than lens surface light
The problem of elevation range is larger, common business software (such as Optilayer, Macleod, FilmWizard and TFC etc.) can
Realize the high-performance anti-reflection film design under the conditions of wide-angle.However, all system design of optical film software is not all examined
Heavy caliber radius of curvature is considered than influence of the lens surface coating thickness nonuniformities to anti-reflection film properties.Therefore, it is necessary to relatively reliable
Method realize system design of optical film of the heavy caliber radius of curvature than lens.
The content of the invention
The technical problem to be solved in the present invention is：Overcome heavy caliber radius of curvature than lens on optical film thickness it is uniform
Property difference and angle of incidence of light distribution it is wide, it is more tired than what the system design of optical film of lens was brought to heavy caliber radius of curvature
It is difficult.By empirically or theoretically analyze definite heavy caliber radius of curvature than lens on optics film thickness distribution；With reference to big mouth
Footpath radius of curvature is excellent using the numerical computation method overall situation than angle of incidence of light and spectrum property requirement at each position on lens
Change system design of optical film, improve heavy caliber radius of curvature than lens spectrum property.
The present invention solve the technical solution that uses of above-mentioned technical problem for：A kind of heavy caliber radius of curvature that is used for is than lens
System design of optical film method, this method comprises the following steps：
Step (1), the configuration of foundation vacuum coating equipment and heavy caliber radius of curvature establish heavy caliber than the geometry of lens
Radius of curvature than lens on optics film thickness distribution model, theory analysis determine heavy caliber radius of curvature than lens on it is each
The optical film thickness distribution of a plating film spot；Or by test measure determine heavy caliber radius of curvature than lens on each plating
The optical film thickness distribution of film spot；
The heavy caliber radius of curvature than lens on optics film thickness distribution model be：
In formula, vector r is evaporation or sputtering source-heavy caliber radius of curvature than coordinate origin in lens combination system and evaporation
Or on sputtering source surface coordinate points (x, y, z) line；Vector r1Compare the coating of lenses for coordinate origin and heavy caliber radius of curvature
Coordinate points (x on face1,y1,z1) line；Evaporation or sputtering source and heavy caliber radius of curvature are respectively S than the surface function of lens
(x, y, z)=0 and P (x1,y1,z1)=0；WithRespectively coordinate in evaporation or sputtering source surface
Point (x, y, z) and heavy caliber radius of curvature are than coordinate points (x on coating of lenses face1,y1,z1) unit normal vector；w(r,r1)=
s·(r1- r) and u (r, r1)=p (r-r1) it is respectively to evaporate or sputter source function and heavy caliber radius of curvature than lens function；
A (x, y) is evaporation or the face element function of sputtering source surface function S (x, y, z)=0, is defined as：F (x, y) puts down for evaporation or sputtering source surface function S (x, y, z)=0 in x-y
Projection on face；|r-r1| compare the coating of lenses for coordinate points (x, y, z) on evaporation or sputtering source surface and heavy caliber radius of curvature
Coordinate points (x on face1,y1,z1) distance；J is evaporation or sputtering source characteristic parameters；B(r,r1) sink to be evaporated or sputtering coating materials
Product angle correction function, is defined as：
Step (2), with reference to step (1) determine optical film thickness distribution, according to heavy caliber radius of curvature than lens
Upper each plating film spot angle of incidence of light and spectrum property requirement, are set using numerical computation method global optimization optical thin film membrane system
Meter.
The heavy caliber radius of curvature can be convex surface or concave surface than the coated surface of lens.
The evaporation or sputtering characteristic j can be thicker than optical thin film on lens by testing measurement heavy caliber radius of curvature
Degree distribution, and be fitted and determined by optical film thickness distributed model, value range is 0-4.
The numerical computation method for system design of optical film can be aciculiform algorithm, simulated annealing,
Newton's algorithm, particle cluster algorithm, genetic algorithm or other Stochastic Optimization Algorithms.
The present invention has the following advantages that compared with prior art：
1. the present invention is a kind of for system design of optical film method of the heavy caliber radius of curvature than lens, with previous film
It is that design method is compared, while takes into account heavy caliber radius of curvature and be distributed than film thickness on lens and angle of incidence of light, it is global excellent
Change Film Design, spectrum property of the heavy caliber radius of curvature than lens can be significantly improved.
2. the present invention is a kind of for system design of optical film method of the heavy caliber radius of curvature than lens, only need to correctly obtain
Heavy caliber radius of curvature is taken than film thickness distribution on lens, and without correction thin film thickness distribution heterogeneity, which holds
Row is easy, it is easy to accomplish.
Description of the drawings
Fig. 1 is heavy caliber radius of curvature than lens glazed thread distribution schematic diagram.
Fig. 2 is clear aperture and radius of curvature is optical film thickness and angle of incidence of light distribution on the convex lens of 50mm
Figure.
Fig. 3 is that clear aperture and song is separately optimized using two kinds of traditional Film Design methods and method proposed by the present invention
Rate radius is multiple mean transmissivities for plating film spots in 480nm-700nm wave bands on the convex lens of 50mm.
Fig. 4 is that clear aperture and song is separately optimized using two kinds of traditional Film Design methods and method proposed by the present invention
Rate radius be on the convex lens of 50mm it is multiple plating film spots in the optical transmission spectra curve of 460nm-740nm wave bands, wherein Fig. 4
(a) film spot is plated for rise 0mm；Fig. 4 (b) plates film spot for rise 5mm；Fig. 4 (c) plates film spot for rise 10mm；Fig. 4 (d) is rise
15mm plates film spot；Fig. 4 (e) plates film spot for rise 20mm；Fig. 4 (f) plates film spot for rise 25mm.
Specific embodiment
Below in conjunction with the accompanying drawings and specific embodiment further illustrates the present invention.
The present invention first by empirically or theoretically analyze definite heavy caliber radius of curvature than lens on optical thin film it is thick
Degree distribution.Secondly, according to heavy caliber radius of curvature than angle of incidence of light distribution and during spectrum property at each position on lens
It asks, using numerical computation method global optimization system design of optical film.And then solve heavy caliber radius of curvature than lens on
Optical film thickness lack of homogeneity and angle of incidence of light distribution are wide, give optical film of the heavy caliber radius of curvature than lens
The difficulty that system's design is brought.With reference to embodiment, the present invention is further described.
By taking clear aperature and radius of curvature are the convex lens of 50mm as an example, Fig. 1 is heavy caliber radius of curvature than on lens
Light distribution schematic diagram.Usual physical vapour deposition (PVD) prepares the evaporation of optical film materials or sputters characteristic j value ranges in 0-4
Between, theory analysis determines the heavy caliber radius of curvature than on convex lens during film thickness distribution here, the evaporation of thin-film material
Or sputtering characteristic j values are 2, corresponding heavy caliber radius of curvature is more as shown in Figure 2 than film thickness distribution on convex lens.By Fig. 2
It understands, film thickness is parabolically distributed along lens rise on the convex lens, and optical film thickness uniformity only has 84.6%.It is right
The angle of incidence of light of each plating film spot is answered as shown in Fig. 2, the convex lens glazed thread incidence angle is linearly incrementally divided along lens rise
Cloth, the angle of incidence of light distribution of entire convex lens coated surface is at 0-30 °.
Exemplified by preparing the common lens of visible light wave range, convex lens spectrum property requirement is in 480nm-700nm wave bands
Transmitance average value is higher than 99.5% in scope.Three kinds of Film Design methods of comparative studies in the present embodiment, they are respectively：
Method one is distributed without considering film thickness on convex lens and angle of incidence of light, that is, optimizes the Film Design on convex lens vertex；Method
Two, without considering film thickness distribution on convex lens, using 0-30 ° of angle of incidence of light scope polishing wax best performance as target design light
Learn film membrane system, i.e., the Film Design method possessed in business software；Method three, while take into account film thickness and light on convex lens
Line Incident angle distribution, optics film light spectrality energy on global optimization convex lens, that is to say Film Design method proposed by the present invention.
Based on the convex lens membrane system of three kinds of Film Design method optimization, calculate obtain on convex lens at different rises, in 480nm- respectively
Transmitance average value on 700nm wave bands, as shown in Figure 3.From the figure 3, it may be seen that being less than the region of 15mm in rise, three kinds of membrane systems are set
The spectrum property of meter method optimization can meet Performance of Optical System demand；However work as coating film area of the rise in 15mm-25mm,
The membrane system optical property designed by method one and method two drastically declines, and at meniscus edge, transmitance average value difference is small
In 93.8% and 95%, the performance requirement of optical system cannot be met completely.Comparatively, existed by the membrane system that method three designs
Transmitance average value on 480nm-700nm wave bands is still above 99.7%.Three kinds of foregoing Film Design sides are used accordingly
The clear aperture and radius of curvature of method optimization are in the optical transmission spectra curve of 460nm-740nm wave bands on the convex lens of 50mm
As shown in figure 4, wherein Fig. 4 (a) is rise 0mm platings film spot, Fig. 4 (b) is rise 5mm platings film spot, Fig. 4 (c) is rise 10mm platings
Film spot, Fig. 4 (d) are rise 15mm platings film spot, Fig. 4 (e) is rise 20mm plating film spots and Fig. 4 (f) is rise 25mm plating film spots.Than
More above-mentioned three kinds of Film Design methods, it was confirmed that Film Design method working effect proposed by the present invention is optimal.When using this hair
The Film Design method of bright proposition can so that General Promotion is extremely by conventional 60% in convex lens polishing wax performance region up to standard
100%.
For the physical vapour deposition (PVD)s technique for vacuum coating such as ion beam sputtering, magnetron sputtering, evaporation or sputtering
Thin-film material transmitted in vacuum environment, deposit and form thin-film process as thermal evaporation technique for vacuum coating.Therefore, from
In the physical vapour deposition (PVD)s technique for vacuum coating such as beamlet sputtering, magnetron sputtering, it is bent to complete heavy caliber using the method for the invention
System design of optical film belongs to the protection domain of this patent on rate radius ratio lens.In addition, heavy caliber radius of curvature is than saturating
Mirror can select to be coated with high-reflecting film, spectro-film, filter coating, the polarizing coating in addition to anti-reflection film according to Performance of Optical System needs
Optical thin films are waited, also belong to the protection domain of this patent.
It is distributed in short, the present invention has taken into account heavy caliber radius of curvature simultaneously than film thickness on lens and angle of incidence of light,
Especially suitable for various sizes heavy caliber radius of curvature than lens on system design of optical film.The present invention, which proposes, to be used for
Heavy caliber radius of curvature is than the new method of system design of optical film on lens, and this method implementation is simple, and design effect is splendid.
Non-elaborated part of the present invention belongs to techniques well known.
Claims (1)
- It is 1. a kind of for system design of optical film method of the heavy caliber radius of curvature than lens, it is characterised in that：Overcome big mouth Footpath radius of curvature than lens on optics film gauge uniformity is poor and angle of incidence of light distribution is wide, to heavy caliber curvature half Footpath is than the difficulty that the system design of optical film of lens is brought, by empirically or theoretically analyzing definite heavy caliber radius of curvature ratio Lens on optics film thickness distribution；With reference to heavy caliber radius of curvature than angle of incidence of light and light at each position on lens Performance requirement is composed, using numerical computation method global optimization system design of optical film, heavy caliber radius of curvature is improved and compares lens Spectrum property, this method comprises the following steps：Step (1), the configuration of foundation vacuum coating equipment and heavy caliber radius of curvature establish heavy caliber curvature than the geometry of lens Optics film thickness distribution model on the lens of radius ratio, theory analysis determine heavy caliber radius of curvature than each plated film on lens The optical film thickness distribution of point；Or measure the light for determining heavy caliber radius of curvature each plating film spot than on lens by testing Learn film thickness distribution；The heavy caliber radius of curvature is than optics film thickness distribution model on lens：<mrow> <mi>d</mi> <mrow> <mo>(</mo> <msub> <mi>r</mi> <mn>1</mn> </msub> <mo>)</mo> </mrow> <mo>=</mo> <munder> <mrow> <mo>&Integral;</mo> <mo>&Integral;</mo> </mrow> <mrow> <mi>F</mi> <mrow> <mo>(</mo> <mi>x</mi> <mo>,</mo> <mi>y</mi> <mo>)</mo> </mrow> </mrow> </munder> <mfrac> <mrow> <mi>u</mi> <mrow> <mo>(</mo> <mi>r</mi> <mo>,</mo> <msub> <mi>r</mi> <mn>1</mn> </msub> <mo>)</mo> </mrow> <msup> <mi>w</mi> <mi>j</mi> </msup> <mrow> <mo>(</mo> <mi>r</mi> <mo>,</mo> <msub> <mi>r</mi> <mn>1</mn> </msub> <mo>)</mo> </mrow> <mi>B</mi> <mrow> <mo>(</mo> <mi>r</mi> <mo>,</mo> <msub> <mi>r</mi> <mn>1</mn> </msub> <mo>)</mo> </mrow> <mi>A</mi> <mrow> <mo>(</mo> <mi>x</mi> <mo>,</mo> <mi>y</mi> <mo>)</mo> </mrow> </mrow> <mrow> <mo>|</mo> <mi>r</mi> <mo>-</mo> <msub> <mi>r</mi> <mn>1</mn> </msub> <msup> <mo>|</mo> <mrow> <mi>j</mi> <mo>+</mo> <mn>3</mn> </mrow> </msup> </mrow> </mfrac> <mi>d</mi> <mi>x</mi> <mi>d</mi> <mi>y</mi> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>1</mn> <mo>)</mo> </mrow> </mrow>In formula, vector r than coordinate origin in lens combination system and evaporation or splashes for evaporation or sputtering source-heavy caliber radius of curvature The line of coordinate points (x, y, z) on She Yuan surfaces；Vector r1It is coordinate origin and heavy caliber radius of curvature than on coating of lenses face Coordinate points (x1,y1,z1) line；Evaporation or sputtering source and heavy caliber radius of curvature than the surface function of lens be respectively S (x, Y, z)=0 and P (x1,y1,z1)=0；WithRespectively coordinate points in evaporation or sputtering source surface (x, y, z) and heavy caliber radius of curvature are than coordinate points (x on coating of lenses face1,y1,z1) unit normal vector；w(r,r1)=s (r1- r) and u (r, r1)=p (r-r1) it is respectively to evaporate or sputter source function and heavy caliber radius of curvature than lens function；A (x, y) is evaporation or the face element function of sputtering source surface function S (x, y, z)=0, is defined as：F (x, y) puts down for evaporation or sputtering source surface function S (x, y, z)=0 in x-y Projection on face；|r-r1| compare the coating of lenses for coordinate points (x, y, z) on evaporation or sputtering source surface and heavy caliber radius of curvature Coordinate points (x on face1,y1,z1) distance；J is evaporation or sputtering source characteristic parameters；B(r,r1) sink to be evaporated or sputtering coating materials Product angle correction function, is defined as：Step (2), the optical film thickness distribution determined with reference to step (1), it is more each than on lens according to heavy caliber radius of curvature Film spot angle of incidence of light and spectrum property requirement are plated, using numerical computation method global optimization system design of optical film；It is described to be used for system design of optical film method of the heavy caliber radius of curvature than lens, with previous Film Design method phase Than, while take into account heavy caliber radius of curvature and be distributed than film thickness on lens and angle of incidence of light, global optimization Film Design, energy Significantly improve spectrum property of the heavy caliber radius of curvature than lens；It is described to be used for system design of optical film method of the heavy caliber radius of curvature than lens, only it need to correctly obtain heavy caliber curvature Film thickness distribution on radius ratio lens, and without correction thin film thickness distribution heterogeneity, process performs simplicity, is easy to real It is existing；The heavy caliber radius of curvature is convex surface or concave surface than the coated surface of lens；The evaporation or sputtering characteristic j by testing measurement heavy caliber radius of curvature than optics film thickness distribution on lens, And be fitted and determined by optical film thickness distributed model, value range is 0-4；The numerical computation method for system design of optical film be aciculiform algorithm, simulated annealing, Newton's algorithm, Particle cluster algorithm, genetic algorithm or other Stochastic Optimization Algorithms；Cause convex lens polishing wax than the system design of optical film method of lens when use is described for heavy caliber radius of curvature Performance region up to standard is by conventional 60%, General Promotion to 100%.
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