CN110095215B - Flexible hinge stress measuring device - Google Patents

Flexible hinge stress measuring device Download PDF

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Publication number
CN110095215B
CN110095215B CN201910468948.2A CN201910468948A CN110095215B CN 110095215 B CN110095215 B CN 110095215B CN 201910468948 A CN201910468948 A CN 201910468948A CN 110095215 B CN110095215 B CN 110095215B
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China
Prior art keywords
compliant
hinges
hinge
resistor
micrometer head
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CN110095215A (en
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张宪民
周安泰
朱本亮
梁俊文
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South China University of Technology SCUT
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South China University of Technology SCUT
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G01B7/18Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in resistance
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/20Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/225Measuring circuits therefor
    • G01L1/2262Measuring circuits therefor involving simple electrical bridges

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)

Abstract

The invention discloses a compliant hinge stress measuring device, comprising: the device comprises a base, wherein a plurality of screw holes connected with a fixed end of a compliant hinge to be tested through bolts are formed in the edge of the base along the length direction; the screw micrometer head support is fixedly arranged at one end of the base; the screw micrometer head is in threaded connection with the screw micrometer head support; the middle part of the long strip plate is provided with long round grooves or a plurality of through holes which are connected with the free ends of the compliant hinges to be tested through bolts along the length direction; the strain gauges are respectively stuck on the surface of each compliant hinge to be tested, which deforms, and are used for collecting deformation signals of each compliant hinge to be tested and sending the deformation signals to the static strain analyzer. According to the invention, the hinges are deformed by giving the same rotation angle to different hinges, so that the stress difference between different hinges is measured through the strain gauge, and the hinge has a simple structure and is convenient to operate.

Description

Flexible hinge stress measuring device
Technical Field
The invention belongs to the field of compliant mechanisms, and particularly relates to a compliant hinge stress measuring device.
Background
The precise positioning technology is widely applied in a plurality of fields of high-end equipment manufacture (such as a photoetching machine, a scanning electron microscope and the like), aerospace, micro-nano operation, operation medical treatment and the like, and is always a hot spot for domestic and foreign research. The traditional rigid mechanism is difficult to realize high-precision positioning operation because of the problems of assembly clearance, friction lubrication and the like, and the flexible mechanism can well meet the precision positioning requirement because of the advantages of high precision, high rigidity, compact structure and the like. The flexibility of the flexible mechanism can be divided into two types of concentrated flexibility and distributed flexibility according to different flexibility distribution, the flexibility of the concentrated flexibility type flexible mechanism is concentrated at the flexible hinge, the hinge bears main deformation of the mechanism, and the stress level of the flexible hinge directly influences the performance and service life of the hinge. The compliant hinge is used as an important part of the compliant mechanism, and has important practical significance for improving the performance of the mechanism in stress research of different compliant hinges.
Among the more common compliant hinges are straight round hinges, straight beam hinges, angular round hinges, parabolic hinges, wheel hinges, and V-hinges, with straight round hinges and angular round hinges being the most widely used. The common performance evaluation parameters of the compliant hinge are three: compliance, rotational accuracy and maximum stress. In 2016, liu Min et al proposed a multi-notch compliant hinge (see DESIGN AND ANALYSIS of a multi-notched flexure hinge for compliant mechanisms in detail) by topology optimization, which has less stress behavior than a straight round hinge of the same size under the same bending deformation angle. The angular deformation θ and displacement deformation dx of the hinge under the action of the pure bending moment are shown in fig. 2.
The common stress measuring method comprises a strain gauge sticking method and a photoelastic measuring method, but the photoelastic measuring experiment is complex, has high cost, is generally used for qualitative analysis, and is not easy to obtain quantitative experimental data.
Disclosure of Invention
Aiming at the measurement requirement for the stress of the hinge, the invention designs a detection device capable of measuring the stress performance of different types of hinges under the same load condition, which has simple structure and easy construction, applies a certain load to the hinge by rotating the spiral micrometer head, and compares the stress performance among different hinges according to the data measured by the strain gauge.
The technical scheme adopted for solving the technical problems is as follows:
a compliant hinge stress measurement apparatus comprising:
the device comprises a base, wherein a plurality of screw holes connected with a fixed end of a compliant hinge to be tested through bolts are formed in the edge of the base along the length direction;
the screw micrometer head support is fixedly arranged at one end of the base;
the screw micrometer head is in threaded connection with the screw micrometer head support;
the middle part of the long strip plate is provided with long round grooves or a plurality of through holes which are connected with the free ends of the compliant hinges to be tested through bolts along the length direction;
The strain gauges are respectively stuck on the surface of each compliant hinge to be tested, which deforms, and are used for collecting deformation signals of each compliant hinge to be tested and sending the deformation signals to the static strain analyzer.
Further, the strain gauge is adhered to the surface of the position with the largest stress of each compliant hinge to be tested.
Further, the screw micrometer head support is provided with a groove-shaped notch for adjusting the relative position of the screw micrometer head and the end part of the long slat along the end part of the base.
Further, the types of the compliant hinges to be tested include straight round compliant hinges, angular round compliant hinges, multi-notch compliant hinges, conic compliant hinges, wheel type compliant hinges and V-shaped compliant hinges.
Further, the strain gauge measures deformation signals of all the compliant hinges to be measured through a 1/4 bridge circuit and sends the deformation signals to the static strain analyzer.
Further, the 1/4 bridge circuit comprises a strain gauge R1, a resistor R2, a resistor R3 and a resistor R4 which are connected end to end in sequence to form a loop, a power supply is connected between the strain gauge R1 and the resistor R3 and between the resistor R2 and the resistor R4, and a voltage output end to be tested is connected between the strain gauge R1 and the resistor R2 and between the resistor R3 and the resistor R4.
Further, the accuracy of the screw micrometer head is 0.01mm.
Further, the base is fixed on the shock insulation platform through holes in four corners.
Compared with the prior art, the invention has the beneficial effects that:
According to the invention, the free ends of the hinges are fixedly connected through the long slat and the bolt, so that the hinges can be guaranteed to generate the same rotation deformation, the rotation deformation value theta of the compliant hinges can be conveniently changed through the displacement input by the rotary screw micrometer head, and a plurality of groups of experimental data can be conveniently obtained. The screw micrometer head is used as the input mode of the hinge, and has the advantages of simple installation, simple operation and the like. The whole experimental device has the characteristics of convenience in installation, high experimental repeatability, strong interchangeability and the like.
Drawings
FIG. 1 is an overall block diagram of a compliant hinge stress measuring device in accordance with an embodiment of the present invention.
FIG. 2 is a schematic illustration of compliant hinge bending deformation.
FIG. 3 is a schematic diagram of a strain gauge 1/4 bridge circuit.
Fig. 4 is a flow chart of the measurement steps.
In the figure: 1-spiral micrometer head, 2-spiral micrometer head support, 3-base, 4-through hole, 5-bolt, 6-long slat, 7-compliant hinge to be measured, 8-bolt, 9-strain gauge.
Detailed Description
The invention is further described below with reference to the drawings and examples.
As shown in fig. 1, a compliant hinge stress measuring device comprising:
The base 3, the edge of the base 3 is provided with a plurality of screw holes connected with the fixed end of the compliant hinge 7 to be tested through bolts along the length direction, the embodiment provides screw holes for 7 hinge installation experiments, if the number of the hinges to be measured needs to be increased, only the screw holes for installing the base and the multiple processing hinges need to be lengthened, and meanwhile, the base 3 is fixed on the shock insulation platform through the through holes 4 on the four corners;
the screw micrometer head support 2 is fixedly arranged at one end of the base;
The screw micrometer head 1 is in threaded connection with the screw micrometer head support 2, and the precision is 0.01mm;
One end of the long strip plate is abutted against the spiral micrometer head 1, and a long round groove or a plurality of through holes which are connected with the free ends of the compliant hinges to be tested through bolts 8 are formed in the middle of the long strip plate along the length direction;
the strain gauges 9 are respectively stuck on the surface of each compliant hinge to be tested, which deforms, and are used for collecting deformation signals of each compliant hinge to be tested and sending the deformation signals to the static strain analyzer.
The strain gauge is adhered to the surface of the position with the largest stress of each compliant hinge to be tested.
The screw micrometer head support 2 is provided with a groove notch for adjusting the relative position of the screw micrometer head 1 and the end of the long slat along the end of the base.
The types of the compliant hinges 7 to be tested comprise straight round compliant hinges, angle round compliant hinges, multi-notch compliant hinges, conical curve compliant hinges, wheel type compliant hinges and V-shaped compliant hinges, and the multi-notch compliant hinges are selected in the embodiment.
The strain gauge measures deformation signals of all the compliant hinges to be measured through a 1/4 bridge circuit and sends the deformation signals to the static strain analyzer.
The 1/4 bridge circuit comprises a strain gauge R1, a resistor R2, a resistor R3 and a resistor R4 which are connected end to end in sequence to form a loop, a power supply is connected between the strain gauge R1 and the resistor R3 and between the resistor R2 and the resistor R4, and a voltage output end to be tested is connected between the strain gauge R1 and the resistor R2 and between the resistor R3 and the resistor R4.
The method adopts a mode of attaching the strain gage to measure the hinge strain, is simple, is easy to operate and has lower cost. The linear relation of sigma=E×epsilon is satisfied between the strain epsilon and the stress sigma, E is the elastic modulus of the material, and the magnitude of the strain can indirectly reflect the stress level of the hinge at the position. The hinge is made of aluminum alloy, the elastic modulus of the hinge is about 71Gpa, but the deformation of the hinge is small, the deformation is usually in the order of mu m, the resistance change of the strain gauge resistor is very small, and in order to obtain obvious experimental data, the hinge is measured by adopting a 1/4 bridge circuit, as shown in figure 3.
In fig. 3, R1 represents a strain gauge, and resistors R2, R3 and R4 are precision resistors consistent with the nominal resistance of the strain gauge, respectively, U 1 represents the voltage of the power supply, and U 0 represents the output voltage to be measured. When the hinge is deformed, the strain gauge is adhered to the surface of the hinge, so that the deformation can be generated along with the deformation of the hinge, and then the resistance value is changed, the original balance of the bridge can be destroyed, and accordingly output voltage U 0 is generated, and the strain value of each path of signal is read through the static strain analyzer.
Because the maximum stress generating positions of different hinges are different when bending deformation occurs, simulation analysis is carried out through ANSYS before installation, the maximum stress generating positions of the hinges are determined, strain gauges are adhered to the maximum stress positions of the hinges according to simulation results, a circuit is connected, seven multi-notch compliant hinges are installed on a base 3 through bolts, during installation, fixed ends of the hinges are firstly adhered to the side face of the base 3, then bolts are screwed to fix a plurality of hinges on the base 3, and free ends of the hinges are fixed together through long plates 6 through bolts, so that the hinges can deflect at the same angle.
Then the screw micrometer head 1 and the screw micrometer head base 2 are arranged and connected together through threads, and the screw micrometer head 1 outputs displacement of 10 mu m when rotating one small lattice. Because the screw micrometer head base 2 is provided with a groove-shaped notch, the screw micrometer head base 2 can move back and forth along the side surface of the fixed base until the screw micrometer head 1 moves along the side surface of the long strip plate, and the screw micrometer head base 2 can be fixed on the shock insulation platform through bolts.
After the whole measuring device is installed, experiments can be carried out according to the steps shown in fig. 4, namely, a plurality of hinges are enabled to obtain a plurality of groups of consistent rotation deformation by rotating the spiral micrometer head 1, so that a plurality of groups of strain data are obtained, a relation curve between the hinge rotation angle theta and the strain can be drawn according to the experimental data, further, a comprehensive comparison analysis is carried out on the stress of the hinges, and finally, the data measured by the experiments are compared with the theory.
In the above embodiment, the screw micrometer head is selected to provide the input displacement of the hinge, no power supply is needed, and the index of the displacement is simply controlled by rotation, so that the screw micrometer head is economical and convenient, and other types of drivers can also be used in the measuring device, such as piezoelectric ceramics, ball screw pairs, voice coil motors and the like.
The machined parts of the embodiment are all aluminum alloy, and the base is fixed on the shock insulation platform through four through holes in the corners. One end of each of the different hinges is fixed on the base through a bolt, and the other end of each of the different hinges is fixedly connected with the long slat through a bolt, so that the hinges can deflect at the same angle.
In the detection process, the stress measurement can be carried out on different hinges through simpler assembly and replacement, the stress comparison of various hinges is realized, the comparison verification is further carried out with the simulation result, the experimental operation is simple, and the repeatability is high.
The above embodiments are merely preferred embodiments of the present invention, and are not intended to limit the scope of the present invention. All equivalent changes and modifications according to the present invention are intended to be covered by the appended claims.

Claims (8)

1. A compliant hinge stress measuring apparatus comprising:
The device comprises a base (3), wherein a plurality of screw holes connected with the fixed end of a compliant hinge (7) to be tested through bolts are formed in the edge of the base (3) along the length direction;
The screw micrometer head support (2) is fixedly arranged at one end of the base;
The screw micrometer head (1) is in threaded connection with the screw micrometer head support (2);
the long strip plate (6), one end of the long strip plate (6) is abutted against the spiral micrometer head (1), and a long round groove or a plurality of through holes connected with the free ends of the compliant hinges to be tested through bolts are formed in the middle of the long strip plate along the length direction;
The strain gauges (9) are respectively stuck on the surfaces of the compliant hinges (7) to be tested, and are used for collecting deformation signals of the compliant hinges (7) to be tested and sending the deformation signals to the static strain analyzer.
2. A compliant hinge stress measuring apparatus as claimed in claim 1 wherein the strain gauge (9) is attached to the surface of the location of maximum stress of each compliant hinge (7) to be measured.
3. A compliant hinge stress measuring apparatus as claimed in claim 1 wherein the screw micrometer head mount (2) is provided with a slotted notch for adjusting the relative position of the screw micrometer head (1) and the bar plate end along the base end.
4. The compliant hinge stress measuring apparatus according to claim 1, characterized in that the types of compliant hinges (7) to be measured include straight round compliant hinges, angular round compliant hinges, multi-notch compliant hinges, conic compliant hinges, wheel type and V type compliant hinges.
5. The device for measuring the stress of the compliant hinge according to claim 1, wherein the strain gauge measures deformation signals of each compliant hinge (7) to be measured through a 1/4 bridge circuit and sends the deformation signals to the static strain analyzer.
6. The device for measuring stress of a compliant hinge according to claim 5, wherein the 1/4 bridge circuit comprises a strain gauge R1, a resistor R2, a resistor R3 and a resistor R4 which are connected end to end in sequence to form a loop, a power supply is connected between the strain gauge R1 and the resistor R3 and between the resistor R2 and the resistor R4, and a voltage output end to be measured is connected between the strain gauge R1 and the resistor R2 and between the resistor R3 and the resistor R4.
7. A compliant hinge stress measuring apparatus as claimed in claim 1 characterised in that the accuracy of the screw micrometer head (1) is 0.01mm.
8. A compliant hinge stress measuring apparatus as claimed in claim 1 wherein the base (3) is secured to the seismic isolation table by through holes (4) in the four corners.
CN201910468948.2A 2019-05-31 2019-05-31 Flexible hinge stress measuring device Active CN110095215B (en)

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101639400A (en) * 2009-09-03 2010-02-03 北京航空航天大学 Dynamic rigidity measuring system of sailboard hinge and measuring method thereof
CN101788379A (en) * 2010-01-27 2010-07-28 北京航空航天大学 Testing and measuring device and measuring method of low-cycle fatigue failure of hinge at root part of sailboard
CN204286780U (en) * 2014-11-13 2015-04-22 华东理工大学 A kind of flexible hinge rotational stiffness experimental apparatus for testing
CN108871972A (en) * 2018-07-11 2018-11-23 合肥工业大学 Flexible hinge micro structures bend testing apparatus with large range high precision
CN109374241A (en) * 2018-10-29 2019-02-22 天津大学 A kind of measuring device of flexible hinge Static stiffness
CN209945592U (en) * 2019-05-31 2020-01-14 华南理工大学 Stress measuring device for compliant hinge

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101639400A (en) * 2009-09-03 2010-02-03 北京航空航天大学 Dynamic rigidity measuring system of sailboard hinge and measuring method thereof
CN101788379A (en) * 2010-01-27 2010-07-28 北京航空航天大学 Testing and measuring device and measuring method of low-cycle fatigue failure of hinge at root part of sailboard
CN204286780U (en) * 2014-11-13 2015-04-22 华东理工大学 A kind of flexible hinge rotational stiffness experimental apparatus for testing
CN108871972A (en) * 2018-07-11 2018-11-23 合肥工业大学 Flexible hinge micro structures bend testing apparatus with large range high precision
CN109374241A (en) * 2018-10-29 2019-02-22 天津大学 A kind of measuring device of flexible hinge Static stiffness
CN209945592U (en) * 2019-05-31 2020-01-14 华南理工大学 Stress measuring device for compliant hinge

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
双轴矩形截面角圆形柔性铰链回转精度分析;候文峰 等;机械工程学报;第46卷(第17期);16-21 *

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