CN110091213B - Diamond coating cutter with microstructure cooling function - Google Patents

Diamond coating cutter with microstructure cooling function Download PDF

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Publication number
CN110091213B
CN110091213B CN201910477234.8A CN201910477234A CN110091213B CN 110091213 B CN110091213 B CN 110091213B CN 201910477234 A CN201910477234 A CN 201910477234A CN 110091213 B CN110091213 B CN 110091213B
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cooling
cutter
diamond
cutting fluid
cutting
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CN110091213A (en
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张召
于守鑫
卢文壮
陈飞飞
田万杉
陈蒙
张其真
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Nanjing University of Aeronautics and Astronautics
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Nanjing University of Aeronautics and Astronautics
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • B08B3/08Cleaning involving contact with liquid the liquid having chemical or dissolving effect
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • B08B3/10Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/10Arrangements for cooling or lubricating tools or work
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26Deposition of carbon only
    • C23C16/27Diamond only

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Drilling Tools (AREA)

Abstract

A diamond coated cutter with a microstructure cooling function suitable for titanium alloy processing is provided, wherein micro grains are prepared near a cutter tip and in a crater area of the cutter by using a laser etching and micro electric spark method. The diamond coating is deposited by CVD, the methyl group can be captured and adsorbed at the edge of the micro groove in the deposition process, a bag-shaped open pipeline system with a wide upper part and a narrow lower part is formed, cutting fluid flows out from an outlet through a cooling pipeline after entering a liquid storage tank, heat is taken out, deep cooling of a cutter is facilitated to be formed, evaporation of the cutting fluid is prevented, the using amount of the cutting fluid is reduced, the cooling effect of the cutter is improved, the generation of thermal stress generated by a base-film system is reduced, meanwhile, the cutting fluid enters a cutting area of the cutter to form a lubricating film, the cutting force of the cutter is reduced, the probability of reaction of iron, titanium and alloy with diamond is reduced, and the groove forming 'root tying effect' on the diamond coating is facilitated to improve the adhesive force of the coating.

Description

Diamond coating cutter with microstructure cooling function
Technical Field
The invention relates to a cutter, in particular to a CVD diamond cutter, and particularly relates to a diamond coated cutter with a microstructure cooling function, which is suitable for titanium alloy processing.
Background
The CVD diamond coating cutter is a cutter with wide application, has obvious advantages for processing nonferrous metals, carbon fibers and some high-hardness materials, but can not be widely applied to processing of iron, titanium and alloys because diamond and elements such as Fe, Ti and the like generate chemical reaction at high temperature to form carbides such as FeC, TiC and the like, and the diamond coating is extremely easy to damage.
Secondly, in cutting process, the consumption of cutting fluid is very huge, and the cutter structure needs to be optimized from the aspects of economic cost and environmental protection, so that the utilization efficiency of the cutting fluid is improved, and the service life of the cutter is prolonged.
Disclosure of Invention
The invention aims to solve the problem that when a CVD diamond coated cutter is used for cutting titanium alloy, the CVD diamond coated cutter can chemically react with elements such as Fe, Ti and the like at high temperature to form carbides such as FeC, TiC and the like to further influence the service life of the cutter.
One of the technical schemes of the invention is as follows:
a preparation method of a diamond coated cutter with a microstructure cooling function suitable for titanium alloy processing is characterized by comprising the following steps:
firstly, preparing micro-grains near the tool tip and in a crater area of a tool by using a laser etching or micro-electrical discharge machining technology, wherein the micro-grains comprise a liquid storage tank, a cooling tank and a cutting fluid outlet;
secondly, cobalt removal treatment is carried out on the surface of the cutter, then the cutter is cleaned by using ethanol or acetone solution, the processed cutter is placed into the diamond powder acetone suspension, ultrasonic crystal implantation is carried out for 20 minutes by using an ultrasonic cleaning machine, and then the cutter is cleaned by using the ethanol or acetone solution;
thirdly, growing a diamond coating by using a CVD (chemical vapor deposition) technology; due to CH4Decomposing the diamond coating at high temperature to generate active ions, forming sp3 hybridized C-C bond, and preparing the diamond coating; when active ions pass through the cooling tank, the active ions are easily captured and adsorbed by the edge of the cooling tank to form a diamond coating which preferentially grows, and the width above the cooling tank gradually narrows to 200nm-2 mu m along with the increase of deposition time, so that the cooling tank is of a bag-shaped pipeline structure with a narrow top and a wide bottom; the bag-shaped pipeline structure forms a macroscopic 'rooting effect' on the diamond coating, and is favorable for improving the adhesive force of the coating.
The cutting fluid is sprayed to the surface of the cutter by adopting a high-quality cutting fluid and a micro-lubricating system, the cutting fluid can be stored by the liquid storage tank, then enters a cooling tank pipeline, flows into a crescent area and near a cutter point, realizes deep cooling, finally flows out of the liquid outlet, completes heat exchange, reduces film-base thermal stress, reduces coating failure probability, realizes lubricating action and chemical barrier action on the cutting area of the cutter, and reduces the reaction of diamond, iron, titanium and alloy.
The width of the cooling groove is about 5-50 μm, and the depth-to-width ratio is more than 1.
Cutting fluid enters the vicinity of the tool nose and the crater cutting area through the cooling groove, and the cutting area of the tool is cooled.
The thickness of the diamond coating is 3-20 μm.
The diameter of the liquid storage tank is about 2mm, and the liquid storage tank is communicated with the plurality of cooling grooves.
The second technical scheme of the invention is as follows:
a diamond coating cutter with a microstructure cooling function suitable for titanium alloy processing is characterized in that micro grains are prepared near a cutter tip and in a crater area of the cutter, a diamond coating is deposited on the micro grains, and the micro grains comprise a liquid storage tank, a cooling tank and a cutting fluid outlet; the liquid storage tank is communicated with at least one cooling tank, the cooling tanks are communicated with each other, and cutting fluid outlets are arranged on the front cutter face and the rear cutter face and are communicated with the cooling tanks; the cooling groove is of a bag-shaped pipeline structure with a narrow upper part and a wide lower part.
The invention has the beneficial effects that:
the invention is matched with a micro-lubricating system to form deep cooling and surface lubrication of a cutting area of a cutter, reduces the thermal stress of a base-film system, reduces the use of cutting fluid, increases the cooling efficiency, forms a lubricating film in the cutting area, provides a chemical barrier function while reducing the stress of a diamond coating, reduces the contact of Fe/Ti elements and diamond, forms a macroscopic 'root-tying function' on the diamond coating by a groove, and is beneficial to improving the adhesion of the coating. Through the two mechanisms, the micro cooling structure of the diamond cutter plays a role in reducing the fracture and the falling off of the diamond coating in the cutting process.
According to the invention, active ions are captured and adsorbed by utilizing the edge of the micro groove in the process of CVD diamond coating deposition, a bag-shaped open type pipeline system with a wide upper part and a narrow lower part is formed, cutting fluid flows out from an outlet through a cooling pipeline after entering a liquid storage tank, heat is taken out, deep cooling of a cutter is facilitated, evaporation of the cutting fluid is prevented, the consumption of the cutting fluid is reduced, the cooling effect of the cutter is improved, the generation of thermal stress generated by a base-film system is reduced, meanwhile, the cutting fluid enters a cutting area of the cutter to form a lubricating film, the cutting force of the cutter is reduced, the reaction of iron, titanium and alloy with diamond is reduced, a root-forming effect is formed on the diamond coating by the groove, and the adhesion of the coating is facilitated to be improved.
Drawings
FIG. 1 is a schematic view of a cooling microstructure of a tool base body according to the present invention.
Fig. 2 is a schematic view of the structure of the tool after diamond coating growth according to the present invention.
FIG. 3 is a schematic representation of the formation of the diamond coated tool micro-cooling channels of the present invention.
Figure 4 is a schematic cross-sectional view of a sack-like conduit according to the invention.
FIG. 5 is a photograph of a cross-section of a diamond cooling pipe manufactured according to the present invention.
Detailed Description
The invention is further described below with reference to the figures and examples.
As shown in fig. 1-5.
A diamond coating cutter with a microstructure cooling function suitable for titanium alloy processing is characterized in that micro grains are prepared near a cutter point and in a crater area of the cutter, as shown in figures 1 and 2, a diamond coating is deposited on the micro grains, and the micro grains comprise a liquid storage tank, a cooling tank and a cutting fluid outlet; the liquid storage tank is communicated with at least one cooling tank, the cooling tanks are communicated with each other, and cutting fluid outlets are arranged on the front cutter face and the rear cutter face and are communicated with the cooling tanks; the cooling groove is of a bag-shaped pipeline structure with a narrow top and a wide bottom, as shown in fig. 3 and 4. The preparation method comprises the following steps:
firstly, preparing a cutter base body, and cleaning by using an ultrasonic cleaning machine;
next, diamond powder, diamond growth equipment such as HFCVD, MPCVD, etc., laser processing equipment, cobalt removal solvent, etc. are prepared. The method for preparing the micro-texture on the tool nose and the crater area of the tool by utilizing laser etching and micro-electric spark comprises a liquid storage tank, a cooling tank, a cutting fluid outlet and the like, wherein the width of the cooling tank is about 5-15 mu m, the depth-to-width ratio is more than 1, the diameter of the liquid storage tank is about 2mm, and the liquid storage tank can be communicated with a plurality of cooling tanks.
Third, the diamond coating is deposited by CVD techniques due to CH during the deposition process4The active ions are decomposed at high temperature to generate active ions, sp3 hybridized C-C bonds are formed, when the active ions pass through the cooling groove, the active ions are easily adsorbed by the edge of the cooling groove to form a diamond coating which preferentially grows, the width above the cooling groove is gradually narrowed along with the increase of the deposition time, and a bag-shaped opening pipeline with a narrow top and a narrow bottom is formed. Adopt high-quality cutting fluid and little lubricating system, spout the cutting fluid into the cutter surface, the liquid storage tank can save the cutting fluid, and the cutting fluid gets into the cooling bath pipeline afterwards, flows into near crescent region and knife tip, realizes the deep cooling, flows out from the export at last, accomplishes the heat exchange. The grooves form a macroscopic 'root action' on the diamond coating, realize deep cooling and reduce the generation of thermal stress generated by a base-film system, and the method comprises the following stepsIs favorable for improving the adhesive force of the coating. The preparation of the micro grains on the tool nose and the crater area is formed by processing by using a laser etching and micro electric spark method, and comprises a liquid storage tank, a cooling tank, a cutting fluid outlet and the like, wherein the width of the cooling tank is about 5-50 mu m, the depth-to-width ratio is more than 1, the diameter of the liquid storage tank is about 2mm, and the liquid storage tank can be communicated with a plurality of cooling tanks. The tool matrix is generally made of common materials such as hard alloy and the like, the surface of the tool is roughened after pretreatment such as Co removal and the like, and diamond micropowder acetone suspension is used for crystal planting to increase the nucleation rate of diamond. The channel for the flow of the cutting fluid is formed by sealing the top of the groove by a CVD (chemical vapor deposition) technology due to CH (carbon-oxygen) in the process of depositing a diamond coating4The active ions are decomposed at high temperature to generate active ions, sp3 hybridized C-C bonds are formed, when the activity passes through the cooling tank, the active ions are easily adsorbed by the edge of the cooling tank to form a diamond coating which preferentially grows, the upper part of the cooling groove gradually narrows (the width is about 200nm-2 mu m) along with the increase of the deposition time, a bag-shaped open pipeline with a wide upper part and a narrow lower part is formed, and a gap above the pipeline is called as a liquid outlet. The thickness of the coating is about 3-20 mu m, the cutting fluid passes through the cutting area of the cutter and seeps out of the cutting area to form hydrodynamic lubrication, so that the friction force of the cutting area is reduced, and the formed lubricating film has a chemical barrier effect and prevents diamond from reacting with elements such as Fe, Ti and the like. The sealed micro-cooling groove pipeline is prepared through the growth characteristics of the CVD diamond coating, deep cooling is performed, the thermal stress of a base-film system is reduced, the use of cutting fluid is reduced, the cooling efficiency is increased, and the groove forms a macroscopic root-tying effect on the diamond coating, so that the improvement of the coating adhesive force is facilitated. The micro-cooling system of the diamond cutter increases the cooling efficiency and reduces the conditions of fracture, falling off and the like of the diamond coating in the cutting process. After the cutting fluid is collected by the fluid reservoir, the cutting fluid is conveyed into the groove pipeline, and the cutting fluid flows rapidly in the cooling pipeline due to the gravity action, the centrifugal action and the adhesion action of the cutting chips and the cutting fluid. The grooves form a macroscopic 'rooting effect' on the diamond coating, have a fixation effect just like the root of a tooth, and are beneficial to improving the adhesive force of the coating.
The details are as follows:
in fig. 1, the laser and micro electric discharge machining technology are used to prepare micro lines near the tip and in the region of the crater of the tool, including a liquid storage tank (diameter is about 2 mm), a cooling groove (width is about 5-50 μm, and aspect ratio is greater than 1), and a liquid outlet.
The diamond coated tool with micro cooling system in fig. 2 is prepared by the following steps:
firstly, preparing micro-fine lines on a cutter by utilizing laser and micro-fine electric spark machining technology.
And secondly, performing Co removal pretreatment by using an acid-base two-step method, coarsening the surface of the cutter, and performing crystal planting by using diamond micropowder acetone suspension to increase the nucleation rate of diamond.
And thirdly, depositing a diamond coating by using a CVD (chemical vapor deposition) technology, determining the growth time according to the growth rate of the diamond thickness, ensuring that the thickness of the diamond film is controlled to be 3-20 mu m, and gradually narrowing the upper part of the cooling tank by using the adsorption effect of active ions when the active ions pass through the edge of the groove to form a gap of about 200nm-2 mu m, namely a liquid outlet of the front cutter face.
The function of the diamond coated tool with the micro-cooling system in fig. 2 is realized according to the following steps:
firstly, adopt high-quality cutting fluid and little lubricating system, spout the cutting fluid into the cutter surface, the liquid reserve tank can be saved the cutting fluid, and the cutting fluid gets into the cooling bath pipeline afterwards, flows into near crescent hollow region and knife tip, realizes the deep cooling, flows out from the export at last, accomplishes the heat exchange, forms dynamic pressure lubrication at the cutter cutting region simultaneously, is favorable to reducing the cutting force, forms chemical barrier effect, reduces the probability that diamond and iron, titanium and alloy take place the reaction.
Second, the power of the flow of the cutting fluid is derived from the gravity of the cutting fluid itself, the centrifugal force of the rotation of the tool, and the adhesion of the chips to the cutting fluid.
Thirdly, the grooves form a macroscopic 'rooting effect' on the diamond coating, and the improvement of the coating adhesive force is facilitated.
The formation of the diamond coated tool cooling channel is illustrated in fig. 3. High temperature heat source is used for heating CH4Active ions are decomposed, the diamond coating is formed through sp3 hybridization, and the active ions are easily adsorbed to the surface when passing through the edge of the cooling groove, so that the diamond coating at the upper edge of the groove preferentially grows, and the width above the groove gradually narrows to form a bag-shaped pipeline with a narrow top and a wide bottom.
Fig. 4 is a cross section of the formed sack-like duct, which is characterized by a sack-like duct that is narrow at the top and wide at the bottom.
FIG. 5 is a physical diagram of the prepared diamond cooling pipe, and it can be seen that the pipe formed by the CVD method has a uniform size and no clogging to ensure the passing of the cutting fluid. The diamond coating has a root-pricking effect on the matrix, and the adhesive force of the coating is increased to a certain extent.
The parts not involved in the present invention are the same as or can be implemented using the prior art.

Claims (5)

1. A preparation method of a diamond coated cutter with a microstructure cooling function suitable for titanium alloy processing is characterized by comprising the following steps:
firstly, preparing micro-grains near the tool tip and in a crater area of a tool by using a laser etching or micro-electrical discharge machining technology, wherein the micro-grains comprise a liquid storage tank, a cooling tank and a cutting fluid outlet; the width of the cooling groove is about 5-50 mu m, and the depth-to-width ratio is more than 1; the diameter of the liquid storage tank is 2mm, and the liquid storage tank is communicated with the plurality of cooling grooves;
secondly, cobalt removal treatment is carried out on the surface of the cutter, then the cutter is cleaned by using ethanol or acetone solution, the processed cutter is placed into the diamond powder acetone suspension, ultrasonic crystal implantation is carried out for 20 minutes by using an ultrasonic cleaning machine, and then ultrasonic cleaning is carried out by using ethanol or acetone;
thirdly, growing a diamond coating by using a CVD (chemical vapor deposition) technology; due to CH4Carbon-containing gas source and H2Decomposed at high temperature to generate active ions, and the hydrogen ions etch away sp2The produced graphite phase forms sp3Preparing a diamond coating by using hybridized C-C bonds; when active ions pass through the cooling groove, the active ions are easily captured and adsorbed by the edge of the cooling groove to form a diamond coating which grows preferentially, and the diamond coating is depositedThe time is increased, the width above the cooling groove is gradually narrowed to form a bag-shaped pipeline structure with a narrow top and a wide bottom, and the width above the cooling groove is gradually narrowed to 200nm-2 mu m; the bag-shaped pipeline structure forms a macroscopic 'rooting effect' on the diamond coating, and the coating adhesive force is favorably improved; the thickness of the diamond coating is 3-20 μm.
2. The method of claim 1, wherein the cutting fluid is sprayed onto the surface of the cutting tool by using a high-quality cutting fluid and a micro-lubricating system, the cutting fluid is stored in the liquid storage tank, then enters the cooling tank pipeline, flows into the crescent area and the vicinity of the tool tip to realize deep cooling, finally flows out of the liquid outlet to finish heat exchange, reduce the film-based thermal stress, reduce the failure probability of the coating, and simultaneously realize a lubricating effect and a chemical barrier effect on the cutting area of the cutting tool to reduce the reaction of diamond and iron, titanium and alloys.
3. The method of claim 1, wherein the cutting fluid passes through the cooling channel into the vicinity of the cutting tip and into the region of the tool to cool the cutting region of the tool.
4. The method of claim 1, wherein a metallic material unsuitable for machining a general diamond-coated tool can be machined in addition to the titanium alloy.
5. A diamond-coated cutting tool with a microstructure cooling function, which is suitable for titanium alloy processing and is prepared by the preparation method of claim 1, is characterized in that micro-grains are prepared near the tip and in a crater area of the cutting tool, a diamond coating is deposited on the micro-grains, and the micro-grains comprise a liquid storage tank, a cooling tank and a cutting fluid outlet; the liquid storage tank is communicated with at least one cooling tank, the cooling tanks are communicated with each other, and cutting fluid outlets are arranged on the front cutter face and the rear cutter face and are communicated with the cooling tanks; the cooling groove is of a bag-shaped pipeline structure with a narrow upper part and a wide lower part.
CN201910477234.8A 2019-05-27 2019-06-03 Diamond coating cutter with microstructure cooling function Active CN110091213B (en)

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1219109C (en) * 2003-09-29 2005-09-14 上海交通大学 Hard alloy matix complex shape cutter diamond coating preparation method
CN105234645A (en) * 2015-10-14 2016-01-13 南京航空航天大学 Manufacturing method for lyophilic-lyophobic combined textured tool surface
CN106270582A (en) * 2016-08-30 2017-01-04 江苏大学 A kind of cutter forming chip water conservancy diversion capillary tube and application thereof, processing method
CN106893998A (en) * 2017-01-22 2017-06-27 河南理工大学 A kind of preparation method of the micro- texture diamond coatings blade of ring-type
CN106987791A (en) * 2016-01-20 2017-07-28 上海交通大学 A kind of coating production strengthened based on MEMS micro-structurals adhesion
CN107552815A (en) * 2017-10-09 2018-01-09 江苏大学 A kind of surface is across the compound micro forming cutter of yardstick and preparation method
CN208408566U (en) * 2017-10-09 2019-01-22 江苏大学 A kind of surface is across the compound micro forming cutter of scale

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1219109C (en) * 2003-09-29 2005-09-14 上海交通大学 Hard alloy matix complex shape cutter diamond coating preparation method
CN105234645A (en) * 2015-10-14 2016-01-13 南京航空航天大学 Manufacturing method for lyophilic-lyophobic combined textured tool surface
CN106987791A (en) * 2016-01-20 2017-07-28 上海交通大学 A kind of coating production strengthened based on MEMS micro-structurals adhesion
CN106270582A (en) * 2016-08-30 2017-01-04 江苏大学 A kind of cutter forming chip water conservancy diversion capillary tube and application thereof, processing method
CN106893998A (en) * 2017-01-22 2017-06-27 河南理工大学 A kind of preparation method of the micro- texture diamond coatings blade of ring-type
CN107552815A (en) * 2017-10-09 2018-01-09 江苏大学 A kind of surface is across the compound micro forming cutter of yardstick and preparation method
CN208408566U (en) * 2017-10-09 2019-01-22 江苏大学 A kind of surface is across the compound micro forming cutter of scale

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