CN102061453B - Hot-filament chemical vapor deposition batch preparation method of complicated-shape diamond coated cutting tool - Google Patents

Hot-filament chemical vapor deposition batch preparation method of complicated-shape diamond coated cutting tool Download PDF

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Publication number
CN102061453B
CN102061453B CN2011100288462A CN201110028846A CN102061453B CN 102061453 B CN102061453 B CN 102061453B CN 2011100288462 A CN2011100288462 A CN 2011100288462A CN 201110028846 A CN201110028846 A CN 201110028846A CN 102061453 B CN102061453 B CN 102061453B
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cutter
cutting tool
complicated shape
hot
diamond
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CN102061453A (en
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孙方宏
张文骅
张志明
沈荷生
郭松寿
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Shanghai Jiaoyou Diamond Coating Co Ltd
Shanghai Jiaotong University
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Shanghai Jiaoyou Diamond Coating Co Ltd
Shanghai Jiaotong University
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Abstract

The invention discloses a hot-filament chemical vapor deposition batch preparation method of a complicated-shape diamond coated cutting tool in the technical field of mechanical machining, comprising the steps of: placing a sandwich type foundation on which the cutting tool is arranged on a CVD (Chemical Vapor Deposition) equipment water-cooling worktable through inserting a cutting tool holder of a pretreated complicated-shape hard alloy cutting tool; adopting two lines of hot filaments, wherein the upper line of hot filaments is as high as the nose of the hard alloy cutting tool and the lower line of hot filaments is as high as the bottom of the cutting edge of the cutting tool; and filling hydrogen and acetone and depositing a diamond coating on the surface of the complicated-shape hard alloy cutting tool. According to the the invention, the surface temperature of an underlayer at the cutting edge can be effectively reduced, the rate of the deposition is not decreased and the quality of the diamond coating is improved.

Description

Complicated shape diamond-coated tools hot-wire chemical gas-phase deposition batch preparation
Technical field
What the present invention relates to is the method in a kind of Machining Technology field, specifically is a kind of complicated shape diamond-coated tools hot-wire chemical gas-phase deposition batch preparation.
Background technology
Along with workpiece material develops towards lightweight, compoundization direction, difficult-to-machine materials such as high sial (lead) alloy, metal (pottery) based composites, pottery, carbon and graphite composite material, other fibre reinforced composites, laminated flooring use in industries such as automobile, aerospace and mould in a large number.Be that master's complex shaped cutters such as monobloc(k)type rotary cutter such as twist drill, slotting cutter use and have a large capacity and a wide range with WC-Co series hard alloy material; And these cutters tool wear when the above-mentioned difficult-to-machine material of High Speed Machining is serious, and working accuracy and surface quality are difficult to guarantee.
Chemical vapour deposition (is called for short the CVD method; Chemical Vapor Deposition) diamond thin has very excellent properties such as high firmness near natural diamond, high Young's modulus, high thermal conductivity, good self lubricity and chemicalstability, thereby it is had broad application prospects in the complex shaped cutter coatings art.In recent years; The development of CVD diamond coatings technology makes the preparation of high-performance complicated shape diamond-coated tools become possibility; CVD diamond film coating layer cutter preparation cost reduces, efficient improves, be suitable for random shape, and its preparation does not receive the restriction of substrate shape.Therefore; A kind of novel method is exactly at the diamond coated film of cemented carbide with complicated shape cutter working-surface; In order to life-span of prolonging cutter, enhance productivity and improve the quality of processing; Diamond coatings and complex shaped cutter geometry are combined; Will the most effectively process solution for non-iron difficult-to-machine material provides, CVD diamond thin complicated shape coated cutting tool promises to be the new-type cutter that a new generation is applied to graphite, thomel or highly-efficient processing such as spun glass and aluminum silicon alloy most.
Diamond-coated tools; Particularly coated drill and milling cutter are at present both at home and abroad just in industrialization process; When with chemical gas-phase method the knife edge part of drill bit or milling cutter being carried out deposited coatings, the surface temperature and the homogeneity of blade (substrate) have very big influence to coating quality.In 750~950 ℃ of scopes, if blade (substrate) surface temperature is high, the coating sedimentation velocity is fast usually for underlayer temperature during diamond coatings, but the coating internal stress is high, causes sticking power to reduce.Otherwise the surface temperature of blade (substrate) is low, and the coating sedimentation velocity is slow, but coating adhesion is better.The TR that therefore, can deposit diamond coatings best in quality, that sticking power is good is narrow.And drill bit and milling cutter all be slender axles, and heat conduction is bad, and this has brought difficulty for heated filament CVD deposition of diamond coatings.
Literature search through to prior art is found; One Chinese patent application numbers 200310108306.0 has been put down in writing a kind of " monobloc(k)type wimet rotary cutter diamond coatings preparation facilities "; The document discloses and a kind ofly can drive the rotating monobloc(k)type inserted tool of the turning axle diamond coatings device that clamping has cutter; But the special special-purpose deposition apparatus of above-mentioned technology is the experimental installation of single monobloc(k)type wimet complex shaped cutter diamond coatings, and is unsuitable to CVD diamond coatings cemented carbide with complicated shape cutter batch preparations device.
Summary of the invention
The present invention is directed to the above-mentioned deficiency that prior art exists; A kind of complicated shape diamond-coated tools hot-wire chemical gas-phase deposition batch preparation is provided; Can effectively reduce blade place substrate surface temperature, but not reduce sedimentation rate, can improve the diamond coatings quality again simultaneously.For realizing such purpose, gordian technique is how to adopt refrigerating unit, and heated filament arranges and to match, and effectively reduces the depositing temperature at blade place, can increase the concentration of active H atom simultaneously again, and the quality of diamond coatings and sedimentation rate are all increased.
The present invention realizes through following technical scheme, the present invention includes following steps:
The first step, the handle of a knife of pretreated cemented carbide with complicated shape cutter is inserted cutter cooling base, the sandwich style base that installs cutter is placed on the heated filament CVD equipment water-cooled worktable;
Described cutter cooling base is superposeed successively by rectangle molybdenum sheet, copper sheet and graphite cake and constitutes sandwiched type structure, and this cutter cooling base is provided with the boring that is complementary with handle of a knife diameter and length.
Described rectangle molybdenum sheet thickness range is: 0.2-2mm;
Described copper sheet thickness range is: 20-60mm;
Described graphite cake thickness range is: 30-80mm;
Diameter phi 1~the 16mm of described handle of a knife, the entire length 50-180mm of described inserted tool, the long 15-50mm of sword.
Second step, adopt up and down two row heated filaments and up heated filament height identical with the point of a knife of said inserted tool, the height of descending heated filament is over against the blade bottom of cutter, feeding hydrogen and acetone and in cemented carbide with complicated shape tool surface deposition of diamond coatings.
Described deposition is divided into twice, and wherein: the tantalum wire diameter phi 0.3-1.2mm of employing, the columns of heated filament are the 2-8 row; Sedimentary nucleation air pressure is 12Torr; Growth air pressure is 25Torr, and acetone concentration is 1-3%, after the deposition cutter is revolved for the first time and carries out depositing second time after turning 90 degrees; Each depositing time was respectively 2-5 hour, and gauge control is at 3 μ m-10 μ m.
Description of drawings
Fig. 1 arranges synoptic diagram for the embodiment heated filament.
Fig. 2 is embodiment cutter cooling base synoptic diagram.
Fig. 3 arranges synoptic diagram for the embodiment heated filament;
Among the figure: (a) and (b) are the prior art decoration form, (c) are the embodiment decoration form.
Fig. 4 is an embodiment deposited coatings thickness distribution curve.
Embodiment
Elaborate in the face of embodiments of the invention down, present embodiment provided detailed embodiment and concrete operating process, but protection scope of the present invention is not limited to following embodiment being to implement under the prerequisite with technical scheme of the present invention.
Embodiment 1
As shown in Figure 1, processing graphite with milling cutter on plating CVD diamond coatings, the handle of a knife diameter is φ 4, blade is long to be 30mm, cutter 5 length overalls are 100 millimeters.The cutter 5 cooling understructures of the sandwich style that present embodiment adopted are: the copper billet size is high, wide, length is 30 * 30 * 100 millimeters; The graphite corresponding size is 30 * 20 * 100 millimeters; Thickness is that 0.4 millimeter molybdenum sheet 1 is cut into 35 * 100 millimeters; In the even hole (hole depth 40mm) of 40 φ 4.2 of ground auger at interval of cooling base, uprightly insert 40 milling cutter so that install.Molybdenum sheet 1 covers on the graphite block 2, and protection graphite is not corroded by the H atom.
The first step, place the Murakami agent to carry out ultrasonic erosion the blade of above-mentioned long handle milling cutter; The prescription of corrosive fluid (weight ratio) Tripotassium iron hexacyanide: Pottasium Hydroxide: water is 1: 1: 10, about 25 minutes of time, places the dioxysulfate aqueous solution (volume ratio 1: 10) to corrode for 30 seconds again after taking-up washes; Place diadust (20 microns of granularities) alcohol suspension sonic oscillation to handle after cleaning again 20 minutes; Clean then drying up divides 5 rows to be inserted in the cooling base of sandwich style 8 of every rows 40 milling handle; Place on the water cooling platform 4 of heated filament 5CVD reaction chamber the deposition of beginning diamond coatings.
It directly is the tantalum wire of φ 0.4 that second step, heated filament 5 adopt six pairs of lines, 35 millimeters of tantalum wire spacings, and wherein a pair of height is identical with the point of a knife of milling cutter, and another is to then low 30 millimeters.Reaction chamber vacuumizes the back and feeds reactant gases (hydrogen and acetone); The deposition of beginning CVD diamond coatings behind the adjustment chamber pressure, processing parameter is: pressure 10-25Torr, total gas flow rate 700 ml/min; Acetone/hydrogen (volume ratio) is 2%; The tantalum wire temperature is about 2100 ℃, and after depositing through 3 hours, blade place deposition obtains the diamond coatings of about 6-8 micron thick.Every revolve cutter 5 positions turn 90 degrees, carry out 3 hours depositions again, obtain the diamond coatings of about 12-16 micron thick, and can effectively guarantee coating uniformity with same processing parameter.This milling cutter is used for machining graphite, and the service life as compared carbide-tipped milling cutter improves more than 8 times, and the working accuracy and the surface smoothness of workpiece also are improved.
As shown in Figure 2, described red copper piece 3 is close to water cooling platform 4, and graphite block 2 is close to copper billet, and molybdenum sheet 1 nestles up graphite block 2, and drill bit or milling cutter are vertical to be inserted in the base of being made up of red copper, graphite and molybdenum.Because the heat conductivility of copper is fine, its thermal conductivity is 400W/mK, so the temperature of the temperature of copper billet and chill station 4 is approaching, can effectively cool off milling cutter or drill bit.When directly cooling off with copper billet, better to the cooling performance of milling cutter or drill bit so, but will cause the blade underlayer temperature low excessively.The thermal conductivity ratio copper of polycrystalline graphite hangs down an one magnitude, and under thermal equilibrium state, its temperature is high more a lot of than red copper piece 3, and is less better to the cooling performance of cutter 5, but it can play regulating effect to the underlayer temperature at blade place.In CVD diamond deposition process, generally will be between 750~950 ℃.Underlayer temperature is on the low side, and sedimentation rate is slow, and benefit is that the coating internal stress is little, and adhesive force is better; Underlayer temperature is higher, and sedimentation rate is fast, but the coating internal stress is big, the adhesive force variation.Therefore underlayer temperature has an optimum value, under certain heated filament 5 temperature, through selecting the thickness and the ratio thereof of graphite and red copper piece 3, can reach the purpose of regulating underlayer temperature, and underlayer temperature is in the only scope.On the other hand, be in the graphite under the comparatively high temps, easily by H atom institute etching, therefore need molybdenum sheet 1 to protect, because molybdenum sheet 1 is a refractory metal, the H atom can not corrode it.In the cooling base of sandwich style, red copper piece 3 is effective cooling layer like this, and graphite is the temperature regulation layer, and resistant to elevated temperatures metal molybdenum sheet 1 is a resist.
For monobloc(k)type complex shaped cutters 5 such as drill bit and milling cutters, adopt heated filament CVD method to its diamond coated film in blade place, heated filament 5 be furnished with two kinds of forms:
A pair of heated filament 5 of prior art such as Fig. 3 (a) expression and elongated milling cutter (or drill bit) parallel axes, cutter 5 is in the centre.The advantage of this method for arranging is that coating is more even along the axis direction thickness distribution; Because the blade place equates along the distance of axis each point from heated filament 5, but unsuitable batch preparations coated cutting tool 5 (between a pair of heated filament 5, generally can only place a long and thin cutter 5);
Prior art such as Fig. 3 (b) are that a pair of heated filament 5 directions and cutter 5 axis directions are perpendicular; Cutter 5 is also in the centre; Its advantage is to be fit to batch preparations (many monobloc(k)type complex shaped cutters 5 can be arranged in parallel between a pair of heated filament 5); Shortcoming be coating along the axis direction skewness, the blade place is not wait along the axis each point from the distance of heated filament 5, and is thicker near the partial coating thickness of heated filament 5.
Present embodiment such as Fig. 3 (c) show, replace original a pair of heated filament 5 with upper and lower two row heated filaments 5 up and down, and like this, it can make the diamond coatings at blade place even as far as possible along the axis direction thickness distribution, can realize batch preparations again.
Illustrate that like Fig. 4 two pairs of heated filament 5 rear knife edge place coat-thicknesses of employing are along cutter 5 axis distribution schematic diagrams; A pair of heated filament 5 was along the axially corresponding deposited coatings thickness distribution of blade above Fig. 4 curve a represented; Fig. 4 curve b representes that a pair of heated filament 5 is along the axially corresponding deposited coatings thickness distribution of blade down; Fig. 4 curve c representes the deposited coatings thickness distribution that two pairs of heated filaments, 5 acting in conjunction lower edge blades are axially corresponding, this shows, it is more uniform that curve c coat-thickness distributes along axis.After adopting up and down two row heated filaments 5; Heated filament 5 total heating powers have increased, and the temperature at blade place raises easily, but owing to adopt the cooling base of sandwich style; Cutter 5 has obtained effective cooling, and the substrate surface temperature at blade place still can remain in the suitable scope.On the other hand; The increase of heated filament 5 power, the rising of heated filament 5 temperature can effectively promote the increase of active H atomic percent; This all is very helpful to improving diamond coatings quality and sedimentation rate, and reduction coating internal stress, raising sticking power are also played an important role.
Embodiment 2
Processing graphite with milling cutter on plating CVD diamond coatings, the handle of a knife diameter is φ 1, blade is long to be 20mm, cutter 5 length overalls are 50 millimeters.The cutter 5 cooling understructures of the sandwich style that present embodiment adopted are: the copper billet size is high, wide, length is 30 * 30 * 100 millimeters; The graphite corresponding size is 30 * 10 * 100 millimeters; Thickness is that 0.2 millimeter molybdenum sheet 1 is cut into 35 * 100 millimeters; In the even hole (hole depth 25mm) of 50 φ 3.2 of ground auger at interval of cooling base, uprightly insert 50 milling cutter so that install.
The first step, get 50 on above-mentioned long handle milling cutter; Carry out pre-treatment, divide 5 rows to be inserted in the cooling base of sandwich style 10 of every rows 50 milling handle with instance 1; Place on the water cooling platform 4 of heated filament 5CVD reaction chamber the deposition of beginning diamond coatings.
It directly is the tantalum wire of φ 0.6 that second step, heated filament 5 adopt six pairs of lines, 40 millimeters of tantalum wire spacings, and wherein a pair of height is identical with the point of a knife of milling cutter, and another is to then low 20 millimeters.Reaction chamber vacuumizes the back and feeds reactant gases (hydrogen and acetone); The deposition of beginning CVD diamond coatings behind the adjustment chamber pressure, processing parameter is: pressure 10-25Torr, total gas flow rate 700 ml/min; Acetone/hydrogen (volume ratio) is 2%; The tantalum wire temperature is about 2100 ℃, and after depositing through 2 hours, blade place deposition obtains the diamond coatings of about 4-7 micron thick.Every revolve cutter 5 positions turn 90 degrees, carry out 2 hours depositions again, obtain the diamond coatings of about 8-14 micron thick, and can effectively guarantee coating uniformity with same processing parameter.This milling cutter is used for machining graphite, and the service life as compared carbide-tipped milling cutter improves more than 8 times, and the working accuracy and the surface smoothness of workpiece also are improved.
Embodiment 3
The processing carbon fibre reinforced composite with drill bit on plating CVD diamond coatings, the handle of a knife diameter is φ 6, blade is long to be 35mm, cutter 5 length overalls are 60 millimeters.The cutter 5 cooling understructures of the sandwich style that present embodiment adopted are: the copper billet size is high, wide, length is 30 * 30 * 100 millimeters; The graphite corresponding size is 30 * 15 * 100 millimeters; Thickness is that 0.5 millimeter molybdenum sheet 1 is cut into 35 * 100 millimeters; In the even hole (hole depth 25mm) of 35 φ 6.2 of ground auger at interval of cooling base, uprightly insert 35 drill bit so that install.
The first step, get 35 on above-mentioned long handle milling cutter, carry out the pre-treatment with instance 1,35 drill bit handle of a knifes are inserted in the cooling base of sandwich style, 7 of every rows place on the water cooling platform 4 of heated filament 5CVD reaction chamber, the deposition of beginning diamond coatings.
It directly is the tantalum wire of φ 0.8 that second step, heated filament 5 adopt six pairs of lines, 30 millimeters of tantalum wire spacings, and wherein a pair of height is identical with the point of a knife of drill bit, and another is to then low 20 millimeters.Reaction chamber vacuumizes the back and feeds reactant gases (hydrogen and acetone); The deposition of beginning CVD diamond coatings behind the adjustment chamber pressure, processing parameter is: pressure 10-25Torr, total gas flow rate 700 ml/min; Acetone/hydrogen (volume ratio) is 2%; The tantalum wire temperature is about 2100 ℃, and after depositing through 3.5 hours, blade place deposition obtains the diamond coatings of about 5-8 micron thick.Every revolve cutter 5 positions turn 90 degrees, carry out 3.5 hours depositions again, obtain the diamond coatings of about 10-16 micron thick, and can effectively guarantee coating uniformity with same processing parameter.This milling cutter is used for carbon fibre reinforced composite efficiently holes, and the service life as compared carbide-tipped milling cutter improves more than 6 times, and the working accuracy and the surface smoothness of workpiece also are improved.

Claims (6)

1. a complicated shape diamond-coated tools hot-wire chemical gas-phase deposition batch preparation is characterized in that, may further comprise the steps:
The first step, the handle of a knife of pretreated cemented carbide with complicated shape cutter is inserted cutter cooling base, the sandwich style base that installs cutter is placed on the heated filament CVD equipment water-cooled worktable;
Described cutter cooling base is superposeed successively by rectangle molybdenum sheet, copper sheet and graphite cake and constitutes sandwiched type structure, and this cutter cooling base is provided with the boring that is complementary with handle of a knife diameter and length;
Second step, adopt up and down two row heated filaments and up heated filament height identical with the point of a knife of said inserted tool, the height of descending heated filament is over against the blade bottom of cutter, feeding hydrogen and acetone and in cemented carbide with complicated shape tool surface deposition of diamond coatings.
2. complicated shape diamond-coated tools hot-wire chemical gas-phase deposition batch preparation according to claim 1 is characterized in that described rectangle molybdenum sheet thickness range is: 0.2-2mm.
3. complicated shape diamond-coated tools hot-wire chemical gas-phase deposition batch preparation according to claim 1 is characterized in that described copper sheet thickness range is: 20-60mm.
4. complicated shape diamond-coated tools hot-wire chemical gas-phase deposition batch preparation according to claim 1 is characterized in that described graphite cake thickness range is: 30-80mm.
5. complicated shape diamond-coated tools hot-wire chemical gas-phase deposition batch preparation according to claim 1 is characterized in that, the diameter phi 1~16mm of described handle of a knife, the entire length 50-180mm of described inserted tool, the long 15-50mm of sword.
6. complicated shape diamond-coated tools hot-wire chemical gas-phase deposition batch preparation according to claim 1 is characterized in that described deposition is divided into twice; Wherein: the tantalum wire diameter phi 0.3-1.2mm of employing, the columns of heated filament are the 2-8 row, and sedimentary nucleation air pressure is 12Torr; Growth air pressure is 25Torr, and acetone concentration is 1-3%, after the deposition cutter is revolved for the first time and carries out depositing second time after turning 90 degrees; Each depositing time was respectively 2-5 hour, and gauge control is at 3 μ m-10 μ m.
CN2011100288462A 2011-01-27 2011-01-27 Hot-filament chemical vapor deposition batch preparation method of complicated-shape diamond coated cutting tool Expired - Fee Related CN102061453B (en)

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