CN1539583A - Preparation of diamond coat for integral rotary cutting tool made from hard metal alloy - Google Patents
Preparation of diamond coat for integral rotary cutting tool made from hard metal alloy Download PDFInfo
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- CN1539583A CN1539583A CNA2003101083060A CN200310108306A CN1539583A CN 1539583 A CN1539583 A CN 1539583A CN A2003101083060 A CNA2003101083060 A CN A2003101083060A CN 200310108306 A CN200310108306 A CN 200310108306A CN 1539583 A CN1539583 A CN 1539583A
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Abstract
An apparatus for preparing the coated diamond layer on the surface of an integrated rotary cutting tool made of hard alloy is composed of power supply for resistance wire, speed-reducing motor, sealed rotary unit, sealing washer, quartz tube, base supporter, DC bias source, base and its sealing washer, water inlet tube, gas sucking pipeline, water outlet tube, reaction chamber, thermosensitive resistor, resistance wire, gas-guiding Cu tube, flowmeter, and gas cylinder. Its advantages are high quality of coated diamond layer, and easy control.
Description
Technical field
The present invention relates to a kind of diamond coatings preparation facilities, particularly a kind of employing electronics strengthens hot-wire chemical gas-phase deposition (CVD) method to the monoblock type carbide alloy rotary cutter diamond coatings preparation facilities that monoblock type carbide alloy rotary cutter carries out the diamond coatings preparation, belongs to the coated cutting tool preparing technical field.
Background technology
Along with workpiece material develops towards lightweight, compoundization direction, non-iron difficult-to-machine materials such as silumin, titanium alloy, aluminum matrix composite, engineering ceramics, fibre reinforced plastics are used in automobile, Aero-Space and mould in a large number.Monoblock type rotary body cutter such as complex shaped cutters uses such as fluted drill, monoblock type slotting cutter, reamer and screw tap based on high-speed steel and tungsten-cobalt carbide (WC-Co) series hard alloy material have a large capacity and a wide range, and these cutters tool wear when above-mentioned difficult-to-machine material is processed in high-speed cutting is serious, and machining accuracy and surface quality are difficult to guarantee.Meanwhile, diamond should become the desirable cutter material of the above-mentioned non-iron difficult-to-machine material of processing because of having excellent properties such as maximum hardness, high elastic modulus, high heat conductance, low-friction coefficient, low thermal coefficient of expansion and chemical stability be good.Owing to electronics strengthen hot-wire chemical gas-phase deposition (CVD) technology can be directly on matrix growing diamond make various devices, thereby make the diamond coatings preparation of monoblock type carbide alloy rotary cutter become possibility with complicated shape matrix.Monoblock type carbide alloy rotation diamond-coated tools will become the most promising complex shaped cutter of new generation that is used for the non-iron difficult-to-machine material of high-speed cutting because of excellent properties such as the high strength that combines adamantine high rigidity and carbide alloy and fracture toughnesses.Yet, because the complex-shaped design feature of monoblock type carbide alloy rotary cutter, to deposit thereon and obtain the uniform gem grade diamond coating of all even thickness of quality and will have certain difficulty, thereby compare planar substrates, the diamond coatings precipitation equipment is proposed special requirement, and made monoblock type carbide alloy rotary cutter diamond coatings realize that the difficulty of industrialization preparation increases.In the prior art, electronics enhancing hot-wire chemical gas-phase deposition (CVD) device based on planar substrates can only carry out diamond coatings to the flush cut cutter, can't satisfy the requirement of monoblock type rotary cutter diamond coatings quality, and research still is in the starting stage about monoblock type rotation diamond-coated tools both at home and abroad at present, at the complex-shaped design feature of monoblock type carbide alloy rotary cutter and instructions for use and special special diamond coating precipitation equipment also occurs as yet.
Summary of the invention
Can not guarantee the diamond coatings thickness evenness that deposited on the monoblock type rotary cutter complicated shape matrix and the deficiency of quality uniformity in order to overcome existing planar substrates diamond coatings preparation facilities, the practical surface roughness that improves the adhesive strength of cutter coat and improve coating, to improve the whole cutting ability of monoblock type spin coating cutter, the invention provides a kind of electronics that adopts and strengthen heated filament CVD method is carried out the diamond coatings preparation to monoblock type carbide alloy rotary cutter monoblock type carbide alloy rotary cutter diamond coatings preparation facilities.
Apparatus of the present invention have increased unique sealing slewing equipment on original basis based on planar substrates electronics enhancing hot-wire chemical gas-phase deposition (CVD) device, it mainly comprises: heater supply, reducing motor, sealing slewing equipment, seal washer, quartz ampoule, matrix brace table, dc bias source, base seal washer, base, water inlet pipe, pump-line, outlet pipe, reative cell, thermistor, heated filament, copper wireway, mass flowmenter, gas cylinder.It is tool matrix design feature and coating requirement when adapting to monoblock type carbide alloy rotary cutter diamond coatings that the present invention adopts unique sealing slewing equipment, in the rotating shaft that the rotary cutter matrix is installed in the sealing slewing equipment, it can be rotated in deposition process continuously, thereby improve the depositing temperature and the reaction atmosphere of matrix surface, thereby can carry out high-quality diamond coatings the monoblock type rotary cutter of complicated shape matrix.The sealing slewing equipment mainly is made up of cooling copper tube, J RunddichtringO, supported flange, gland and packing ring under cooling copper tube, the seal receptacle on rotating shaft, sleeve, button-headed screw, seal receptacle, the seal receptacle.Seal receptacle, packing ring, gland, J RunddichtringO and supported flange are passed in rotating shaft, are connected with the reducing motor gyroaxis.Adopt to be threaded by button-headed screw and be fixed on supported flange on the seal receptacle tightly, in order to guarantee sealing, between supported flange and seal receptacle, adopt J RunddichtringO, gland and packing ring to compress sealing successively, supported flange tightly is pressed in the J RunddichtringO on the gland, and gland then tightly is pressed in packing ring on the seal receptacle.The rotating shaft lower end is connected with the sleeve that has internal thread by being threaded, sleeve is radially opened three minor thread holes near the barrel of heated filament end five equilibrium and is used for clamping the screw that the rotary cutter handle of a knife is used to lay, when like this handle of a knife being enclosed within sleeve, can cutter be clamped and locate by the screw of three different directions.In order to guarantee the service behaviour of sealing ring, weld copper cooling tube and circulation in the seal receptacle top and bottom and feed cold water and cool off.In order to guarantee the sealing between seal receptacle and the quartz ampoule, be provided with sealing rubber ring on its contact-making surface in addition, when inside reaches vacuum, thereby outside atmosphere pressure handle sealing rubber ring is pressed in tightly and reaches vacuum-packed purpose on the quartz ampoule.
The invention has the beneficial effects as follows that this preparation facilities is at the complex-shaped design feature of monoblock type carbide alloy rotary cutter and instructions for use and special special diamond coating precipitation equipment.It adopts unique sealing slewing equipment to make that the depositing temperature on tool matrix surface and reaction atmosphere are improved greatly, thereby can control sedimentary condition simply, easily, deposit the excellent diamonds coating, thereby its industrialization prospect light, remarkable economic efficiency had.
Description of drawings
Fig. 1 is apparatus of the present invention structural representations.
Fig. 2 is the sealing slewing equipment semi-section structural representation in apparatus of the present invention.
1 is heater supply among the figure, the 2nd, and reducing motor, the 3rd, sealing slewing equipment, the 4th, seal washer, the 5th, quartz ampoule, the 6th, matrix brace table, the 7th, dc bias source, the 8th, base seal washer, the 9th, base, the 10th, water inlet pipe, the 11st, pump-line, the 12nd, outlet pipe, the 13rd, reative cell, the 14th, thermistor, the 15th, heated filament, the 16th, copper wireway, 17～19th, mass flowmenter, 20～22nd, gas cylinder, the 23rd, packing ring, the 24th, gland, the 25th, button-headed screw, the 26th, supported flange, the 27th, J RunddichtringO, the 28th, cooling copper tube on the seal receptacle, the 29th, seal receptacle, the 30th, cooling copper tube under the seal receptacle, the 31st, rotating shaft, the 32nd, sleeve, the 33rd, button-headed screw.
The specific embodiment
Below in conjunction with accompanying drawing concrete enforcement of the present invention is further described.
As shown in Figure 1, apparatus of the present invention mainly comprise: heater supply 1, reducing motor 2, sealing slewing equipment 3, seal washer 4, quartz ampoule 5, matrix brace table 6, dc bias source 7, base seal washer 8, base 9, water inlet pipe 10, pump-line 11, outlet pipe 12, reative cell 13, thermistor 14, heated filament 15, copper wireway 16, mass flowmenter 17～19, gas cylinder 20～22.Sealing slewing equipment 3, quartz ampoule 5 surround reative cell 13 with base 9, and wherein quartz ampoule 5 just is being placed on the base 9, and the centre is lined with base seal washer 8, and sealing slewing equipment 3 then just is being placed on the quartz ampoule 5, and the centre is lined with seal washer 4.By bolt reducing motor 2 is fixed on the upper surface of sealing slewing equipment 3, simultaneously the rotating shaft in the reducing motor 2 is connected by key with rotating shaft in sealing slewing equipment 3.Matrix brace table 6 is placed in the reative cell 13, is that water inlet pipe 10 and outlet pipe 12 directly are fixed on the base 9 by two copper cooling water pipes, and cooling water enters into the internal cavities of matrix brace table 6 in water inlet pipe 10, discharges via outlet pipe 12 again.Heated filament 15 by support be fixed on matrix brace table 6 directly over, the two ends of heater supply 1 link to each other by the two ends of lead with heated filament 15, the negative pole of dc bias source 7 is connected on the heated filament 15, its positive pole then is connected on the matrix brace table 6.Thermistor 14 places in the matrix brace table 6, and its output is wired on the temperature digital display instrument.Pump-line 11 1 ends directly are connected with pumped vacuum systems, and the other end passes base 9 and extend in the reative cell 13.Gas cylinder 20～22 is connected in the copper wireway 16 by mass flowmenter 17～19 respectively, and 16 of copper wireways pass sealing slewing equipment 3 and extend in the reative cell 13.
Tool matrix design feature and coating requirement when adapting to monoblock type carbide alloy rotary cutter diamond coatings, the present invention has adopted unique sealing slewing equipment 3, it can be sealed, the rotating shaft revolution of cutter can be arranged by the driven by motor clamping again, thereby improve the surface deposition temperature and the reaction atmosphere of monoblock type carbide alloy rotary cutter matrix, improve coating quality.As shown in Figure 2, sealing slewing equipment 3 mainly comprises: cooling copper tube 28, J RunddichtringO 27, supported flange 26, button-headed screw 25, gland 24 and packing ring 23 on cooling copper tube 30, seal receptacle 29, the seal receptacle under rotating shaft 31, sleeve 32, button-headed screw 33, the seal receptacle.Annexation between them is: seal receptacle 29, packing ring 23, gland 24, J RunddichtringO 27 and supported flange 26 are passed in rotating shaft 31, are connected with reducing motor 2 gyroaxises; Adopt to be threaded by button-headed screw 25 supported flange 26 is fixed on the seal receptacle 29 tightly, in order to guarantee sealing, between supported flange 26 and seal receptacle 29, adopt J RunddichtringO 27, gland 24 and packing ring 23 to compress sealing successively, supported flange 26 tightly is pressed in J RunddichtringO 27 on the gland 24, and gland 24 then tightly is pressed in packing ring 23 on the seal receptacle 29; Rotating shaft 31 lower ends are connected by the sleeve 32 that is threaded and has internal thread, sleeve 32 is radially opened three minor thread holes near the barrel of heated filament 15 ends five equilibrium and is used for clamping the button-headed screw 33 that the rotary cutter handle of a knife is used to lay, like this when the rotary cutter handle of a knife is enclosed within sleeve 32, the 33 pairs of rotary cutter handle of a knifes of button-headed screw by three different directions clamp and locate; Being welded with cooling copper tube respectively in seal receptacle 29 upper and lower surfaces is cooling copper tube 30 under cooling copper tube 28 and the seal receptacle on the seal receptacle; Owing to being that special tool matrix design feature and coating during at monoblock type carbide alloy rotary cutter diamond coatings requires design with upper-part, on market, there is no similar products at present and sell, so need make specially.Button-headed screw 33 adopts Mo to make to guarantee high temperature in its ability reative cell 13, and be used for that cooling copper tube 28 and supported flange 26 all adopt copper product to make on cooling copper tube 30 under the button-headed screw 33, rotating shaft 31, sleeve 32, seal receptacle of fastening supported flange 26, seal receptacle 29, the seal receptacle, 23 on J RunddichtringO 27 and packing ring all adopt the high temperature resistant silicon rubber of energy, its heat resisting temperature can reach 250 ℃, and gland 24 can adopt the Q235A material to make.
Behind above-mentioned requirements making and jockey, can carry out diamond coatings to monoblock type carbide alloy rotary cutter, when pumped vacuum systems is evacuated reative cell 13 by pump-line 11, external pressure will be pressed in sealing slewing equipment 3 and quartz ampoule 5 on the base 9 tightly, thereby reach the vacuum seal state.Reacting gas hydrogen (H is housed respectively in three gas cylinders 20～22
2), carbon-source gas (H
2+ CH
4) and argon gas (Ar), can control H respectively by three mass flowmenters 17～19
2, H
2+ CH
4Flow and the concentration in reative cell 13 thereof with argon gas, with temperature in the thermistor assaying reaction chambers 13 14, by the electric current and the voltage swing of control heater supply 1 and dc bias source 7, can control the heating power of heated filament 15, can control the reaction temperature in the reative cell 13 thus.Rotation by the rotating shaft 31 in the reducing motor 2 control sealing slewing equipments 3, thereby driving sleeve 32 and clamping cutter thereon turns round continuously, improve rotary cutter matrix depositing temperature and reaction atmosphere on every side, thereby can carry out high-quality diamond coatings the monoblock type rotary cutter of complicated shape matrix.Whole being coated with in the layer deposition process, also need circulate in two copper cooling water pipes are water inlet pipe 10 and outlet pipe 12 feeds cooling water with cooling that matrix brace table 6 is circulated, and circulating in the cooling copper tube 30 under cooling copper tube 28 and the seal receptacle on seal receptacle equally feeds cooling water with cooling that seal receptacle 29 is circulated.
Claims (3)
1. monoblock type carbide alloy rotary cutter diamond coatings preparation facilities, mainly comprise: heater supply (1), reducing motor (2), seal washer (4), quartz ampoule (5), matrix brace table (6), dc bias source (7), base seal washer (8), base (9), water inlet pipe (10), pump-line (11), outlet pipe (12), reative cell (13), thermistor (14), heated filament (15), copper wireway (16), mass flowmenter (17～19), gas cylinder (20～22), it is characterized in that also comprising sealing slewing equipment (3), sealing slewing equipment (3), quartz ampoule (5) surrounds reative cell (13) with base (9), wherein quartz ampoule (5) just is being placed on the base (9), the centre is lined with base seal washer (8), sealing slewing equipment (3) then just is being placed on the quartz ampoule (5), and the centre is lined with seal washer (4); By bolt reducing motor (2) is fixed on the upper surface of sealing slewing equipment (3), the rotating shaft in the reducing motor (2) is connected by key with rotating shaft in sealing slewing equipment (3); Matrix brace table (6) is that water inlet pipe (10) and outlet pipe (12) directly are fixed on the base (9) by two copper cooling water pipes; Heated filament (15) is fixed on directly over the matrix brace table (6) by support, the two ends of heater supply (1) link to each other by the two ends of lead with heated filament (15), the negative pole of dc bias source (7) is connected on the heated filament (15), and its positive pole then is connected on the matrix brace table (6); Thermistor (14) places in the matrix brace table (6), and its output is wired on the temperature digital display instrument; Pump-line (11) one ends are connected with pumped vacuum systems, and the other end passes base (9) and extend in the reative cell (13); Gas cylinder (20～22) is connected in the copper wireway (16) by mass flowmenter (17～19) respectively, and copper wireway (16) then passes sealing slewing equipment (3) and extend in the reative cell (13).
2. monoblock type carbide alloy rotary cutter diamond coatings preparation facilities according to claim 1, its feature also is to seal slewing equipment (3) and comprises: rotating shaft (31), sleeve (32), button-headed screw (25), cooling copper tube under the seal receptacle (30), seal receptacle (29), cooling copper tube on the seal receptacle (28), J RunddichtringO (27), supported flange (26), button-headed screw (25), gland (24) and packing ring (23), seal receptacle (29) is passed in rotating shaft (31), packing ring (23), gland (24), J RunddichtringO (27) and supported flange (26) are connected with reducing motor (25) gyroaxis; Adopt to be threaded by button-headed screw (25) supported flange (26) is fixed on the seal receptacle (29) tightly, in order to guarantee sealing, between supported flange (26) and seal receptacle (29), adopt J RunddichtringO (27), gland (24) and packing ring (23) to compress sealing successively, supported flange (26) tightly is pressed in J RunddichtringO (27) on the gland (24), and gland (24) then tightly is pressed in packing ring (23) on the seal receptacle (29); Rotating shaft (31) lower end is connected with the sleeve that has internal thread (32) by being threaded, sleeve (32) is radially opened three minor thread holes is used for clamping the button-headed screw (33) that the rotary cutter handle of a knife is used to lay to five equilibrium on the barrel near heated filament (15) end, like this when handle of a knife being enclosed within sleeve (32), the button-headed screw (33) by three different directions clamps and locatees cutter; Welding copper cooling tube in seal receptacle (29) upper and lower surface is cooling copper tube (30) under cooling copper tube on the seal receptacle (28) and the seal receptacle, and circulation feeds cooling water.
3. monoblock type carbide alloy rotary cutter diamond coatings preparation facilities according to claim 1, its feature also is: button-headed screw (25) adopts Mo to make, button-headed screw (25), rotating shaft (31), sleeve (32), cooling copper tube under the seal receptacle (30), seal receptacle (29), cooling copper tube on the seal receptacle (28), air guide copper pipe (22) and supported flange (26) all adopt copper product to make, J RunddichtringO (27), packing ring (23) and seal washer (5) then all adopt the high temperature resistant silicon rubber of energy, gland (24) can adopt the Q235A material to make, and all the other can adopt the existing universal component of selling on the market.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2003101083060A CN100409983C (en) | 2003-10-30 | 2003-10-30 | Preparation of diamond coat for integral rotary cutting tool made from hard metal alloy |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2003101083060A CN100409983C (en) | 2003-10-30 | 2003-10-30 | Preparation of diamond coat for integral rotary cutting tool made from hard metal alloy |
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| Publication Number | Publication Date |
|---|---|
| CN1539583A true CN1539583A (en) | 2004-10-27 |
| CN100409983C CN100409983C (en) | 2008-08-13 |
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| CNB2003101083060A Expired - Fee Related CN100409983C (en) | 2003-10-30 | 2003-10-30 | Preparation of diamond coat for integral rotary cutting tool made from hard metal alloy |
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| CN (1) | CN100409983C (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102061453A (en) * | 2011-01-27 | 2011-05-18 | 上海交通大学 | Hot-filament chemical vapor deposition batch preparation method of complicated-shape diamond coated cutting tool |
| CN104879494A (en) * | 2015-04-22 | 2015-09-02 | 安徽龙行密封件有限公司 | Diesel oil filter seal ring |
| CN108559970A (en) * | 2017-12-06 | 2018-09-21 | 上海交通大学 | The HFCVD batch preparations of complicated shape diamond-coated tools |
| CN109068420A (en) * | 2018-07-17 | 2018-12-21 | 中山市康舒美电器有限公司 | A kind of quartz heating-pipe |
| CN110079786A (en) * | 2019-06-03 | 2019-08-02 | 杭州睿清环保科技有限公司 | It is used to prepare the device of the hot wall HF CVD of large-area diamond film |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102211218B (en) * | 2011-04-01 | 2013-04-24 | 上海祥仁新材料有限公司 | Diamond coated cutter and application thereof in processing of fiber composite material |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5839807A (en) * | 1981-09-02 | 1983-03-08 | Daikin Ind Ltd | Fluid controller |
| SE9101953D0 (en) * | 1991-06-25 | 1991-06-25 | Sandvik Ab | A1203 COATED SINTERED BODY |
| CN1102220A (en) * | 1993-10-28 | 1995-05-03 | 北京科技大学 | Method for applying diamond film to hard alloy tool knife-edge |
| US5585176A (en) * | 1993-11-30 | 1996-12-17 | Kennametal Inc. | Diamond coated tools and wear parts |
| SE520716C2 (en) * | 1999-05-06 | 2003-08-12 | Sandvik Ab | A process for manufacturing a cutting tool coated with alumina |
| CN1219109C (en) * | 2003-09-29 | 2005-09-14 | 上海交通大学 | Hard alloy matix complex shape cutter diamond coating preparation method |
-
2003
- 2003-10-30 CN CNB2003101083060A patent/CN100409983C/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102061453A (en) * | 2011-01-27 | 2011-05-18 | 上海交通大学 | Hot-filament chemical vapor deposition batch preparation method of complicated-shape diamond coated cutting tool |
| CN102061453B (en) * | 2011-01-27 | 2012-11-21 | 上海交通大学 | Hot-filament chemical vapor deposition batch preparation method of complicated-shape diamond coated cutting tool |
| CN104879494A (en) * | 2015-04-22 | 2015-09-02 | 安徽龙行密封件有限公司 | Diesel oil filter seal ring |
| CN108559970A (en) * | 2017-12-06 | 2018-09-21 | 上海交通大学 | The HFCVD batch preparations of complicated shape diamond-coated tools |
| CN109068420A (en) * | 2018-07-17 | 2018-12-21 | 中山市康舒美电器有限公司 | A kind of quartz heating-pipe |
| CN109068420B (en) * | 2018-07-17 | 2022-06-24 | 云南钜盛电器科技有限公司 | Quartz heating pipe |
| CN110079786A (en) * | 2019-06-03 | 2019-08-02 | 杭州睿清环保科技有限公司 | It is used to prepare the device of the hot wall HF CVD of large-area diamond film |
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| CN100409983C (en) | 2008-08-13 |
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Assignee: Shenzhen Zhongtian superhard cutting tool Co., Ltd. Assignor: Shanghai Jiao Tong University Contract record no.: 2010440020165 Denomination of invention: Preparation of diamond coat for integral rotary cutting tool made from hard metal alloy Granted publication date: 20080813 License type: Exclusive License Open date: 20041027 Record date: 20100913 |
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Granted publication date: 20080813 Termination date: 20191030 |
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| CF01 | Termination of patent right due to non-payment of annual fee |