CN110073251A - Shape variable mirror and laser processing device - Google Patents

Shape variable mirror and laser processing device Download PDF

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Publication number
CN110073251A
CN110073251A CN201780076464.2A CN201780076464A CN110073251A CN 110073251 A CN110073251 A CN 110073251A CN 201780076464 A CN201780076464 A CN 201780076464A CN 110073251 A CN110073251 A CN 110073251A
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China
Prior art keywords
axis
screw
component
mirror
backboard
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Granted
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CN201780076464.2A
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Chinese (zh)
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CN110073251B (en
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石塚智彦
小林信高
泷川靖弘
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Mitsubishi Electric Corp
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Mitsubishi Electric Corp
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/10—Mirrors with curved faces
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/185—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors with means for adjusting the shape of the mirror surface

Abstract

Shape variable mirror (10) includes circular reflector (1), is the reflecting mirror with reflecting surface；Y-axis component (4) is that have as the Y-axis backboard (4a) in the 1st plate portion and the 1st component of 2 Y-axis feet (4b1,4b2) as the 1st foot；X-axis component (5) is the 2nd component with X-axis backboard (5a) and the 2 X-axis feet (5b1,5b2) as the 2nd foot abutted across the extension of the 1st component with reflecting mirror as the 2nd plate portion；Apart from changing unit (2), change the distance between the distance between the 1st plate portion and reflecting mirror the 2nd plate portion and reflecting mirror symmetrically；And holding member (6), the 1st component and the 2nd component are kept.In reflecting mirror, pitched by the line segment linked between position that 2 the 1st foots respectively abut and by the line segment intersection linked between position that 2 the 2nd foots respectively abut.

Description

Shape variable mirror and laser processing device
Technical field
The present invention relates to shape variable mirror and the laser processing device with the shape variable mirror.
Background technique
In the past, it is known that the corrected shape variable mirror of wave surface distortion of light wave in optical instrument.In patent text It offers and discloses a kind of shape variable mirror in 1, include reflecting mirror, there is reflecting surface in unilateral side；1st shaft member is reflecting 2 positions are fixed at the back side of mirror；2nd shaft member has 2 feet at the back side for being fixed on reflecting mirror, across the 1st axle portion Part；And apart from change mechanism, changes the distance between the 2nd shaft member and the 1st shaft member, the 1st shaft member will be carried out The line segment of fixed position connection and the line segment intersection for linking the position that the foot of the 2nd shaft member is fixed are pitched, should Shape variable mirror is corrected the astigmatism of light wave using 1 driving element.
Patent document 1: Japanese Unexamined Patent Publication 2007-171703 bulletin
Summary of the invention
But according to the above-mentioned prior art, the position of the foot of the 2nd shaft member relative to datum level i.e. the 1st shaft member into Row variation, thus shape variable mirror deforms, the center of mirror surface relative to datum level, by apart from change mechanism realize away from It is moved from change direction.Accordingly, there exist following problems, that is, is swashed by what the movement of the center of mirror surface reflected The positional shift of light beam.
The present invention be exactly in view of the foregoing and propose, it is intended that be inhibited deformation when, in mirror surface Shape variable mirror of the heart position relative to the variation of the component kept to shape variable mirror.
It in order to solve above-mentioned problem and achieves the goal, shape variable mirror of the invention includes reflecting mirror, has reflection Face；1st component, have the 1st plate portion opposite with the back side of the reflecting surface in reflecting mirror, the 1 plate portion He Cong extend and with it is anti- Penetrate 2 the 1st foots of mirror abutting；There is 2nd component the 2nd plate portion opposite with the 1st plate portion, the 2 plate portion He Cong to rise across the 1 component extends and 2 the 2nd foots abutting with reflecting mirror；Apart from changing unit, make the distance between the 1st plate portion and reflecting mirror The distance between 2nd plate portion and reflecting mirror symmetrically change；And holding member, via apart from changing unit to the 1st component It is kept with the 2nd component.In reflecting mirror, by the line segment linked between position that 2 the 1st foots respectively abut and by 2 The line segment intersection fork linked between the position that 2nd foot respectively abuts.
The effect of invention
According to the present invention, there are following effects, that is, inhibit the center of mirror surface when deformation relative to can to shape Become the variation for the component that mirror is kept.
Detailed description of the invention
Fig. 1 is the concept map being illustrated for the concept to shape variable mirror involved in embodiment 1.
Fig. 2 is the assembling figure being illustrated for the construction to shape variable mirror involved in embodiment 1.
Fig. 3 is the 1st concept map being illustrated for the change in shape to shape variable mirror shown in Fig. 2.
Fig. 4 is the 2nd concept map being illustrated for the change in shape to shape variable mirror shown in Fig. 2.
Fig. 5 is illustrated for the change in shape to circular reflector possessed by shape variable mirror shown in Fig. 2 Concept map.
Fig. 6 is the 3rd concept map being illustrated for the change in shape to shape variable mirror shown in Fig. 2.
Fig. 7 is illustrated for the change in shape to circular reflector possessed by shape variable mirror shown in Fig. 2 Concept map.
Fig. 8 is the assembling figure being illustrated for the construction to shape variable mirror involved in embodiment 2.
Fig. 9 is the assembling figure being illustrated for the construction to shape variable mirror involved in embodiment 3.
Figure 10 is the assembling figure being illustrated for the construction to shape variable mirror involved in embodiment 4.
Figure 11 is the 1st concept map being illustrated for the change in shape to shape variable mirror shown in Fig. 10.
Figure 12 is the 2nd concept map being illustrated for the change in shape to shape variable mirror shown in Fig. 10.
Figure 13 is the 3rd concept map being illustrated for the change in shape to shape variable mirror shown in Fig. 10.
Figure 14 is illustrated for the change in shape to circular reflector possessed by shape variable mirror shown in Fig. 10 Concept map.
Figure 15 is the assembling figure being illustrated for the construction to shape variable mirror involved in embodiment 5.
Figure 16 is the assembling figure being illustrated for the construction to shape variable mirror involved in embodiment 6.
Figure 17 is the figure for indicating a structural example of laser processing device involved in embodiment 7.
Specific embodiment
In the following, based on attached drawing to shape variable mirror and laser processing device involved in embodiments of the present invention in detail It is illustrated.In addition, the present invention is not limited to present embodiments.
Embodiment 1.
Fig. 1 is the concept map being illustrated for the concept to shape variable mirror involved in embodiments of the present invention 1. Circular reflector 1 possessed by shape variable mirror involved in embodiments of the present invention 1 is shown in FIG. 1.It is shown in FIG. 1 Circular reflector 1 is circle with the reflecting surface i.e. mirror surface 1sf and back side 1sb, mirror surface 1sf and back side 1sb reflected light, It is plane parallel to each other.As shown in Figure 1, on mirror surface 1sf, to the 1 axis, that is, X at the center of the periphery circle by mirror surface 1sf It axis and is orthogonally defined in the 2nd i.e. Y-axis of axis that intersects of center of periphery circle with the X-axis.In addition, overleaf on 1sb, To parallel with Y-axis, the 2nd i.e. Yb axis of axis that overleaf center of the periphery circle of 1sb intersects with the axis for being parallel to X-axis is determined Justice.In addition, being defined to the Z axis for being formed together left-handed coordinate system with X-axis and Y-axis.By it is in the direction of Z axis, remember from below The direction of holding member shown in Fig. 26 towards the circular reflector 1 stated is set as +Z direction, and the direction opposite with +Z direction is set For -Z direction.
Overleaf at the round intersection point, that is, Yb axis intersection point Pyb1 with Yb axis in the periphery of 1sb, application is vertically pushed with back side 1sb Direction, that is, +Z direction load Fb1, at another intersection point, that is, Yb axis intersection point Pyb2, application vertically pushed with back side 1sb Direction, that is, +Z direction load Fb2.On the other hand, at the round intersection point, that is, X-axis intersection point Pxf1 with X-axis in the periphery of mirror surface 1sf, Apply the load Ff1 of -Z direction, so that it is mobile to +Z direction not relative to mirror surface 1sf, in another intersection point, that is, X-axis intersection point At Pxf2, apply the load Ff2 of -Z direction, so that not moving relative to mirror surface 1sf to +Z direction.If as discussed above Apply load, then the mirror surface 1sf of circular reflector 1 is deformed into saddle type.Specifically, the saddle type is in the straight line parallel with X-axis The convex form of the center protrusion of upper mirror surface 1sf, the concave shape of concavity on the straight line parallel with Y-axis.In addition, in X-axis The curve shape of spill on the curve shape and Y-axis of convex becomes towards opposite identical shape.
If the focal length of the light reflected in circular reflector 1 is short, i.e. optical power (Power) strong direction and X Axis matches, then due to becoming convex surface in X-axis, the focal length of the light reflected is elongated, due to becoming recessed in Y-axis Face, therefore the focal length of the light reflected shortens.Therefore, the optics energy of the light of the optical power and Y direction of the light of X-direction The difference of power is reduced.That is, being adjusted by the degree of the deformation to saddle type, to make the optical power and Y direction of X-direction Optical power it is equal, astigmatism can be corrected.Herein, the degree about the deformation of circular reflector 1, relative to straight Diameter is greater than or equal to 10mm and the circular reflector 1 less than or equal to 100mm is set as being greater than or equal to 0.1 μm and being less than or equal to 10 μm, but it's not limited to that for the degree of the deformation of circular reflector 1.
Fig. 2 is the assembling figure being illustrated for the construction to shape variable mirror involved in embodiments of the present invention 1. Shape variable mirror 10 shown in Fig. 2 includes circular reflector 1；And comprising apart from changing unit 2, Y-axis component 4, X-axis component 5 and Deformation force generation mechanism portion 3 including holding member 6.
There is the fixed part i.e. piezoelectric actuator connecting component 2b for being fixed on X-axis backboard 5a apart from changing unit 2, carried on the back with Y-axis Plate 4a abut and can stretch between piezoelectric actuator connecting component 2b and Y-axis backboard 4a the 1st piezoelectric actuator 2a, with guarantor Hold the 2nd piezoelectric actuator 2c that component 6 is abutted and can be stretched between piezoelectric actuator connecting component 2b and holding member 6. 1st piezoelectric actuator 2a and the 2nd piezoelectric actuator 2c is can accurately to be controlled by back voltage effect by applying voltage The actuator of length.1st piezoelectric actuator 2a and the 2nd piezoelectric actuator 2c are attached by piezoelectric actuator connecting component 2b. According to the direction i.e. side-Z that pulling circular reflector 1 at changing unit 2, X-axis intersection point Pxf1 shown in Fig. 1, can be generated To load Ff1, at X-axis intersection point Pxf2, can generate pull circular reflector 1 the i.e. -Z direction in direction load Ff2, At Yb axis intersection point Pyb1 shown in Fig. 1, the load Fb1 for pushing the i.e. +Z direction in direction of circular reflector 1 can be generated, in Yb At axis intersection point Pyb2, the load Fb2 for pushing the i.e. +Z direction in direction of circular reflector 1 can be generated.It is changed by using distance Portion 2, so as to make between the distance between X-axis component 5 and circular reflector 1 and Y-axis component 4 and circular reflector 1 away from Symmetrically change from circular reflector 1.In addition, the distance between X-axis component 5 and circular reflector 1 and Y-axis component 4 and circle The distance between shape reflecting mirror 1 can symmetrically be changed with circular reflector 1 with equal amount.
Deformation force generation mechanism portion 3 is configured at the back side of circular reflector 1, and generation makes mirror surface 1sf be deformed into saddle type Power.Circular reflector 1 can be made to be deformed into saddle type by the deformation force generation mechanism portion 3 easily constructed.Deformation force generates machine Structure portion 3, which is included, is fixed on circular reflector 1 at the 2 of position corresponding with Yb axis intersection point Pyb1, Pyb2 shown in FIG. 1 1 shaft member of back side 1sb, that is, Y-axis component 4；Circle is fixed at the 2 of position corresponding with X-axis intersection point Pxf1, Pxf2 The back side 1sb of reflecting mirror 1 and across Y-axis component 4 configure 2 shaft members, that is, X-axis component 5；And apart from changing unit 2.Distance 1st piezoelectric actuator 2a of changing unit 2 makes the distance change of Y-axis component 4 and X-axis component 5.The 2nd piezoelectricity apart from changing unit 2 causes Dynamic device 2c makes the distance change of X-axis component 5 and holding member 6.By the position for securing Y-axis component 4 line segment connected to each other and The line segment and the position connected to each other line segment of will securing X-axis component 5 parallel with X-axis and the line segment parallel with Y-axis, overleaf 1sb is intersected with each other.
1 component, that is, Y-axis component 4 includes Y-axis backboard 4a, be with the circle of 1 same diameter of circular reflector, have Thickness；And the face in 1 side of circular reflector of Y-axis backboard 4a, 2 of the square shape being vertically formed on Y-axis backboard 4a Foot, that is, Y-axis foot 4b1,4b2.Y-axis backboard 4a is the 1st plate portion opposite with the back side 1sb of circular reflector 1.Y-axis foot 4b1,4b2 It is the 1st foot for extending from Y-axis backboard 4a to +Z direction and being abutted with the back side 1sb of circular reflector 1.The length of Y-axis foot 4b1 With the equal length of Y-axis foot 4b2, therefore Y-axis backboard 4a and circular reflector 1 are flat in the state of being fixed on circular reflector 1 It configures capablely.Shape in the section vertical with length direction of Y-axis foot 4b1,4b2 is square, and is phase in the longitudinal direction Same section shape.In addition, Y-axis foot plate surface 4c1,4c2 are the bottom surfaces of Y-axis foot 4b1,4b2.Y-axis foot 4b1,4b2 are configured at Y-axis The end of backboard 4a is set as the center of the Y-axis foot plate surface 4c2 by the center of the Y-axis foot plate surface 4c1 of Y-axis foot 4b1 and Y-axis foot 4b2 The line segment of connection passes through the center of Y-axis backboard 4a.Herein, by the center at the center of Y-axis foot plate surface 4c1 and Y-axis foot plate surface 4c2 The straight line of connection becomes Y-axis.Y-axis passes through the center of Y-axis backboard 4a, orthogonal to X-axis.X-axis and periphery circle in Y-axis backboard 4a Intersection point, be provided with notch 4d1,4d2 for passing through for X-axis component 5.But Y-axis foot 4b1,4b2's is vertical with length direction Shape in straight section is not limited to square, is also possible to circle.
In addition, Y-axis backboard 4a and Y-axis foot 4b1,4b2 can also be integrally formed, the component that can also be formed independently of one another Made of engagement.Also, Y-axis component 4 and circular reflector 1 can be formed and cutting same workpiece. In addition, circular reflector 1 and X-axis component 5 can be formed and cutting same workpiece.Also, it is round anti- Penetrating mirror 1, X-axis component 5 and Y-axis component 4 can be formed and cutting same workpiece.
The shape that Y-axis foot plate surface 4c1 is square in the plane vertical with Y-axis foot 4b1, Y-axis foot plate surface 4c2 with Y The shape being square in axis foot 4b2 vertical plane.The back side of 2 Y-axis foot plate surface 4c1,4c2 relative to circular reflector 1 1sb is fixed, so that not by screw fastening, soldering or the fixing means as the bonding of adhesives realization It can the stationary plane removing due to drawing force.In addition, in shape variable mirror 10, overleaf 1sb be fixed with Y-axis foot plate surface 4c1, In the fixation at part other than the part of 4c2, also use identical with the fixation at back side 1sb and Y-axis foot plate surface 4c1,4c2 Method.
2 components, that is, X-axis component 5 is shape identical with Y-axis component 4, comprising: X-axis backboard 5a is reflected with circle The circle of 1 same diameter of mirror has thickness；And the face in 1 side of circular reflector of X-axis backboard 5a, it hangs down on X-axis backboard 5a The foot of the square shape directly formed i.e. X-axis foot 5b1,5b2.X-axis backboard 5a is the 2nd plate portion opposite with Y-axis backboard 4a.X-axis foot 5b1,5b2 are to extend, the 2nd foot abutted with the back side 1sb of circular reflector 1 from X-axis backboard 5a across Y-axis component 4. X-axis foot plate surface 5c1,5c2 of X-axis component 5 are fixed on the back side 1sb of circular reflector 1.The shape and Y-axis component 4 of X-axis component 5 Variform point be following 3 points: the length of X-axis foot 5b1,5b2 are not set than Y-axis foot 4b1,4b2 long, in X-axis backboard 5a It sets notch, be centrally formed with through hole 5f in X-axis backboard 5a.In the back side 1sb of circular reflector 1, by 2 Y-axis feet The line of the line segment linked between the position that 4b1,4b2 are respectively abutted and the position connection for respectively abutting 2 X-axis feet 5b1,5b2 Section intersects.
The diameter of through hole 5f is greater than the diameter of the 2nd piezoelectric actuator 2c, is less than or equal to piezoelectric actuator connecting component The diameter of 2b.Herein, X-axis backboard 5a and piezoelectric actuator connecting component 2b is by the side of piezoelectric actuator connecting component 2b Consolidated with the side of through hole 5f by screw fastening, soldering or the fixing means as the bonding of adhesives realization It is fixed, so that will not the stationary plane removing due to drawing force.Or it can also be by the X-axis component 5 of piezoelectric actuator connecting component 2b The face of 1 side of circular reflector in the face and X-axis backboard 5a of side by screw fasten, soldering or by adhesives realize bonding this The fixing means of sample is fixed, so that will not the stationary plane removing due to drawing force.In addition, passing through arbitrarily fixation side Method, the 2nd piezoelectric actuator 2c are configured to penetrate through through hole 5f.
The piezoelectric actuator connecting component 2b smaller than circular reflector 1 for diameter apart from changing unit 2, in circular reflector The 1st piezoelectric actuator 2a is fixed in 1 side, and the 2nd piezoelectric actuator 2c is fixed in 6 side of holding member.
In addition, X-axis component 5 and piezoelectric actuator connecting component 2b, it can be by cutting same workpiece And it is formed.
In addition, the face of 1 side of circular reflector of the 1st piezoelectric actuator 2a, be fixed on Y-axis backboard 4a's and circular reflector The center of 1 opposite side.1 side of circular reflector of holding member 6 is fixed in the face of 6 side of holding member of 2nd piezoelectric actuator 2c Holding member center 6e.
Holding member 6 is the circle with 1 same diameter of circular reflector, holding member center 6e and the 2nd piezoelectric actuator The face of 6 side of holding member of 2c is fixed.Holding member 6 protects Y-axis component 4 and X-axis component 5 via apart from changing unit 2 It holds.
Next, being illustrated to the deformation to saddle type of the mirror surface 1sf of circular reflector 1.Herein, below datum level The mode of stating is defined.Datum level is set on hold the face of 1 side of circular reflector of component 6.At the center of the datum level, it is fixed with One end of the 2nd piezoelectric actuator 2c apart from changing unit 2.The other end of 2nd piezoelectric actuator 2c is fixed on piezoelectric actuator company Relay part 2b, piezoelectric actuator connecting component 2b are fixed on the center of X-axis component 5.1 side of circular reflector of X-axis backboard 5a Face is set as the 2nd face.Also, in piezoelectric actuator connecting component 2b and the face opposite side that is fixed with the 2nd piezoelectric actuator 2c Face, is fixed with one end of the 1st piezoelectric actuator 2a, the other end of the 1st piezoelectric actuator 2a be fixed on Y-axis backboard 4a with circle The center in the face of 1 opposite side of reflecting mirror.Y-axis backboard 4a's is set as the 3rd face with the face of 1 opposite side of circular reflector.Also, it is fixed There is the back side 1sb of the circular reflector 1 of X-axis foot 5b1,5b2 and Y-axis foot 4b1,4b2 to be set as the 4th face.The center of Y-axis backboard 4a and The center of circular reflector 1 is all passed through at the center of X-axis backboard 5a, is present on the straight line vertical with circular reflector 1.Therefore, 1st piezoelectric actuator 2a and the 2nd piezoelectric actuator 2c are existed on the straight line.That is, the 1st piezoelectric actuator 2a and the 2nd piezoelectricity Actuator 2c makes the distance change at its both ends on the straight line vertical with circular reflector 1.Y-axis foot 4b1,4b2 and X-axis foot The length difference of 5b1,5b2 are set as length when making the length of the 1st piezoelectric actuator 2a and can change the centre of range in it It is identical.Voltage is applied to the 1st piezoelectric actuator 2a, becomes Y-axis foot 4b1,4b2 and X-axis foot in the length of the 1st piezoelectric actuator 2a In the state of the length difference of 5b1,5b2, Y-axis foot plate surface 4c1,4c2 and X-axis foot plate surface 5c1,5c2 are fixed on circular reflector 1 Back side 1sb.
Next, being illustrated to the control method of the 1st piezoelectric actuator 2a and the 2nd piezoelectric actuator 2c.Fig. 3 is to be used for The 1st concept map that the change in shape of shape variable mirror 10 shown in Fig. 2 is illustrated.As shown in figure 3, if to the 2nd piezoelectricity Actuator 2c applies voltage, then mobile towards +Z direction relative to datum level, the 2nd.If the 2nd is mobile towards +Z direction, with It accompanies, and the 3rd face and the 4th face are similarly moved, and relative to datum level, only the mirror surface 1sf of circular reflector 1 is moved to +Z direction It is dynamic.
Fig. 4 is the 2nd concept map being illustrated for the change in shape to shape variable mirror 10 shown in Fig. 2.Such as Fig. 4 institute Show, if keeping the 1st piezoelectric actuator 2a elongated, the 2nd face does not change relative to datum level, and the 3rd is mobile towards +Z direction.This When, in the back side 1sb of 4 faces, that is, circular reflector 1, it is fixed with the X-axis intersection point of X-axis foot plate surface 5c1,5c2 of X-axis component 5 Pxf1, Pxf2 be not mobile to +Z direction, be fixed with Yb axis intersection point Pyb1, Pyb2 of Y-axis foot plate surface 4c1,4c2 of Y-axis component 4 to +Z direction is mobile.
Fig. 5 is illustrated for the change in shape to circular reflector 1 possessed by shape variable mirror 10 shown in Fig. 2 Concept map.By carrying out change in shape as noted above, so that the mirror surface 1sf of circular reflector 1 is deformed into saddle as shown in Figure 5 Shape.But relative to datum level, mirror surface center 1e also changes to +Z direction.
Fig. 6 is the 3rd concept map being illustrated for the change in shape to shape variable mirror 10 shown in Fig. 2.Such as Fig. 6 institute Show, voltage is applied to the 2nd piezoelectric actuator 2c, keeps the 2nd piezoelectric actuator 2c elongated, correspondingly by the 1st piezoelectric actuator 2a is shortened to the opposite direction with the direction for keeping the 2nd piezoelectric actuator 2c elongated with 2 times.Then, the 2nd face relative to datum level and to +Z direction variation, the 3rd face change relative to datum level to -Z direction.In addition, the -Z direction relative to datum level in the 3rd face Variable quantity, it is identical as the variable quantity of the +Z direction relative to datum level in the 2nd face.Make Y-axis backboard apart from changing unit 2 as a result, 4a is mobile to -Z direction, and keeps X-axis backboard 5a mobile to +Z direction, is thus oppositely directed to make Y to each other in the Z-axis direction Axis backboard 4a and X-axis backboard 5a is mobile.It is oppositely directed to make Y-axis backboard 4a and X-axis to each other in the Z-axis direction apart from changing unit 2 Backboard 5a is mobile, make between the distance between Y-axis backboard 4a and circular reflector 1 and X-axis backboard 5a and circular reflector 1 away from From symmetrically changing.Herein, by so that the distance of one of 2 distances is elongated, and the distance of another one is made to shorten The case where mode is changed is set as changing 2 distances symmetrically.In addition, making Y-axis backboard 4a and circle apart from changing unit 2 The distance between the distance between reflecting mirror 1 and X-axis backboard 5a and circular reflector 1 are symmetrically changed with equal amount.Herein, By the distance for keeping one of the 2 distances elongated situation identical with the distance for making another one shorten, it is set as keeping 2 distances symmetrical Ground is changed with equal amount.Accompany with Y-axis backboard 4a to the movement of -Z direction, Y-axis foot 4b1,4b2 is mobile to -Z direction.With X-axis Backboard 5a accompanies to the movement of +Z direction, and X-axis foot 5b1,5b2 is mobile to +Z direction.At the back side of 4 faces, that is, circular reflector 1 In 1sb, it is fixed with the X-axis intersection point Pxf1 of the X-axis foot plate surface 5c1 of X-axis component 5 and is fixed with the X-axis foot plate surface 5c2 of X-axis component 5 X-axis intersection point Pxf2 to the variation of+Z-direction, be fixed with Yb axis intersection point Pyb1 and the fixation of the Y-axis foot plate surface 4c1 of Y-axis component 4 There is the Yb axis intersection point Pyb2 of the Y-axis foot plate surface 4c2 of Y-axis component 4 to -Z direction with the variable quantity phase with X-axis intersection point Pxf1, Pxf2 Same amount is changed.
Fig. 7 is illustrated for the change in shape to circular reflector 1 possessed by shape variable mirror 10 shown in Fig. 2 Concept map.By carrying out change in shape as described above, so that the mirror surface 1sf of circular reflector 1 is deformed into saddle as shown in Figure 7 Shape.Also, the distance relative to datum level of the Z-direction of mirror surface center 1e does not change.Herein, by the 1st piezoelectric actuator 2a Length relative to the length of the 2nd piezoelectric actuator 2c variation and be set as 2 times in opposite direction, but if to changing inversely, Then the mirror surface center 1e of circular reflector 1 becomes smaller relative to the variation of the Z-direction of datum level compared with indeclinable situation.Cause This, relative to the datum level of holding member 6, is also able to suppress circle even if the mirror surface 1sf of circular reflector 1 is made to be deformed into saddle type The variation of the Z-direction of the mirror surface center 1e of shape reflecting mirror 1.
In addition, the rigidity about circular reflector 1, Y-axis component 4, X-axis component 5 and holding member 6, shape can be allowed The degree of shape variation is adjusted material and construction.As an example, if Y-axis component 4, X-axis component 5 and holding member The rigid phase of 6 rigidity and circular reflector 1 is than small, then the deformation of circular reflector 1 is relative to as caused by the changing unit 2 The ratio between distance change is small, can be realized the control of the subtle deformation of circular reflector 1.
Next, exemplifying through the corrected feelings of astigmatism of the shape variable mirror 10 to the laser beam of laser processing device Condition and be illustrated.The detailed content of structure about laser processing device is described below, but is set as from laser oscillator The midway of transmission optical path until processing stand, is provided with shape variable mirror 10.In addition, even if being applied to laser processing device In the case where in addition, astigmatism is corrected by identical movement, since mirror reflection position does not change, light does not also occur Axle offset.Laser beam shape becomes ellipse there are astigmatism.Make columned shape variable mirror 10 itself with guarantor It holds in the lens barrel retainer of the fixation of component 6 and is rotated, the direction or short direction that grow the diameter of laser beam shape and shape The X-axis or Y-axis of variable mirror 10 are consistent.
In the case where the 1st piezoelectric actuator 2a and the 2nd piezoelectric actuator 2c is initial value, firstly, making the 2nd piezoelectric actuated Device 2c is elongated, and the 1st piezoelectric actuator 2a is made to shorten with 2 times of the variable quantity of the 2nd piezoelectric actuator 2c.At this point, if laser beam Shape is close to positive round from ellipse, then makes the 2nd piezoelectric actuator 2c elongated in this case, makes the 1st piezoelectric actuator 2a with the 2nd 2 times of the variable quantity of piezoelectric actuator 2c constantly shorten, and are adjusted to laser beam shape close to positive round.Conversely, causing the 2nd piezoelectricity Dynamic device 2c is elongated, in the case that the 1st piezoelectric actuator 2a is shortened with 2 times of the elongated amount of the 2nd piezoelectric actuator 2c, if Flat degree becomes larger, then after being rotated by 90 ° the shape variable mirror 10 in lens barrel retainer itself around axis center, makes the 2nd pressure Electric actuator 2c is elongated, and the 1st piezoelectric actuator 2a is made to shorten with 2 times of the variable quantity of the 2nd piezoelectric actuator 2c.As described above, Laser beam shape is monitored on one side, on one side changes the length of the 1st piezoelectric actuator 2a and the 2nd piezoelectric actuator 2c, into Row adjusts and makes laser beam shape close to positive round.
In addition, herein, the axial section shape of shape variable mirror 10 is set as round, but the present invention is not limited to This, may not be circle.But when being set as circle, as described above, becoming larger or becoming smaller according to flat degree, it can make Shape variable mirror 10 itself is rotated around axis center.In addition, about reflecting mirror, if it is considered that isotropism, then preferably circular, but The present invention is not limited to this, is also possible to oval or polygon.
In addition, in the above description, it will be used to determine 2 of the position of load to deform circular reflector 1 Axis, that is, X-axis and Y-axis are set as orthogonal, but the present invention is not limited to this, and X-axis and Y-axis can also be non-orthogonal.In the position for determining load In the case that 2 axis set are non-orthogonal, if keeping the position around axis, i.e. angle different, be deformed into maximum recess position and The angle at the position of maximum protrusion becomes 90 degree.Therefore, it will be set as Y-axis by the straight line at the position for being deformed into maximum recess, it will Straight line by being deformed into the position of maximum protrusion is set as X-axis, keep the length of any one of X-axis or Y-axis and the shape of light long or Short direction is consistent, by deforming circular reflector 1, so as to be corrected to astigmatism.
Embodiment 2.
To in the embodiment 1 by way of deforming circular reflector 1 apart from changing unit with piezoelectric actuator It is illustrated, but the present invention is not limited to this, explanation is in this way, can replace piezoelectric actuator such as in present embodiment 2 And deform circular reflector 1 by adjusting screw.In addition, drawing about the part being not particularly illustrated in present embodiment 2 With the explanation of embodiment 1.
Fig. 8 is the assembling figure being illustrated for the construction to shape variable mirror involved in embodiments of the present invention 2. In addition, in fig. 8, marking identical label about structure identical with Fig. 2.Shape variable mirror 10a shown in Fig. 8 has circle Reflecting mirror 1 and deformation force generation mechanism portion 3A.Deformation force generation mechanism portion 3A generates the power for making mirror surface 1sf be deformed into saddle type.Become Shape power generation mechanism portion 3A include Y-axis component 4A, X-axis component 5A, holding member 6A, as the adjusting screw apart from changing unit 7 and rotation stop component 8,8A.Adjusting screw 7 has the 1st screw 7a, the 2nd screw 7b and the 3rd screw 7c.1st screw 7a, the 2nd spiral shell Following closely 7b and the 3rd screw 7c, flight pitch is different each other.In addition, in the structure of Fig. 8, about it is corresponding with the structure of Fig. 2 not Same structure marks " A " in label.That is, the Y-axis component 4A in Fig. 8 is corresponding with the Y-axis component 4 in Fig. 2.
Y-axis component 4A has Y-axis backboard 4Aa and Y-axis foot 4Ab1,4Ab2.Y-axis backboard 4Aa is the back with circular reflector 1 The 1st face 1sb opposite plate portion.Y-axis foot 4Ab1,4Ab2 be from Y-axis backboard 4Aa to +Z direction extend and with circular reflector 1 The 1st foot that back side 1sb is abutted.Y-axis component 4A is with Y-axis component 4 shown in Fig. 2 the difference lies in that having Y-axis spiral shell at center Hole 4Af, other are identical as Y-axis component 4.In addition, Y-axis foot plate surface 4Ac1,4Ac2 are the bottom surfaces of Y-axis foot 4Ab1,4Ab2.In addition, Y-axis component 4A is provided with notch 4Ad1,4Ad2.4Ag1,4Ag2 are set in Y-axis backboard 4Aa and Y in Y-axis positioning parts hole The radial outside that axis screw hole 4Af is compared and the radial inside compared with notch 4Ad1,4Ad2.The cylinder of rotation stop component 8,8A Portion 8c, 8Ac are inserted into Y-axis positioning parts hole 4Ag1,4Ag2 respectively.
X-axis component 5A has X-axis backboard 5Aa and X-axis foot 5Ab1,5Ab2.X-axis backboard 5Aa is opposite with Y-axis backboard 4Aa The 2nd plate portion.X-axis foot 5Ab1,5Ab2 are the back from X-axis backboard 5Aa across Y-axis component 4A extension and with circular reflector 1 The 2nd foot that face 1sb is abutted.X-axis component 5A is with X-axis component 5 shown in Fig. 2 the difference lies in that replacing through hole at center 5f and there is X-axis screw hole 5Af, in the radial outside compared with X-axis screw hole 5Af and the inside compared with X-axis foot 5Ab1,5Ab2 With 2 location holes 5Ag1,5Ag2, other are identical as X-axis component 5.In addition, X-axis foot plate surface 5Ac1,5Ac2 be X-axis foot 5Ab1, The bottom surface of 5Ab2.
Holding member 6A and holding member 6 shown in Fig. 2 the difference lies in that there is the different guarantor of flight pitch at center Component screw hole 6Af is held, there is holding member location hole 6Ag1 corresponding with the location hole 5Ag1 of X-axis component 5A, have and is determined The corresponding holding member location hole 6Ag2 of position hole 5Ag2.Holding member 6A is via adjusting screw 7 and to Y-axis component 4A and X-axis Component 5A is kept.
Adjusting screw 7 have be screwed into the 1st screw 7a of Y-axis backboard 4Aa, the 2nd screw 7b being screwed into X-axis backboard 5Aa, Be screwed into the 3rd screw 7c of holding member 6A.1st screw 7a is corresponding with Y-axis screw hole 4Af.2nd screw 7b and X-axis screw hole 5Af is corresponding.3rd screw 7c is corresponding with holding member screw hole 6Af.1st screw 7a, the 2nd screw 7b and the 3rd screw 7c are formed There is flight pitch respectively different external screw thread.In addition, although it is not shown, but in the end of the 3rd side screw 7c, be formed with for assigning Give the hole of the torsion of rotary force.It is lateral opening that the hole of the torsion can exemplify six.Adjusting screw 7 makes Y-axis backboard 4Aa and circle The distance between the distance between reflecting mirror 1 and X-axis backboard 5Aa and circular reflector 1 symmetrically change.Adjusting screw 7 makes Y-axis The distance between backboard 4Aa and circular reflector 1 are with the distance between X-axis backboard 5Aa and circular reflector 1 symmetrically with identical Amount variation.
Rotation stop component 8 has the head 8d of cylindrical portion 8c and the one end setting in cylindrical portion 8c.Rotation stop component 8A has The head 8Ad of cylindrical portion 8Ac and the one end setting in cylindrical portion 8Ac.The outer diameter of cylindrical portion 8c is less than Y-axis positioning parts hole The diameter of the diameter of 4Ag1, the diameter of location hole 5Ag1 and holding member location hole 6Ag1, cylindrical portion 8c is can be by protecting It holds positioning parts hole 6Ag1 and is inserted into the length of the location hole 5Ag1 and Y-axis positioning parts hole 4Ag1 of X-axis component 5A, Neng Gou It is freely plugged in Y-axis positioning parts hole 4Ag1, location hole 5Ag1 and holding member location hole 6Ag1.The outer diameter of cylindrical portion 8Ac The diameter of diameter, location hole 5Ag2 less than Y-axis positioning parts hole 4Ag2 and the diameter of holding member location hole 6Ag2, the cylinder Portion 8Ac is location hole 5Ag2 and the Y-axis positioning parts hole that X-axis component 5A can be inserted by holding member location hole 6Ag2 The length of 4Ag2 can freely insert in Y-axis positioning parts hole 4Ag2, location hole 5Ag2 and holding member location hole 6Ag2 It pulls out.Head 8d is set as outer diameter greater than holding member location hole 6Ag1, if connected with holding member 6A, rotation stop component 8 stops Only.Head 8Ad is set as outer diameter greater than holding member location hole 6Ag2, if connected with holding member 6A, rotation stop component 8A Stop.
In addition, two rotation stop components are shown in FIG. 8, but the present invention is not limited to this, it can be to Y-axis as long as being set as The number that the direction of rotation of component 4A, X-axis component 5A and holding member 6A are constrained.
Next, being illustrated to the saddle type deformation of the mirror surface 1sf of circular reflector 1.Herein, by datum level with following Mode is defined.Datum level is set on hold the face of 1 side of circular reflector of component 6A.There is tune in the center configuration of the datum level The center of 3rd screw 7c of whole screw 7.On the center of 3rd screw 7c and the center of the 2nd screw 7b are in coaxial, the 2nd screw 7b Center configuration in the center of X-axis backboard 5Aa.The face of 1 side of circular reflector of X-axis backboard 5Aa is set as the 2nd face.2nd screw 7b It is on coaxially with the center of the 1st screw 7a, the center configuration of the 1st screw 7a is in the center of Y-axis backboard 4Aa.Moreover, Y-axis is carried on the back The center of plate 4Aa and the mirror surface center 1e of circular reflector 1 are configured on coaxial.Y-axis backboard 4Aa with 1 phase of circular reflector The face tossed about is set as the 3rd face.Also, it is fixed with the back of the circular reflector 1 of X-axis foot 5Ab1,5Ab2 and Y-axis foot 4Ab1,4Ab2 Face 1sb is set as the 4th face.
The center of circular reflector 1 is all passed through at the center of Y-axis backboard 4Aa and the center of X-axis backboard 5Aa, is present in and circle On the vertical straight line of shape reflecting mirror 1.Therefore, the 1st screw 7a, the 2nd screw 7b and the 3rd screw 7c are present on straight line.That is, the 1st Screw 7a, the 2nd screw 7b and the 3rd screw 7c make the distance change at its both ends on the straight line vertical with circular reflector 1.Y The length difference of axis foot 4Ab1 and X-axis foot 5Ab1 are set as, and are in and Y-axis backboard with the central portion of the length direction of the 1st screw 7a The central portion of the identical position of the central portion of the thickness direction of 4Aa and the length direction of the 2nd screw 7b is in and X-axis backboard 5Aa Thickness direction central portion identical position when length it is identical.The length difference of Y-axis foot 4Ab2 and X-axis foot 5Ab2 are set as, With the central portion of the length direction of the 1st screw 7a be in position identical with the central portion of thickness direction of Y-axis backboard 4Aa and The central portion of the length direction of 2nd screw 7b is in length when position identical with the central portion of thickness direction of X-axis backboard 5Aa It spends identical.
Next, being illustrated to the flight pitch of the 1st screw 7a, the 2nd screw 7b and the 3rd screw 7c.Herein, about 1st screw 7a is set as spacing width Pa, is set as spacing width Pb about the 2nd screw 7b, is set as spacing width about the 3rd screw 7c Pc.In embodiment 2, difference obtained from the spacing width Pb of the 2nd screw 7b is subtracted i.e. from the spacing width Pc of the 3rd screw 7c The spacing width Pc of 3 screw 7c of Pc-Pb, He Cong subtracts the i.e. Pc-Pa of difference obtained from the spacing width Pa of the 1st screw 7a It is positive and negative opposite.In the case where spacing width Pb is less than spacing width Pc, spacing width Pa is set as being greater than spacing width Pc.And And difference, that is, Pc-Pb the absolute value and spacing width Pc of spacing width Pc and spacing width Pb and the difference of spacing width Pa are The absolute value of Pc-Pa is equal.
Next, being illustrated to the deformation for making the circular reflector 1 when the rotation of adjusting screw 7.Firstly, if making to adjust Screw 7 rotates 1 week to the direction being screwed into, then adjusting screw 7 relative to datum level with the spacing width Pc amount of the 3rd screw 7c to+Z Direction change.At this point, X-axis component 5A is changed with the spacing width Pb amount of the 2nd screw 7b to -Z direction.That is, in the 3rd screw 7c Spacing width Pc greater than the 2nd screw 7b spacing width Pb in the case where, X-axis component 5A is relative to screw datum level with Pc- Pb amount changes to +Z direction.In addition, Y-axis component 4A is changed with the spacing width Pa amount of the 1st screw 7a to -Z direction.That is, In the case where spacing width Pa of the spacing width Pc less than the 1st screw 7a of 3 screw 7c, Y-axis component 4A is relative to screw benchmark Face is changed with Pc-Pa amount to -Z direction.At this point, the mirror surface 1sf of circular reflector 1 is deformed into saddle type.In addition, about mirror surface Mirror surface center 1e in 1sf inhibits the variation of the Z-direction relative to datum level.As a result, it is possible to obtain making circular reflector 1 Mirror surface 1sf be deformed into saddle type, and inhibited in the mirror surface 1sf of circular reflector 1 relative to the datum level of holding member 6A Mirror surface center 1e Z-direction variation shape variable mirror 10a.As long as in addition, the horizontal direction of screw datum level screw Face, then be not limited to specific face, screw datum level can exemplify the boundary i.e. platform of the 2nd screw 7b and the 3rd screw 7c The plane in rank portion.
As described above, the case where spacing width Pb is less than spacing width Pc and spacing width Pa is greater than spacing width Pc Under, adjusting screw 7 is rotated to the direction being screwed into towards +Z direction when deforming mirror surface 1sf and is used.In addition, in spacing width It in Pa, Pb, Pc, also can be set as, the spacing width Pb greater than spacing width Pc and the spacing width less than spacing width Pc Pa.In the case where spacing width Pb is greater than spacing width Pc and spacing width Pa is less than spacing width Pc, adjusting screw 7 exists It rotates mirror surface 1sf when deforming to the direction gone out towards -Z direction spiral shell and uses.
Next, exemplifying the laser by shape variable mirror 10a to laser processing device in the same manner as embodiment 1 The case where astigmatism of beam is corrected and be illustrated.The detailed content of structure about laser processing device is described below, But it is set as that the midway of the transmission optical path until from laser oscillator to processing stand is provided with shape variable mirror 10a.Make cylindric Shape variable mirror 10a itself rotated in the lens barrel retainer fixed with holding member 6A, make the straight of laser beam shape The direction of path length or short direction are consistent with the X-axis of shape variable mirror 10a or Y-axis.
Firstly, rotating adjusting screw 7 to the direction being screwed into.At this point, if laser beam shape from ellipse close to positive round, Adjusting screw 7 is rotated to the direction being screwed into this state, is adjusted to laser beam shape close to positive round.On the contrary, making to adjust spiral shell Nail 7 is rotated to the direction being screwed into, if flat degree becomes larger, makes the shape variable mirror 10a itself in lens barrel retainer After being rotated by 90 ° around axis center, rotate adjusting screw 7 to the direction being screwed into.As described above, being carried out on one side to laser beam shape Monitoring, be adjusted on one side laser beam shape close to positive round length.
In addition, herein, the axial section shape of shape variable mirror 10a is set as round, but the present invention does not limit In this, circle may not be.But when being set as circle, as described above, can become larger or become smaller according to flat degree and Rotate shape variable mirror 10a itself around axis center.In addition, about reflecting mirror, if it is considered that isotropism, then preferably justify Shape, but the present invention is not limited to this, also can be set to oval or polygon.
In addition, in the above description, in order to deform circular reflector 1, will be used to determine 2 axis of the position of load I.e. X-axis and Y-axis are set as orthogonal, but the present invention is not limited to this, and X-axis and Y-axis can also be non-orthogonal.In the position for determining load 2 axis it is non-orthogonal in the case where, if making different around the position of axis i.e. angle, be deformed into position and the maximum of maximum recess Angle between the position of protrusion becomes 90 degree.Therefore, it will be set as Y-axis by the straight line at the position for being deformed into maximum recess, it will Straight line by being deformed into the position of maximum protrusion is set as X-axis, keep the length of any one of X-axis or Y-axis and the shape of light long or Short direction is consistent, and by deforming circular reflector 1, thus, it is possible to be corrected to astigmatism.
Embodiment 3.
In the present embodiment, illustrating that the shape variable mirror 10a for above explained embodiment 2 has been added will adjust The mode of the lockable mechanism of 7 locking of screw.Fig. 9 is for the structure to shape variable mirror involved in embodiments of the present invention 3 Make the assembling figure being illustrated.Shape variable mirror 10b shown in Fig. 9 and shape variable mirror 10a's the difference lies in that having locking Component 9.In addition, marking identical label about with Fig. 2,8 identical structures in Fig. 9.
Shape variable mirror 10b shown in Fig. 9 has circular reflector 1 and deformation force generation mechanism portion 3B.Deformation force generates Mechanism part 3B generates the power for making mirror surface 1sf be deformed into saddle type.Deformation force generation mechanism portion 3B is generated in the deformation force of embodiment 2 Locking component 9 has been added in the structure of mechanism part 3A.Locking component 9 is the hexagon smaller than the outer diameter of holding member 6A and has Thickness has the lock-nut of internal screw thread corresponding with the 3rd screw 7c at center.In addition, locking component 9 is not limited to six The lock-nut of side shape, is also possible to circle.
In addition, in Fig. 9, the 3rd screw 7c is in the rotating range of imagination, from holding member 6A and circular reflector 1 The face of the opposite side in opposite face is protruded, and has the length that can be fastened with locking component 9.
As illustrated in present embodiment 3, even if shape variable mirror 10b becomes the mirror surface 1sf of circular reflector 1 Shape is saddle type, relative to the datum level of holding member 6A, also to the variation of the Z-direction of the mirror surface center 1e of circular reflector 1 into Row inhibits, and can be stablized the deflection of circular reflector 1 by the locking component 9 that the rotation to adjusting screw 7 carries out locking Ground maintains.
In embodiment 1 to 3, shape variable mirror 10,10a, 10b include the 1st component i.e. Y-axis for being fixed on back side 1sb Component 4,4A and the 2nd component i.e. X-axis component 5,5A for being fixed on back side 1sb.Y-axis foot plate surface 4c1,4Ac1,4c2,4Ac2 and X-axis Foot plate surface 5c1,5Ac1,5c2,5Ac2 are fixed on back side 1sb by screw fastening, soldering or adhesives, so that will not Due to drawing force, from the back side, 1sb is stripped.The present invention is not limited to the 1st components and the 2nd component to be fixed on back side 1sb.1st Component and the 2nd component can be not secured to back side 1sb and contact.In embodiment disclosed below 4 to 6, about comprising with the back side The structure of the shape variable mirror of the 1st component and the 2nd component of 1sb contact is illustrated.According to embodiment 4 to 6, shape is variable Mirror can make the circle that can not carry out the fixation of the 1st component and the 2nd component realized by screw fastening, soldering or adhesives anti- Mirror 1 is penetrated to deform in the same manner as embodiment 1 to 3.In addition, " contact " refers to that object is not fixed each other in embodiment 4 to 6 But it abuts.
Embodiment 4.
In embodiment 4, about by deforming circular reflector 1 apart from changing unit 2 with piezoelectric actuator Structure is illustrated.Figure 10 is illustrated for the construction to shape variable mirror involved in embodiments of the present invention 4 Assembling figure.In present embodiment 4, same label is marked to structural element identical with the structural element of embodiment 1 to 3. In present embodiment 4, omit and 1 to 3 repeat description of embodiment.
Shape variable mirror 10c shown in Fig. 10 has circular reflector 1 and deformation force generation mechanism portion 3C.Deformation force generates Mechanism part 3C includes apart from changing unit 2, Y-axis component 4C, X-axis component 5C and holding member 6.Piezoelectricity is included apart from changing unit 2 to cause Dynamic device connecting component 2b, is affixed to the fixed part of X-axis backboard 5Ca；1st piezoelectric actuator 2a, can be with Y-axis backboard 4Ca is abutted and is stretched between piezoelectric actuator connecting component 2b and Y-axis backboard 4Ca；And the 2nd piezoelectric actuator 2c, energy It enough abuts with holding member 6 and stretches between piezoelectric actuator connecting component 2b and holding member 6.Make Y-axis apart from changing unit 2 The distance between the distance between backboard 4Ca and circular reflector 1 and X-axis backboard 5Ca and circular reflector 1 symmetrically change. Make between the distance between Y-axis backboard 4Ca and circular reflector 1 and X-axis backboard 5Ca and circular reflector 1 apart from changing unit 2 Distance is symmetrically changed with equal amount.
Deformation force generation mechanism portion 3C generates the power for making mirror surface 1sf be deformed into saddle type.1 component, that is, Y-axis component 4C with It is contacted at the 2 of the corresponding position Yb axis intersection point Pyb1, Pyb2 shown in FIG. 1 with the back side 1sb of circular reflector 1.2nd component That is X-axis component 5C is contacted at the 2 of position corresponding with X-axis intersection point Pxf1, Pxf2 with the back side 1sb of circular reflector 1.X Shaft member 5C is configured across Y-axis component 4C.The position for contacting X-axis component 5C line segment connected to each other is projected to the back side The line segment of 1sb and the line segment parallel with Y-axis and by the position for contacting Y-axis component 4C line segment connected to each other and parallel with X-axis Line segment it is overleaf intersected with each other in 1sb.Holding member 6 is configured to identical as the diameter of circular reflector 1 or than round reflection The circle of the big diameter of the diameter of mirror 1.
Y-axis component 4C includes Y-axis backboard 4Ca, is with the circle of 1 same diameter of circular reflector and with thickness；With And Y-axis foot 4Cb1,4Cb2, it is formed at the face of 1 side of circular reflector in Y-axis backboard 4Ca, is vertically erected with the face The foot of square shape.Y-axis backboard 4Ca is the 1st plate portion opposite with the back side 1sb of circular reflector 1.Y-axis foot 4Cb1,4Cb2 be from The 1st foot that Y-axis backboard 4Ca is abutted to +Z direction extension with the back side 1sb of circular reflector 1.In the Z-axis direction, Y-axis foot The length of 4Cb1 and the equal length of Y-axis foot 4Cb2, therefore in the state that Y-axis component 4C and circular reflector 1 are contacted, Y-axis Backboard 4Ca is configured in parallel with circular reflector 1.Vertical with length direction, that is, Z-direction in Y-axis foot 4Cb1,4Cb2 is cutd open In face, Y-axis foot 4Cb1,4Cb2 become square.Y-axis foot plate surface 4Cc1,4Cc2 are the bottom surfaces of Y-axis foot 4Cb1,4Cb2.
Y-axis foot 4Cb1,4Cb2 are configured at the end of Y-axis backboard 4Ca.Y-axis foot 4Cb1,4Cb2 are set as Y-axis foot plate surface The line segment of the central link at the center and Y-axis foot plate surface 4Cc2 of 4Cc1 passes through the center of Y-axis backboard 4Ca.By Y-axis foot plate surface 4Cc1 Center and the line segment of central link of Y-axis foot plate surface 4Cc2 be the line segment parallel with Y-axis.At the center by Y-axis backboard 4Ca And it is parallel to the point of intersection of the line segment of X-axis and the periphery circle of Y-axis backboard 4Ca, it is provided with for passing through X-axis foot 5Cb1,5Cb2 Notch 4Cd1,4Cd2.In addition, notch 4Cd1,4Cd2 can also be not provided in present embodiment 4.Y-axis foot 4Cb1,4Cb2's Shape in the section vertical with length direction is not limited to square, is also possible to circle.Y-axis backboard 4Ca and Y-axis foot 4Cb1,4Cb2 can be integrally formed, are also possible to structure made of engaging the component being individually formed.
X-axis component 5C includes X-axis backboard 5Ca, is the circle of the diameter bigger than circular reflector 1 and has thickness；With And X-axis foot 5Cb1,5Cb2, it is formed at the face of 1 side of circular reflector in X-axis backboard 5Ca, is vertically erected with the face The foot of square shape.X-axis backboard 5Ca is the 2nd plate portion opposite with Y-axis backboard 4Ca.X-axis foot 5Cb1,5Cb2 are from X-axis backboard 5Ca Play the 2nd foot for extending across Y-axis component 4C and abutting with the mirror surface 1sf of circular reflector 1.From the center of X-axis backboard 5Ca to Length until X-axis foot 5Cb1,5Cb2, the diameter than the diameter of circular reflector 1 and Y-axis backboard 4Ca are long.In X-axis backboard 5Ca Center, be formed with through hole 5Cf identical with the through hole 5f of embodiment 1.
The length of X-axis foot 5Cb1,5Cb2 in Z-direction, the length than Y-axis foot 4Cb1,4Cb2 in Z-direction are long. The front end of +Z direction in X-axis foot 5Cb1,5Cb2, be provided with to the central side of X-axis backboard 5Ca protrude lug boss 5Ch1, 5Ch2.Lug boss 5Ch1,5Ch2 are located at +Z direction side compared with circular reflector 1.5Cj1,5Cj2 are lug bosses for lug boss bottom surface The face towards -Z direction in 5Ch1,5Ch2.Lug boss bottom surface 5Cj1,5Cj2 is contacted with the mirror surface 1sf of circular reflector 1.? In the back side 1sb of circular reflector 1, by the line segment linked between position that 2 Y-axis feet 4Cb1,4Cb2 are respectively abutted and by 2 The line segment intersection fork for the position connection that X-axis foot 5Cb1,5Cb2 are respectively abutted.Herein, by 2 X-axis feet 5Cb1,5Cb2 respectively In the line segment of the position connection of abutting, comprising making 2 X-axis feet 5Cb1,5Cb2 in the mirror surface 1sf by circular reflector 1 respectively The line segment of the position connection of abutting is projected to the line segment of back side 1sb.In addition, in Figure 10, X-axis foot 5Cb1,5Cb2 is by X-axis backboard It is discretely shown between the part of the side 5Ca and the part of the side lug boss 5Ch1,5Ch2.
Next, the deformation to the mirror surface 1sf of circular reflector 1 to saddle type is illustrated.In the following description, benchmark Face is set on hold the face of 1 side of circular reflector of component 6.2nd face is set as the face of 1 side of circular reflector in X-axis backboard 5Ca. 3rd face is set as the face of the side X-axis backboard 5Ca in Y-axis backboard 4Ca.4th face is set as the back side 1sb of circular reflector 1.
The center of Y-axis backboard 4Ca and the center of X-axis backboard 5Ca are all passed through the center of circular reflector 1 and are present in and circle On the vertical straight line of shape reflecting mirror 1.Deformation force generation mechanism portion 3C on this line becomes the length of the 1st piezoelectric actuator 2a Change, thus makes the interval variation of X-axis backboard 5Ca and Y-axis backboard 4Ca.Deformation force generation mechanism portion 3C makes the 2nd pressure on this line The length of electric actuator 2c changes, and thus makes the interval variation of holding member 6 and X-axis backboard 5Ca.
Deformation force generation mechanism portion 3C is configured to, circular reflector 1, Y-axis foot 4Cb1,4Cb2 and Y-axis back in Z-direction The difference of length between the combined length of plate 4Ca and the 2nd face and lug boss bottom surface 5Cj1,5Cj2, with the 1st piezoelectric actuator 2a Variable-length range in center length it is identical.The length of 1st piezoelectric actuator 2a becomes the length for being equivalent to the difference, Thus Y-axis foot plate surface 4Cc1,4Cc2 are contacted with back side 1sb.In addition, lug boss bottom surface 5Cj1,5Cj2 is contacted with mirror surface 1sf.
Next, being illustrated to the control method of the 1st piezoelectric actuator 2a and the 2nd piezoelectric actuator 2c.Figure 11 is to use In the 1st concept map that the change in shape to shape variable mirror 10c shown in Fig. 10 is illustrated.The change in shape shown in Figure 11 In, low voltage applies to the 2nd piezoelectric actuator 2c when by than original state, and the 2nd piezoelectric actuator 2c is thus made to compare initial shape State is short.Herein, original state refers to that the length of the 1st piezoelectric actuator 2a and the 2nd piezoelectric actuator 2c is respective variable length Spend the state of the length at the center in range.In Figure 11, show original state shape variable mirror 10c and with original state phase The shape variable mirror 10c shorter than the 2nd piezoelectric actuator 2c.2nd piezoelectric actuator 2c shortens, and thus the 2nd moves towards -Z direction It is dynamic.With the movement in the 2nd face, the 3rd face and the 4th is towards -Z direction movement.In this case, mirror surface 1sf is only moved to -Z direction It is dynamic.The movement in each face refer on the basis of datum level in the case where movement.
Figure 12 is the 2nd concept map being illustrated for the change in shape to shape variable mirror 10c shown in Fig. 10.Scheming In change in shape shown in 12, high voltage applies to the 1st piezoelectric actuator 2a when by than original state, thus makes the 1st piezoelectricity Actuator 2a is longer than original state.The shape variable mirror 10c of original state is shown in FIG. 12 and the 1st compared with original state The shape variable mirror 10c of piezoelectric actuator 2a long.Before and after the length variation for making the 1st piezoelectric actuator 2a, in Z-direction The position in the 2nd face does not change.The position of X-axis component 5C in Z-direction does not change, thus the lug boss bottom surface in mirror surface 1sf Position in the Z-direction of X-axis intersection point Pxf1, Pxf2 that 5Cj1,5Cj2 are contacted also does not change.1st piezoelectric actuator 2a becomes Long, thus the 3rd is mobile towards +Z direction.Y-axis component 4C is mobile to +Z direction, thus the Y-axis foot plate surface 4Cc1 in the 1sb of the back side, Yb axis intersection point Pyb1, Pyb2 that 4Cc2 is contacted is mobile to +Z direction.
Position in the Z-direction of X-axis intersection point Pxf1, Pxf2 does not change, and Yb axis intersection point Pyb1, Pyb2 is moved to +Z direction It is dynamic, thus as shown in figure 5, the mirror surface 1sf of circular reflector 1 is deformed into saddle type.But with the deformation of mirror surface 1sf, in mirror surface Heart 1e is mobile to +Z direction.
Figure 13 is the 3rd concept map being illustrated for the change in shape to shape variable mirror 10c shown in Fig. 10.Scheming In change in shape shown in 13, keep the 1st piezoelectric actuator 2a elongated compared with original state, make the 2nd piezoelectric actuator 2c and just Beginning state is compared and is shortened.In fig. 13 it is shown that the shape variable mirror 10c of original state and making the 1st piezoelectricity from original state Shape variable mirror 10c after the length of actuator 2a and the variation of the length of the 2nd piezoelectric actuator 2c.Make the 1st piezoelectric actuator 2a The length adjustment of elongation is 2 times of the length for shortening the 2nd piezoelectric actuator 2c.
It is mobile towards -Z direction by the shortening of the 2nd piezoelectric actuator 2c, the 2nd.Pass through stretching for the 1st piezoelectric actuator 2a Long and the 2nd piezoelectric actuator 2c shortening, the 3rd is mobile towards +Z direction.The extended length of 1st piezoelectric actuator 2a is the 2nd pressure 2 times of the shortening length of electric actuator 2c, thus to the movable length in the 3rd face of +Z direction, with the 2nd face to -Z direction Movable length becomes identical.It is mobile to +Z direction to make Y-axis backboard 4Ca apart from changing unit 2 as a result, and makes X-axis backboard 5Ca It is mobile to -Z direction, thus make Y-axis backboard 4Ca and X-axis backboard 5Ca each other to being oppositely directed to move in the Z-axis direction.Distance Changing unit 2 makes Y-axis backboard 4Ca and X-axis backboard 5Ca each other to being oppositely directed to move in the Z-axis direction, makes Y-axis backboard 4Ca and circle The distance between the distance between shape reflecting mirror 1 and X-axis backboard 5Ca and circular reflector 1 symmetrically change.In addition, apart from change More portion 2 makes the distance between Y-axis backboard 4Ca and circular reflector 1 and the distance between X-axis backboard 5Ca and circular reflector 1 couple Ground is claimed to change with equal amount.With the movement of from the Y-axis backboard 4Ca to +Z direction, Y-axis foot 4Cb1,4Cb2 is mobile to +Z direction.Companion With the movement of from the X-axis backboard 5Ca to -Z direction, X-axis foot 5Cb1,5Cb2 is mobile to -Z direction.
Y-axis foot 4Cb1,4Cb2 is mobile to +Z direction, and thus Y-axis foot plate surface 4Cc1,4Cc2 in the 1sb of the back side are contacted Yb axis intersection point Pyb1, Pyb2 is mobile to +Z direction.X-axis foot 5Cb1,5Cb2 is mobile to -Z direction, thus the protrusion in mirror surface 1sf X-axis intersection point Pxf1, Pxf2 that portion bottom surface 5Cj1,5Cj2 are contacted is mobile to -Z direction.To +Z direction Yb axis intersection point Pyb1, The movable length of Pyb2 is identical with the movable length of X-axis intersection point Pxf1, Pxf2 to -Z direction.
Figure 14 is carried out for the change in shape to circular reflector 1 possessed by shape variable mirror 10c shown in Fig. 10 The concept map of explanation.Yb axis intersection point Pyb1, Pyb2 is mobile to +Z direction, and X-axis intersection point Pxf1, Pxf2 is mobile to -Z direction, by The mirror surface 1sf of this circular reflector 1 is deformed into saddle type.In addition, to Yb axis intersection point Pyb1, Pyb2 of +Z direction movable length and Movable length to X-axis intersection point Pxf1, Pxf2 of -Z direction is identical, and thus the position of the mirror surface center 1e in Z-direction is constant Change.Shape variable mirror 10c is able to suppress the position of the mirror surface center 1e in the Z-direction associated with the deformation of mirror surface 1sf as a result, Variation.
The extended length of 1st piezoelectric actuator 2a may not be 2 times of the shortening length of the 2nd piezoelectric actuator 2c.It is logical It crosses with the elongation of the 1st piezoelectric actuator 2a and shortens the 2nd piezoelectric actuator 2c, or with the contracting of the 1st piezoelectric actuator 2a It is short and make the 2nd piezoelectric actuator 2c extend, so that shape variable mirror 10c is able to suppress the position in the Z-direction of mirror surface center 1e The variation set.
About the rigidity of circular reflector 1, Y-axis component 4C, X-axis component 5C and holding member 6, by material and construction It is adjusted and to become the degree for capableing of admissible set variation.As an example, if Y-axis component 4C, X-axis component 5C And the rigid phase of the rigidity of holding member 6 and circular reflector 1 than small, then the deformation of circular reflector 1 becomes relative to by distance The ratio between the distance change that more portion 2 realizes is small, can be realized the control of the subtle deformation of circular reflector 1.
Correction or laser processing of the shape variable mirror 10c in the astigmatism for the laser beam being applied in laser processing device In the case where the correction of the astigmatism in device other than device, it is able to suppress the variation of reflection position.Shape variable mirror as a result, 10c can reduce the light shaft offset as caused by the variation of reflection position.There are astigmatism, laser beam shape becomes ellipse Circle.It rotates shape variable mirror 10c about the z axis, makes laser beam shape The direction of elliptical long axis or the direction of short axle are consistent with the X-axis of shape variable mirror 10c or Y-axis.
Herein, so that the 2nd piezoelectric actuator 2c is shortened from original state, and make the 1st piezoelectric actuator 2a from initial shape State plays elongated, the deformation of trial circular reflector 1.The extended length of 1st piezoelectric actuator 2a is adjusted to the 2nd piezoelectric actuator 2c 2 times of shortening length.In the deformation laser beam shape by the circular reflector 1 from ellipse close to positive round the case where Under, without changing the rotation position of the shape variable mirror 10c in lens barrel retainer, shape variable mirror 10c is until laser beam shape Shape is adjusted the deflection of circular reflector 1 until becoming positive round.
On the other hand, the case where by the deformation of circular reflector 1, the elliptical flat degree of laser beam shape becomes larger Under, it is rotated by 90 ° shape variable mirror 10c in lens barrel retainer, attempts shortening and the 1st piezoelectricity by the 2nd piezoelectric actuator 2c The deformation of circular reflector 1 caused by the elongation of actuator 2a.As described above, laser beam shape is monitored by one side, Make the length of the 1st piezoelectric actuator 2a and the length variation of the 2nd piezoelectric actuator 2c on one side, thus to the shape of circular reflector 1 Shape is adjusted, so that laser beam shape is close to positive round.Shape variable mirror 10c can be with the contracting by the 2nd piezoelectric actuator 2c The adjustment that short and the 1st piezoelectric actuator 2a elongation is realized similarly, is implemented to be pressed by the elongation of the 2nd piezoelectric actuator 2c and the 1st The adjustment that the shortening of electric actuator 2a is realized.
The section shape vertical with Z-direction of shape variable mirror 10c involved in embodiment 4 becomes circle.Shape The section shape of variable mirror 10c is circle, and thus, it is possible to the variations of the flat degree based on laser beam shape, are easy to carry out The adjustment for rotating shape variable mirror 10c.In addition, in the present invention, the section shape of shape variable mirror 10c is also possible to justify Shape other than shape.
Embodiment 5.
In embodiment 5, about the piezoelectric actuator for replacing embodiment 4, pass through adjustment identical with embodiment 2 The structure that screw deforms circular reflector 1 is illustrated.Figure 15 is for shape involved in embodiments of the present invention 5 The assembling figure that the construction of variable mirror is illustrated.In present embodiment 5, to identical with the structural element of embodiment 1 to 4 Structural element marks same label.In present embodiment 5, omit and 1 to 4 repeat description of embodiment.
Shape variable mirror 10d shown in figure 15 has circular reflector 1 and deformation force generation mechanism portion 3D.Deformation force generates Mechanism part 3D generates the power for making mirror surface 1sf be deformed into saddle type.Deformation force generation mechanism portion 3D has Y-axis component 4D, X-axis component 5D, holding member 6A, as the adjusting screw 7 and rotation stop component 8,8A apart from changing unit.Adjusting screw 7, which has, to be screwed into Y-axis The 1st screw 7a of backboard 4Da, it is screwed into the 2nd screw 7b of X-axis backboard 5Da and is screwed into the 3rd screw 7c of holding member 6A. Flight pitch is different each other by 1st screw 7a, the 2nd screw 7b and the 3rd screw 7c.Adjusting screw 7 keeps Y-axis backboard 4Da and circle anti- The distance between the distance between mirror 1 and X-axis backboard 5Da and circular reflector 1 is penetrated symmetrically to change.Adjusting screw 7 carries on the back Y-axis The distance between plate 4Da and circular reflector 1 are with the distance between X-axis backboard 5Da and circular reflector 1 symmetrically with equal amount Variation.
Y-axis component 4D includes Y-axis backboard 4Da, is with the circle of 1 same diameter of circular reflector and with thickness；With And Y-axis foot 4Cb1,4Cb2.Y-axis backboard 4Da is the 1st plate portion opposite with the back side 1sb of circular reflector 1.Y-axis foot 4Cb1, 4Cb2 is the 1st foot for extending from Y-axis backboard 4Da to +Z direction and abutting with the back side 1sb of circular reflector 1.Y-axis screw hole 4Df is set to the center of Y-axis backboard 4Da.1st screw 7a is screwed into Y-axis screw hole 4Df.4Dg1,4Dg2 are set in Y-axis positioning parts hole It is placed in the radial outside compared with Y-axis screw hole 4Df in Y-axis backboard 4Da and the radial direction compared with notch 4Cd1,4Cd2 Side.Rotation stop component 8,8A cylindrical portion 8c, 8Ac be respectively inserted into Y-axis positioning parts hole 4Dg1,4Dg2.In addition, in this embodiment party In formula 5, notch 4Cd1,4Cd2 can also be not provided with.
X-axis component 5D includes X-axis backboard 5Da, is the diameter circle bigger than circular reflector 1 and has thickness；And X-axis foot 5Cb1,5Cb2.X-axis backboard 5Da is the 2nd plate portion opposite with Y-axis backboard 4Da.X-axis foot 5Cb1,5Cb2 are carried on the back from X-axis Plate 5Da plays the 2nd foot for extending across Y-axis component 4D and abutting with the back side 1sb of circular reflector 1.X-axis screw hole 5Df setting In the center of X-axis backboard 5Da.2nd screw 7b is screwed into X-axis screw hole 5Df.Location hole 5Dg1,5Dg2 are set to X-axis backboard 5Da In the radial outside compared with X-axis screw hole 5Df and the radial inside compared with X-axis foot 5Cb1,5Cb2.Rotation stop component 8, Cylindrical portion 8c, 8Ac of 8A is respectively inserted into location hole 5Dg1,5Dg2.
Holding member 6A keeps Y-axis component 4D and X-axis component 5D via adjusting screw 7.Rotation stop component 8,8A are anti- Only rotation offset about the z axis of the Y-axis component 4D and X-axis component 5D relative to holding member 6A.In addition, deformation force generation mechanism portion 3D is not limited to have 2 rotation stop components 8,8A.As long as the rotation offset of Y-axis component 4D and X-axis component 5D can be prevented, stop The number of rotation member may be any.
Next, the deformation to the mirror surface 1sf of circular reflector 1 to saddle type is illustrated.In the following description, benchmark Face is set on hold the face of 1 side of circular reflector of component 6A.2nd face is set as the face of 1 side of circular reflector in X-axis backboard 5Da. 3rd face is set as the face of the side X-axis backboard 5Da in Y-axis backboard 4Da.4th face is set as the back side 1sb of circular reflector 1.
The center of circular reflector 1 is all passed through at the center of Y-axis backboard 4Da and the center of X-axis backboard 5Da, is present in and circle On the vertical straight line of shape reflecting mirror 1.Deformation force generation mechanism portion 3D makes the 1st screw 7a's in Y-axis screw hole 4Df on this line The amount of being screwed into variation, thus makes the interval variation of X-axis backboard 5Da and Y-axis backboard 4Da.Deformation force generation mechanism portion 3D is in the straight line On make the amount of the being screwed into variation of the 3rd screw 7c in holding member screw hole 6Af, thus make between holding member 6A and X-axis backboard 5Da Every variation.
Deformation force generation mechanism portion 3D is configured to, circular reflector 1, Y-axis foot 4Cb1,4Cb2 and Y-axis back in Z-direction The difference of length between the combined length of plate 4Da and the 2nd face and lug boss bottom surface 5Cj1,5Cj2 is identical as setting length.If Measured length is set as following length, that is, the center of the Y-axis backboard 4Da on the center and Z-direction of the 1st screw 7a in Z-direction Unanimously, when the center of the 2nd screw 7b and in Z-direction is set as the center of the X-axis backboard 5Da in Z-direction, Z-direction On the 1st screw 7a counted from the 2nd face length.
Next, being illustrated to the flight pitch of the 1st screw 7a, the 2nd screw 7b and the 3rd screw 7c.In embodiment 5 In, difference i.e. Pc-Pb obtained from the spacing width Pb of the 2nd screw 7b is subtracted from the spacing width Pc of the 3rd screw 7c and from the 3rd The spacing width Pc of screw 7c subtracts the positive and negative opposite of the i.e. Pc-Pa of difference obtained from the spacing width Pa of the 1st screw 7a.? In the case where being greater than spacing width Pc away from width Pb, spacing width Pa is set as being less than spacing width Pc.Also, spacing width Pc and Difference, that is, Pc-Pb the absolute value and spacing width Pc of spacing width Pb and difference, that is, Pc-Pa absolute value phase of spacing width Pa Deng.In the following, in the setting of spacing width Pa, Pb, Pc, to the deformation of the circular reflector 1 when rotating adjusting screw 7 into Row explanation.
If rotating adjusting screw 71 week to the direction being screwed into towards +Z direction, adjusting screw 7 is relative to datum level It is moved to +Z direction with the length for being equivalent to the spacing width Pc of the 3rd screw 7c.At this point, X-axis backboard 5Da is relative to benchmark It is moved towards -Z direction with the length for being equivalent to the spacing width Pb of the 2nd screw 7b.Spacing width Pc is less than spacing width Pb, therefore the length that X-axis backboard 5Da is equivalent to Pc-Pb towards -Z direction relative to screw benchmark is moved.At this In, screw datum level is set as the face parallel with the horizontal direction i.e. direction XY in adjusting screw 7.Screw datum level is, for example, to constitute The plane of the step on the boundary of the 2nd screw 7b and the 3rd screw 7c.In addition, screw datum level is not limited to the plane, as long as with The face of horizontal direction parallel.
Y-axis backboard 4Da is carried out relative to the length for the spacing width Pa that benchmark is equivalent to the 1st screw 7a towards +Z direction It is mobile.Spacing width Pc be greater than spacing width Pa, therefore Y-axis backboard 4Da relative to screw benchmark towards +Z direction to be equivalent to The length of Pc-Pa is moved.With the movement of from the Y-axis backboard 4Da to +Z direction, Y-axis foot 4Cb1,4Cb2 is moved to +Z direction It is dynamic.With the movement of from the X-axis backboard 5Da to -Z direction, X-axis foot 5Cb1,5Cb2 is mobile to -Z direction.
Y-axis foot 4Cb1,4Cb2 is mobile to +Z direction, and thus Y-axis foot plate surface 4Cc1,4Cc2 in the 1sb of the back side are contacted Yb axis intersection point Pyb1, Pyb2 is mobile to +Z direction.X-axis foot 5Cb1,5Cb2 is mobile to -Z direction, thus the protrusion in mirror surface 1sf X-axis intersection point Pxf1, Pxf2 that portion bottom surface 5Cj1,5Cj2 are contacted is mobile to -Z direction.To -Z direction X-axis intersection point Pxf1, The movable length of Pxf2 is identical with the movable length of Yb axis intersection point Pyb1, Pyb2 to +Z direction.
X-axis intersection point Pxf1, Pxf2 is mobile to -Z direction, and Yb axis intersection point Pyb1, Pyb2 is mobile to +Z direction, thus justifies The mirror surface 1sf of shape reflecting mirror 1 is deformed into saddle type.In addition, to the movable length of X-axis intersection point Pxf1, Pxf2 of -Z direction and to+Z The movable length of Yb axis intersection point Pyb1, the Pyb2 in direction are identical, and thus the position of the mirror surface center 1e in Z-direction does not change. Shape variable mirror 10d is able to suppress the position of the mirror surface center 1e in the Z-direction associated with the deformation of mirror surface 1sf as a result, Variation.
As described above, the case where spacing width Pb is greater than spacing width Pc and spacing width Pa is less than spacing width Pc Under, adjusting screw 7 is rotated to the direction being screwed into towards +Z direction when deforming mirror surface 1sf and is used.In addition, in spacing width It in Pa, Pb, Pc, also can be set as, the spacing width Pb less than spacing width Pc and the spacing width greater than spacing width Pc Pa.In the case where spacing width Pb is less than spacing width Pc and spacing width Pa is greater than spacing width Pc, adjusting screw 7 exists It rotates mirror surface 1sf when deforming to the direction gone out towards -Z direction spiral shell and uses.
Correction or laser processing of the shape variable mirror 10d in the astigmatism for the laser beam being applied in laser processing device In the case where the correction of the astigmatism in device other than device, it is able to suppress the variation of reflection position.Shape variable mirror as a result, 10d can reduce the light shaft offset as caused by the variation of reflection position.
Embodiment 6.
In embodiment 6, about having added lockable mechanism identical with embodiment 3 in the structure of embodiment 5 Structure be illustrated.Figure 16 is illustrated for the construction to shape variable mirror involved in embodiments of the present invention 6 Assembling figure.In present embodiment 6, same mark is marked to structural element identical with the structural element of embodiment 1 to 5 Number.In present embodiment 6, omit and 1 to 5 repeat description of embodiment.
Shape variable mirror 10e shown in Figure 16 has circular reflector 1 and deformation force generation mechanism portion 3E.Deformation force generates Mechanism part 3E generates the power for making mirror surface 1sf be deformed into saddle type.Deformation force generation mechanism portion 3E is generated in the deformation force of embodiment 5 Locking component 9 has been added in the structure of mechanism part 3D.Locking component 9 is to comprising the 1st screw 7a, the 2nd screw 7b and the 3rd screw The rotation of the adjusting screw 7 of 7c carries out the lockable mechanism of locking.Shape variable mirror 10e is by locking component 9 to adjusting screw 7 Rotation carries out locking, and thus, it is possible to prevent from making round reflection due to making the rotation of the deformed adjusting screw 7 of circular reflector 1 The recovery of shape of mirror 1.Shape variable mirror 10e can steadily maintain the deformed state of circular reflector 1 as a result,.
Embodiment 7.
In present embodiment 7, to the detailed of the structure of the laser processing device with shape variable mirror 10 shown in Fig. 2 Content is illustrated.In addition, laser processing device can replace shape variable mirror 10 and have shape variable mirror 10a or shape can Become mirror 10b.Laser processing device can replace shape variable mirror 10 and have shape variable mirror 10c, shape variable mirror 10d or shape Shape variable mirror 10e.
Figure 17 is the figure for indicating a structural example of laser processing device involved in embodiments of the present invention 7.Figure 17 Shown in laser processing device 100 include laser oscillator 50, be the light source of laser beam LB；Microscope group is reflected, by including shape Multiple reflecting mirrors (not shown) of shape variable mirror 10 are constituted, and form the transmission light of the laser beam LB projected by laser oscillator 50 Road；2 automatically controlled scanning reflection mirrors 20, be used for autobiography in future lose the laser beam LB on road to the 2 dimension directions vertical with optical axis into Row scanning；Collector lens 60, by the laser beam LB scanned by automatically controlled scanning reflection mirror 20 before being irradiated to machined object 200 Carry out optically focused；Workbench 70 loads machined object 200；And driving mechanism 80, work is driven in 2 dimension directions Platform 70.
In addition, being connected with relative to 2 automatically controlled scanning reflection mirrors 20 to the galvanometer 21 for rotating driving each independently.
In addition, be connected with astigmatism adjustment device 11 in shape variable mirror 10, the astigmatism adjust device 11 with from laser generation Device 50 vibrates the state of the laser beam LB generated correspondingly, to the deflection of circular reflector 1 possessed by shape variable mirror 10 And the direction of shape variable mirror 10 itself is adjusted.
In addition, rotation number involved in astigmatism adjustment device 11 and angle adjustment, as an example, can pass through stepping Motor is realized.
In addition, if the deflection of circular reflector 1 and shape variable mirror 10 possessed by shape variable mirror 10 itself The adjusting of direction can also then be not provided with astigmatism adjustment device 11 by manually implemented.
Next, an action example to laser processing device 100 is illustrated.The laser projected by laser oscillator 50 Beam LB, by being transmitted comprising the multiple reflecting mirrors (not shown) including shape variable mirror 10, by 2 automatically controlled scanning reflection mirrors 20 into The dimension scanning of row 2, is positioned on machined object 200 by collector lens 60 and is irradiated.On machined object 200 by dotted line packet The rectangular area Rw enclosed shows the machining area carried out by light beam scanning.It is placed with the workbench 70 of machined object 200, is led to The driving mechanism 80 with the driving part 81,82 driven in mutually orthogonal directions is crossed, it can be vertical with beam axis 2 dimension directions ranges moved.
For the processing optical system, shape variable mirror 10 is used as one of reflecting mirror, school is carried out to astigmatism Just, thus laser machine when processing hole circularity improve, due to astigmatism reduction and the depth of focus expand.At this point, such as upper It states in embodiment 1 described in explanation, even if being corrected by shape variable mirror 10 to astigmatism, the mirror surface 1sf of circular reflector 1 In mirror surface center 1e be inhibited in the variation of short transverse, that is, Z-direction, therefore even if being corrected to astigmatism, also can to from The offset of the optical axis for the light beam that shape variable mirror 10 reflects is inhibited.
It, can also in the middle of the optical path other in addition, shape variable mirror 10 is without being centainly configured at position shown in Figure 17 The reflecting mirror application shape variable mirror 10 of position.
In addition, laser processing device 100 shown in Figure 17, both laser beam LB and workbench 70 are able to carry out 2 dimensions Scanning, but the present invention is not limited to this.Shape variable mirror 10 works for the astigmatism of processing optical system, for scanning Method is unaffected.That is, the case where laser beam LB, collector lens 60 and workbench 70 all carry out 1 dimension, 2 dimensions or 3 dimension scanning Down or they are still to be able to carry out the correction of the astigmatism using shape variable mirror 10 in the laser processing device without scanning.
In addition, laser beam LB can be any one of pulse, multiple-pulse or continuous oscillation.
In addition, by the processing that laser processing device 100 is realized be not limited to aperture processing, be also possible to cutting, deformation, Welding, heat treatment or label, as long as it is such by laser reality to implement burning, melting, distillation or discoloration to machined object 200 The processing now changed.
As described in the explanation in embodiment 1 to 6, mirror surface 1sf can be made to be deformed into saddle type without bonding, even if producing Raw vibration is also able to carry out fixed so that deflection does not change, therefore can be corrected to the astigmatism of laser beam LB and make to swash The machining accuracy of optical machining device 100 improves.In addition, in the above description, the deformed shape of circular reflector 1 is set It is illustrated for saddle type, but can also be set as half cone-shaped.
As described above, according to shape variable mirror 10,10a, 10b involved in embodiment 1 to 6,10c, The laser processing device 100 of 10d, 10e can be corrected the astigmatism of laser beam LB and make adding for laser processing device 100 Work precision improves.
Structure shown in above embodiment indicates an example of the contents of the present invention, also can with other known in Technology is combined, and in the range for not departing from purport of the invention, can also be omitted, be changed to a part of structure.
The explanation of label
1 circular reflector, 2 press apart from changing unit, the 1st piezoelectric actuator of 2a, 2b piezoelectric actuator connecting component, 2c the 2nd Electric actuator, 3,3A, 3B, 3C, 3D, 3E deformation force generation mechanism portion, 4,4A, 4C, 4D Y-axis component, 4a, 4Aa, 4Ca, 4Da Y Axis backboard, 4b1,4b2,4Ab1,4Ab2,4Cb1,4Cb2Y axis foot, 4c1,4c2,4Ac1,4Ac2,4Cc1,4Cc2Y axis foot plate surface, 4d1,4d2,4Ad1,4Ad2,4Cd1,4Cd2 notch, 4Af, 4Df Y-axis screw hole, 4Ag1,4Ag2,4Dg1,4Dg2Y shaft member are fixed Position hole, 5,5A, 5C, 5D X-axis component, 5a, 5Aa, 5Ca, 5Da X-axis backboard, 5b1,5b2,5Ab1,5Ab2,5Cb1,5Cb2X axis Foot, 5c1,5c2,5Ac1,5Ac2X axis foot plate surface, 5f, 5Cf through hole, 5Af, 5Df X-axis screw hole, 5Ag1,5Ag2,5Dg1, 5Dg2 location hole, 5Ch1,5Ch2 lug boss, 5Cj1,5Cj2 lug boss bottom surface, 6,6A holding member, 6Af holding member screw hole, 6Ag1,6Ag2 holding member location hole, 7 adjusting screws, the 1st screw of 7a, the 2nd screw of 7b, the 3rd screw of 7c, 8,8A rotation stop component, 8c, 8Ac cylindrical portion, the head 8d, 8Ad, 9 locking components, 10,10a, 10b, 10c, 10d, 10e shape variable mirror, the adjustment of 11 astigmatisms Device, 20 automatically controlled scanning reflection mirrors, 21 galvanometers, 50 laser oscillators, 60 collector lenses, 80 driving mechanisms, 81,82 driving portions Position, 100 laser processing devices, 200 machined objects.

Claims (8)

1. a kind of shape variable mirror comprising:
Reflecting mirror, with reflecting surface；
1st component, with the 1st plate portion opposite with the back side of the reflecting surface in the reflecting mirror and from the 1st plate Portion extends and 2 the 1st foots abutting with the reflecting mirror；
2nd component has the 2nd plate portion opposite with the 1st plate portion and from the 2nd plate portion across the 1st component 2 the 2nd foots for extending and being abutted with the reflecting mirror；
Apart from changing unit, make the distance between the 1st plate portion and described reflecting mirror and the 2nd plate portion and the reflecting mirror The distance between symmetrically change；And
Holding member keeps the 1st component and the 2nd component apart from changing unit via described,
In the reflecting mirror, by the line segment linked between position that 2 the 1st foots respectively abut and by described 2 The line segment intersection fork linked between the position that 2 foots respectively abut.
2. shape variable mirror according to claim 1, which is characterized in that
The back side is fixed in 2 the 1st foots and 2 the 2nd foots.
3. shape variable mirror according to claim 1, which is characterized in that
2 the 1st foots and the rear-face contact,
2 the 2nd foots and the reflection face contact.
4. shape variable mirror according to any one of claim 1 to 3, which is characterized in that
It is described to make the distance between described 2nd plate portion and the reflecting mirror and the 1st plate portion and the reflection apart from changing unit The distance between mirror is changed with equal amount.
5. shape variable mirror according to any one of claim 1 to 4, which is characterized in that
It is described to include fixed part apart from changing unit, it is fixed on the 2nd plate portion；1st piezoelectric actuator, with the 1st plate Portion abuts and can stretch between the fixed part and the 1st plate portion；And the 2nd piezoelectric actuator, with the holding Component is abutted and can be stretched between the fixed part and the holding member.
6. shape variable mirror according to any one of claim 1 to 4, which is characterized in that
It is described apart from changing unit have be screwed into the 1st screw in the 1st plate portion, the 2nd screw being screwed into the 2nd plate portion, Be screwed into the 3rd screw of the holding member,
From the spacing of the 3rd screw subtract difference obtained from the spacing of the 2nd screw and, from the spacing of the 3rd screw It subtracts poor positive and negative opposite obtained from the spacing of the 1st screw.
7. shape variable mirror according to claim 6, which is characterized in that
With lockable mechanism, which locks the rotation of the 1st screw, the 2nd screw and the 3rd screw Only.
8. a kind of laser processing device comprising:
Laser oscillator, oscillation generate laser beam；
Machined object is arranged in setting table；And
Optical path is transmitted, with multiple reflecting mirrors, the laser beam generated from laser oscillator oscillation is transmitted to described Until the machined object of setting table setting,
The multiple reflecting mirror is shape variable mirror described in any one of claims 1 to 7.
CN201780076464.2A 2016-12-16 2017-11-15 Shape-variable mirror and laser processing device Active CN110073251B (en)

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JP2016244572 2016-12-16
PCT/JP2017/041120 WO2018110191A1 (en) 2016-12-16 2017-11-15 Deformable mirror and laser processing device

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