CN110068122A - A kind of gas bath device - Google Patents
A kind of gas bath device Download PDFInfo
- Publication number
- CN110068122A CN110068122A CN201910218702.XA CN201910218702A CN110068122A CN 110068122 A CN110068122 A CN 110068122A CN 201910218702 A CN201910218702 A CN 201910218702A CN 110068122 A CN110068122 A CN 110068122A
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- Prior art keywords
- gas bath
- protrusion
- mould group
- hole
- substrate
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
- F24F13/02—Ducting arrangements
- F24F13/06—Outlets for directing or distributing air into rooms or spaces, e.g. ceiling air diffuser
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Devices For Medical Bathing And Washing (AREA)
- Drying Of Semiconductors (AREA)
Abstract
A kind of gas bath device provided in an embodiment of the present invention, comprising: substrate；The upper surface of gas bath mould group, the gas bath mould group is connect with the substrate, wherein the gas bath mould group includes multiple gas bath units, and the multiple gas bath unit is connected to end, and constitutes the gas bath mould group that center has first through hole；Supporting plate, the supporting plate are located at the lower surface of the gas bath mould group, and the gas bath mould group is fixedly connected in the substrate.It solves gas bath unit pipe compact in the prior art and gathers and occupy excessive space, and air-flow is easy to form the technical issues of blocking, causing the flow field disorder of working environment, and then influence the uniformitys of parameters such as temperature, air pressure.The how miscellaneous bring space hold of reduction pipeline and installation question are reached, mutual connection after multiple gas bath unit combinations forms the static pressure chamber of large area, improves the technical effect of the air-flow uniformity.
Description
Technical field
The present invention relates to micro environment control technical field more particularly to a kind of gas bath devices.
Background technique
Precision measurement, field of lithography in the optical parameter of semicon industry, the detection accuracy or electricity of high quality to be obtained
Sub- component, detection device or lithographic equipment have strict requirements to working environment at work, it is necessary to have and keep its work
The stability of environment, therefore require to carry out accurate control to working environment pressure, temperature, humidity, gas bath, guarantee pressure, temperature
Degree, the stabilization of humidity and the uniformity in flow field.Current general environmental control system, generallys use the integrated gas bath of standard
Unit is mostly the top for being distributed in environmental control system, carries out unified air-supply and control to entire sealed chamber.This method is suitable
The environmental Kuznets Curves of equipment for open architecture will form air-flow and hide but if the structure of equipment is excessively compact and complicated
Gear causes the flow field disorder of working environment, and then influences the uniformity of the parameters such as temperature, air pressure.
Apply for that inventor during technical solution, it is found that the above-mentioned prior art is at least deposited in realizing the embodiment of the present application
In following technical problem:
Compact gas bath unit pipe, which is gathered, in the prior art occupies excessive space, and air-flow is easy to form blocks, and causes
The flow field disorder of working environment, and then influence the uniformity of the parameters such as temperature, air pressure.
Summary of the invention
The embodiment of the invention provides a kind of gas bath device, solves gas bath unit pipe compact in the prior art and gather
Excessive space is occupied, and air-flow is easy to form blocks, the ginseng such as causes the flow field disorder of working environment, and then influence temperature, air pressure
The technical issues of several uniformitys.
In view of the above problems, the embodiment of the invention provides a kind of gas bath device, described device includes: substrate；Gas bath mould
The upper surface of group, the gas bath mould group is connect with the substrate, wherein the gas bath mould group includes multiple gas bath units, described
Multiple gas bath units are connected to end, and constitute the gas bath mould group that center has first through hole；Supporting plate, the supporting plate position
In the lower surface of the gas bath mould group, the gas bath mould group is fixedly connected in the substrate.
Further, the gas bath unit includes: air inlet, and the air inlet is located at the side of the gas bath unit；?
Discharge orifice, the equal discharge orifice are uniformly distributed on the lower surface of the gas bath unit.
Further, the substrate includes: optical component, and the optical component is arranged in the substrate and the gas bath mould
The one side of group picture connection, positioned at the first through hole position of the gas bath mould group；Flange, the flange are arranged on the substrate,
It positioned at the optic peripheral, is connect with the supporting plate, the gas bath mould group is fixed.
Further, described device further include: retaining ring, the retaining ring are arranged in the optical component and the flange
Between, it is located at optical component outer edge contour position, and connect with the gas bath mould group first through hole inner wall.
Further, described device further include: the first protrusion, first protrusion are located at the retaining ring lateral wall；The
Two protrusions, second protrusion are located at the gas bath mould group first through hole inner sidewall, and second protrusion and described first convex
It rises and matches, the retaining ring and the gas bath mould group are carried out by clamping by first protrusion and second protrusion.
Further, first protrusion is identical as the quantity of second protrusion.
Further, described device further include: third protrusion, the third protrusion are located at the retaining ring and the supporting plate
Joint face；Second through-hole, second through-hole is located at the supporting plate and the third protrusion corresponding section, so that the third is convex
Rising can pass through from second through-hole；4th protrusion, the 4th protrusion are located at second through-hole of supporting plate side, and institute
The 4th convex side face is stated with third through-hole, is passed through by bolt from the third through-hole, pushes the third protrusion, is made described
First protrusion is locked with second protrusion.
Further, the quantity of second through-hole and/or the third protrusion and/or the 4th protrusion is identical.
Further, the length of second through-hole is greater than the cross-section lengths of the third protrusion.
Said one or multiple technical solutions in the embodiment of the present application at least have following one or more technology effects
Fruit:
In a kind of gas bath device provided in an embodiment of the present invention, comprising: substrate；Gas bath mould group, the gas bath mould group it is upper
Surface is connect with the substrate, wherein the gas bath mould group includes multiple gas bath units, and the multiple gas bath unit joins end to end
It is logical, constitute the gas bath mould group that center has first through hole；Supporting plate, the supporting plate are located at the following table of the gas bath mould group
The gas bath mould group is fixedly connected by face in the substrate.It is close to solve gas bath unit pipe compact in the prior art
Cloth occupies excessive space, and air-flow is easy to form blocks, cause the flow field disorder of working environment, and then influence temperature, air pressure etc.
The technical issues of uniformity of parameter.The how miscellaneous bring space hold of reduction pipeline and installation question, multiple gas bath lists are reached
Mutual connection after member combination, forms the static pressure chamber of large area, improves the technical effect of the air-flow uniformity.
The above description is only an overview of the technical scheme of the present invention, in order to better understand the technical means of the present invention,
And it can be implemented in accordance with the contents of the specification, and in order to allow above and other objects of the present invention, feature and advantage can
It is clearer and more comprehensible, the followings are specific embodiments of the present invention.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is this hair
Bright some embodiments for those of ordinary skill in the art without creative efforts, can be with root
Other attached drawings are obtained according to these attached drawings.
Fig. 1 is a kind of structural schematic diagram of gas bath device of the embodiment of the present invention.
Fig. 2 is a kind of gas bath modular structure schematic diagram of gas bath device of the embodiment of the present invention.
Fig. 3 is a kind of retaining ring structural schematic diagram of gas bath device of the embodiment of the present invention.
Fig. 4 is a kind of retaining ring of gas bath device of the embodiment of the present invention and the partial enlarged view that gas bath Modular card closes.
Fig. 5 is the partial enlarged view that a kind of retaining ring of gas bath device of the embodiment of the present invention is connect with supporting plate.
Description of symbols: substrate 1, optical component 11, flange 12, gas bath mould group 2, gas bath unit 21, air inlet 211,
Equal discharge orifice 212, supporting plate 3, retaining ring 4, the first protrusion 5, the second protrusion 6, third protrusion 7, the second through-hole 8, the 4th protrusion 9, spiral shell
Bolt 10.
Specific embodiment
The embodiment of the invention provides a kind of gas bath device, the gas bath unit pipe for solving compact in the prior art is close
Cloth occupies excessive space, and air-flow is easy to form blocks, cause the flow field disorder of working environment, and then influence temperature, air pressure etc.
The technical issues of uniformity of parameter
Technical solution general thought provided by the invention is as follows: including: substrate；Gas bath mould group, the gas bath mould group it is upper
Surface is connect with the substrate, wherein the gas bath mould group includes multiple gas bath units, and the multiple gas bath unit joins end to end
It is logical, constitute the gas bath mould group that center has first through hole；Supporting plate, the supporting plate are located at the following table of the gas bath mould group
The gas bath mould group is fixedly connected by face in the substrate.
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art
Every other embodiment obtained without making creative work, shall fall within the protection scope of the present invention.
A kind of gas bath device of the embodiment of the present invention, referring to FIG. 1, described device includes: substrate 1, gas bath mould group 2 and support
Plate 3.
Specifically, substrate 1 is substantially I-shaped flaky texture, middle part rectangular area area is larger, the protrusion of quadrangle
On be respectively kept with the threaded hole of fixed substrate 1, bottom plate of the substrate 1 as device, there are the positions of subsequent parts installation thereon.
The upper surface of the gas bath mould group 2 is connect with the substrate 1, wherein the gas bath mould group 2 includes multiple gas bath lists
Member 21, the multiple gas bath unit 21 is connected to end, and constitutes the gas bath mould group 2 that center has first through hole；
Specifically, gas bath mould group 2 is assembled by multiple gas bath units 21, gas bath unit 21 be rectangle one it is angular in
The shape of 1/4 circle of recess, on each gas bath unit 21 position at circular arc both ends have can with assembled fine structure each other, 4
Gas bath unit 21 is connected to end be assembled together after, center formed circular through hole gas bath mould group 2, gas bath mould group 2 pacify
The suitable position on substrate, after being installed, the upper surface of gas bath mould group 2 is bonded with the lower surface of substrate 1, on substrate 1
Component from the position of circular through hole stretch out.
The supporting plate 3 is located at the lower surface of the gas bath mould group 2, and the gas bath mould group 2 is fixed in the substrate 1
Connection.
Specifically, supporting plate 3 is in cross, center is circular ring structure, the internal diameter and 2 centre bit of gas bath mould group of annulus
It is identical to set the circular through hole diameter to be formed, after cruciform pallet 3 is installed, upper surface is bonded with the lower surface of gas bath mould group 2,
Annulus and the circular through hole holding position of gas bath mould group 2 are concentric, and four sheets extend over multiple gas bath units 21 on annulus
The assembled seam that assembly is formed, so that structure is more stable reliable.Mutual connection after multiple gas bath units 21 combine, can form big face
Long-pending static pressure chamber improves the uniformity of air-flow, while four pieces of gas bath units 21 can supply respectively, can also unify to use one
Air inlet gas supply, can reduce the how miscellaneous bring space hold of pipeline and installation question in this way.
Further, the gas bath unit 21 includes: air inlet 211, and the air inlet 211 is located at the gas bath unit 21
Side；Equal discharge orifice 212, the equal discharge orifice 212 are uniformly distributed on the lower surface of the gas bath unit 21.
Specifically, gas bath unit 21 is the shape of an angular circle of sunken inside 1/4 of rectangle, inner hollow, each gas bath
The position at circular arc both ends, which has, on unit 21 to be located at the one of gas bath unit 21 with the fine structure of assembly each other, air inlet 211
Side, equal discharge orifice 212 are uniformly distributed on the lower surface of gas bath unit 21, play the role of uniform flow.
Further, the substrate 1 includes: optical component 11, the optical component 11 setting the substrate 1 with it is described
Gas bath mould group 2 as connection one side, positioned at the first through hole position of the gas bath mould group 2；Flange 12, the setting of flange 12 exist
On the substrate 1, it is located at 11 periphery of optical component, is connect with the supporting plate 3, the gas bath mould group 2 is fixed.
It is used to illuminate specifically, the centre of surface position of substrate 1 is provided with optical component 11, optical component on substrate 1
11 periphery is provided with flange 12, and the outer diameter of flange 12 is identical as the circular through hole internal diameter of gas bath mould group 2, and flange 12 is in protection
While optical component 11 of the heart, it is connect with supporting plate 3, gas bath mould group 2 is fixed on substrate 1.
Further, described device further include: retaining ring 4, the retaining ring 4 setting the optical component 11 with it is described
Between flange 12, it is located at the 11 outer edge contour position of optical component, and connect with the 2 first through hole inner wall of gas bath mould group.
Specifically, retaining ring 4 be thin circular ring structure, be mounted between optical component 11 and flange 12, retaining ring 4 it is straight
Diameter is identical as the outer diameter of 3 annulus of supporting plate, and the circular through hole inner edge profile contacts of the outer edge contour of retaining ring 4 and gas bath mould group 2,
Because of its distinctive structure, the position of fixed multiple gas bath units 21, and it is fixed with supporting plate 3.
Further, described device further include: the first protrusion 5, first protrusion 5 are located at 4 lateral wall of retaining ring；
Second protrusion 6, it is described second protrusion 6 be located at the 2 first through hole inner sidewall of gas bath mould group, and it is described second protrusion 6 with it is described
First protrusion 5 matches, by first protrusion 5 and second protrusion 6 by the retaining ring 4 and the gas bath mould group 2
Carry out clamping.
Specifically, the outer rim of retaining ring 4 is symmetrically multiple first convex 5 uniformly distributed, the position of each 21 circular arc of gas bath unit
With the second protrusion 6, after the completion of multiple 21 assembly of gas bath unit, multiple second protrusions 6 are symmetrically evenly arranged on the circle of gas bath mould group 2
In through-hole, after retaining ring 4 is installed, the second protrusion 6 fastens with the first protrusion 5, fixes multiple gas bath units 21.
Further, first protrusion 5 is identical as the quantity of second protrusion 6.
Specifically, to guarantee the firm of structure and smoothly installation, the first protrusion 5 is identical as the quantity of the second protrusion 6.
Further, described device further include: third protrusion 7, the third protrusion 7 be located at the retaining ring 4 with it is described
3 joint face of supporting plate；Second through-hole 8, second through-hole 8 are located at the supporting plate 3 and 7 corresponding section of third protrusion, so that
The third protrusion 7 can be passed through from second through-hole 8；4th protrusion 9, the 4th protrusion 9 are located at the supporting plate 3 the
Two through-holes, 8 side, and the described 4th raised 9 sides have third through-hole, are passed through, are pushed from the third through-hole by bolt 10
The third protrusion 7 locks first protrusion 5 with second protrusion 6.
Specifically, third protrusion 7 is located at the retaining ring 4 and 3 joint face of supporting plate, the direction of third protrusion 7 and first
The direction of protrusion 5 is vertical, and the second through-hole 8 is located at the intersection that annulus and sheet extend in cruciform pallet 3, supporting plate 3 and locking
After ring 4 is installed, third protrusion 7 is passed through from the second through-hole 8.There are the 4th protrusion 9, the 4th protrusion 9 in the side of second through-hole 8
Center has a through-hole, and bolt 10 reaches fixed pallet 3 and locking from being passed through in screw-in third protrusion 7 in the second through-hole 8
The effect of ring 4.
Further, the quantity of second through-hole 8 and/or the third protrusion 7 and/or the 4th protrusion 9 is identical.
Specifically, the second through-hole 8, third protrusion 7 and the 4th protrusion 9 are in number for the complete of guarantee structure and uniformly
It should be consistent in amount, to complete matched installation.
Further, the length of second through-hole 8 is greater than the cross-section lengths of the third protrusion 7.
Specifically, third protrusion 7 is passed through from the second through-hole 8 and is connect by bolt 10 with the 4th protrusion 9, to guarantee
Smoothly installation, the length of the second through-hole 8 should be greater than the cross-section lengths of third protrusion 7, allow third protrusion 7 smoothly from
Second through-hole 8 passes through.
Said one or multiple technical solutions in the embodiment of the present application at least have following one or more technology effects
Fruit:
In a kind of gas bath device provided in an embodiment of the present invention, comprising: substrate；Gas bath mould group, the gas bath mould group it is upper
Surface is connect with the substrate, wherein the gas bath mould group includes multiple gas bath units, and the multiple gas bath unit joins end to end
It is logical, constitute the gas bath mould group that center has first through hole；Supporting plate, the supporting plate are located at the following table of the gas bath mould group
The gas bath mould group is fixedly connected by face in the substrate.It is close to solve gas bath unit pipe compact in the prior art
Cloth occupies excessive space, and air-flow is easy to form blocks, cause the flow field disorder of working environment, and then influence temperature, air pressure etc.
The technical issues of uniformity of parameter.The how miscellaneous bring space hold of reduction pipeline and installation question, multiple gas bath lists are reached
Mutual connection after member combination, forms the static pressure chamber of large area, improves the technical effect of the air-flow uniformity.
Although preferred embodiments of the present invention have been described, it is created once a person skilled in the art knows basic
Property concept, then additional changes and modifications can be made to these embodiments.So it includes excellent that the following claims are intended to be interpreted as
It selects embodiment and falls into all change and modification of the scope of the invention.
Obviously, those skilled in the art can carry out various modification and variations without departing from this hair to the embodiment of the present invention
The spirit and scope of bright embodiment.In this way, if these modifications and variations of the embodiment of the present invention belong to the claims in the present invention
And its within the scope of equivalent technologies, then the present invention is also intended to include these modifications and variations.
Claims (9)
1. a kind of gas bath device, which is characterized in that described device includes:
Substrate；
The upper surface of gas bath mould group, the gas bath mould group is connect with the substrate, wherein the gas bath mould group includes multiple gas baths
Unit, the multiple gas bath unit are connected to end, and constitute the gas bath mould group that center has first through hole；
Supporting plate, the supporting plate are located at the lower surface of the gas bath mould group, and company is fixed in the substrate in the gas bath mould group
It connects.
2. device as described in claim 1, which is characterized in that the gas bath unit includes:
Air inlet, the air inlet are located at the side of the gas bath unit；
Equal discharge orifice, the equal discharge orifice are uniformly distributed on the lower surface of the gas bath unit.
3. device as described in claim 1, which is characterized in that the substrate includes:
The one side that the substrate is connect with the gas bath mould group picture is arranged in optical component, the optical component, is located at the gas
Bathe the first through hole position of mould group；
Flange, the flange setting on the substrate, are located at the optic peripheral, connect with the supporting plate, to described
Gas bath mould group is fixed.
4. device as described in claim 1, which is characterized in that described device further include:
Retaining ring, the retaining ring are arranged between the optical component and the flange, are located at the optical component outer rim wheel
Wide position, and connect with the gas bath mould group first through hole inner wall.
5. device as claimed in claim 4, which is characterized in that described device further include:
First protrusion, first protrusion are located at the retaining ring lateral wall；
Second protrusion, it is described second protrusion be located at the gas bath mould group first through hole inner sidewall, and it is described second protrusion with it is described
First protrusion matches, and is blocked the retaining ring and the gas bath mould group by first protrusion and second protrusion
Tightly.
6. device as claimed in claim 4, which is characterized in that first protrusion is identical as the quantity of second protrusion.
7. device as claimed in claim 5, which is characterized in that described device further include:
Third protrusion, the third protrusion are located at the retaining ring and the supporting plate joint face；
Second through-hole, second through-hole is located at the supporting plate and the third protrusion corresponding section, so that the third protrusion
It can be passed through from second through-hole；
4th protrusion, the 4th protrusion is located at second through-hole of supporting plate side, and the 4th convex side face has third
Through-hole is passed through from the third through-hole by bolt, pushes the third protrusion, and first protrusion and second protrusion are made
Locking.
8. device as claimed in claim 7, which is characterized in that second through-hole and/or the third protrusion and/or described
The quantity of 4th protrusion is identical.
9. device as claimed in claim 7, which is characterized in that the length of second through-hole is greater than the cross of the third protrusion
Cross-sectional length.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910218702.XA CN110068122B (en) | 2019-03-21 | 2019-03-21 | Air bath device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910218702.XA CN110068122B (en) | 2019-03-21 | 2019-03-21 | Air bath device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110068122A true CN110068122A (en) | 2019-07-30 |
| CN110068122B CN110068122B (en) | 2020-12-29 |
Family
ID=67366472
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910218702.XA Active CN110068122B (en) | 2019-03-21 | 2019-03-21 | Air bath device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110068122B (en) |
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| Publication number | Publication date |
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| CN110068122B (en) | 2020-12-29 |
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