CN110066981A - Formal dress substrate fixture and substrate stowage - Google Patents
Formal dress substrate fixture and substrate stowage Download PDFInfo
- Publication number
- CN110066981A CN110066981A CN201910520212.5A CN201910520212A CN110066981A CN 110066981 A CN110066981 A CN 110066981A CN 201910520212 A CN201910520212 A CN 201910520212A CN 110066981 A CN110066981 A CN 110066981A
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- Prior art keywords
- substrate
- groove portion
- plate
- slot
- diameter
- Prior art date
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- 239000000758 substrate Substances 0.000 title claims abstract description 95
- 238000007747 plating Methods 0.000 claims abstract description 45
- 238000005452 bending Methods 0.000 claims 1
- 239000011248 coating agent Substances 0.000 abstract description 5
- 238000000576 coating method Methods 0.000 abstract description 5
- 238000000034 method Methods 0.000 abstract description 4
- 238000010586 diagram Methods 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
Abstract
The present invention provides a kind of formal dress substrate fixture and substrate stowages, it is related to coating technique field, formal dress substrate fixture provided by the invention includes: substrate, pressing plate and connector, connector includes: extension and boss portion, extension is connect with substrate, and extension connects boss portion away from one end of substrate；Pressing plate is equipped with the first through slot and plated through holes, and the first through slot and plated through holes interval are arranged, and connector is plugged in the first through slot；First through slot includes: first end groove portion and the first diameter groove portion, and first end groove portion is connected to the first diameter groove portion, and extends through pressing plate；The groove width of first end groove portion is more than or equal to the diameter of boss portion, the groove width of first diameter groove portion is less than the diameter of boss portion, formal dress substrate fixture provided by the invention alleviates the technical issues of existing formal dress substrate fixture dismounting plating diaphragm inefficiency, the operation difficulty for reducing dismounting plating diaphragm is conducive to the working efficiency for improving dismounting plating diaphragm.
Description
Technical field
The present invention relates to coating technique fields, more particularly, to a kind of formal dress substrate fixture and substrate stowage.
Background technique
When using sputter coating machine, it usually needs plating diaphragm is attached on substrate.In the prior art generally using two-sided
The mode that glue sticking or fixture are fixed, realizes the connection of plating diaphragm and substrate.However double-sided adhesive can not only be produced in plated film on piece
Raw rubber trace, and plating rupture of diaphragm is be easy to cause when acting on disassembly plating diaphragm due to double-sided adhesive；Although can using fixture
Plating diaphragm is us shown firmly attached on substrate, and plated film piece is not easily caused to rupture, but due to fixture operation in the prior art
It is cumbersome, cause the disassembly efficiency for plating diaphragm lower.
Summary of the invention
The purpose of the present invention is to provide a kind of formal dress substrate fixture and substrate stowages, to alleviate existing formal dress
The technical issues of substrate fixture dismounting plating diaphragm inefficiency.
In a first aspect, formal dress substrate fixture provided by the invention, comprising: substrate, pressing plate and connector, the connection
Part includes: extension and boss portion, and the extension is connect with the substrate, and the extension connects away from one end of the substrate
Connect the boss portion；The pressing plate is equipped with the first through slot and plated through holes, first through slot and the plated through holes interval
Setting, the connector are plugged in first through slot；First through slot includes: first end groove portion and the first diameter groove portion, institute
It states first end groove portion to be connected to the first diameter groove portion, and extends through the pressing plate；The groove width of the first end groove portion is greater than
Equal to the diameter of the boss portion, the groove width of the first diameter groove portion is less than the diameter of the boss portion.
With reference to first aspect, the present invention provides the first possible embodiments of first aspect, wherein the pressing plate
The end face opposite with the substrate is equipped with side slot, circumferentially extending of the side slot along the plated through holes.
With reference to first aspect, the present invention provides second of possible embodiments of first aspect, wherein the boss
Portion is incremental to the radial dimension away from described extension one end from described extension one end is connected.
The possible embodiment of with reference to first aspect the first, the third the present invention provides first aspect are possible
Embodiment, wherein the formal dress substrate fixture includes middle clamp plate, the middle clamp plate be equipped with the second through slot, it is described in
Clamping plate is arranged between the substrate and the pressing plate, and the extension is plugged in second through slot.
The third possible embodiment with reference to first aspect, the 4th kind the present invention provides first aspect are possible
Embodiment, wherein second through slot includes: second end groove portion and the second diameter groove portion, the second end groove portion and described
The connection of two diameter groove portions, and the middle clamp plate is extended through, the groove width of the second end groove portion is more than or equal to the straight of the boss portion
Diameter, the groove width of the second diameter groove portion are less than the diameter of the boss portion.
The third possible embodiment with reference to first aspect, the 5th kind the present invention provides first aspect are possible
Embodiment, wherein the middle clamp plate includes: middle plate ontology, the first convex edge and the second convex edge, first convex edge and described
The setting of two convex edges interval, and connect respectively with the middle plate ontology, first convex edge and second convex edge enclose and set to form folder
Panel region, the radial dimension in the intermediate plate region are less than the radial dimension of the plated through holes, and first convex edge and described
Second convex edge is plugged in the side slot.
The 5th kind of possible embodiment with reference to first aspect, the 6th kind the present invention provides first aspect are possible
Embodiment, wherein the middle plate ontology is equipped with middle plate through-hole, and the middle plate through-hole is located in the intermediate plate region, and institute
The radial dimension for stating middle plate through-hole is less than the radial dimension in the intermediate plate region.
The third possible embodiment with reference to first aspect, the 7th kind the present invention provides first aspect are possible
Embodiment, wherein the side slot is towards being connected with the first limiting section on the side wall of the plated through holes axis；The middle clamp plate
It is equipped with the second limiting section compatible with first limiting section.
With reference to first aspect, the substrate towards the side of the pressing plate be equipped with outer protruding cylinder surface, the plated through holes with
The outer protruding cylinder surface face setting；The connector setting is more than or equal to two, for making the pressing plate along the outer dome
The circumference of cylinder is bent.
Second aspect, substrate stowage provided by the invention, include the following steps: for film plating substrate to be placed on substrate and
Between pressing plate；Boss portion is passed through into first end groove portion, and first end groove portion is made to be arranged extension；Along the axis perpendicular to connector
Direction sliding clamp slides into extension in the first diameter groove portion, and boss portion is made to be connected to sliding clamp deviates from substrate one
Side.
The embodiment of the present invention brings following the utility model has the advantages that including extension and boss portion using connector, extension with
Substrate connection, extension connect boss portion away from one end of substrate, and pressing plate is equipped with the first through slot and plated through holes, the first through slot
It is arranged with plated through holes interval, connector is plugged in the first through slot, and the first through slot includes first end groove portion and the first diameter groove portion, the
One end groove portion is connected to the first diameter groove portion, and extends through pressing plate, and the groove width of first end groove portion is more than or equal to the diameter of boss portion,
The groove width of first diameter groove portion is less than the mode of the diameter of boss portion, and the clamping to plating diaphragm may be implemented by substrate and pressing plate,
Target may pass through plated through holes and carry out plated film to plating diaphragm；Connector can be made to slide along the first through slot by sliding clamp, from
And pressing plate may be implemented and plate the dismounting of diaphragm, the operation difficulty of dismounting plating diaphragm is reduced, is conducive to improve dismounting plating diaphragm
Working efficiency.
To enable the above objects, features and advantages of the present invention to be clearer and more comprehensible, preferred embodiment is cited below particularly, and cooperate
Appended attached drawing, is described in detail below.
Detailed description of the invention
Technical solution in order to illustrate more clearly of the specific embodiment of the invention or in the related technology, below will be to specific
Attached drawing needed in embodiment or description of Related Art is briefly described, it should be apparent that, it is described below
Attached drawing is some embodiments of the present invention, for those of ordinary skill in the art, before not making the creative labor
It puts, is also possible to obtain other drawings based on these drawings.
Fig. 1 is the cross-sectional view one of formal dress substrate fixture provided in an embodiment of the present invention；
Fig. 2 is the schematic diagram one of the pressing plate of formal dress substrate fixture provided in an embodiment of the present invention；
Fig. 3 is the schematic diagram two of the pressing plate of formal dress substrate fixture provided in an embodiment of the present invention；
Fig. 4 is the partial enlarged view of location A in Fig. 3；
Fig. 5 is the schematic diagram of the connector of formal dress substrate fixture provided in an embodiment of the present invention；
Fig. 6 is the schematic diagram of formal dress substrate fixture provided in an embodiment of the present invention；
Fig. 7 is the schematic diagram of the middle clamp plate of formal dress substrate fixture provided in an embodiment of the present invention；
Fig. 8 is the cross-sectional view two of formal dress substrate fixture provided in an embodiment of the present invention；
Fig. 9 is the partial enlarged view of B location in Fig. 8；
Figure 10 is the cross-sectional view of the substrate of formal dress substrate fixture provided in an embodiment of the present invention.
Icon: 1- substrate；The outer protruding cylinder surface of 11-；2- pressing plate；The first through slot of 21-；211- first end groove portion；212- first
Diameter groove portion；22- plated through holes；The side 23- slot；The first limiting section of 24-；3- connector；31- extension；32- boss portion；It is pressed from both sides in 4-
Plate；Plate ontology in 41-；411- second end groove portion；412- the second diameter groove portion；Plate through-hole in 413-；The first convex edge 42-；43- second
Convex edge.
Specific embodiment
Technical solution of the present invention is clearly and completely described below in conjunction with attached drawing, it is clear that described implementation
Example is a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill
Personnel's every other embodiment obtained without making creative work, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that term " center ", "upper", "lower", "left", "right", "vertical",
The orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" be based on the orientation or positional relationship shown in the drawings, merely to
Convenient for description the present invention and simplify description, rather than the device or element of indication or suggestion meaning must have a particular orientation,
It is constructed and operated in a specific orientation, therefore is not considered as limiting the invention.In addition, term " first ", " second ",
" third " is used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can
To be mechanical connection, it is also possible to be electrically connected；It can be directly connected, can also can be indirectly connected through an intermediary
Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood at this with concrete condition
Concrete meaning in invention.
Embodiment one
As shown in Figure 1, Figure 2 and shown in Fig. 5, formal dress substrate fixture provided in an embodiment of the present invention, comprising: substrate 1, pressing plate
2 and connector 3, connector 3 include: extension 31 and boss portion 32, extension 31 is connect with substrate 1, extension 31 deviate from base
One end of plate 1 connects boss portion 32；Pressing plate 2 is equipped with the first through slot 21 and plated through holes 22, the first through slot 21 and plated through holes
22 interval settings, connector 3 are plugged in the first through slot 21；First through slot 21 includes: first end groove portion 211 and the first diameter groove portion
212, first end groove portion 211 is connected to the first diameter groove portion 212, and extends through pressing plate 2；The groove width of first end groove portion 211 is greater than
Equal to the diameter of boss portion 32, the groove width of the first diameter groove portion 212 is less than the diameter of boss portion 32.Wherein, section of the first through slot 21
Face shape be it is trapezoidal, first end groove portion 211 is close to section long side one end, and the first diameter groove portion 212 is close to section short side one end；Or
Person, first end groove portion 211 are first through hole, and the first diameter groove portion 212 is the second through-hole, the section shape of first through hole and the second through-hole
Shape is circle, and the aperture of first through hole is greater than the aperture of the second through-hole, and the section of the first through slot 21 is by intersecting two circles
Profile composition.
Specifically, the radial dimension of extension 31 is less than or equal to the groove width of the first diameter groove portion 212, and is less than boss portion 32
Plating diaphragm is placed between substrate 1 and pressing plate 2, and boss portion 32 is made to pass through first end groove portion 211 by diameter, until first end
Groove portion 211 is sheathed on extension 31, along the extending direction sliding clamp 2 of the first through slot 21, extension 31 is made to slide into the first diameter
In groove portion 212, so as to so that boss portion 32 is connected to the side that pressing plate 2 deviates from substrate 1, so that plating diaphragm is clamped in substrate 1
Between pressing plate 2, target may pass through plated through holes 22 and be adsorbed on plated film on piece.When needing to remove plating diaphragm, reverse slide pressing plate
2, slide into extension 31 in first end groove portion 211, so as to which pressing plate 2 is mobile towards the direction for deviating from substrate 1, so that even
Fitting 3 is extracted from the first through slot 21, and then can pick up plating diaphragm.
As shown in Figure 3 and Figure 4, the end face opposite with substrate 1 of pressing plate 2 is equipped with side slot 23, and side slot 23 is along plated through holes 22
Circumferentially extending.Wherein, the diameter of plated through holes 22 is less than the diameter of plating diaphragm, and the overall diameter of side slot 23 is greater than the straight of plating diaphragm
Diameter, when plating diaphragm is clamped between substrate 1 and pressing plate 2, side slot 23 can accommodate certain thickness film plating substrate, to avoid
Pressing plate 2 is excessive to the pressure of film plating substrate to cause film plating substrate to rupture or scratch.
As shown in figure 5, boss portion 32 is incremented by from connection 31 one end of extension to the radial dimension away from 31 one end of extension.
On the section by 31 axis of extension, the side of boss portion 32 is from one end close to extension 31 to separate extension 31
One end is tilted towards the direction away from 31 axis of extension.When connector 3 is sliding into the first diameter groove portion 212 from first end groove portion 211
When dynamic, the side of boss portion 32 squeezes one end that 212 side wall of the first diameter groove portion deviates from substrate 1, thus the side pair of boss portion 32
Pressing plate 2 plays the role of guiding.Final boss portion 32 is connected to the side end face that pressing plate 2 deviates from substrate 1, the first diameter groove portion 212
Sliding sleeve is set to extension 31, and pressing plate 2 applies pressure towards the direction of substrate 1, thus by the plated film between substrate 1 and pressing plate 2
Piece clamps.Wherein, extension 31 is fixedly connected with substrate 1 or is connect using being threadedly engaged, and is matched with extension 31 by screw thread
Conjunction is connected to for substrate 1, boss portion 32 can be made mobile to the direction close to or far from substrate 1 by rotary connector 3, into
And adjustable plating diaphragm amount of force for being subject to when being clamped.
As shown in fig. 6, formal dress substrate fixture includes middle clamp plate 4, middle clamp plate 4 is equipped with the second through slot, and middle clamp plate 4 is set
It sets between substrate 1 and pressing plate 2, extension 31 is plugged in the second through slot.Wherein, the second through slot and the first through slot 21 prolong in the same direction
It stretches, plating diaphragm is placed between middle clamp plate 4 and pressing plate 2；When needing to clamp plating diaphragm, mobile pressing plate 2 and middle clamp plate 4 make
Extension 31 is slided along the first through slot 21 and the second through slot, so that boss portion 32 be made to be connected to pressing plate 2 deviates from middle clamp plate 4 one
Side clamps so that pressing plate 2 and middle clamp plate 4 will plate diaphragm；When needing to dismantle plating diaphragm, mobile pressing plate 2 and middle clamp plate 4 make boss
32 face first end groove portion 211 of portion, is removed so as to plate diaphragm and pressing plate 2；In the process, plating diaphragm is in pressing plate 2 in
Between clamping plate 4, friction can be generated to avoid plated film piece and substrate 1 by middle clamp plate 4, so as to avoid plating diaphragm from scratching.
As shown in fig. 7, the second through slot includes: second end groove portion 411 and the second diameter groove portion 412, second end groove portion 411 and
The connection of two diameter groove portions 412, and middle clamp plate 4 is extended through, the groove width of second end groove portion 411 is more than or equal to the diameter of boss portion 32,
The groove width of second diameter groove portion 412 is less than the diameter of boss portion 32.When the first through slot 21 is sheathed on connector 3, first end groove portion
211 face second end groove portions 411,212 the second diameter of face groove portion 412 of the first diameter groove portion, when boss portion 32 and first end groove portion 211
When face, pressing plate 2 and middle clamp plate 4 can be removed from connector 3.
As shown in Figure 7, Figure 8 and Figure 9, middle clamp plate 4 includes: middle plate ontology 41, the first convex edge 42 and the second convex edge 43, and first
Convex edge 42 and the setting of the second convex edge 43 interval, and connect respectively with middle plate ontology 41, the first convex edge 42 is enclosed with the second convex edge 43 to be set
Intermediate plate region is formed, the radial dimension in intermediate plate region is less than the radial dimension of plated through holes 22, and the first convex edge 42 and second is convex
Side slot 23 is plugged in along 43.Wherein, the notch with intermediate plate regional connectivity is formd between the first convex edge 42 and the second convex edge 43,
When pressing plate 2 is separated with middle clamp plate 4, using laminar tool pass through notch can be plugged to plating diaphragm and middle plate ontology 41 it
Between, consequently facilitating plating diaphragm is tilted.Intermediate plate region is formed between first convex edge 42 and the second convex edge 43, and plating diaphragm is placed on
In intermediate plate region, limited by the first convex edge 42 and 43 pairs of the second convex edge plating diaphragm.In addition, when connector 3 is plugged in the
When one through slot 21 and the second through slot, the first convex edge 42 and the second convex edge 43 are plugged in side slot 23, convex to first by side slot 23
Along 42 and second convex edge 43 limited, to keep plating diaphragm in intermediate plate region and plated through holes 22 coaxial, so that target is logical
It crosses plated through holes 22 and sputters at plated film on piece.
As shown in fig. 7, middle plate ontology 41 is equipped with middle plate through-hole 413, middle plate through-hole 413 is located in intermediate plate region, and in
The radial dimension of plate through-hole 413 is less than the radial dimension in intermediate plate region.By on middle plate ontology 41 be arranged in plate through-hole 413,
To reduce the contact area of middle plate ontology 41 with plating diaphragm, so as to the abrasion of 41 pairs of plate ontology plating diaphragms in reducing.
Further, side slot 23 is towards being connected with the first limiting section 24 on the side wall of 22 axis of plated through holes；On middle clamp plate 4
Equipped with second limiting section compatible with the first limiting section 24.Wherein, the first limiting section 24 be convex block, the second limiting section be with it is convex
The compatible groove of block is matched by the first limiting section 24 with the second limiting section, so as to ensure pressing plate 2 and middle clamp plate 4
Link position it is accurate so that plated through holes 22 and intermediate plate region are coaxial；Alternatively, the first limiting section 24 is between 23 circumferential direction of side slot
Every multiple first convex blocks of setting, the second limiting section is along the first convex edge 42 and the second convex edge 43 circumferentially spaced multiple the
Two convex blocks, when the first convex edge 42 and the second convex edge 43 are plugged in side slot 23, the first convex block is staggered with the second convex block, from
And it can be rotated around the axis of plated through holes 22 relative to middle clamp plate 4 to avoid pressing plate 2.
Further, it is set on pressing plate 2 there are two plated through holes 22, and two interval of plated through holes 22 settings, pressing plate 2 is in
Two plating diaphragms can be clamped between clamping plate 4, target can pass through plated through holes 22 and sputter at two plated film on pieces respectively, thus
It realizes two plating diaphragms while dismounting and plated film is processed.
As shown in Figure 10, substrate 1 is equipped with outer protruding cylinder surface 11, plated through holes 22 and outer convex cylindrical towards the side of pressing plate 2
The setting of 11 face of face；The setting of connector 3 is more than or equal to two, for being bent pressing plate 2 along the circumference of outer protruding cylinder surface 11.When convex
When platform portion 32 is connected to a side end face of the pressing plate 2 away from substrate 1, boss portion 32 can make pressing plate 2 and plated film to the pressure of pressing plate 2
Piece is bent along the circumference of outer protruding cylinder surface 11, and when plating diaphragm rotates in the inner cavity of coating machine, curved plating diaphragm can
Level off to the drive shaft of coating machine coaxial, and then it is equal to ensure that each position of plated film on piece to the distance of target levels off to, by
This may insure that the coating film thickness of plated film on piece sputtering is uniform.
Embodiment two
Substrate stowage provided in an embodiment of the present invention includes the following steps: for film plating substrate to be placed on substrate 1 and pressure
Between plate 2；Boss portion 32 is passed through into first end groove portion 211, and first end groove portion 211 is made to be arranged extension 31；Along perpendicular to even
The axis direction sliding clamp 2 of fitting 3 slides into extension 31 in first diameter groove portion 212, and boss portion 32 is made to be connected to cunning
Dynamic pressure plate 2 deviates from the side of substrate 1.Pressing plate 2 is abutted by boss portion 32, so as to apply pressing plate 2 towards 1 direction of substrate
Active force, and then by plating diaphragm be clamped between substrate 1 and pressing plate 2.
Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention., rather than its limitations；To the greatest extent
Pipe present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that: its according to
So be possible to modify the technical solutions described in the foregoing embodiments, or to some or all of the technical features into
Row equivalent replacement；And these are modified or replaceed, various embodiments of the present invention technology that it does not separate the essence of the corresponding technical solution
The range of scheme.
Claims (10)
1. a kind of formal dress substrate fixture characterized by comprising substrate (1), pressing plate (2) and connector (3), the company
Fitting (3) includes: extension (31) and boss portion (32), and the extension (31) connect with the substrate (1), the extension
(31) one end away from the substrate (1) connects the boss portion (32)；
The pressing plate (2) is equipped with the first through slot (21) and plated through holes (22), and first through slot (21) and the plated film are logical
The setting of hole (22) interval, the connector (3) are plugged in first through slot (21)；
First through slot (21) includes: first end groove portion (211) and the first diameter groove portion (212), the first end groove portion (211)
It is connected to the first diameter groove portion (212), and extends through the pressing plate (2)；
The groove width of the first end groove portion (211) is more than or equal to the diameter of the boss portion (32), the first diameter groove portion (212)
Groove width be less than the boss portion (32) diameter.
2. formal dress substrate fixture according to claim 1, which is characterized in that the pressing plate (2) and the substrate (1)
Opposite end face is equipped with side slot (23), circumferentially extending of the side slot (23) along the plated through holes (22).
3. formal dress substrate fixture according to claim 1, which is characterized in that the boss portion (32) is from described in connection
Extension (31) one end is incremented by the radial dimension away from the extension (31) one end.
4. formal dress substrate fixture according to claim 2, which is characterized in that the formal dress substrate fixture includes
Middle clamp plate (4), the middle clamp plate (4) are equipped with the second through slot, and the middle clamp plate (4) is arranged in the substrate (1) and the pressure
Between plate (2), the extension (31) is plugged in second through slot.
5. formal dress substrate fixture according to claim 4, which is characterized in that second through slot includes: second end
Groove portion (411) and the second diameter groove portion (412), the second end groove portion (411) are connected to the second diameter groove portion (412), and point
Not Guan Chuan the middle clamp plate (4), the groove width of the second end groove portion (411) is more than or equal to the diameter of the boss portion (32), institute
The groove width for stating the second diameter groove portion (412) is less than the diameter of the boss portion (32).
6. formal dress substrate fixture according to claim 4, which is characterized in that the middle clamp plate (4) includes: middle plate sheet
Body (41), the first convex edge (42) and the second convex edge (43), first convex edge (42) and the setting of second convex edge (43) interval,
And connect respectively with the middle plate ontology (41), first convex edge (42) and second convex edge (43) enclose and set to form intermediate plate area
Domain, the radial dimension in the intermediate plate region are less than the radial dimension of the plated through holes (22), and first convex edge (42) and
Second convex edge (43) is plugged in the side slot (23).
7. formal dress substrate fixture according to claim 6, which is characterized in that during the middle plate ontology (41) is equipped with
Plate through-hole (413), the middle plate through-hole (413) are located in the intermediate plate region, and the radial dimension of the middle plate through-hole (413)
Less than the radial dimension in the intermediate plate region.
8. formal dress substrate fixture according to claim 4, which is characterized in that the side slot (23) is towards the plated film
The first limiting section (24) are connected on the side wall of through-hole (22) axis；
The middle clamp plate (4) is equipped with first limiting section (24) compatible second limiting section.
9. formal dress substrate fixture according to claim 1 or claim 7, which is characterized in that the substrate (1) is towards the pressure
The side of plate (2) is equipped with outer protruding cylinder surface (11), and the plated through holes (22) and outer protruding cylinder surface (11) face are arranged；
Connector (3) setting is more than or equal to two, for making the pressing plate (2) along the circumference of the outer protruding cylinder surface (11)
Bending.
10. a kind of substrate stowage, which comprises the steps of:
Film plating substrate is placed between substrate (1) and pressing plate (2)；
Boss portion (32) are passed through into first end groove portion (211), and first end groove portion (211) is made to be arranged extension (31)；
Along the axis direction sliding clamp (2) perpendicular to connector (3), extension (31) is made to slide into the first diameter groove portion (212)
It is interior, and boss portion (32) is made to be connected to the side that sliding clamp (2) deviate from substrate (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910520212.5A CN110066981B (en) | 2019-06-17 | 2019-06-17 | Forward-loading substrate positioning device and substrate loading method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910520212.5A CN110066981B (en) | 2019-06-17 | 2019-06-17 | Forward-loading substrate positioning device and substrate loading method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110066981A true CN110066981A (en) | 2019-07-30 |
| CN110066981B CN110066981B (en) | 2023-11-28 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910520212.5A Active CN110066981B (en) | 2019-06-17 | 2019-06-17 | Forward-loading substrate positioning device and substrate loading method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110066981B (en) |
Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
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| CN110066981B (en) | 2023-11-28 |
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