CN110043485B - Turbomolecular pump rotor and diffusion welding method thereof - Google Patents
Turbomolecular pump rotor and diffusion welding method thereof Download PDFInfo
- Publication number
- CN110043485B CN110043485B CN201910408773.6A CN201910408773A CN110043485B CN 110043485 B CN110043485 B CN 110043485B CN 201910408773 A CN201910408773 A CN 201910408773A CN 110043485 B CN110043485 B CN 110043485B
- Authority
- CN
- China
- Prior art keywords
- rotor
- wing plate
- turbomolecular pump
- ring
- step part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000003466 welding Methods 0.000 title claims abstract description 52
- 238000009792 diffusion process Methods 0.000 title claims abstract description 27
- 238000000034 method Methods 0.000 title claims abstract description 16
- 229910001069 Ti alloy Inorganic materials 0.000 claims description 11
- 239000000956 alloy Substances 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 10
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 9
- 239000010936 titanium Substances 0.000 claims description 9
- 229910052719 titanium Inorganic materials 0.000 claims description 9
- 239000007769 metal material Substances 0.000 claims description 6
- 239000002356 single layer Substances 0.000 claims description 6
- 238000004321 preservation Methods 0.000 claims description 4
- 229910000838 Al alloy Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000012530 fluid Substances 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 230000008646 thermal stress Effects 0.000 description 2
- 229910000883 Ti6Al4V Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/02—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
- B23K20/023—Thermo-compression bonding
- B23K20/026—Thermo-compression bonding with diffusion of soldering material
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/02—Selection of particular materials
- F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/32—Rotors specially for elastic fluids for axial flow pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/10—Metals, alloys or intermetallic compounds
- F05D2300/12—Light metals
- F05D2300/121—Aluminium
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/10—Metals, alloys or intermetallic compounds
- F05D2300/13—Refractory metals, i.e. Ti, V, Cr, Zr, Nb, Mo, Hf, Ta, W
- F05D2300/133—Titanium
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/10—Metals, alloys or intermetallic compounds
- F05D2300/17—Alloys
- F05D2300/173—Aluminium alloys, e.g. AlCuMgPb
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/10—Metals, alloys or intermetallic compounds
- F05D2300/17—Alloys
- F05D2300/174—Titanium alloys, e.g. TiAl
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
The invention discloses a turbomolecular pump rotor and a diffusion welding method thereof, and relates to the field of gas fluid. The turbomolecular pump rotor comprises a plurality of groups of rotor bodies which are stacked, wherein each group of rotor bodies comprises two rotor rings and a wing plate which are coaxially arranged, and the wing plate is arranged between the two rotor rings; the rotor rings are provided with a step part and a notch part, one end of the wing plate is used for being abutted against the side wall of the step part, the other end of the wing plate extends in a direction away from the step part, and when the wing plate is positioned between the two rotor rings, the notch part of the upper rotor ring is used for being sleeved on the step part of the lower rotor ring. The notch part of the upper rotor ring is sleeved on the step part of the lower rotor ring, and the wing plate is positioned between the two rotor rings, so that the turbo-molecular pump rotor can ensure good center precision without using any tool clamp for assistance when welding operation is performed, and the turbo-molecular pump rotor after welding can be ensured to have high dimensional precision.
Description
Technical Field
The invention relates to the field of gas fluid, in particular to a turbomolecular pump rotor and a diffusion welding method thereof.
Background
Since the rotor of the turbo molecular pump for ultra-high vacuum evacuation for the nuclear fusion apparatus and the like is a high-speed rotating body which rotates several tens of thousands of revolutions per minute to maintain the rotation balance of the entire rotor, it is necessary to ensure good accuracy of the entire rotor center shaft.
The manufacturing process of the traditional turbomolecular pump is as follows: firstly, a plurality of prefabricated rotor rings 2 and wing plates 1 are sequentially stacked and integrated, and finally are high-strength connected into a whole structure by adopting a welding method, and fig. 1 shows a longitudinal section of an assembly body before diffusion welding in the prior art. But the technical problems to be solved are as follows: 1) After the rotor ring 2 and the wing plate 1 are precisely machined, the outer diameter of the assembly fixture 3 is precisely machined in a manner of aligning with the inner diameter of the rotor to ensure coaxiality, otherwise, it is difficult to ensure that the rotor obtains sufficient center precision. 2) Due to the difference in thermal expansion coefficient between the titanium alloy rotor base and the steel assembly jig, when the temperature rises, the jig generates thermal stress that expands outwards, resulting in the weld interface being prone to unwelded defects, limited connection strength, and difficulty in ensuring dimensional accuracy of the rotor.
Disclosure of Invention
The invention aims to provide a turbomolecular pump rotor, which can ensure good center precision without introducing any fixture during installation and welding operation, thereby ensuring post-welding dimensional precision of the turbomolecular pump rotor.
Another object of the present invention is to provide a method for diffusion welding a turbomolecular pump rotor, which performs diffusion welding operation on the turbomolecular pump rotor, and can ensure good center accuracy without using a tooling fixture, thereby ensuring dimensional accuracy of the turbomolecular pump rotor itself.
Embodiments of the present invention are implemented as follows:
A turbomolecular pump rotor comprising:
the rotor comprises a plurality of groups of rotor bodies which are stacked, wherein each group of rotor bodies comprises two rotor rings and a wing plate which are coaxially arranged, and the wing plate is arranged between the two rotor rings;
the rotor ring has a step portion and a notch portion, one end of the wing plate is used for being abutted against the side wall of the step portion, the other end of the wing plate extends in a direction away from the step portion, and when one end of the wing plate is abutted against the side wall of the step portion, the notch portion of the rotor ring above can be sleeved on the step portion of the rotor ring below.
Further, in a preferred embodiment of the present invention, the wing plate has a blade portion and She Panbu, and She Panbu is disposed between the two rotor rings, and the end portion of She Panbu abuts against the side wall of the step portion, the blade portion extending in a direction away from the rotor rings.
Further, in a preferred embodiment of the present invention, the height of the stepped portion is greater than the thickness of the blisk portion.
Further, in a preferred embodiment of the present invention, the height of the stepped portion is equal to the sum of the depth of the notched portion and the thickness of the blisk portion.
Further, in the preferred embodiment of the present invention, the height of the step portion and the depth of the recess portion are both 1 to 50mm;
The thickness of the rotor ring and the wing plate is 1-100 mm.
Further, in a preferred embodiment of the present invention, the material of the rotor ring and the wing plate is any one of an aluminum metal material, an aluminum alloy material, a titanium metal material, and a titanium alloy material.
Further, in the preferred embodiment of the present invention, when the material of the rotor ring is titanium or titanium alloy material, the single layer thickness of the rotor ring is 1 to 100mm, and when the material of the wing plate is titanium or titanium alloy material, the single layer thickness of the wing plate is 1 to 50mm.
Further, in the preferred embodiment of the present invention, the step portion includes a plurality of protrusions arranged in a ring-shaped array, and a through groove for matching with a plurality of protrusions is formed around one end of the wing plate near She Panbu;
when the rotor ring and the wing plates are arranged in a stacked mode, the protrusions are in plug-in fit with the through grooves.
A method of diffusion welding a turbomolecular pump rotor, comprising:
The wing plate is arranged between the two rotor rings, and the notch part of the upper rotor ring can be sleeved on the step part of the lower rotor ring to obtain the rotor body;
Stacking a plurality of rotor bodies to obtain an assembly;
And performing diffusion welding operation on the assembly.
Further, in a preferred embodiment of the present invention, the performing the diffusion welding operation on the assembly specifically includes:
The assembly is put into a vacuum diffusion welding device, and is heated and pressurized under the vacuum degree of 1e -3～1e-4 Pa, the welding temperature is 950+/-10 ℃, the welding pressure is 3-5 MPa, and the heat preservation and pressure maintaining time is 2-3 h.
The embodiment of the invention has at least the following advantages or beneficial effects:
The embodiment of the invention provides a turbomolecular pump rotor, which comprises a plurality of groups of rotor bodies stacked, wherein each group of rotor bodies comprises two rotor rings and a wing plate which are coaxially arranged, and the wing plate is arranged between the two rotor rings; the rotor rings are provided with a step part and a notch part, one end of the wing plate is used for being abutted against the side wall of the step part, the other end of the wing plate extends in a direction away from the step part, and when the wing plate is positioned between the two rotor rings, the notch part of the upper rotor ring is used for being sleeved on the step part of the lower rotor ring. The notch part of the upper rotor ring is sleeved on the step part of the lower rotor ring, and the wing plate is positioned between the two rotor rings, so that the turbomolecular pump rotor can ensure good center precision without using any tool clamp for assistance when welding operation is performed, and the dimensional precision of the turbomolecular pump rotor can be ensured.
According to the diffusion welding method for the turbomolecular pump rotor, disclosed by the embodiment of the invention, the turbomolecular pump rotor is subjected to diffusion welding operation, and good center precision can be ensured without using a fixture, so that the post-welding dimensional precision of the turbomolecular pump rotor can be ensured.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic view of a prior art turbomolecular pump rotor;
FIG. 2 is a schematic diagram of a turbomolecular pump according to an embodiment of the present invention;
FIG. 3 is a schematic plan view of a first rotor ring according to an embodiment of the present invention;
FIG. 4 is a schematic cross-sectional view at A-A of FIG. 3;
FIG. 5 is a schematic plan view of a first wing panel according to an embodiment of the present invention;
FIG. 6 is a schematic cross-sectional view at B-B of FIG. 5;
FIG. 7 is a schematic plan view of a second rotor ring according to an embodiment of the present invention;
FIG. 8 is a schematic cross-sectional view at C-C of FIG. 7;
Fig. 9 is a schematic plan view of a second wing plate according to an embodiment of the present invention.
Icon: 1-wing plates; 2-rotor ring; 3-assembling a clamp; 100-turbomolecular pump rotor; a 101-rotor ring; 103-wing plates; 105-step; 107-notch portion; 109-She Panbu; 111-blade sections; 113-grooves; 115-bump; 116-through groove.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments of the present invention. The components of the embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.
In describing embodiments of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate an azimuth or a positional relationship based on that shown in the drawings, or an azimuth or a positional relationship in which the inventive product is conventionally put in use, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the apparatus or element to be referred to must have a specific azimuth, be configured and operated in a specific azimuth, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used merely to distinguish between descriptions and should not be construed as indicating or implying relative importance.
In the description of the embodiments of the present invention, it should also be noted that, unless explicitly specified and limited otherwise, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
In the present invention, unless expressly stated or limited otherwise, a first feature may include first and second features directly contacting each other, either above or below a second feature, or through additional features contacting each other, rather than directly contacting each other. Moreover, the first feature being above, over, and on the second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being below, beneath, and beneath the second feature includes the first feature being directly below and obliquely below the second feature, or simply indicates that the first feature is less level than the second feature.
Fig. 1 is a schematic structural diagram of a turbomolecular pump rotor according to the prior art. Referring to fig. 1, the process of manufacturing a turbomolecular pump rotor in the prior art is: the prefabricated rotor rings 2 and the wing plates 1 are sequentially stacked and integrated, and finally, the prefabricated rotor rings 2 and the wing plates 1 are connected into a whole structure in a high strength manner by adopting a welding method, so that the manufacturing process has the following problems that 1) after the rotor rings 2 and the wing plates 1 are precisely machined, the outer diameter of the assembly fixture 3 is precisely machined in a manner of aligning with the inner diameter of the rotor to ensure the coaxiality, otherwise, the rotor is difficult to ensure to obtain enough center precision. 2) Due to the difference in thermal expansion coefficient between the titanium alloy rotor base and the steel assembly jig 3, when the temperature rises, the jig generates thermal stress that expands outward, resulting in the weld interface being prone to have unwelded defects, limited connection strength, and difficulty in ensuring dimensional accuracy of the rotor.
Fig. 2 is a schematic structural diagram of a turbomolecular pump according to the present embodiment. Referring to fig. 2, in order to solve the problems in the prior art, the present embodiment provides a turbomolecular pump rotor 100 with improved structure. It comprises a plurality of sets of stacked rotor bodies, each set comprising two rotor rings 101 and one wing plate 103 coaxially arranged.
Fig. 3 is a schematic plan view of a first rotor ring 101 according to the present embodiment; FIG. 4 is a schematic cross-sectional view at A-A of FIG. 3; fig. 5 is a schematic plan view of the first wing plate 103 according to the present embodiment; fig. 6 is a schematic cross-sectional view at B-B of fig. 5. Referring to fig. 1 to 6, in detail, in each rotor body, a wing plate 103 is disposed between two rotor rings 101. The rotor rings 101 have a stepped portion 105 and a recessed portion 107, one end of the wing plate 103 is adapted to abut against a side wall of the stepped portion 105, the other end extends in a direction away from the stepped portion 105, and when the wing plate 103 is located between the two rotor rings 101, the recessed portion 107 of the upper rotor ring 101 is adapted to fit over the stepped portion 105 of the lower rotor ring 101. Through the notch part 107 of the upper rotor ring 101 is sleeved on the step part 105 of the lower rotor ring 101, and the wing plate 103 is positioned between the two rotor rings 101, so that the turbomolecular pump rotor 100 can ensure good center precision without using any fixture for assistance when welding operation is performed, and the dimensional precision of the turbomolecular pump rotor 100 can be ensured.
Referring to fig. 1 to 6 again, in the present embodiment, the wing plate 103 has blade portions 111 and She Panbu and She Panbu is disposed between the two rotor rings 101, and the end portions of the blade portions 111 are abutted with the side walls of the step portion 105, and She Panbu 109 extends in a direction away from the rotor rings 101. It should be noted that, the blade portion 111 may be configured as a complete ring, and when the wing plate 103 is disposed between the upper and lower rotor rings 101, the blade disc portion 109 of the wing plate 103 may obtain stable pressing force, so that subsequent welding operations may be facilitated.
FIG. 7 is a schematic plan view of a second rotor ring 101 according to an embodiment of the present invention; FIG. 8 is a schematic cross-sectional view at C-C of FIG. 7; fig. 9 is a schematic plan view of a second wing 103 according to an embodiment of the present invention. In other embodiments of the present invention, to further improve the center accuracy, the step portion 105 includes a plurality of protrusions 115 arranged in an annular array, and the recess portion 107 includes a plurality of grooves 113 arranged in an annular array; one end of the wing 103 near She Panbu is provided with a through slot 116 for mating with a plurality of projections 115. Through the annularly arranged protrusions 115 and the through grooves 116, when the rotor ring 101 and the wing plates 103 are matched, the center accuracy of the rotor ring and the wing plates is improved, and therefore the center accuracy of the whole assembly is effectively ensured.
Referring to fig. 1 to 9, in the present embodiment, in order to ensure that the notch portion 107 of the upper rotor ring 101 is sleeved on the step portion 105 of the lower rotor ring 101 during the assembly process of the assembly drawing, in the present embodiment, the height of the step portion 105 is greater than the thickness She Panbu a 109.
Preferably, to ensure a tight fit of the layers of rotor rings 101 and wings 103, the height of the step 105 is equal to the sum of the depth of the recess 107 and the thickness of She Panbu 109,109. The inner diameters of the stepped portions 105 and She Panbu 109,109 of the rotor ring 101 are machined to fit dimensions, and the height H1 of the stepped portion 105 is greater than She Panbu thickness D, while the notch portion 107 of the rotor ring 101 is machined to fit dimensions with the stepped portion 105 and the blisk portion 109 of the rotor ring 101. Through the above structural form, the turbomolecular pump rotor 100 can ensure good center accuracy without introducing any tool clamp in the diffusion welding process. In particular, the height of the step 105 and the height of the notch 107 are 1 to 50mm; the thickness of the rotor ring 101 and the wings 103 is 1 to 100mm. Of course, in other embodiments of the present invention, the heights of the step portion 105 and the notch portion 107 and the thicknesses of the rotor ring 101 and the wing plate 103 may be selected according to the requirements, and the implementation of the present invention is not limited.
In the present embodiment, the material of the rotor ring 101 and the wing plate 103 is preferably any one of an aluminum metal material, an aluminum alloy material, a titanium metal material, and a titanium alloy material. When the material of the rotor ring 101 is titanium or titanium alloy, the single-layer thickness of the rotor ring 101 is 1 to 100mm, and when the material of the wing plate 103 is titanium or titanium alloy, the single-layer thickness of the wing plate 103 is 1 to 50mm. In other embodiments of the present invention, different thicknesses may also be selected according to different materials, and embodiments of the present invention are not limited.
The embodiment of the invention also provides a diffusion welding method of the turbomolecular pump rotor 100, which comprises the following steps: the wing plate 103 is arranged between the two rotor rings 101, and the notch part 107 of the upper rotor ring 101 can be sleeved on the step part 105 of the lower rotor ring 101 to obtain a rotor body; stacking a plurality of rotor bodies to obtain an assembly; and performing diffusion welding operation on the assembly.
As a preferred scheme, in order to ensure the welding quality of the assembly, the rotor ring 101 and the wing plate 103 to be welded can be mechanically and chemically cleaned before welding, and then the rotor ring 101 and the wing plate 103 are sequentially overlapped and assembled into an integrated structure.
Wherein, carry out diffusion welding operation to the assembly specifically includes: the assembly is put into a vacuum diffusion welding device, and is heated and pressurized under the vacuum degree of 1e -3～1e-4 Pa, the welding temperature is 950+/-10 ℃, the welding pressure is 3-5 MPa, and the heat preservation and pressure maintaining time is 2-3 h.
The welding parameters specifically adopted in this embodiment are described in detail below:
In this embodiment, the rotor ring 101 and the wing plate 103 are made of Ti6Al4V. The assembly is put into a vacuum diffusion welding device, the vacuum degree is 1e -3 Pa, the welding temperature is 950 ℃, and the axial welding pressure of 4MPa is applied, and then the heat preservation and the pressure maintaining are carried out for 2 hours. Of course, in other embodiments of the present invention, the welding parameters may be selected according to the requirements, and embodiments of the present invention are not limited.
In summary, the turbomolecular pump rotor 100 according to the embodiment of the invention includes a plurality of sets of rotor bodies stacked together, each set of rotor bodies includes two rotor rings 101 and one wing plate 103 coaxially disposed, and the wing plate 103 is disposed between the two rotor rings 101; the rotor rings 101 have a stepped portion 105 and a recessed portion 107, one end of the wing plate 103 is adapted to abut against a side wall of the stepped portion 105, the other end extends in a direction away from the stepped portion 105, and when the wing plate 103 is located between the two rotor rings 101, the recessed portion 107 of the upper rotor ring 101 is adapted to fit over the stepped portion 105 of the lower rotor ring 101. Through the notch part 107 of the upper rotor ring 101 is sleeved on the step part 105 of the lower rotor ring 101, and the wing plate 103 is positioned between the two rotor rings 101, so that the turbomolecular pump rotor 100 can ensure good center precision without using any fixture for assistance when welding operation is performed, and the post-welding dimensional precision of the turbomolecular pump rotor 100 can be ensured.
According to the diffusion welding method for the turbomolecular pump rotor 100, which is provided by the embodiment of the invention, the turbomolecular pump rotor 100 is subjected to diffusion welding operation, and good center precision can be ensured without using a fixture, so that the post-welding dimensional precision of the turbomolecular pump rotor 100 can be ensured.
The above description is only of the preferred embodiments of the present invention and is not intended to limit the present invention, but various modifications and variations can be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (7)
1. A turbomolecular pump rotor comprising:
the rotor comprises a plurality of groups of rotor bodies which are stacked, wherein each group of rotor bodies comprises two rotor rings and one wing plate which are coaxially arranged, and the wing plates are arranged between the two rotor rings;
The rotor ring is provided with a step part and a notch part, one end of the wing plate is used for being in contact with the side wall of the step part, the other end of the wing plate extends in a direction away from the step part, and when one end of the wing plate is in contact with the side wall of the step part, the notch part of the rotor ring above is used for being sleeved on the step part of the rotor ring below;
the wing plate is provided with a blade part and She Panbu, the She Panbu is arranged between the two rotor rings, the end part of the She Panbu is abutted against the side wall of the step part, and the blade part extends in a direction away from the rotor rings;
the height of the step part is equal to the sum of the depth of the notch part and the thickness of the leaf disc part;
When the turbomolecular pump rotor is used for performing diffusion welding operation, a tool clamp is not required.
2. The turbomolecular pump rotor of claim 1 wherein:
the height of the step part and the depth of the notch part are 1-50 mm;
The thickness of the rotor ring and the wing plate is 1-100 mm.
3. The turbomolecular pump rotor of claim 2 wherein:
The material of the rotor ring and the wing plate is any one of an aluminum metal material, an aluminum alloy material, a titanium metal material and a titanium alloy material.
4. A turbomolecular pump rotor according to claim 3, wherein:
when the material of the rotor ring is titanium or titanium alloy material, the single-layer thickness of the rotor ring is 1-100 mm, and when the material of the wing plate is titanium or titanium alloy material, the single-layer thickness of the wing plate is 1-50 mm.
5. The turbomolecular pump rotor of claim 1 wherein:
The step part comprises a plurality of bulges which are arranged in an annular array, and a through groove which is used for being matched with the plurality of bulges is formed in one end, close to She Panbu, of the wing plate in an annular mode;
when the rotor ring and the wing plates are arranged in a stacked mode, the protrusions are in plug-in fit with the through grooves.
6. A diffusion welding method of a turbomolecular pump rotor according to any one of claims 1 to 5, comprising:
The wing plates are arranged between the two rotor rings, and the notch part of the upper rotor ring can be sleeved on the step part of the lower rotor ring to obtain a rotor body;
stacking a plurality of rotor bodies to obtain an assembly;
and performing diffusion welding operation on the assembly.
7. The method of diffusion welding a turbomolecular pump rotor of claim 6 wherein performing a diffusion welding operation on the assembly specifically comprises:
And (3) placing the assembly body into vacuum diffusion welding equipment, heating and pressurizing the assembly body under the vacuum degree of 1e -3~1e-4 Pa, wherein the welding temperature is 950+/-10 ℃, the welding pressure is 3-5 MPa, and the heat preservation and pressure maintaining time is 2-3 hours.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910408773.6A CN110043485B (en) | 2019-05-16 | 2019-05-16 | Turbomolecular pump rotor and diffusion welding method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910408773.6A CN110043485B (en) | 2019-05-16 | 2019-05-16 | Turbomolecular pump rotor and diffusion welding method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110043485A CN110043485A (en) | 2019-07-23 |
| CN110043485B true CN110043485B (en) | 2024-07-19 |
Family
ID=67282330
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910408773.6A Active CN110043485B (en) | 2019-05-16 | 2019-05-16 | Turbomolecular pump rotor and diffusion welding method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110043485B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105697395A (en) * | 2014-12-15 | 2016-06-22 | 普发真空有限公司 | Rotor assembly for a vacuum pump and method for producing the same |
| CN106735780A (en) * | 2017-01-18 | 2017-05-31 | 上海电气核电设备有限公司 | The joint design and welding method of a kind of tube butt welding |
| CN209838714U (en) * | 2019-05-16 | 2019-12-24 | 江苏博联硕焊接技术有限公司 | Turbo molecular pump rotor |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6163385A (en) * | 1984-09-05 | 1986-04-01 | Hitachi Ltd | Manufacture of rotor of turbo-molecular pump |
| JPH0683990U (en) * | 1993-05-06 | 1994-12-02 | セイコー精機株式会社 | Turbo molecular pump |
| DE19956015A1 (en) * | 1999-11-22 | 2001-05-23 | Pfeiffer Vacuum Gmbh | Turbomolecular pump |
| US6503050B2 (en) * | 2000-12-18 | 2003-01-07 | Applied Materials Inc. | Turbo-molecular pump having enhanced pumping capacity |
| DE102005006047A1 (en) * | 2005-02-10 | 2006-09-07 | Mtu Aero Engines Gmbh | Method for producing and / or repairing an integrally bladed rotor |
| JP4749054B2 (en) * | 2005-06-22 | 2011-08-17 | エドワーズ株式会社 | Turbomolecular pump and method of assembling turbomolecular pump |
| DE102007019949A1 (en) * | 2007-04-27 | 2008-10-30 | Mtu Aero Engines Gmbh | A semi-finished product for producing a repaired blade for a gas turbine and repair method for repairing a blade for a gas turbine |
| CN101254578A (en) * | 2008-04-09 | 2008-09-03 | 北京中科科仪技术发展有限责任公司 | Manufacturing method of turbine rotor of large-sized turbine molecular pump |
| JP2017044185A (en) * | 2015-08-28 | 2017-03-02 | 株式会社島津製作所 | Turbo molecular pump |
| JP6782141B2 (en) * | 2016-10-06 | 2020-11-11 | エドワーズ株式会社 | Vacuum pumps, as well as spiral plates, spacers and rotating cylinders on vacuum pumps |
| CN107953020B (en) * | 2017-11-23 | 2020-05-08 | 中国航发航空科技股份有限公司 | Clamp for electron beam welding of multistage blisk |
| GB2579665B (en) * | 2018-12-12 | 2021-05-19 | Edwards Ltd | Multi-stage turbomolecular pump |
-
2019
- 2019-05-16 CN CN201910408773.6A patent/CN110043485B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105697395A (en) * | 2014-12-15 | 2016-06-22 | 普发真空有限公司 | Rotor assembly for a vacuum pump and method for producing the same |
| CN106735780A (en) * | 2017-01-18 | 2017-05-31 | 上海电气核电设备有限公司 | The joint design and welding method of a kind of tube butt welding |
| CN209838714U (en) * | 2019-05-16 | 2019-12-24 | 江苏博联硕焊接技术有限公司 | Turbo molecular pump rotor |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110043485A (en) | 2019-07-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7516526B2 (en) | Spun metal form used to manufacture dual alloy turbine wheel | |
| US4873751A (en) | Fabrication or repair technique for integrally bladed rotor assembly | |
| US7543379B2 (en) | Method of manufacturing an article by applying heat and pressure, a method of connecting a pipe to a sealed assembly and a connector for use therein | |
| EP2221514B1 (en) | Method of manufacture of compliant plate seals | |
| US7581669B2 (en) | Tool for diffusion bonding of multi sheet metal, method of manufacturing structural part using the same, and structural part manufactured using the method | |
| CN109834396A (en) | Composite tooling and thrust chamber welding procedure for thrust chamber welding | |
| US8240999B2 (en) | Internally supported airfoil and method for internally supporting a hollow airfoil during manufacturing | |
| CN110043485B (en) | Turbomolecular pump rotor and diffusion welding method thereof | |
| US10337329B2 (en) | Method and system to repair outer periphery of a body | |
| EP3527322A1 (en) | Apparatus and method for selective bonding to form hollow components | |
| WO2012092978A1 (en) | Residual stress reduction in welding | |
| CN209838714U (en) | Turbo molecular pump rotor | |
| CN114453693A (en) | Contact reaction brazing process for connecting TZM alloy and graphite by pure zirconium layer | |
| CN209886890U (en) | Clamp for diffusion welding | |
| CN115582622A (en) | Laser welding system and method for a blast valve | |
| GB2257385A (en) | Making fan discs | |
| CN110005639B (en) | Composite turbomolecular pump rotor and preparation method thereof | |
| JP2005146962A (en) | Centrifugal impeller and its manufacturing method | |
| US20200338670A1 (en) | Verfahren zur Herstellung eines Rohres mit Verbindungsflansch | |
| CN117182475A (en) | Manufacturing method of outer ring of nuclear power five-stage partition plate | |
| CN115771029A (en) | Monel alloy rotor support welding method | |
| JPH081356A (en) | Hot isotropic pressurizing vessel | |
| CN118650325A (en) | Plunger pump cylinder body processing method and system | |
| JPS60234777A (en) | Manufacture of rotor for turbo molecular pump | |
| JPH05260721A (en) | Manufacture of damper for superconducting generator |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |