CN209886890U - Clamp for diffusion welding - Google Patents
Clamp for diffusion welding Download PDFInfo
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- CN209886890U CN209886890U CN201920706379.6U CN201920706379U CN209886890U CN 209886890 U CN209886890 U CN 209886890U CN 201920706379 U CN201920706379 U CN 201920706379U CN 209886890 U CN209886890 U CN 209886890U
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Abstract
The utility model discloses a diffusion welding uses anchor clamps relates to the welding technology field. This anchor clamps for diffusion welding are used for centre gripping turbo molecular pump rotor when diffusion welding operation, and turbo molecular pump rotor includes rotor ring and the blade that the multiunit piles up in turn, and the anchor clamps for diffusion welding are including the shape anchor clamps of preapring for an unfavorable turn of events, and it sets up in the outside of turbo molecular pump rotor, and preapring for an unfavorable turn of events shape anchor clamps include with a plurality of circumference spacing recesses that a plurality of blades one-to-one set up, circumference spacing recess is used for the blade of centre gripping turbo molecular pump rotor to the axial and the circumference of restriction blade warp. The fixture for diffusion welding can limit high-temperature creep deformation in the rotor welding process, so that the welding strength and the size precision of the welded rotor are guaranteed, and the turbine molecular pump rotor has the characteristics of high performance and corrosion resistance.
Description
Technical Field
The utility model relates to the field of welding technique, particularly, relate to a diffusion welds and uses anchor clamps.
Background
With the increasing industrial demands of the ultra-high vacuum turbo molecular pump in the industrial fields of high-energy accelerators, controllable thermonuclear reaction devices, heavy particle accelerators, high-grade electronic device manufacturing and the like, a new turbo molecular pump manufacturing method with reliable mechanical properties and good economical efficiency is urgently needed to be developed. Vacuum diffusion welding is a manufacturing method particularly suitable for processing a turbomolecular pump, and can reliably ensure the air extraction performance, the operating efficiency and the corrosion resistance of the turbomolecular pump.
The traditional turbomolecular pump rotor is formed by welding a large number of titanium or titanium alloy blades and titanium or titanium alloy rotor rings which are processed separately in advance into an integral structure after being alternately stacked. The diffusion welding is an ideal method for welding the rotor of the turbomolecular pump because the diffusion welding head has high dimensional accuracy and high bonding strength. However, since the formation of the diffusion bonding joint depends on the high-temperature diffusion process of atoms after the bonding interface is tightly bonded, in order to ensure good welding quality, it is necessary to increase welding pressure to make the bonding interface tightly bonded, it is necessary to increase welding temperature to activate atom diffusion, it is necessary to extend welding time to ensure that the atom diffusion process is sufficiently performed, which also brings technical problems that the titanium or titanium alloy blade has large crystal grain growth, material softening, large welding deformation, difficult dimensional accuracy guarantee, and the like under high temperature for a long time.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a diffusion welding is with anchor clamps, this diffusion welding is with anchor clamps can restrict the welding deformation of rotor and the high temperature creep deformation of blade, has guaranteed the postweld size precision and the joint strength of rotor, and then guarantees effectively that the postweld rotor has high performance, corrosion resistance's characteristic.
The embodiment of the utility model is realized like this:
a jig for diffusion welding for holding a turbomolecular pump rotor during diffusion welding operation, the turbomolecular pump rotor comprising a plurality of sets of alternately stacked rotor rings and blades, the jig for diffusion welding comprising:
the anti-deformation clamp comprises a plurality of circumferential limiting grooves which are arranged in a one-to-one correspondence mode with a plurality of blades, and the circumferential limiting grooves are used for clamping the blades of the turbomolecular pump rotor so as to limit deformation of the blades in the circumferential direction and the height direction.
Further, in the preferred embodiment of the present invention, the anti-deformation clamp includes a plurality of clamp bodies stacked together, and a circumferential spacing groove is formed between any two adjacent clamp bodies.
Further, in the preferred embodiment of the present invention, each of the clamping bodies is provided with at least one positioning hole, and the anti-deformation clamp further includes a positioning pin, which is inserted into the positioning hole for positioning.
Further, in the preferred embodiment of the present invention, the deformation-preventing fixture is made of high-strength steel, and the turbomolecular pump rotor is made of ultra-fine grain titanium or titanium alloy.
Further, in the preferred embodiment of the present invention, the total height of the rotor of the turbomolecular pump is greater than the total height of the anti-deformation jig.
Further, in the preferred embodiment of the present invention, the jig for diffusion welding further includes an alignment jig, when the turbomolecular pump rotor cover is located outside the alignment jig, the alignment jig is disposed coaxially with the turbomolecular pump rotor, and the alignment jig is used for the installation reference of the rotor ring and the blade before the welding operation.
Further, in the preferred embodiment of the present invention, the alignment jig is a cylindrical structure for abutting against the inner sidewall of the turbomolecular pump rotor.
A method of diffusion welding a turbomolecular pump rotor, comprising:
the diffusion welding fixture is used for clamping the turbomolecular pump rotor and then performing diffusion welding.
Further, in the preferred embodiment of the present invention, the diffusion welding after the fixture is used for holding the turbomolecular pump rotor includes:
alternately stacking and assembling the rotor ring, the blades and the deformation-preventing jig in sequence based on the aligning jig; the blades are clamped in a one-to-one correspondence mode by adopting the circumferential limiting grooves of the anti-deformation clamp, and meanwhile, the end part of the anti-deformation clamp is spaced from the rotor ring by a preset distance to finally form an integral assembly body to be welded;
and carrying out vacuum diffusion welding operation on the assembly.
Further, in a preferred embodiment of the present invention, the vacuum diffusion welding specifically includes:
placing the assembly in a vacuum diffusion welding apparatus at 1e-3～1e-4And heating and pressurizing the workpiece under the vacuum degree of Pa, wherein the welding temperature is 950 +/-10 ℃, the welding pressure is 3-5 MPa, and the heat preservation time is 0.5-1 h.
The embodiment of the utility model provides an at least possess following advantage or beneficial effect:
the embodiment of the utility model provides a diffusion welding is with anchor clamps, it is used for centre gripping turbo molecular pump rotor when diffusion welding operation, and turbo molecular pump rotor includes rotor ring and the blade that the multiunit piles up in turn, and diffusion welding is with anchor clamps including the shape anchor clamps of preapring for an unfavorable turn of events, and it sets up in the outside of turbo molecular pump rotor, and preapring for an unfavorable turn of events shape anchor clamps include the spacing recess of a plurality of circumference that sets up with a plurality of blade one-to-ones, and the spacing recess of circumference is used for the blade of centre gripping turbo molecular pump rotor. Through the setting of the shape anchor clamps of preapring for an unfavorable turn of events, make when the welding pressurization, when the assembly body height is reduced to H2 by H1, the axial welding pressure that the assembly body bore will distribute to the higher shape anchor clamps of preapring for an unfavorable turn of events of rigidity on, thereby guaranteed that the welding assembly body can not take place further deformation, simultaneously because the spacing effect of circumference spacing recess at blade circumference and direction of height, also avoided the blade because the dead weight produces the creep deformation of direction of gravity in follow-up long-time welding heat preservation process, finally, the welding strength and the size precision of turbo molecular pump rotor have been guaranteed effectively, and then make the postwelding rotor have high performance, the characteristic of corrosion resistance.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
Fig. 1 is a schematic structural view illustrating a connection between a diffusion welding fixture and a rotor of a turbomolecular pump according to an embodiment of the present invention;
fig. 2 is a schematic partial structural view of a clamp for diffusion welding according to an embodiment of the present invention;
fig. 3 is a schematic structural view of a section a-a of fig. 2.
Icon: 100-jig for diffusion welding; 101-rotor ring; 103-blade; 105-deformation preventing clamp; 107-circumferential limiting grooves; 109-a clip body; 110-a turbomolecular pump rotor; 111-locating holes; 113-alignment jig.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the embodiments of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate the position or positional relationship based on the position or positional relationship shown in the drawings, or the position or positional relationship which is usually placed when the product of the present invention is used, and are only for convenience of description and simplification of the description, but do not indicate or imply that the device or element to which the term refers must have a specific position, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.
In the description of the embodiments of the present invention, it should be further noted that unless otherwise explicitly stated or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly and may include, for example, a fixed connection, a detachable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the present disclosure, unless otherwise expressly stated or limited, the first feature may comprise both the first and second features directly contacting each other, and also may comprise the first and second features not being directly contacting each other but being in contact with each other by means of further features between them. Also, the first feature being above, on or above the second feature includes the first feature being directly above and obliquely above the second feature, or merely means that the first feature is at a higher level than the second feature. A first feature that underlies, and underlies a second feature includes a first feature that is directly under and obliquely under a second feature, or simply means that the first feature is at a lesser level than the second feature.
Fig. 1 is a schematic structural diagram of a connection between a diffusion welding fixture 100 and a turbomolecular pump according to this embodiment; fig. 2 is a partial structural schematic view of the jig 100 for diffusion welding provided in this embodiment; fig. 3 is a schematic structural view of a section a-a of fig. 2. Referring to fig. 1 to 3, the present embodiment provides a jig 100 for diffusion welding, which is used for clamping a turbomolecular pump rotor 110 during a diffusion welding operation, wherein the turbomolecular pump rotor 110 includes a plurality of sets of rotor rings 101 and blades 103 stacked alternately.
In detail, the jig 100 for diffusion welding includes a deformation prevention jig 105, the deformation prevention jig 105 is disposed on the outer side of the turbomolecular pump rotor 110, the deformation prevention jig 105 includes a plurality of circumferential limiting grooves 107 disposed in one-to-one correspondence with the plurality of blades 103, and the circumferential limiting grooves 107 are used for clamping the blades 103 of the turbomolecular pump rotor 110. By the arrangement of the deformation-preventing clamp 105, in the process of applying welding pressure, when the height of the assembly body is reduced to H2 from H1 due to welding deformation, the welding pressure borne by the assembly body can be distributed to the deformation-preventing clamp 105 with higher rigidity, so that the assembly body is prevented from further deformation, and the welding strength and the dimensional accuracy of the rotor ring 101 and the blades 103 are ensured; meanwhile, due to the limiting effect of the circumferential limiting groove 107 in the circumferential direction and the height direction of the blade 103, the blade 103 is prevented from generating creep deformation in the gravity direction due to self weight in the subsequent long-time welding and heat preservation process, finally, the welding strength and the size precision of the turbomolecular pump rotor 110 are effectively ensured, and the welded rotor is further ensured to have the characteristics of high performance and corrosion resistance.
In detail, the deformation preventing jig 105 includes a plurality of clamp bodies 109 stacked, and a circumferential limiting groove 107 is formed between two adjacent clamp bodies 109. The circumferential limiting groove 107 can be used for limiting the creep deformation of the blade 103 in the circumferential direction and the height direction caused by the dead weight in the welding high-temperature heat preservation and pressure maintaining processes
As a preferable scheme, in order to improve the positioning accuracy between the plurality of clamp bodies 109 and ensure the center accuracy of the overall structure, at least one positioning hole 111 may be disposed on each clamp body 109, and the deformation-preventing clamp 105 further includes a positioning pin, and the positioning pin is inserted into and matched with the positioning hole 111 to perform positioning. Through the inserting and matching of the positioning holes 111 and the positioning pins, the positioning accuracy of the plurality of clamping bodies 109 is guaranteed, the accuracy of the whole welding system is further guaranteed, and the performance of the welded rotor is guaranteed.
Optionally, every clamp 109 all is equipped with four locating holes 111, of course in the utility model discloses an in other embodiments, the quantity of locating hole 111 can also be selected according to the demand, and is not limited to four only, the embodiment of the utility model does not do the restriction.
In the present embodiment, the deformation prevention jig 105 is made of high-strength steel, and the turbomolecular pump rotor 110 is made of ultrafine-grained titanium or a titanium alloy. By adopting the ultra-fine grain titanium or titanium alloy blade 103 material (about 1 to 5 μm), a diffusion welding joint with sufficient atomic diffusion, high welding strength and high dimensional accuracy can be obtained in the smallest welding pressure and short heat preservation time. Meanwhile, since the titanium or titanium alloy has a high temperature creep deformation phenomenon at a temperature of 700 ℃ or more, particularly, it is more remarkable in the case where the structure is a thin plate, that is, when the support structure area is small, the blade 103 will creep deformation due to its own weight and bend in the direction of gravity. Therefore, by the arrangement of the deformation-preventing clamp 105, the welding strength and the dimensional accuracy of the turbomolecular pump rotor 110 can be effectively ensured, and finally, the turbomolecular pump rotor 110 with high performance, high efficiency and reliable corrosion resistance can be obtained.
It should be further noted that, in this embodiment, according to the specific structural characteristics of the turbomolecular pump, the thickness of the titanium or titanium alloy rotor ring 101 is 1 to 100mm, the thickness of the titanium or titanium alloy blade 103 is 1 to 50mm, and the thickness of the high-strength steel deformation prevention fixture is 1 to 100 mm. Because the principle of formation of the diffusion welding joint is atomic diffusion, and the atomic diffusion rate is several times faster at the grain boundary than in the crystal grain, if the crystal grain of titanium or titanium alloy is finer, the atomic diffusion process will be more fully performed, and further, high-strength connection of the welding interface can be realized at a specific welding temperature under a welding pressure as small as possible and a heat preservation time as short as possible. Therefore, in the present invention, the blade 103 is preferably made of ultra-fine grain titanium or titanium alloy, the grain size is about 1 to 5 μm, and the above-mentioned advantageous effects will be more apparent if the rotor ring 101 is also made of ultra-fine grain titanium or titanium alloy. Therefore, in other embodiments of the present invention, the materials of the blades 103 and the rotor ring 101 can also be selected as aluminum or aluminum alloy materials of different materials according to requirements, and the embodiments of the present invention are not limited.
Preferably, the turbomolecular pump rotor 110 is composed of a plurality of sets of alternately stacked titanium or titanium alloy rotor rings 101 and blades 103, the total height of which is H1. The deformation preventing jig 105 has a total height H2. Each clamp body 109 has a height H3, and in the preferred embodiment of the present invention, the overall height of the turbomolecular pump rotor 110 is greater than the overall height of the anti-deformation clamp 105. I.e., H2 is less than the value of H1. The height H3 of the anti-deformation jig is set in such a way that the thermal expansion coefficients of the rotor ring 101 and the blades 103 of the turbomolecular pump rotor 110 and the anti-deformation jig are different, and therefore, the difference in thermal expansion amount between the two at high temperature needs to be considered, that is, the thermal expansion amount of steel is larger than that of titanium, and needs to be compensated by the height at normal temperature, and the welding deformation amount corresponding to the formation of a diffusion welded joint of titanium or titanium alloy is also considered, and the above factors together determine the value H2. Therefore, when H2 is smaller than the value of H1, when the height of H1 is reduced to H2, the welding pressure will be distributed to the deformation-preventing jig 105 with greater rigidity, and therefore, the assembly body will not deform further, and meanwhile, due to the limiting effect of the circumferential limiting groove 107 in the circumferential and height directions of the blade 103, the blade 103 is prevented from generating creep deformation in the gravity direction in the subsequent process, and finally, the welding strength and the dimensional accuracy of the turbomolecular pump rotor 110 are effectively ensured.
Referring to fig. 1 again, in the present embodiment, the jig 100 for diffusion welding further includes an alignment jig 113, the turbomolecular pump rotor 110 is sleeved outside the alignment jig 113, the alignment jig 113 and the turbomolecular pump rotor 110 are coaxially disposed, and the alignment jig 113 is used for providing a reference for mounting the rotor ring 101 and the blades 103 before the welding operation. Preferably, the alignment jig 113 is a cylindrical structure, and the alignment jig 113 abuts against an inner sidewall of the turbomolecular pump rotor 110. The accuracy of the entire assembly can be effectively improved by the provision of the alignment jig 113.
The embodiment of the utility model provides a diffusion welding method of turbo molecular pump rotor 110 still is provided, include: the turbomolecular pump rotor 110 is clamped by the diffusion welding jig 100 and then diffusion welding is performed.
In detail, it specifically includes sequentially bottom-crossed stacking the mounting rotor ring 101, the deformation prevention jig 105 and the blades 103 based on the alignment jig 113; the blades 103 are clamped by the circumferential limiting grooves 107 of the anti-deformation clamp 105 in a one-to-one correspondence mode, and meanwhile, the end portions of the anti-deformation clamp 105 are spaced from the rotor ring 101 by a preset distance to form an integral assembly body to be welded; and carrying out vacuum diffusion welding operation on the assembly. That is, the assembling process before welding is to sequentially stack and assemble the rotor ring 101, the deformation preventing jig 105, and the blades 103 based on the aligning jig 113. Meanwhile, an assembly body is formed after the end part of the deformation-preventing clamp 105 is spaced from the rotor ring 101 by a preset distance L1, and the L1 value is determined by the thermal expansion amount of the clamp in the high-temperature horizontal direction, so that the efficient and accurate operation of welding operation is ensured.
Specifically, in this embodiment, the vacuum diffusion welding operation specifically includes: placing the assembly in a vacuum diffusion welding apparatus at 1e-3～1e-4And heating and pressurizing the workpiece under the vacuum degree of Pa, wherein the welding temperature is 950 +/-10 ℃, the welding pressure is 3-5 MPa, and the heat preservation time is 0.5-1 h. In the diffusion welding process, welding pressure acts on the rotor ring 101 and the blades 103 with higher heights firstly, when the height of H1 is reduced to H2, the welding pressure is distributed to the deformation-preventing clamp 105 with higher rigidity, therefore, the assembly body cannot deform further, meanwhile, due to the limiting effect of the circumferential limiting groove 107 in the circumferential direction and the height direction of the blades 103, the blades 103 are prevented from generating creep deformation in the gravity direction in the subsequent process, and finally, the welding strength and the size precision of the turbomolecular pump rotor 110 are effectively guaranteed.
To sum up, the embodiment of the utility model provides a diffusion welds uses anchor clamps 100, can restrict the high temperature creep deformation among the rotor welding process to can make welded rotor have the characteristic of high performance, corrosion resistance, and then guarantee the size precision after the rotor welds effectively.
The embodiment of the utility model provides a turbomolecular pump rotor 110's diffusion welding method, this method is carried out under the assistance of foretell diffusion welding jig. Therefore, the method improves the welding strength and dimensional accuracy of the turbomolecular pump rotor 110, and the welded rotor can have high performance and corrosion resistance.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (7)
1. A diffusion welding jig for clamping a turbomolecular pump rotor that includes a plurality of sets of alternately stacked rotor rings and blades at the time of a diffusion welding operation, comprising:
the anti-deformation clamp comprises a plurality of circumferential limiting grooves, the circumferential limiting grooves are used for clamping the blades of the turbomolecular pump rotor, and deformation of the blades in the circumferential direction and the height direction is limited.
2. The jig for diffusion welding according to claim 1, characterized in that:
the anti-deformation clamp comprises a plurality of clamp bodies which are stacked, and one circumferential limiting groove is formed between every two adjacent clamp bodies.
3. The jig for diffusion welding according to claim 2, characterized in that:
every the clamp body all is equipped with at least one locating hole, the anchor clamps of preapring for an unfavorable turn of events still include the locating pin, the locating pin with the locating hole grafting cooperation is in order to fix a position.
4. The jig for diffusion welding according to claim 1, characterized in that:
the anti-deformation clamp is made of high-strength steel, and the rotor of the turbo molecular pump is made of ultrafine-grained titanium or titanium alloy.
5. The jig for diffusion welding according to claim 4, characterized in that:
the total height of the rotor of the turbomolecular pump is greater than the total height of the anti-deformation clamp.
6. The jig for diffusion welding according to any one of claims 1 to 5, characterized in that:
the clamp for diffusion welding further comprises an alignment clamp, when the turbomolecular pump rotor is sleeved on the outer side of the alignment clamp, the alignment clamp and the turbomolecular pump rotor are arranged coaxially, and the alignment clamp is used for installing the reference of the rotor ring and the blades before welding operation.
7. The jig for diffusion welding according to claim 6, characterized in that:
the alignment fixture is of a cylindrical structure and is used for abutting against the inner side wall of the turbomolecular pump rotor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920706379.6U CN209886890U (en) | 2019-05-16 | 2019-05-16 | Clamp for diffusion welding |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920706379.6U CN209886890U (en) | 2019-05-16 | 2019-05-16 | Clamp for diffusion welding |
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| CN209886890U true CN209886890U (en) | 2020-01-03 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110014217A (en) * | 2019-05-16 | 2019-07-16 | 江苏博联硕焊接技术有限公司 | A kind of diffusion welding method of diffusion welding (DW) fixture and turbo-molecular pump rotor |
| CN111360472A (en) * | 2020-03-30 | 2020-07-03 | 中国船舶重工集团公司第七二五研究所 | Diffusion welding fixture and diffusion welding method for coil framework |
-
2019
- 2019-05-16 CN CN201920706379.6U patent/CN209886890U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110014217A (en) * | 2019-05-16 | 2019-07-16 | 江苏博联硕焊接技术有限公司 | A kind of diffusion welding method of diffusion welding (DW) fixture and turbo-molecular pump rotor |
| CN111360472A (en) * | 2020-03-30 | 2020-07-03 | 中国船舶重工集团公司第七二五研究所 | Diffusion welding fixture and diffusion welding method for coil framework |
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