CN110031425A - Laser gas remote measurement device and laser gas remote measurement method - Google Patents
Laser gas remote measurement device and laser gas remote measurement method Download PDFInfo
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- CN110031425A CN110031425A CN201910327881.0A CN201910327881A CN110031425A CN 110031425 A CN110031425 A CN 110031425A CN 201910327881 A CN201910327881 A CN 201910327881A CN 110031425 A CN110031425 A CN 110031425A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/061—Sources
- G01N2201/06113—Coherent sources; lasers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/063—Illuminating optical parts
- G01N2201/0638—Refractive parts
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/10—Scanning
- G01N2201/105—Purely optical scan
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/12—Circuits of general importance; Signal processing
- G01N2201/125—Digital circuitry
Abstract
The present invention provides a kind of laser gas remote measurement device and laser gas remote measurement method, which includes: laser, and the laser wavelength range that laser issues is preset range, and preset range covers the corresponding wavelength of absorption peak of under test gas；Line laser forms element, for making the laser from laser form line laser；Linear array detector is converted to electric signal for receiving the reflected light formed after line laser is absorbed by under test gas through reflecting surface diffusing reflection, and by the signal of reflected light；Signal processor is handled for receiving electric signal, and to electric signal, generates light intensity signal group corresponding with wavelength；Signal analyzer, for analyzing light intensity signal group, to determine the concentration of under test gas.The present invention can the concentration quickly to large range of under test gas measure.
Description
Technical field
The present invention relates to gas analysis detections, and in particular to laser gas remote measurement device and laser gas remote measurement method.
Background technique
Laser gas remote measurement technology is widely used in the fields such as Leakage inspection, laser gas remote measurement used at present
Device is realized in a manner of measurement.As shown in Figure 1, Fig. 1 is existing laser gas remote measurement mounted point instrumentation plan,
Gas remote measurement device 10 successively projects several dot lasers 12 on reflecting surface 11.Since the range that dot laser 12 covers is smaller, institute
Can only be measured to the concentration of small range of under test gas.And in order to the concentration to large range of under test gas into
Row measurement, it is desirable to achieve line scanning shown in Fig. 2.Fig. 2 is the schematic diagram that existing laser gas remote measurement device forms line scanning,
By swinging laser gas remote measurement device 10 or utilizing tilting mirror, approximate continuous is carried out to the dot laser 12 being projected on reflecting surface 11
Scanning, to realize that line scans.
However, 1) by swing laser gas remote measurement device or using tilting mirror realize line scanning method there are detection times
Long disadvantage.Realize realized by the position of traverse measurement point due to both modes, if each measurement point needs t
The time of measuring of second, and N number of measurement point is needed on a line, then total line sweep time is N*t seconds, this compares spot measurement
Time increases N times.
2) telemetering equipment is also resulted in long-term shake by swinging the method that laser gas remote measurement device realizes line scanning
Under dynamic environment and the continued depletion of transmission mechanism.So this scanning mode has, vibration is big, the service life is short, energy consumption is high, body
The disadvantages of product is big.
3) method that transmitting and the realization line scanning of received visual field are changed by tilting mirror, although solving laser gas remote measurement
The problem of device shakes, but since receiving light path bore generally requires the bigger of design, the size of such tilting mirror also requires
Bigger, the overall volume of device just will increase, in addition, energy consumption height is also inevitable disadvantage.
4) since both modes require motor driven, it is difficult to realize explosion-proof intrinsically safe circuit design, to be made into anti-
If quick-fried product, it can only be made into flame-proof type product, by requirement of explosion proof, flame proof product needs to accomplish that very high shell protection is (logical
Frequently with steel as guard shield), it will lead to that product is very heavy, volume is very big in this way, be unfavorable for being made into portable set
It is standby.
Summary of the invention
In order to solve the existing above problem, the present invention provides a kind of laser gas remote measurement devices, comprising:
Laser, the laser wavelength range that the laser issues are preset range, and the preset range covers gas to be measured
The corresponding wavelength of the absorption peak of body；
Line laser forms element, for making the laser from the laser form line laser；
Linear array detector is formed for receiving after the line laser is absorbed by the under test gas through reflecting surface diffusing reflection
Reflected light, and the signal of the reflected light is converted into electric signal；
Signal processor is handled for receiving the electric signal, and to the electric signal, is generated and the wavelength pair
The light intensity signal group answered；
Signal analyzer, for analyzing the light intensity signal group, with the concentration of the determination under test gas.
Preferably, the linear array detector includes multiple probe units, the multiple probe unit is by the reflected light
Signal is converted to the electric signal comprising multiple current signals.
Preferably, the signal processor includes:
Multiple preamplifiers, the multiple preamplifier and the multiple probe unit correspond, each preposition
Amplifier receives the current signal of corresponding probe unit conversion respectively, and the current signal is converted to voltage signal；
Selector successively transmits each voltage signal of the multiple preamplifier conversion；
Analog-digital converter successively receives each voltage signal, and carries out analog-to-digital conversion to each voltage signal,
Obtain multiple digital signals；
The multiple digital signal is combined by signal generator, generates light intensity signal group corresponding with the wavelength.
Preferably, the linear array detector is in the field angle on linear array direction and the diverging on the online direction of the line laser
Angle matches, and the linear array detector is in the field angle covering predetermined distance range on the direction vertical with the linear array direction
The angle of divergence of the line laser on the direction perpendicular with line direction.
Preferably, it is Bao Weier prism, cylindrical lens, scribing line prism, a word prism, scribing line that the line laser, which forms element,
Any one in lens, a word lens.
Preferably, laser gas remote measurement device further include:
Collimation lens, the laser alignment that the collimation lens is used to issue in the laser is directional light, described
Collimation lens is located at the upstream that the line laser forms element；
Receiving lens, the receiving lens are used to the reflected light converging to the linear array detector.
Preferably, the laser be tunable laser, the tunable laser wavelength tuning range covering to
The corresponding wavelength of absorption peak of gas is surveyed, the signal processor generates corresponding with different wave length in the tuning range
Different light intensity signal groups, the signal analyzer analyzes the different light intensity signal group, described to be measured with determination
The concentration of gas.
The present invention also provides a kind of laser gas remote measurement methods, method includes the following steps:
The wave-length coverage preset range for the laser for issuing laser, the absorption of the preset range covering under test gas
The corresponding wavelength in peak；
The laser from the laser is set to form line laser；
The reflected light formed after the line laser is absorbed by the under test gas through reflecting surface diffusing reflection is received, and will be described
The signal of reflected light is converted to electric signal；
The electric signal is received, and the electric signal is handled, generates light intensity signal group corresponding with the wavelength；
The light intensity signal group is analyzed, with the concentration of the determination under test gas.
Line laser (line scanning) may be implemented in laser gas remote measurement device in the present invention, and sweep time is very short, therefore
Can the concentration quickly to large range of under test gas measure.Meanwhile the present invention is not required to while realizing line scanning
Rotating device is wanted, therefore the shortcomings that no vibration and high power consumption, and rotating mechanism and galvanometer due to being not necessarily to rotating device, this
The design of compact, light carrying may be implemented in the laser gas remote measurement device of invention, in addition, the present invention is without using driving
The elements such as the motor of rotating device so that the inductance in circuit is smaller, and do not need high-voltage large current, hold very much in this way
It is easy to do into the anti-explosion product of essential safe type, bulky flameproof enclosure is not needed and protects, can easily be applied in explosive ring
In border.
Detailed description of the invention
Fig. 1 is existing laser gas remote measurement device with a schematic diagram for measurement；
Fig. 2 is the schematic diagram that existing laser gas remote measurement device forms line scanning；
Fig. 3 is the structure chart of laser gas remote measurement device according to an embodiment of the present invention；
Fig. 4 is the flow chart of laser gas remote measurement method according to an embodiment of the present invention；
Fig. 5 is the schematic diagram of different light intensity signal group corresponding from different wave length according to an embodiment of the present invention.
Specific embodiment
Fig. 3-5 and following description describe optional embodiments of the invention to instruct how those skilled in the art implement
It is of the invention with reproducing.In order to teach the technical scheme of the invention, it has simplified or omitted some conventional aspects.Those skilled in the art
It should be understood that the variation or replacement from these embodiments will within the scope of the invention.Those skilled in the art should understand that
The following features can be combined in various ways to form multiple variations of the present invention.As a result, the invention is not limited to it is following can
Embodiment is selected, and is only limited by the claims and their equivalents.
Fig. 3 is the structure chart of laser gas remote measurement device 30 according to an embodiment of the present invention.As shown in figure 3, laser gas
Telemetering equipment 30 includes laser 31, line laser formation element 32, linear array detector 33, signal processor 34 and signal point
Parser 35.
Fig. 4 is the flow chart of laser gas remote measurement method according to an embodiment of the present invention, that is, laser gas remote measurement device 30
Working method.
In step S41, the wave-length coverage for the laser 311 that laser 31 issues is preset range, preset range covering to
Survey the corresponding wavelength of absorption peak of gas 37.
In step S42, line laser, which forms element 32, makes the laser 311 from laser 31 form line laser 312, such as Fig. 3
Shown, line laser 312 is projected on reflecting surface 36.Wherein, it is saturating to form element 32 e.g. Bao Weier prism, cylinder for line laser
Mirror, scribing line prism, a word prism, scribing line lens, any one in a word lens.
Preferably, the device 30 further includes collimation lens 391, what which was used to issue in laser 31 swashs
The collimation of light 311 is directional light, and collimation lens 391 is located at the upstream that line laser forms element 32.Collimation lens 391 is by laser
311 collimation be directional light after, then be transferred to line laser formed element 32.
In step S43, linear array detector 33 is received after line laser 312 is absorbed by under test gas 37 through 36 diffusing reflection of reflecting surface
The reflected light 38 of formation, and the signal of reflected light 38 is converted into electric signal.
Linear array detector 33 includes multiple probe units 331, and multiple probe units 331 are converted to the signal of reflected light 38
Electric signal comprising multiple current signals.In this example, as shown in figure 3, linear array detector 33 is for example including 8 probe units 331,
Therefore the signal of reflected light 38 is converted into the electric signal comprising 8 current signals.The number of probe unit 331 can be arbitrarily
It is a, and it is unrestricted.
Preferably, the device 30 further includes receiving lens 392, which is used to reflected light 38 converging to line
Array detector 33.
Preferably, field angle of the linear array detector 33 on linear array direction is with the online direction of line laser 312, (line direction is line
The line direction that laser 312 is formed on reflecting surface 36, in this example, line direction be, for example, such as the line L in Fig. 3 shown in just
To) on the angle of divergence match, that is, linear array detector 33 can be fully received within the anti-of the line laser on direction shown in line L
Penetrate light.Line laser of the linear array detector 33 in the field angle covering predetermined distance range on the direction vertical with linear array direction
312 angle of divergence on the direction perpendicular with line direction, that is, linear array detector 33 can be fully received with shown in line L
The reflected light of the line laser in predetermined distance range on the perpendicular direction in direction.For example, being such as Fig. 3 institute in line laser 312
Show that in the case where (that is, being the direction shown in the line L shown in Fig. 3) for example perpendicular to the ground, linear array detector 33 hangs down
Direct-view rink corner (that is, in field angle on linear array direction) matches with the angle of divergence on the direction of the online L of line laser 312, linear array
In horizontal field of view angle (that is, in field angle on the direction vertical with linear array direction) the covering predetermined distance range of detector 33
The angle of divergence of the line laser 312 on the direction perpendicular with line direction；Alternatively, in the case where line laser 312 is in level
(not regarding out in figure), the horizontal field of view angle (that is, field angle on linear array direction) of linear array detector 33 and line laser 312 are online
The angle of divergence on direction matches, and the vertical field of view angle of linear array detector 33 is (that is, the view on the direction vertical with linear array direction
Rink corner) angle of divergence of the line laser 312 on the direction perpendicular with line direction in covering predetermined distance range.It in this way can be true
It protects linear array detector 33 and receives all expected reflected lights 38.Certainly, line laser 312 is also possible to and horizontal or vertical direction
Angled, as long as ensuring that linear array detector 33 receives all expected reflected lights 38.
In step S44, signal processor 34 receives electric signal, and handles electric signal, generates the wave with laser 311
Long corresponding light intensity signal group.
As described in Figure 3, signal processor 34 include multiple preamplifiers 341, selector 342, analog-digital converter 343,
And signal generator 344.
Multiple preamplifiers 341 are corresponded with multiple probe units 331, and each preamplifier 341 receives respectively
The current signal that corresponding probe unit 331 is converted, and current signal is converted into voltage signal.
In this example, such as with 8 preamplifiers 341, corresponded respectively with 8 probe units 331, it is each preposition
Amplifier 341 receives the current signal that corresponding probe unit 331 is converted, and current signal is converted to voltage signal, to turn
It gets in return to 8 voltage signals.
Selector 342 successively transmits 8 voltage signals of 8 preamplifiers 341 conversion.Selector 342 is, for example, logical
Track selector or multiplexer.Selector 342 successively (timesharing) transmits 8 voltage signals.
Analog-digital converter 343 successively receives each voltage signal, and carries out analog-to-digital conversion to each voltage signal, obtains more
A digital signal.In this example, analog-digital converter 343 successively carries out analog-to-digital conversion to 8 voltage signals, obtains 8 digital signals.
8 digital signals are combined by signal generator 344, generate light intensity signal corresponding with the wavelength of laser 311
Group.
In the present embodiment, laser 31 is tunable laser, for example, electric current tuning laser.Specifically, electric current tune
Humorous laser can be sampling grating distributed Bragg reflection laser, auxiliary grating directional couple samples reflection laser backwards
Device, distributed feedback laser or other suitably can electric current tuning laser.Laser 31 be also possible to it is other kinds of can
Tuned laser, for example, by using the tunable laser of temperature control technology or machine control techniques.
The corresponding wavelength of absorption peak of the wavelength tuning range covering under test gas 37 of tunable laser, signal processor
34 generate different light intensity signal group corresponding from different wave length in tuning range.
Fig. 5 is the schematic diagram of different light intensity signal group corresponding from different wave length according to an embodiment of the present invention.
As shown in figure 5, curve 5 indicates the absorption line of under test gas 37, such as λ 3 is the corresponding wavelength of absorption peak of under test gas 37.
The wave-length coverage for the laser 311 that laser 31 issues is, for example, λ 1 to λ 5, and the absorption peak that λ 1 to λ 5 covers under test gas 37 is corresponding
Wavelength X 3, and λ 1, λ 2, λ 4, λ 5 are near λ 3.
When the wavelength for the laser 311 that laser 31 issues is λ 1, signal processor 34 generates light intensity letter corresponding with λ 1
Number group (the 1st frame shown in fig. 5), the 1st frame contains multiple light intensity signals, such as 8 light intensity signals shown in fig. 5, pixel 1 arrive
Pixel 8.Wherein, pixel 1 is to the corresponding light intensity letter of pixel 8 is respectively indicated with 8 probe units 331 receive reflected light 38
Number.That is, the 1st frame corresponding with λ 1 contains the light intensity signal with the pixel of 331 same number of probe unit.
Similarly, when the wavelength of the laser 311 issued when laser 31 is λ 2, λ 3, λ 4, λ 5 respectively, signal processor 34
Light intensity signal group corresponding with λ 2, λ 3, λ 4, λ 5, such as the 2nd frame shown in fig. 5, the 3rd frame, the 4th frame, the 5th frame are generated respectively.
In step S45,35 pairs of signal analyzer different light intensity signal groups are analyzed, to determine the dense of under test gas 37
Degree.
As shown in figure 5, each frame shows the attenuation degree of light intensity signal, wherein the gray scale of light intensity signal is deeper, represents
Light intensity attenuation is more serious, and the gray scale of light intensity signal is more shallow, and it is weaker to represent light intensity attenuation.
When the wavelength of laser 311 is λ 1, the laser across under test gas 37 will not absorb, as shown in the 1st frame, all pictures
The light intensity signal of element is not decayed.
When the wavelength of laser 311 is λ 2, across the laser meeting slight absorption of under test gas 37, as shown in the 2nd frame, pixel
5, the light intensity signal of pixel 7 has slight fading, and the light intensity signal attenuation ratio of pixel 6 is more serious, because of under test gas thickness ratio
Thicker and/or concentration is relatively high, can be more stronger so absorbing.
When the wavelength of laser 311 is λ 3, the laser across under test gas 37 can absorb more by force, as shown in the 3rd frame, pixel 5,
Pixel 6, pixel 7 light intensity signal have compared with the 2nd frame and significantly decay, and the corresponding under test gas thickness of pixel 6 is thicker
And/or concentration is higher, so absorbing most strong.
When the wavelength of laser 311 is λ 4, across the laser meeting slight absorption of under test gas 37, as shown in the 4th frame, pixel
5, the light intensity signal decaying of pixel 6, pixel 7 is weakened compared with the 3rd frame.
When the wavelength of laser 311 is λ 5, the laser across under test gas 37 will not absorb, as shown in the 5th frame, all pictures
The light intensity signal of element is not decayed.
Signal analyzer 35 analyzes above-mentioned different light intensity signal group, can determine the concentration of under test gas 37.
Specifically, signal analyzer 35 passes through the light intensity signal of each probe unit 331 between each frame (each light intensity signal group) of comparison
Whether attenuation, can obtain has under test gas 37 in the corresponding optical path of probe unit 331, and according to the power of decaying,
The concentration of under test gas 37 in corresponding optical path can be calculated.
Line laser (line scanning) may be implemented in laser gas remote measurement device 30 in the present invention, and sweep time is very short, because
This can the concentration quickly to large range of under test gas measure.Moreover, the present invention realize line scanning while not
Rotating device is needed, therefore the shortcomings that no vibration and high power consumption, and rotating mechanism and galvanometer due to being not necessarily to rotating device,
The design of compact, light carrying may be implemented in laser gas remote measurement device 30 of the invention, in addition, the present invention without using
The elements such as the motor of rotating device are driven, so that the inductance in circuit is smaller, and do not need high-voltage large current, in this way
It is easily made the anti-explosion product of essential safe type, bulky flameproof enclosure is not needed and protects, can easily be applied quick-fried
In fried environment.
In addition, the present invention can be on the basis of length scanning, the wavelength of fast modulation laser, by demodulating each detection
The first harmonic and second harmonic signal of unit (pixel), can equally obtain each probe unit correspond under propagation path of light to
Survey the concentration (i.e. Harmonic Method) of gas.
Although by being described in conjunction with specific embodiments to the present invention, for the ordinary artisan of this field,
It will be apparent according to many substitutions, modification and the variation made after mentioned above.Therefore, when such substitution, modification
When being fallen into variation within the spirit and scope of appended claims, it should be included in the present invention.
Claims (8)
1. a kind of laser gas remote measurement device characterized by comprising
Laser, the laser wavelength range that the laser issues are preset range, the preset range covering under test gas
The corresponding wavelength of absorption peak；
Line laser forms element, for making the laser from the laser form line laser；
Linear array detector, for receiving the reflection formed after the line laser is absorbed by the under test gas through reflecting surface diffusing reflection
Light, and the signal of the reflected light is converted into electric signal；
Signal processor is handled for receiving the electric signal, and to the electric signal, is generated corresponding with the wavelength
Light intensity signal group；
Signal analyzer, for analyzing the light intensity signal group, with the concentration of the determination under test gas.
2. laser gas remote measurement device as described in claim 1, which is characterized in that the linear array detector includes multiple detections
The signal of the reflected light is converted to the electric signal comprising multiple current signals by unit, the multiple probe unit.
3. laser gas remote measurement device as claimed in claim 2, which is characterized in that the signal processor includes:
Multiple preamplifiers, the multiple preamplifier and the multiple probe unit correspond, each preposition amplification
Device receives the current signal of corresponding probe unit conversion respectively, and the current signal is converted to voltage signal；
Selector successively transmits each voltage signal of the multiple preamplifier conversion；
Analog-digital converter successively receives each voltage signal, and carries out analog-to-digital conversion to each voltage signal, obtains
Multiple digital signals；
The multiple digital signal is combined by signal generator, generates light intensity signal group corresponding with the wavelength.
4. laser gas remote measurement device as claimed in claim 3, which is characterized in that the linear array detector is on linear array direction
Field angle match with the angle of divergence on the online direction of the line laser, the linear array detector with the linear array direction hang down
Hair of the line laser in field angle covering predetermined distance range on the direction perpendicular with line direction on straight direction
Dissipate angle.
5. laser gas remote measurement device as described in claim 1, which is characterized in that it is Bao Weier that the line laser, which forms element,
Prism, cylindrical lens, scribing line prism, a word prism, scribing line lens, any one in a word lens.
6. laser gas remote measurement device according to any one of claims 1 to 5, which is characterized in that further include:
Collimation lens, the laser alignment that the collimation lens is used to issue in the laser are directional light, the collimation
Lens are located at the upstream that the line laser forms element；
Receiving lens, the receiving lens are used to the reflected light converging to the linear array detector.
7. laser gas remote measurement device as described in claim 1, which is characterized in that the laser is tunable laser,
The corresponding wavelength of absorption peak of the wavelength tuning range covering under test gas of the tunable laser, the signal processor produce
Raw different light intensity signal group corresponding from different wave length in the tuning range, the signal analyzer is to the difference
Light intensity signal group analyzed, with the concentration of the determination under test gas.
8. a kind of laser gas remote measurement method, which is characterized in that the described method comprises the following steps:
The wave-length coverage preset range for the laser for issuing laser, the absorption peak pair of the preset range covering under test gas
The wavelength answered；
The laser from the laser is set to form line laser；
Receive the reflected light that is formed through reflecting surface diffusing reflection after the line laser is absorbed by the under test gas, and by the reflection
The signal of light is converted to electric signal；
The electric signal is received, and the electric signal is handled, generates light intensity signal group corresponding with the wavelength；
The light intensity signal group is analyzed, with the concentration of the determination under test gas.
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