CN214472779U - For detecting SF6Enhanced Raman spectrum detection system for decomposed gas - Google Patents
For detecting SF6Enhanced Raman spectrum detection system for decomposed gas Download PDFInfo
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- CN214472779U CN214472779U CN202023287273.9U CN202023287273U CN214472779U CN 214472779 U CN214472779 U CN 214472779U CN 202023287273 U CN202023287273 U CN 202023287273U CN 214472779 U CN214472779 U CN 214472779U
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Abstract
The utility model relates to a be used for detecting SF6An enhanced Raman spectrum detection system for decomposed gas belongs to the technical field of gas detection. The utility model discloses a be used for detecting SF6The enhanced Raman spectrum detection system for decomposing gas comprises a V-shaped resonant cavity (1), wherein the V-shaped resonant cavity (1) consists of three high-reflectivity cavity mirrors CM1, CM2 and CM3, the curvature radius of the CM1 and the CM2 is 1m, the CM3 is a plane mirror, the V-shaped resonant cavity is designed in the detection system, laser is reflected for multiple times in the cavity by utilizing a cavity enhancement technology to form constructive interference, and the work of the laser in the cavity is improvedThe ratio and the effective action length, thereby improving the Raman scattering intensity.
Description
Technical Field
The utility model belongs to the technical field of gaseous detection, concretely relates to be used for detecting SF6An enhanced Raman spectrum detection system for decomposing gas.
Background
Sulfur hexafluoride (SF)6) Gas is widely applied to high-voltage electrical equipment due to excellent insulation and arc extinguishing performance, however, the high-voltage electrical equipment inevitably has insulation defects when running for a long time, partial discharge is caused, if the high-voltage electrical equipment is not detected and processed, the insulation performance of the equipment is continuously reduced, more serious discharge and even breakdown are caused, and more serious harm is caused to the equipment. SF6The decomposition gas being detected for analysis to diagnose SF6One of the most effective methods of isolating potential faults of electrical equipment. The traditional power equipment such as chromatography, chromatography-mass spectrometry, infrared spectroscopy, photoacoustic spectrometry, electrochemical sensor and the like is in SF6The characteristic gas monitoring technology has many limitations, the laser Raman spectrum is an analysis technology which is based on the Raman spectrum effect and analyzes the structure and the property of a substance by directly measuring Raman scattering light generated by the substance due to laser irradiation, and is a novel non-contact nondestructive detection technology, the detection precision is high, the speed is high, the operation is simple and repeatable, and the detection technology can be used for qualitative and quantitative analysis of a sample, so that an enhanced Raman spectrum detection system is provided.
Chinese patent (CN102879380A) discloses a raman spectroscopy enhancing particle application apparatus; the patent (CN102967593A) discloses a raman spectrum design concept of optical waveguide enhancement mechanism for identifying substances, and qualitatively and quantitatively analyzing the properties of substances; the patent (CN106153601A) discloses a method for detecting trace oxidation of grease based on surface enhanced Raman spectroscopy.
Detection of SF by current Raman spectroscopy6In addition, for samples with weak signals, the existing sample cell using the common hollow optical fiber as a gas Raman spectrum detection system has small gas refractive index and cannot meet the total reflection condition of an interface.
Therefore, it is necessary to research an optical feedback frequency locking cavity enhanced raman spectroscopy detection system, and silver-plated quartz glass tubes are used to replace common hollow optical fibers, so as to improve the raman scattering intensity of each gas, and to realize the simultaneous detection and analysis of the mixed gas.
SUMMERY OF THE UTILITY MODEL
In view of this, the present invention provides a method for detecting SF6An enhanced Raman spectrum detection system for decomposing gas.
In order to achieve the above purpose, the utility model provides a following technical scheme:
1. for detecting SF6The enhanced Raman spectrum detection system for decomposing gas comprises a V-shaped resonant cavity 1, wherein the V-shaped resonant cavity 1 consists of three high-reflectivity cavity mirrors CM1, CM2 and CM3, the curvature radius of CM1 and CM2 is 1m, and CM3 is a plane mirror.
Preferably, the V-type resonant cavity 1 is disposed in the gas sample cell 2, and the cavity length of the V-type resonant cavity 1 is an integral multiple of a half wavelength.
Preferably, one end of the gas sample cell 2 in the detection system is also sequentially connected with a laser 3, a piezoelectric displacer 4 and an optical isolator 5;
the other end of the gas sample cell 2 is also connected with a polarization beam splitter 6, a photoelectric detector 7, a spectrometer 8, a Charge Coupled Device (CCD)9 and an intelligent processing system 12 which are arranged in sequence.
Further preferably, the laser 3 is connected to a laser controller 11, and the laser 3 and the laser controller 11 are supplied with voltage by a function generator 10.
Further preferably, a reflecting mirror M1 and a filter mirror are sequentially arranged between the laser 3 and the piezoelectric displacer 4;
the piezoelectric displacer 4 is provided with a mirror M2.
Further preferably, a colorless half-wave plate HP1 and a film matching lens are further arranged between the optical isolator 5 and the gas sample cell 2.
Further preferably, a half-wave plate HP2 and a reflector M5 are further sequentially arranged between the polarization beam splitter 6 and a high-reflectivity cavity mirror CM2 of the V-type resonant cavity;
and a reflector M3 and a reflector M4 are further sequentially arranged between the polarization beam splitter 6 and the high-reflectivity cavity mirror CM1 of the V-shaped resonant cavity.
Further preferably, an obliquely placed optical filter EF1 is arranged between the polarization beam splitter 6 and the photodetector 7;
and an obliquely arranged optical filter EF1, an optical filter EF2 and a lens are sequentially arranged between the polarization beam splitter 6 and the spectrometer 8.
Preferably, the signals of the polarization beam splitter 6 and the function generator 10 are transmitted into the intelligent processing system 12 through an acquisition card;
the Charge Coupled Device (CCD)9 is directly connected with an intelligent processing system 12.
Preferably, the gas sample cell 2 adopts a silver-plated quartz glass tube as an inner wall, and the inner surface of the silver-plated quartz glass tube in the gas sample cell 2 is further subjected to silver plating treatment to form a silver plated layer;
the gas sample cell 2 is connected with a coupling gas chamber;
the gas entering the gas sample cell 2 is distributed in the gas distribution chamber;
standard SF in the gas distribution system6The decomposition gas and argon gas were passed through a filter separately into a Mass Flow Controller (MFC) and then mixed in a mixing coil.
The beneficial effects of the utility model reside in that:
1. the utility model discloses a be used for detecting SF6An enhanced Raman spectrum detection system for decomposing gas features that a V-type resonant cavity is designed in the detection system, and the laser is in the cavity by cavity enhancement techniqueMultiple reflection and constructive interference are formed, and the laser power and effective action length in the cavity are improved, so that the Raman scattering intensity is improved.
2. The utility model discloses still adopt silver-plated quartz glass pipe to replace ordinary hollow optical fiber to make gaseous sample cell, the silvered film can effectively reflect the light wave and can not produce the raman scattering, and silver-plated quartz glass pipe can improve incident laser's utilization ratio and the collection efficiency of raman scattering light, is showing the sensitivity that has improved gaseous raman detection.
Additional advantages, objects, and features of the invention will be set forth in part in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the invention. The objectives and other advantages of the invention may be realized and attained by the means of the instrumentalities and/or combinations particularly pointed out in the appended claims.
Drawings
For the purposes of promoting a better understanding of the objects, features and advantages of the invention, reference will now be made to the following detailed description taken in conjunction with the accompanying drawings in which:
FIG. 1 shows the present invention for detecting SF6An enhanced Raman spectroscopy detection system for decomposing the gas;
FIG. 2 is a graph showing the propagation process of Raman scattering light in a silver-coated quartz glass tube;
FIG. 3 is a coupling air chamber of the present invention;
FIG. 4 is a gas distribution system;
wherein 1 is a V-shaped resonant cavity, 2 is a gas sample cell, 3 is a laser, 4 is a piezoelectric displacer, 5 is an optical isolator, 6 is a polarization beam splitter, 7 is a photoelectric detector, 8 is a spectrometer, 9 is a Charge Coupled Device (CCD), 10 is a function generator, 11 is a laser controller, and 12 is an intelligent processing system.
Detailed Description
The following description of the embodiments of the present invention is provided for illustrative purposes, and other advantages and effects of the present invention will be readily apparent to those skilled in the art from the disclosure herein. The present invention can also be implemented or applied through other different specific embodiments, and various details in the present specification can be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention. It should be noted that, in the following embodiments, features in the embodiments may be combined with each other without conflict.
The utility model discloses a various instrument specification models as follows:
1. the laser is an LWRL642 type diode laser produced by Beijing laser wave company, and the diode laser emits 642nm linear polarized light as a laser source; the general formula adopts the semiconductor pump, and the structure is small and exquisite compact, has output power height, good stability, the facula is of high quality, long service life is this kind of laser's advantage. A split power supply or an integrated power supply can be selected and used, and three modulation working modes of continuity, TTL and simulation are provided.
2. The function generator is an AFG3022C function generator of Tektronix, provides voltage for the laser and the laser controller, and adjusts the output current of the controller, thereby adjusting the output wavelength and power of the laser; and simultaneously provides synchronous trigger signals for the laser controller and the data acquisition card. The function generator adopts dual-channel output, the bandwidth is 25MHZ, the memory depth is 128K, the maximum sampling rate is 2K-128K:250MS/s, the vertical resolution is 14bits, and the maximum output amplitude is 20VP-P。
3. The piezoelectric displacer is a piezoelectric displacer (P-725K078) produced by Physik Instrument (PI) company, the movement of the piezoelectric displacer is intelligently controlled by LabVIEW software, the distance of a laser cavity is adjusted to be 3 times of the length of a cavity arm, and laser phase matching is realized.
4. The polarization beam splitter is a PBS252/M type polarization beam splitter of Thorlabs company, divides one incident light into two beams of linearly polarized light with mutually vertical polarization directions, and the polarization beam splitting cube is arranged in a 30mm cage cube.
5. The photoelectric detector adopts a PDA100A-EC silicon-based photoelectric detector manufactured by Thorlabs company, converts a received optical signal into an electric signal, and transmits the electric signal to a data processing unit of a computer through a data acquisition card.
6. The acquisition card adopts a data acquisition card produced by National Instruments (NI) company to acquire a voltage signal of a photoelectric detector, the model of the data acquisition card is NI USB-6259, and the data acquisition card provides analog I/O, digital I \ O, two 32-bit counters and digital trigger; in addition, the data acquisition card also provides a DAQ function, an SCC or SCXI signal conditioning module which can be used for adding a sensor and a high voltage measurement function to the equipment, and an attached NIDACMx driver and a configuration utility simplify configuration and measurement.
7. The spectrometer was a Shamrock-500i Raman spectrometer manufactured by ANDOR. This spectrometer has 2 entrance slits, two at 90 degrees, with 3 gratings (600, 1200, 1800 reticles).
8. The detector is a CCD detector of the iDus-416 type manufactured by ANDOR. The detection wavelength range of the CCD detector is 200-1100 nm, and the pixel is 2000 multiplied by 256.
Example 1
For detecting SF6An enhanced Raman spectroscopy detection system for decomposing gas, wherein a V-type resonant cavity 1 is arranged in a gas sample cell 2 in the detection system, and the V-type resonant cavity consists of three high-reflectivity cavity mirrors CM1, CM2 and CM3, wherein the curvature radius of CM1 and CM2 is 1m, and CM3 is a plane mirror.
The arrangement of the specific detection system is shown in figure 1, wherein one end of a gas sample cell 2 in the detection system is sequentially connected with a laser 3, a piezoelectric displacer 4 and an optical isolator 5; the other end of the gas sample cell 2 is also connected with a polarization beam splitter 6, a photoelectric detector 7, a spectrometer 8, a Charge Coupled Device (CCD)9 and an intelligent processing system 12 (a calculator) in sequence. The specific detection flow is as follows:
the laser 3 is connected with the laser controller 11, the laser 3 and the laser controller 11 are provided with voltage by the function generator 10, the laser diode emits linear polarized light with the wavelength of 642nm as a light source, and the laser reflected by the reflector M1 passes through the filter mirror and then is reflected to the optical isolator 5 by the reflector M2 (which can be used for adjusting the distance from the laser to the enhanced cavity) arranged on the piezoelectric shifter 4; optical isolator can improve spectral resolution, reduces the feedback rate (the ratio of feedback power and laser output power), and the light after adjusting through optical isolator is adjusted to S polarization after colourless half-wave plate HP1, and in rethread mode matching lens couples the V type resonant cavity 1 in the gas sample cell with the laser beam, the direct reflectance that sets up simultaneously between optical isolator and V type resonant cavity 1 can prevent level crossing CM 3. The V-type resonant cavity 1 mainly comprises three high-reflectivity cavity mirrors CM1, CM2 and CM3, the curvature radius of CM1 and CM2 is 1 meter, and CM3 is a plane mirror. When the cavity length of the V-shaped resonant cavity is integral multiple of half wavelength, resonance will occur in the cavity, and the laser power in the cavity is greatly increased. The laser light resonated by the V-type resonator comes out from the gas sample cell 2 (meanwhile, a sensor is also arranged for monitoring the gas pressure in the gas sample cell), the raman scattering light passing through the CM2 is reflected by the mirror M5 and then passes through another colorless half-wave plate (HP2), the polarization of the scattering light is adjusted, so that the light passing through the CM1 and reflected by the mirrors M3 and M4 in sequence forms mutually perpendicular linear polarized light, and the two beams of linearly polarized light transmitted from the HP2 and M4 and having mutually perpendicular polarization directions are combined into one beam of light by the polarization beam splitter 6. The light beam reaches the optical filter EF after passing through the polarization beam splitter, the EF is obliquely arranged, a part of light is reflected into the photoelectric detector 7(PD), the photoelectric detector forms cavity rear coupling signals of the laser power after cavity acquisition, the cavity rear coupling signals are transmitted to the intelligent processing system 12 (computer) through the data acquisition card, analysis processing is carried out through a LabVIEW software module, the piezoelectric displacer is intelligently regulated and controlled, the feedback light is matched with the laser phase, and optical feedback frequency locking is realized; while the other most light will reach the other filter (EF), which can block the laser radiation and rayleigh scattering, suppressing spectral noise. The stokes raman scattered light output from the EF passes through an achromatic lens, is subjected to grating light splitting by a spectrometer 8 and then reaches a charge coupled device 9, namely a CCD (iDus-416), and detection of a raman spectrum is realized.
In addition, the utility model discloses a gas sample cell 2 among the detecting system has been improved to the raman effect of reinforcing gas, as shown in fig. 2. The utility model discloses in adopt silver-plated quartz glass pipe to replace ordinary hollow optical fiber, the silvered film can effectively reflect the light wave, and itself can not produce the raman scattering, specifically adopted a internal diameter to be 1mm, the external diameter is 1cm, length is 2 m's silver-plated quartz glass pipe, still need plated the one deck silver in addition at the inner wall of silver-plated quartz glass pipe. The other end of the silver-plated quartz glass tube is provided with the reflector, and the incident laser can be reflected again after being emitted, so that the utilization efficiency of the incident laser is improved. In addition, the silver-plated quartz glass tube is also a device for collecting and transmitting Raman scattering signals, and Raman scattering light generated in the tube propagates along the quartz tube under the action of the silver plating layer and the reflecting mirror, is emitted from the tube opening and is collected by the microscope objective lens, as shown in FIG. 2.
Meanwhile, the utility model also designs a coupling air chamber connected with the gas sample cell, as shown in figure 3. The coupling gas chamber is convenient for coupling the gas sample pool with the confocal micro-Raman system and replacing the gas sample in the silver-plated quartz glass tube. The coupling air chamber is made of stainless steel, one end of the coupling air chamber is provided with a high-light-transmittance incident window sheet, and the other end of the coupling air chamber is sealed at the interface by an O-shaped ring. The coupling gas chamber is connected with the gas sample cell and fixed on the optical platform, the microscope objective is connected by a 90-degree horizontal adapter, and the positions of the coupling gas chamber and the sample cell are adjusted to enable the focus of the microscope to be positioned in the silver-plated quartz tube. Vacuumizing the silver-plated quartz glass tube through a sample inlet of the coupling gas chamber, and injecting a gas sample for Raman detection.
In addition, the gas entering the gas sample cell 2 is prepared by a gas distribution system (gas tank, Mass Flow Controller (MFC), filter, mixing coil), wherein standard SF is used6The decomposed gas and argon gas from the gas tank pass through the filter respectively and enter the MFC, then are mixed in the mixing coil and enter the gas sample cell 2, as shown in FIG. 4. The gas distribution system can realize the configuration of gas with standard concentration.
To sum up, the utility model discloses a be used for detecting SF6The enhanced Raman spectrum detection system for decomposing gas is characterized in that a V-shaped resonant cavity is designed in the detection system, and laser is reflected for multiple times in the cavity by utilizing a cavity enhancement technology to form constructive interference, so that the laser power and the effective action length in the cavity are improved, and the Raman scattering intensity is improved; meanwhile, the utility model also adopts silver-plated quartz glass tube to replace the common hollow optical fiber to make a gas sampleThe silver-plated quartz glass tube can improve the utilization rate of incident laser and the collection efficiency of Raman scattered light, and obviously improve the sensitivity of gas Raman detection.
Finally, the above embodiments are only used for illustrating the technical solutions of the present invention and not for limiting, and although the present invention has been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that modifications or equivalent substitutions may be made to the technical solutions of the present invention without departing from the spirit and scope of the technical solutions, and all of them should be covered by the scope of the claims of the present invention.
Claims (10)
1. For detecting SF6The enhanced Raman spectrum detection system for decomposing gas is characterized by comprising a V-shaped resonant cavity (1), wherein the V-shaped resonant cavity (1) consists of three high-reflectivity cavity mirrors CM1, CM2 and CM3, the curvature radius of CM1 and CM2 is 1m, and CM3 is a plane mirror.
2. A detection system according to claim 1, wherein the V-resonator is arranged in a gas sample cell (2), the cavity length of the V-resonator being an integer multiple of half a wavelength.
3. The detection system according to claim 2, wherein one end of the gas sample cell (2) in the detection system is further connected with a laser (3), a piezoelectric displacer (4) and an optical isolator (5) which are arranged in sequence;
the other end of the gas sample cell (2) is also sequentially connected with a polarization beam splitter (6), a photoelectric detector (7), a spectrometer (8), a charge-coupled device (9) and an intelligent processing system (12).
4. A detection system according to claim 3, wherein the laser (3) is connected to a laser controller (11), the laser (3) and the laser controller (11) being supplied with voltage by a function generator (10).
5. A detection system according to claim 3, characterized in that a reflecting mirror M1 and a filter mirror are arranged between the laser (3) and the piezoelectric displacer (4) in sequence;
the piezoelectric displacer (4) is provided with a reflecting mirror M2.
6. A detection system according to claim 3, wherein a colorless half-wave plate HP1 and a film matching lens are further provided between the optical isolator (5) and the gas sample cell (2).
7. A detection system according to claim 3, characterized in that a half-wave plate HP2 and a mirror M5 are further arranged between the polarization beam splitter (6) and a high reflectivity cavity mirror CM2 of the V-type resonant cavity in sequence;
and a reflector M3 and a reflector M4 are further sequentially arranged between the polarization beam splitter (6) and the high-reflectivity cavity mirror CM1 of the V-shaped resonant cavity.
8. A detection system according to claim 3, characterized in that an obliquely placed optical filter EF1 is arranged between the polarizing beam splitter (6) and the photodetector (7);
and an obliquely arranged optical filter EF1, an optical filter EF2 and a lens are sequentially arranged between the polarization beam splitter (6) and the spectrometer (8).
9. The detection system according to claim 3, characterized in that the signals of the polarization beam splitter (6) and the function generator (10) are transmitted into the intelligent processing system (12) through an acquisition card;
the charge-coupled device (9) is directly connected with the intelligent processing system (12).
10. The detection system according to claim 3, wherein the gas sample cell (2) adopts a silver-plated quartz glass tube as an inner wall, and the inner surface of the silver-plated quartz glass tube in the gas sample cell (2) is further subjected to silver plating treatment to form a silver plating layer;
the gas sample cell (2) is connected with the coupling gas chamber;
the gas entering the gas sample cell (2) is distributed in a gas distribution chamber;
standard SF in the gas distribution system6The decomposition gas and argon gas are separately passed through filters and into mass flow controllers and then mixed in a mixing coil.
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
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CN114172010A (en) * | 2022-01-07 | 2022-03-11 | 中国人民解放军国防科技大学 | Miniaturized integrated probe based on hollow optical fiber atomic air chamber |
CN114384059A (en) * | 2022-01-10 | 2022-04-22 | 北京华泰诺安技术有限公司 | Gas detection device and method |
CN114813695A (en) * | 2022-03-08 | 2022-07-29 | 华南师范大学 | Bimodal imaging system and method based on Raman scattering spectrum and quantitative phase |
CN115508057A (en) * | 2022-11-08 | 2022-12-23 | 泰州晶达光电有限公司 | Detection apparatus for optical wave plate |
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2020
- 2020-12-30 CN CN202023287273.9U patent/CN214472779U/en active Active
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114172010A (en) * | 2022-01-07 | 2022-03-11 | 中国人民解放军国防科技大学 | Miniaturized integrated probe based on hollow optical fiber atomic air chamber |
CN114384059A (en) * | 2022-01-10 | 2022-04-22 | 北京华泰诺安技术有限公司 | Gas detection device and method |
CN114384059B (en) * | 2022-01-10 | 2023-10-13 | 北京华泰诺安技术有限公司 | Gas detection device and method |
CN114813695A (en) * | 2022-03-08 | 2022-07-29 | 华南师范大学 | Bimodal imaging system and method based on Raman scattering spectrum and quantitative phase |
CN115508057A (en) * | 2022-11-08 | 2022-12-23 | 泰州晶达光电有限公司 | Detection apparatus for optical wave plate |
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