CN110022087A - The energy conversion unit and preparation method of beam type vibration energy collector - Google Patents
The energy conversion unit and preparation method of beam type vibration energy collector Download PDFInfo
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- CN110022087A CN110022087A CN201910382852.4A CN201910382852A CN110022087A CN 110022087 A CN110022087 A CN 110022087A CN 201910382852 A CN201910382852 A CN 201910382852A CN 110022087 A CN110022087 A CN 110022087A
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Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/18—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
- H02N2/186—Vibration harvesters
- H02N2/188—Vibration harvesters adapted for resonant operation
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/22—Methods relating to manufacturing, e.g. assembling, calibration
Abstract
The present invention relates to the energy conversion units and preparation method of a kind of beam type vibration energy collector, including flexible piezoelectric foil electret, fixed station and oscillator；One end of the flexible piezoelectric foil electret is fixedly connected with the fixed station, and the other end vacantly forms free end, and end is fixedly connected with the oscillator；The surface connecting wire of the flexible piezoelectric foil electret；Several Parallel Tunnel structures are equipped with inside the flexible piezoelectric foil electret.Compared with prior art, flexible piezoelectric foil electret has larger scalability, and lateral piezoelectric activity with higher in the present invention, and energy collecting device is made to can be realized the vibrational energy expeditiously acquired in ambient enviroment；Have many advantages, such as good light weight, flexibility, simple process, flexible for installation, the vibrational energy acquisition that can be used in complex environment.
Description
Technical field
The present invention relates to function element technical fields, more particularly, to a kind of energy of beam type vibration energy collector
Converting unit.
Background technique
In recent years, with the continuous development of MEMS (MEMS) technology, all kinds of microelectronic devices, microsensor and can
The technical level and application range for carrying the mems devices such as electronic device constantly expand, and have in all kinds of military and civilian fields
Broad application prospect.In order to make micro-electromechanical device that there is more efficient, permanent task performance, system is supplied to its energy resource collecting
It is one of research hotspot in the field that system, which is studied and improved,.
Vibrational energy is collected by energy collection technology and is shaken as a kind of energy existence form that is most commonly seen and being widely present
Kinetic energy, and be translated into electric energy and stored and used is more mature mode in the world at present.Wherein, beam type
Structure is more typical.In general, when the vibration frequency of cantilever beam is consistent with extraneous vibration frequency, i.e. piezoelectric type vibration energy
When collector work is under resonance state, energy conversion efficiency highest, output power and voltage are maximum.However, when collector
After the length of cantilever beam, the position of mass block are fixed, the resonant frequency of cantilever beam is also fixed, the collection for extraneous vibration energy
It is limited under a certain frequency, application range is relatively narrow, and energy collection rate is lower.
Chinese patent CN106936334A discloses a kind of vibrational energy collector and method.Collector include piezoelectric layer,
Mass block, cantilever beam and pedestal.One end of cantilever beam is vertically fixed on pedestal, and the other end is free end.Mass block is fixed on
The upper surface of cantilever beam free end.Cantilever beam upper and lower surface is equipped with the piezoelectric layer being made of piezoelectric material, by being electrically connected to
Together.Cantilever beam chooses the cantilever beam for having the flexible material of sensitive thermal expansion coefficient as vibrational energy collector.
The eigentone that the invention realizes vibrational energy collector can change with the change of ambient temperature, solve common
The problem of the fixed problem for causing application range relatively narrow of vibrational energy collector cantilever beam frequency, has widened vibrational energy collector
Use bandwidth, be conducive to improve efficiency of energy collection, expand application range.But it is only capable of being used in not in the patented technology
The adjusting of synthermal lower vibration frequency, narrow scope of application, energy collection rate are low.Chinese patent CN103633879A discloses one
Vibration energy collector vibration pick-up structure of the kind based on flexible girder, including flexible girder, piezoelectric cantilever and mass block, Flexible Main
Beam is rectangular box-like structure, and middle part is provided with rectangular opening；Piezoelectric cantilever one end is bonded and fixed at the upper surface of flexible girder, another
End suspends above rectangular opening, and mass block is adhered to the suspension end of piezoelectric cantilever；Several piezoelectric cantilevers are respectively in rectangular opening
Two sides are parallel to rectangular opening short side in interdigitated and equidistantly arrange.The more cantilever beam vibration pick-up structures of interdigital based on flexible girder are set
Meter, significantly reduces the high-order pick-up frequency of system, while reducing low order pick-up frequency, and then has effectively widened vibrational energy
Acquisition frequency band.But in the patented technology, there is also some shortcomingss, although can reduce resonance frequency using flexible girder
Rate, but thus bring damping loss also results in the reduction of energy conversion efficiency.In addition, due in the patent each piezoelectricity it is outstanding
Potential difference between arm beam upper/lower electrode is not necessarily equal, and connection electrode will also result in internal energy loss by the way of in parallel.
In addition, there is some disadvantages for some piezoelectric materials itself used by the patent, as PZT ceramic preparation method is complicated, flexible
Property is poor, environmental pollution is larger, and PVDF is then that sensitivity is lower.
Summary of the invention
It is an object of the present invention to overcome the above-mentioned drawbacks of the prior art and provide a kind of beam types to vibrate
The energy conversion unit of energy collecting device, especially a kind of energy conversion unit of beam type flexible vibration energy collecting device.
The purpose of the present invention can be achieved through the following technical solutions:
A kind of energy conversion unit of beam type vibration energy collector, including flexible piezoelectric foil electret, fixed station
And oscillator；One end of the flexible piezoelectric foil electret is fixedly connected with the fixed station, and the other end vacantly forms free end, and
And end is fixedly connected with the oscillator；The surface of the flexible piezoelectric foil electret is connect with conducting wire；The flexible piezoelectric is stayed
Several Parallel Tunnel structures are equipped with inside polar body film.
The present invention is provided with Parallel Tunnel structure in flexible piezoelectric foil electret, this structure can greatly increase sample
Piezoelectric activity, and can be generated largely perpendicular to sample surfaces and along sample surfaces but perpendicular on tunnel extending direction
Strain, thus when carrying out energy acquisition with cantilever beam structure, the vibrational energy in ambient enviroment can be effectively collected.In addition, using
The energy collecting device resonance frequency for the method preparation that the invention patent proposes is lower, and the vibrational energy in environment is generally in 300Hz
Hereinafter, the lower energy of frequency in environment therefore can be acquired, therefore energy acquisition efficiency can be improved.
The flexible piezoelectric foil electret includes thermoplastic polymer film piece and fits in the thermoplastic polymer film piece
The conductive electrode of upper and lower surfaces, and the conductive electrode is connect with conducting wire；The thermoplastic polymer film on piece is equipped with flat
Row tunnel structure.
The thermoplastic polymer film piece is symmetrical structure.
The thermoplastic polymer film piece is the thermoplastic polymer film piece that curtain coating, coining or pouring procedure are prepared；
It is FEP fluorinated ethylene propylene copolymer (FEP), polytetrafluoroethylene (PTFE) (PTFE), polyethylene that the material of the thermoplastic polymer film piece, which is selected from,
(PE), polypropylene (PP), polycarbonate (PC) or polyethylene terephthalate (PET).
The material of the conductive electrode is aluminium, gold, silver, electrical conductivity alloy, graphite or graphene.
Preferably, the electrical conductivity alloy is copper alloy or aluminium alloy.
The upper and lower surfaces of corresponding thermoplastic polymer film piece are injected separately into positive electricity at the Parallel Tunnel structure
Lotus and negative electrical charge.
The Parallel Tunnel structure by linear, zigzag or it is wavy in a manner of extend；
The cross sectional shape of the Parallel Tunnel structure is ellipse, round or diamond shape；
The tunnel lateral direction width of Parallel Tunnel structural section and adjacent tunnel spacing on the flexible piezoelectric foil electret
Ratio is 0.1~10.
The extending direction of the free end of the flexible piezoelectric foil electret and the axial direction of the Parallel Tunnel structure hang down
Directly；Also, the upper surface and/or lower surface of the flexible piezoelectric foil electret are equipped with strip supporting layer, the supporting layer
Setting direction is the extending direction of the free end.
The extending direction of the free end of the flexible piezoelectric foil electret and the axial direction of the Parallel Tunnel structure are flat
Row.
The present invention also provides a kind of preparation methods of the energy conversion unit of beam type vibration energy collector, including
Following steps:
(1) thermoplastic polymer film piece is made by the internal heat with Parallel Tunnel structure by curtain coating, coining or casting
Thermoplastic polymer diaphragm；
(2) conductive electrode is covered each by the upper and lower surfaces of the thermoplastic polymer film piece；
(3) by corona polarizing, contact method charging, ion implanting or electron beam method for implanting in Parallel Tunnel structure
Thermoplastic polymer film piece is injected separately into positive charge and negative electrical charge, obtains the flexible piezoelectric foil electret；
(4) oscillator is fixed on one end of the flexible piezoelectric foil electret as free end；
(5) two conducting wires are drawn respectively from two conductive electrodes；
(6) other end of flexible piezoelectric foil electret is fixed on fixed station, so that the flexible piezoelectric foil electret
Free end it is hanging, obtain the energy conversion unit.
The extending direction of the free end of the flexible piezoelectric foil electret and the axial direction of the Parallel Tunnel structure hang down
Directly；
The step (3) is by corona polarizing, contact method charging, ion implanting or electron beam method for implanting to parallel tunnel
Thermoplastic polymer film piece in road structure is injected separately into positive charge and negative electrical charge；In the upper table of the thermoplastic polymer film piece
Face and/or lower surface are bonded supporting layer, obtain the flexible piezoelectric foil electret.
The processing method of thermoplastic polymer film piece in the step (2) specifically: have in upper surface periodically parallel
Be sticked a piece of thermoplastic polymer film piece on the metal form of groove structure, two pieces is posted the metal of thermoplastic polymer film piece
Template is oppositely arranged, and thermoplastic polymer film piece is placed in inside；The metal mold of thermoplastic polymer film piece is posted at two pieces
Soft rubber pad, silicagel pad, soft rubber pad are sequentially placed between plate；Metal form is clamped into feeding vulcanizing press with two steel plates,
Hot-pressing processing, the soft rubber pad being placed between metal form and rubber pad remove, and two pieces of metal form groove alignment are fixed,
It is sent into baking oven heating, cooling is taken out, removes template, obtain the thermoplastic polymer film piece with Parallel Tunnel structure.
Compared with prior art, the invention has the following advantages that
(1) material used in the energy conversion unit of beam type flexible vibration energy collecting device of the invention is laterally to have
There is the polymer matrix piezoelectric membrane of larger scalability as cantilever beam structure, using flexible piezoelectric electret, piezoelectricity is thin
Film lateral piezoelectric activity with higher；And it is additionally provided with Parallel Tunnel structure on the cantilever beam structure, makes the film in transverse direction
Generate larger deformation；Property based on higher piezoelectric activity and the relatively larger transverse deformation of film, it is soft in the energy collecting device
Property piezo-electric electret film can be realized expeditiously acquire ambient enviroment in vibrational energy；
(2) energy collecting device resonance frequency of the invention is lower, and effective acquisition of ambient vibration energy may be implemented；
(3) flexibility of the flexible piezoelectric foil electret in the present invention makes energy collecting device even at biggish vibration
It is also not easy to break in environment；
(4) flexible piezoelectric foil electret can cut into random length according to actual environment, be easy to use；
(5) energy collecting device prepared by method of the present invention have good light weight, flexibility, simple process,
The features such as flexible for installation, the vibrational energy acquisition that can be used in complex environment.
Detailed description of the invention
Fig. 1 is structural schematic diagram of the invention in embodiment 1；
Fig. 2 is the structural schematic diagram of flexible piezoelectric foil electret in the present invention；
Fig. 3 is structural schematic diagram of the invention in embodiment 2；
In figure, 1 is upper conductive electrode, and 2 be upper thermoplastic polymer film piece, and 3 be lower thermoplastic polymer film piece, under 4 are
Conductive electrode, 5 be upper conducting wire, and 6 be lower wire, and 7 be flexible piezoelectric foil electret, and 8 be supporting layer, and 9 be oscillator, and 10 be fixation
Platform, 11 be Parallel Tunnel structure.
Specific embodiment
The present invention is described in detail combined with specific embodiments below.Following embodiment will be helpful to the technology of this field
Personnel further understand the present invention, but the invention is not limited in any way.It should be pointed out that the ordinary skill of this field
For personnel, without departing from the inventive concept of the premise, various modifications and improvements can be made.These belong to the present invention
Protection scope.
Embodiment 1
A kind of energy conversion unit of beam type vibration energy collector, as shown in Figure 1, including flexible piezoelectric electret
Film 7, fixed station 10 and oscillator 9；The energy conversion unit is applied in energy collecting device, and energy collecting device is converted single by energy
Member, rectification unit, Power Management Unit composition；Fixed station 10 is connect with vibration source, by energy conversion unit machine by vibrational energy
It is converted into electric energy.
One end of the flexible piezoelectric foil electret 7 is fixedly connected with the fixed station 10, and the other end vacantly forms freedom
End, and end is fixedly connected with the oscillator 9；The upper and lower surfaces of the flexible piezoelectric foil electret respectively with above lead
Line 5 and lower wire 6 connect；Several Parallel Tunnel structures 11 are equipped with inside the flexible piezoelectric foil electret 7.The flexible pressure
The extending direction of the free end of electroelectret film 7 is vertical with the axial direction of the Parallel Tunnel structure 11；Also, the flexibility
The upper surface of piezo-electric electret film 7 is equipped with strip supporting layer 8, and the setting direction of the supporting layer 8 is the extension of the free end
Direction.
Specifically, the flexible piezoelectric foil electret 7 in the present embodiment includes thermoplastic polymer film piece and fits in described
The conductive electrode of thermoplastic polymer film piece upper and lower surfaces, and the conductive electrode is connect with conducting wire；The thermoplastic poly
Parallel Tunnel structure is equipped in compound film piece, and thermoplastic polymer film piece is symmetrical structure as a whole.Specifically, soft
Property piezo-electric electret film 7 include upper conductive electrode 1, the upper thermoplastic polymer film piece 2, lower thermoplastic polymer film set gradually
Piece 3 and lower conductive electrode 4, and upper conducting wire 5 is drawn on upper conductive electrode 1, lower wire 6 is drawn on lower conductive electrode 4, such as Fig. 2
It is shown.Wherein, thermoplastic polymer film piece is the thermoplastic polymer film piece that casting method is prepared, thermoplastic polymer film
The material of piece is selected from FEP fluorinated ethylene propylene copolymer, and the material of conductive electrode is aluminium, and the section of Parallel Tunnel structure is that ellipse is cut
Face, the tunnel lateral direction width of Parallel Tunnel structure and the ratio of adjacent tunnel spacing are 2:1 on flexible piezoelectric foil electret.
The present embodiment the preparation method comprises the following steps:
(1) fluorinated ethylene propylene (FEP) is pasted on the metal form that upper surface is had to periodical parallel groove structure extending in a straight line
Copolymer (FEP) film, is sequentially placed soft rubber pad, silicagel pad, soft rubber pad and posting with same structure again on FEP
Then the metal form of fep film is clamped it with two steel plates, be sent into vulcanizing press.Hot pressing under the conditions of 40 DEG C and 2MPa
After 4min, the soft rubber pad and silicagel pad being placed between two metal forms are removed, and two metal form grooves are aligned and are fixed,
It is sent into the baking oven that temperature setting is 340 DEG C and heats 15min, after temperature is reduced to room temperature, remove template, to obtain having flat
The fep film of row tunnel structure；
(2) aluminium electrode of 100nm thickness is plated respectively in FEP upper and lower surface with vacuum deposition method；
(3) it is charged with contact mise-a-la-masse method to the Parallel Tunnel fep film with conductive electrode；
(4) supporting layer is done in the PET of the upper surface the FEP patch one fixed width perpendicular to Parallel Tunnel direction；
(5) in the insulating tape of free end side patch certain mass as oscillator；
(6) it is attached on the platform with certain altitude using the other end of fep film as fixing end, has free end enough
Space oscillations have then just obtained the beam type flexible vibration energy acquisition based on Parallel Tunnel fep film in the present embodiment
The energy conversion unit of device.
Present embodiments provide a kind of preparation method of beam type flexible vibration energy collecting device, the energy collecting device by
Energy conversion unit, rectification unit, Power Management Unit composition, energy conversion unit material therefor are laterally to have larger stretch
The polymer matrix piezoelectric membrane of contracting, selected structure are cantilever beam structure.Due to used piezoelectric membrane cross with higher
To piezoelectric activity, and cantilever beam structure can make the film laterally generate larger deformation, therefore be adopted based on energy made of the two
Storage can be realized the vibrational energy expeditiously acquired in ambient enviroment.In addition, the flexibility of polymer matrix piezoelectric film makes this
Energy collecting device is even at also not easy to break in biggish vibration environment, while transducing unit can be sheared according to actual environment
At random length.The energy collecting device prepared by method of the present invention have good light weight, flexibility, simple process,
The features such as flexible for installation, the vibrational energy acquisition that can be used in complex environment.
Embodiment 2
A kind of energy conversion unit of beam type flexible vibration energy collecting device, as shown in Figure 1, being stayed including flexible piezoelectric
Polar body film 7, fixed station 10 and oscillator 9；The energy conversion unit is applied in energy collecting device, and energy collecting device is converted by energy
Unit, rectification unit, Power Management Unit composition；Fixed station 10 is connect with vibration source, will be vibrated by energy conversion unit machine
Electric energy can be converted into.
One end of the flexible piezoelectric foil electret 7 is fixedly connected with the fixed station 10, and the other end vacantly forms freedom
End, and end is fixedly connected with the oscillator 9；The upper and lower surfaces of the flexible piezoelectric foil electret respectively with above lead
Line 5 and lower wire 6 connect；Several Parallel Tunnel structures 11, the flexible pressure are equipped with inside the flexible piezoelectric foil electret 7
The extending direction of the free end of electroelectret film is parallel with the axial direction of the Parallel Tunnel structure.
The selection of the structure and material of flexible piezoelectric foil electret 7 in the present embodiment and flexible in embodiment 1 are pressed
The selection situation of electroelectret film 7 is consistent.
The present embodiment the preparation method comprises the following steps:
(1) fep film is pasted on the metal form that upper surface is had to periodical parallel groove structure extending in a straight line,
Soft rubber pad, silicagel pad, soft rubber pad and the metal form for posting fep film with same structure are sequentially placed on FEP again,
Then it is clamped with two steel plates, is sent into vulcanizing press.Under the conditions of 40 DEG C and 2MPa after hot pressing 4min, it is placed on two gold medals
The soft rubber pad and silicagel pad belonged between template removes, and two metal form grooves are aligned and are fixed, and being sent into temperature setting is 340
DEG C baking oven in heat 15min, after temperature is reduced to room temperature, remove template, to obtain Parallel Tunnel fep film；
(2) aluminium electrode of 100nm thickness is plated respectively in FEP upper and lower surface with vacuum deposition method；
(3) it is charged with contact mise-a-la-masse method to obtained Parallel Tunnel fep film；(4) in the free end of fep film, patch is certain
The insulating tape of quality is as oscillator；
(5) it is attached on the platform with certain altitude using the other end of fep film as fixing end, has free end enough
Space oscillations have then just obtained the energy of second of beam type flexible vibration energy collecting device based on Parallel Tunnel fep film
Measure converting unit.
Embodiment 3
A kind of energy conversion unit of beam type flexible vibration energy collecting device, as shown in Figure 1, being stayed including flexible piezoelectric
Polar body film 7, fixed station 10 and oscillator 9；The energy conversion unit is applied in energy collecting device, and energy collecting device is converted by energy
Unit, rectification unit, Power Management Unit composition；Fixed station 10 is connect with vibration source, will be vibrated by energy conversion unit machine
Electric energy can be converted into.One end of the flexible piezoelectric foil electret 7 is fixedly connected with the fixed station 10, and the other end is vacantly formed
Free end, and end is fixedly connected with the oscillator 9；The upper and lower surfaces of the flexible piezoelectric foil electret respectively with
Upper conducting wire 5 and lower wire 6 connect；Several Parallel Tunnel structures 11 are equipped with inside the flexible piezoelectric foil electret 7.It is described soft
The extending direction of the free end of property piezo-electric electret film 7 is vertical with the axial direction of the Parallel Tunnel structure 11；Also, it is described
The upper surface of flexible piezoelectric foil electret 7 is equipped with strip supporting layer 8, and the setting direction of the supporting layer 8 is the free end
Extending direction.
Specifically, the flexible piezoelectric foil electret 10 in the present embodiment includes thermoplastic polymer film piece and fits in described
The conductive electrode of thermoplastic polymer film piece upper and lower surfaces, and the conductive electrode is connect with conducting wire；Thermoplastic polymer
The Parallel Tunnel structure extended equipped with horizontal direction along zigzag fashion in diaphragm, and thermoplastic polymer film piece as a whole
For symmetrical structure.Specifically, flexible piezoelectric foil electret 10 includes upper conductive electrode 1, the upper thermoplastic polymer set gradually
Diaphragm 2, lower thermoplastic polymer film piece 3 and lower conductive electrode 4, and upper conducting wire 5 is drawn on upper conductive electrode 1, lower conductive electricity
Lower wire 6 is drawn on pole 4, as shown in Figure 2.Wherein, thermoplastic polymer film piece is the thermoplastic poly that method for stamping is prepared
Compound film piece, the material of thermoplastic polymer film piece are selected from polytetrafluoroethylene (PTFE), and the material of conductive electrode is gold, Parallel Tunnel structure
Section be ellipse section, the tunnel width of Parallel Tunnel structural section is 1mm, adjacent tunnel on flexible piezoelectric foil electret
Road spacing is 0.25mm.
The present embodiment the preparation method comprises the following steps:
(1) tetrafluoroethylene is prepared into the internal thermoplastic polymer film piece with Parallel Tunnel structure by imprinting；
(2) conductive electrode gold is covered each by the upper and lower surfaces of the thermoplastic polymer film piece；
(3) by corona polarizing method to the thermoplastic polymer film piece in Parallel Tunnel structure be injected separately into positive charge and
Negative electrical charge；It is bonded supporting layer in the upper surface of the thermoplastic polymer film piece, obtains the flexible piezoelectric foil electret；
(4) oscillator is fixed on one end of the flexible piezoelectric foil electret as free end；
(5) two conducting wires are drawn respectively from two conductive electrodes；
(6) other end of flexible piezoelectric foil electret is fixed on fixed station, so that the flexible piezoelectric foil electret
Free end it is hanging, obtain the energy conversion unit.
Embodiment 4
The structure of the present embodiment is same as Example 3, the difference is that the concrete shape of flexible piezoelectric foil electret 7 is set
Set the selection with material, be equipped in the present embodiment, in thermoplastic polymer film piece horizontal direction extend along wave-like it is parallel
Tunnel structure, and thermoplastic polymer film piece is symmetrical structure as a whole, and thermoplastic polymer film piece is pouring procedure
The material of the thermoplastic polymer film piece being prepared, thermoplastic polymer film piece is selected from polyethylene, and the material of conductive electrode is
Silver, it is waveform that the tunnel of Parallel Tunnel structure, which extends mode, and tunnel section is parallel on flexible piezoelectric foil electret to be oval
The tunnel width in tunnel section is 1.5mm, and adjacent tunnel spacing is 0.5mm.
Preparation method are as follows:
(1) polyethylene film is prepared into the internal thermoplastic polymer film piece with Parallel Tunnel structure by imprinting；
(2) conductive electrode silver is covered each by the upper and lower surfaces of the thermoplastic polymer film piece；
(3) positive charge is injected separately into the thermoplastic polymer film piece in Parallel Tunnel structure by contact method charging method
And negative electrical charge；It is bonded supporting layer in the upper surface of the thermoplastic polymer film piece, obtains the flexible piezoelectric foil electret；
(4) oscillator is fixed on one end of the flexible piezoelectric foil electret as free end；
(5) two conducting wires are drawn respectively from two conductive electrodes；
(6) other end of flexible piezoelectric foil electret is fixed on fixed station, so that the flexible piezoelectric foil electret
Free end it is hanging, obtain the energy conversion unit.
Embodiment 5
The structure of the present embodiment is same as Example 3, the difference is that the concrete shape of flexible piezoelectric foil electret 10
It is arranged and the selection of material, in the present embodiment, thermoplastic polymer film piece is the thermoplastic polymer that pouring procedure is prepared
Diaphragm, the material of thermoplastic polymer film piece are selected from polypropylene, and the material of conductive electrode is electrical conductivity alloy, specially copper alloy,
The section of Parallel Tunnel structure is elliptic cross-section, and the tunnel in 11 section of Parallel Tunnel structure is horizontal on flexible piezoelectric foil electret 7
It is 0.1 to width and the ratio of adjacent tunnel spacing.
Preparation method are as follows:
(1) polyethylene film is prepared into the internal thermoplastic polymer film piece with Parallel Tunnel structure by imprinting；
(2) electrical conductivity alloy is covered each by the upper and lower surfaces of the thermoplastic polymer film piece；
(3) by ion injection method to the thermoplastic polymer film piece in Parallel Tunnel structure be injected separately into positive charge and
Negative electrical charge；It is bonded supporting layer in the upper surface of the thermoplastic polymer film piece, obtains the flexible piezoelectric foil electret；
(4) oscillator is fixed on one end of the flexible piezoelectric foil electret as free end；
(5) two conducting wires are drawn respectively from two conductive electrodes；
(6) other end of flexible piezoelectric foil electret is fixed on fixed station, so that the flexible piezoelectric foil electret
Free end it is hanging, obtain the energy conversion unit.
Embodiment 6
The structure of the present embodiment is same as Example 3, the difference is that the concrete shape of flexible piezoelectric foil electret 10
It is arranged and the selection of material, in the present embodiment, thermoplastic polymer film piece is the thermoplastic polymer that pouring procedure is prepared
Diaphragm, the material of thermoplastic polymer film piece are selected from polypropylene, and the material of conductive electrode is graphite, the section of Parallel Tunnel structure
For elliptic cross-section, on flexible piezoelectric foil electret 7 between the tunnel lateral direction width and adjacent tunnel in 11 section of Parallel Tunnel structure
Away from ratio be 10.
Preparation method are as follows:
(1) polypropylene screen is prepared by the internal thermoplastic polymer film with Parallel Tunnel structure by pouring procedure
Piece；
(2) conductive electrode graphite is covered each by the upper and lower surfaces of the thermoplastic polymer film piece；
(3) by ion injection method to the thermoplastic polymer film piece in Parallel Tunnel structure be injected separately into positive charge and
Negative electrical charge；It is bonded supporting layer in the upper surface of the thermoplastic polymer film piece, obtains the flexible piezoelectric foil electret；
(4) oscillator is fixed on one end of the flexible piezoelectric foil electret as free end；
(5) two conducting wires are drawn respectively from two conductive electrodes；
(6) other end of flexible piezoelectric foil electret is fixed on fixed station, so that the flexible piezoelectric foil electret
Free end it is hanging, obtain the energy conversion unit.
Embodiment 7
The structure of the present embodiment is same as Example 3, the difference is that the concrete shape of flexible piezoelectric foil electret 10
It is arranged and the selection of material, in the present embodiment, thermoplastic polymer film piece is the thermoplastic polymer that pouring procedure is prepared
Diaphragm, the material of thermoplastic polymer film piece are selected from polycarbonate, and the material of conductive electrode is electrical conductivity alloy, and specially aluminium closes
Gold, the tunnel lateral direction width in 11 section of Parallel Tunnel structure and the ratio of adjacent tunnel spacing are on flexible piezoelectric foil electret 7
5。
Preparation method are as follows:
(1) polycarbonate membrane is prepared by the internal thermoplastic polymer film with Parallel Tunnel structure by method for stamping
Piece；
(2) electrical conductivity alloy is covered each by the upper and lower surfaces of the thermoplastic polymer film piece；
(3) positive charge is injected separately into the thermoplastic polymer film piece in Parallel Tunnel structure by electron beam method for implanting
And negative electrical charge；It is bonded supporting layer in the upper surface of the thermoplastic polymer film piece, obtains the flexible piezoelectric foil electret；
(4) oscillator is fixed on one end of the flexible piezoelectric foil electret as free end；
(5) two conducting wires are drawn respectively from two conductive electrodes；
(6) other end of flexible piezoelectric foil electret is fixed on fixed station, so that the flexible piezoelectric foil electret
Free end it is hanging, obtain the energy conversion unit.
Embodiment 8
The structure of the present embodiment is same as Example 3, the difference is that the concrete shape of flexible piezoelectric foil electret 10
It is arranged and the selection of material, in the present embodiment, thermoplastic polymer film piece is the thermoplastic polymer that pouring procedure is prepared
Diaphragm, the material of thermoplastic polymer film piece are selected from poly terephthalic acid, and the material of conductive electrode is graphene, Parallel Tunnel knot
The section of structure is elliptic cross-section, the tunnel lateral direction width and phase in 11 section of Parallel Tunnel structure on flexible piezoelectric foil electret 7
The ratio of adjacent tunnel spacing is 8.
Preparation method are as follows:
(1) poly terephthalic acid film preparation is polymerize at the internal thermoplasticity with Parallel Tunnel structure by method for stamping
Object diaphragm；
(2) conductive electrode graphene is covered each by the upper and lower surfaces of the thermoplastic polymer film piece；
(3) positive charge is injected separately into the thermoplastic polymer film piece in Parallel Tunnel structure by electron beam method for implanting
And negative electrical charge；It is bonded supporting layer in the upper surface of the thermoplastic polymer film piece, obtains the flexible piezoelectric foil electret；
(4) oscillator is fixed on one end of the flexible piezoelectric foil electret as free end；
(5) two conducting wires are drawn respectively from two conductive electrodes；
(6) other end of flexible piezoelectric foil electret is fixed on fixed station, so that the flexible piezoelectric foil electret
Free end it is hanging, obtain the energy conversion unit.
Embodiment 9
The structure of the present embodiment is same as Example 3, the difference is that the concrete shape of flexible piezoelectric foil electret 10
It is arranged and the selection of material, in the present embodiment, thermoplastic polymer film piece is the thermoplastic polymer that pouring procedure is prepared
Diaphragm, the material of thermoplastic polymer film piece are selected from silica gel, and the material of conductive electrode is graphene, flexible piezoelectric foil electret 7
The tunnel lateral direction width in upper 11 section of Parallel Tunnel structure and the ratio of adjacent tunnel spacing are 9.
Preparation method are as follows:
(1) pellosil is prepared by the internal thermoplastic polymer film piece with Parallel Tunnel structure by method for stamping；
(2) conductive electrode graphene is covered each by the upper and lower surfaces of the thermoplastic polymer film piece；
(3) positive charge is injected separately into the thermoplastic polymer film piece in Parallel Tunnel structure by electron beam method for implanting
And negative electrical charge；It is bonded supporting layer in the upper surface of the thermoplastic polymer film piece, obtains the flexible piezoelectric foil electret；
(4) oscillator is fixed on one end of the flexible piezoelectric foil electret as free end；
(5) two conducting wires are drawn respectively from two conductive electrodes；
(6) other end of flexible piezoelectric foil electret is fixed on fixed station, so that the flexible piezoelectric foil electret
Free end it is hanging, obtain the energy conversion unit.
Specific embodiments of the present invention are described above.It is to be appreciated that the invention is not limited to above-mentioned
Particular implementation, those skilled in the art can make various deformations or amendments within the scope of the claims, this not shadow
Ring substantive content of the invention.
Claims (10)
1. a kind of energy conversion unit of beam type vibration energy collector, including flexible piezoelectric foil electret (7), fixed station
(10) and oscillator (9)；One end of the flexible piezoelectric foil electret (7) is fixedly connected with the fixed station (10), and the other end is outstanding
Sky forms free end, and end is fixedly connected with the oscillator (9)；The surface connection of the flexible piezoelectric foil electret is led
Line；It is characterized in that,
Several Parallel Tunnel structures (11) are equipped with inside the flexible piezoelectric foil electret (7).
2. a kind of energy conversion unit of beam type vibration energy collector according to claim 1, which is characterized in that
The flexible piezoelectric foil electret (7) includes thermoplastic polymer film piece and fits in thermoplastic polymer film piece upper surface
With the conductive electrode of lower surface, and the conductive electrode is connect with conducting wire；Parallel Tunnel is equipped in the thermoplastic polymer film piece
Structure (11).
3. a kind of energy conversion unit of beam type vibration energy collector according to claim 2, which is characterized in that
The Parallel Tunnel structure (11) is using thermoplastic polymer film piece as the symmetrical structure of symmetry axis.
4. a kind of energy conversion unit of beam type vibration energy collector according to claim 2, which is characterized in that
The thermoplastic polymer film piece is the thermoplastic polymer film piece that curtain coating, coining or pouring procedure are prepared；It is described
The material of thermoplastic polymer film piece is selected from FEP fluorinated ethylene propylene copolymer, polytetrafluoroethylene (PTFE), polyethylene, polypropylene, polycarbonate
Or polyethylene terephthalate；
The material of the conductive electrode is aluminium, gold, silver, electrical conductivity alloy, graphite or graphene.
5. a kind of energy conversion unit of beam type vibration energy collector according to claim 2, which is characterized in that
At the Parallel Tunnel structure (11) upper and lower surfaces of corresponding thermoplastic polymer film piece be injected separately into positive charge and
Negative electrical charge.
6. a kind of energy conversion unit of beam type vibration energy collector according to claim 1, which is characterized in that
The Parallel Tunnel structure (11) by linear, zigzag or it is wavy in a manner of extend；Its cross sectional shape is ellipse, circle
Or diamond shape；The tunnel lateral direction width and adjacent tunnel in Parallel Tunnel structure (11) section on the flexible piezoelectric foil electret (7)
The ratio of spacing is 0.1~10.
7. a kind of energy conversion unit of beam type vibration energy collector according to claim 1, which is characterized in that
The extending direction of the free end of the flexible piezoelectric foil electret (7) and the axial direction of the Parallel Tunnel structure (11) hang down
Directly；Also, the upper surface and/or lower surface of the flexible piezoelectric foil electret (7) are equipped with strip supporting layer, the supporting layer
(8) setting direction is the extending direction of the free end.
8. a kind of energy conversion unit of beam type vibration energy collector according to claim 1, which is characterized in that
The extending direction of the free end of the flexible piezoelectric foil electret (7) and the axial direction of the Parallel Tunnel structure (11) are flat
Row.
9. a kind of preparation method of the energy conversion unit of beam type vibration energy collector as described in claim 1,
It is characterized in that, comprising the following steps:
(1) thermoplastic polymer film piece is made by the internal thermoplasticity with Parallel Tunnel structure by curtain coating, coining or casting
Polymer membrane；
(2) conductive electrode is covered each by the upper and lower surfaces of the thermoplastic polymer film piece；
(3) by corona polarizing, contact method charging, ion implanting or electron beam method for implanting to the thermoplastic in Parallel Tunnel structure
Property polymer membrane is injected separately into positive charge and negative electrical charge, obtains the flexible piezoelectric foil electret；
(4) oscillator is fixed on one end of the flexible piezoelectric foil electret as free end；
(5) two conducting wires are drawn respectively from two conductive electrodes；
(6) other end of flexible piezoelectric foil electret is fixed on fixed station so that the flexible piezoelectric foil electret from
It is hanging by holding, obtain the energy conversion unit.
10. a kind of preparation method of the energy conversion unit of beam type vibration energy collector according to claim 9,
It is characterized in that, the axial direction of the extending direction of the free end of the flexible piezoelectric foil electret and the Parallel Tunnel structure
Vertically；
The step (3) is by corona polarizing, contact method charging, ion implanting or electron beam method for implanting to Parallel Tunnel knot
Thermoplastic polymer film piece in structure is injected separately into positive charge and negative electrical charge；In the upper surface of the thermoplastic polymer film piece
And/or lower surface is bonded supporting layer, obtains the flexible piezoelectric foil electret.
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Application publication date: 20190716 |