CN110061652B - Broadband static micro-energy collector, collection system and preparation method of collection system - Google Patents

Broadband static micro-energy collector, collection system and preparation method of collection system Download PDF

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CN110061652B
CN110061652B CN201910308898.1A CN201910308898A CN110061652B CN 110061652 B CN110061652 B CN 110061652B CN 201910308898 A CN201910308898 A CN 201910308898A CN 110061652 B CN110061652 B CN 110061652B
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polymer film
upper electrode
lower electrode
elasticity polymer
bracket
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CN110061652A (en
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张晓青
马星晨
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Tongji University
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00Electrostatic generators or motors using a solid moving electrostatic charge carrier
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Abstract

The invention relates to a broadband static micro-energy collector, a collection system and a preparation method thereof, wherein the collection system comprises an upper electrode, a high-elasticity polymer film, a lower electrode, a bracket, a mass block fixedly adhered to the middle position of the upper electrode, an upper electrode lead connected with the upper electrode and a lower electrode lead connected with the lower electrode; the upper electrode is jointed and connected with the high-elasticity polymer film; the middle part of the bracket is provided with a groove in the direction deviating from the high-elasticity polymer film, and the two ends of the bracket are connected with the high-elasticity polymer film in a fitting manner; the lower electrode is attached to the inner part of the groove; a cavity is formed between the lower electrode and the high elastic polymer film. Compared with the prior art, the invention has the advantages of simple structure, adjustable resonant frequency, wide frequency band and the like, and can be used for collecting environmental vibration energy, human motion energy and the like.

Description

Broadband static micro-energy collector, collection system and preparation method of collection system
Technical Field
The invention relates to the technical field of functional devices, in particular to a broadband static micro-energy collector.
Background
With the continuous development of micro-electromechanical system technology and integrated circuit technology, the development of small-sized and low-power-consumption microelectronic devices has made great progress. The development of related micro energy technology is relatively lagged, and the application of the chemical battery in some microelectronic products is limited due to the defects of large size, limited service life, replacement and the like of the chemical battery, and the defect is more obvious especially for the wireless sensing network and the embedded system which are rapidly developed at present. The method utilizes the ubiquitous high-energy-density vibration energy in the nature and converts the vibration energy into electric energy, so as to provide continuous electric energy for low-power-consumption electronic devices, and the method becomes one of hot spots in the technical field of new energy.
Chinese patent CN106225811A discloses a flexible piezoelectric sensor array with power generation function and a manufacturing method thereof, wherein the sensor array comprises an array layer, a flexible insulating layer and a flexible power generation film which are encapsulated in a flexible protective film and sequentially arranged. Compared with the prior art, the flexible piezoelectric sensor array and the mechanical energy capturing unit are organically combined together, and the flexible piezoelectric sensor array has sensing and mechanical energy capturing functions. The finished device prepared by the method has the characteristics of good flexibility, light weight, high sensitivity, low cost, self-energy supply and the like, and can be used for robot skin, a touch sensing system, a flexible keyboard, an intelligent cushion, an intelligent floor and the like. However, the flexible piezoelectric sensor obtained by the patent technology does not have a free telescopic function in the length direction, and the resonance frequency of the flexible piezoelectric sensor cannot be adjusted, so that the frequency range of energy collection is narrow, and the improvement of the energy collection efficiency is not facilitated. In addition, the finished device prepared by the patent technology needs to apply larger acting force to the finished device to realize higher output power, namely, the finished device is difficult to miniaturize as the finished device needs larger oscillator mass as an energy collector.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provide a broadband electrostatic micro-energy collector and a preparation method thereof.
The purpose of the invention can be realized by the following technical scheme:
a broadband static micro-energy collector comprises an upper electrode, a high-elasticity polymer film, a lower electrode, a support, a mass block, an upper electrode lead and a lower electrode lead, wherein the mass block is fixedly bonded at the middle position of the upper electrode;
the upper electrode is attached to the high-elasticity polymer film;
a groove is formed in the middle of the bracket in the direction departing from the high-elasticity polymer film, and two ends of the bracket are connected with the high-elasticity polymer film in a fit manner;
the lower electrode is attached to the inner portion of the groove.
The grooves in the middle of the lower electrode and the support are arc-shaped, triangular or trapezoidal grooves.
The surface of one side of the high-elasticity polymer film is connected with the upper electrode, and the surface of the other side of the high-elasticity polymer film is injected with real charges;
the method for injecting real charges on the surface of the high-elasticity polymer film is selected from corona polarization, contact charging, ion injection or electron beam injection.
The high-elasticity polymer film is prepared by a polymer through a casting, coining or pouring method, and the polymer is selected from one of PTFE, FEP, COC, PET, PI, PE, PEN, Cytop or PP;
the bracket is made of PET, organic silicon rubber or metal spring pieces;
the upper electrode and the lower electrode are made of aluminum, gold, silver, alloy, graphite or graphene.
The invention also provides a broadband static micro-energy acquisition system which is formed by symmetrically arranging the broadband static micro-energy acquisition devices;
the upper electrode, the high-elasticity polymer film, the lower electrode and the bracket are provided with two sets and are symmetrically arranged;
two ends of two symmetrically arranged upper electrodes are connected through a conductive material, and the upper electrode lead is connected with the conductive material;
the mass block is arranged between the two sets of upper electrodes, and two ends of the mass block are fixedly bonded with the two sets of upper electrodes respectively.
Positive charges and negative charges are respectively injected into the surfaces of two sets of high-elasticity polymer films which are symmetrically arranged.
The invention also provides a preparation method of the broadband static micro-energy collector, which comprises the following steps:
(1) preparing a polymer into a high-elasticity polymer film by casting, coining or pouring; covering the surface of the high-elasticity polymer film with an upper electrode; injecting real charges from the free surface of the uncovered upper electrode to the surface and the near surface of the high-elasticity film by a corona polarization, contact charging, ion injection or electron beam injection method;
(2) preparing a bracket with a groove in the middle; a lower electrode is attached to the inner part of the groove in the middle of the bracket;
(3) attaching and connecting two ends of a high-elasticity polymer film with real charges injected into the surface with two ends of the bracket;
(4) bonding a mass block at the middle position of a high-elasticity film with the surface covered with an upper electrode;
(5) and respectively leading out an upper electrode lead and a lower electrode lead from the upper electrode and the lower electrode to obtain the broadband static micro-energy collector.
The invention also provides a preparation method of the broadband electrostatic micro-energy acquisition system, which comprises the following steps:
(1) preparing a polymer into a high-elasticity polymer film by casting, coining or pouring; covering the surface of the high-elasticity polymer film with an upper electrode; injecting real positive charges or real negative charges from the free surface of the uncovered upper electrode to the surface and the near surface of the high-elasticity film by a corona polarization, contact charging, ion injection or electron beam injection method;
(2) preparing a bracket with a groove in the middle; a lower electrode is attached to the inner part of the groove in the middle of the bracket;
(3) attaching and connecting two ends of a high-elasticity polymer film with the surface injected with real positive charges or real negative charges with two ends of the bracket to obtain an intermediate product;
(4) taking two sets of intermediate products with matched sizes obtained in the step (3), wherein the surface injected charges of the high-elasticity polymer film in the intermediate products are different; symmetrically placing two sets of intermediate products to enable notches of grooves in the middle of the support to be opposite; bonding the two upper electrodes by using a conductive material;
(5) bonding two ends of the mass block with the two upper electrodes respectively;
(6) and leading out an upper electrode lead from the conductive material, and leading out a lower electrode lead from the lower electrode to obtain the broadband static micro-energy collector with a double-layer symmetrical structure. The energy collector of the invention consists of a small mass block, a high-elasticity electret film and an arc-shaped groove device. Based on the special structural characteristics of the device, the device can freely stretch in the length direction, so that the device can realize energy collection in a wider frequency range. The double-layer vertical symmetrical structure can be further manufactured, the double-layer vertical symmetrical structure comprises a shared small mass block, two high-elasticity electret films with opposite polarities and two arc-shaped groove devices, when the vibrator vibrates, the two films are pressed and bent at the same time, and compared with the situation of a single film, the output power of the double-layer vertical symmetrical structure is doubled, so that the energy collection efficiency can be improved, and the energy collector is easy to miniaturize and can be integrated with electronic equipment.
The method for supporting the bracket with the groove in the middle part by the bracket is determined according to the selection condition of the bracket material, the bracket is made of thermoplastic material, and the bracket with the groove in the middle part can be supported by the bracket through blow molding at a certain temperature; if the bracket is a metal spring piece, the bracket with the groove in the middle can be obtained by a template method stamping method.
Compared with the prior art, the invention has the following advantages:
(1) the energy collector obtained by the invention can capture the environmental vibration energy in a wider frequency range.
(2) The finished device prepared by the method has the characteristics of simple structure, adjustable resonant frequency, wide frequency band and the like.
(3) The micro-energy collector prepared by the method can be used for collecting environmental vibration energy, human motion energy and the like;
(4) when the energy collector is obtained by using the invention, higher output power can be obtained by applying smaller acting force to the film, therefore, the finished device of the invention is easy to miniaturize and has wider application range.
Drawings
FIG. 1 is a schematic structural view of the present invention in example 1;
FIG. 2 is a schematic structural view of the present invention in example 2;
FIG. 3 is a schematic structural view of the present invention in example 3;
FIG. 4 is a schematic structural view of the present invention in example 4;
FIG. 5 is a schematic structural view of the present invention in example 5;
FIG. 6 is a schematic structural view of the present invention in example 6;
in the figure, 1 is a mass, 2 is an upper electrode lead, 3 is an upper electrode, 4 is a high elastic polymer film, 5 is a support, 6 is a lower electrode, 7 is a lower electrode lead, 8 is a first support, 9 is a second support, 10 is a first lower electrode, 11 is a second lower electrode, 12 is a first high elastic polymer film, 13 is a second high elastic polymer film, 14 is a first upper electrode, 15 is a second upper electrode, and 16 is a conductive material.
Detailed Description
The present invention will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the invention, but are not intended to limit the invention in any way. It should be noted that variations and modifications can be made by persons skilled in the art without departing from the spirit of the invention. All falling within the scope of the present invention.
Example 1
A broadband static micro-energy collector is shown in figure 1 and comprises an upper electrode 3, a high-elasticity polymer film 4, a lower electrode 6, a bracket 5, a mass block 1 fixedly adhered to the middle position of the upper electrode 3, an upper electrode lead 2 connected with the upper electrode 3 and a lower electrode lead 7 connected with the lower electrode 6, wherein the mass block 1 is fixedly adhered to the middle position of the upper electrode 3; the upper electrode 3 is jointed and connected with the high-elasticity polymer film 4; the middle part of the bracket 5 is provided with a groove in the direction departing from the high-elasticity polymer film 4, and the groove is an arc-shaped groove; two ends of the bracket 5 are jointed and connected with the high-elasticity polymer film 4; the lower electrode 6 is attached inside the groove; a cavity is formed between the lower electrode 6 and the highly elastic polymer film 4.
The specific materials and treatment modes of each part in the embodiment are as follows: one side surface of the high-elasticity polymer film 4 is connected with the upper electrode 3, and the surface of the other side is injected with real negative charges; the method for injecting real charges into the surface of the high-elasticity polymer film 4 is corona polarization; the high-elasticity polymer film 4 is a high-elasticity polymer film 4 with a concave-convex structure on the surface, which is prepared by a polymer through an imprinting method; the polymer is FEP; the bracket 5 is made of PET; the upper electrode 3 is made of aluminum, and the lower electrode 6 is made of copper.
The preparation method of the embodiment comprises the following steps:
(1) placing a metal template with a periodic groove structure, the upper surface of which is stuck with an FEP film, on a steel plate, sequentially placing a soft rubber film, silicon rubber and a parallel steel plate on the FEP film, placing the soft rubber film, the silicon rubber and the parallel steel plate in a flat vulcanizing machine, and carrying out hot pressing for 4min at the temperature of 30 ℃ and under the pressure of 2Mpa to obtain a high-elasticity FEP film with a concave-convex structure on the section; coating an aluminum conductive electrode with the thickness of 100nm on one surface of the high-elasticity FEP film as an upper electrode by a vacuum evaporation method; carrying out negative corona charging on the high-elasticity FEP film from a free surface without an electrode through a grid corona polarization system (grid voltage is-1 kV, corona voltage is-10 kV, and charging time is 5min), and injecting real charges into the surface and the near surface of the high-elasticity FEP film;
(2) making a PET support into an arc shape through high-temperature blow molding, and attaching double-sided conductive copper adhesive as a lower electrode inside an arc-shaped groove of the PET support;
(3) sticking two ends of the negative corona charged high-elasticity FEP film to two ends of the arc-shaped groove by utilizing the free surface;
(4) bonding a mass block at the middle position of a high-elasticity FEP film with the surface covered with an aluminum conductive electrode, wherein the mass block is a small copper sheet in the embodiment;
(5) and respectively leading out an upper electrode lead 2 and a lower electrode lead 7 from the upper electrode 3 and the lower electrode 6 to obtain the broadband static micro-energy collector.
Example 2
A broadband static micro-energy collector is shown in figure 2 and comprises an upper electrode 3, a high-elasticity polymer film 4, a lower electrode 6, a bracket 5, a mass block 1 fixedly adhered to the middle position of the upper electrode 3, an upper electrode lead 2 connected with the upper electrode 3 and a lower electrode lead 7 connected with the lower electrode 6, wherein the mass block 1 is fixedly adhered to the middle position of the upper electrode 3; the upper electrode 3 is jointed and connected with the high-elasticity polymer film 4; the middle part of the bracket 5 is provided with a groove in the direction departing from the high-elasticity polymer film 4, and the groove is a triangular groove; two ends of the bracket 5 are jointed and connected with the high-elasticity polymer film 4; the lower electrode 6 is attached inside the groove; a cavity is formed between the lower electrode 6 and the highly elastic polymer film 4.
The specific materials and treatment modes of each part in the embodiment are as follows: one side surface of the high-elasticity polymer film 4 is connected with the upper electrode 3, and the surface of the other side is injected with real charges; the method for injecting real charges into the surface of the high-elasticity polymer film 4 is ion injection; the high-elasticity polymer film 4 is a high-elasticity polymer film 4 prepared by a polymer through a tape casting method; the polymer is PTFE; the bracket 5 is made of PET; the upper electrode 3 is made of aluminum, and the lower electrode 6 is made of copper.
The preparation method of the embodiment comprises the following steps:
(1) preparing polymer PTFE into a high-elasticity polymer film 4 by casting; covering the surface of the high-elasticity polymer film 4 with an upper electrode 3; injecting real charges from the free surface of the non-covered upper electrode 3 to the surface and the near surface of the high-elasticity film by means of corona polarization;
(2) making the bracket 5 into a bracket 5 with a triangular groove in the middle part by high-temperature blow molding; a lower electrode 6 is attached to the inner part of the groove in the middle of the bracket 5;
(3) attaching and connecting two ends of a high-elasticity polymer film 4 with real charges injected into the surface with two ends of a bracket 5;
(4) bonding a mass block 1 at the middle position of a high-elasticity film with the surface covered with an upper electrode 3;
(5) and respectively leading out an upper electrode lead 2 and a lower electrode lead 7 from the upper electrode 3 and the lower electrode 6 to obtain the broadband static micro-energy collector.
Example 3
A broadband static micro-energy collector is shown in figure 3 and comprises an upper electrode 3, a high-elasticity polymer film 4, a lower electrode 6, a bracket 5, a mass block 1 fixedly adhered to the middle position of the upper electrode 3, an upper electrode lead 2 connected with the upper electrode 3 and a lower electrode lead 7 connected with the lower electrode 6, wherein the mass block 1 is fixedly adhered to the middle position of the upper electrode 3; the upper electrode 3 is jointed and connected with the high-elasticity polymer film 4; the middle part of the bracket 5 is provided with a groove in the direction departing from the high-elasticity polymer film 4, and the groove is a trapezoidal groove; two ends of the bracket 5 are jointed and connected with the high-elasticity polymer film 4; the lower electrode 6 is attached inside the groove; a cavity is formed between the lower electrode 6 and the highly elastic polymer film 4.
The specific materials and treatment modes of each part in the embodiment are as follows: one side surface of the high-elasticity polymer film 4 is connected with the upper electrode 3, and the surface of the other side is injected with real charges; the method for injecting real charges into the surface of the high-elasticity polymer film 4 is charging by a contact method; the high-elasticity polymer film 4 is a high-elasticity polymer film 4 prepared by a polymer through a casting method; the polymer is FEP; the bracket 5 is made of PET; the upper electrode 3 is made of aluminum, and the lower electrode 6 is made of copper.
The preparation method of the embodiment comprises the following steps:
(1) preparing polymer FEP into a high-elasticity polymer film 4 by casting; covering the surface of the high-elasticity polymer film 4 with an upper electrode 3; injecting real charges from the free surface not covered with the upper electrode 3 to the surface and the near surface of the high elastic film by a contact charging method;
(2) making the bracket 5 into a bracket 5 with a trapezoidal groove in the middle part by high-temperature blow molding; a lower electrode 6 is attached to the inner part of the groove in the middle of the bracket 5;
(3) attaching and connecting two ends of a high-elasticity polymer film 4 with real charges injected into the surface with two ends of a bracket 5;
(4) bonding a mass block 1 at the middle position of a high-elasticity film with the surface covered with an upper electrode 3;
(5) and respectively leading out an upper electrode lead 2 and a lower electrode lead 7 from the upper electrode 3 and the lower electrode 6 to obtain the broadband static micro-energy collector.
Example 4
A broadband static micro-energy collector is shown in figure 4, and is of a double-layer symmetrical structure and comprises two upper electrodes, a high-elasticity polymer film, a lower electrode and a bracket which are symmetrically arranged; the electrode specifically comprises a first upper electrode 14, a second upper electrode 15, a first high-elasticity polymer film 12, a second high-elasticity polymer film 13, a first lower electrode 10, a second lower electrode 11, a first bracket 8 and a second bracket 9; wherein, the first upper electrode 14, the first high elastic polymer film 12, the first lower electrode 10 and the first support 8 are connected in sequence, and the first upper electrode 14 and the first high elastic polymer film 12 are connected in a laminating way; the middle part of the first bracket 8 is provided with a groove in the direction departing from the first high-elasticity polymer film 12, and the groove is an arc-shaped groove; two ends of the first bracket 8 are jointed and connected with the first high-elasticity polymer film 12; the first lower electrode 10 is attached inside the groove; a cavity is formed between the first lower electrode 10 and the first highly elastic polymer film 12. The second upper electrode 15, the second high elastic polymer film 13, the second lower electrode 11 and the second support 9 are connected in sequence, and are symmetrical with the first upper electrode 14, the first high elastic polymer film 12, the first lower electrode 10 and the first support 8 respectively, and the connection relationship is the same.
The upper and lower components are connected by connecting two ends of two symmetrically arranged upper and lower sets of electrodes through a conductive material, and an upper electrode lead is connected with the conductive material;
the mass block 1 is arranged between the two sets of upper electrodes, and two ends of the mass block 1 are fixedly bonded with the first upper electrode 14 and the second upper electrode 15 respectively.
The specific materials and treatment modes of each part in the embodiment are as follows: the surface of one side of the high-elasticity polymer film is connected with the upper electrode, and the surface of the other side is injected with real charges; positive charges and negative charges are respectively injected into the surfaces of the two sets of high-elasticity polymer films which are symmetrically arranged, namely the positive charges are injected into the surface of the first high-elasticity polymer film 12, and the negative charges are injected into the surface of the second high-elasticity polymer film 13; the method for injecting real charges into the surface of the high-elasticity polymer film is corona polarization; the high-elasticity polymer film is a high-elasticity polymer film with a concave-convex structure on the surface, which is prepared by a polymer through an imprinting method; the polymer is FEP; the bracket is made of PET; the first upper electrode 14 and the second upper electrode 15 are made of aluminum, and the first lower electrode 10 and the second lower electrode 11 are made of copper.
The preparation method of the embodiment comprises the following steps:
(1) placing a metal template with a periodic groove structure, the upper surface of which is stuck with an FEP film, on a steel plate, sequentially placing a soft rubber film, silicon rubber and a parallel steel plate on the FEP film, placing the soft rubber film, the silicon rubber and the parallel steel plate in a flat vulcanizing machine, and carrying out hot pressing for 4min at the temperature of 30 ℃ and under the pressure of 2Mpa to obtain a high-elasticity FEP film with a concave-convex structure on the section; coating an aluminum conductive electrode with the thickness of 100nm on one surface of the high-elasticity FEP film by a vacuum evaporation method to be used as an upper electrode; cutting two high-elasticity FEP films with the same size and single surfaces covered with aluminum conductive electrodes, and respectively carrying out positive corona charging and negative corona charging on the two films from the free surfaces of the uncovered electrodes through a corona polarization system with grids (grid voltage +/-1 kV, corona voltage +/-10 kV and charging time 5 min);
(2) making the PET bracket into an arc shape by high-temperature blow molding; cutting two arc-shaped grooves with the same size and manufactured by a high-temperature blow molding process, and sticking double-sided conductive copper adhesive inside the grooves to be used as a lower electrode;
(3) two ends of two high-elasticity FEP films respectively subjected to positive corona charging and negative corona charging are attached to two ends of the two arc-shaped grooves through the free surface, so that two intermediate products are prepared;
(4) the intermediate products of the two energy collectors are symmetrically arranged up and down, two ends of the intermediate products are bonded by using a conductive adhesive tape to be used as upper electrodes of the micro-energy collectors, and upper electrode leads are led out;
(5) the same mass block is respectively bonded at the middle positions of the high-elasticity FEP films with the surfaces covered with the aluminum conductive electrodes (upper electrodes), wherein the mass block is a small copper sheet in the embodiment;
(6) and respectively leading one lead out from the double-sided conductive copper adhesive (lower electrode) stuck in the two arc-shaped grooves, connecting the two leads, and leading out a lower electrode lead 1 to obtain the broadband static micro-energy collector.
Example 5
A broadband static micro-energy collector is shown in figure 5, and is of a double-layer symmetrical structure and comprises two upper electrodes, a high-elasticity polymer film, a lower electrode and a bracket which are symmetrically arranged; the electrode specifically comprises a first upper electrode 14, a second upper electrode 15, a first high-elasticity polymer film 12, a second high-elasticity polymer film 13, a first lower electrode 10, a second lower electrode 11, a first bracket 8 and a second bracket 9; wherein, the first upper electrode 14, the first high elastic polymer film 12, the first lower electrode 10 and the first support 8 are connected in sequence, and the first upper electrode 14 and the first high elastic polymer film 12 are connected in a laminating way; the middle part of the first bracket 8 is provided with a groove in the direction departing from the first high-elasticity polymer film 12, and the groove is a triangular groove; two ends of the first bracket 8 are jointed and connected with the first high-elasticity polymer film 12; the first lower electrode 10 is attached inside the groove; a cavity is formed between the first lower electrode 10 and the first highly elastic polymer film 12. The second upper electrode 15, the second high elastic polymer film 13, the second lower electrode 11 and the second support 9 are connected in sequence, and are symmetrical with the first upper electrode 14, the first high elastic polymer film 12, the first lower electrode 10 and the first support 8 respectively, and the connection relationship is the same.
The upper and lower components are connected by connecting two ends of two symmetrically arranged upper and lower sets of electrodes through a conductive material, and an upper electrode lead is connected with the conductive material; the mass block 1 is arranged between the two sets of upper electrodes, and two ends of the mass block 1 are fixedly bonded with the first upper electrode 14 and the second upper electrode 15 respectively.
The specific materials and treatment modes of each part in the embodiment are as follows: the surface of one side of the high-elasticity polymer film is connected with the upper electrode, and the surface of the other side is injected with real charges; positive charges and negative charges are respectively injected into the surfaces of the two sets of high-elasticity polymer films which are symmetrically arranged, namely the positive charges are injected into the surface of the first high-elasticity polymer film 12, and the negative charges are injected into the surface of the second high-elasticity polymer film 13; the method for injecting real charges on the surface of the high-elasticity polymer film is electron beam injection; the high-elasticity polymer film is a high-elasticity polymer film with a concave-convex structure on the surface, which is prepared by a polymer through an imprinting method; the polymer is COC; the bracket is made of PET; the first upper electrode 14 and the second upper electrode 15 are made of aluminum, and the first lower electrode 10 and the second lower electrode 11 are made of copper.
The preparation method of the embodiment comprises the following steps:
(1) preparing a high-elasticity polymer film from the polymer COC by stamping; covering the surface of the high-elasticity polymer film with an upper electrode; injecting real positive charges or real negative charges from the free surface of the uncovered upper electrode to the surface and the near surface of the high-elasticity film in an electron beam injection mode;
(2) manufacturing the bracket into a bracket with a triangular groove in the middle part by high-temperature blow molding; a lower electrode is attached to the inner part of the groove in the middle of the bracket;
(3) attaching and connecting two ends of a high-elasticity polymer film with the surface injected with real positive charges or real negative charges with two ends of a bracket to obtain an intermediate product;
(4) taking two sets of intermediate products with matched sizes obtained in the step (3), wherein the surface injected charges of the high-elasticity polymer film in the intermediate products are different; symmetrically placing two sets of intermediate products to enable the notches of the grooves in the middle of the support to be opposite; bonding the two upper electrodes by using a conductive material;
(5) bonding two ends of the mass block with the two upper electrodes respectively;
(6) and leading out an upper electrode lead from the conductive material, and leading out a lower electrode lead from the lower electrode to obtain the broadband electrostatic micro-energy collector with a double-layer symmetrical structure.
Example 6
A broadband static micro-energy collector is shown in figure 6 and is of a double-layer symmetrical structure, comprises two upper electrodes, a high-elasticity polymer film, a lower electrode and a bracket and is symmetrically arranged; the electrode specifically comprises a first upper electrode 14, a second upper electrode 15, a first high-elasticity polymer film 12, a second high-elasticity polymer film 13, a first lower electrode 10, a second lower electrode 11, a first bracket 8 and a second bracket 9; the first upper electrode 14, the first high-elasticity polymer film 12, the first lower electrode 10 and the first support 8 are sequentially connected, the first upper electrode 14 and the first high-elasticity polymer film 12 are attached and connected, and the section of the first high-elasticity polymer film 12 is of a periodic concave-convex structure; the middle part of the first bracket 8 is provided with a groove in the direction departing from the first high-elasticity polymer film 12, and the groove is a trapezoidal groove; two ends of the first bracket 8 are jointed and connected with the first high-elasticity polymer film 12; the first lower electrode 10 is attached inside the groove; a cavity is formed between the first lower electrode 10 and the first highly elastic polymer film 12. The second upper electrode 15, the second high elastic polymer film 13, the second lower electrode 11 and the second support 9 are connected in sequence, and are symmetrical with the first upper electrode 14, the first high elastic polymer film 12, the first lower electrode 10 and the first support 8 respectively, and the connection relationship is the same.
The upper and lower components are connected by connecting two ends of two symmetrically arranged upper and lower sets of electrodes through a conductive material, and an upper electrode lead is connected with the conductive material; the mass block 1 is arranged between the two sets of upper electrodes, and two ends of the mass block 1 are fixedly bonded with the first upper electrode 14 and the second upper electrode 15 respectively.
The specific materials and treatment modes of each part in the embodiment are as follows: the surface of one side of the high-elasticity polymer film is connected with the upper electrode, and the surface of the other side is injected with real charges; positive charges and negative charges are respectively injected into the surfaces of the two sets of high-elasticity polymer films which are symmetrically arranged, namely the positive charges are injected into the surface of the first high-elasticity polymer film 12, and the negative charges are injected into the surface of the second high-elasticity polymer film 13; the method for injecting real charges on the surface of the high-elasticity polymer film is electron beam injection; the high-elasticity polymer film is a high-elasticity polymer film with a concave-convex structure on the surface, which is prepared by a polymer through an imprinting method; the polymer is PI; the bracket is made of PET; the first upper electrode 14 and the second upper electrode 15 are made of aluminum, and the first lower electrode 10 and the second lower electrode 11 are made of copper.
The preparation method of the embodiment comprises the following steps:
(1) preparing a high-elasticity polymer film from the polymer PI through imprinting; covering the surface of the high-elasticity polymer film with an upper electrode; injecting real positive charges or real negative charges from the free surface of the uncovered upper electrode to the surface and the near surface of the high-elasticity film in an electron beam injection mode;
(2) manufacturing the bracket into a bracket with a trapezoidal groove in the middle part by high-temperature blow molding; a lower electrode is attached to the inner part of the groove in the middle of the bracket;
(3) attaching and connecting two ends of a high-elasticity polymer film with the surface injected with real positive charges or real negative charges with two ends of a bracket to obtain an intermediate product;
(4) taking two sets of intermediate products with matched sizes obtained in the step (3), wherein the surface injected charges of the high-elasticity polymer film in the intermediate products are different; symmetrically placing two sets of intermediate products to enable the notches of the grooves in the middle of the support to be opposite; bonding the two upper electrodes by using a conductive material;
(5) bonding two ends of the mass block with the two upper electrodes respectively;
(6) and leading out an upper electrode lead from the conductive material, and leading out a lower electrode lead from the lower electrode to obtain the broadband electrostatic micro-energy collector with a double-layer symmetrical structure.
Example 7
A broadband static micro-energy collector is shown in figure 4, and is of a double-layer symmetrical structure and comprises two upper electrodes, a high-elasticity polymer film, a lower electrode and a bracket which are symmetrically arranged; the electrode specifically comprises a first upper electrode 14, a second upper electrode 15, a first high-elasticity polymer film 12, a second high-elasticity polymer film 13, a first lower electrode 10, a second lower electrode 11, a first bracket 8 and a second bracket 9; wherein, the first upper electrode 14, the first high elastic polymer film 12, the first lower electrode 10 and the first support 8 are connected in sequence, and the first upper electrode 14 and the first high elastic polymer film 12 are connected in a laminating way; the middle part of the first bracket 8 is provided with a groove in the direction departing from the first high-elasticity polymer film 12, and the groove is an arc-shaped groove; two ends of the first bracket 8 are jointed and connected with the first high-elasticity polymer film 12; the first lower electrode 10 is attached inside the groove; a cavity is formed between the first lower electrode 10 and the first highly elastic polymer film 12. The second upper electrode 15, the second high elastic polymer film 13, the second lower electrode 11 and the second support 9 are connected in sequence, and are symmetrical with the first upper electrode 14, the first high elastic polymer film 12, the first lower electrode 10 and the first support 8 respectively, and the connection relationship is the same.
The upper and lower components are connected by connecting two ends of two symmetrically arranged upper and lower sets of electrodes through a conductive material, and an upper electrode lead is connected with the conductive material;
the mass block 1 is arranged between the two sets of upper electrodes, and two ends of the mass block 1 are fixedly bonded with the first upper electrode 14 and the second upper electrode 15 respectively.
The specific materials and treatment modes of each part in the embodiment are as follows: the surface of one side of the high-elasticity polymer film is connected with the upper electrode, and the surface of the other side is injected with real charges; positive charges and negative charges are respectively injected into the surfaces of the two sets of high-elasticity polymer films which are symmetrically arranged, namely the positive charges are injected into the surface of the first high-elasticity polymer film 12, and the negative charges are injected into the surface of the second high-elasticity polymer film 13; the method for injecting real charges into the surface of the high-elasticity polymer film is corona polarization; the high-elasticity polymer film is a high-elasticity polymer film with a concave-convex structure on the surface, which is prepared by a polymer through an imprinting method; the polymer is PE; the bracket is made of organic silicon rubber; the upper electrode and the lower electrode are made of gold.
The preparation method of the embodiment comprises the following steps:
(1) preparing a high-elasticity polymer film from polymer PE by stamping; covering the surface of the high-elasticity polymer film with an upper electrode; injecting real positive charges or real negative charges from the free surface of the uncovered upper electrode to the surface and the near surface of the high-elasticity film in an electron beam injection mode;
(2) making the bracket into a bracket with a groove in the middle part by high-temperature blow molding; a lower electrode is attached to the inner part of the groove in the middle of the bracket;
(3) attaching and connecting two ends of a high-elasticity polymer film with the surface injected with real positive charges or real negative charges with two ends of a bracket to obtain an intermediate product;
(4) taking two sets of intermediate products with matched sizes obtained in the step (3), wherein the surface injected charges of the high-elasticity polymer film in the intermediate products are different; symmetrically placing two sets of intermediate products to enable the notches of the grooves in the middle of the support to be opposite; bonding the two upper electrodes by using a conductive material;
(5) bonding two ends of the mass block with the two upper electrodes respectively;
(6) and leading out an upper electrode lead from the conductive material, and leading out a lower electrode lead from the lower electrode to obtain the broadband electrostatic micro-energy collector with a double-layer symmetrical structure.
Example 8
A broadband static micro-energy collector is shown in figure 4, and is of a double-layer symmetrical structure and comprises two upper electrodes, a high-elasticity polymer film, a lower electrode and a bracket which are symmetrically arranged; the electrode specifically comprises a first upper electrode 14, a second upper electrode 15, a first high-elasticity polymer film 12, a second high-elasticity polymer film 13, a first lower electrode 10, a second lower electrode 11, a first bracket 8 and a second bracket 9; the first upper electrode 14, the first high-elasticity polymer film 12, the first lower electrode 10 and the first support 8 are sequentially connected, the first upper electrode 14 and the first high-elasticity polymer film 12 are attached and connected, and the section of the first high-elasticity polymer film 12 is of a periodic concave-convex structure; the middle part of the first bracket 8 is provided with a groove in the direction departing from the first high-elasticity polymer film 12, and the groove is an arc-shaped groove; two ends of the first bracket 8 are jointed and connected with the first high-elasticity polymer film 12; the first lower electrode 10 is attached inside the groove; a cavity is formed between the first lower electrode 10 and the first highly elastic polymer film 12. The second upper electrode 15, the second high elastic polymer film 13, the second lower electrode 11 and the second support 9 are connected in sequence, and are symmetrical with the first upper electrode 14, the first high elastic polymer film 12, the first lower electrode 10 and the first support 8 respectively, and the connection relationship is the same.
The upper and lower components are connected by connecting two ends of two symmetrically arranged upper and lower sets of electrodes through a conductive material, and an upper electrode lead is connected with the conductive material; the mass block 1 is arranged between the two sets of upper electrodes, and two ends of the mass block 1 are fixedly bonded with the first upper electrode 14 and the second upper electrode 15 respectively.
The specific materials and treatment modes of each part in the embodiment are as follows: the surface of one side of the high-elasticity polymer film is connected with the upper electrode, and the surface of the other side is injected with real charges; positive charges and negative charges are respectively injected into the surfaces of the two sets of high-elasticity polymer films which are symmetrically arranged, namely the positive charges are injected into the surface of the first high-elasticity polymer film 12, and the negative charges are injected into the surface of the second high-elasticity polymer film 13; the method for injecting real charges into the surface of the high-elasticity polymer film is corona polarization; the high-elasticity polymer film is a high-elasticity polymer film with a concave-convex structure on the surface, which is prepared by a polymer through an imprinting method; the polymer is PEN; the bracket is made of organic silicon rubber; the upper electrode and the lower electrode are made of silver.
The preparation method of the embodiment comprises the following steps:
(1) preparing polymer PEN into a high-elasticity polymer film by stamping; covering the surface of the high-elasticity polymer film with an upper electrode; injecting real positive charges or real negative charges from the free surface of the uncovered upper electrode to the surface and the near surface of the high-elasticity film in an electron beam injection mode;
(2) making the bracket into a bracket with a groove in the middle part by high-temperature blow molding; a lower electrode is attached to the inner part of the groove in the middle of the bracket;
(3) attaching and connecting two ends of a high-elasticity polymer film with the surface injected with real positive charges or real negative charges with two ends of a bracket to obtain an intermediate product;
(4) taking two sets of intermediate products with matched sizes obtained in the step (3), wherein the surface injected charges of the high-elasticity polymer film in the intermediate products are different; symmetrically placing two sets of intermediate products to enable the notches of the grooves in the middle of the support to be opposite; bonding the two upper electrodes by using a conductive material;
(5) bonding two ends of the mass block with the two upper electrodes respectively;
(6) and leading out an upper electrode lead from the conductive material, and leading out a lower electrode lead from the lower electrode to obtain the broadband electrostatic micro-energy collector with a double-layer symmetrical structure.
Example 9
A broadband static micro-energy collector is shown in figure 4, and is of a double-layer symmetrical structure and comprises two upper electrodes, a high-elasticity polymer film, a lower electrode and a bracket which are symmetrically arranged; the electrode specifically comprises a first upper electrode 14, a second upper electrode 15, a first high-elasticity polymer film 12, a second high-elasticity polymer film 13, a first lower electrode 10, a second lower electrode 11, a first bracket 8 and a second bracket 9; the first upper electrode 14, the first high-elasticity polymer film 12, the first lower electrode 10 and the first support 8 are sequentially connected, the first upper electrode 14 and the first high-elasticity polymer film 12 are attached and connected, and the section of the first high-elasticity polymer film 12 is of a periodic concave-convex structure; the middle part of the first bracket 8 is provided with a groove in the direction departing from the first high-elasticity polymer film 12, and the groove is an arc-shaped groove; two ends of the first bracket 8 are jointed and connected with the first high-elasticity polymer film 12; the first lower electrode 10 is attached inside the groove; a cavity is formed between the first lower electrode 10 and the first highly elastic polymer film 12. The second upper electrode 15, the second high elastic polymer film 13, the second lower electrode 11 and the second support 9 are connected in sequence, and are symmetrical with the first upper electrode 14, the first high elastic polymer film 12, the first lower electrode 10 and the first support 8 respectively, and the connection relationship is the same.
The upper and lower components are connected by connecting two ends of two symmetrically arranged upper and lower sets of electrodes through a conductive material, and an upper electrode lead is connected with the conductive material; the mass block 1 is arranged between the two sets of upper electrodes, and two ends of the mass block 1 are fixedly bonded with the first upper electrode 14 and the second upper electrode 15 respectively.
The specific materials and treatment modes of each part in the embodiment are as follows: the surface of one side of the high-elasticity polymer film is connected with the upper electrode, and the surface of the other side is injected with real charges; positive charges and negative charges are respectively injected into the surfaces of the two sets of high-elasticity polymer films which are symmetrically arranged, namely the positive charges are injected into the surface of the first high-elasticity polymer film 12, and the negative charges are injected into the surface of the second high-elasticity polymer film 13; the method for injecting real charges into the surface of the high-elasticity polymer film is corona polarization; the high-elasticity polymer film is a high-elasticity polymer film with a concave-convex structure on the surface, which is prepared by a polymer through an imprinting method; the polymer is PP; the bracket is made of metal spring pieces; the upper electrode and the lower electrode are made of graphite.
The preparation method of the embodiment comprises the following steps:
(1) preparing a high-elasticity polymer film from the polymer PP through stamping; covering the surface of the high-elasticity polymer film with an upper electrode; injecting real positive charges or real negative charges from the free surface of the uncovered upper electrode to the surface and the near surface of the high-elasticity film in an electron beam injection mode;
(2) the bracket is manufactured into a bracket with a groove in the middle part by stamping by a template method; a lower electrode is attached to the inner part of the groove in the middle of the bracket;
(3) attaching and connecting two ends of a high-elasticity polymer film with the surface injected with real positive charges or real negative charges with two ends of a bracket to obtain an intermediate product;
(4) taking two sets of intermediate products with matched sizes obtained in the step (3), wherein the surface injected charges of the high-elasticity polymer film in the intermediate products are different; symmetrically placing two sets of intermediate products to enable the notches of the grooves in the middle of the support to be opposite; bonding the two upper electrodes by using a conductive material;
(5) bonding two ends of the mass block with the two upper electrodes respectively;
(6) and leading out an upper electrode lead from the conductive material, and leading out a lower electrode lead from the lower electrode to obtain the broadband electrostatic micro-energy collector with a double-layer symmetrical structure.
Example 10
A broadband static micro-energy collector is shown in figure 4, and is of a double-layer symmetrical structure and comprises two upper electrodes, a high-elasticity polymer film, a lower electrode and a bracket which are symmetrically arranged; the electrode specifically comprises a first upper electrode 14, a second upper electrode 15, a first high-elasticity polymer film 12, a second high-elasticity polymer film 13, a first lower electrode 10, a second lower electrode 11, a first bracket 8 and a second bracket 9; the first upper electrode 14, the first high-elasticity polymer film 12, the first lower electrode 10 and the first support 8 are sequentially connected, the first upper electrode 14 and the first high-elasticity polymer film 12 are attached and connected, and the section of the first high-elasticity polymer film 12 is of a periodic concave-convex structure; the middle part of the first bracket 8 is provided with a groove in the direction departing from the first high-elasticity polymer film 12, and the groove is an arc-shaped groove; two ends of the first bracket 8 are jointed and connected with the first high-elasticity polymer film 12; the first lower electrode 10 is attached inside the groove; a cavity is formed between the first lower electrode 10 and the first highly elastic polymer film 12. The second upper electrode 15, the second high elastic polymer film 13, the second lower electrode 11 and the second support 9 are connected in sequence, and are symmetrical with the first upper electrode 14, the first high elastic polymer film 12, the first lower electrode 10 and the first support 8 respectively, and the connection relationship is the same.
The upper and lower components are connected by connecting two ends of two symmetrically arranged upper and lower sets of electrodes through a conductive material, and an upper electrode lead is connected with the conductive material; the mass block 1 is arranged between the two sets of upper electrodes, and two ends of the mass block 1 are fixedly bonded with the first upper electrode 14 and the second upper electrode 15 respectively.
The specific materials and treatment modes of each part in the embodiment are as follows: the surface of one side of the high-elasticity polymer film is connected with the upper electrode, and the surface of the other side is injected with real charges; positive charges and negative charges are respectively injected into the surfaces of the two sets of high-elasticity polymer films which are symmetrically arranged, namely the positive charges are injected into the surface of the first high-elasticity polymer film 12, and the negative charges are injected into the surface of the second high-elasticity polymer film 13; the method for injecting real charges into the surface of the high-elasticity polymer film is corona polarization; the high-elasticity polymer film is a high-elasticity polymer film with a concave-convex structure on the surface, which is prepared by a polymer through an imprinting method; the polymer is PP; the bracket is made of metal spring pieces; the upper electrode and the lower electrode are made of graphene.
The preparation method of the embodiment comprises the following steps:
(1) preparing a high-elasticity polymer film from the polymer PP through stamping; covering the surface of the high-elasticity polymer film with an upper electrode; injecting real positive charges or real negative charges from the free surface of the uncovered upper electrode to the surface and the near surface of the high-elasticity film in an electron beam injection mode;
(2) the bracket is manufactured into a bracket with a groove in the middle part by stamping by a template method; a lower electrode is attached to the inner part of the groove in the middle of the bracket;
(3) attaching and connecting two ends of a high-elasticity polymer film with the surface injected with real positive charges or real negative charges with two ends of a bracket to obtain an intermediate product;
(4) taking two sets of intermediate products with matched sizes obtained in the step (3), wherein the surface injected charges of the high-elasticity polymer film in the intermediate products are different; symmetrically placing two sets of intermediate products to enable the notches of the grooves in the middle of the support to be opposite; bonding the two upper electrodes by using a conductive material;
(5) bonding two ends of the mass block with the two upper electrodes respectively;
(6) and leading out an upper electrode lead from the conductive material, and leading out a lower electrode lead from the lower electrode to obtain the broadband electrostatic micro-energy collector with a double-layer symmetrical structure.
Example 11
A broadband static micro-energy collector is shown in figure 1 and comprises an upper electrode 3, a high-elasticity polymer film 4, a lower electrode 6, a bracket 5, a mass block 1 fixedly adhered to the middle position of the upper electrode 3, an upper electrode lead 2 connected with the upper electrode 3 and a lower electrode lead 7 connected with the lower electrode 6, wherein the mass block 1 is fixedly adhered to the middle position of the upper electrode 3; the upper electrode 3 is jointed and connected with the high-elasticity polymer film 4; the middle part of the bracket 5 is provided with a groove in the direction departing from the high-elasticity polymer film 4, and the groove is an arc-shaped groove; two ends of the bracket 5 are jointed and connected with the high-elasticity polymer film 4; the lower electrode 6 is attached inside the groove; a cavity is formed between the lower electrode 6 and the highly elastic polymer film 4.
The specific materials and treatment modes of each part in the embodiment are as follows: the surface of one side of the high-elasticity polymer film 4 is connected with the upper electrode 3, and the surface of the other side is injected with real positive charges; the method for injecting real charges into the surface of the high-elasticity polymer film 4 is corona polarization; the high-elasticity polymer film 4 is a high-elasticity polymer film 4 with a concave-convex structure on the surface, which is prepared by a polymer through an imprinting method; the polymer material is Cytop; the bracket 5 is made of PET; the upper electrode 3 is made of aluminum, and the lower electrode 6 is made of copper.
The preparation method of the embodiment comprises the following steps:
(1) placing a metal template with a periodic groove structure, the upper surface of which is stuck with a Cytop film, on a steel plate, sequentially placing a soft rubber film, silicon rubber and a parallel steel plate on the Cytop film, placing the soft rubber film, the silicon rubber and the parallel steel plate in a flat vulcanizing machine, and carrying out hot pressing for 4min at the temperature of 30 ℃ and under the pressure of 2Mpa to obtain a high-elasticity Cytop film with a concave-convex structure on the section; coating an aluminum conductive electrode with the thickness of 100nm on one surface of the high-elasticity Cytop film by a vacuum evaporation method to be used as an upper electrode; carrying out positive corona charging on the high-elasticity Cytop from the free surface of the uncovered electrode by a grid corona polarization system (grid voltage is-1 kV, corona voltage is-10 kV, and charging time is 5min), and injecting real charges to the surface and the near surface of the high-elasticity Cytop;
(2) making a PET support into an arc shape through high-temperature blow molding, and attaching double-sided conductive copper adhesive as a lower electrode inside an arc-shaped groove of the PET support;
(3) sticking two ends of the electropositive corona charged high-elasticity Cytop film to two ends of the arc-shaped groove by using the free surface;
(4) bonding a mass block at the middle position of a high-elasticity Cytop film with the surface covered with an aluminum conductive electrode, wherein the mass block is a small copper sheet in the embodiment;
(5) and respectively leading out an upper electrode lead 2 and a lower electrode lead 7 from the upper electrode 3 and the lower electrode 6 to obtain the broadband static micro-energy collector.
The foregoing description of specific embodiments of the present invention has been presented. It is to be understood that the present invention is not limited to the specific embodiments described above, and that various changes and modifications may be made by one skilled in the art within the scope of the appended claims without departing from the spirit of the invention.

Claims (3)

1. A broadband static micro-energy collecting system is characterized in that the system is formed by symmetrically arranging broadband static micro-energy collectors;
the broadband electrostatic micro-energy collector comprises an upper electrode (3), a high-elasticity polymer film (4), a lower electrode (6), a support (5), a mass block (1) fixedly bonded in the middle of the upper electrode (3), an upper electrode lead (2) connected with the upper electrode (3) and a lower electrode lead (7) connected with the lower electrode (6), which are sequentially arranged;
the upper electrode (3) is attached to the high-elasticity polymer film (4);
a groove is formed in the middle of the bracket (5) in the direction departing from the high-elasticity polymer film (4), and two ends of the bracket (5) are attached to and connected with the high-elasticity polymer film (4);
the lower electrode (6) is attached to the inner part of the groove;
the upper electrode, the high-elasticity polymer film, the lower electrode and the bracket are provided with two sets and are symmetrically arranged;
two ends of two symmetrically arranged upper electrodes are connected through a conductive material, and the upper electrode lead is connected with the conductive material;
the mass block is arranged between the two sets of upper electrodes, and two ends of the mass block are fixedly bonded with the two sets of upper electrodes respectively.
2. The broadband electrostatic micro-energy collection system according to claim 1, wherein one side surface of the high-elasticity polymer film is connected with the upper electrode, the other side surface is injected with real charges, and positive charges and negative charges are respectively injected on the surfaces of two sets of high-elasticity polymer films (4) which are symmetrically arranged.
3. A method of making the broadband electrostatic micro energy harvesting system of claim 1, comprising the steps of:
(1) preparing a polymer into a high-elasticity polymer film by casting, coining or pouring; covering the surface of the high-elasticity polymer film with an upper electrode; injecting real positive charges or real negative charges from the free surface of the uncovered upper electrode to the surface and the near surface of the high-elasticity film by a corona polarization, contact charging, ion injection or electron beam injection method;
(2) preparing a bracket with a groove in the middle; a lower electrode is attached to the inner part of the groove in the middle of the bracket;
(3) attaching and connecting two ends of a high-elasticity polymer film with the surface injected with real positive charges or real negative charges with two ends of the bracket to obtain an intermediate product;
(4) taking two sets of intermediate products with matched sizes obtained in the step (3), wherein the surface injected charges of the high-elasticity polymer film in the intermediate products are different; symmetrically placing two sets of intermediate products to enable notches of grooves in the middle of the support to be opposite; bonding the two upper electrodes by using a conductive material;
(5) bonding two ends of the mass block with the two upper electrodes respectively;
(6) and leading out an upper electrode lead from the conductive material, and leading out a lower electrode lead from the lower electrode to obtain the broadband static micro-energy collector with a double-layer symmetrical structure.
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