CN109985825A - A kind of LED wafer automatic fraction collector silicon wafer workbench - Google Patents
A kind of LED wafer automatic fraction collector silicon wafer workbench Download PDFInfo
- Publication number
- CN109985825A CN109985825A CN201910369853.5A CN201910369853A CN109985825A CN 109985825 A CN109985825 A CN 109985825A CN 201910369853 A CN201910369853 A CN 201910369853A CN 109985825 A CN109985825 A CN 109985825A
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- China
- Prior art keywords
- axis
- workbench
- guide rail
- axis workbench
- fraction collector
- Prior art date
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 14
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 14
- 239000010703 silicon Substances 0.000 title claims abstract description 14
- 239000013307 optical fiber Substances 0.000 claims description 18
- 238000009434 installation Methods 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 230000036632 reaction speed Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
- B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The invention discloses a kind of LED wafer automatic fraction collector silicon wafer workbench, including X-axis workbench, X-axis guide rail is provided on X-axis workbench, X-axis guide rail, which is provided with, to slide X-axis guide rail sliding block along X-axis guide rail；It further include Y-axis workbench, the top of X-axis workbench is arranged in Y-axis workbench, and Y-axis workbench opposite with X-axis workbench can slide, and Y-axis workbench is fixedly connected with guide rail slide block, is connect Y-axis workbench with X-axis workbench by X-axis guide rail sliding block.
Description
Technical field
The present invention relates to a kind of LED wafer automatic fraction collectors, specifically, are related to a kind of LED wafer automatic fraction collector use
Silicon wafer workbench belongs to LED wafer manufacturing technology field.
Background technique
Traditional silicon wafer workbench, due to the limitation of its structure, sliding precision is not high, and movement executes slowly, and reliability obtains
Less than very effective control, traditional workbench uses the disadvantage for being inconvenient to install and adjust of bare glass grating, debugging
Under the debugging efficiency of process；And glass raster is inconvenient to install, and when installation, must control installation gap.
Summary of the invention
The technical problem to be solved by the present invention is to be directed to above situation, a kind of LED wafer automatic fraction collector silicon wafer is provided
The sliding precision of workbench, the silicon wafer workbench is high, and movement executes rapidly, and reliability obtains very effective control；It meets
The rate request of wafer separation makes top workbench within the precision 0.005mm that X and Y-direction slide.
In order to solve the above technical problems, the technical solution of the present invention is as follows:
A kind of silicon wafer workbench, including X-axis workbench, it is characterised in that: X-axis workbench is equipped with X-axis guide rail, and X-axis guide rail is set
It is equipped with the X-axis guide rail sliding block that can be slided along X-axis guide rail；
It further include Y-axis workbench, the top of X-axis workbench is arranged in Y-axis workbench, and Y-axis workbench can be opposite with X-axis workbench
Sliding, Y-axis workbench are fixedly connected with guide rail slide block, are connect Y-axis workbench with X-axis workbench by X-axis guide rail sliding block；
Y-axis guide rail is provided on Y-axis workbench, Y-axis guide rail is fastened on Y-axis workbench, and top works by guide rail slide block
Platform is connect with Y-axis workbench.
X-axis workbench is equipped with the second mechanical optical fiber scale, and Y-axis workbench is equipped with the first mechanical optical fiber scale.
X-axis workbench is equipped with the second mechanical optical fiber scale, and Y-axis workbench, which is equipped on the first mechanical optical fiber scale, pacifies
Fill optical fiber scale encoder.
Permanent magnet fastens on X-axis workbench, and the fixed Y-axis workbench of x-ray circle, permanent magnet fastens on Y-axis workbench, Y coil
It is fixed on the workbench of top.
The present invention by adopting the above technical scheme, compared with prior art, has the advantage that this structure uses metal grating
Ruler, under same precision, metal grating has two big advantages: since grating scale carries gum, can be realized fastly using patch ruler tool
Speed installation avoids the disadvantage for being inconvenient to install and adjust using bare glass grating, greatly improves debugging process
Debugging efficiency；Metal grating reading head and grating scale use contact, facilitate installation.
Top workbench is within the precision 0.005mm that X and Y-direction slide, and due to using linear motor, reaction speed exists
Within 100 milliseconds, reliability obtains very effective control, meets the rate request of wafer separation.
The present invention is described in detail with reference to the accompanying drawings and examples.
Detailed description of the invention
Attached drawing 1 is the structural schematic diagram of LED wafer automatic fraction collector silicon wafer workbench in the embodiment of the present invention；
Attached drawing 2 is sectional view along A-A in attached drawing 1；
Attached drawing 3 is B-B direction cross-sectional view in attached drawing 1；
In figure,
1-X axis workbench, 2-X axis rail sliding block, 3-Y axis workbench, 4- the first mechanical optical fiber scale, 4 '-the second mechanical optical fibers
Scale, 5-Y axis rail, 6- guide rail slide block, 7-X axis rail, 8-X coil, the top 9- workbench, 10- optical fiber scale encoder,
11- permanent magnet, 12-Y coil.
Specific embodiment
Embodiment, as shown in attached drawing 1, attached drawing 2 and attached drawing 3, a kind of LED wafer automatic fraction collector silicon wafer workbench, packet
X-axis workbench 1 is included, X-axis guide rail 7 is provided on X-axis workbench 1, X-axis guide rail 7 is provided with the X-axis that can be slided along X-axis guide rail 7
Guide rail slide block 2.
It further include Y-axis workbench 3, the top of X-axis workbench 1 is arranged in Y-axis workbench 3, and Y-axis workbench 3 can be with X-axis work
Make that platform 1 is opposite to be slided, Y-axis workbench 3 is fixedly connected with guide rail slide block 2, by X-axis guide rail sliding block 2 by Y-axis workbench 3 and X-axis
Workbench 1 connects.
Y-axis guide rail 5 is provided on Y-axis workbench 3, Y-axis guide rail 5 is fastened on Y-axis workbench 3, passes through guide rail slide block 6
Top workbench 9 is connect with Y-axis workbench 3.
It is respectively and fixedly provided with mechanical optical fiber scale on X-axis workbench 1 and Y-axis workbench 3, light is installed on each mechanical optical fiber scale
Fine scale encoder 10.
X-axis workbench 1 is equipped with the second mechanical optical fiber scale 4 ', and Y-axis workbench 3 is equipped with the first mechanical optical fiber scale 4,
Walking position is accurately fed back；Permanent magnet 11 fastens on X-axis workbench 1, the fixed Y-axis workbench 3 of x-ray circle 8, permanent magnet
On 11 fastening Y-axis workbench 3, Y coil 12 is fixed on top workbench 9.
Action process: X-axis guide rail 7 is fastened on X-axis workbench 1, by X-axis guide rail sliding block 2 by Y-axis workbench 3 and X
Axis workbench 1 connects；Y-axis guide rail 5 is fastened on Y-axis workbench 3, and top workbench 9 and Y-axis are worked by guide rail slide block 6
Platform 3 connects；And optical fiber scale encoder 10 is respectively installed, walking position is accurately fed back；Permanent magnet 11 fastens X-axis workbench
On 1, the fixed Y-axis workbench 3 of x-ray circle 8, permanent magnet 11 is fastened on Y-axis workbench 3, and Y coil 12 is fixed on top workbench 9
On.
Through the above structure, make top workbench 9 within the precision 0.005mm that X and Y-direction slide, due to using straight
Line motor, for reaction speed within 100 milliseconds, reliability obtains very effective control, and the speed for meeting wafer separation is wanted
It asks.
This structure uses the mechanical optical fiber scale of metal, and under same precision, metal grating has two big advantages: due to grating
Ruler carries gum, can be realized Fast Installation using patch ruler tool and avoids being inconvenient to install and adjust using bare glass grating
Whole disadvantage greatly improves the debugging efficiency of debugging process；Metal grating reading head and grating scale use contact,
Facilitate installation.
Finally, it should be noted that the foregoing is only a preferred embodiment of the present invention, it is not intended to restrict the invention,
Although the present invention is described in detail referring to the foregoing embodiments, for those skilled in the art, still may be used
To modify the technical solutions described in the foregoing embodiments or equivalent replacement of some of the technical features.
All within the spirits and principles of the present invention, any modification, equivalent replacement, improvement and so on should be included in of the invention
Within protection scope.
Claims (4)
1. a kind of LED wafer automatic fraction collector silicon wafer workbench, including X-axis workbench (1), it is characterised in that: X-axis work
It is provided on platform (1) X-axis guide rail (7), X-axis guide rail (7) is provided with the X-axis guide rail sliding block (2) that can be slided along X-axis guide rail (7)；
It further include Y-axis workbench (3), the top of X-axis workbench 1 is arranged in Y-axis workbench (3), and Y-axis workbench (3) can be with X-axis
Workbench (1) is opposite to be slided, and Y-axis workbench (3) is fixedly connected with guide rail slide block (2), by X-axis guide rail sliding block (2) by Y-axis work
Make platform (3) to connect with X-axis workbench (1)；
It is provided on Y-axis workbench (3) Y-axis guide rail (5), Y-axis guide rail (5) is fastened on Y-axis workbench (3), sliding by guide rail
Top workbench (9) is connect by block (6) with Y-axis workbench (3).
2. a kind of LED wafer automatic fraction collector silicon wafer workbench as described in claim 1, it is characterised in that: X-axis work
Platform (1) is equipped with the second mechanical optical fiber scale (4 '), and Y-axis workbench (3) is equipped with the first mechanical optical fiber scale (4).
3. a kind of LED wafer automatic fraction collector silicon wafer workbench as claimed in claim 2, it is characterised in that: X-axis workbench
(1) the second mechanical optical fiber scale (4 ') is installed, Y-axis workbench (3) is equipped on the first mechanical optical fiber scale (4) and is respectively mounted light
Fine scale encoder (10).
4. a kind of LED wafer automatic fraction collector silicon wafer workbench as claimed in claim 3, it is characterised in that: permanent magnet
(11) it fastens on X-axis workbench (1), x-ray circle (8) is fixed Y-axis workbench (3), and permanent magnet (11) fastens Y-axis workbench (3)
On, Y coil (12) is fixed on top workbench (9).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910369853.5A CN109985825A (en) | 2019-05-06 | 2019-05-06 | A kind of LED wafer automatic fraction collector silicon wafer workbench |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910369853.5A CN109985825A (en) | 2019-05-06 | 2019-05-06 | A kind of LED wafer automatic fraction collector silicon wafer workbench |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109985825A true CN109985825A (en) | 2019-07-09 |
Family
ID=67135861
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910369853.5A Withdrawn CN109985825A (en) | 2019-05-06 | 2019-05-06 | A kind of LED wafer automatic fraction collector silicon wafer workbench |
Country Status (1)
| Country | Link |
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| CN (1) | CN109985825A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114472188A (en) * | 2022-04-02 | 2022-05-13 | 山东泓瑞光电科技有限公司 | Method and device for controlling LED and semiconductor laser chip silicon wafer workbench |
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| CN1494198A (en) * | 2003-09-01 | 2004-05-05 | 张国梁 | Manufacturing method of permanent magnet type straight line motor |
| JP2009083069A (en) * | 2007-10-02 | 2009-04-23 | Toshiba Mach Co Ltd | Driver, working machine and measurement machine using the same |
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| CN203045153U (en) * | 2012-12-10 | 2013-07-10 | 苏州天弘激光股份有限公司 | Micron order four-axis motion platform |
| CN104092410A (en) * | 2014-06-16 | 2014-10-08 | 浙江大学 | Heating type boundary layer control resistance-reducing ultra-precise magnetic suspension guide rail working table system and method thereof |
| CN204116899U (en) * | 2014-06-04 | 2015-01-21 | 深圳市德沃先进自动化有限公司 | Stacked two-dimentional load orientation worktable |
| CN105171438A (en) * | 2015-10-29 | 2015-12-23 | 翎创机电（上海）有限公司 | Machining center with marble-inlayed lathe body |
| CN204924965U (en) * | 2015-08-05 | 2015-12-30 | 鑫创鑫自动化设备科技（漳州）有限公司 | SMT production defect automatic checkout device |
| CN205733167U (en) * | 2016-05-20 | 2016-11-30 | 上海铼钠克数控科技股份有限公司 | Linear electric motors drive horizontal milling machine |
| CN210022871U (en) * | 2019-05-06 | 2020-02-07 | 山东泓瑞光电科技有限公司 | Silicon wafer workbench for automatic LED wafer sorting machine |
-
2019
- 2019-05-06 CN CN201910369853.5A patent/CN109985825A/en not_active Withdrawn
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1494198A (en) * | 2003-09-01 | 2004-05-05 | 张国梁 | Manufacturing method of permanent magnet type straight line motor |
| JP2009083069A (en) * | 2007-10-02 | 2009-04-23 | Toshiba Mach Co Ltd | Driver, working machine and measurement machine using the same |
| CN101746711A (en) * | 2009-12-18 | 2010-06-23 | 北京工业大学 | H-shaped two-dimensional ultraprecise worktable structure |
| CN202028928U (en) * | 2010-12-21 | 2011-11-09 | 深圳市大族光电设备有限公司 | Low-loading and high-speed XY working table |
| CN203045153U (en) * | 2012-12-10 | 2013-07-10 | 苏州天弘激光股份有限公司 | Micron order four-axis motion platform |
| CN204116899U (en) * | 2014-06-04 | 2015-01-21 | 深圳市德沃先进自动化有限公司 | Stacked two-dimentional load orientation worktable |
| CN104092410A (en) * | 2014-06-16 | 2014-10-08 | 浙江大学 | Heating type boundary layer control resistance-reducing ultra-precise magnetic suspension guide rail working table system and method thereof |
| CN204924965U (en) * | 2015-08-05 | 2015-12-30 | 鑫创鑫自动化设备科技（漳州）有限公司 | SMT production defect automatic checkout device |
| CN105171438A (en) * | 2015-10-29 | 2015-12-23 | 翎创机电（上海）有限公司 | Machining center with marble-inlayed lathe body |
| CN205733167U (en) * | 2016-05-20 | 2016-11-30 | 上海铼钠克数控科技股份有限公司 | Linear electric motors drive horizontal milling machine |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114472188A (en) * | 2022-04-02 | 2022-05-13 | 山东泓瑞光电科技有限公司 | Method and device for controlling LED and semiconductor laser chip silicon wafer workbench |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WW01 | Invention patent application withdrawn after publication | ||
| WW01 | Invention patent application withdrawn after publication |
Application publication date: 20190709 |