CN109959348A - The performance parameter combined measurement method of confocal laser nuclear fusion pellet form and device - Google Patents
The performance parameter combined measurement method of confocal laser nuclear fusion pellet form and device Download PDFInfo
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- CN109959348A CN109959348A CN201910175965.7A CN201910175965A CN109959348A CN 109959348 A CN109959348 A CN 109959348A CN 201910175965 A CN201910175965 A CN 201910175965A CN 109959348 A CN109959348 A CN 109959348A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/255—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring radius of curvature
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
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Abstract
The performance parameter combined measurement method of confocal laser nuclear fusion pellet form disclosed by the invention and device, belong to confocal microscopic imaging, spectrographic detection and inertial confinement fusion technical field.The present invention is by confocal laser technology in conjunction with Raman spectroscopic detection technology, accurate chromatography fixed-focus is carried out using inner and outer surfaces of the confocal laser technology to laser fusion target, excitation of spectra detection is carried out to pellet shell and interface using Raman spectroscopic detection technology, and inside/outside surface three dimension morphological parameters and the shell/interface performance distribution parameter etc. that three-dimensional revolution driving obtains pellet are further carried out to pellet by orthogonal revolution driving technology, realize the performance parameter combined measurement of nuclear fusion pellet form.The present invention can screen for inertial confinement fusion Simulating Test Study, pellet Study on Preparation and pellet and provide data basis and detection means.The present invention has wide practical use in inertial confinement fusion, high-energy physics and Precision measurement field.
Description
Technical field
The invention belongs to confocal microscopic imaging, inertial confinement fusion and accurate technical field of electro-optical measurement, will swash
Light confocal technology is related to a kind of performance parameter combined survey of confocal laser nuclear fusion pellet form in conjunction with Raman spectroscopic detection technology
Method and apparatus is measured, is had wide practical use in inertial confinement fusion, high-energy physics and Precision measurement field.
Technical background
Inertial confinement fusion (ICF) is that the important means of manual simulation's nuclear blast and cosmogony and the mankind visit
The important directions of rope future clean energy resource, therefore there is particularly significant scientific research and Practical significance.Inertial confinement fusion is real
In testing, the hollow laser fusion target of inside filling deuterium tritium (DT) gas is its core devices, multi-path laser simultaneously to pellet into
The centripetal compression ignition of line convergence causes nuclear blast, and the quality of laser fusion target is to determine whether laser-produced fusion experiment successfully closes
Key.One main cause of the ICF test failure that American National igniter (NIF) carries out is that pellet is asymmetric in ignition process
Compress and then cause the reduction of its center pressure and temperature and its internal deuterium tritium (DT) fuel to mix unbalanced, pellet shell and table
The tiny flaw in face is likely to be amplified the asymmetric compression of generation and then leads to loss of ignition.Therefore precise measurement laser-produced fusion
The geometrical morphology and physical attribute parameter of pellet are for guaranteeing that the success of inertial confinement fusion experiment is of great significance.
At present in the world for the parameter measurement of laser fusion target geometrical morphology method mainly use all kinds of microscopes into
Row observation, including scanning electron microscope method, atomic force microscopy, x-ray method, optical fiber point-diffraction method and interferometry etc., the above method
Measurement resolution has reached nanometer scale, but can only carry out nondestructive measurement to pellet outer surface profile (measurement inner surface is logical at present
Measured after crossing destructive cutting), and it is helpless for the inner geometries parameter such as the Internal periphery of pellet, shell thickness；State
On border for the parameter measurement of pellet physical attribute method mainly have X-ray transmission method, X-ray chromatography, Laser mass spectrometry and
Micro- irradiance-based method etc., the above method are mainly used for the outer outer surface of pellet shell or integrity attribute parameter measurement, are not possible to survey
Pellet shell inner parameter is measured, can not also carry out precise measurement to pellet physical attribute parameter distribution.
With the development of inertial confinement fusion technology and the propulsion of engineering, the above method can no longer meet laser
The demand that inertial confinement fusion technical research measures pellet form and performance parameter, is primarily present following problem:
1) it is unable to nondestructive measurement pellet inner parameter, existing method needs to carry out pellet destructive cutting, target after measurement
Ball, which is destroyed, can not be applied to next step process or Targeting；
2) composite measurement scarce capacity, every kind of instrument are only capable of measuring one, two kind of parameter, and pellet comprehensive parameter measuring need to be not
With adjustment repeatedly on instrument, inefficiency and magnitude benchmark disunity；
3) geometric shape and the separation of physical attribute parameter measurement process, cannot disclose pellet preparation and nuclear fusion reaction comprehensively
The structure change phenomenon and rule occurred in the process；
And in inertial confinement fusion research, the parameter of pellet is analog simulation to be carried out to nuclear fusion process and to target
The basis that ball preparation process is promoted, therefore how high-precision, lossless comprehensive survey are carried out to pellet form and performance parameter
Amount is the key technical problem in inertial confinement fusion country Important Project.
Confocal laser technology have unique optical tomography characteristic, it can be achieved that the shell surfaces externally and internally of pellet it is high-precision
Degree chromatography fixed-focus measurement, the high-precision nondestructive measurement for pellet form and performance parameter provide thinking.
Raman spectroscopy can obtain the molecular structure and chemical key information of sample by measuring sample scattering spectrum, in turn
Decoupling characterization obtains the attribute informations such as the component, doping concentration and stress of pellet shell, utilizes confocal laser technology and Raman light
It composes integration technology combination section and realizes pellet form performance synthesis information detection.
Summary of the invention
The purpose of the present invention is to solve inertial confinement fusion pellet form and performance parameter high-precision are comprehensive
Problem is measured, a kind of confocal laser nuclear fusion pellet form and performance parameter combined measurement method and device are provided, to realize
Inside/outside surface three dimension morphological parameters and shell/interface performance distribution parameter of pellet etc. realizes nuclear fusion pellet form performance ginseng
Number synthesis measurement.
The present invention can provide effective technological means for the comprehensive detection of laser fusion target parameter, prepared by pellet,
Laser fusion experiment simulation, data analysis and technological innovation are of great significance.
The purpose of the present invention is what is be achieved through the following technical solutions.
The performance parameter combined measurement method of confocal laser nuclear fusion pellet form of the invention, utilizes confocal laser technology pair
The inner and outer surfaces of target capsule of fusion shell carry out accurate chromatography fixed-focus, using Raman spectroscopic detection technology to target capsule of fusion shell and
Interface carries out excitation of spectra detection, and further carries out three-dimensional revolution driving to pellet by orthogonal revolution driving technology and gathered
Become the inner and outer surfaces three-dimensional configuration parameter and shell, interface performance distribution parameter of pellet, realizes target capsule of fusion form performance parameter
Composite measurement.
Step 1: light-source system is collimated light beam by collimation lens collimation, collimated light beam is split after mirror reflection again
Indirect illumination light beam is reflected to form by dichroic beamsplitter, indirect illumination light beam is converted into a little by measurement object lens to target capsule of fusion
Illuminated, illumination light reflects and excites generation Raman spectrum by target capsule of fusion, carry target capsule of fusion information Raman spectrum and
The reflected beams are through measuring beam is formed after measurement object lens, and Raman spectrum penetrates dichroic beamsplitter in measuring beam, by light
Spectrum convergent mirror is received after assembling by spectrum investigating system；Reflected light is reflected by dichroic beamsplitter in measuring beam, through light splitting
Enter confocal detection system after mirror A, light beam is assembled by convergent mirror through positioned at convergent mirror focal point in confocal detection system
Pin hole, and by be located at pin hole after photodetector receive.
Step 2: making computer control object lens drive system that measurement object lens be driven to carry out axial scan to target capsule of fusion, together
When the light intensity signal that receives of computer acquisition photodetector carry out the normalized of following formula confocal song can be obtained
Line successively carries out chromatography fixed-focus to target capsule of fusion by differential confocal curve, when measuring beam convergent point respectively with fusion
When the inner and outer surfaces and sphere center position of pellet are overlapped, ICThe value of (x, y, z) is maximum, monitors ICThe intensity of (x, y, z), successively
Record ICThe z coordinate Z of the region maximum position of (x, y, z)o,ZiAnd ZcThe inside and outside of optical axis direction is corresponded to get to target capsule of fusion
The axial optical coordinate Z of surface measurement point and the centre of sphereo,ZiAnd Zc；
Wherein I (x, y, z) is the light intensity signal that receives of photodetector, MAX [I (x, y, z)] be I (x, y, z) most
Big value, IC(x, y, z) is to normalize confocal signal, can effectively inhibit poly- by normalizing the confocal curves that confocal signal obtains
Become pellet) surface properties differentia influence and system source power drift, accurate fixed-focus is carried out to target capsule of fusion；
Step 3: when the focus for measuring object lens is located inside the shell between target capsule of fusion inner and outer surfaces or both,
Make computer acquisition spectra re-recorded detection system to the Raman spectrum λ detectedR；
Step 4: by the Shell Materials refractive index n and outer surface curvature radius R of target capsule of fusionoIt brings following formula into, calculates
Obtain the thickness t of the shell optical axis direction of target capsule of fusion；
Wherein NA is the numerical aperture for measuring object lens.
Step 5: utilizing the inner and outer surfaces of target capsule of fusion and the optical coordinate Z of the centre of sphereo,ZiAnd ZcIt can be counted with thickness t
Calculation obtains the inner and outer surfaces physical coordinates z of target capsule of fusioniAnd zo:
Step 6: being carried out horizontal rotation one week using gyroscopic drive system driving target capsule of fusion, in target capsule of fusion horizontal circle
Each position on week repeats the consistent step 5 of step, and the surfaces externally and internally physics for successively obtaining target capsule of fusion horizontal plane circumference is sat
Punctuate set (zo,zi)iWith Raman spectrum λRi；
Step 7: carrying out the orthogonal revolution driving of stepping using orthogonal rotary system driving target capsule of fusion, every drive moves a step again
The multiple consistent step 6 of step, successively obtains surfaces externally and internally three dimensional physical the coordinate point set { [(z of target capsule of fusiono,zi)i]jAnd draw
Graceful spectrum (λRi)j；
Step 8: computer is to three dimensional physical coordinate point set { [(zo,zi)i]jAnd Raman spectrum (λRi)jIt carries out three-dimensional
Reconstruct and unpacking calculate up to inner and outer surfaces three-dimensional configuration parameter and shell, interface performance distribution parameter, realize nuclear fusion target
The composite measurement of ball form performance parameter.
Confocal curves described in step 2 can the feature locations such as inner and outer surfaces to target capsule of fusion and the centre of sphere chromatograph
Fixed-focus includes both of which: carrying out accurately identifying fixed-focus using the peak point of confocal curves and utilizes the integrated curved of confocal curves
It is fitted fixed-focus.
Light intensity detection in confocal detection system can replace needle using the dummy pinhole that magnifying glass, ccd detector form
It is confocal to carry out area grayscale acquisition calculating acquisition by the light spot image detected to ccd detector for hole and photodetector
Curve reduces optical path adjustment required precision, improves light path design freedom degree.
The performance parameter combined measuring device of confocal laser nuclear fusion pellet form disclosed by the invention includes light-source system, edge
The spectroscope placed of light source exit direction, along the dichroic beamsplitter that light splitting specular reflection direction is placed, along dichroic point
The measurement object lens that light microscopic reflection direction is sequentially placed are located at two positioned at the confocal detection system of light splitting specular reflection direction opposite direction
The spectrum convergent mirror and spectrum investigating system being sequentially placed to color light splitting specular reflection direction opposite direction, are located at measurement objective lens exit side
To and axis of rotation and measurement light shaft coaxle quadrature drive system, axis of rotation and the revolution that intersects vertically of measurement optical axis are driven
Dynamic system carries out the computer that axially driving object lens drive system and data are acquired processing to measurement object lens.
Light-source system include laser, positioned at laser emitting direction light source convergent mirror, be located at light source assemble mirror foci
The light source pin hole of position.
Confocal system includes convergent mirror, the photodetector positioned at the pin hole of convergent mirror focal point and after pin hole.
Spectrum investigating system includes spectrum pin hole and the spectrometer after spectrum pin hole.
The dummy pinhole replacement pin hole and photodetector formed in confocal system using magnifying glass, ccd detector.
The utility model has the advantages that
1, confocal laser nuclear fusion pellet form disclosed by the invention and performance parameter combined measurement method and device, pass through
" peak point " of confocal laser axial strength curve accurately corresponds to this characteristic with the focus of measurement object lens, to tested target capsule of fusion
Inner surface realizes accurate chromatography fixed-focus, is able to solve the problem that pellet inner surface is difficult to nondestructive measurement at present.
2, confocal laser nuclear fusion pellet form disclosed by the invention and performance parameter combined measurement method and device utilize
Confocal laser fixed-focus technology carries out precision positioning to feature locations such as target capsule of fusion inner and outer surfaces and the centre ofs sphere, can be realized fusion
The geometric parameters composite measurements such as the inside and outside radius of curvature of pellet, shell thickness.
3, confocal laser nuclear fusion pellet form disclosed by the invention and performance parameter combined measurement method and device, pass through
Normalized can effectively inhibit the influence of pellet surface properties difference and system source power drift；
4, confocal laser nuclear fusion pellet form disclosed by the invention and performance parameter combined measurement method and device utilize
Confocal laser fixed-focus technology and three-dimensional revolving scanning technology combine, and can be scanned to target capsule of fusion surfaces externally and internally profile, simultaneously
Obtain the integrated informations such as the inside and outside three-D profile of target capsule of fusion and shell distribution.
5, confocal laser nuclear fusion pellet form disclosed by the invention and performance parameter combined measurement method and device, in conjunction with
The detection of Raman spectrum obtains the Raman spectrum of laser fusion target difference interface, shell position, and is obtained by decoupling characterization
The performance informations such as component, the concentration of target capsule of fusion.
6, confocal laser nuclear fusion pellet form disclosed by the invention and performance parameter combined measurement method and device, pass through
Multiple technologies organically blend, and can be realized and obtain multiple ginsengs by an adjustment measurement on an instrument to target capsule of fusion
Number, significantly improves the precision and efficiency of measurement.
7, confocal laser nuclear fusion pellet form disclosed by the invention and performance parameter combined measurement method and device, pass through
Same instrument measures target capsule of fusion different parameters using principle of uniformity, and measuring basis is unified, measurement accuracy matches,
Basis can be provided for the parameter conversion and characterization of target capsule of fusion.
Detailed description of the invention
Fig. 1 is the performance parameter combined measurement method schematic diagram of confocal laser nuclear fusion pellet form of the present invention；
Fig. 2 is the performance parameter combined measuring device schematic diagram of confocal laser nuclear fusion pellet form of the present invention；
Fig. 3 is the performance parameter combined measurement method signal of confocal laser nuclear fusion pellet form of the embodiment of the present invention 1
Figure；
Fig. 4 is the performance parameter combined measuring device signal of confocal laser nuclear fusion pellet form of the embodiment of the present invention 2
Figure；
Fig. 5 is confocal laser axial strength curve；
Fig. 6 is laser fusion target shell Raman spectrum curve；
Wherein: 1- light-source system, 2- collimation lens, 3- spectroscope, 4- object lens drive system, 5- measurement object lens, 6- are confocal
Detection system, 7- convergent mirror, 8- dummy pinhole, 9- pin hole, 10- photodetector, 11- pin hole B, 12- photodetector B, 13-
Target capsule of fusion, 14- quadrature drive system, 15- gyroscopic drive system, 16- computer, 17- confocal curves, 18- laser, 19-
Light source convergent mirror, 20- light source pin hole, 21- spectroscope B, 22- spectrum convergent mirror, 23- spectrum investigating system, 24- spectrometer, 25-
Spectrum pin hole, the 26- curve of spectrum.
Specific embodiment
Invention is further described in detail with reference to the accompanying drawings and examples.
Embodiment 1
As shown in figure 3, light-source system 1 is selected in the performance parameter combined measurement method of confocal laser nuclear fusion pellet form
Point light source, point light source outgoing divergent beams by collimation lens 2 collimation be collimated light beam, collimated light beam be split mirror 3 reflection
Indirect illumination light beam is reflected to form by dichroic beamsplitter 21 again afterwards, indirect illumination light beam is converted into a bit by measurement object lens 5
Target capsule of fusion 13 is illuminated, illumination light reflects and excite generation Raman spectrum by target capsule of fusion 13, carries target capsule of fusion 13
The Raman spectrum and the reflected beams of information are through measuring beam is formed after measurement object lens 5, and Raman spectrum penetrates two in measuring beam
To color spectroscope 21, received after the convergence of spectrum convergent mirror 22 by spectrum investigating system 23；Reflected light is by two in measuring beam
It is reflected to color spectroscope 21, through confocal detection system 6 is entered after spectroscope A3, light beam passes through meeting in confocal detection system 6
Poly- mirror 7 is assembled through the pin hole 9 for being located at 7 focal point of convergent mirror, and the photodetector 10 being located at after pin hole 9 receives.
So that computer 16 is controlled object lens drive system 4 drives measurement object lens 5 to carry out axial scan to target capsule of fusion 13, simultaneously
The normalized that the light intensity signal that the acquisition photodetector 10 of computer 16 receives carries out following formula can be obtained confocal
Curve 17 successively carries out chromatography fixed-focus to target capsule of fusion 13 by differential confocal curve 17, when measuring beam convergent point point
When not being overlapped with the inner and outer surfaces of target capsule of fusion 13 and sphere center position, ICThe value of (x, y, z) is maximum, monitors IC(x,y,z)
Intensity, successively record ICThe z coordinate Z of the region maximum position of (x, y, z)o,ZiAnd ZcLight is corresponded to get to target capsule of fusion 13
The inner and outer surfaces measurement point of axis direction and the axial optical coordinate Z of the centre of sphereo,ZiAnd Zc；
Wherein I (x, y, z) is the light intensity signal that receives of photodetector, MAX [I (x, y, z)] be I (x, y, z) most
Big value, IC(x, y, z) is to normalize confocal signal, can effectively inhibit poly- by normalizing the confocal curves that confocal signal obtains
Become 13 surface properties differentia influence of pellet and system source power drift, accurate fixed-focus is carried out to target capsule of fusion 13；
When the focus for measuring object lens 5 is located inside the shell between 13 inner and outer surfaces of target capsule of fusion or both, make to count
16 acquisition and recording spectrum investigating system 23 of calculation machine is to the Raman spectrum λ detectedR, as shown in Figure 6；
By the Shell Materials refractive index n and outer surface curvature radius R of target capsule of fusion 13oIt brings following formula into, is calculated
The thickness t of the shell optical axis direction of target capsule of fusion 13；
Wherein NA is the numerical aperture for measuring object lens 5.
Utilize the inner and outer surfaces of target capsule of fusion 13 and the optical coordinate Z of the centre of sphereo,ZiAnd ZcIt can be calculated with thickness t
To the inner and outer surfaces physical coordinates z of target capsule of fusion 13iAnd zo:
Target capsule of fusion 13 is driven to carry out horizontal rotation one week using gyroscopic drive system 15, it is each on the horizontal circumference of pellet
A position repeating above said collection step successively obtains the surfaces externally and internally physical coordinates point set of 13 horizontal plane circumference of target capsule of fusion
(zo,zi)iWith Raman spectrum λRi；
The orthogonal revolution driving of stepping is carried out using orthogonal rotary system 14 driving target capsule of fusion 13, every drive moves a step in repetition
Acquisition step is stated, surfaces externally and internally three dimensional physical the coordinate point set { [(z of target capsule of fusion 13 is successively obtainedo,zi)i]jAnd Raman light
Compose (λRi)j；
Computer 16 is to three dimensional physical coordinate point set { [(zo,zi)i]jAnd Raman spectrum (λRi)jCarry out three-dimensionalreconstruction and
Unpacking calculates up to inner and outer surfaces three-dimensional configuration parameter and shell/interface performance distribution parameter, realizes nuclear fusion pellet form
The composite measurement of performance parameter.
Embodiment 2
As shown in figure 4, in the performance parameter combined measuring device of confocal laser nuclear fusion pellet form, including light-source system 1,
Along the spectroscope 3 that light source exit direction is placed, along the dichroic beamsplitter 21 that 3 reflection direction of spectroscope is placed, along two
The measurement object lens 5 being sequentially placed to 21 reflection direction of color spectroscope, positioned at the confocal detection system of 3 reflection direction opposite direction of spectroscope
System 6, the spectrum convergent mirror 22 and spectrum investigating system 23 being sequentially placed positioned at 21 reflection direction opposite direction of dichroic beamsplitter, position
In the quadrature drive system 14 of measurement 5 exit direction of object lens and axis of rotation and measurement light shaft coaxle, axis of rotation and measurement
The gyroscopic drive system 15 that optical axis intersects vertically carries out axially driving object lens drive system 4 and data to measurement object lens 5 and carries out
The computer 16 of acquisition process；Light-source system 1 include laser 18, positioned at 18 exit direction of laser light source convergent mirror 19,
Light source pin hole 20 positioned at 19 focal position of light source convergent mirror；Confocal system 6 includes convergent mirror 7, positioned at 7 focal point of convergent mirror
Ccd detector 12 after magnifying glass 11, magnifying glass 11.
A specific embodiment of the invention is described in conjunction with attached drawing above, but these explanations cannot be understood to limit
The scope of the present invention.Protection scope of the present invention is limited by appended claims, any in the claims in the present invention base
Change on plinth is all protection scope of the present invention.
Claims (8)
1. the performance parameter combined measurement method of confocal laser nuclear fusion pellet form, it is characterised in that: utilize confocal laser technology
Accurate chromatography fixed-focus is carried out to the inner and outer surfaces of target capsule of fusion (13) shell, using Raman spectroscopic detection technology to target capsule of fusion
(13) shell and interface carry out excitation of spectra detection, and further carry out three-dimensional revolution to pellet by orthogonal revolution driving technology
Driving obtains the inner and outer surfaces three-dimensional configuration parameter and shell, interface performance distribution parameter of target capsule of fusion (13), realizes fusion target
The performance parameter combined measurement of ball (13) form, comprising the following steps:
Step 1: light-source system (1) is collimated light beam by collimation lens (2) collimation, collimated light beam is split after mirror (3) reflection
Indirect illumination light beam is reflected to form by dichroic beamsplitter (21) again, indirect illumination light beam is converted into one by measurement object lens (5)
Point illuminates target capsule of fusion (13), and illumination light reflects and excite generation Raman spectrum by target capsule of fusion (13), carries fusion
The Raman spectrum and the reflected beams of pellet (13) information form measuring beam, Raman in measuring beam through measurement object lens (5) afterwards
Spectral transmission dichroic beamsplitter (21) is received after spectrum convergent mirror (22) are assembled by spectrum investigating system (23)；Measurement
Reflected light is reflected by dichroic beamsplitter (21) in light beam, enters confocal detection system (6) afterwards through spectroscope A (3), confocal
Light beam is assembled by convergent mirror (7) through the pin hole (9) for being located at convergent mirror (7) focal point in detection system (6), and is located at needle
Photodetector (10) behind hole (9) receives；
Step 2: making computer (16) control object lens drive system (4) that measurement object lens (5) be driven to carry out axis to target capsule of fusion (13)
To scanning, the light intensity signal that simultaneous computer (16) acquisition photodetector (10) receives is carried out at the normalization of following formula
Confocal curves (17) can be obtained in reason, successively chromatograph calmly to target capsule of fusion (13) by differential confocal curve (17)
Coke, when measuring beam convergent point is overlapped with the inner and outer surfaces of target capsule of fusion (13) and sphere center position respectively, IC(x,y,z)
Value be maximum, monitor ICThe intensity of (x, y, z), successively records ICThe z coordinate Z of the region maximum position of (x, y, z)o,ZiAnd Zc,
Obtain the inner and outer surfaces measurement point of target capsule of fusion (13) corresponding optical axis direction and the axial optical coordinate Z of the centre of sphereo,ZiWith
Zc；
Wherein I (x, y, z) is photodetector (10) light intensity signal for receiving, MAX [I (x, y, z)] be I (x, y, z) most
Big value, IC(x, y, z) is to normalize confocal signal, effectively inhibits poly- by normalizing the confocal curves (17) that confocal signal obtains
Become pellet (13) surface properties differentia influence and system source power drift, accurate fixed-focus is carried out to target capsule of fusion (13)；
Step 3: when the focus of measurement object lens (5) is located inside the shell between target capsule of fusion (13) inner and outer surfaces or both
When, make computer (16) acquisition and recording spectrum investigating system (23) to the Raman spectrum λ detectedR；
Step 4: by the Shell Materials refractive index n and outer surface curvature radius R of target capsule of fusion (13)oIt brings following formula into, calculates
Obtain the thickness t of the shell optical axis direction of target capsule of fusion (13)；
Wherein NA is the numerical aperture for measuring object lens (5)；
Step 5: utilizing the inner and outer surfaces of target capsule of fusion (13) and the optical coordinate Z of the centre of sphereo,ZiAnd ZcIt can be counted with thickness t
Calculation obtains the inner and outer surfaces physical coordinates z of target capsule of fusion (13)iAnd zo:
Step 6: being carried out horizontal rotation one week using gyroscopic drive system (15) driving target capsule of fusion (13), in target capsule of fusion
(13) each position on horizontal circumference repeats the consistent step 5 of step, successively obtains target capsule of fusion (13) horizontal plane circumference
Surfaces externally and internally physical coordinates point set (zo,zi)iWith Raman spectrum λRi；
Step 7: carrying out the orthogonal revolution driving of stepping, every driving one using orthogonal rotary system (14) driving target capsule of fusion (13)
Step repeats the consistent step 6 of step, successively obtains surfaces externally and internally three dimensional physical the coordinate point set { [(z of target capsule of fusion (13)o,
zi)i]jAnd Raman spectrum (λRi)j；
Step 8: computer (16) is to three dimensional physical coordinate point set { [(zo,zi)i]jAnd Raman spectrum (λRi)jCarry out Three-dimensional Gravity
Structure and unpacking calculate up to inner and outer surfaces three-dimensional configuration parameter and shell, interface performance distribution parameter, realize nuclear fusion pellet
The composite measurement of form performance parameter.
2. the performance parameter combined measurement method of confocal laser nuclear fusion pellet form according to claim 1, feature exist
In: confocal curves described in step 2 (17) chromatograph the inner and outer surfaces and centre of sphere feature locations of target capsule of fusion (13)
Fixed-focus includes both of which: mode one, carries out accurately identifying fixed-focus using the peak point of confocal curves (17)；Mode two utilizes
The integrated curved of confocal curves (17) is fitted fixed-focus.
3. the performance parameter combined measurement method of confocal laser nuclear fusion pellet form according to claim 1, feature exist
In: the light intensity detection in confocal detection system (6) is replaced using the dummy pinhole (8) that magnifying glass (11), ccd detector (12) form
Needle exchange hole (9) and photodetector (10) carry out area grayscale by the light spot image obtained to ccd detector (10) detection and adopt
Collection, which calculates, obtains confocal curves (17), reduces optical path adjustment required precision, improves light path design freedom degree.
4. the performance parameter combined measuring device of confocal laser nuclear fusion pellet form, it is characterised in that: including light-source system (1),
Along light source exit direction place spectroscope (3), along spectroscope (3) reflection direction place dichroic beamsplitter (21),
Along the measurement object lens (5) that dichroic beamsplitter (21) reflection direction is sequentially placed, it is located at spectroscope (3) reflection direction opposite direction
Confocal detection system (6), be located at the spectrum convergent mirror (22) that is sequentially placed of dichroic beamsplitter (21) reflection direction opposite direction
With spectrum investigating system (23), it is located at measurement object lens (5) exit direction and the orthogonal drive of axis of rotation and measurement light shaft coaxle
The gyroscopic drive system (15) that dynamic system (14), axis of rotation and measurement optical axis intersect vertically, carries out measurement object lens (5) axial
The object lens drive system (4) and data of driving are acquired the computer (16) of processing.
5. the performance parameter combined measuring device of confocal laser nuclear fusion pellet form according to claim 4, feature exist
In: light-source system (1) includes laser (18), the light source convergent mirror (19) for being located at laser (18) exit direction, is located at light source
The light source pin hole (20) of convergent mirror (19) focal position.
6. the performance parameter combined measuring device of confocal laser nuclear fusion pellet form according to claim 4, feature exist
In: confocal system (6) includes convergent mirror (7), the photoelectricity for being located at the pin hole (9) of convergent mirror (7) focal point and being located at after pin hole (9)
Detector (10).
7. the performance parameter combined measuring device of confocal laser nuclear fusion pellet form according to claim 4, feature exist
In: spectrum investigating system (23) includes spectrum pin hole (25) and the spectrometer (24) after spectrum pin hole (24).
8. the performance parameter combined measuring device of confocal laser nuclear fusion pellet form according to claim 7, feature exist
In: pin hole (9) and light are replaced using the dummy pinhole (8) that magnifying glass (11), ccd detector (12) form in confocal system (6)
Electric explorer (10).
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