CN109950895A - RF electric power distribution system and RF electric power distribution methods - Google Patents
RF electric power distribution system and RF electric power distribution methods Download PDFInfo
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- CN109950895A CN109950895A CN201811451428.2A CN201811451428A CN109950895A CN 109950895 A CN109950895 A CN 109950895A CN 201811451428 A CN201811451428 A CN 201811451428A CN 109950895 A CN109950895 A CN 109950895A
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- electric power
- ramification point
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32174—Circuits specially adapted for controlling the RF discharge
- H01J37/32183—Matching circuits
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
- H03H7/38—Impedance-matching networks
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- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
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- Charge And Discharge Circuits For Batteries Or The Like (AREA)
Abstract
The present invention relates to the RF electric power distribution systems and RF electric power distribution methods to the multiple ICP coils or multiple CCP electrodes for being used as plasma source.The present invention discloses a kind of RF electric power distribution system, and the RF electric power distribution system distributes electric power to the multiple output ends 311,312,321,322,313 connected for load L1, L2, L3, L4, L5 from the output end for the matching network 200 for being connected with more than one RF generator 100.
Description
Technical field
The present invention relates to the RF electric power distributions to multiple plasma loads, more specifically, are related to a kind of by appropriate
Ground uses the variable element of variable condenser or variometer etc. and properly configures these variable elements, will send out from RF
The RF electric power distribution of raw device transmitting gives the RF electric power distribution dress of multiple ICP coils or multiple CCP electrodes as plasma source
It sets and RF electric power distribution methods.
Background technique
The substrates such as semiconductor substrate, base plate of liquid crystal panel, OLED (Organic Light Emitting Diode) substrate are generally being used for substrate
It carries out that the processing substrates process such as deposition procedures, etching work procedure of RF plasma is utilized in the process chamber of processing, in the work
The hardware constituted mode and RF electric power transfer mode etc. of plasma source (electrode, aerial coil etc.) are changed in sequence chamber, with suitable
It is manufactured based on suitable process result.
Wherein, it is applied to the RF electric power applying unit of substrate board treatment, usually by RF power supply and matching independently
Case is connected to the mode of independent plasma load.But recently, semiconductor substrate, base plate of liquid crystal panel, oled substrate etc.
The deposition and etching work procedure of substrate be increasingly complicated and fine and closely wovenization, thus to by a RF power supply and a RF matching network to
The requirement of the technology of multiple plasma load distribution electric power is more and more, is also actively carrying out to this research.
When applying power supply especially for processing substrate, in order to execute uniform processing substrate, it is desirable that it is a kind of will be multiple
Electrode or mutiple antennas coil etc. are set to multiple isolated spaces, suitably distribute and apply to the plasma source so separated
RF electric power amount technology.
On the other hand, as about equably supplying electric power to multiple electrodes or aerial coil or as needed and to each
The device of the electric power of different amount and the prior art of technology are supplied in load, there is patent document 1 to 3.
But for the prior art 1 to 3, for the variable element of electric power distribution, for example, based on variable condenser or
The circuit of variable coil etc. constitutes complexity, can be changed using identical as the number of plasma source of electric power distribution is realized or more
Element, thus the shortcomings that there are manufacturing expense increases, electric power distribution mode, which is defaulted, is connected in series in multiple plasma sources, if
Change variable element value to apply particular power to the plasma source of one of multiple plasma sources, then to application
It is had an impact in the amount of the electric power of the remaining plasma source of series connection, in terms of the amount of power for controlling each plasma source
There is a problem of not efficient enough.
Therefore, the present invention is precisely in order to overcoming existing patent disadvantage as above and researching and developing.
(patent document 1) KR10-1151419 B1
(patent document 2) US6507155 B1
(patent document 3) US20170117869 A1
Summary of the invention
(solving the problems, such as)
Present invention aims at, it is as described above in order to solve the problems, such as, provide that a kind of make can power transformation needed for electric power distribution
The use of container, which is realized, to be minimized, and circuit structure is simplified, and manufacture is easy, and can save significantly on the RF electric power distribution of manufacturing expense
Device and RF electric power distribution methods.
(means solved the problems, such as)
For the present invention precisely in order to reaching the purpose of the present invention as described above and researching and developing, the present invention discloses a kind of RF electric power point
With device, as the output end from the matching network 200 for being connected with more than one RF generator 100 to for load L1, L2, L3,
Multiple output ends 311,312,321,322,313 of L4, L5 connection distribute the RF electric power distribution system of electric power, which is characterized in that
Include: the first ramification point P1, is connect with the output end of the matching network 200；More than one pair of disagreement module M1, M2,
It is first output end 311/321 and described the including the first output end 311/321 and second output terminal 312/322, disagreement
The output end ramification point Pt of two output ends 312/322, the output end ramification point Pt and first output end 311/ are installed on
Output end variable element 420/430 between 321；Root variable element 410 is installed on the pair of above disagreement module
At least one of between the output end ramification point Pt of M1, M2 and the first ramification point P1.
Described variable element 410 can be installed on the pair of output end ramification point Pt and the first ramification point P1 it
Between in certain one, between the pair of output end ramification point Pt and the first ramification point P1 it is middle residue one, can install
There is the reactance component 451 with constant reactance value.
Described variable element 410 can connect peace between the output end ramification point Pt and the first ramification point P1
Dress or one end are connected between the output end ramification point Pt and the first ramification point P1, other end ground connection.
The output end variable element 420,430 can be connected to the output end ramification point Pt and described first defeated with one end
Between outlet 311,321, other end ground connection.
Between the output end ramification point Pt and first output end 311,321, the addition that can connect is equipped with tool
There is the reactance component 452 of constant reactance value.
Disagreement module M1, M2 can be mounted to multipair on the basis of the first ramification point P1.
The first ramification point P1 can add the more than one odd number output end for being combined with and combining for additional load Lo
313, so that in the multiple multiple output ends 311,312,321,322,313 for being incorporated into disagreement module M1, M2
On the basis of even number loads L1, L2, L3, L4, L5, all load numbers reach odd number.
The output end variable element 420,430 can be connected to the output end ramification point Pt and described first defeated with one end
Between outlet 311,321, other end ground connection.
Between the output end ramification point Pt and first output end 311,321, the addition that can connect is equipped with tool
There is the reactance component 452 of constant reactance value.
The output end variable element 420,430 and described variable element 410 can have hypovolemic reactance.
In addition the present invention discloses a kind of RF electric power distribution methods, as using with RF electric power distribution formed as described above
The RF electric power distribution methods of device, which is characterized in that successively control according to from the first disagreement near the matching network 200
Point P1 to the output end Pt variable condenser being arranged in order each capacitance, thus distribution to each output end 311,312,
313,314 RF electric power.
In addition the present invention discloses a kind of RF electric power distribution system, as from for being connected with more than one RF generator 100
Distribution network 200 distributes electric power to the multipair output end 311,312,321,322,313 connected for load L1, L2, L3, L4, L5
RF electric power distribution system characterized by comprising the first ramification point P1, in a pair from 200 disagreement of matching network；It is more
To output end ramification point Pt, as the multipair output end 311,312,321,322,313, disagreement is pairs of；N-1 is to (n 2
Above natural number) the n-th ramification point Pn, successively divide from the first ramification point P1 to the multipair output end ramification point Pt
Discrimination 1 time or more；Output end reactance component 452,453 is installed on each output end ramification point Pt and first output end
311, between 321；Output end variable element 420,430, one end are connected to the output end reactance component 452,453 and described
Between first output end 311,321, other end ground connection；N-th capacitor removes the first ramification point P1 and the second ramification point P2
Between except, be installed on each to the n-th ramification point Pn between first output end 311,321 and each output end ramification point Pt
In between certain one and the (n-1)th ramification point Pn-1；N-th variable condenser removes the first ramification point P1 and the second ramification point
Except between P2, one end is connected between n-th capacitor and the n-th ramification point Pn, other end ground connection；Reactance component
451, it is installed in the pair of second ramification point P2 between certain one and the first ramification point P1；Root variable element 410,
One end is connected between the reactance component 451 and the second ramification point P2, other end ground connection.
In addition the present invention discloses a kind of RF electric power distribution system, as from being connected with more than one RF generator 100
Matching network 200 distributes electric power to the multipair output end 311,312,321,322,313 connected for load L1, L2, L3, L4, L5
RF electric power distribution system characterized by comprising the first ramification point P1, in a pair from 200 disagreement of matching network；
Multipair output end ramification point Pt, as the multipair output end 311,312,321,322,313, disagreement is pairs of；N-1 is to (n
Natural number for 2 or more) the n-th ramification point Pn, from the first ramification point P1 to the multipair output end ramification point Pt according to
Secondary disagreement 1 time or more；It is defeated to be installed on each output end ramification point Pt and described first for output end reactance component 452,453
Between outlet 311,321；Output end variable element 420,430, one end be connected to the output end reactance component 452,453 and
Between first output end 311,321, other end ground connection；N-th capacitor is installed on first output end 311,321
And it is each in the n-th ramification point Pn between certain one and the (n-1)th ramification point Pn-1 between each output end ramification point Pt；N-th
Variable condenser, one end are connected between n-th capacitor and the n-th ramification point Pn, other end ground connection.
(The effect of invention)
RF electric power distribution system and RF electric power distribution methods of the invention, will be for executing processing substrate using hypovolemic electrode
The electrode of substrate board treatment, ICP (Inductively Coupled Plasma, inductively coupled plasma body) processing unit
Antenna as load and the output end that connect constitutes multipair, distribute concerned power in each pair of output end, it is fixed electric using having
The fixed capacitor and variable condenser of capacitance, so that the use with variable condenser needed for can making electric power distribution is realized
It minimizes, circuit structure is simplified, the advantages of manufacturing and be easy, save significantly on manufacturing expense.
RF electric power distribution system and RF electric power distribution methods of the invention makes in terms of the electric power distribution of each pair of output end
It is adjacent to the capacitance variation of the variable condenser of each ramification point installation, so that having can quickly and effectively execute to each right
The advantages of electric power distribution of output end.
In addition, RF electric power distribution system and RF electric power distribution methods of the invention, variable element needed for making electric power distribution
The use of (variable condenser, variometer), which is realized, to be minimized, and for circuit structure, makes each plasma source modularization,
Manufacture may be implemented to have in RF power distribution circuit between the RF power distribution circuit and plasma source of composition intermodule
The advantages of easiness of easiness and RF electric power distribution.
In addition, RF electric power distribution system and RF electric power distribution methods of the invention, in order to utilize multiple output ends easily
It carries out RF electric power distribution and two output ends is defined as a pair especially when multiple output ends are constituted with even number, then will
It is defined as a module, adjusts for the electric power distribution of intermodule, and electric power is carried out first using module dedicated variable element
Sub-distribution finally can be realized all defeated then using the output end variable element being located in module between two output ends
The electric power distribution of outlet, thus configured circuit of the invention constitutes and electric power distribution methods, with original electric power distribution technology phase
Than having the advantages that more efficient, more intuitive.
In addition, RF electric power distribution system and RF electric power distribution methods of the invention, are configured in multiple output ends with surprise
In the case where several compositions, after at least one output end is defined as reference output in the output end of odd number, make it from mould
Block is independent, and electric power distribution then can be realized in method identical with the output end of even number, thus can be with of output end
Number is that even number or odd number independently distribute electric power.
Detailed description of the invention
Fig. 1 is the circuit diagram for showing the first embodiment of RF electric power distribution system of the invention.
Fig. 2 is the circuit diagram of the second embodiment of diagram RF electric power distribution system of the invention.
Fig. 3 is the circuit diagram for showing the 3rd embodiment of RF electric power distribution system of the invention.
Fig. 4 is the circuit diagram for showing the fourth embodiment of RF electric power distribution system of the invention.
Fig. 5 is the circuit diagram of the 5th embodiment of diagram RF electric power distribution system of the invention.
Fig. 6 is the circuit diagram of the sixth embodiment of diagram RF electric power distribution system of the invention.
Fig. 7 a to Fig. 7 c is the chart for showing the RF electric power distribution methods of the invention using RF electric power distribution system.
(description of symbols)
100:RF generator 200: matching network
311,312,321,322: output end
Specific implementation method
With reference to the accompanying drawings, just RF electric power distribution system and RF electric power distribution methods of the invention are illustrated.
RF electric power distribution system 300 of the invention such as Fig. 1 is to as shown in Figure 4, which is characterized in that from being connected with more than one
RF generator 100 matching network 200 to the multiple output ends 311 connected for load L1, L2, L3, L4, L5,312,321,
322,313 distribution electric power.
The RF generator 100 can install more than one, by having the RF generator structure for the frequency for meeting process conditions
At, such as shown in Fig. 6, be made of the RF generator of the low frequency (LF) of high frequency (HF) and 370KHz with 27.12MHz.
Specifically, the present invention is as shown in fig. 6, in multiple RF generators 100, such as in 2 RF generators 100 and therewith
After the output end of corresponding 2 matching networks 200 is respectively in connection with RF electric power distribution system, mutually shares output end and constitute.
That is, output end can be shared after RF generator 100, matching network 200 and RF electric power distribution system successively combine,
So that each output end can be incorporated into a load.
Moreover, the RF generator 100 can be by having multiple RF of different frequency for a matching network 200
Generator 100 is constituted.
The matching network 200 for more than one RF generator 100 as connecting and make load and RF generator 100
The matched composition of reactance can be the multiplicity constituted by means of the combination of the circuit elements such as hypovolemic reactance, irritability reactance
It constitutes.
It is characterized in that, the multiple output end 311,312,321,322,313 is by for executing base using hypovolemic electrode
The antenna conduct of the electrode, ICP (Inductively Coupled Plasma) processing unit of the substrate board treatment of plate processing
The output end for loading L1, L2, L3, L4, L5 and connecting is constituted.
Moreover, applying to each load L1, L2, L3, L4, the L5 for being incorporated into each output end 311,312,321,322,313
Electric power, can be allocated by process conditions by means of aftermentioned RF electric power distribution system.
The embodiment of the present invention is set forth below, just RF electric power distribution system of the invention is illustrated.
RF electric power distribution system of the invention is as shown in Figures 1 to 6, comprising: the first ramification point P1, with matching network
200 output end connection；More than one pair of disagreement module M1, M2 comprising the first output end 311,321 and second output terminal
312,322, disagreement is the output end ramification point Pt of the first output end 311,321 and second output terminal 312,322, is installed on output
Hold the output end variable element 420,430 between ramification point Pt and the first output end 311,321；Root variable element 410, installation
At least one of between the output end ramification point Pt and the first ramification point P1 of more than one pair of disagreement module M1, M2.
The first ramification point P1 is defined as from the output end of matching network 200 to more than one pair of disagreement module M1, M2
Disagreement is ramification point on the circuit of output end ramification point Pt.
Wherein, the first ramification point P1 is as shown in Figure 1 to Figure 3, can connect a pair of output ramification point Pt, i.e., occasionally
Several output ends, i.e. the first output end 311,321 and second output terminal 312,322.
In addition, the first ramification point P1 is as shown in figure 5, can connect an odd number output end 313, the number of output end
Word can connect the output end of odd number on the whole.
The pair of above disagreement module M1, M2 be used as including the first output end 311,321 and second output terminal 312,
322, from the first output end 311,321 and second output terminal 312, the output end ramification point Pt of 322 disagreements, in output end ramification point
The composition for the output end variable element 420,430 installed between Pt and the first output end 311,321, can multiplicity composition.
First output end 311,321 and second output terminal 312,322 are combined as each load L1, L2, L3, L4
Composition, physically various composition can be realized according to the integrated structure of external loading L1, L2, L3, L4.
The output end ramification point Pt be defined as disagreement be constitute pair output end, i.e., disagreement be the first output end 311,
321 and second output terminal 312,322 circuit on ramification point.
The output end variable element 420,430 is as between output end ramification point Pt and the first output end 311,321
The circuit element of installation, can multiplicity composition.
As an example, the output end variable element 420,430 can be connected to one end output end ramification point Pt and
Between first output end 311,321, other end ground connection.
Moreover, the addition that can connect is equipped with tool between the output end ramification point Pt and the first output end 311,321
There is the reactance component 452 of constant reactance value.
The output end reactance component 452,453 as each output end ramification point Pt and the first output end 311,321 it
Between the circuit element installed, the design condition that can be installed according to RF electric power distribution system determines reactance value, especially capacitor
Value.
On the other hand, the output end variable element 420,430 and reactance component 452 can according to integrated circuit characteristic and
With hypovolemic reactance, irritability reactance, it is preferable that have irritability reactance.
The especially described output end variable element 420,430, which is characterized in that in order to make for a certain of a pair of output
It is a different from remaining one electric power distribution condition and control reactance value especially capacitance.
Moreover, the multiple disagreement module M1, M2 is as shown in Fig. 1 to Fig. 3 and Fig. 5, it can be using the first ramification point P1 as base
Standard, installation is a pair of, or as shown in figure 4, is installed multipair on the basis of the first ramification point P1.
It is constituted according to as described above, the present invention is easy to carry out RF electric power distribution, spy to utilize multiple output ends
It is not that two output ends are defined as a pair, are then defined as a mould when multiple output ends is constituted with even number
Block M1, M2 are adjusted for the electric power distribution between module M1, M2, are carried out electric power for the first time using module dedicated variable element 410
Distribution, then using positioned at two output ends 311,312 or the output end variable element between 321,322 in module M1, M2
420,430, it finally can be realized the electric power distribution of all output ends, thus configured circuit of the invention constitutes and electric power distribution
Method can provide more more efficient than original electric power distribution technology, more intuitive electric power distribution methods.
Described variable element 410 as be installed on the output end ramification point Pt of more than one pair of disagreement module M1, M2 with
Composition at least one of between first ramification point P1, can multiplicity composition.
As an example, described variable element 410 as shown in Figures 1 to 6, can be installed on a pair of output disagreement
Certain one between point Pt and the first ramification point P1, middle remaining one between a pair of output ramification point Pt and the first ramification point P1
Person can be equipped with the reactance component 451 with constant reactance value.
As another example, described variable element 410 can be on the basis of the first ramification point P1, in the first ramification point P1
And it is respectively mounted between each disagreement module M1, M2.
On the other hand, described variable element 410 as shown in Figures 1 and 3, can be connected to output end ramification point Pt with one end
And first between ramification point P1, other end ground connection.
In addition, described variable element 410 as shown in Fig. 2, fig. 4 to fig. 6, can divide in the first ramification point P1 and output end
It is connected in series between bifurcation point Pt.
On the other hand, described variable element 410 can control electricity according to predetermined design condition as reactance value
Various variable element can be used in the composition of anti-value.
The reactance component 451 is used as and is installed in a pair of output ramification point Pt between certain one and the first ramification point P1
Circuit element, can according to RF electric power distribution system install design condition, determine reactance value, especially capacitance.
Moreover, the reactance component 451 can be according to circuit condition, on the basis of the first ramification point P1, being installed on root can
410 side of dependent element, or it is installed on the opposite side that root variable element 410 installs side.
On the other hand, described variable element 410 and reactance component 451 can have capacity according to integrated circuit characteristic
Property reactance, irritability reactance, it is preferable that have irritability reactance.
If expanding concept, described variable element 410 is characterized in that, lower a pair of of ramification point of the first ramification point P1,
For example, when disagreement is the second ramification point, in order to make the electric power distribution condition to certain one in a pair of of ramification point and remaining one
It is different and control capacitance.
With RF electric power distribution system formed as described above, performed by root variable element 410 to each ramification point
Electric power distribution after, can be by output end variable element 420,430, the final electric power distribution executed to each pair of output end.
On the other hand, RF electric power distribution system of the invention is just as explained earlier, according to root variable element 410
The embodiment of installation site, there may be various embodiments.
For example, the RF electric power distribution system of first embodiment of the invention is as shown in Figure 1, have constant reactance value especially solid
The reactance component 451 for determining capacitance, is installed on side on the basis of the first ramification point P1, and root variable element 410 is installed on another
Side.
Moreover, described variable element 410 can be connected between the first ramification point P1 and module M1, M2 with one end, it is another
End ground connection installation.
In another example the RF electric power distribution system of second embodiment of the invention is as shown in Fig. 2, have constant reactance value to be especially
The reactance component 451 of constant capacitance, is installed on side on the basis of the first ramification point P1, and root variable element 410 is installed on separately
Side.
Moreover, described variable element 410 can be installed in series between the first ramification point P1 and module M1, M2.
For another example the RF electric power distribution system of third embodiment of the invention is as shown in Fig. 2, have constant reactance value to be especially
The reactance component 451 of constant capacitance, is installed on side on the basis of the first ramification point P1, and root variable element 410 is installed on electricity
Between anti-element 451 and module M2.
Moreover, described variable element 410 can be incorporated between the first ramification point P1 and module M1, M2 with one end, it is another
End ground connection installation.
On the other hand, RF electric power distribution system of the invention, can be as shown in figure 5, institute for more diverse electric power distribution
The additional more than one odd number output end 313 being combined with for additional load Lo combination of the first ramification point P1 is stated, so that combining
In disagreement module M1, M2 the multiple multiple output ends 311,312,321,322,313 even number load L1,
On the basis of L2, L3, L4, L5, all load numbers reach odd number.
The odd number output end 313 is the output end for adding disagreement from the first ramification point P1 and combining for additional load Lo,
So that the even number in the multiple multiple output ends 311,312,321,322,313 for being incorporated into disagreement module M1, M2 is negative
On the basis of carrying L1, L2, L3, L4, L5, all load numbers reach odd number.
# on the other hand, Fig. 1 to embodiment shown in fig. 6 enumerate carry out 2 disagreements, that is, set gradually the first ramification point and
The example of second ramification point is illustrated, but can of course by n times, i.e., 3 times or more disagreements and embody.
That is, the extension example of RF electric power distribution system of the invention as Fig. 1, may include: the first ramification point P1, from
200 disagreement of distribution network is in a pair；Multipair output end ramification point Pt, as multipair output end 311,312,321,322,313
Disagreement is pairs of；N-1 divides the n-th ramification point Pn of (natural number that n is 2 or more) from the first ramification point P1 to multipair output end
Bifurcation point Pt successively disagreement 1 time or more；It is defeated to be installed on each output end ramification point Pt and first for output end reactance component 452,453
Between outlet 311,321；Output end variable element 420,430, one end are connected to output end reactance component 452,453 and first
Between output end 311,321, other end ground connection；N-th capacitor is installed on the first output end 311,321 and each output end point
It is each in the n-th ramification point Pn between certain one and the (n-1)th ramification point Pn-1 between bifurcation point Pt；N-th variable condenser, one end connect
It is connected between the n-th capacitor and the n-th ramification point Pn, other end ground connection.
In addition, the extension example as second embodiment of the invention, RF matching network of the invention may include: the first disagreement
Point P1, in a pair from 200 disagreement of matching network；Multipair output end ramification point Pt, as multipair output end 311,312,
321,322,313 and disagreement is pairs of；N-1 to the n-th ramification point Pn of (n be 2 or more natural number), from the first ramification point P1 to
Multipair output end ramification point Pt successively disagreement 1 time or more；Output end reactance component 452,453 is installed on each output end disagreement
Between point Pt and the first output end 311,321；Output end variable element 420,430, one end is connected to output end reactance component
452,453 and first between output end 311,321, other end ground connection；N-th capacitor removes the first ramification point P1 and second point
Except between bifurcation point P2, it is installed on each to the n-th ramification point Pn between the first output end 311,321 and each output end ramification point Pt
In between certain one and the (n-1)th ramification point Pn-1；N-th variable condenser, except the first ramification point P1 and the second ramification point P2 it
Between except, one end is connected between the n-th capacitor and the n-th ramification point Pn, the other end ground connection；Reactance component 451, is installed on one
To in the second ramification point P2 between certain one and the first ramification point P1；Root variable element 410, one end is connected to reactance component
451 and second between ramification point P2, other end ground connection.
It is just of the invention below to be illustrated using the RF electric power distribution methods of RF electric power distribution system.
As the RF electric power distribution methods using Fig. 1 embodiment, as shown in Figure 7a, make the root of neighbouring first ramification point P1 can
The reactance value of dependent element 410 changes, and the second ramification point P2 of the downward disagreement of Xiang Cong the first ramification point P1 distributes electric power.
At this point, identical by the electric power of the second ramification point P2 distribution.
Then, as shown in Fig. 7 b and Fig. 7 c, successively execute electric power distribution, the second ramification point P2 be in turn the n-th ramification point, with
The n-th output end ramification point Pt adjacent variable condenser, for output end ramification point Pt, make output end variable element 420,
430 reactance value variation distributes electric power to the n-th ramification point of downward disagreement, finally, executes from output end ramification point Pt to a pair
The electric power distribution of output end.
Wherein, for the RF electric power distribution of n-th ramification point, RF electric power distribution in multiple n-th ramification points can be with
It is sequentially allocated its RF electric power simultaneously.
According to RF electric power distribution methods as described above, electric power can be distributed with satisfactory RF electric power distribution condition.
RF electric power distribution methods especially as described above, by successively realizing its electric power distribution, thus efficiently, simply
Execute electric power distribution.
Embodiment
Fig. 7 a to Fig. 7 c is to show using the RF electric power distribution system with circuit structure shown in Fig. 1 to execute electric power distribution
Situation chart.Specifically, using 3 variable elements 410,420,430, to 4 311,312,321,322 points of output end
With electric power.
Primary condition: the first output end variable element 420=250pF, second output terminal variable element 430=250pF, root
When variable element 410=0~2000pF can be changed
Firstly, as shown in Figure 7a, making the capacitance variation of root variable element 410, executing for the first time to each module M1, M2
Electric power distribution.
At this point, the first output end variable element 420 and second output terminal variable element 430 keep (fixation) 250pF, that is,
Keep (fixation) identical value.
Moreover, for output end RF voltage, the first output end 311=second output terminal 312, the first output end 321=
Second output terminal 322
Then, as shown in Figure 7b, make a certain in the first output end variable element 420 and second output terminal variable element 430
Person is executed for the second time for example, making the capacitance variation of the first output end variable element 420 to certain one in each module M1, M2,
For example, to the electric power distribution of the output end 311,312 in module M1.
Wherein, first output end variable element 420=0~2000pF is variable, second output terminal variable element 430=
250pF is fixed, and root variable element 410=is fixed
As an example, for output end RF voltage, the first output end 311=second output terminal 312, the first output
Hold 321 < 2 output ends 322
Finally, as shown in Figure 7 c, making remaining in the first output end variable element 420 and second output terminal variable element 430
One, for example, making the capacitance variation of second output terminal variable element 430, third time is executed to a certain in each module M1, M2
Person, for example, to the electric power distribution of the output end 321,322 in module M2.
Wherein, the first output end variable element 420=is fixed, and second output terminal variable element 430=0~2000pF can
Become, root variable element 410=is fixed
For output end RF voltage, first 311>second output terminal of output end 312,321<2 output end of the first output end
322
Wherein, the step of the step of Fig. 7 a and Fig. 7 b can be executed sequentially or simultaneously.
On the other hand, as shown in Fig. 7 a to Fig. 7 c, analog result is shown, the power value of output end can diversely be arranged.
Such as examination made above, it is a feature of the present invention that in the case where being made of even number (2n), by two
Load L1, L2 are included as a pair and constitute, and in a pair by two loads bindings, are defined as module.
More specifically, in the example of fig. 1, output end (311 and 312) becomes as a pair of output end mould the present invention
Block M1, output end (321 and 322) become the output end module M2 as another pair.As described above, which is characterized in that 4 outputs
End 311,312,321,322 reconstructs as two modules, by the ramification point P1 for intermodule electric power distribution and in module
The output end ramification point Pt of electric power distribution is constituted between a pair of output end of composition.
It is made up of the circuit defined as described above, can use 3 variable elements, be easy to carry out 4 output ends
RF electric power distribution.
That is, the present invention has the feature that one variable element fewer than output end number can be used.Although being configured makes
With one variable element fewer than output end number, but can sufficiently be carried out to one more than variable element 4 output ends
Electric power distribution, thus have the effect of that manufacturing expense can be saved because variable element reduces using number.
If be described in more detail, as the embodiment of the present invention, may be constructed to make has two pairs of output ends 311,312
Module M1 and module M2 with other output end 321,322 between electric power, can include by means of the first ramification point P1
Variable element 410, realize intermodule electric power distribution for the first time, the intermodule electric power of such first sub-distribution can be by means of
By the variable element 420,430 of output end ramification point Pt connection, to each 311,312,321,322 second sub-distribution of output end
Electric power.
Above only can according to the present invention and the preferred embodiment that embodies with a portion of explanation, many institutes are all
Know, the scope of the present invention is not limited to above embodiment and explains, the technical idea and its root of present invention explained above
This technology thought is all included in the scope of the present invention.
Claims (16)
1. a kind of RF electric power distribution system, as from the defeated of the matching network (200) for being connected with more than one RF generator (100)
RF of the outlet to multiple output ends (311,312,321,322,313) the distribution electric power connected for load (L1, L2, L3, L4, L5)
Electric power distribution system characterized by comprising
First ramification point (P1) is connect with the output end of the matching network (200)；
More than one pair of disagreement module (M1, M2) comprising the first output end (311,321) and second output terminal (312,322),
Disagreement is the output end ramification point (Pt) of first output end (311,321) and the second output terminal (312,322), installation
Output end variable element (420,430) between the output end ramification point (Pt) and first output end (311,321)；
Root variable element (410), be installed on the output end ramification point (Pt) of the pair of above disagreement module (M1, M2) with
At least one of between first ramification point (P1).
2. RF electric power distribution system according to claim 1,
Described variable element (410) is installed between the pair of output end ramification point (Pt) and first ramification point (P1)
In certain one,
The middle residue one between the pair of output end ramification point (Pt) and first ramification point (P1), being equipped with has admittedly
Determine the reactance component (451) of reactance value.
3. RF electric power distribution system according to claim 2, which is characterized in that
Described variable element (410) is connected peace between the output end ramification point (Pt) and first ramification point (P1)
Dress,
Or one end is connected between the output end ramification point (Pt) and first ramification point (P1), other end ground connection.
4. RF electric power distribution system as claimed in any of claims 1 to 3, which is characterized in that
Described output end variable element (420,430) one end is connected to the output end ramification point (Pt) and first output end
Between (311,321), other end ground connection.
5. RF electric power distribution system according to claim 4, which is characterized in that
Between the output end ramification point (Pt) and first output end (311,321), additional be equipped with of series connection has admittedly
Determine the reactance component (452) of reactance value.
6. RF electric power distribution system as claimed in any of claims 1 to 3, which is characterized in that
The disagreement module (M1, M2) is mounted to multipair on the basis of first ramification point (P1).
7. RF electric power distribution system as claimed in any of claims 1 to 3, which is characterized in that
First ramification point (P1) is additional to be combined with the more than one odd number output end combined for additional load (Lo)
(313), so that be incorporated into the disagreement module (M1, M2) the multiple multiple output ends (311,312,321,322,
313) on the basis of even number load (L1, L2, L3, L4, L5), all load numbers reach odd number.
8. RF electric power distribution system according to claim 7, which is characterized in that
Described output end variable element (420,430) one end is connected to the output end ramification point (Pt) and first output end
Between (311,321), other end ground connection.
9. RF electric power distribution system according to claim 8, which is characterized in that
Between the output end ramification point (Pt) and first output end (311,321), additional be equipped with of series connection has admittedly
Determine the reactance component (452) of reactance value.
10. RF electric power distribution system as claimed in any of claims 1 to 3, which is characterized in that
The output end variable element (420,430) and described variable element (410) have hypovolemic reactance.
11. a kind of RF electric power distribution methods, the RF as the RF electric power distribution system that a certain item in claims 1 to 3 is utilized
Electric power distribution methods, which is characterized in that
It successively controls according to the sequence from the first ramification point (P1) near the matching network (200) to the output end (Pt)
Each capacitance of the variable condenser of configuration, thus RF electric power of the distribution to each output end (311,312,313,314).
12. RF electric power distribution methods according to claim 11, which is characterized in that
First ramification point (P1) is additional to be combined with the more than one odd number output end combined for additional load (Lo)
(313), so that be incorporated into the disagreement module (M1, M2) the multiple multiple output ends (311,312,321,322,
313) on the basis of even number load (L1, L2, L3, L4, L5), all load numbers reach odd number.
13. RF electric power distribution methods according to claim 12, which is characterized in that
Described output end variable element (420,430) one end is connected to the output end ramification point (Pt) and first output end
Between (311,321), other end ground connection.
14. RF electric power distribution methods according to claim 13, which is characterized in that
Between the output end ramification point (Pt) and first output end (311,321), additional be equipped with of series connection has admittedly
Determine the reactance component (452) of reactance value.
15. a kind of RF electric power distribution system, as from be connected with the matching network (200) of more than one RF generator (100) to
For the RF electric power point of multipair output end (311,312,321,322,313) the distribution electric power of load (L1, L2, L3, L4, L5) connection
With device characterized by comprising
First ramification point (P1), in a pair from the matching network (200) disagreement；
Multipair output end ramification point (Pt), as the multipair output end (311,312,321,322,313), disagreement is pairs of；
(n-1) extremely described multipair from first ramification point (P1) to n-th ramification point (Pn) of (natural number that n is 2 or more)
Output end ramification point (Pt) successively disagreement 1 time or more；
Output end reactance component (452,453) is installed on each output end ramification point (Pt) and first output end
Between (311,321)；
Output end variable element (420,430), one end are connected to the output end reactance component (452,453) and described first
Between output end (311,321), other end ground connection；
It is defeated to be installed on described first in addition between first ramification point (P1) and the second ramification point (P2) for n-th capacitor
It is each to certain one in the n-th ramification point (Pn) and (n-1) point between outlet (311,321) and each output end ramification point (Pt)
Between bifurcation point (Pn-1)；
N-th variable condenser, in addition between first ramification point (P1) and the second ramification point (P2), one end is connected to institute
It states between the n-th capacitor and n-th ramification point (Pn), other end ground connection；
Reactance component (451) is installed on certain one and first ramification point (P1) in the pair of second ramification point (P2)
Between；
Root variable element (410), one end are connected between the reactance component (451) and second ramification point (P2), separately
One end ground connection.
16. a kind of RF electric power distribution system, as from the matching network (200) for being connected with more than one RF generator (100)
To the RF electric power of multipair output end (311,312,321,322,313) the distribution electric power connected for load (L1, L2, L3, L4, L5)
Distributor characterized by comprising
First ramification point (P1), in a pair from the matching network (200) disagreement；
Multipair output end ramification point (Pt), as the multipair output end (311,312,321,322,313), disagreement is pairs of；
(n-1) extremely described multipair from first ramification point (P1) to n-th ramification point (Pn) of (natural number that n is 2 or more)
Output end ramification point (Pt) successively disagreement 1 time or more；
Output end reactance component (452,453) is installed on each output end ramification point (Pt) and first output end
Between (311,321)；
Output end variable element (420,430), one end are connected to the output end reactance component (452,453) and described first
Between output end (311,321), other end ground connection；
N-th capacitor is installed on each between first output end (311,321) and each output end ramification point (Pt)
To in the n-th ramification point (Pn) between certain one and (n-1) ramification point (Pn-1)；
N-th variable condenser, one end are connected between n-th capacitor and n-th ramification point (Pn), another termination
Ground.
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| CN110913558A (en) * | 2019-12-10 | 2020-03-24 | 四川大学 | High-efficiency radio frequency plasma discharge device under near space air pressure condition |
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| CN1358339A (en) * | 2000-01-20 | 2002-07-10 | 凯特莱恩工厂股份公司 | Circuit for dividing or bringing together high-frequency performances |
| CN103026800A (en) * | 2010-07-30 | 2013-04-03 | 株式会社普来马特 | Rf power distribution device and rf power distribution method |
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| KR20190063999A (en) | 2019-06-10 |
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